CN113932843B - Sensor testing cavity for controlling temperature, humidity and pressure and application method - Google Patents
Sensor testing cavity for controlling temperature, humidity and pressure and application method Download PDFInfo
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- CN113932843B CN113932843B CN202111445202.3A CN202111445202A CN113932843B CN 113932843 B CN113932843 B CN 113932843B CN 202111445202 A CN202111445202 A CN 202111445202A CN 113932843 B CN113932843 B CN 113932843B
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- 238000012360 testing method Methods 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000004891 communication Methods 0.000 claims abstract description 8
- 239000000523 sample Substances 0.000 claims description 50
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 230000008093 supporting effect Effects 0.000 claims description 11
- 238000005057 refrigeration Methods 0.000 claims description 10
- 238000005452 bending Methods 0.000 claims description 7
- 230000005674 electromagnetic induction Effects 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 4
- 229910002027 silica gel Inorganic materials 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 description 11
- 238000013461 design Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005485 electric heating Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010705 motor oil Substances 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001595 contractor effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
- G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means
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- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Abstract
The invention discloses a sensor testing cavity for controlling temperature, humidity and pressure and an application method thereof, comprising the following steps: the test cavity is internally provided with a platform for placing a sensor sample to be tested; the cover body is arranged above the testing cavity, and a transparent window is arranged at a position matched with the platform; a first heating mechanism disposed below the platform; the sensor group is arranged in the test cavity to obtain relevant parameters corresponding to humidity, temperature and pressure; a controller in communication with the sensor group; a vacuum pump matched with the test cavity; humidifier, mechanical pump, air compressor with test chamber matched with. The invention provides a sensor testing cavity for controlling temperature, humidity and pressure and an application method thereof, which provide the online detection requirements of a plurality of environment scenes and ensure the stability and reliability of detection signals.
Description
Technical Field
The invention relates to the field of equipment detection. More particularly, the invention relates to a sensor test cavity for controlling temperature, humidity and pressure and an application method thereof.
Background
In the practical application of the sensor, the temperature, humidity and air pressure in the environment all affect the output signal of the sensor, so that errors and even mistakes are caused. In order to comprehensively improve the stability of the sensor, the performance rules of the sensor under different temperature, humidity and air pressure environments need to be mastered, so that the output signal is ensured to be real and reliable.
In the prior art, a set of multi-scene testing device specially applied to detection of sensor output signals does not exist, so that the detection effect of the sensor cannot meet the requirements.
Disclosure of Invention
It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
To achieve these objects and other advantages and in accordance with the purpose of the invention, a sensor test chamber for controlling temperature, humidity and pressure is provided, comprising:
The test cavity is internally provided with a platform for placing a sensor sample to be tested;
The cover body is arranged above the testing cavity, and a transparent window is arranged at a position matched with the platform;
a first heating mechanism disposed below the platform;
the sensor group is arranged in the test cavity to obtain relevant parameters corresponding to humidity, temperature and pressure;
a controller in communication with the sensor group;
a vacuum pump matched with the test cavity;
A humidifier, a mechanical pump and an air compressor which are matched with the test cavity;
The controller is in communication connection with the humidifier, the first heating mechanism, the mechanical pump, the vacuum pump and the air compressor.
Preferably, the device further comprises a microscope matched with the window and a display matched with the controller or the external tester;
The microscope is rotatably arranged on the upright post through the first installation component which is matched with the microscope, and the display is arranged on the upright post through the second installation component which is matched with the microscope.
Preferably, the first mounting assembly is configured to include:
The limiting rings are sleeved on the upright post, and each limiting ring is fixed on the upright post through at least one first screw arranged on the side wall;
The fixing sleeve is arranged between the adjacent limiting rings, two fixing plates matched with the microscope fixing end extend on the fixing sleeve, and the fixing plates are connected with the fixing end through the matched fixing shaft and/or a second screw;
The thrust bearing is arranged between the end faces of the fixing plate and the fixing end, a plurality of arc-shaped protrusions are arranged on one side of the thrust bearing, which is matched with the fixing end, and arc-shaped limiting grooves matched with the arc-shaped protrusions are formed in the fixing end.
