CN113917792A - Workpiece platform moving device - Google Patents
Workpiece platform moving device Download PDFInfo
- Publication number
- CN113917792A CN113917792A CN202111110517.2A CN202111110517A CN113917792A CN 113917792 A CN113917792 A CN 113917792A CN 202111110517 A CN202111110517 A CN 202111110517A CN 113917792 A CN113917792 A CN 113917792A
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- platform
- piece
- fixing
- workpiece
- work piece
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
Abstract
The invention relates to the technical field of photoetching machines, and discloses a workpiece table moving device which comprises a supporting frame, a fixed platform, a first fixed mechanism, a moving platform, a second fixed mechanism and an air floating mechanism, wherein a working table moves relative to the fixed platform or the moving platform through the air floating mechanism, and has no contact friction with a supporting surface; secondly, this work piece platform mobile device has adopted the work piece platform transfer mode that moving platform and fixed platform linked up, shortens the suspension motion stroke of work piece platform greatly to the distance of fixed platform holding surface to the moving platform holding surface, has further improved the efficiency that the work piece platform immigrated shifted out, and it is comparatively convenient to operate, has realized the long distance motion of big quality, bulky work piece platform, has reduced the possibility that the work piece platform falls the damage.
Description
Technical Field
The invention relates to the technical field of photoetching machines, in particular to a workpiece table moving device.
Background
The lithography machine is the core equipment of the integrated circuit manufacturing industry, and the workpiece table is one of the core components of the lithography machine. Along with the higher and higher degree of fineness and more complicated structure of the photoetching machine, the size and the weight of the workpiece table are also continuously increased, and the mass of the workpiece table reaches the weight of several tons at present. When the workpiece table needs to be moved out of the frame of the lithography machine and repaired or replaced, how to move the workpiece table into and out of the frame of the lithography machine quickly, safely and reliably becomes a problem to be faced.
Most of the existing workpiece table moving devices generally adopt a roller plate spring mechanism, and a roller is driven to contact with the ground through the deformation of a plate spring so as to drive a workpiece table to move; a small part of workpiece table moving devices adopt an air floatation mechanism, but the problems of long moving distance, inconvenient workpiece table control and easy falling and damage still exist.
Disclosure of Invention
The invention aims to provide a workpiece table moving device which is low in control difficulty, convenient to operate, small in workpiece table suspension movement distance and high in safety.
In order to achieve the above object, the present invention provides a workpiece stage moving apparatus, comprising:
a support frame;
the fixed platform is arranged in the support frame;
the first fixing mechanism is arranged on the supporting surface of the fixing platform and used for positioning and fixing the workpiece table;
the supporting surface of the movable platform is flush with the supporting surface of the fixed platform;
the second fixing mechanism is arranged on the supporting surface of the moving platform and used for positioning and fixing the workpiece table;
the air floatation mechanism is arranged at the bottom of the workpiece table;
the movable platform can reach a first position and a second position through movement, when the movable platform is located at the first position, the movable platform is attached to the fixed platform, and when the movable platform is located at the second position, the movable platform is located outside the supporting frame.
In some embodiments of the present application, the air floating mechanism includes a plurality of air floating portions uniformly arranged at the bottom of the workpiece stage.
In some embodiments of this application, still include magnetism and inhale piece, first electromagnetism piece and second electromagnetism piece, magnetism is inhaled the piece and is located the bottom of work piece platform is close to the position in the middle of, and is located a plurality of between the air supporting portion, first electromagnetism piece is located fixed platform's top, the second electromagnetism piece is located moving platform's top, first electromagnetism piece with the second electromagnetism piece extends along same direction, and the two is in moving platform is in looks butt when the first position.
In some embodiments of the present application, the first fixing mechanism includes a first fixing member, a second fixing member, and a locking member, the first fixing member is disposed on one side of the workpiece table in the X direction, the second fixing member is disposed on one side of the workpiece table in the Y direction, and the locking member is disposed on one side of the workpiece table away from the second fixing member.
