CN113917603B - Integrated optical device based on sub-wavelength metal/medium - Google Patents
Integrated optical device based on sub-wavelength metal/medium Download PDFInfo
- Publication number
- CN113917603B CN113917603B CN202111205645.5A CN202111205645A CN113917603B CN 113917603 B CN113917603 B CN 113917603B CN 202111205645 A CN202111205645 A CN 202111205645A CN 113917603 B CN113917603 B CN 113917603B
- Authority
- CN
- China
- Prior art keywords
- metal
- distance
- optical device
- metal layer
- integrated optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
Abstract
The embodiment of the invention provides an integrated optical device based on sub-wavelength metal/medium. The integrated optical device includes: a first metal layer; the second metal layer, form the nanometer cavity between second metal layer and the first metal layer; the metal grid is arranged in the nano cavity, a first distance is reserved between the metal grid and the first metal layer, and a second distance is reserved between the metal grid and the second metal layer; the first waveguide equivalent refractive index between the metal grid and the first metal layer and the second waveguide equivalent refractive index between the metal grid and the second metal layer can be regulated and controlled by setting the first distance and the second distance. Therefore, the sub-wavelength integrated optical circuit can be realized, the multifunctional optical effects such as Bragg grating reflection effect and Mach-Zehnder interference effect can be realized, the advantages of the two optical devices are integrated, the two optical devices are not interfered with each other, the performance is excellent, the size is smaller, and important support is provided for the all-optical integrated circuit.
Description
Technical Field
The invention relates to the technical field of integrated optical devices, in particular to an integrated optical device based on sub-wavelength metal/medium.
Background
The rise and development of integrated optics with fiber optic communications has gone through decades. Not only is integrated optics an important component of optical fiber networks, but also the explosive growth of optical fiber communication capacity, the rapid development of optical fiber communication technology and industry, along with the further development and maturation of integrated optics technology, will raise a new trend in the development of optical fiber communication technology and its related industry.
In the field of optical sensing, fiber bragg gratings (Fiber Bragg Grating, FBG) have been extensively studied and widely used. As a sensor, the FBG has the advantages of light weight, small volume, portability, electromagnetic interference resistance, no influence of the intensity of a light source on the precision, easy realization of multiplexing and distributed sensing and the like, can be applied to measurement of refractive index, temperature, stress, distortion, pressure, chemical substance concentration and the like, can form periodic modulation of the refractive index due to the special structure of the FBG, and forms different phase relations with waves and reverse waves, and when the forward wave and the reverse wave meet the destructive condition, a forbidden band is formed, thereby realizing the function of wavelength selection. FBG type waveguides are used in various optical devices such as semiconductor lasers, optical filters, modulators, and the like due to the flexibility of design structures. Mach-Zehnder interferometer (Mach-Zehnder Interferometer, MZI) type optical waveguides are attracting attention due to their high sensitivity, high selectivity, strong anti-interference capability, wide application range and small size, and are often used for high-precision detection of wavelength displacement of fiber gratings.
Surface Plasmon (SP) has near field enhancement characteristics and Surface transmission characteristics, and can localize light at a sub-wavelength scale, so research into Surface Plasmon-based optical devices has been receiving much attention from scientists. The study of surface plasmon by scholars was first in 1902, and in experiments in which scientists such as r.w.wood observed a series of bright and dark fringes in the irradiation of visible light waves onto a metal grating, conscious of the existence of surface plasmon waves, and then U.j.fano et al proposed the concept of surface plasmon (Surface Plasmon polaritons, SPPs), after which more and more scientists focused their view on the study of SPPs-based optics.
