CN113917075A - Device and method for testing fluorine content in fluorine-containing mixed gas - Google Patents
Device and method for testing fluorine content in fluorine-containing mixed gas Download PDFInfo
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- CN113917075A CN113917075A CN202111075708.XA CN202111075708A CN113917075A CN 113917075 A CN113917075 A CN 113917075A CN 202111075708 A CN202111075708 A CN 202111075708A CN 113917075 A CN113917075 A CN 113917075A
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 107
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 107
- 239000011737 fluorine Substances 0.000 title claims abstract description 107
- 238000012360 testing method Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000007789 gas Substances 0.000 claims abstract description 148
- 239000001301 oxygen Substances 0.000 claims abstract description 75
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 75
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 74
- 238000004458 analytical method Methods 0.000 claims abstract description 64
- 238000006243 chemical reaction Methods 0.000 claims abstract description 55
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 9
- 239000000945 filler Substances 0.000 claims abstract description 8
- 230000001105 regulatory effect Effects 0.000 claims description 22
- 238000010926 purge Methods 0.000 claims description 21
- 239000012535 impurity Substances 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 2
- 239000003595 mist Substances 0.000 claims 1
- 238000004364 calculation method Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 description 9
- PFUVRDFDKPNGAV-UHFFFAOYSA-N sodium peroxide Chemical compound [Na+].[Na+].[O-][O-] PFUVRDFDKPNGAV-UHFFFAOYSA-N 0.000 description 8
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000004868 gas analysis Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 235000013024 sodium fluoride Nutrition 0.000 description 3
- 239000011775 sodium fluoride Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
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Abstract
The invention discloses a device and a method for testing the content of fluorine in a fluorine-containing mixed gas, wherein the testing device comprises: the device comprises a sample gas supply device, a conversion pile and oxygen content analysis equipment, wherein the sample gas supply device, the conversion pile and the oxygen content analysis equipment are sequentially communicated through a pipeline provided with a control valve, the sample gas supply device is used for outputting fluorine-containing mixed gas, conversion filler is filled in the conversion pile, the conversion pile is used for converting fluorine gas in the fluorine-containing mixed gas into oxygen, and the oxygen content analysis equipment is used for carrying out oxygen content analysis on the oxygen-containing mixed gas treated by the conversion pile. According to the invention, the conversion pile is adopted to convert fluorine gas into oxygen gas through reaction, and then oxygen content is tested by using oxygen content analysis equipment, so that the fluorine content in the original sample gas is indirectly obtained, the analysis result can be directly read, complex calculation and pretreatment measures for the fluorine gas are avoided, and the operation is simple.
Description
Technical Field
The invention belongs to the technical field of gas analysis, and particularly relates to a device and a method for testing the content of fluorine in a fluorine-containing mixed gas.
Background
The fluorine-containing laser gas belongs to one of fluorine mixed gases, the commonly used F2 preparation content is about 0.1-0.5%, and other residual gases consist of gases such as neon, argon, helium, krypton and the like, so that the fluorine content is basically tested by a method of chemical reagent absorption and then calculation and back-pushing out the fluorine content through operations such as titration, but the method has complex operation, fluorine gas belongs to toxic gas, the fluorine gas is difficult to avoid diffusing into the air to cause damage to a human body during pretreatment, and the data processing calculation and the like have strict requirements; and the fluorine concentration tester is directly used, but uncertain factors such as too fast consumption of electrodes and large error exist.
Disclosure of Invention
In order to solve the technical problem, the invention provides a device and a method for testing the fluorine content in a fluorine-containing mixed gas, which can quickly and simply obtain the fluorine content of a sample gas.
In order to achieve the purpose, the technical scheme of the invention is as follows:
on one hand, the invention discloses a device for testing the content of fluorine in a fluorine-containing mixed gas, which comprises:
the sample gas supply device is used for outputting fluorine-containing mixed gas;
the conversion pile is filled with conversion filler and is used for converting fluorine gas in the fluorine-containing mixed gas into oxygen gas;
the oxygen content analysis equipment is used for carrying out oxygen content analysis on the oxygen-containing mixed gas treated by the conversion pile;
the sample gas supply device, the conversion pile and the oxygen content analysis equipment are sequentially communicated through a pipeline provided with a control valve.
The invention adopts the conversion pile to convert fluorine gas into oxygen gas through reaction, and then oxygen content is tested by using oxygen content analysis equipment, thereby indirectly obtaining the fluorine content in the original sample gas.
