CN113834391B - Recoverable MOEMS safety and safety relief device based on optical logic control - Google Patents

Recoverable MOEMS safety and safety relief device based on optical logic control Download PDF

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CN113834391B
CN113834391B CN202110978945.0A CN202110978945A CN113834391B CN 113834391 B CN113834391 B CN 113834391B CN 202110978945 A CN202110978945 A CN 202110978945A CN 113834391 B CN113834391 B CN 113834391B
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optical path
drive unit
optical
push rod
safety
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CN113834391A (en
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曹云
刘浩田
席占稳
聂伟荣
孔啸宇
朱恒伯
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Nanjing University of Science and Technology
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F42AMMUNITION; BLASTING
    • F42CAMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
    • F42C15/00Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges
    • F42C15/40Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges wherein the safety or arming action is effected electrically
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F42AMMUNITION; BLASTING
    • F42BEXPLOSIVE CHARGES, e.g. FOR BLASTING, FIREWORKS, AMMUNITION
    • F42B3/00Blasting cartridges, i.e. case and explosive
    • F42B3/10Initiators therefor
    • F42B3/113Initiators therefor activated by optical means, e.g. laser, flashlight

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Abstract

本发明公开了一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,包括基底、支撑锚点、直接耦合式光纤光路、光路选通驱动单元、主动锁存机构、反向锁止机构、限位锚点。直接耦合式光纤光路包括传输激光能量的输入光纤和输出光纤。光路选通驱动单元由两个U型电热驱动器组合构成,用来驱动入射光纤移动。反向锁止机构和主动锁存机构都由U型电热驱动器构成,可分别由两种环境信息控制,其中反向锁止机构对光纤进行锁定,主动锁存机构对光路选通驱动单元进行锁定,实现双重保险。本发明采用激光作为点火能量传输的载体,通过机械结构控制光路的通断逻辑,并且具有可恢复和断电保持的功能,提高了引信系统的抗干扰能力与灵巧化水平。

Figure 202110978945

The invention discloses a recoverable MOEMS safety and release safety device based on optical logic control. , Limit anchor point. The direct-coupled fiber optical path includes an input fiber and an output fiber that transmit laser energy. The optical path gating driving unit is composed of two U-shaped electrothermal drivers, which are used to drive the incident optical fiber to move. Both the reverse locking mechanism and the active locking mechanism are composed of U-shaped electrothermal drivers, which can be controlled by two kinds of environmental information respectively. The reverse locking mechanism locks the optical fiber, and the active locking mechanism locks the optical path gating drive unit. , to achieve double insurance. The invention adopts laser as the carrier of ignition energy transmission, controls the on-off logic of the optical path through the mechanical structure, and has the functions of recoverability and power-off retention, and improves the anti-interference ability and dexterity level of the fuze system.

Figure 202110978945

Description

基于光逻辑控制的可恢复式MOEMS安全与解除保险装置A recoverable MOEMS safety and release device based on optical logic control

技术领域technical field

本发明属于引信安全系统技术领域,特别是一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装置。The invention belongs to the technical field of fuse safety systems, in particular to a recoverable MOEMS safety and release safety device based on optical logic control.

背景技术Background technique

随着武器弹药系统及电子技术的进步,引信安全保险系统也向着小型化、智能化方向发展。这使得一些可以执行逻辑功能的电路及电子元件被大量应用于引信安保系统中,致使全电子安保系统容易遭受电磁干扰,而使引信系统产生故障,降低了直列式爆炸序列弹药武器系统的安全性和可靠性。因此,通过在电子安全系统中融入光纤和光学能量转换技术,将激光作为点火能量传输的载体,光纤作为激光的传输介质,能够使引信有效避免电磁干扰,从而提高电子安全系统内在的安全性。With the advancement of weapon and ammunition systems and electronic technology, fuze safety and insurance systems are also developing towards miniaturization and intelligence. As a result, some circuits and electronic components that can perform logic functions are widely used in the fuze security system, which makes the all-electronic security system vulnerable to electromagnetic interference, which causes the fuze system to malfunction and reduces the security of the in-line explosive sequence ammunition weapon system. and reliability. Therefore, by integrating optical fiber and optical energy conversion technology into the electronic security system, using the laser as the carrier of ignition energy transmission and the optical fiber as the transmission medium of the laser, the fuze can effectively avoid electromagnetic interference, thereby improving the inherent security of the electronic security system.