Preferably, the second mounting assembly is configured to include:
Two support plates matched with the upper end and the lower end of the display, wherein each support plate is provided with a bending groove for the display to go deep;
two connecting plates for connecting the supporting plates into an integrated structure;
At least one mounting plate cooperating with the support plate or the connection plate;
Wherein, the bending groove is internally provided with a matched silica gel layer, and the connecting plate, the supporting plate and the mounting plate are provided with matched strip-shaped holes or fixing holes;
the mounting plate is provided with a mounting ring at one side matched with the upright post, and a matched hollow rubber layer is arranged on the inner side wall of the mounting ring;
The mounting ring is fixed on the upright post through a third screw arranged on the side wall.
Preferably, four probes matched with the sensor sample to be detected are arranged above the platform;
Wherein, each probe is connected with an external executing mechanism through a matched quartz rod;
The inner side wall of the test cavity is provided with a first through hole into which an external mechanism can extend, the inner side wall of the test cavity is provided with a second through hole through which a temperature sensor and a pressure sensor data wire in the sensor pass, and the inner side wall of the test cavity is provided with a third through hole matched with the temperature sensor;
The mechanical pump, the humidifier and the third through hole are communicated through a three-way pipe, and the humidity sensor is arranged on one side close to the third through hole.
Preferably, each external actuating mechanism is provided with a triaxial interface connected with an external tester, and the outer edge of the testing cavity is arranged on a flange matched with the cover body.
Preferably, a magnetic control circulation assembly communicated with the cavity is arranged at the rear end of the humidifier;
the second heating mechanism is arranged on the air inlet side of the cavity and matched with external air inlet equipment;
a refrigeration mechanism adjacent to the second heating mechanism;
The magnetic control fan is matched with the air outlet side of the cavity;
The fan comprises a fan body, a fan shaft, a fan blade, a permanent magnet, a cavity and an electromagnetic induction coil, wherein the fan shaft of the magnetic control fan and the permanent magnet which enables the fan blade to be suspended are respectively arranged in the fan blade, and the electromagnetic induction coil matched with the fan is arranged outside the cavity.
A method of testing a cavity using a sensor, comprising:
Firstly, placing a sensor sample to be tested on a platform, and sealing a test cavity through a cover body;
Step two, adjusting the position of each probe in space through an actuating mechanism under a microscope so as to enable the positions of the pins of the control needle and the sensor to be matched;
thirdly, carrying out online detection on output signals of the sensor sample to be detected by an external tester connected with each probe;
And fourthly, when the output signal of the sensor sample to be detected is detected by the external tester, and after the temperature, humidity and air pressure signals of the test cavity are transmitted into the controller through the sensor group, the controller controls the corresponding first heating mechanism, the humidifier and the mechanical pump through comparing target values so as to adjust the temperature, humidity and air pressure in the test cavity, so that the test cavity is in the temperature, humidity and pressure conditions matched with the preset test target.
Preferably, in the fourth step, the method of adjusting the temperature, humidity and air pressure in the test chamber is configured to include:
When the humidity in the test cavity is lower than a first set value, starting the humidifier, and when the humidity is higher than a second set value, reducing the humidity in the test cavity in an exhaust refilling mode;
When the temperature of the test cavity is lower than a third set value, starting a first heating mechanism; stopping heating when the temperature of the test cavity is higher than a third set value;
When the temperature of the test cavity is lower than a fourth set value, closing the refrigeration valve, otherwise, starting the refrigeration valve;
And when the pressure in the test cavity is greater than 100kPa and the pressure is higher than a seventh set value, automatically opening the exhaust valve, and otherwise, starting the vacuum pump.
The invention at least comprises the following beneficial effects: the invention provides a device special for detecting sensor output signals, which can provide the online detection requirements of a plurality of environment scenes and ensure the stability and reliability of detection signals.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic diagram of a sensor testing chamber for controlling temperature, humidity and pressure in accordance with one embodiment of the present invention;
FIG. 2 is a schematic view of a microscope and a display screen according to another embodiment of the present invention;
FIG. 3 is an enlarged schematic view of the first mounting assembly of FIG. 2 mated with a microscope;
FIG. 4 is a schematic cross-sectional view of a second mounting assembly of the present invention;
FIG. 5 is a schematic diagram of a magnetically controlled cycle assembly of the present invention;
FIG. 6 is a schematic cross-sectional view of the magnetron fan of FIG. 5;
FIG. 7 is a block diagram of the system of the present invention in actual application;
fig. 8 is a simplified system operation diagram of fig. 7 when applied.