The invention has the following beneficial effects:
firstly, the fluorine gas is converted into oxygen gas, and the damage of the fluorine gas to human bodies is avoided when tail gas is discharged from the gas outlet of the oxygen content analysis equipment.
Secondly, the oxygen content analysis equipment is mature in technology, and analysis results are directly read, so that complex calculation and pretreatment measures for fluorine gas are avoided.
Thirdly, common gas analysis equipment such as oxygen content analysis equipment is adopted, so that the economy is improved, and the test operation is simple.
On the basis of the technical scheme, the following improvements can be made:
preferably, the sample gas supply device is communicated with the gas inlet of the conversion pile through a first pipeline which is sequentially provided with a first pressure regulating valve and a first control valve.
By adopting the preferable scheme, the pressure intensity and the switch of the first pipeline are adjusted through the first pressure adjusting valve and the first control valve.
Preferably, the air outlet of the first pipeline is communicated with the air inlet of the conversion pile through a second pipeline provided with a flow meter.
By adopting the preferable scheme, the flow of the gas entering the conversion pile is controlled by adopting the flowmeter, so that the effectiveness of subsequent analysis of the oxygen content analysis equipment is ensured.
Preferably, a second control valve is further provided on the second line.
And adopting the preferable scheme, and adopting a second control valve to control the opening and closing of the pipeline at the air inlet of the conversion pile.
Preferably, the apparatus for measuring the content of fluorine in the fluorine-containing mixed gas further comprises:
and the purge gas supply device is communicated with the first pipeline and/or the second pipeline through a third pipeline which is sequentially provided with a second pressure regulating valve and a fourth control valve.
By adopting the preferable scheme, the purging and replacement of the front pipeline and the rear pipeline before and after analysis are realized by adopting the purging gas supply device.
Preferably, the air outlet of the conversion pile is communicated with the air inlet of the oxygen content analysis equipment through a fourth pipeline provided with a third control valve.
And adopting the preferable scheme, and adopting a third control valve to control the on and off of the pipeline at the air outlet of the conversion pile.
Preferably, a filter is arranged on the fourth pipeline and is used for filtering impurities in the fourth pipeline.
Adopt above-mentioned preferred scheme, avoid impurity to get into inside the oxygen content analysis equipment.
Preferably, the apparatus for measuring the content of fluorine in the fluorine-containing mixed gas further comprises:
and the tail gas treatment device is communicated with the gas outlet of the oxygen content analysis equipment through a pipeline.
By adopting the preferable scheme, the tail gas is treated, and the environmental pollution is avoided.
On the other hand, the invention also discloses a method for testing the content of fluorine in the fluorine-containing mixed gas, which utilizes any one of the devices for testing the content of fluorine in the fluorine-containing mixed gas to test, and specifically comprises the following steps:
and converting the fluorine-containing mixed gas output by the sample gas supply device into oxygen through a conversion pile, and testing the oxygen content of the converted oxygen-containing mixed gas by using oxygen content analysis equipment to obtain the content of fluorine gas in the initial fluorine-containing mixed gas.
Preferably, before the test, all or part of the pipelines are purged by a purge gas supply device.
By adopting the preferable scheme, the air in the pipeline can be completely replaced before analysis, and the preparation and effectiveness of analysis are improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a testing apparatus according to an embodiment of the present invention.
Wherein: 1-sample gas supply device, 2-conversion pile, 3-oxygen content analysis device, 41-flowmeter, 42-filter, 5-purge gas supply device, 6-tail gas treatment device, 71-first pressure regulating valve, 72-second pressure regulating valve, 81-first control valve, 82-second control valve, 83-third control valve, 84-fourth control valve, 91-first pipeline, 92-second pipeline, 93-third pipeline and 94-fourth pipeline.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The use of the ordinal terms "first," "second," "third," etc., to describe a common object merely indicate that different instances of like objects are being referred to, and are not intended to imply that the objects so described must be in a given sequence, either temporally, spatially, in ranking, or in any other manner.
Also, the expression "comprising" an element is an expression of "open" which merely means that there is a corresponding component, and should not be interpreted as excluding additional components.
In order to achieve the object of the present invention, in some embodiments of an apparatus and a method for measuring the content of fluorine in a fluorine-containing mixed gas, as shown in fig. 1, the apparatus comprises: the device comprises a sample gas supply device 1, a conversion pile 2 and oxygen content analysis equipment 3, wherein the sample gas supply device 1, the conversion pile 2 and the oxygen content analysis equipment 3 are sequentially communicated through a pipeline provided with a control valve.