微光机电系统(MOEMS)是一种将微尺度的机械、光学以及微电路集成在一起的新兴技术。基于MOEMS技术的光开关可应用于引信安保系统中,通过控制光纤光路的通断,实现对激光的控制。目前MOEMS光开关的光纤光路包括以下三种形式:反射式光纤光路,阻断式光纤光路,直接耦合式光纤光路。与反射式及阻断式光纤光路相比较,直接耦合式光纤光路具有更高的能量传输效率。Micro-Opto-Electro-Mechanical Systems (MOEMS) is an emerging technology that integrates micro-scale mechanics, optics, and microcircuits. The optical switch based on MOEMS technology can be used in the fuze security system to control the laser by controlling the on-off of the optical fiber path. At present, the optical fiber path of MOEMS optical switch includes the following three forms: reflective fiber optical path, blocking fiber optical path, and direct coupling fiber optical path. Compared with the reflective and blocking fiber paths, the direct-coupled fiber paths have higher energy transmission efficiency.

MOEMS光开关中的微驱动器是产生机械运动,实现光路通断控制的关键。基于直接耦合式光纤光路的光开关,需要驱动光纤移动,其对驱动器的性能要求更高。目前常用的微驱动方式包括:静电驱动,电磁驱动,电热驱动,压电驱动,形状记忆合金等。相较于其他驱动方式,电热驱动在微尺度下的驱动位移及驱动力都有不错的表现。The micro-actuator in the MOEMS optical switch is the key to generating mechanical motion and realizing the on-off control of the optical path. The optical switch based on the direct-coupled optical fiber optical path needs to drive the optical fiber to move, which requires higher performance of the driver. At present, the commonly used micro-drive methods include: electrostatic drive, electromagnetic drive, electrothermal drive, piezoelectric drive, shape memory alloy and so on. Compared with other driving methods, the electrothermal driving has a good performance in the driving displacement and driving force at the micro scale.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,以提高引信安保系统的抗干扰性、小型化、智能化和灵巧化。The purpose of the present invention is to provide a recoverable MOEMS security and defuse device based on optical logic control, so as to improve the anti-interference, miniaturization, intelligence and dexterity of the fuze security system.

实现本发明目的的技术解决方案为:The technical solution that realizes the object of the present invention is:

一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,包括基底,通过支撑锚点与基底连接的直接耦合式光纤光路、光路选通驱动单元、主动锁存机构、反向锁止机构;A recoverable MOEMS safety and release safety device based on optical logic control, comprising a base, a direct-coupled optical fiber optical path connected to the base through a support anchor point, an optical path gating drive unit, an active latching mechanism, and a reverse locking mechanism ;

所述直接耦合式光纤光路设有输入端和输出端;所述输入端和输出端之间设有错位和对准位;The direct-coupling optical fiber path is provided with an input end and an output end; a dislocation and an alignment position are arranged between the input end and the output end;

所述反向锁止机构用于输入端与输出端错位的锁定和解锁;The reverse locking mechanism is used for locking and unlocking the dislocation of the input end and the output end;

所述光路选通驱动单元用于解锁状态下驱动输入端和输出端的对准;The optical path gating drive unit is used to drive the alignment of the input end and the output end in an unlocked state;

所述主动锁存机构用于对光路选通驱动单元的位置进行锁定和解锁,其中锁定:包括保险状态对光路选通驱动单元的位置进行锁定,以及解除保险使得光路导通状态对光路选通驱动单元的位置进行锁定。The active latching mechanism is used for locking and unlocking the position of the optical path gating drive unit, wherein locking: including the insurance state to lock the position of the optical path gating driving unit, and releasing the insurance to make the optical path conduction state to the optical path gating. The position of the drive unit is locked.