SPPs are electromagnetic surface waves propagating on metal-dielectric interfaces, where the field distribution decays exponentially across the interface. SPPs have the characteristics of breaking through the traditional optical diffraction limit and having strong locality, so that the guidance and control of light at a sub-wavelength level can be realized. SPPs-based can be used as energy sources and information carriers and has important potential application value in high-density integrated optical circuits. In the traditional optical waveguide structure, a high refractive index material is used as a waveguide core, a low refractive index material is used as a coating layer, and the optical field is mainly concentrated in the waveguide core formed by the high refractive index material. There are two important waveguide structure types in SPPs waveguide structures, namely IMI (Insulator-Metal-Insulator) and MIM (Metal-Insulator-Metal) waveguides. Where IMI waveguides have lower losses but a weaker ability to limit light propagation at sub-wavelengths. Correspondingly, the MIM waveguide has a simple structure and strong constraint on energy, not only supports a sub-wavelength high-group-velocity mode in a wider frequency spectrum range, but also can realize long-range propagation and allow the sub-wavelength high-group-velocity mode to operate and propagate light in a nanometer level, and after the Bragg grating structure is introduced, the propagation characteristic of surface plasma can be influenced, and the MIM waveguide has photon forbidden band characteristics, so that researches on MIM surface plasmon Bragg waveguide structures have attracted extensive attention of scientists.
At present, micro-nano optical function devices based on MIM waveguides have important research value and have made many breakthroughs in experimental and theoretical research, such as Bragg reflectors, sensors and the like. However, the bragg fiber grating sensor and the mach-zehnder interferometer in the prior art are two independent optical devices, and have single functions and large sizes when in use.
Disclosure of Invention
The embodiment of the invention aims to provide an integrated optical device based on sub-wavelength metal/medium, which is used for solving the problems of single function and large size of the optical device in the prior art.
To achieve the above object, embodiments of the present invention provide an integrated optical device based on a sub-wavelength metal/medium, the integrated optical device comprising:
a first metal layer;
the second metal layer, form the nanometer cavity between second metal layer and the first metal layer; and
the metal grid is arranged in the nano cavity, a first distance is reserved between the metal grid and the first metal layer, and a second distance is reserved between the metal grid and the second metal layer;
the first waveguide equivalent refractive index between the metal grid and the first metal layer and the second waveguide equivalent refractive index between the metal grid and the second metal layer can be regulated and controlled by setting the first distance and the second distance.
In the embodiment of the invention, the larger the first distance or the second distance is, the smaller the equivalent refractive index of the first waveguide corresponding to the first distance or the equivalent refractive index of the second waveguide corresponding to the second distance is; the smaller the first distance or the second distance, the larger the first waveguide equivalent refractive index corresponding to the first distance or the second waveguide equivalent refractive index corresponding to the second distance.
In an embodiment of the invention, the integrated optical device comprises a plurality of metal grids, the plurality of metal grids being spaced apart and the first and second distances of the plurality of metal grids being set to equal distances to form the Bragg grating effect reflection spectrum.
In an embodiment of the present invention, the spacing distances between the plurality of metal grids are set to different distances to obtain bragg grating effect reflection spectra of different periods.
In the embodiment of the invention, a plurality of metal grids are arranged as metal grids with different lengths so as to obtain different Bragg grating effect reflection spectrums, and as the length of the metal grids is increased, the characteristic peak of the Bragg grating effect reflection spectrums has a red shift phenomenon.
In the embodiment of the invention, a plurality of metal grids are arranged as metal grids with different thicknesses so as to obtain different Bragg grating effect reflection spectrums, and as the thickness of the metal grids is increased, the characteristic peak of the Bragg grating effect reflection spectrums has a red shift phenomenon.
In an embodiment of the invention, the first and second distances of the plurality of metal grids are set to unequal distances to form a cascaded Mach-Zehnder interference spectrum and a Bragg grating effect reflection spectrum.
In an embodiment of the present invention, a plurality of metal grids are arranged as metal grids of different lengths to form different Mach-Zehnder interference spectra.
In an embodiment of the present invention, a plurality of metal grids are arranged as metal grids of different thicknesses to form different Mach-Zehnder interference spectra.
In an embodiment of the invention, a plurality of identical or different metal grids are taken as one period, and different Bragg grating effect reflection spectrums and/or Mach-Zehnder interference spectrums are generated through cascading combination.