Detailed Description
The present invention is described in further detail below with reference to the drawings to enable those skilled in the art to practice the invention by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
It should be noted that, in the description of the present invention, the orientation or positional relationship indicated by the term is based on the orientation or positional relationship shown in the drawings, which are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "engaged/connected," "connected," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, may be a detachable connection, or may be an integral connection, may be a mechanical connection, may be an electrical connection, may be a direct connection, may be an indirect connection via an intermediary, may be a communication between two elements, and for one of ordinary skill in the art, the specific meaning of the terms in this disclosure may be understood in a specific case.
In order to realize the calibration of sensor signals under multiple environmental factors, the invention provides a novel sensor testing cavity which can realize the control of temperature, humidity and air pressure in the environment, and the cavity mainly comprises a testing cavity, a testing platform, a microscope, a mechanical pump, a compressor, a gas mixing system (commercial), a control box, a temperature sensor, a humidity sensor, a pressure sensor, an equipment support, an equipment connecting cable and a pipeline. The test platform is also provided with a probe station which is connected with an external test instrument, and the microscope is also provided with a fluorescent screen, so that the sensor can realize on-line detection.
Fig. 1 and 8 show an implementation form of a sensor testing cavity for controlling temperature, humidity and pressure according to the present invention, which includes:
a test cavity 1, in which a platform 2 for placing a sensor sample to be tested is arranged;
A cover (not shown) disposed above the test chamber, and provided with a transparent window (not shown) at a position matching with the platform, for observing the detection condition inside the sensor;
The first heating mechanism is arranged below the platform and is set as a heating coil (not shown), and a matched temperature sensor is arranged on one side of the platform so as to detect the ambient humidity inside the test cavity in real time;
The sensor group is arranged in the test cavity to obtain relevant parameters of corresponding humidity, temperature and pressure, and comprises a temperature sensor 3, a humidity sensor 4 and a pressure sensor 5, wherein the temperature sensor is arranged below the square sample table and is connected with the temperature module in actual application; the humidity sensors are respectively arranged near the air inlet and the air outlet of the experiment control cavity;
A controller 6 in communication with the sensor group;
A vacuum pump 33 cooperating with the test chamber;
The humidifier 7, the mechanical pump 8 and the air compressor 9 (also referred to as a gas mixing system) which are matched with the testing cavity are used for realizing the circulation inside the cavity and are used for controlling the gas to circularly flow in the testing cavity. The outside of the circulation control system is completely coated with heat insulation materials, so that the temperature of the whole system is not influenced by external environment;
the controller is in communication connection with the humidifier, the first heating mechanism, the mechanical pump, the vacuum pump and the air compressor, the whole testing cavity and the pipeline are connected, and the whole covered heat-insulating sponge reduces the influence of the external environment on the measuring cavity.
As shown in fig. 2, in another example, the device further comprises a microscope 10 matched with the window and a display 11 matched with the controller or the external tester, the window is arranged on the cover of the testing cavity, the microscope and the fluorescent screen are arranged above the window, the position of the probe inserted on the sensor pin can be observed and adjusted, the current information of the controller or the detection information of the external tester can be integrally conveyed to the display screen through the display screen for display, the observation and the operation are convenient, and the matched display screen can be arranged on the microscope as required, so that the device is convenient to observe and operate;
Wherein, the microscope is rotatably arranged on the upright post 13 through the first installation component 12 which is matched with the display, the display is arranged on the upright post through the second installation component 14 which is matched with the display, and the microscope and the display screen are supported and limited through the upright post and the installation component.
2-3, In another example, the first mounting assembly is configured to include:
The limiting rings 15 are sleeved on the stand column, each limiting ring is fixed on the stand column through at least one first screw (not shown) arranged on the side wall, and the limiting rings are used for supporting the position of the fixing sleeve so that the fixing sleeve has a certain rotation allowance, and therefore adjustment of the matching angle and the position of the microscope is facilitated;
The fixing sleeve 16 is arranged between the adjacent limiting rings, two fixing plates 17 matched with the fixed ends of the microscope extend on the fixing sleeve, the fixing plates are connected with the fixed ends through the matched fixing shafts 18 and/or the second screws 19, and the spatial supporting effect of the microscope is ensured and the spatial structural stability of the microscope is ensured through the design of the upper fixing plate and the lower fixing plate in the structure; the thrust bearing 20 is arranged between the end faces of the fixed plate and the fixed end, a plurality of arc-shaped protrusions 21 are arranged on one side of the thrust bearing matched with the fixed end, arc-shaped limiting grooves 22 matched with the arc-shaped protrusions are arranged on the fixed end, the thrust bearing has the effects that the fixed end and the fixed plate of the microscope can be fixed on the two end faces of the thrust bearing through the fixed shaft and/or the second screw respectively, the microscope can rotate the position of the microscope on the space according to the requirement, the alignment observation with a window is convenient, the microscope is pushed away after the observation is convenient, the interference and the connection stability between structural members are guaranteed, and the connection face cannot be damaged during connection and movement.