一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装,其时序控制的方法,包括:A recoverable MOEMS safety and release safety device based on optical logic control, and a method for its sequence control, comprising:

识别到第一种环境信息,主动锁存机构释放对光路选通驱动单元的锁定,解除第一道锁定;Recognizing the first type of environmental information, the active latch mechanism releases the lock on the optical path gating drive unit, and releases the first lock;

识别第二种环境信息,反向锁止机构释放对直接耦合式光纤光路的锁定,解除第二道锁定;Identifying the second environmental information, the reverse locking mechanism releases the lock on the direct-coupled optical fiber path, and releases the second lock;

然后光路选通驱动单元驱动直接耦合式光纤光路输入端和输出端的对准;Then the optical path gating drive unit drives the alignment of the input end and the output end of the direct coupled optical fiber optical path;

直接耦合式光纤光路导通;Directly coupled optical fiber optical path is turned on;

主动锁存机构锁定光路选通驱动单元的位置,解除保险。The active latch mechanism locks the position of the optical path gating drive unit and releases the insurance.

本发明与现有技术相比,其显著优点是:Compared with the prior art, the present invention has the following significant advantages:

(1)本发明通过在电子安全系统中融入光纤和光学能量转换技术,采用激光作为点火能量的载体,通过机械结构控制光路的通断,具有逻辑控制功能,能够有效降低引信内外电磁干扰,从而提高引信安全系统内在的安全性;(1) The present invention integrates optical fiber and optical energy conversion technology into the electronic safety system, adopts laser as the carrier of ignition energy, controls the on-off of the optical path through the mechanical structure, has the function of logic control, and can effectively reduce the electromagnetic interference inside and outside the fuze, thereby Improve the inherent safety of the fuze safety system;

(2)本发明应用场景丰富,可以利用多种弹道环境信息,指令信息作为解除保险的信号;本发明具有可恢复的功能,可灵活应用于无人机作战,巡飞弹,导弹等,在毁伤目标丢失或毁伤任务取消时能恢复至安全状态,提高了引信系统的智能化,灵巧化;(2) The present invention has rich application scenarios, and can use a variety of ballistic environment information and command information as a signal for releasing insurance; the present invention has a recoverable function, and can be flexibly applied to UAV operations, cruise missiles, missiles, etc. When the target is lost or the damage mission is cancelled, it can be restored to a safe state, which improves the intelligence and dexterity of the fuze system;

(3)本发明作为光开关,可以用来传输激光能量或光信息,在医疗、通信、工程等领域都有着广泛的应用空间。(3) As an optical switch, the present invention can be used to transmit laser energy or optical information, and has wide application space in the fields of medical treatment, communication, engineering and the like.

附图说明Description of drawings

图1是MOEMS安全与解除保险装置三维模型三层结构图。Fig. 1 is the three-layer structure diagram of the three-dimensional model of the MOEMS safety and release device.

图2是MOEMS安全与解除保险装置中所有电热驱动器及输入光纤的结构示意图。FIG. 2 is a schematic structural diagram of all electrothermal drivers and input optical fibers in the MOEMS safety and release device.

图3是本发明的结构示意图,其中图3(a)为安全状态,图3(b)为解除保险状态。Fig. 3 is a schematic diagram of the structure of the present invention, wherein Fig. 3(a) is a safe state, and Fig. 3(b) is a disarmed state.

图4是本发明中的直接耦合式光纤光路示意图,其中图4(a)为安全状态,图4(b)为解除保险状态。Fig. 4 is a schematic diagram of a direct-coupled optical fiber optical path in the present invention, wherein Fig. 4(a) is a safe state, and Fig. 4(b) is a release state.