The integrated optical device comprises a first metal layer, a second metal layer and a metal grid, wherein a nano cavity is formed between the first metal layer and the second metal layer, the metal grid is arranged in the nano cavity, a first distance is reserved between the metal grid and the first metal layer, and a second distance is reserved between the metal grid and the second metal layer; by setting the first distance and the second distance, the first waveguide equivalent refractive index between the metal grid and the first metal layer and the second waveguide equivalent refractive index between the metal grid and the second metal layer can be regulated. Therefore, the sub-wavelength integrated optical circuit can be realized, the multifunctional optical effects such as Bragg grating reflection effect and Mach-Zehnder interference effect can be realized, the advantages of the two optical devices are integrated, the two optical devices are not interfered with each other, the performance is excellent, the size is smaller, and important support is provided for the all-optical integrated circuit.
Additional features and advantages of embodiments of the invention will be set forth in the detailed description which follows.
Drawings
The accompanying drawings are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain, without limitation, the embodiments of the invention. In the drawings:
FIG. 1 is a schematic three-dimensional structure of an integrated optical device based on sub-wavelength metal/media according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a two-dimensional structure of an integrated optical device based on sub-wavelength metal/media according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of Bragg grating effect reflection and transmission spectra of an integrated optical device based on sub-wavelength metal/media provided by an embodiment of the present invention;
FIG. 4 is a schematic diagram of interference spectra of different periods of an integrated optical device based on sub-wavelength metal/media according to an embodiment of the present invention;
FIG. 5 is a schematic spectrum of different length metal grids of an integrated sub-wavelength metal/dielectric based optical device provided by an embodiment of the present invention;
FIG. 6 is a schematic spectral diagram of a different thickness technology grid for a sub-wavelength metal/dielectric based integrated optical device provided by an embodiment of the present invention;
FIG. 7 is a schematic view of the transmission spectrum of a metal grid off-axis for a sub-wavelength metal/dielectric based integrated optical device provided by an embodiment of the present invention;
fig. 8 is a schematic diagram of spectra generated as a periodic cascade of three different length metal grids of a sub-wavelength metal/dielectric based integrated optical device provided by an embodiment of the present invention.
Description of the reference numerals
1. First metal layer 2 second metal layer
3. Metal grid 4 nanometer cavity
Detailed Description
The following describes the detailed implementation of the embodiments of the present invention with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
In the present embodiment, if directional instructions (such as up, down, left, right, front, and rear … …) are provided, the directional instructions are merely used to explain the relative positional relationship, the configuration, and the like between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional instructions are changed accordingly.
In addition, if there is a description of "first", "second", etc. in the embodiments of the present application, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the protection scope of the present application.
Fig. 1 is a schematic three-dimensional structure of an integrated optical device based on a sub-wavelength metal/medium according to an embodiment of the present invention, and fig. 2 is a schematic two-dimensional structure of an integrated optical device based on a sub-wavelength metal/medium according to an embodiment of the present invention. Referring to fig. 1 and 2, the integrated optical device may include:
a first metal layer 1;
a second metal layer 2, a nano cavity 4 is formed between the first metal layer 1 and the second metal layer 2; and
the metal grid 3 is arranged in the nano cavity 4, a first distance is reserved between the metal grid 3 and the first metal layer 1, and a second distance is reserved between the metal grid 3 and the second metal layer 2;
wherein, by setting the first distance and the second distance, the first waveguide equivalent refractive index between the metal grid 3 and the first metal layer 1 and the second waveguide equivalent refractive index between the metal grid 3 and the second metal layer 2 can be regulated.