In some embodiments of the present application, the second fixing mechanism includes a third fixing member and a fourth fixing member, the third fixing member is provided in two and is respectively provided on two sides of the workpiece table along the X direction, and the fourth fixing member is provided in two and is respectively provided on two sides of the workpiece table along the Y direction.
In some embodiments of the present application, the first fixing member and the third fixing member are both slidable in an X direction, the second fixing member and the fourth fixing member are both slidable in a Y direction, and the locking member is slidable in a predetermined direction.
In some embodiments of this application, be equipped with first position sensor and second position sensor on the braced frame, first position sensor sets up towards the X direction, is used for measuring the work piece platform is in fixed platform ascending position in the X direction, second position sensor sets up towards the Y direction, is used for measuring the work piece platform is in fixed platform ascending position in the Y direction.
In some embodiments of the present application, the first position sensors are provided in two and arranged in a Y-axis direction, and the second position sensors are provided in two and arranged in an X-axis direction.
In some embodiments of the present application, the mobile platform includes a platform body, a driving device, and a roller disposed at the bottom of the platform body, wherein the driving device is disposed on the platform body and is used for driving the roller to roll along a predetermined direction.
The invention provides a workpiece table moving device, which has the following beneficial effects compared with the prior art:
the invention provides a workpiece table moving device which comprises a supporting frame, a fixed platform, a first fixed mechanism, a moving platform, a second fixed mechanism and an air floating mechanism, wherein the fixed platform is arranged in the supporting frame; the movable platform can reach a first position and a second position through movement, when the movable platform is located at the first position, the movable platform is attached to the fixed platform, and when the movable platform is located at the second position, the movable platform is located outside the supporting frame. Based on the structure, the workbench moves relative to the fixed platform or the movable platform through the air floating mechanism, and has no contact friction with the supporting surface, so that the influence of friction loss on the flatness of the supporting surface is eliminated relative to the roller plate spring mechanism, the positioning precision of the workpiece table is ensured, and the control difficulty in the moving-in and moving-out process of the workpiece table is reduced; secondly, this work piece platform mobile device has adopted the work piece platform transfer mode that moving platform and fixed platform linked up, when needs immigration work piece platform, only need to move moving platform to the primary importance, restart air supporting mechanism and make work piece platform move and fix on the fixed platform and can accomplish and move in, that is, the suspension motion stroke of work piece platform shortens the distance of fixed platform holding surface to moving platform holding surface greatly, the efficiency that work piece platform immigration moved out has further been improved, the operation is comparatively convenient, the long distance motion of big quality, bulky work piece platform has been realized, greatly reduced the possibility that the work piece platform falls the damage because of the air supporting mechanism inefficacy. In addition, the second fixing mechanism can stably fix the workpiece table in the moving process of the moving platform to prevent the workpiece table from sliding.
Drawings
Fig. 1 is a schematic structural diagram of a workpiece stage moving device when a moving platform is at a first position according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a workpiece stage moving device when the workpiece stage is located on a fixed platform according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a mobile platform according to an embodiment of the present invention in a second position;
FIG. 4 is a schematic structural diagram of a workpiece stage according to an embodiment of the invention;
fig. 5 is a schematic structural diagram of a workpiece stage moving device according to an embodiment of the present invention.
In the figure: 1. a support frame; 11. a first position sensor; 12. a second position sensor; 2. a fixed platform; 21. a first electromagnetic member; 3. a first fixing mechanism; 31. a first fixing member; 32. a second fixing member; 33. a locking member; 4. a mobile platform; 41. a second electromagnetic member; 42. a drive device; 43. a platform body; 44. a roller; 5. a second fixing mechanism; 51. a third fixing member; 52. a fourth fixing member; 6. an air floatation mechanism; 61. an air flotation section; 7. a magnetic member; 8. a pushing device; 9. a controller; 100. a workpiece table.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It will be understood that in the description of the present application, the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application. The terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, i.e. a feature defined as "first", "second" may explicitly or implicitly include one or more of such features. Further, unless otherwise specified, "a plurality" means two or more.