图5是主动锁存机构中的卡齿与光路选通驱动单元中的推杆啮合的示意图,其中图5(a)为安全状态,图5(b)为解除保险状态。Fig. 5 is a schematic diagram of the engagement between the teeth in the active latching mechanism and the push rod in the optical path gating drive unit, wherein Fig. 5(a) is a safe state, and Fig. 5(b) is a release state.

图6(a)是MOEMS安全与解除保险装置由安全状态切换为解除保险状态时,在驱动器上施加的电压时序图。Figure 6(a) is a timing diagram of the voltage applied to the driver when the MOEMS safety and disassociation device switches from the safe state to the disarmed state.

图6(b)是MOEMS安全与解除保险装置由解除保险状态切换为安全状态时,在驱动器上施加的电压时序图。Figure 6(b) is a timing diagram of the voltage applied to the driver when the MOEMS safety and release device switches from the release state to the safety state.

具体实施方式Detailed ways

下面结合附图及具体实施例对本发明做进一步的介绍。The present invention will be further introduced below with reference to the accompanying drawings and specific embodiments.

参照图1、图2和图3,本实施例的一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,包括基底1-1、支撑锚点1-2、直接耦合式光纤光路2、光路选通驱动单元3、主动锁存机构4、反向锁止机构5、限位锚点6;所述直接耦合式光纤光路2一侧连接有反向锁止机构5,可以在安全状态时限制输入光纤2-1的位移;直接耦合式光纤光路2另一侧连接有光路选通驱动单元3,用于驱动入射光纤2-1移动;光路选通驱动单元3另一侧与主动锁存机构4连接,用于对光路选通驱动单元3的位置进行锁定;限位锚点6用于限制推杆3-1在过载情况下的位移,避免梁3-2发生破坏;上述光路选通驱动单元3、主动锁存机构4、反向锁止机构5皆通过支撑锚点1-2与基底1-1连接。基底1为硅基衬底,尺寸为11mm×7mm。Referring to FIG. 1, FIG. 2 and FIG. 3, a recoverable MOEMS safety and release device based on optical logic control in this embodiment includes a substrate 1-1, a support anchor point 1-2, and a directly coupled optical fiber optical path 2 , optical path gating drive unit 3, active latching mechanism 4, reverse locking mechanism 5, limit anchor point 6; one side of the directly coupled optical fiber optical path 2 is connected with a reverse locking mechanism 5, which can be in a safe state The displacement of the input optical fiber 2-1 is limited at the same time; the other side of the direct-coupled optical fiber optical path 2 is connected with an optical path gating drive unit 3, which is used to drive the incident optical fiber 2-1 to move; the other side of the optical path gating drive unit 3 is connected to the active lock The storage mechanism 4 is connected to lock the position of the optical path gating drive unit 3; the limit anchor point 6 is used to limit the displacement of the push rod 3-1 under overload conditions to avoid the damage of the beam 3-2; The drive unit 3, the active latching mechanism 4, and the reverse locking mechanism 5 are all connected to the base 1-1 through the support anchor point 1-2. The substrate 1 is a silicon-based substrate with a size of 11 mm×7 mm.