In the embodiment of the present invention, the metal grid 3 is present between the first metal layer 1 and the second metal layer 2, and the first distance W1 between the metal grid 3 and the first metal layer 1 and the second distance W2 between the metal grid 3 and the second metal layer 2 can be specially designed according to requirements, so as to regulate and control the first waveguide equivalent refractive index of the medium between the metal grid 3 and the first metal layer 1 and the second waveguide equivalent refractive index of the medium between the metal grid 3 and the second metal layer 2. In one example, the first waveguide equivalent refractive index and the second waveguide equivalent refractive index may be tuned by increasing or decreasing the first distance W1 and the second distance W2. In another example, the first waveguide equivalent refractive index and the second waveguide equivalent refractive index may be tuned by increasing the thickness d of the metal grid 3, thereby decreasing the first distance W1 and the second distance W2. In yet another example, the first waveguide equivalent refractive index and the second waveguide equivalent refractive index may be tuned by decreasing the distance of W to decrease the first distance W1 and the second distance W2. It should be noted that, the setting of the distances between the first distance W1 and the second distance W2 according to the present invention is not limited to the above example, and may be other setting manners that may implement the functions of the integrated optical device.
In an embodiment of the invention, the number of metal grids 3 may be etched in the nano-cavity 4. The number of the metal grids 3 can be adjusted according to the actual situation. Through the combination of a plurality of metal grids 3, the waveguide equivalent refractive index of the medium between the metal grids 3 and the two metal layers can be regulated and controlled, the effect is enhanced, and the effect which can be observed on the spectrometer finally is more obvious.
In the embodiment of the invention, the larger the first distance or the second distance is, the smaller the equivalent refractive index of the first waveguide corresponding to the first distance or the equivalent refractive index of the second waveguide corresponding to the second distance is; the smaller the first distance or the second distance, the larger the first waveguide equivalent refractive index corresponding to the first distance or the second waveguide equivalent refractive index corresponding to the second distance. Thus, the waveguide refractive index of the medium between the metal grid and the metal layer may be tailored to achieve a desired optical effect by increasing or decreasing the first distance and the second distance.
Fig. 3 is a schematic diagram of bragg grating effect reflection spectrum and transmission spectrum of an integrated optical device based on a sub-wavelength metal/medium according to an embodiment of the present invention. Referring to fig. 2 and 3, in an embodiment of the present invention, the integrated optical device may include a plurality of metal grids 3, the plurality of metal grids 3 may be spaced apart, and the first and second distances W1 and W2 of the plurality of metal grids 3 may be set to equal distances to form a bragg grating effect reflection spectrum.
In the embodiment of the present invention, the nano-cavity 4 between the first metal layer 1 and the second metal layer 2 may etch a plurality of metal grids 3 having a length La of 200nm, a distance P between a center point of the metal grid 3 and a center point of the adjacent metal grid 3 is 500nm, a thickness d of the metal grid 3 is 30nm, a width W of the nano-cavity 4 is 150nm, a bragg grating effect is generated through cascading, and an effect that can be observed on a spectrometer is shown in fig. 3.
In the embodiment of the invention, a plurality of metal grids can be combined in cascade, the refractive index of a medium between each metal grid and a metal layer is regulated, and the Bragg grating effect similar to the one can be realized.
Fig. 4 is a schematic diagram of interference spectra of different periods of an integrated optical device based on sub-wavelength metal/media according to an embodiment of the present invention. Referring to fig. 2 and 4, in an embodiment of the present invention, the separation distance P between the plurality of metal grids 3 may be set to different distances to obtain bragg grating effect reflection spectra of different periods.
In an embodiment of the invention, the bragg grating effect is created by cascading combinations when controlling other parameters of the integrated optical device unchanged, changing the distance P of the center point of the metal grid 3 from the center point of its neighboring metal grid 3, e.g. set to 400nm, 500nm and 600nm, respectively. At this time, the transmission spectrum of the integrated optical device may drift, resulting in an interference spectrum diagram of different periods, as shown in fig. 4. It should be noted that the distance between the metal grids 3 may be specifically designed according to practical situations, and different optical effects may be achieved by changing the distance between the metal grids 3.