It should be noted that, in the description of the present application, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
As shown in fig. 1 to 5, an embodiment of the present invention provides a workpiece stage moving apparatus, which includes a supporting frame 1, a fixed platform 2, a first fixing mechanism 3, a moving platform 4, a second fixing mechanism 5, and an air floating mechanism 6, where the fixed platform 2 is disposed in the supporting frame 1, the first fixing mechanism 3 is disposed on a supporting surface of the fixed platform 2 and is used to position and fix a workpiece stage 100, the supporting surface of the moving platform 4 is flush with the supporting surface of the fixed platform 2, the second fixing mechanism 5 is disposed on the supporting surface of the moving platform 4 and is used to position and fix the workpiece stage 100, and the air floating mechanism 6 is disposed at the bottom of the workpiece stage 100; wherein, moving platform 4 can reach first position and second position through removing, and when moving platform 4 was in the first position, moving platform 4 laminated with fixed platform 2 mutually, and when moving platform 4 was in the second position, moving platform 4 was located braced frame 1 outside.
Based on the structure, the workbench moves relative to the fixed platform 2 or the movable platform 4 through the air floating mechanism 6, and has no contact friction with the supporting surface, so that the influence of friction loss on the flatness of the supporting surface is eliminated relative to the roller 44 plate spring mechanism, the positioning precision of the workpiece table 100 is ensured, and the control difficulty in the moving-in and moving-out process of the workpiece table 100 is reduced; secondly, this work piece platform mobile device has adopted the work piece platform 100 transfer mode that moving platform 4 and fixed platform 2 link up, when needing to immigration work piece platform 100, only need to move moving platform 4 to primary importance, restart air supporting mechanism 6 and make work piece platform 100 move and fix on fixed platform 2 and can accomplish and move in, that is, the suspension motion stroke of work piece platform 100 shortens the distance of fixed platform 2 holding surface to moving platform 4 holding surface greatly, the efficiency that work piece platform 100 moved in and moved out has further been improved, it is comparatively convenient to operate, the long distance motion of work piece platform 100 of big mass, bulky has been realized, greatly reduced work piece platform 100 and has fallen the possibility of damage because of air supporting mechanism 6 became invalid. In addition, the second fixing mechanism 5 can stably fix and lock the workpiece table 100 in the moving process of the moving platform 4, so as to prevent the workpiece table from sliding.
Alternatively, as shown in fig. 4, in the present embodiment, the air floating mechanism 6 includes a plurality of air floating portions 61, and the plurality of air floating portions 61 are uniformly arranged at the bottom of the workpiece stage 100. Thus, the plurality of air floating portions 61 can suspend the workpiece stage 100 on the support surface and move smoothly when operating.
Optionally, as shown in fig. 1, in this embodiment, the workpiece stage moving device further includes a magnetic attraction member 7, a first electromagnetic member 21 and a second electromagnetic member 41, the magnetic attraction member 7 is disposed at a position near the middle of the bottom of the workpiece stage 100 and located between the air flotation portions 61, the first electromagnetic member 21 is disposed at the top of the fixed platform 2, the second electromagnetic member 41 is disposed at the top of the movable platform 4, the first electromagnetic member 21 and the second electromagnetic member 41 extend along the same direction, and the two members are abutted to each other when the movable platform 4 is at the first position. Based on this, when the first electromagnetic part 21 and the second electromagnetic part 41 are started, both of them can apply downward acting force to the magnetic attraction part 7, so as to ensure that the workpiece table 100 moves along the extending direction of the first electromagnetic part 21 and the second electromagnetic part 41, so that the workpiece table 100 is not easy to shift in the process of moving from the moving platform 4 to the fixed platform 2 or moving in the reverse direction, and damage is prevented. Preferably, the magnetic member 7 is a permanent magnet, and the first and second electromagnetic members 21 and 41 are electromagnets.