参照图4,所述直接耦合式光纤光路2包括输入光纤2-1和输出光纤2-2,二者芯径均为105um,包层外径均为125um。输入光纤2-1和输出光纤2-2均嵌入光纤槽2-3内,光纤槽2-3内设有光纤端面定位块2-4,输出光纤2-2的光纤端面与光纤端面定位块2-4对齐,实现光纤的轴向定位;输入光纤2-1一侧的光纤槽2-3侧壁为楔形结构,输出光纤2-2的光纤端面可在楔形结构内移动,实现输入光纤2-1在错位和对准时的单边定位。基底1-1上开设激光散射孔2-5,光纤错位情况下,若激光源误开启时,输入光纤(2-1)能将激光能量射入激光散射孔(2-5);并将激光散射孔(2-5)的内侧壁设置为凹凸不平的粗糙表面,使激光发生漫反射,避免激光对装置造成损伤。Referring to FIG. 4 , the directly coupled optical fiber path 2 includes an input optical fiber 2-1 and an output optical fiber 2-2, both of which have a core diameter of 105um and an outer diameter of the cladding of 125um. The input optical fiber 2-1 and the output optical fiber 2-2 are embedded in the optical fiber slot 2-3. The optical fiber slot 2-3 is provided with an optical fiber end face positioning block 2-4. The optical fiber end face of the output optical fiber 2-2 and the optical fiber end face positioning block 2 -4 is aligned to realize the axial positioning of the fiber; the side wall of the fiber slot 2-3 on the side of the input fiber 2-1 is a wedge-shaped structure, and the fiber end face of the output fiber 2-2 can move in the wedge-shaped structure to realize the input fiber 2- 1 Unilateral positioning during misalignment and alignment. A laser scattering hole 2-5 is provided on the substrate 1-1. In the case of optical fiber misalignment, if the laser source is turned on by mistake, the input fiber (2-1) can inject laser energy into the laser scattering hole (2-5); The inner side walls of the scattering holes (2-5) are set as uneven rough surfaces, so that the laser light is diffusely reflected and the laser light is prevented from causing damage to the device.

参照图5,图5(a)为安全状态时主动锁存机构4的卡齿4-1与光路选通驱动单元3的推杆3-1的相对位置,图5(b)为解除保险状态时的相对位置。主动锁存机构4中的卡齿4-1与光路选通驱动单元3中的推杆3-1相互啮合,用于锁定光路选通驱动单元3的位移。Referring to FIG. 5 , FIG. 5( a ) is the relative position of the latching teeth 4 - 1 of the active latch mechanism 4 and the push rod 3 - 1 of the optical path gating drive unit 3 in a safe state, and FIG. 5( b ) is the safety release state relative position of time. The latching teeth 4-1 in the active latch mechanism 4 mesh with the push rod 3-1 in the optical path gating driving unit 3 to lock the displacement of the optical path gating driving unit 3 .

本实施例中,所述反向锁止机构5由U型电热微驱动器5-1、悬臂梁5-2、限位推杆5-3构成,可以在安全状态时限制输入光纤2-1的位移;安全状态下,限位推杆5-3支撑输入光纤2-1,使得输入光纤2-1与输出光纤2-2错位,限位推杆5-3通过悬臂梁5-2与U型电热微驱动器5-1连接。直接耦合式光纤光路2另一侧连接有光路选通驱动单元3,光路选通驱动单元3由两个U型微电热驱动器3-3、两个梁3-2以及一个推杆3-1构成,两个U型微电热驱动器3-3、两个梁3-2对称设置在推杆3-1左右两侧;推杆3-1通过梁3-2与U型微电热驱动器3-3连接;推杆3-1通过梁3-2与U型微电热驱动器3-3连接,推杆3-1用于驱动入射光纤2-1移动,实现光路的错位与对准;主动锁存机构4由U型微电热驱动器4-2和卡齿4-1构成,卡齿4-1与推杆3-1相互啮合,可以对光路选通驱动单元3的位置进行锁定;限位锚点6用于限制推杆3-1在过载情况下的位移,避免梁3-2发生破坏;上述光路选通驱动单元3、主动锁存机构4、反向锁止机构5皆通过支撑锚点1-2与基底1-1连接。In this embodiment, the reverse locking mechanism 5 is composed of a U-shaped electrothermal micro-actuator 5-1, a cantilever beam 5-2, and a limit push rod 5-3, which can limit the input fiber 2-1 in a safe state. Displacement; in a safe state, the limit push rod 5-3 supports the input fiber 2-1, so that the input fiber 2-1 and the output fiber 2-2 are dislocated, and the limit push rod 5-3 passes through the cantilever beam 5-2 and the U-shaped The electrothermal microdrive 5-1 is connected. The other side of the direct-coupled optical fiber optical path 2 is connected with an optical path gating drive unit 3, and the optical path gating drive unit 3 is composed of two U-shaped micro-electrothermal drivers 3-3, two beams 3-2 and a push rod 3-1 , two U-shaped micro-electric heating drivers 3-3 and two beams 3-2 are symmetrically arranged on the left and right sides of the push rod 3-1; the push rod 3-1 is connected to the U-shaped micro-electric heating driver 3-3 through the beam 3-2 ; The push rod 3-1 is connected with the U-shaped micro-electrothermal driver 3-3 through the beam 3-2, and the push rod 3-1 is used to drive the movement of the incident optical fiber 2-1 to realize the misalignment and alignment of the optical path; the active latch mechanism 4 It is composed of a U-shaped micro-electric heating driver 4-2 and a tooth 4-1. The tooth 4-1 and the push rod 3-1 mesh with each other, which can lock the position of the optical path gating drive unit 3; the limit anchor point 6 is used for In order to limit the displacement of the push rod 3-1 under overload conditions, to avoid the damage of the beam 3-2; the above-mentioned optical path gating drive unit 3, active latching mechanism 4, and reverse locking mechanism 5 all pass through the support anchor point 1-2 Connect to base 1-1.