As in fig. 1,4, in another example, the second mounting assembly is configured to include:
Two supporting plates 23 matched with the upper and lower ends of the display, wherein each supporting plate is provided with a bending groove 24 for the display to go deep, the bending grooves are used for accommodating the upper and lower ends of the display screen, and meanwhile, the weight of the display screen is controllable through the structural design of the supporting plates and the connecting plates, so that the stability of the structure in space is better;
two connection plates 25 for connecting the support plates into an integral structure;
At least one mounting plate 26, which is matched with the support plate or the connecting plate, and is used for forming the support plate and the connecting plate into an integrated structure so as to be fixed on the upright post;
The bending groove is internally provided with a matched silica gel layer (not shown), the friction coefficient is increased through the design of the silica gel layer, the upper end and the lower end of the display screen are protected simultaneously, damage to the display screen caused by too tight connection degree is prevented, the connecting plate, the supporting plate and the mounting plate are provided with matched strip-shaped holes 28 or fixing holes, and the combination position between accessories can be adjusted according to the requirement through the design of the matching of the strip-shaped holes and the mounting holes so as to adapt to the height of the display screen and the interval distance between the accessories and the upright posts;
The mounting plate is provided with a mounting ring 27 at one side matched with the upright post, a matched hollow rubber layer is arranged on the inner side wall of the mounting ring, the connection between the equipment piece and the upright post is completed through the mounting ring, and the hollow rubber layer is further used for enabling the equipment piece to have larger friction coefficient and deformation capacity so as to ensure that the gap in sleeving is controllable;
The mounting ring is fixed on the upright post through a third screw arranged on the side wall, and the fixing ring is abutted against the upright post through the third screw.
In another example, as shown in fig. 1, four probes 29 matched with the sensor sample to be measured are arranged above the platform, and each probe is matched with a sensor pin in practical application to complete acquisition and transmission of sensor signals, and the use of the probes belongs to the prior art, so that the description is not given here;
The probe is connected with an external executing mechanism through a matched quartz rod, the external executing mechanism has the effects that four paths of probes are arranged above a platform of a sample testing platform, the probes can be driven to move up and down, left and right and back above a sensor, so that the matching contact effect of the probes and pins meets the use requirement, furthermore, the probes are matched with the probes to enable the whole to be called as a probe platform according to the requirement, the front end of the probe platform adopts the quartz rod, supporting rods in the four paths of probes use the quartz rod, the working temperature difference design of a testing cavity is larger, if a metal rod is used, the probes at the front end are in contact with electrodes of the sensor in an untight manner due to the thermal expansion and contraction effect, so that the measurement is influenced, dan Yinggan designed by the cavity has a thermal expansion coefficient far smaller than that of a metal material, deformation hardly occurs in the test, and therefore the influence of the thermal expansion change of a testing environment on the measurement is greatly reduced, and the external executing mechanism can select the adoption of a knob to be matched with a gear according to the requirement to realize the adjustment of the position of equipment;
The inner side wall of the test cavity is provided with a first through hole into which an external mechanism can extend, the inner side wall of the test cavity is provided with a second through hole through which a temperature sensor and a pressure sensor data wire in the sensor pass, and the inner side wall of the test cavity is provided with a third through hole matched with the temperature sensor;
The mechanical pump, the humidifier and the third through hole are communicated through a three-way pipe, and the humidity sensor is arranged on one side close to the third through hole.
In another example, each external executing mechanism is provided with a triaxial interface connected with an external tester, the rear end of the probe station is provided with the triaxial interface, so that connection and integration of a data cable are facilitated, and signals transmitted by the probes are effectively transmitted to the external tester.
In another example, the outer edge of the test cavity is arranged on a flange matched with the cover body, and the flange is used for being matched with the cover body to realize connection and fixation of the test cavity and the cover body, so that the stability of the cavity structure is ensured when the interior is emptied or exhausted.