Alternatively, as shown in fig. 2, in the present embodiment, the first fixing mechanism 3 includes a first fixing member 31, a second fixing member 32 and a locking member 33, the first fixing member 31 is disposed on one side of the workpiece stage 100 along the X direction, the second fixing member 32 is disposed on one side of the workpiece stage 100 along the Y direction, and the locking member 33 is disposed on one side of the workpiece stage 100 away from the second fixing member 32. After the workpiece table 100 is moved onto the fixing table 2 in this manner, the workpiece table 100 is fixed in position in the X direction and the Y direction by the first fixing member 31, the second fixing member 32, and the lock member 33.
Alternatively, as shown in fig. 1, in the present embodiment, the second fixing mechanism 5 includes a third fixing member 51 and a fourth fixing member 52, the third fixing member 51 is provided in two and is respectively provided on both sides of the workpiece table 100 in the X direction, and the fourth fixing member 52 is provided in two and is respectively provided on both sides of the workpiece table 100 in the Y direction. Therefore, after the workpiece table 100 moves to the moving platform 4, the third fixing member 51 and the fourth fixing member 52 can fix the position of the workpiece table 100, and the workpiece table 100 is prevented from sliding in the moving process of the moving platform 4.
Alternatively, in this embodiment, the first fixing member 31 and the third fixing member 51 can both slide along the X direction, the second fixing member 32 and the fourth fixing member 52 can both slide along the Y direction, and the locking member 33 can slide along the predetermined direction. Thus, the positions of the first fixing member 31, the second fixing member 32, the third fixing member 51, the fourth fixing member 52 and the locking member 33 can be adjusted to fix the workpiece table 100 at different positions as required.
Alternatively, as shown in fig. 1, in the present embodiment, a first position sensor 11 and a second position sensor 12 are provided on the support frame 1, the first position sensor 11 is disposed toward the X direction and is used for measuring the position of the workpiece table 100 in the X direction of the fixed platform 2, and the second position sensor 12 is disposed toward the Y direction and is used for measuring the position of the workpiece table 100 in the Y direction of the fixed platform 2. Therefore, the first position sensor 11 and the second position sensor 12 can be matched with the position of the workpiece table 100 to monitor the position of the workpiece table 100, so that preliminary positioning and horizontal pose adjustment are completed, and the moving precision of the workpiece table 100 in the moving-in and moving-out work is improved.
Alternatively, as shown in fig. 1, in the present embodiment, the first position sensors 11 are provided in two and arranged in line in the Y-axis direction, and the second position sensors 12 are provided in two and arranged in line in the X-axis direction. Thus, the accuracy and reliability of position monitoring are improved.
Optionally, as shown in fig. 5, in this embodiment, the apparatus further includes a pushing device 8 and a controller 9, the pushing device 8 is provided in a plurality and is uniformly arranged around the inner wall of the supporting frame 1, the pushing device 8 is used for pushing the workpiece table 100, the controller 9 is electrically connected to the moving platform 4, the first position sensor 11, the second position sensor 12, the pushing device 8, the air floating portion 61, the first electromagnetic element 21, and the second electromagnetic element 41, and the controller 9 can control different pushing devices 8 to extend or contract a predetermined distance according to signals fed back by the first position sensor 11 and the second position sensor 12, so as to push the workpiece table 100 to a predetermined position; the controller 9 can control the start and stop of the air floating portion 61 and the first and second electromagnetic members 21 and 41 to ensure that the moving path of the workpiece table 100 is correct.
Alternatively, as shown in fig. 1 and 3, in the present embodiment, the moving platform 4 includes a platform body 43, a driving device 42, and a roller 44 disposed at the bottom of the platform body 43, wherein the driving device 42 is disposed on the platform body 43 and is used for driving the roller 44 to roll along a predetermined direction. Preferably, the controller 9 is electrically connected to the driving device 42.