The sample gas supply device 1 is used for outputting fluorine-containing mixed gas; the conversion pile 2 is filled with conversion filler, and the conversion pile 2 is used for converting fluorine gas in the fluorine-containing mixed gas into oxygen gas; the oxygen content analysis device 3 is used for carrying out oxygen content analysis on the oxygen-containing mixed gas treated by the conversion pile 2.
The invention adopts the conversion pile 2 to convert fluorine gas into oxygen gas through reaction, and then utilizes the oxygen content analysis equipment 3 to test the oxygen content, thereby indirectly obtaining the fluorine content in the original sample gas.
The conversion filler is not limited to granular sodium peroxide, but other materials capable of converting fluorine gas into oxygen gas are also possible. It is noted that the conversion fill does not convert other gases in the mixed gas, other than fluorine, to oxygen.
The original fluorine-containing mixed gas supplied by the sample gas supply device 1 contains no oxygen or a known oxygen content.
The invention has the following beneficial effects:
firstly, the fluorine gas is converted into oxygen gas, and when the tail gas is discharged from the gas outlet of the oxygen content analysis device 3, the damage of the fluorine gas to human bodies is avoided.
Secondly, the oxygen content analysis equipment is mature in technology, and analysis results are directly read, so that complex calculation and pretreatment measures for fluorine gas are avoided.
Thirdly, common gas analysis equipment such as oxygen content analysis equipment is adopted, so that the economy is improved, and the test operation is simple.
In order to further optimize the implementation effect of the present invention, in other embodiments, the other features are the same, except that the sample gas supply device 1 is communicated with the gas inlet of the conversion pile 2 through a first pipeline 91 provided with a first pressure regulating valve 71 and a first control valve 81 in sequence.
With the adoption of the embodiment, the following beneficial effects are achieved: the pressure and opening and closing of the first pipe 91 are regulated by the first pressure regulating valve 71 and the first control valve 81.
Further, in the above embodiment, the outlet port of the first pipe 91 is communicated with the inlet port of the conversion pile 2 through the second pipe 92 provided with the flow meter 41.
With the adoption of the embodiment, the following beneficial effects are achieved: the flowmeter 41 is adopted to control the gas flow entering the conversion pile 2, so that the effectiveness of subsequent analysis of the oxygen content analysis equipment 3 is ensured.
Further, in addition to the above embodiment, the second pipe line 92 is provided with a second control valve 82.
With the adoption of the embodiment, the following beneficial effects are achieved: a second control valve 82 is used to control the opening and closing of the pipe at the inlet of the conversion pile 2.
Further, on the basis of the above embodiment, the apparatus for measuring the content of fluorine in a fluorine-containing mixed gas further includes:
and a purge gas supply means 5, wherein the purge gas supply means 5 is connected to the first pipe line 91 and/or the second pipe line 92 through a third pipe line 93 provided with the second pressure regulating valve 72 and the fourth control valve 84 in this order.
With the adoption of the embodiment, the following beneficial effects are achieved: and the purging replacement of the front pipeline and the rear pipeline of the analysis is realized by adopting a purging gas supply device 5.
Further, on the basis of the above embodiment, the outlet port of the reforming pile 2 communicates with the inlet port of the oxygen content analyzing apparatus 3 through the fourth pipe 94 provided with the third control valve 83.
With the adoption of the embodiment, the following beneficial effects are achieved: and a third control valve 83 is adopted to control the opening and closing of the pipeline at the air outlet of the conversion pile 2.
Further, in the above embodiment, the filter 42 is provided in the fourth pipe 94, and the filter 42 is used to filter impurities in the fourth pipe 94.
With the adoption of the embodiment, the following beneficial effects are achieved: impurities are prevented from entering the inside of the oxygen content analyzing apparatus 3.
In order to further optimize the implementation effect of the invention, in other embodiments, the remaining features are the same, except that the apparatus for measuring the content of fluorine in the fluorine-containing mixed gas further comprises:
and the tail gas treatment device 6 is communicated with the gas outlet of the oxygen content analysis equipment 3 through a pipeline.
With the adoption of the embodiment, the following beneficial effects are achieved: the tail gas is treated, and the environmental pollution is avoided.
The embodiment of the invention also discloses a method for testing the content of fluorine in the fluorine-containing mixed gas, which is used for testing by using the device for testing the content of fluorine in the fluorine-containing mixed gas disclosed by any one of the embodiments and specifically comprises the following steps:
the fluorine-containing mixed gas output by the sample gas supply device 1 is converted into oxygen through the conversion pile 2, and the oxygen content of the converted oxygen-containing mixed gas is tested by the oxygen content analysis equipment 3, so that the content of fluorine gas in the initial fluorine-containing mixed gas is obtained.
