CN113856343A - ALD equipment is with lower dress filter core formula secondary filter - Google Patents
ALD equipment is with lower dress filter core formula secondary filter Download PDFInfo
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- CN113856343A CN113856343A CN202111259256.0A CN202111259256A CN113856343A CN 113856343 A CN113856343 A CN 113856343A CN 202111259256 A CN202111259256 A CN 202111259256A CN 113856343 A CN113856343 A CN 113856343A
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- filter element
- secondary filter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
- B01D46/2411—Filter cartridges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
- B01D46/0041—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding
Abstract
The invention belongs to the technical field of ALD (atomic layer deposition) coating equipment, and particularly relates to a lower filter element type secondary filter for ALD equipment, which comprises a secondary filter element, wherein a sealing ring is sleeved at the lower end of the secondary filter element, a support is clamped at the lower end of the sealing ring, a pressing plate is fixed outside the support, an end cover is clamped inside the pressing plate, a filter tank body is arranged outside the secondary filter element, the top end of the filter tank body is in through connection with an air inlet pipe, one side of the support is in through connection with an angle valve, and the lower end of the angle valve is in through connection with a vacuum pump; according to the invention, the filter element is rotatably clamped on the filter tank body, the support and the filter element are tightly pressed through the end cover, the sealing ring is attached, and the end face sealing is ensured, so that when the vacuum pump is started, gas is subjected to primary filtering, then the gas with residual dust enters the lower filter element type secondary filter, most of dust is removed, and the gas enters the vacuum pump through the angle valve, so that the stable operation of the vacuum pump is protected, the installation space is saved, and the secondary filtering effect is achieved.
Description
Technical Field
The invention belongs to the technical field of ALD (atomic layer deposition) coating equipment, and particularly relates to a lower filter element type secondary filter for the ALD equipment.
Background
The ALD device, namely the atomic layer deposition coating device, can coat a layer of film with the thickness of a single layer of atoms on the surface of metal, has very high coating precision, is a very advanced nano-scale surface treatment technology, and is widely applied to the field of semiconductor integrated circuits at present.
The filter element of the existing ALD device mainly adopts a horizontal mode and a mode of installing the filter element from top to bottom, the dust cannot be completely filtered by the primary filter element, the vacuum pump is easily blocked, secondary filtration is increased on a pipeline, the mode of keeping the horizontal mode and installing the filter element from top to bottom needs a large space, the pipelines have a large number of relative elbows, the occupied space of the device is large, the space for replacing the filter element is also large, and the two installation modes are not convenient for cleaning the deposited dust in the filter tank body.
Therefore, the invention provides a lower filter element type secondary filter for an ALD device.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the lower filter element type secondary filter for the ALD equipment comprises a secondary filter element, wherein a sealing ring is sleeved at the lower end of the secondary filter element, a support is clamped at the lower end of the sealing ring, a pressing plate is fixed outside the support, an end cover is clamped inside the pressing plate, a filter tank body is arranged outside the secondary filter element, the top end of the filter tank body is connected with an air inlet pipe in a penetrating way, one side of the support is connected with an angle valve in a penetrating way, and the lower end of the angle valve is connected with a vacuum pump in a penetrating way; when the filter is in operation, the secondary filter element is clamped on the filter tank body, then the support is clamped at the bottom of the secondary filter element, the support and the secondary filter element are pressed tightly through the end cover, the sealing ring is attached, then the end cover is pressed and fixed tightly through the pressing plate, the sealing of the end surface is ensured, the installation of the filter element is completed, when the filter element needs to be replaced, the pressing plate is loosened, the end cover is opened, the support and the secondary filter element are respectively rotated and taken down, thereby the effects of quick installation and quick disassembly and replacement are realized, meanwhile, the installation space is saved through the way of downloading, when the vacuum pump is started, gas is filtered once, the residual dust is driven into the secondary filter element type filter device by the air inlet pipe, at the moment, the gas firstly enters the filter tank body, then the residual dust in the gas is filtered again through the secondary filter element, the purified gas enters the support, and then the dust in the gas can be removed by secondary filtration through the angle valve via the support, the vacuum pump is prevented from being blocked, the effect of improving the operation stability of the vacuum pump is achieved, and when the re-filtering filter element needs to be replaced, the angle valve is only required to be turned off at the moment, and the filter element can be replaced without stopping the pump.