In another example, as shown in fig. 5, a magnetic control circulation assembly communicated with the cavity is arranged at the rear end of the humidifier;
the second heating mechanism 30 is arranged on the air inlet side of the cavity and matched with external air inlet equipment;
a cooling mechanism 31 adjacent to the second heating mechanism;
a magnetically controlled fan 32 associated with the air outlet side of the chamber;
In the scheme, the temperature control in the sensor testing cavity is provided with an air circulation component besides the heating function of the sample table, and the humidifier is provided with an air circulation component. An electric heating net is arranged in the cavity, the mixed gas can be heated after passing through the cavity, and the heating power is controlled by a temperature sensor of the system; and a refrigerating area is arranged at the same time, refrigerating is performed through a compression pipe, and the temperature of the whole cavity is controlled. In order to accelerate the gas circulation speed in the cavity, a magnetic control fan is designed at the circle in the figure to help the gas in the cavity flow quickly, and the speed of the fan is controlled by the rotating speed of the magnetic rotor outside the cavity. A cross-sectional view of the fan is shown in fig. 6.
The reason for designing the magnetic control fan is that the sensor test cavity is designed for testing the performance of the sensor under different environments, other polluted gas cannot exist in the cavity, if a motor fan is used, lubricating engine oil can pollute the air in the cavity when the fan rotates, and in addition, if a high-humidity and high-temperature environment is needed, the service life of the motor can be reduced. In the invention, a magnetic control fan is designed, a permanent magnet is arranged on the shaft of the fan, and the permanent magnet is also arranged in the fan blade, so that the fan blade is suspended. The electromagnetic induction coil is used outside the cavity and is close to the internal fan, and the internal fan is driven to rotate through the rotation of the external magnetic coil, so that the air flow in the cavity is regulated.
A method of testing a cavity using a sensor, comprising:
Firstly, placing a sensor sample to be tested on a platform, and sealing a test cavity through a cover body;
Step two, adjusting the position of each probe in space through an actuating mechanism under a microscope so as to enable the positions of the pins of the control needle and the sensor to be matched;
thirdly, carrying out online detection on output signals of the sensor sample to be detected by an external tester connected with each probe;
And fourthly, when the output signal of the sensor sample to be detected is detected by the external tester, and after the temperature, humidity and air pressure signals of the test cavity are transmitted into the controller through the sensor group, the controller controls the corresponding first heating mechanism, the humidifier and the mechanical pump through comparing target values so as to adjust the temperature, humidity and air pressure in the test cavity, so that the test cavity is in the temperature, humidity and pressure conditions matched with the preset test target.
In order to realize the calibration work of sensor signals under the environment factors, a novel sensor test system as shown in fig. 7 is designed, and the temperature, humidity and air pressure can be controlled. The experimental operation cavity is also provided with a probe station which is connected with an external test instrument, and the microscope is also provided with a fluorescent screen, so that the on-line detection and trial observation of the sensor can be realized. The mixed gas system is controlled by air pressure according to experimental requirements, mixed gas is prepared out and is input into the circulating system, and the control box controls the circulating system, the refrigerating system and the vacuum system to adjust the temperature, the humidity and the air pressure in the whole chamber according to the specific environment (temperature, humidity and air pressure) of equipment of a user, so that the environment in the experimental control cavity meets the user requirements. At this point the user can use the probe station to perform performance testing on the sensor.
Description of the control of the internal environment of the test chamber during the test of the test chamber:
1. Device humidity control
When the humidity of the device is lower than a set value, starting the humidifier;
when the humidity of the device is too high, the requirement of reducing the humidity of the device is achieved by means of exhaust gas refilling;
2. Device temperature control
Heating mode: when the temperature of the device is lower than a set value, starting electric heating; stopping electric heating when the temperature of the device is higher than a set value;
Cooling mode: when the temperature of the device is lower than a set value, closing the refrigeration valve; when the temperature of the device is higher than a set value, opening a refrigeration valve;
3. device pressure control
When the pressure is higher than 100kPa, if the pressure is higher than a set value, automatically opening the exhaust valve;
when the pressure is less than 100kPa, if the pressure is higher than the set value, starting the vacuum pump;
4. Workbench temperature control
Heating mode: controlling electric heating output through a ratio regulator;
cooling mode: controlling the output of the refrigeration valve through a ratio regulator;
The system working diagram is shown in fig. 8, and the temperature sensor is arranged below the square sample table and is connected with the temperature module; the humidity sensors are respectively arranged near the air inlet and the air outlet of the experiment control cavity.