Further, in some embodiments, all or a portion of the lines are purged using a purge gas supply 5 prior to testing. The air in the pipeline can be completely replaced before analysis, and the preparation and effectiveness of analysis are improved.
In order that the invention may be more fully understood, a specific embodiment is described below. It should be noted that the specific embodiment is only one embodiment related to the present invention, and does not limit the protection scope of the present invention.
The specific embodiment is as follows:
as shown in fig. 1, the test apparatus includes: the system comprises a sample gas supply device 1, a conversion pile 2, an oxygen content analysis device 3, a purge gas supply device 5, an exhaust gas treatment device 6, a filter 42, a flow meter 41, a first pressure regulating valve 71, a second pressure regulating valve 72, a first control valve 81, a second control valve 82, a third control valve 83 and a fourth control valve 84.
The first pressure regulating valve 71 and the first control valve 81 are provided on the first pipe 91, the flow meter 41 and the second control valve 82 are provided on the second pipe 92, the second pressure regulating valve 72 and the third control valve 83 are provided on the third pipe 93, and the third control valve 83 and the filter 42 are provided on the fourth pipe 94.
To prevent leakage, the valves are connected by VCR connections, and to avoid corrosion, the clean line is a quarter inch EP grade clean line.
The conversion filler in the conversion pile 2 is granular sodium peroxide. The basic principle of the invention is as follows: the fluorine gas reacts with the conversion filler sodium peroxide to generate sodium fluoride and oxygen, and the oxygen content is directly read by the oxygen content analysis device 3, so that the content of the fluorine gas is indirectly obtained. The reaction formula is as follows: f2+Na2O2＝2NaF+O2。
The conversion pile 2 is made of cylindrical and transparent sub-lattice force materials and has the size
The fluorine gas and the sodium peroxide react to generate sodium fluoride, and the sodium fluoride is colorless because the sodium peroxide is yellow; the sodium peroxide can be replaced when the color of the yellow sodium peroxide is faded by three quarters through external observation, and new filler is adopted for conversion so as to avoid the phenomenon that the conversion column is punctured by sample conversion and cannot be converted.
The measuring range of the oxygen content analysis device 3 needs to be matched with the fluorine content, such as the fluorine content of 0.1 percent, and the oxygen measuring range needs to be selected to be about 2 percent so as to achieve the testing effect.
The purge gas supply 5 provides helium gas of high purity 99.999%.
The tail gas treatment device 6 adopts an alkali liquor absorption device, and absorbs the tail gas of the analyzed sample gas by adopting alkali liquor to prevent pollution.
The filter 42 has a filter diameter of 0.1um, and prevents sodium peroxide powder from entering the back end to cause valve clogging or to affect the analysis of the oxygen content analysis apparatus 3.
The flowmeter 41 adopts a float flowmeter with the measuring range of 0-100ml/min and is made of corrosion-resistant materials.
The first control valve 81, the second control valve 82, the third control valve 83, and the fourth control valve 84 are diaphragm valves.
The specific test method is as follows:
1) purging the replacement pipeline by using a purging gas:
opening the purge gas supply means 5, and opening the first pressure regulating valve 71, the first control valve 81, the second control valve 82, the third control valve 83, and the fourth control valve 84;
adjusting the first pressure regulating valve 71 until the float flow meter is at 50ml/min, closing the fourth control valve 84 until the flow rate of the float flow meter is displayed as 0; opening the fourth control valve 84 until the float flow meter is stabilized at 50ml/min, and repeating the action for several times (e.g. 3 times);
and opening the fourth control valve 84, and connecting the oxygen content analysis device 3 for oxygen content analysis until the oxygen content analysis of the oxygen content analysis device 3 is stabilized below 2ppm, which indicates that the air in the pipeline has been replaced completely, and the purity of the high-purity helium gas is achieved.
2) And (3) sample gas testing:
and closing the fourth control valve 84, opening the first pressure regulating valve 71, the first control valve 81, the second control valve 82 and the third control valve 83, and regulating the flow rate from the first pressure regulating valve 71 to the float flowmeter to be maintained at 20ml/min, wherein the flow rate needs to be regulated to be matched with the sample injection flow rate of the oxygen content analysis device 3, and if the flow rate required by the oxygen content analysis device 3 is more than 20ml/min, the flow rate needs to be regulated to be matched with the oxygen content analysis device 3.