Preferably, a mounting frame is specified at the top end of the re-filtering filter element, a support ring is rotatably connected inside the mounting frame, a connecting seat is fixed outside the support ring, a limiting column is fixed at the top end of the connecting seat, a sliding block is slidably connected inside the limiting column, a lifting rod is fixed at one end of the sliding block, which is far away from the mounting frame, a clamping block is fixed at one end of the lifting rod, which is far away from the sliding block, a telescopic rod is rotatably connected at the top end of the sliding block, one end of the telescopic rod, which is far away from the sliding block, is rotatably connected with the mounting frame, a limiting ring is arranged outside the connecting seat, and the limiting ring is fixedly connected with the filtering tank body; the during operation, push the secondary filter core to the inside of filtering the jar body, manual rotation mounting bracket afterwards, the mounting bracket just can stimulate the telescopic link simultaneously and rotate after rotating, and the connecting seat at this moment can not rotate thereupon, thereby at this moment the telescopic link can promote the sliding block motion, when the installation staff should anticlockwise rotate, at this moment the telescopic link can promote the sliding block and slide in the direction of keeping away from the mounting bracket in spacing post, the sliding block slides thereby it slides to promote the liftout bar, the liftout bar motion and then drive joint piece motion, contact until joint piece and spacing ring, like this alright at the in-process of dismantlement, the secondary filter core can not drop, as long as take off their rotation respectively just can, and is simple and convenient, and the installation also not loaded down with trivial details, thereby the effect of being convenient for installation dismantlement has been reached, further improvement the practicality.
Preferably, the number of the telescopic rods is four, the telescopic rods are distributed outside the mounting frame in an array manner, four clamping grooves are formed in the limiting ring, and the shape and size of each clamping groove are matched with that of each clamping block; during operation, when the joint piece rotates to the central axis that its central axis and the inside central axis of seting up the draw-in groove of spacing ring when being collinear, staff at this moment should obviously feel the rotation the condition that appears not smooth and easy, continues to rotate afterwards and makes the joint piece card go into the inside of spacing ring to reach the effect of quick installation, and make the effect of installation better through four draw-in grooves.
Preferably, a clamping spring is fixed inside the clamping block, fastening blocks are fixed on two sides of the clamping spring, the fastening blocks are connected with the clamping block in a sliding mode, and the outer portion of each fastening block is subjected to fillet treatment; the during operation, after the joint piece reaches predetermined mounted position, the chamfer of fastening block can receive an extrusion force when continuing to promote the joint piece, thereby make fastening block compression joint spring make its shrink, the joint piece just can slide to mounted position after afterwards, the elastic potential energy of joint spring obtains the release, thereby promote fastening block installation mechanism contact, thereby make fastening block inseparabler with installation mechanism's contact, further improvement the pressure of fastening block after the installation, thereby the steadiness of installation has been improved.
Preferably, a rubber pad is fixed on one side of the fastening block close to the jacking rod, and a plurality of through grooves are formed in the surface of one side of the rubber pad close to the jacking rod; during operation, after the fastening block is installed, the rubber pad outside the fastening block can effectively improve the friction force between the installation mechanisms of the fastening block, so that the fastening block is not easy to fall off, and the force applied during disassembly is increased, but the improvement effect on the installation stability is more obvious in comparison.
Preferably, a pressure measuring assembly is arranged at the bottom end of the secondary filtering filter element, the pressure measuring assembly comprises a pressure measuring shell, pressure measuring plugs are slidably connected to two sides of the pressure measuring shell, a detection shell is fixed inside the pressure measuring shell, detection plugs are slidably connected to two sides inside the detection shell, a detection column is fixed between the two detection plugs, a detection point is fixed outside the detection column, and a rheostat is slidably connected outside the detection point; when the pressure difference is judged, the filtering condition of the secondary filtering filter element can be effectively deduced, so that the state of the secondary filtering filter element can be effectively monitored in real time, and the detection shell is hidden by a plurality of mechanisms, reduce the influence on the filtration during the operation process.
Preferably, a through hole is formed in the top end of the pressure measuring shell, an extension rod is fixed to the top end of the pressure measuring plug and is in through connection with the through hole, a limiting plate is fixed to the top end of the extension rod, and the diameter of the through hole is smaller than the diameter of the pressure measuring plug and the diameter of the limiting plate; during operation, at the gliding in-process of pressure measurement stopper, it can drive extension rod simultaneously and slide together, thereby the extension rod slides and drives the limiting plate and move, and through the through-hole on pressure measurement casing top and the diameter of limiting plate, pressure measurement stopper, can effectually carry out spacingly to the motion process to prevent that equipment from breaking away from the motion range, cause monitoring facilities to lose the efficiency.