参照图3(a-b)、图4(a-b)和图5(a-b),当弹丸发射后,引信控制系统识别到第一种环境信息,如后坐力,达到预设的解除保险阈值时,向所述安保装置发出解除第一道保险的逻辑信号;所述MOEMS安保装置获得信号后,主动锁存机构4通电,拉开卡齿4-1对推杆3-1的锁定,即释放对光路选通驱动单元3的锁定,解除第一道保险;引信控制系统识别到第二种环境信息,如离心力,达到预设的解除保险阈值时,反向锁止机构5通电,限位推杆5-3移动,释放对输入光纤2-1的锁定,解除第二道保险;然后,光路选通驱动单元3通电,推杆3-1推动输入光纤2-1运动至与输出光纤2-2对准的位置,光路处于导通状态;主动锁存机构4断电,卡齿4-1与推杆3-1重新啮合,锁定光路选通驱动单元3的位置,解除保险。此时即便对该安保装置停止供电,光路也能保持在导通状态,具有断电保持的功能,降低系统功耗。Referring to Figures 3(a-b), 4(a-b) and 5(a-b), after the projectile is launched, the fuze control system recognizes the first environmental information, such as recoil, and reaches the preset disarming threshold, and sends the The security device sends out a logic signal to release the first insurance; after the MOEMS security device obtains the signal, the active latching mechanism 4 is powered on, and the locking of the push rod 3-1 by the locking teeth 4-1 is pulled, that is, the optical path gating is released. The locking of the drive unit 3 releases the first insurance; the fuze control system recognizes the second type of environmental information, such as centrifugal force, and when the preset release threshold is reached, the reverse locking mechanism 5 is powered on, and the limit push rod 5-3 Move, release the lock on the input fiber 2-1, and release the second insurance; then, the optical path gating drive unit 3 is powered on, and the push rod 3-1 pushes the input fiber 2-1 to move to the position aligned with the output fiber 2-2. position, the optical path is in a conducting state; the active latching mechanism 4 is powered off, the tooth 4-1 re-engages with the push rod 3-1, locks the position of the optical path gating drive unit 3, and releases the insurance. At this time, even if the power supply to the security device is stopped, the optical path can be kept in a conducting state, and it has the function of keeping power off and reduces the power consumption of the system.