In the gas circulation channel in the experiment control chamber, the porous pipeline is formed by a fused quartz glass tube, the purpose of the porous structure is to enable the air flow to smoothly and uniformly flow, the influence on the sensor test is reduced, and the fused quartz material is not easily affected by temperature compared with a metal tube, so that deformation occurs.
The circulating system is used for controlling the gas to circularly flow in the testing cavity and comprises a humidifier, the humidity in the system can be changed according to the instruction of the controller, and meanwhile, the heating mechanism and the refrigerating mechanism can be matched to accurately control the quality of the gas circularly flowing in the testing cavity. The outside of the circulation control system is completely coated with heat insulation materials, so that the temperature of the whole system is not influenced by external environment. The circulation system is controlled by a magnetic air fan, so that the pollution of organic matters such as engine oil to the cavity is avoided.
The experiment is controlled the cavity and is the test cavity, including four windows that become 60 degrees contained angles, installed four probe platforms, every probe platform all can be from top to bottom, control back and forth movement, connects the sensor in the cavity, and the outside is connected with test instrument, realizes sensor performance measurement.
The vacuum pump is mainly used for controlling the air pressure in the cavity.
The controller is mainly used for controlling the temperature, the humidity and the air pressure of the experimental control cavity, the required temperature, humidity and air pressure values can be set through the touch screen, the controller is connected with the equipment in a mode of aviation plug quick connectors, the quick assembly and disassembly of the equipment can be realized, and the connection layout of the connectors is as follows:
joint a: a circulation system motor and a humidifier;
joint B: the circulation system is electrically heated;
Joint C: a cavity workbench;
Joint D: a refrigeration system;
joint E: a cavity sensor;
joint F: a vacuum pump;
Joint G: an exhaust valve;
Examples: temperature and humidity and pressure control test record
Test condition 1: temperature set point: -15 ℃ (normal atmospheric pressure);
Test result 1: temperature: -14.8 ℃ humidity: 97.4%;
Test condition 2: temperature set point: 98 ℃; (normal atmospheric pressure);
Test result 2: temperature: 98.1 ℃;
test condition 3: temperature set point: 50 ℃; humidity set point: 50%; (normal atmospheric pressure);
Test result 3: temperature: humidity at 50.2 ℃): 49.7%;
test condition 4: humidity set point: 3%;
Test result 4: humidity: 3.5%;
Test condition 5: humidity set point: 98 percent;
Test result 5: humidity: 98.5%;
Test condition 6: pressure set point: 0.01kPa;
test result 6: pressure: 0.01 kPa;
Test condition 7: pressure set point: 50kPa;
test result 7: pressure: 50.83kPa;
Test condition 8: pressure set point: 120kPa;
Test result 8: pressure: 119.71kPa;
The above is merely illustrative of a preferred embodiment, but is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
The number of equipment and the scale of processing described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be readily apparent to those skilled in the art.
Although embodiments of the invention have been disclosed above, they are not limited to the use listed in the specification and embodiments. It can be applied to various fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. Therefore, the invention is not to be limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (6)
1. The utility model provides a sensor test cavity to temperature and humidity and pressure control which characterized in that includes:
The test cavity is internally provided with a platform for placing a sensor sample to be tested;
The cover body is arranged above the testing cavity, and a transparent window is arranged at a position matched with the platform;
a first heating mechanism disposed below the platform;
the sensor group is arranged in the test cavity to obtain relevant parameters corresponding to humidity, temperature and pressure;
a controller in communication with the sensor group;
a vacuum pump matched with the test cavity;
A humidifier, a mechanical pump and an air compressor which are matched with the test cavity;
The controller is in communication connection with the humidifier, the first heating mechanism, the mechanical pump, the vacuum pump and the air compressor;
The microscope is matched with the transparent window, and the display is matched with the controller or the external tester;
The microscope is rotatably arranged on the upright post through the matched first mounting assembly, and the display is arranged on the upright post through the matched second mounting assembly;
the first mounting assembly is configured to include:
The limiting rings are sleeved on the upright post, and each limiting ring is fixed on the upright post through at least one first screw arranged on the side wall;
The fixed sleeve is arranged between the adjacent limiting rings, two fixed plates matched with the fixed end of the microscope extend on the fixed sleeve, and the fixed plates are connected with the fixed end through the matched fixed shaft and/or a second screw;
a thrust bearing is arranged between the end surfaces of the fixed plate and the fixed end, one side of the thrust bearing matched with the fixed end is provided with a plurality of arc-shaped protrusions, and the fixed end is provided with arc-shaped limiting grooves matched with the arc-shaped protrusions;
The second mounting assembly is configured to include:
Two support plates matched with the upper end and the lower end of the display, wherein each support plate is provided with a bending groove for the display to go deep;
two connecting plates for connecting the supporting plates into an integrated structure;
At least one mounting plate cooperating with the support plate or the connection plate;
Wherein, the bending groove is internally provided with a matched silica gel layer, and the connecting plate, the supporting plate and the mounting plate are provided with matched strip-shaped holes or fixing holes;
the mounting plate is provided with a mounting ring at one side matched with the upright post, and a matched hollow rubber layer is arranged on the inner side wall of the mounting ring;
The mounting ring is fixed on the upright post through a third screw arranged on the side wall.