The working process of the workpiece table moving device provided by the embodiment of the invention is as follows: when the workpiece table 100 needs to be moved out, the driving device 42 is controlled to move the movable platform 4 to the first position, the first fixing member 31, the second fixing member 32 and the locking member 33 are moved away, the air floating portion 61, the first electromagnetic member 21 and the second electromagnetic member 41 are started, the workpiece table 100 is moved from the fixed platform 2 to the movable platform 4, the workpiece table 100 is preliminarily fixed to the corresponding position through the third fixing member 51 and the fourth fixing member 52, the air floating portion 61, the first electromagnetic member 21 and the second electromagnetic member 41 are closed, and then the workpiece table 100 is fixedly locked to the movable platform 4; when the workpiece table 100 needs to be moved in, the driving device 42 is controlled to move the moving platform 4 to the first position, the third fixing element 51 and the fourth fixing element 52 are moved away, the air floating portion 61, the first electromagnetic element 21 and the second electromagnetic element 41 are started, the workpiece table 100 is moved from the moving platform 4 to the fixing platform 2, the position of the workpiece table 100 is monitored through the first position sensor 11 and the second position sensor 12, the pushing device 8 is controlled to push and adjust the position and the horizontal posture of the workpiece table 100 until the preset position and the preset horizontal posture are reached, the air floating portion 61 is closed, the workpiece table 100 is locked and fixed through the first fixing element 31, the second fixing element 32 and the locking element 33, the first electromagnetic element 21 and the second electromagnetic element 41 are closed, and the moving-in is completed.
To sum up, the embodiment of the present invention provides a workpiece stage moving device, which mainly comprises a supporting frame 1, a fixed platform 2, a first fixing mechanism 3, a moving platform 4, a second fixing mechanism 5 and an air floating mechanism 6, wherein the fixed platform 2 is arranged in the supporting frame 1, the first fixing mechanism 3 is arranged on a supporting surface of the fixed platform 2 and is used for positioning and fixing a workpiece stage 100, the supporting surface of the moving platform 4 is flush with the supporting surface of the fixed platform 2, the second fixing mechanism 5 is arranged on the supporting surface of the moving platform 4 and is used for positioning and fixing the workpiece stage 100, and the air floating mechanism 6 is arranged at the bottom of the workpiece stage 100; wherein, moving platform 4 can reach first position and second position through removing, and when moving platform 4 was in the first position, moving platform 4 laminated with fixed platform 2 mutually, and when moving platform 4 was in the second position, moving platform 4 was located braced frame 1 outside. Compared with the prior art, the workpiece table moving device has the advantages of low control difficulty, convenience in operation, small workpiece table suspension movement distance, high safety and the like.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (9)
1. A workpiece stage moving apparatus, comprising:
a support frame;
the fixed platform is arranged in the support frame;
the first fixing mechanism is arranged on the supporting surface of the fixing platform and used for positioning and fixing the workpiece table;
the supporting surface of the movable platform is flush with the supporting surface of the fixed platform;
the second fixing mechanism is arranged on the supporting surface of the moving platform and used for positioning and fixing the workpiece table;
the air floatation mechanism is arranged at the bottom of the workpiece table;
the movable platform can reach a first position and a second position through movement, when the movable platform is located at the first position, the movable platform is attached to the fixed platform, and when the movable platform is located at the second position, the movable platform is located outside the supporting frame.
2. The workpiece stage moving apparatus of claim 1, wherein:
the air floating mechanism comprises a plurality of air floating parts which are uniformly arranged at the bottom of the workpiece platform.
3. The workpiece stage moving apparatus according to claim 2, wherein:
still inhale piece, first electromagnetism piece and second electromagnetism piece including magnetism, magnetism is inhaled the piece and is located the bottom of work piece platform is close to the position in the middle, and is located a plurality ofly between the air supporting portion, first electromagnetism piece is located fixed platform's top, the second electromagnetism piece is located moving platform's top, first electromagnetism piece with the second electromagnetism piece extends along same direction, and the two is in moving platform is in looks butt when the first position.
4. The workpiece stage moving apparatus of claim 1, wherein:
first fixed establishment includes first mounting, second mounting and retaining member, first mounting is located one side of work piece platform edge X direction, the second mounting is located one side of work piece platform edge Y direction, the retaining member is located the work piece platform is kept away from one side of second mounting.
5. The workpiece stage moving apparatus of claim 4, wherein:
the second fixing mechanism comprises a third fixing piece and a fourth fixing piece, the third fixing piece is arranged in two and is respectively arranged on two sides of the workpiece table along the X direction, and the fourth fixing piece is arranged in two and is respectively arranged on two sides of the workpiece table along the Y direction.