Fig. 5 is a schematic spectrum diagram of different lengths of metal grids of an integrated optical device based on sub-wavelength metal/media according to an embodiment of the present invention. Referring to fig. 2 and 5, in the embodiment of the present invention, a plurality of metal grids 3 may be set to metal grids 3 with different lengths to obtain different bragg grating effect reflection spectra, and as the length of the metal grid 3 increases, a red shift phenomenon occurs in a characteristic peak of the bragg grating effect reflection spectrum.
In an embodiment of the present invention, the nano-cavity 4 between the first metal layer 1 and the second metal layer 2 may etch metal grids of different lengths to form different bragg grating effect reflection spectra. When other parameters of the integrated optical device are controlled to be unchanged, the length La of the metal grid 3 is changed, for example, is respectively set to 200nm, 240nm and 280nm, so as to form different bragg grating effect reflection spectrums, and as the length of the metal grid 3 is increased, a red shift phenomenon occurs in characteristic peaks of the bragg grating effect reflection spectrums. It should be noted that different use requirements may specifically design the metal grids 3 with different lengths to achieve different optical effects.
Fig. 6 is a schematic spectrum diagram of a technical grid of different thicknesses for an integrated optical device based on sub-wavelength metal/medium according to an embodiment of the present invention. Referring to fig. 2 and 6, in the embodiment of the present invention, a plurality of metal grids 3 may be set to metal grids 3 with different thicknesses to obtain different bragg grating effect reflection spectra, and as the thickness of the metal grid 3 increases, a red shift phenomenon occurs in a characteristic peak of the bragg grating effect reflection spectrum.
In the embodiment of the invention, the nano cavity between the first metal layer 1 and the second metal layer 2 can etch metal grids 3 with different thicknesses, and the equivalent refractive index of the first waveguide and the equivalent refractive index of the second waveguide are regulated and controlled. When other parameters of the integrated optical device are controlled to be unchanged, the thickness d of the metal grid 3 is changed, for example, the thickness d is set to 30nm, 40nm and 50nm, respectively, to regulate the first waveguide equivalent refractive index and the second waveguide equivalent refractive index. As the thickness of the metal grid 3 increases, the characteristic peak of the bragg grating effect reflection spectrum exhibits a corresponding red shift phenomenon. It should be noted that different use requirements may be specifically designed for metal grids of different thickness to achieve different optical effects.
In the embodiment of the invention, the integrated optical device based on the sub-wavelength metal/medium can also etch the nano cavities 4 with different widths, so as to change the first distance W1 and the second distance W2 and regulate and control the equivalent refractive index of the first waveguide and the equivalent refractive index of the second waveguide. It should be noted that different waveguide widths W may meet different practical needs, and the waveguide widths may be designed according to specific needs.
In an embodiment of the invention, multiple identical or different metal grids 3 can be used as a period, generating different spectra by cascading combinations, based on integrated optics of sub-wavelength metals/media. When a plurality of same or different metal grids are used as a periodical cascade combination, the metal grids can be flexibly adjusted to achieve actual requirements, and the periodical cascade can enhance effects and meet specific requirements.
FIG. 7 is a schematic view of the transmission spectrum of a metal grid off-axis for a sub-wavelength metal/dielectric based integrated optical device according to an embodiment of the present invention. Referring to fig. 2 and 7, in an embodiment of the present invention, the first and second distances W1 and W2 of the plurality of metal grids 3 may be set to unequal distances to form a cascaded mach-zehnder interference spectrum and a bragg grating effect reflection spectrum.