2. The sensor testing cavity for controlling temperature, humidity and pressure according to claim 1, wherein four probes matched with the sensor sample to be tested are arranged above the platform;
Wherein, each probe is connected with an external executing mechanism through a matched quartz rod;
The inner side wall of the test cavity is provided with a first through hole into which an external mechanism can extend, the inner side wall of the test cavity is provided with a second through hole through which a temperature sensor and a pressure sensor data wire in the sensor pass, and the inner side wall of the test cavity is provided with a third through hole matched with the temperature sensor;
The mechanical pump, the humidifier and the third through hole are communicated through a three-way pipe, and the humidity sensor is arranged on one side close to the third through hole.
3. The sensor testing cavity for controlling temperature, humidity and pressure according to claim 2, wherein each external actuator is provided with a triaxial interface connected with an external tester;
The outer edge of the test cavity is arranged on a flange matched with the cover body.
4. The sensor testing cavity for controlling temperature, humidity and pressure according to claim 1, wherein a magnetic control circulation assembly communicated with the cavity is arranged at the rear end of the humidifier;
the second heating mechanism is arranged on the air inlet side of the cavity and matched with external air inlet equipment;
a refrigeration mechanism adjacent to the second heating mechanism;
The magnetic control fan is matched with the air outlet side of the cavity;
The fan comprises a fan body, a fan shaft, a fan blade, a permanent magnet, a cavity and an electromagnetic induction coil, wherein the fan shaft of the magnetic control fan and the permanent magnet which enables the fan blade to be suspended are respectively arranged in the fan blade, and the electromagnetic induction coil matched with the fan is arranged outside the cavity.
5. A method of using the sensor test chamber of any one of claims 1-4, comprising:
Firstly, placing a sensor sample to be tested on a platform, and sealing a test cavity through a cover body;
Step two, adjusting the position of each probe in space through an actuating mechanism under a microscope so as to enable the positions of the pins of the control needle and the sensor to be matched;
thirdly, carrying out online detection on output signals of the sensor sample to be detected by an external tester connected with each probe;
And step four, when the external tester detects the output signal of the sensor sample to be tested, and after the temperature, humidity and air pressure signals of the testing cavity are transmitted into the controller through the sensor group, the controller controls the corresponding first heating mechanism, humidifier and mechanical pump through comparing target values so as to adjust the temperature, humidity and air pressure in the testing cavity.
6. The method of using a sensor test chamber of claim 5, wherein in step four, the method of adjusting temperature, humidity, and air pressure within the test chamber is configured to include:
When the humidity in the test cavity is lower than a first set value, starting the humidifier, and when the humidity is higher than a second set value, reducing the humidity in the test cavity in an exhaust refilling mode;
When the temperature of the test cavity is lower than a third set value, starting a first heating mechanism; stopping heating when the temperature of the test cavity is higher than a third set value;
When the temperature of the test cavity is lower than a fourth set value, closing the refrigeration valve, otherwise, starting the refrigeration valve;
And when the pressure in the test cavity is greater than 100kPa and the pressure is higher than a seventh set value, automatically opening the exhaust valve, and otherwise, starting the vacuum pump.