Preferably, an alarm contact is fixed on one side of the rheostat, and the detection shell is installed to ensure that the installation position of the alarm contact is positioned on one side close to the center of the secondary filter element; the during operation, when the secondary filter core needs to be changed, the check point at this moment can slide under the effect of pressure differential to contact with the alarm contact to trigger alarm signal, outside alarm equipment just can report an emergency and remind the staff to change the secondary filter core, thereby reached the automatic effect of warning the change of sending out of warning after the secondary filter core uses certain degree.
Preferably, a fastening shell is fixed at the bottom end of the bracket, an elastic air bag is connected in the fastening shell in a sliding manner, the bottom end of the elastic air bag is in through connection with an air inlet valve, transmission plates are arranged on two sides of the air inlet valve, the bottom end of each transmission plate is connected with a connecting column in a sliding manner, and the connecting column is in through connection with the fastening shell; the during operation, aim at the bottom of driving plate with the spliced pole, promote the end cover afterwards and make end cover and support laminating, the spliced pole can promote the driving plate to exert pressure to the elasticity gasbag at this in-process, elasticity gasbag gradual shrink under the effect of this pressure, thereby discharge its inside gas through the admission valve, and at the in-process of renew cartridge, along with the end cover is removed, the elasticity gasbag resets gradually, thereby form a negative pressure, this negative pressure is used in the outside air, adsorb the dust in the air, thereby inhale the inside of elasticity gasbag via the admission valve with the dust, thereby reduce the circumstances of changing in-process dust four scattered in the dismantlement, improve workman operational environment's security.
Preferably, an activated carbon rod is fixed at the top end of the air inlet valve, and the distance between the activated carbon rod and the top end of the elastic air bag is smaller than the maximum contraction distance of the pressing plate; during operation, the dust is sucked into the elastic air bag through the air inlet valve and is collected in a centralized manner through the activated carbon rod, so that the follow-up treatment work of dust scattered all around is facilitated, the work difficulty of post treatment is reduced, and meanwhile, the equipment in a workshop is protected from being influenced by dust.
The invention has the following beneficial effects:
1. according to the lower filter element type secondary filter for the ALD equipment, the filter element is clamped on the filter tank body in a rotating mode, the support and the filter element are tightly pressed through the end cover, the sealing ring is attached, the end face sealing is guaranteed, when the vacuum pump is started, gas is filtered for the first time, residual dust enters the lower filter element type secondary filter, most of dust is removed, and the gas enters the vacuum pump through the angle valve, so that the stable operation of the vacuum pump is protected, the installation space is saved, and the secondary filtering effect is achieved.
2. According to the lower filter element type secondary filter for the ALD device, the transmission plate is pushed to enable the elastic air bag to gradually contract, the elastic air bag gradually resets along with the end cover is removed, so that negative pressure is formed, dust in the air is adsorbed by the negative pressure, the situation that the dust is scattered in the process of disassembly and replacement is reduced, and the safety of the working environment of workers is improved.
Drawings
The invention will be further explained with reference to the drawings.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a sectional view showing the construction of a vacuum pump according to the present invention;
FIG. 3 is a schematic view of a stopper ring structure according to the present invention;
FIG. 4 is a schematic diagram of a structure of a clamping block according to the present invention;
FIG. 5 is a schematic view of the pressure sensing housing of the present invention;
FIG. 6 is a schematic view of the structure of the detecting case of the present invention;
FIG. 7 is a schematic view of the construction of the elastic bladder of the present invention;
in the figure: 1. a secondary filter element; 2. a seal ring; 3. a support; 4. pressing a plate; 5. an end cap; 6. filtering the tank body; 7. an angle valve; 8. a vacuum pump; 9. an air inlet pipe; 10. a support ring; 11. a mounting frame; 12. a connecting seat; 13. a telescopic rod; 14. a slider; 15. a limiting column; 16. a jacking rod; 17. a clamping block; 18. a limiting ring; 19. clamping a spring; 20. a fastening block; 21. a rubber pad; 22. fastening the shell; 23. an elastic air bag; 24. an activated carbon rod; 25. an intake valve; 26. a drive plate; 27. connecting columns; 28. a pressure measuring housing; 29. measuring a pressure plug; 30. an extension pole; 31. a limiting plate; 32. detecting the shell; 33. detecting the plug; 34. a detection column; 35. detecting points; 36. a varistor; 37. an alarm contact.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Example one
As shown in fig. 1 to 2, the lower filter element type secondary filter for ALD equipment in an embodiment of the present invention includes a secondary filter element 1, a sealing ring 2 is sleeved at a lower end of the secondary filter element 1, a support 3 is clamped at a lower end of the sealing ring 2, a pressure plate 4 is fixed outside the support 3, an end cover 5 is clamped inside the pressure plate 4, a filter tank body 6 is arranged outside the secondary filter element 1, an air inlet pipe 9 is connected to a top end of the filter tank body 6 in a penetrating manner, an angle valve 7 is connected to one side of the support 3 in a penetrating manner, and a vacuum pump 8 is connected to a lower end of the angle valve 7 in a penetrating manner; when the filter core replacing device works, the secondary filter core 1 is connected to the filter tank body 6 in a clamping mode, then the support 3 is connected to the bottom of the secondary filter core 1 in a clamping mode, the support 3 and the secondary filter core 1 are tightly pressed through the end cover 5, the sealing ring 2 is attached, then the end cover 5 is tightly pressed and fixed through the pressing plate 4, sealing of the end face is guaranteed, and therefore installation of the filter core is completed, the gas after purifying enters into support 3, enters into vacuum pump 8 through angle valve 7 via support 3 again to but reached secondary filter and got rid of the dust in the gas, prevented that vacuum pump 8 from being blocked and died, reached the effect that improves vacuum pump 8 operating stability, and when needing to be changed and redressing filter core 1, only need to turn off angle valve 7 this moment can, need not to stop the pump alright change the filter core.
Example two
As shown in fig. 3, a first comparative example, in which another embodiment of the present invention is: the top end of the secondary filter element 1 is provided with a mounting frame 11, the inside of the mounting frame 11 is rotatably connected with a support ring 10, the outside of the support ring 10 is fixed with a connecting seat 12, the top end of the connecting seat 12 is fixed with a limiting column 15, the inside of the limiting column 15 is slidably connected with a sliding block 14, one end of the sliding block 14, which is far away from the mounting frame 11, is fixed with a lifting rod 16, one end of the lifting rod 16, which is far away from the sliding block 14, is fixed with a clamping block 17, the top end of the sliding block 14 is rotatably connected with a telescopic rod 13, one end of the telescopic rod 13, which is far away from the sliding block 14, is rotatably connected with the mounting frame 11, the outside of the connecting seat 12 is provided with a limiting ring 18, the limiting ring 18 is fixedly connected with the filter tank body 6, it needs to be mentioned that the outside of the limiting ring 18 is fixed with a guide rod, and the outside of the connecting seat 12 is provided with a guide groove matched with the connecting seat; during operation, push the interior to the filter tank body 6 along the guide way with the secondary filter core 1, connecting seat 12 can be blocked and can not rotate this moment, manual rotation mounting bracket 11 afterwards, mounting bracket 11 just can stimulate telescopic link 13 to rotate simultaneously after rotating, and connecting seat 12 at this moment can not rotate thereupon, thereby telescopic link 13 at this moment can promote sliding block 14 to move, the staff should anticlockwise rotate when installing, telescopic link 13 at this moment can promote sliding block 14 to slide in spacing post 15 to the direction of keeping away from mounting bracket 11, sliding block 14 slides and thereby promotes jacking rod 16 to slide, jacking rod 16 moves and then drives joint piece 17 to move, until joint piece 17 and spacing ring 18 contact, so can be in the in-process of dismantling, secondary filter core 1 can not drop, as long as take off their rotation respectively just can, and is simple and convenient, and the installation process is not complicated, thereby achieving the effect of convenient installation and disassembly and further improving the practicability.
As shown in fig. 3, the total number of the telescopic rods 13 is four, and the telescopic rods are distributed outside the mounting frame 11 in an array manner, four clamping grooves are formed in the limiting ring 18, and the shape and size of the clamping grooves are matched with the shape and size of the clamping block 17; during operation, when the joint block 17 rotates to the central axis of the joint block and is the same straight line with the central axis of the clamping groove formed in the limiting ring 18, the staff at this time obviously feels that the unsmooth situation appears in the rotation, and then the joint block 17 is continuously rotated to be clamped into the limiting ring 18, so that the effect of quick installation is achieved, and the installation effect is better through the four clamping grooves.
As shown in fig. 4, a clamping spring 19 is fixed inside the clamping block 17, fastening blocks 20 are fixed on both sides of the clamping spring 19, the fastening blocks 20 are slidably connected with the clamping block 17, and the outside of the fastening blocks 20 is subjected to fillet treatment; during operation, after joint block 17 reached predetermined mounted position, the chamfer of fastening block 20 can receive an extrusion force when continuing to promote joint block 17, thereby make fastening block 20 compression joint spring 19 make its shrink, joint block 17 just can slide to mounted position after afterwards, joint spring 19's elastic potential energy obtains the release, thereby promote fastening block 20 installation mechanism contact, thereby make fastening block 20 inseparabler with the contact of installation mechanism, further improvement the pressure of fastening block 20 after the installation, thereby the steadiness of installation has been improved.
As shown in fig. 4, a rubber pad 21 is fixed on one side of the fastening block 20 close to the lifting rod 16, and a plurality of through grooves are formed in the surface of one side of the rubber pad 21 close to the lifting rod 16; in operation, after the fastening block 20 is installed, the rubber pad 21 outside the fastening block 20 can effectively improve the friction force between the installation mechanisms thereof, so that the fastening block 20 is not easy to fall off, and thus although the force applied during the detachment is increased, the effect of improving the installation stability is more obvious in comparison.
As shown in fig. 5 to 6, a pressure measuring assembly is arranged at the bottom end of the secondary filter element 1, the pressure measuring assembly includes a pressure measuring housing 28, pressure measuring plugs 29 are slidably connected to both sides of the pressure measuring housing 28, a detection housing 32 is fixed inside the pressure measuring housing 28, detection plugs 33 are slidably connected to both sides inside the detection housing 32, a detection column 34 is fixed between the two detection plugs 33, a detection point 35 is fixed outside the detection column 34, a rheostat 36 is slidably connected outside the detection point 35, and it should be noted that after the pressure measuring housing 28 is blocked by the two pressure measuring plugs 29, the pressure in the closed space formed by the pressure measuring plugs 29 and the pressure measuring housing 28 is constant; when the double-filtration filter element 1 works, the air pressure inside and outside the double-filtration filter element 1 applies a pressure to the pressure measuring plug 29 so as to push the pressure measuring plug 29 to slide in the pressure measuring shell 28, when the double-filtration filter element 1 has a good filtering effect, the pressure difference between the two sides of the double-filtration filter element 1 is not too large, the pressure inside the pressure measuring plug 29 and the pressure inside the detection shell 32 are constant, so that the detection plug 33 at the moment drives the detection column 34 to slide towards the direction with small pressure under the action of the pressure difference, namely towards the direction of the center of the double-filtration filter element 1, the detection column 34 slides so as to drive the detection point 35 to move on the rheostat 36, the movement of the detection point 35 changes the change of the resistance value of the rheostat 36 in a circuit, thereby effectively monitoring the pressure difference between the inside and the outside of the double-filtration filter element 1, effectively deducing the filtering condition of the double-filtration filter element 1 through the judgment of the pressure difference, thus effectively monitoring the state of the double-filtration filter element 1 in real time, and the detection shell 32 is hidden through a plurality of mechanisms, so that the influence on filtering in the operation process is reduced.
As shown in fig. 5, a through hole is formed at the top end of the pressure measuring housing 28, an extension rod 30 is fixed at the top end of the pressure measuring plug 29, the extension rod 30 is connected with the through hole in a penetrating manner, a limiting plate 31 is fixed at the top end of the extension rod 30, and the diameter of the through hole is smaller than the diameters of the pressure measuring plug 29 and the limiting plate 31; during operation, at the gliding in-process of pressure measurement stopper 29, it can drive extension rod 30 simultaneously and slide together, thereby extension rod 30 slides and drives limiting plate 31 and move, and through the through-hole on pressure measurement casing 28 top and limiting plate 31, pressure measurement stopper 29's diameter, can effectually carry out spacingly to the motion process to prevent that equipment from breaking away from the motion range, cause monitoring facilities to lose the efficiency.
As shown in fig. 6, an alarm contact 37 is fixed to one side of the varistor 36, and the detection housing 32 is installed to ensure that the installation position of the alarm contact 37 is located on one side near the center of the filter cartridge 1; the during operation, when the secondary filter core 1 needs to be changed, check point 35 this moment can slide under the effect of pressure differential to contact with alarm contact 37 to trigger alarm signal, outside alarm equipment just can report to the police and remind the staff to change secondary filter core 1, thereby reached secondary filter core 1 and used the automatic effect of warning change of sending out behind the certain degree.
As shown in fig. 7, a fastening housing 22 is fixed at the bottom end of the bracket 3, an elastic air bag 23 is slidably connected inside the fastening housing 22, an air inlet valve 25 is connected to the bottom end of the elastic air bag 23 in a penetrating manner, driving plates 26 are arranged on both sides of the air inlet valve 25, a connecting column 27 is slidably connected to the bottom end of the driving plates 26, and the connecting column 27 is connected to the fastening housing 22 in a penetrating manner; during operation, with the bottom of spliced pole 27 alignment driving plate 26, promote end cover 5 afterwards and make end cover 5 and support 3 laminate, spliced pole 27 can promote driving plate 26 and exert pressure to elasticity gasbag 23 at this in-process, elasticity gasbag 23 gradual shrink under the effect of this pressure, thereby discharge its inside gas through admission valve 25, and at the in-process of changing the filter core, along with end cover 5 is removed, elasticity gasbag 23 resets gradually, thereby form a negative pressure, this negative pressure is used in the outside air, adsorb the dust in the air, thereby inhale the inside of elasticity gasbag 23 with the dust via admission valve 25, thereby reduce the circumstances that the in-process dust scatters around dismantling and changing, improve workman operational environment's security.
As shown in fig. 7, an activated carbon rod 24 is fixed at the top end of the air inlet valve 25, and the distance from the activated carbon rod 24 to the top end of the elastic air bag 23 is less than the maximum contraction distance of the pressure plate 4; during operation, the dust is sucked into the elastic air bag 23 through the air inlet valve 25 and is collected in a centralized manner through the activated carbon rod 24, so that the follow-up dust treatment work is facilitated, the work difficulty of post-treatment is reduced, and meanwhile, the equipment in a workshop is protected from being influenced by the dust.
Working principle, when in use, the secondary filter element 1 is connected on the filter tank body 6 in a clamping way, then the bracket 3 is connected at the bottom of the secondary filter element 1 in a clamping way, the bracket 3 and the secondary filter element 1 are tightly pressed through the end cover 5, so that the sealing ring 2 is attached, then the end cover 5 is tightly pressed and fixed through the pressing plate 4, thereby ensuring the sealing of the end surface, thus completing the installation of the filter element, when the filter element needs to be replaced, the pressing plate 4 is loosened, the end cover 5 is opened, the bracket 3 and the secondary filter element 1 are respectively rotated and taken down, thereby realizing the effects of quick installation, quick disassembly and replacement, when the vacuum pump 8 is opened, after the gas is once filtered, the gas enters the lower filter element type secondary filter through the gas inlet pipe 9 with residual dust, at the moment, the gas firstly enters the filter tank body 6, and then the residual dust in the gas is filtered through the secondary filter element 1, the purified gas enters the bracket 3 and then enters the vacuum pump 8 through the bracket 3 and the angle valve 7, so that dust in the gas can be removed by secondary filtration, the vacuum pump 8 is prevented from being blocked, and the effect of improving the operation stability of the vacuum pump 8 is achieved, and when the re-filtering filter element 1 needs to be replaced, the angle valve 7 only needs to be closed, and the filter element can be replaced without stopping the pump;
in the process of installing the secondary filter element 1, a worker is required to push the secondary filter element 1 into the filtering tank body 6, then the mounting frame 11 is rotated manually, the mounting frame 11 can simultaneously pull the telescopic rod 13 to rotate after rotating, the connecting seat 12 can not rotate along with the telescopic rod, so that the telescopic rod 13 can push the sliding block 14 to move at the moment, the worker should rotate anticlockwise during installation, the telescopic rod 13 can push the sliding block 14 to slide towards the direction far away from the mounting frame 11 in the limiting column 15 at the moment, the sliding block 14 slides to push the jacking rod 16 to slide, the jacking rod 16 moves to further drive the clamping block 17 to move, until the clamping block 17 is in contact with the limiting ring 18, after the mounting frame 11 cannot be rotated continuously, the worker manually rotates the secondary filter element 1 integrally at the moment, so that the connecting seat 12 is driven to rotate, the connecting seat 12 rotates to drive the limiting column 15 to rotate, then the clamping block 17 is driven to rotate in the limiting ring 18, when the clamping block 17 rotates until the central axis of the clamping block 17 is in the same straight line with the central axis of the clamping groove formed in the limiting ring 18, workers at this time should obviously feel that the rotation is not smooth, then the re-filtering filter element 1 continues to rotate, at this time, the chamfer angle on the outer side of the limiting ring 18 applies an extrusion force to the chamfer angle of the fastening block 20, so that the fastening block 20 compresses the clamping spring 19 to shrink, then the clamping block 17 slides into the clamping groove, when the clamping block completely slides into the clamping groove, the elastic potential energy of the clamping spring 19 is released, so that the fastening block 20 is pushed to be in contact with the clamping groove, at this time, the workers should hear a sound which is clear and crisp, the installation is indicated to be completed, so that the clamping effect is achieved, and the rubber pad 21 on the outer side of the fastening block 20 can effectively improve the friction force between the clamping block and the limiting ring 18, the installation effect is better, it needs to be explained that the same mechanisms are arranged at the bottom of the secondary filter element 1 and the top of the support 3, namely the support 3 is clamped at the bottom of the secondary filter element 1 by the installation mode, except that a plurality of through holes are arranged in the support 3 to facilitate the flow of air flow, so that in the disassembly process, after the end cover 5 is opened by loosening the pressing plate 4, the support 3 and the secondary filter element 1 can not fall off, and only the support 3 and the secondary filter element 1 can be rotated and taken off respectively, and the installation is simple and convenient;
during the filtering process, the air pressure inside and outside the secondary filter element 1 applies a pressure to the pressure measuring plug 29, so as to push the pressure measuring plug 29 to slide in the pressure measuring shell 28, when the filtering effect of the secondary filter element 1 is good, the pressure difference between the two sides of the secondary filter element 1 is not too large, the pressure inside the pressure measuring plug 29 and the pressure inside the detection shell 32 are constant, so that the detection plug 33 at the moment drives the detection column 34 to slide towards the direction with small pressure under the action of the pressure difference, namely towards the direction of the center of the secondary filter element 1, the detection column 34 slides to drive the detection point 35 to move on the rheostat 36, the movement of the detection point 35 changes the change of the resistance value of the rheostat 36 in the circuit, thereby effectively monitoring the pressure difference between the inside and the outside of the secondary filter element 1, effectively deducing the filtering condition of the secondary filter element 1 by judging the pressure difference, when the secondary filter element 1 needs to be replaced, at this moment, the detection point 35 slides to be in contact with the alarm contact 37 under the action of pressure difference, so that an alarm signal is triggered, external alarm equipment can warn and remind workers of replacing the secondary filter element 1, the extension rod 30 can be simultaneously driven to slide together in the sliding process of the pressure measuring plug 29, the extension rod 30 slides to drive the limiting plate 31 to move, the movement process can be effectively limited through the through hole in the top end of the pressure measuring shell 28, the diameter of the limiting plate 31 and the diameter of the pressure measuring plug 29, so that the equipment is prevented from being separated from the movement range, the monitoring equipment is prevented from losing efficacy, and the device can also effectively hide detection metal pieces inside the shell so as not to be directly in contact with gas;
in the process of installing the end cover 5, the connecting column 27 needs to be aligned to the bottom of the transmission plate 26, then the end cover 5 is pushed to enable the end cover 5 to be attached to the support 3, in the process, the connecting column 27 can push the transmission plate 26 to apply pressure to the elastic air bag 23, the elastic air bag 23 gradually contracts under the action of the pressure, and therefore gas in the elastic air bag is discharged through the air inlet valve 25, in the process of replacing the filter element, along with the removal of the end cover 5, the elastic air bag 23 gradually resets to form negative pressure, the negative pressure acts on external air to adsorb dust in the air, the dust is sucked into the elastic air bag 23 through the air inlet valve 25 and is collected in a concentrated mode through the activated carbon rod 24, the situation that the dust is scattered in the process of disassembling and replacing is reduced, and the safety of a working environment of workers is improved.
The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and the like.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a ALD equipment is with adorning filter core formula secondary filter down which characterized in that: including secondary filter core (1), sealing washer (2) have been cup jointed to secondary filter core (1) lower extreme, sealing washer (2) lower extreme joint has support (3), support (3) external fixation has clamp plate (4), clamp plate (4) inside joint has end cover (5), secondary filter core (1) outside is provided with filters jar body (6), it has intake pipe (9) to filter jar body (6) top through connection, support (3) one side through connection has angle valve (7), angle valve (7) lower extreme through connection has vacuum pump (8).
2. The secondary filter of claim 1, wherein the secondary filter comprises a lower filter element for an ALD apparatus, and the lower filter element comprises: the top end of the secondary filter element (1) is provided with a mounting rack (11), a support ring (10) is rotatably connected inside the mounting rack (11), a connecting seat (12) is fixed outside the supporting ring (10), a limiting column (15) is fixed at the top end of the connecting seat (12), a sliding block (14) is connected in the limiting column (15) in a sliding manner, a lifting rod (16) is fixed at one end of the sliding block (14) far away from the mounting rack (11), a clamping block (17) is fixed at one end of the jacking rod (16) far away from the sliding block (14), the top end of the sliding block (14) is rotatably connected with a telescopic rod (13), one end of the telescopic rod (13) far away from the sliding block (14) is rotatably connected with the mounting rack (11), a limiting ring (18) is arranged outside the connecting seat (12), and the limiting ring (18) is fixedly connected with the filtering tank body (6).
3. The secondary filter of claim 2, wherein the secondary filter comprises a lower filter element for an ALD apparatus, and the lower filter element comprises: the telescopic rods (13) are four in number and distributed outside the mounting frame (11) in an array mode, four clamping grooves are formed in the limiting ring (18), and the shape and the size of each clamping groove are matched with those of the clamping blocks (17).
4. The secondary filter of claim 2, wherein the secondary filter comprises a lower filter element for an ALD apparatus, and the lower filter element comprises: joint piece (17) inside is fixed with joint spring (19), joint spring (19) both sides all are fixed with fastening block (20), fastening block (20) and joint piece (17) sliding connection, fastening block (20) outside is handled through the radius angle.
5. The secondary filter of claim 4, wherein the secondary filter comprises a lower filter element for ALD apparatus, wherein: a rubber pad (21) is fixed on one side, close to the jacking rod (16), of the fastening block (20), and a plurality of through grooves are formed in the surface of one side, close to the jacking rod (16), of the rubber pad (21).
6. The secondary filter of claim 1, wherein the secondary filter comprises a lower filter element for an ALD apparatus, and the lower filter element comprises: the bottom of the secondary filter element (1) is provided with a pressure measuring component, the pressure measuring component comprises a pressure measuring shell (28), pressure measuring plugs (29) are connected to two sides of the pressure measuring shell (28) in a sliding mode, a detection shell (32) is fixed inside the pressure measuring shell (28), detection plugs (33) are connected to two sides of the interior of the detection shell (32) in a sliding mode, detection columns (34) are fixed between the detection plugs (33), detection points (35) are fixed outside the detection columns (34), and rheostats (36) are connected to the exterior of the detection points (35) in a sliding mode.
7. The secondary filter of claim 6, wherein the secondary filter comprises a lower filter element for ALD apparatus, wherein: the through-hole has been seted up on pressure measurement casing (28) top, pressure measurement stopper (29) top is fixed with extension rod (30), extension rod (30) and this through-hole through connection, extension rod (30) top is fixed with limiting plate (31), the diameter of through-hole is less than the diameter of pressure measurement stopper (29) and limiting plate (31).
8. The secondary filter of claim 6, wherein the secondary filter comprises a lower filter element for ALD apparatus, wherein: an alarm contact (37) is fixed on one side of the rheostat (36), and the detection shell (32) is installed to ensure that the installation position of the alarm contact (37) is positioned on one side close to the center of the re-filtering filter element (1).
9. The secondary filter of claim 1, wherein the secondary filter comprises a lower filter element for an ALD apparatus, and the lower filter element comprises: support (3) bottom mounting has fastening casing (22), fastening casing (22) inside sliding connection has elasticity gasbag (23), elasticity gasbag (23) bottom through connection has admission valve (25), admission valve (25) both sides all are provided with driving plate (26), driving plate (26) bottom sliding connection has spliced pole (27), spliced pole (27) and fastening casing (22) through connection.
10. The secondary filter of claim 9, wherein the secondary filter comprises a lower filter element for an ALD apparatus, and further comprises: an activated carbon rod (24) is fixed at the top end of the air inlet valve (25), and the distance between the activated carbon rod (24) and the top end of the elastic air bag (23) is smaller than the maximum contraction distance of the pressure plate (4).
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| CN113856343B (en) | 2023-04-07 |
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