参照图2、图4(a-b)和图5,当引信控制系统向该安保装置发出恢复保险的逻辑信号时,主动锁存机构4通电,再次释放对光路选通驱动单元3的锁定;光路选通驱动单元3和反向锁止机构5断电恢复至初始位置,输入光纤2-1在自身弹性恢复力和反向锁止机构5弹性恢复力的共同作用下运动至错开位置;主动锁存机构4断电,卡齿4-1与推杆3-1啮合,锁定光路选通驱动单元3的位置,该安保装置恢复至安全状态,实现可恢复功能。Referring to Fig. 2, Fig. 4 (a-b) and Fig. 5, when the fuze control system sends out the logic signal of restoring insurance to this security device, the active latch mechanism 4 is energized to release the locking of the optical path gating drive unit 3 again; When the drive unit 3 and the reverse locking mechanism 5 are powered off and restored to the initial position, the input optical fiber 2-1 moves to the staggered position under the combined action of its own elastic restoring force and the elastic restoring force of the reverse locking mechanism 5; The mechanism 4 is powered off, the tooth 4-1 is engaged with the push rod 3-1, the position of the optical path gating drive unit 3 is locked, and the security device is restored to a safe state, realizing the recoverable function.

参照图6(a-b),所述的MOEMS安全与解除保险装置解除保险时,必须到正确的时序信号:必须先给主动锁存机构4和反向锁止机构5通电,光路选通驱动单元3才能移动;主动锁存机构4未通电时,光路选通驱动单元3的位置会被锁定,即便光路选通驱动单元3通电也无法驱动输入光纤2-1移动,光路也就不会被误导通;反向锁止机构5未通电时,光路选通驱动单元3输出的驱动力不足以驱动光纤移动,光路同样不会被误导通。Referring to Fig. 6 (a-b), when described MOEMS safety and release insurance device release insurance, must arrive at correct timing signal: must first give active latch mechanism 4 and reverse locking mechanism 5 energization, optical path gating drive unit 3 When the active latching mechanism 4 is not powered on, the position of the optical path gating drive unit 3 will be locked. Even if the optical path gating drive unit 3 is powered on, it cannot drive the input fiber 2-1 to move, and the optical path will not be misdirected. ; When the reverse locking mechanism 5 is not energized, the driving force output by the optical path gating drive unit 3 is not enough to drive the optical fiber to move, and the optical path will not be misdirected.

Claims (5)