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1567686A (en) * | 1967-06-01 | 1969-04-08 | ||
| CN201698082U (en) * | 2010-06-22 | 2011-01-05 | 中国工程物理研究院激光聚变研究中心 | Repeatedly positioning microscope stand |
| CN203239328U (en) * | 2013-03-13 | 2013-10-16 | 中国石油天然气股份有限公司 | Two-dimensional microcosmic visualization simulation experiment device |
| CN203849497U (en) * | 2014-06-07 | 2014-09-24 | 宁波华光精密仪器有限公司 | Slow slide mechanism of stereoscopic microscope |
| CN107643104A (en) * | 2017-10-30 | 2018-01-30 | 佛山科学技术学院 | A kind of multipurpose test system controlled with high/low temperature and atmosphere |
| CN207301256U (en) * | 2017-09-11 | 2018-05-01 | 马步智 | A kind of semiconductor device for testing functions based on electromechanical integration |
| CN108489874A (en) * | 2018-06-08 | 2018-09-04 | 浙江工业大学 | A kind of drum-type irregular shape sediment sorting three dimensional taest device and its test method |
| CN108872050A (en) * | 2018-06-28 | 2018-11-23 | 湘潭大学 | A kind of integrated environment analog machine |
| CN109470743A (en) * | 2018-11-08 | 2019-03-15 | 西南大学 | A kind of gas sensor characteristic test system of multiple physical field coupling environment |
| CN210442573U (en) * | 2019-11-07 | 2020-05-01 | 彭炜博 | Adjusting bracket of photographing microscope |
| CN112394145A (en) * | 2020-11-26 | 2021-02-23 | 东莞市升微机电设备科技有限公司 | Low-pressure VOC (volatile organic compound) test device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9389129B2 (en) * | 2011-11-25 | 2016-07-12 | Kamal Mahajan | Device feedback sensor testing methodology for humidity and temperature probes |
-
2021
- 2021-11-30 CN CN202111445202.3A patent/CN113932843B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1567686A (en) * | 1967-06-01 | 1969-04-08 | ||
| CN201698082U (en) * | 2010-06-22 | 2011-01-05 | 中国工程物理研究院激光聚变研究中心 | Repeatedly positioning microscope stand |
| CN203239328U (en) * | 2013-03-13 | 2013-10-16 | 中国石油天然气股份有限公司 | Two-dimensional microcosmic visualization simulation experiment device |
| CN203849497U (en) * | 2014-06-07 | 2014-09-24 | 宁波华光精密仪器有限公司 | Slow slide mechanism of stereoscopic microscope |
| CN207301256U (en) * | 2017-09-11 | 2018-05-01 | 马步智 | A kind of semiconductor device for testing functions based on electromechanical integration |
| CN107643104A (en) * | 2017-10-30 | 2018-01-30 | 佛山科学技术学院 | A kind of multipurpose test system controlled with high/low temperature and atmosphere |
| CN108489874A (en) * | 2018-06-08 | 2018-09-04 | 浙江工业大学 | A kind of drum-type irregular shape sediment sorting three dimensional taest device and its test method |
| CN108872050A (en) * | 2018-06-28 | 2018-11-23 | 湘潭大学 | A kind of integrated environment analog machine |
| CN109470743A (en) * | 2018-11-08 | 2019-03-15 | 西南大学 | A kind of gas sensor characteristic test system of multiple physical field coupling environment |
| CN210442573U (en) * | 2019-11-07 | 2020-05-01 | 彭炜博 | Adjusting bracket of photographing microscope |
| CN112394145A (en) * | 2020-11-26 | 2021-02-23 | 东莞市升微机电设备科技有限公司 | Low-pressure VOC (volatile organic compound) test device |
Non-Patent Citations (5)
| Title |
|---|
| Supine position decreases the ability of the nose to warm and humidify air;Assanasen, P;JOURNAL OF APPLIED PHYSIOLOGY;20011201;91(6);全文 * |
| 基于铂电阻传感器的温度计量检定系统;刘宇;气象水文海洋仪器;20150915;第32卷(第2期);全文 * |
| 多尺度摩擦学材料的性能研究;程忠;CNKI优秀硕士学位论文全文库工程科技Ⅰ辑;20150415;第2015卷(第4期);全文 * |
| 多铁纳米MEMS传感器性能测试系统设计;冯春鹏;CNKI优秀硕士学位论文全文库信息科技辑;20170815;第2017卷(第8期);全文 * |
| 多铁纳米MEMS压力传感器性能测试系统设计;冯春鹏;赵智增;;山西电子技术;20160615(第03期);全文 * |
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