In the embodiment of the present invention, the first distance W1 between the metal grid 3 and the first metal layer 1 is not equal to the second distance W2 between the metal grid 3 and the second metal layer 2, so as to generate a mach-zehnder interference effect and form an interference peak. When the length La of the metal grid 3 is 240nm, the distance P between the center point of the metal grid 3 and the adjacent center point thereof is 500nm, the thickness of the metal grid 3 is 30nm, and the width W of the nano-cavity 4 is 150nm. When the first distance W1 between the metal grid 3 and the first metal layer 1 is 50nm, the second distance W2 between the metal grid 3 and the second metal layer 2 is 70nm, and the first distance W1 between the metal grid 3 and the first metal layer 1 is not equal to the second distance W2 between the metal grid 3 and the second metal layer 2, then an interference peak is observed in the transmission spectrum. When the first distance W1 between the metal grid 3 and the first metal layer is continuously reduced, the asymmetry is enhanced, the equivalent refractive index of the first waveguide is further increased, and the equivalent refractive index of the second waveguide is further reduced, so that the interference peak of the transmission spectrum on the spectrometer is enhanced, and the offset is further generated. The metal grid 3 is deviated from the central axis, so that the integrated optical device no longer has symmetry, and the equivalent refractive index of the first waveguide and the equivalent refractive index of the second waveguide are changed, thereby realizing the interference effect. The degree of deviation of the metal grid 3 can be designed according to actual use requirements, and different use requirements can be designed to different degrees of deviation so as to realize different optical effects.
In an embodiment of the present invention, a plurality of metal grids are arranged as metal grids of different lengths to form different Mach-Zehnder interference spectra.
Specifically, the nano-cavity 4 between the first metal layer 1 and the second metal layer 2 can etch metal grids 3 with different lengths, generate interference arms with different lengths, and form different interference spectrums. When the metal grid 3 deviates from the central axis, the length La of the metal grid is reduced to 200nm, or the length La of the metal grid 3 is increased to 280nm, so that the length of the interference arm is changed, and the interference peak of the transmission spectrum on the spectrometer is changed. In practice, the length La of the metal grid 3 may be adjusted according to the actual situation, and is designed to be more suitable for the actual requirements.
In an embodiment of the present invention, a plurality of metal grids are arranged as metal grids of different thicknesses to form different Mach-Zehnder interference spectra.
Specifically, metal grids 3 with different thicknesses can be etched between the first metal layer 1 and the second metal layer 2 so as to regulate and control the first waveguide equivalent refractive index and the second waveguide equivalent refractive index. When the metal grid 3 deviates from the central axis, the thickness d of the metal grid is increased to 40nm, so that the first distance W1 and the second distance W2 are reduced, the equivalent refractive index of the first waveguide and the equivalent refractive index of the second waveguide are increased, the modulation of the interference arm is realized, the thickness d of the metal grid 3 can be specifically designed according to the requirement, and the actual requirement is met.
In the embodiment of the invention, the integrated optical device based on the sub-wavelength metal/medium can etch the nano-cavities 4 with different widths, change the first distance W1 between the metal grid 3 and the first metal layer 1 and the distance between the metal grid 3 and the second metal layer 2, and regulate and control the equivalent refractive index of the first waveguide and the equivalent refractive index of the second waveguide. When the metal grid 3 deviates from the central axis, the waveguide width W is reduced, so that the first distance W1 between the metal grid 3 and the first metal layer 1 and the second distance W2 between the metal grid 3 and the second metal layer are reduced, the equivalent refractive index of the first waveguide and the equivalent refractive index of the second waveguide are increased, the modulation of the interference arm is realized, the waveguide width W can be specifically designed according to the requirement, and the actual requirement is met.
Fig. 8 is a schematic diagram of spectra generated as a periodic cascade of three different length metal grids of a sub-wavelength metal/dielectric based integrated optical device provided by an embodiment of the present invention. Referring to fig. 2 and 8, in an embodiment of the present invention, a plurality of identical or different metal grids 3 may be used as one period, and different bragg grating effect reflection spectra and/or mach-zehnder interference spectra may be generated by cascading combination.
In the embodiment of the present invention, when the metal grids are deviated from the central axis, the lengths La of the metal grids 3 are set to 200nm, 240nm and 280nm, respectively, and by taking the three lengths of the metal grids 3 as one period, different transmission spectra can be observed on the spectrometer by cascade combination. In practical application, different projection spectrums can be realized by cascading a plurality of metal grids 3 as one period according to requirements, and different optical effects are realized.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or apparatus that comprises an element.