6. The workpiece stage moving apparatus of claim 5, wherein:
the first fixing piece and the third fixing piece can slide along the X direction, the second fixing piece and the fourth fixing piece can slide along the Y direction, and the locking piece can slide along the preset direction.
7. The workpiece stage moving apparatus of claim 1, wherein:
be equipped with first position sensor and second position sensor on the braced frame, first position sensor sets up towards the X direction, is used for measuring the work piece platform is in the ascending position of fixed platform X side, second position sensor sets up towards the Y direction, is used for measuring the work piece platform is in the ascending position of fixed platform Y side.
8. The workpiece stage moving apparatus of claim 7, wherein:
the two first position sensors are arranged in an arrayed mode along the Y-axis direction, and the two second position sensors are arranged in an arrayed mode along the X-axis direction.
9. The workpiece stage moving apparatus of claim 1, wherein:
the mobile platform comprises a platform body, a driving device and a roller arranged at the bottom of the platform body, wherein the driving device is arranged on the platform body and used for driving the roller to roll along a preset direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111110517.2A CN113917792A (en) | 2021-09-22 | 2021-09-22 | Workpiece platform moving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111110517.2A CN113917792A (en) | 2021-09-22 | 2021-09-22 | Workpiece platform moving device |
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| Publication Number | Publication Date |
|---|---|
| CN113917792A true CN113917792A (en) | 2022-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111110517.2A Pending CN113917792A (en) | 2021-09-22 | 2021-09-22 | Workpiece platform moving device |
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| CN (1) | CN113917792A (en) |
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| CN101510056A (en) * | 2009-03-13 | 2009-08-19 | 上海微电子装备有限公司 | Adjustment device and method for movement of work head of mask aligner |
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| CN103226296A (en) * | 2013-04-27 | 2013-07-31 | 清华大学 | Rough-fine-movement laminated workbench with laser interferometer measurement |
| CN107486728A (en) * | 2017-08-24 | 2017-12-19 | 广东工业大学 | A kind of workbench |
| US20190337106A1 (en) * | 2015-07-30 | 2019-11-07 | Nsk Ltd. | Table apparatus, positioning apparatus, flat panel display manufacturing apparatus, and precision machine |
| CN210819801U (en) * | 2019-09-29 | 2020-06-23 | 常州市程伟铸造有限公司 | Be applied to glyptic location frock of foam mold |
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2021
- 2021-09-22 CN CN202111110517.2A patent/CN113917792A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4425076A (en) * | 1980-12-24 | 1984-01-10 | Compagne Internationale pour l'Informatique Cii Honeywell Bull (Societe Anonyme) | Process and apparatus for automatic positioning of a substrate on a worktable |
| JP2006005139A (en) * | 2004-06-17 | 2006-01-05 | Canon Inc | Scanning projection aligner |
| CN1924712A (en) * | 2006-09-22 | 2007-03-07 | 上海微电子装备有限公司 | Two-sets location switching system |
| CN101510056A (en) * | 2009-03-13 | 2009-08-19 | 上海微电子装备有限公司 | Adjustment device and method for movement of work head of mask aligner |
| US20110123913A1 (en) * | 2009-11-19 | 2011-05-26 | Nikon Corporation | Exposure apparatus, exposing method, and device fabricating method |
| CN103226296A (en) * | 2013-04-27 | 2013-07-31 | 清华大学 | Rough-fine-movement laminated workbench with laser interferometer measurement |
| US20190337106A1 (en) * | 2015-07-30 | 2019-11-07 | Nsk Ltd. | Table apparatus, positioning apparatus, flat panel display manufacturing apparatus, and precision machine |
| CN107486728A (en) * | 2017-08-24 | 2017-12-19 | 广东工业大学 | A kind of workbench |
| CN210819801U (en) * | 2019-09-29 | 2020-06-23 | 常州市程伟铸造有限公司 | Be applied to glyptic location frock of foam mold |
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