3) Numerical value recording:
according to the test principle, the reading value of the oxygen content analysis equipment 3 is the concentration of the fluorine content, and when the indication value of the instrument is stable, the oxygen content value can be read;
and reading every 2min, at least continuously reading twice, and taking the arithmetic mean value of the continuous readings as the final analysis result when the continuous readings no longer show the directional variation trend and the relative deviation does not exceed 3%.
4) Ending:
after the analysis is finished, the valve of the sample gas supply device 1 is closed, the fourth control valve 84 is opened, the float flow meter is adjusted to 50ml/min, and the fourth control valve 84 is closed until the float flow count value is 0. After repeating for several times (for example, 3 times), opening the fourth control valve 84, connecting the oxygen content analysis device 3 until the oxygen content analysis value is reduced to below 2ppm, which indicates that the sample gas in the pipeline has been replaced completely;
the sample gas supply means 1 can be removed by closing the valve of the purge gas supply means 5 and closing the first regulating valve, and the third control valve 83.
The analysis is finished.
It is worth noting that 1) when the purge gas purges the replacement pipeline, whether leakage points exist at the joints of each pipeline and each valve can be effectively detected, if leakage exists, the purging is required after fastening, so as to ensure no leakage.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the scope of the present invention.
Claims (10)
1. Fluorine content testing arrangement in fluorine-containing mist, its characterized in that includes:
the sample gas supply device is used for outputting fluorine-containing mixed gas;
the conversion pile is filled with conversion filler and is used for converting fluorine gas in the fluorine-containing mixed gas into oxygen gas;
the oxygen content analysis equipment is used for carrying out oxygen content analysis on the oxygen-containing mixed gas treated by the conversion pile;
the sample gas supply device, the conversion pile and the oxygen content analysis equipment are sequentially communicated through a pipeline provided with a control valve.
2. The device for testing the content of fluorine in the fluorine-containing mixed gas according to claim 1, wherein the sample gas supply device is communicated with the gas inlet of the conversion pile through a first pipeline which is provided with a first pressure regulating valve and a first control valve in sequence.
3. The device for testing the content of the fluorine in the fluorine-containing mixed gas according to claim 2, wherein a gas outlet of the first pipeline is communicated with a gas inlet of the conversion pile through a second pipeline provided with a flow meter.
4. The device for testing the content of the fluorine in the fluorine-containing mixed gas according to claim 3, wherein a second control valve is further provided on the second pipeline.
5. The apparatus for testing the content of fluorine in a fluorine-containing mixed gas according to claim 4, wherein the apparatus for testing the content of fluorine in a fluorine-containing mixed gas further comprises:
and the purge gas supply device is communicated with the first pipeline and/or the second pipeline through a third pipeline which is sequentially provided with a second pressure regulating valve and a fourth control valve.
6. The device for testing the content of fluorine in the fluorine-containing mixed gas according to any one of claims 1 to 5, wherein the gas outlet of the conversion pile is communicated with the gas inlet of the oxygen content analysis equipment through a fourth pipeline provided with a third control valve.
7. The device for testing the content of the fluorine in the fluorine-containing mixed gas according to claim 6, wherein a filter is arranged on the fourth pipeline, and the filter is used for filtering impurities in the fourth pipeline.
8. The apparatus for testing the content of fluorine in a fluorine-containing mixed gas according to claim 6, wherein the apparatus for testing the content of fluorine in a fluorine-containing mixed gas further comprises:
and the tail gas treatment device is communicated with the gas outlet of the oxygen content analysis equipment through a pipeline.
9. The method for testing the content of the fluorine in the fluorine-containing mixed gas is characterized by utilizing the device for testing the content of the fluorine in the fluorine-containing mixed gas as claimed in any one of claims 1 to 8, and specifically comprises the following steps:
and converting the fluorine-containing mixed gas output by the sample gas supply device into oxygen through a conversion pile, and testing the oxygen content of the converted oxygen-containing mixed gas by using oxygen content analysis equipment to obtain the content of fluorine gas in the initial fluorine-containing mixed gas.
10. The method for testing the content of the fluorine in the fluorine-containing mixed gas according to claim 9, wherein before the test, all or part of pipelines are purged by using a purge gas supply device.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114813448A (en) * | 2022-04-18 | 2022-07-29 | 浙江博瑞中硝科技有限公司 | Method for automatically testing fluorine content in fluorine-nitrogen mixed gas |
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| CN114813448A (en) * | 2022-04-18 | 2022-07-29 | 浙江博瑞中硝科技有限公司 | Method for automatically testing fluorine content in fluorine-nitrogen mixed gas |
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