The foregoing is merely exemplary of the present application and is not intended to limit the present application. Various modifications and changes may be made to the present application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. which are within the spirit and principles of the present application are intended to be included within the scope of the claims of the present application.
Claims (10)
1. An integrated optical device based on sub-wavelength metal/media, the integrated optical device comprising:
a first metal layer;
a second metal layer, wherein a nano cavity is formed between the first metal layer and the second metal layer; and
the metal grid is arranged in the nano cavity, a first distance is reserved between the metal grid and the first metal layer, and a second distance is reserved between the metal grid and the second metal layer;
the first waveguide equivalent refractive index between the metal grid and the first metal layer and the second waveguide equivalent refractive index between the metal grid and the second metal layer can be regulated and controlled by setting the first distance and the second distance.
2. The integrated optical device of claim 1, wherein the greater the first distance or the second distance, the smaller the first waveguide equivalent refractive index corresponding to the first distance or the second waveguide equivalent refractive index corresponding to the second distance; the smaller the first distance or the second distance is, the larger the first waveguide equivalent refractive index corresponding to the first distance or the second waveguide equivalent refractive index corresponding to the second distance is.
3. The integrated optical device of claim 2, comprising a plurality of metal grids spaced apart and having first and second distances set equal distances to form a bragg grating effect reflection spectrum.
4. The integrated optical device of claim 3, wherein the spacing distances between the plurality of metal grids are set to different distances to obtain bragg grating effect reflection spectra of different periods.
5. An integrated optical device according to claim 3, wherein the plurality of metal grids are arranged as metal grids of different lengths to obtain different bragg grating effect reflection spectra, and wherein a characteristic peak of the bragg grating effect reflection spectra exhibits a red shift phenomenon as the length of the metal grids increases.
6. An integrated optical device according to claim 3, wherein the plurality of metal grids are arranged as metal grids of different thicknesses to obtain different bragg grating effect reflection spectra, and wherein a characteristic peak of the bragg grating effect reflection spectra exhibits a red shift phenomenon as the thickness of the metal grids increases.
7. The integrated optical device of claim 3, wherein the first and second distances of the plurality of metal grids are set to unequal distances to form a cascaded mach-zehnder interference spectrum and a bragg grating effect reflection spectrum.
8. The integrated optical device of claim 7, wherein the plurality of metal grids are arranged as metal grids of different lengths to form different mach-zehnder interference spectra.
9. The integrated optical device of claim 7, wherein the plurality of metal grids are arranged as metal grids of different thicknesses to form different mach-zehnder interference spectra.
10. An integrated optical device according to claim 3 or 7, characterized in that a plurality of identical or different metal grids are used as a period, and different bragg grating effect reflection spectra and/or mach-zehnder interference spectra are generated by cascading combinations.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2021103267211 | 2021-03-26 | ||
| CN202110326721 | 2021-03-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113917603A CN113917603A (en) | 2022-01-11 |
| CN113917603B true CN113917603B (en) | 2023-06-16 |
Family
ID=79240890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111205645.5A Active CN113917603B (en) | 2021-03-26 | 2021-10-15 | Integrated optical device based on sub-wavelength metal/medium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113917603B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114899692B (en) * | 2022-05-09 | 2023-04-18 | 电子科技大学 | Array visible light radiation source based on metal plasma wave |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565933A (en) * | 2012-01-16 | 2012-07-11 | 北京航空航天大学 | Sub-wavelength mixed type surface plasma optical waveguide |