1.一种基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,其特征在于,包括基底,通过支撑锚点与基底连接的直接耦合式光纤光路、光路选通驱动单元、主动锁存机构、反向锁止机构;1. a recoverable MOEMS safety and release safety device based on optical logic control, it is characterized in that, comprise substrate, the direct coupling optical fiber optical path, optical path gating drive unit, active latching mechanism that is connected with substrate by supporting anchor point , Reverse locking mechanism; 所述直接耦合式光纤光路设有输入端和输出端;所述输入端和输出端之间设有错位和对准位;The direct-coupling optical fiber path is provided with an input end and an output end; a dislocation and an alignment position are arranged between the input end and the output end; 所述反向锁止机构用于输入端与输出端错位的锁定和解锁;The reverse locking mechanism is used for locking and unlocking the dislocation of the input end and the output end; 所述光路选通驱动单元用于解锁状态下驱动输入端和输出端的对准;The optical path gating drive unit is used to drive the alignment of the input end and the output end in an unlocked state; 所述主动锁存机构用于对光路选通驱动单元的位置进行锁定和解锁,其中锁定:包括保险状态对光路选通驱动单元的位置进行锁定,以及解除保险使得光路导通状态对光路选通驱动单元的位置进行锁定;The active latching mechanism is used for locking and unlocking the position of the optical path gating drive unit, wherein locking: including the insurance state to lock the position of the optical path gating driving unit, and releasing the insurance to make the optical path conduction state to the optical path gating. The position of the drive unit is locked; 所述反向锁止机构由U型电热微驱动器、悬臂梁、限位推杆构成,安全状态下,限位推杆支撑直接耦合式光纤光路的输入端,使得输入端和输出端错位,限位推杆通过悬臂梁与U型电热微驱动器连接;The reverse locking mechanism is composed of a U-shaped electrothermal micro-actuator, a cantilever beam, and a limit push rod. In a safe state, the limit push rod supports the input end of the direct-coupling optical fiber optical path, so that the input end and the output end are misaligned, and the limit is limited. The push rod is connected with the U-shaped electrothermal micro-actuator through the cantilever beam; 光路选通驱动单元由两个U型微电热驱动器、两个梁以及一个推杆构成,两个该U型微电热驱动器、两个梁对称设置在推杆左右两侧;推杆通过梁与该U型微电热驱动器连接;推杆通过梁与U型微电热驱动器连接,推杆用于驱动直接耦合式光纤光路的输入端移动,实现光路的错位与对准;The optical path gating drive unit is composed of two U-shaped micro-electric heating drivers, two beams and a push rod. The two U-shaped micro-electric heating drivers and the two beams are symmetrically arranged on the left and right sides of the push rod; the push rod is connected to the push rod through the beams. The U-shaped micro-electrothermal driver is connected; the push rod is connected to the U-shaped micro-electrothermal driver through the beam, and the push rod is used to drive the input end of the direct-coupled optical fiber optical path to move, so as to realize the misalignment and alignment of the optical path; 主动锁存机构由U型微电热驱动器和卡齿构成,卡齿与推杆相互啮合,对光路选通驱动单元的位置进行锁定。The active latching mechanism is composed of a U-shaped micro-electric heating driver and a locking tooth, and the locking tooth and the push rod are engaged with each other to lock the position of the optical path gating drive unit. 2.根据权利要求1所述的基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,其特征在于,还包括限位锚点,用于限制光路选通驱动单元在过载情况下的位移。2 . The recoverable MOEMS safety and release safety device based on optical logic control according to claim 1 , further comprising a limit anchor point for limiting the displacement of the optical path gating drive unit under overload conditions. 3 . 3.根据权利要求1所述的基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,其特征在于,所述光路选通驱动单元、主动锁存机构、反向锁止机构均采用U型微电热驱动器驱动。3. the recoverable MOEMS safety and release safety device based on optical logic control according to claim 1, is characterized in that, described optical path gating drive unit, active latching mechanism, reverse locking mechanism all adopt U-shaped Micro-electric thermal drive drive. 4.根据权利要求1所述的基于光逻辑控制的可恢复式MOEMS安全与解除保险装置,其特征在于,设有激光散射孔,输入端和输出端错位状态下,作为激光源误开启时的射入孔。4. The recoverable MOEMS safety and release safety device based on optical logic control according to claim 1, is characterized in that, is provided with laser scattering hole, under the dislocation state of the input end and the output end, as the laser source when the laser source is turned on by mistake. injection hole. 5.一种根据权利要求1所述的基于光逻辑控制的可恢复式MOEMS安全与解除保险装置的时序控制方法,其特征在于,包括:5. a kind of sequence control method based on the recoverable MOEMS safety of optical logic control and release safety device according to claim 1, is characterized in that, comprising: 识别到第一种环境信息,主动锁存机构释放对光路选通驱动单元的锁定,解除第一道锁定;Recognizing the first type of environmental information, the active latch mechanism releases the lock on the optical path gating drive unit, and releases the first lock; 识别第二种环境信息,反向锁止机构释放对直接耦合式光纤光路的锁定,解除第二道锁定;Identifying the second environmental information, the reverse locking mechanism releases the lock on the direct-coupled optical fiber path, and releases the second lock; 然后光路选通驱动单元驱动直接耦合式光纤光路输入端和输出端的对准;Then the optical path gating drive unit drives the alignment of the input end and the output end of the direct coupled optical fiber optical path; 直接耦合式光纤光路导通;Directly coupled optical fiber optical path is turned on; 主动锁存机构锁定光路选通驱动单元的位置,解除保险。The active latch mechanism locks the position of the optical path gating drive unit and releases the insurance.
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