CN113916265A - Processing method of Hall position sensing signal for permanent magnet synchronous linear motor - Google Patents

Processing method of Hall position sensing signal for permanent magnet synchronous linear motor Download PDF

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CN113916265A
CN113916265A CN202111110798.1A CN202111110798A CN113916265A CN 113916265 A CN113916265 A CN 113916265A CN 202111110798 A CN202111110798 A CN 202111110798A CN 113916265 A CN113916265 A CN 113916265A
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position sensing
hall position
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刘吉柱
陈壮
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Suzhou Linear Precision Drive Control Technology Co ltd
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    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness

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Abstract

The embodiment of the invention aims to provide a processing method of a Hall position sensing signal for a permanent magnet synchronous linear motor. The method comprises the steps of constructing a mapping relation between linear Hall position sensing signals and periodic electrical angles of a permanent magnet synchronous linear motor to obtain a data table in which the Hall position sensing signals and displacements are in one-to-one correspondence; acquiring Hall position sensing signals output by a Hall position sensor; filtering the Hall position sensing signal to obtain a de-noised Hall position sensing signal; carrying out analog-to-digital conversion on the denoised Hall position sensing signal to obtain a digitized Hall position sensing signal; and inquiring the data table by adopting a linear interpolation method according to the digitized Hall position sensing signal so as to obtain the displacement corresponding to the Hall position sensing signal. The processing method has the advantages of simple process, high precision and high resolution.

Description

Processing method of Hall position sensing signal for permanent magnet synchronous linear motor
Technical Field
The invention relates to the technical field of sensors, in particular to a processing method of a Hall position sensing signal for a permanent magnet synchronous linear motor.
Background
In the field of industrial applications, single-sided moving-coil Permanent Magnet Synchronous Linear Motors (PMSLMs) are widely used. The primary stage of the PMSLM is commonly referred to as the stator and the secondary stage as the mover. In order to realize the normal movement of the PMSLM, the movable stator of the PMSLM needs to be produced in different lengths, the short primary and the long secondary are the design forms which are usually adopted, and the difference of the lengths of the movable stator of the PMSLM is equivalent to the stroke range of the PMSLM. The PMSLM can directly realize linear motion, has the advantages of high precision, high speed, high power density, good dynamic response, compact motor structure and the like, and has wide application prospect in the fields of semiconductors, laser processing, integrated circuits and the like
At present, an alternating current control system based on PMSLM is commonly used in high-speed, fast-response and high-precision application occasions such as intelligent manufacturing, and a grating or a magnetic grating is generally used as a position detection unit to perform PMSLM high-precision motion control. However, such position sensors are expensive, high in installation requirements, limited in travel, and the like, which are not beneficial to the reliability of the PMSLM control system, and usually need to adopt a control mode of coordinate vector transformation, so that the calculation amount is large, the occupied storage space is large, and the performance requirements and the complexity of a hardware processing platform are increased.
In order to solve the problems, the system based on the permanent magnet synchronous linear motor and the Hall position sensor is provided, the system is based on the Hall effect principle, combines a stator space structure and an electric model of the permanent magnet synchronous linear motor, carries out signal generation structural design based on a linear Hall sensor, and effectively meets the requirements of high precision, low cost and simplified platform by adopting a three-phase six-Hall signal generation structure. After the hardware system is built, how to better process Hall position sensing signals acquired by the Hall position sensor, so that the detection accuracy of the system is ensured, and the problem which needs to be solved urgently is solved.
Therefore, in view of the above technical problems, it is necessary to provide a processing method for hall position sensing signals of a permanent magnet synchronous linear motor, which has the advantages of simple algorithm process, high precision and high resolution.
Disclosure of Invention
In view of this, an object of an embodiment of the present invention is to provide a processing method for hall position sensing signals of a permanent magnet synchronous linear motor, where the processing method constructs a mapping relationship between linear hall output signals and electric angles of a motor magnetic field period, makes a corresponding displacement information data table from hall output voltage values acquired by an AD module, and stores the hall displacement information data table in an address space of a micro-processing platform in a binary code form, and a hall senses a signal voltage of the magnetic field period position during operation to calculate a corresponding displacement value on the basis of the data table, so that better hall output signal subdivision can be performed on the basis, and the processing method has the advantages of simple algorithm process, high precision, and high resolution.
In order to achieve the above object, an embodiment of the present invention provides the following technical solutions: a processing method of a Hall position sensing signal for a permanent magnet synchronous linear motor comprises the following steps: constructing a mapping relation between linear Hall position sensing signals and periodic electrical angles of the permanent magnet synchronous linear motor to obtain a data table in which the Hall position sensing signals and displacements are in one-to-one correspondence; acquiring Hall position sensing signals output by a Hall position sensor; filtering the Hall position sensing signal to obtain a de-noised Hall position sensing signal; performing analog-to-digital conversion on the denoised Hall position sensing signal to obtain a digitized Hall position sensing signal; and inquiring the data table by adopting a linear interpolation method according to the digitized Hall position sensing signal so as to obtain the displacement corresponding to the Hall position sensing signal.
Preferably, the resolution of the analog-to-digital converter is set to 12 bits during the construction of the data table.
Preferably, the hall position sensing signals are six hall signals, and are processed into three sinusoidal signals with a 120-degree phase difference by adopting a differential mode.
Preferably, the data table comprises the parameters: positive and negative, three-phase voltage comparison, phase shift, table phase and interval checking.
Preferably, the processing method further comprises the steps of: and carrying out error compensation on the de-noised Hall position sensing signal.
Preferably, the error compensation step includes processing the de-noised hall position sensing signal by using a symmetric difference method.
Preferably, the error compensation step includes obtaining a temperature drift correction value by using a induction method, and correcting the denoised hall position sensing signal by using the temperature drift correction value.
Preferably, the temperature drift correction value converges to the inverse of the temperature drift coefficient of the hall position sensor.
Preferably, the hall linear position sensor is firstly installed on the permanent magnet synchronous linear motor through a positioning shell, and then the hall linear position sensor is calibrated and calibrated by using a high-precision grating.
Preferably, the hall position sensing signal is a voltage signal.
The invention has the following advantages:
according to the processing method for the Hall position sensing signal of the permanent magnet synchronous linear motor, which is provided by the embodiment of the invention, the mapping relation between the linear Hall output signal and the periodic angle of the magnetic field of the motor is constructed, the Hall output voltage value acquired by the AD module is made into the corresponding displacement information data table, the Hall displacement information data table is stored into the address space of the micro-processing platform in the form of binary codes, and the Hall senses the corresponding displacement value on the basis of the signal voltage operation data table of the periodic position of the magnetic field in work, so that better Hall output signal subdivision can be carried out on the basis, the operation amount in the signal processing process can be greatly reduced, the real-time performance of position detection of the position sensor is improved, the high performance requirement on a microprocessor is reduced, and the complexity and the cost of a control system are reduced.
Further, the processing method of the Hall position sensing signal for the permanent magnet synchronous linear motor provided by the embodiment of the invention solves the problem of large processing error of the Hall sinusoidal displacement signal caused by the nonlinearity of the space magnetic field signal of the permanent magnet of the stator of the linear motor.
Furthermore, the processing method for the hall position sensing signal of the permanent magnet synchronous linear motor provided by the embodiment of the invention adopts various error compensation methods, corrects the error source of the system, and finally obtains accurate displacement data information based on interval table look-up algorithm operation.
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In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a single-sided permanent magnet linear synchronous motor according to an embodiment of the present invention;
FIG. 2 is a schematic view of the Hall sensor based on the single-side permanent magnet linear synchronous motor system in FIG. 1;
FIG. 3 is a schematic diagram of the operating principle of the single-sided permanent magnet linear synchronous motor according to the embodiment of the present invention;
FIG. 4 is a schematic flow chart of a processing method of Hall position sensing signals for a permanent magnet synchronous linear motor according to an embodiment of the present invention;
FIG. 5 is a diagram illustrating a Hall sinusoidal signal sampling minimum displacement interval according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of division of a three-phase Hall signal linear interval according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of the symmetrical differential output of Hall signals in the embodiment of the invention;
FIG. 8 is a schematic diagram of a Hall signal temperature drift error in an embodiment of the present invention;
FIG. 9 is a schematic diagram of signal processing before and after temperature drift in the embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, in this embodiment, the hall position sensor based system of the permanent magnet synchronous linear motor includes a permanent magnet synchronous linear motor 100 and a hall position sensor 200. The permanent magnet synchronous linear motor 100 includes a mover 10 (not shown) and a stator 12 (not shown).
As shown in fig. 1, the permanent magnet synchronous linear motor 100 includes a frame body. The frame body includes a mover stage 150, a slider 151, a slide rail 153, stator magnetic steel 155, and a stator yoke 157. The mover stage 150 is used to carry the mover 10 (not shown in the drawings) of the permanent magnet synchronous linear motor 100. The slider 151 is disposed below the mover stage 150 and linearly moves along the slide rail 153, so as to drive the mover stage 150 to linearly move. Below the mover stage 150, there are a stator magnetic steel 155 and a stator yoke 157, and the stator 12 is disposed on the frame body of the permanent magnet synchronous linear motor 100 through the stator yoke 157. As shown in fig. 2, the hall position sensor 200 is provided on an end surface of the mover stage 150, and the hall position sensor 200 may be considered to be provided on an end surface of the mover 10. The hall position sensor 200 is simultaneously located above the permanent magnet of the stator 12.
As shown in fig. 3, in operation, the mover 10 of the permanent magnet synchronous linear motor 100 directly drives in the direction of the traveling wave magnetic field under the action of the electromagnetic thrust formed between the mover and the stator 12. The hall position sensor 200 converts magnetic signal information into a hall output voltage signal by sensing a spatial air gap magnetic field of the upper surface of the permanent magnet synchronous linear motor 100. In addition, in order to enable the permanent magnet synchronous linear motor 100 to control the linear motion direction, the displacement direction of the permanent magnet synchronous linear motor 100 may be changed by phase sequence conversion control of A, B, C three-phase currents.
As shown in fig. 4, for the system of the permanent magnet synchronous linear motor and the hall position sensor, a flow chart of the processing method of the hall position sensing signal provided in the embodiment of the present invention is shown. In the embodiment, the processing method of the Hall position sensing signal for the permanent magnet synchronous linear motor comprises three steps.
Step S1: and constructing a mapping relation between the linear Hall position sensing signals and the periodic electrical angle of the permanent magnet synchronous linear motor to obtain a data table in which the Hall position sensing signals and the displacement are in one-to-one correspondence.
The output signal of the hall position sensor is typically a sinusoidal nonlinear signal. The influence of the non-linearity of the sinusoidal output signal in the signal processing is first analyzed for its initial displacement output signal. According to the Hall position sensor based on the table look-up subdivision principle, after a Hall element of the Hall position sensor induces a rotor magnetic field of a linear motor to obtain an analog displacement signal and output the analog displacement signal, the Hall position sensor performs signal processing operation of digital signal conversion through an analog-to-digital conversion module, an AD module samples a Hall voltage value, and the Hall voltage value with position information can generate a minimum quantization scale LSB after AD sampling. Under the condition that a sampling object is a linear signal, displacement intervals corresponding to the minimum quantization scale are uniform, but the Hall position sensor obtains a nonlinear sine and cosine signal by sensing a PMSLM stator permanent magnet space magnetic field, so that the displacement corresponding to the minimum quantization scale has difference.
When the Hall position detection unit moves one pitch, namely a magnetic field period, above the PMSLM stator permanent magnet, the linear Hall outputs a corresponding sine and cosine voltage signal. As shown in FIG. 5, assume ui-1,uiVoltage values, x, of two adjacent moments acquired by the AD conversion module within the range of (0 DEG, 90 DEG)i-1,xiIs the corresponding displacement value.
Setting the number of bits of an AD conversion module as n and the quantization step as p; assuming that the sampling points of the AD conversion module are not overlapped, the voltage value range of the Hall signal is (0, 2), the unit is V, the minimum quantization scale is the difference value of the adjacent Hall voltage sampling points, and can be obtained as follows:
Figure BDA0003273947080000061
due to the characteristics of the sine-cosine curve, only considering the (0 °, 90 °) electrical angle range in one hall periodic signal, the minimum interval displacement can be expressed as:
Figure BDA0003273947080000062
because of the fact that
Figure BDA0003273947080000063
Suppose xiIf the value is a continuous value, the formula is transformed and derived to obtain:
Figure BDA0003273947080000064
it can be seen that the value of Δ x' is constantly greater than zero within the electrical angle range (0 °, 90 °) in a periodic signal, and Δ x is a monotonically increasing function within this range, and when sampling a continuous sinusoidal signal, when the electrical angle is 0 °, the minimum interval displacement Δ x takes the minimum value, and the resolution of the analog-to-digital converter is set to 12 bits, and the minimum interval displacement can be obtained as
Figure BDA0003273947080000065
At this time, the sinusoidal signal of the hall output is best linear, i.e., closer to 0 ° the better.
Preferably, in the embodiment of the present invention, the hall position sensing signal is a six-hall signal, and is processed into three sinusoidal signals with a phase difference of 120 ° by using a differential processing method. As shown in fig. 6, in order to make the period shift sampling point and the corresponding voltage value have good linearity, the whole signal period 2 λ is evenly divided into twelve intervals, i.e., each interval is λ/6 (corresponding to a period electrical angle of 30 °). In each interval, the linearity of the corresponding sine curve can meet the requirement, such as the Hall signal curve A in the first segmentation interval.
According to the analysis, each interval with the best signal period curve linearity is determined, and the signal voltage and the displacement of each interval are in one-to-one correspondence to form a data table, as shown in table 1. The displacement corresponding to the voltage value of the key position of the signal is collected, table lookup subdivision can be carried out through a linear interpolation method, the displacement is stored in an E2PROM in a microprocessor, when the Hall linear position sensor works, the Hall sensor senses a permanent magnet space magnetic field of a stator of a linear motor to generate a corresponding voltage value, and after the Hall displacement signal is processed through filtering, a displacement data table built and stored in the microprocessor is inquired to obtain the corresponding displacement and output the displacement.
TABLE 1 Interval code value determination
Figure BDA0003273947080000071
Wherein, step S1 may initially construct a primary data table; and calling the data table when the data is processed again subsequently. Step S1 can also be an existing data table, and the processing method need not be constructed. For convenience of expression only, step S1 is collectively referred to herein as constructing a data table.
In the embodiment, the problem of large processing error of the Hall sinusoidal displacement signal caused by nonlinearity of the permanent magnet space magnetic field signal of the linear motor stator is effectively solved by adopting an interval table look-up subdivision algorithm, the storage address of the target displacement value in the microprocessor is obtained according to the output Hall digital signal, the main operation processing of the whole signal subdivision algorithm is simple table look-up, the real-time response performance and the signal processing speed of the Hall position sensor are greatly improved, and the operation amount of a sensor processing platform is reduced.
Step S2: acquiring Hall position sensing signals output by a Hall position sensor; filtering the Hall position sensing signal to obtain a de-noised Hall position sensing signal; and carrying out analog-to-digital conversion on the de-noised Hall position sensing signal to obtain a digitized Hall position sensing signal.
Step S3: and inquiring the data table by adopting a linear interpolation method according to the digitized Hall position sensing signal so as to obtain the displacement corresponding to the Hall position sensing signal.
The resolution performance of the position sensor is closely related to the position detection accuracy, and in addition, many other factors also affect the position sensor detection accuracy. Preferably, the processing method of the hall position sensing signal for the permanent magnet synchronous linear motor further comprises the steps of: and carrying out error compensation on the de-noised Hall position sensing signal.
In practical application, the integrated position detection unit based on the permanent magnet synchronous linear motor system can have some random interference factors such as mechanical errors and zero drift, so that the output of the Hall analog signal is not an ideal sinusoidal curve. Through the analysis in the previous section, the actual voltage analog signal output by the hall can be expressed as formula 3.5:
Figure BDA0003273947080000081
in the formula, epsilon is an amplitude variation coefficient, delta is zero drift, and xi is a random error.
Assuming that the random interference factor in the hall analog signal fluctuates up and down in one error value, such error sources existing in the hall signal system can be eliminated and reduced by differentiating two output signals with a difference of 180 °, as shown in fig. 7, signals a + and a-are output before hall differentiation, and signal a is a hall output signal after symmetrical differential processing.
In the embodiment, the permanent magnet synchronous linear motor device can generate certain temperature rise during working, the automation device basically runs continuously for a long time, meanwhile, the working running speed is high, and the position sensor is required to have a wide working temperature range and high dynamic response performance. The Hall element is used as a semiconductor material, and the intrinsic characteristics of the Hall element are known, the magnetic sensitivity coefficient of the Hall element is easily influenced by temperature, the temperature rise is caused by the working environment and the long-time work of an electronic device, so that the temperature drift causes position detection errors, the uncontrollable factors greatly influence a table lookup subdivision algorithm, the performance improvement of the Hall position sensor is greatly restricted, the temperature drift value of the Hall position sensor needs to be reduced for temperature drift correction, and the temperature stability of the Hall position sensor can be improved to realize better position detection performance.
In this example, the CH604ASR Hall element from Cosemitech is used asThe examples are illustrated by temperature drift. Setting K for signal error of Hall linear position sensor caused by temperature drift due to temperature riseTIs a temperature drift coefficient, and the three-phase Hall output signal V after the temperature driftKA,VKB,VKCCan be expressed as
Figure BDA0003273947080000091
When the hall signal is subjected to temperature drift, the actual hall output voltage signal has a certain deviation from the displacement output voltage under the ideal condition, as shown in fig. 8, if the voltage value of the hall output signal after temperature drift is not corrected, an error always exists. As can be seen from the above, the Hall position sensor displacement lookup table takes the interval of signals [0 degrees and 30 degrees ] as a standard, and at the moment, the signals are Hall analog signals before temperature drift; if a certain hall voltage value is taken as a 'in the range, ideally, the microprocessor stores an address table to obtain that a' should be x 'for the displacement value at the moment, however, the actual displacement value should be x, so that the position detection error generated by the temperature drift is known as delta x-x', and the closer to the intersection point of two-phase hall output sine-cosine waveforms with the phase difference of 120 degrees, the larger the position detection error.
Certain influence of temperature instability of the Hall position sensor on displacement precision detection needs to be further analyzed and solved. Taking phase A as an example, assume HaIs the voltage value (V), H in the actual situation at x displacementAFor the calibrated voltage value (V) at the same displacement, the real-time temperature drift coefficient k of the hall sensor can be defined as k ═ Ha/HA. And if an iterative algorithm can be constructed, the voltage value of the lookup table can be obtained by satisfying that K is 1/K, and the value can be obtained in real time, so that the influence of the temperature drift of the Hall sensor can be eliminated according to the method.
Therefore, the temperature drift compensation iterative algorithm is introduced in the embodiment of the invention, because the conditions of all intervals of the table lookup subdivision algorithm are the same, only the 1 st interval of the Hall single-period three-phase output is taken as an example for analysis, and the schematic diagrams of signal processing before and after temperature drift are shown in FIG. 9.
Taking interval 1 as an example, as shown in FIG. 9, HAThe phase data are used to look-up a table, HCThe phase data is used for correction. Suppose K 01 is the first iteration value of the temperature drift compensation iteration algorithm, and the phase value H is looked upABy using a real-time temperature drift compensation coefficient Ki and the voltage H under the actual working condition in each iteration processaAre multiplied to obtain HcObtaining H by using the same calculation processing modeCFor correction. Assuming actual voltage value H passing through phase AaCalculating the displacement at the moment to be x ', and if the corresponding corrected phase C phase voltage value at the moment is H' is deduced by utilizing the x 'in a reverse mode'CThen H 'can be derived from the upper graph'CAnd HcH betweenCThe phase voltages should be corrected more accurately. Let HavIs H'CAnd HcThe value after the (n + 1) th iteration of the temperature drift compensation coefficient is defined as Kn+1=Hav/HC
Deriving by a temperature drift compensation coefficient iterative coefficient theoretical formula to obtain
Figure BDA0003273947080000101
Obtaining a temperature drift correction value K by a induction methodnConverging to the reciprocal of the temperature drift coefficient K of the Hall sensor, wherein the recursion iteration coefficient has a limit, and when the table look-up algorithm is carried out, the correction coefficient K is usednAnd the voltage is multiplied by the actual voltage value of the Hall operation to eliminate the influence of reducing the temperature drift of the Hall sensor.
The processing method for the Hall position sensing signal of the permanent magnet synchronous linear motor provided by the embodiment of the invention adopts various error compensation methods, corrects the error source of the system, and finally obtains accurate displacement data information based on interval table look-up algorithm operation.
Preferably, aiming at the analysis of error sources possibly generated in the installation process of the Hall position sensor, the Hall linear position sensor is firstly installed on the permanent magnet linear motor through the positioning shell, and then is calibrated and calibrated by using the high-precision grating, so that the installation error is eliminated, and the precision of the Hall linear position sensor is improved.
A calibration system of the Hall linear displacement sensor adopts a method of function mapping uniqueness. The system core is that the initial data table of the table look-up algorithm is further calibrated in a table reconstruction and linear interpolation mode. Suppose Ha、HAAre all non-empty sets, a1And a2Are two mutually different and are both HaAny two subsets of the non-empty set, HaAnd HAHas a rule of correspondence y if A1=y(a1)、A2=y(a2) Then A1And A2Are two mutually different and are both HAAny two subsets of the non-empty set. The Hall linear position sensor moves along with the rotor of the motor, fixed-point non-repeated acquisition is carried out on the sensed stator specific permanent magnet space magnetic field signal of the permanent magnet linear motor, and then the Hall displacement signal forms an H through the corresponding voltage value obtained by AD conversionaA non-empty set. The grating displacement data synchronously moving with the Hall position sensor and collected at the same point with high-precision increment form another HAA non-empty set. And fitting the two data sets by using a least square method to obtain a corresponding rule y which can enable the two groups of displacement data to be mapped one by one and has the minimum difference value, so that the two groups of displacement data are optimal. If a point is not found in the table, the displacement value at that time can be obtained by performing linear interpolation between two local points.
In the embodiment of the invention, voltage signals output by a stator permanent magnet space magnetic field of a Hall position sensor induction permanent magnet linear motor are filtered to process noise, the voltage signals are converted into digital quantity by an analog-digital module, six paths of signals adopt digital difference to obtain three-phase signals which are finally 120 degrees different from each other, normalized signal processing is carried out to eliminate third harmonic, then correction and compensation are carried out by a temperature drift algorithm, the influence of the temperature drift characteristic of the Hall position sensor is eliminated in real time in a compensation coefficient iterative calculation mode, any error source correction such as installation error is carried out by a calibration system and the like, accurate displacement data information is finally obtained based on interval table look-up algorithm operation, and the operation quantity of chip processing is not very large on the premise of realizing high-precision subdivision of Hall signals.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (10)

1. A processing method of Hall position sensing signals for a permanent magnet synchronous linear motor is characterized by comprising the following steps:
constructing a mapping relation between linear Hall position sensing signals and periodic electrical angles of the permanent magnet synchronous linear motor to obtain a data table in which the Hall position sensing signals and displacements are in one-to-one correspondence;
acquiring Hall position sensing signals output by a Hall position sensor; filtering the Hall position sensing signal to obtain a de-noised Hall position sensing signal; performing analog-to-digital conversion on the denoised Hall position sensing signal to obtain a digitized Hall position sensing signal;
and inquiring the data table by adopting a linear interpolation method according to the digitized Hall position sensing signal so as to obtain the displacement corresponding to the Hall position sensing signal.
2. The method for processing the Hall position sensing signal for the PMSM according to claim 1, wherein the resolution of the A/D converter is set to 12 bits during the construction of the data table.
3. The method for processing the Hall position sensing signal for the permanent magnet synchronous linear motor according to claim 2, wherein the Hall position sensing signal is a six Hall signal, and is processed into three sinusoidal signals with a 120-degree phase difference by adopting a differential process.
4. The method for processing the Hall position sensing signal for the PMSM according to claim 1, wherein the data table includes parameters: positive and negative, three-phase voltage comparison, phase shift, table phase and interval checking.
5. The processing method of the hall position sensing signal for the permanent magnet synchronous linear motor according to claim 1, wherein the processing method further comprises the steps of: and carrying out error compensation on the de-noised Hall position sensing signal.
6. The method as claimed in claim 5, wherein the error compensation step comprises processing the de-noised Hall position sensing signals by a symmetric difference method.
7. The method as claimed in claim 5, wherein the error compensation step includes obtaining a temperature drift correction value by using a induction method, and correcting the de-noised hall position sensing signal by using the temperature drift correction value.
8. The method of claim 7, wherein the temperature drift correction value converges to an inverse of a temperature drift coefficient of the hall position sensor.
9. The method for processing the Hall position sensing signal for the permanent magnet synchronous linear motor according to claim 1, wherein the Hall linear position sensor is firstly installed on the permanent magnet synchronous linear motor through a positioning shell, and then the Hall linear position sensor is calibrated and calibrated by using a high-precision grating.
10. The method for processing the Hall position sensing signal for the PMSM according to claim 1, wherein the Hall position sensing signal is a voltage signal.
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