| CN207424296U (en) * | 2017-07-21 | 2018-05-29 | 南京邮电大学 | A kind of metal-dielectric-metal waveguide bragg grating mode filter |
| CN108519352A (en) * | 2018-04-09 | 2018-09-11 | 南京邮电大学 | A kind of index sensor based on metal-dielectric-metal waveguide bragg grating |
| CN110325840A (en) * | 2017-02-17 | 2019-10-11 | 亚利桑那大学塞萨洛尼基研究委员会 | Integrated plasma photon biosensor and its application method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2523027A3 (en) * | 2011-05-13 | 2014-10-22 | Imec | Waveguide-integrated plasmonic resonator for integrated SERS measurements |
| WO2014000046A1 (en) * | 2012-06-29 | 2014-01-03 | Hill Martin Terence | Metal-insulator-metal waveguide for nano-lasers and optical amplifiers |
-
2021
- 2021-10-15 CN CN202111205645.5A patent/CN113917603B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565933A (en) * | 2012-01-16 | 2012-07-11 | 北京航空航天大学 | Sub-wavelength mixed type surface plasma optical waveguide |
| CN110325840A (en) * | 2017-02-17 | 2019-10-11 | 亚利桑那大学塞萨洛尼基研究委员会 | Integrated plasma photon biosensor and its application method |
| CN207424296U (en) * | 2017-07-21 | 2018-05-29 | 南京邮电大学 | A kind of metal-dielectric-metal waveguide bragg grating mode filter |
| CN108519352A (en) * | 2018-04-09 | 2018-09-11 | 南京邮电大学 | A kind of index sensor based on metal-dielectric-metal waveguide bragg grating |
Non-Patent Citations (1)
| Title |
|---|
| Plasmonic Multichannel Refractive Index Sensor Based on Subwavelength Tangent-Ring Metal–Insulator–Metal Waveguide;Kunhua Wen等;Sensors;第18卷(第5期);1-9 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113917603A (en) | 2022-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Avrutsky et al. | Interference phenomena in waveguides with two corrugated boundaries | |
| El Haffar et al. | Optical properties of MIM plasmonic waveguide with an elliptical cavity resonator | |
| Liu et al. | Design of a multi-bits input optical logic device with high intensity contrast based on plasmonic waveguides structure | |
| GB2385944A (en) | Optic fibre Bragg aperiodic grating | |
| Yao et al. | Fully reconfigurable waveguide Bragg gratings for programmable photonic signal processing | |
| Khani et al. | All-optical plasmonic switches based on asymmetric directional couplers incorporating Bragg gratings | |
| US11796842B2 (en) | Bragg grating chip | |
| CN113917603B (en) | Integrated optical device based on sub-wavelength metal/medium | |
| Asgari et al. | Tunable nano-scale graphene-based devices in mid-infrared wavelengths composed of cylindrical resonators | |
| EP1591810A1 (en) | Grating apodization technique for diffused optical waveguides | |
| Liu et al. | Tunable plasmonically induced transparency with asymmetric multi-rectangle resonators | |
| CN213659121U (en) | Bragg grating chip | |
| Misugi et al. | Demonstration of 2D beam steering using large-scale passive optical phased array enabled by multimode waveguides with reduced phase error | |
| Shahamat et al. | Plasmon-induced transparency in a rectangle cavity and an H-shaped structure for sensing and switching applications | |
| CN1845484B (en) | Structure of realizing ROADM and method for manufacturing same | |
| Zhou et al. | Silicon nanophotonic devices based on resonance enhancement | |
| Hassan et al. | Design and performance analysis of an ultra-compact nano-plasmonic refractive index sensor | |
| US6950578B1 (en) | Highly index-sensitive optical devices including long period fiber gratings | |
| Abderrahmane et al. | High performance single mode plasmonic filter and efficient wavelength demultiplexing based on nanodisk resonators | |
| US7421176B2 (en) | Waveguide element using photonic crystal | |
| Wang et al. | The transmission characteristics of asymmetrical multi-teeth-shaped plasmonic waveguide structure | |
| Ji et al. | High sensitivity waveguide micro-displacement sensor based on intermodal interference | |
| Netheti et al. | Temperature tunable Bragg transmission multichannel filters made of two quarter-wave stacks separated by defect layers | |
| Lu et al. | Dynamic control of Fano resonances in a coupled dual microring resonator system | |
| Lin et al. | Pencil-like periodic ridges under second Bragg incidence as dual-function beam separation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |