CN113829288A - Dismantling jig and method for gas distribution module - Google Patents

Dismantling jig and method for gas distribution module Download PDF

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Publication number
CN113829288A
CN113829288A CN202111417349.1A CN202111417349A CN113829288A CN 113829288 A CN113829288 A CN 113829288A CN 202111417349 A CN202111417349 A CN 202111417349A CN 113829288 A CN113829288 A CN 113829288A
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CN
China
Prior art keywords
cylinder
jig
dismantling
gas flow
demolition
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Granted
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CN202111417349.1A
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Chinese (zh)
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CN113829288B (en
Inventor
周俊
张世琛
杨俊杰
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Jingxincheng Beijing Technology Co Ltd
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Jingxincheng Beijing Technology Co Ltd
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Priority to CN202111417349.1A priority Critical patent/CN113829288B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for

Abstract

The invention provides a dismantling jig and a dismantling method for a gas distribution module, wherein the dismantling jig is placed between a support column and a branch angle of a disc during ascending by utilizing the lifting function of a cylinder, and the disc cannot be lowered to the original position due to the existence of the dismantling jig during descending, so that a gas distribution plate is lifted under the descending command of the cylinder, and the gas distribution module is separated from the bottom. The dismantling jig and the dismantling method for the gas distribution module provided by the invention have the advantages that the dismantling jig is simple to manufacture and low in cost, and can be dismantled rigidly without depending on the force of an operator during use, and meanwhile, the damage to the gas distribution plate can be reduced.

Description

Dismantling jig and method for gas distribution module
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a dismantling jig and a dismantling method for a gas distribution module.
Background
In the semiconductor industry at present, when a gas distribution module needs to be dismantled, a hard prying mode of a spanner is usually adopted, and different operators exert different forces during operation, so that parts are easily damaged. Meanwhile, the contact position of the gas distribution module and the wrench is easily deformed by multiple stresses, which causes gas leakage. If the operator applies too much force during dismantling, the sealing ring connected with the gas splitter plate is damaged and the gas outlet position is deformed.
Therefore, it is an urgent need in the art to provide a dismantling jig and method for a gas distribution module to solve the problems in the prior art.
Disclosure of Invention
The invention aims to provide a dismantling jig and a dismantling method for a gas distribution module, which are used for solving the problems of damage of components of the gas distribution module, damage of a sealing ring and the like caused when the gas distribution module is dismantled by a wrench in the prior art.
In order to achieve the purpose, the invention provides a dismantling jig for a gas distribution module, wherein the gas distribution module comprises a gas distribution plate, a cylinder and a disc, and the cylinder is arranged between the gas distribution plate and the disc; three branch angles are arranged on the periphery of the disc, each branch angle is provided with a connecting hole which is communicated up and down, and a supporting column corresponding to the branch angle is arranged on a machine table bearing the gas distribution module; the dismounting jig is characterized by comprising a first cylinder and a second cylinder; one end of the first cylinder is connected with one end of the second cylinder;
the other end of the first cylinder is used for extending into the connecting hole, and the other end of the second cylinder is placed on the supporting column.
Optionally, the diameter of the first cylinder is 8mm, and the height is 8mm, and the diameter of the second cylinder is 40mm, and the height is 10 mm.
Optionally, the material of dismantling the tool includes: teflon (Teflon).
Optionally, the connection mode between the first cylinder and the second cylinder includes: and (4) integrally forming.
Optionally, the first cylinder is coaxial with the second cylinder.
Optionally, the first cylinder is fixedly connected with the connecting hole, and the second cylinder is fixedly connected with the upper surface of the supporting column.
Optionally, the outer diameter of the second cylinder is not greater than the outer diameter of the support column.
Optionally, the height of the dismantling jig is less than the extending height of the cylinder.
The invention also provides a dismantling method for the gas distribution module, which uses any one of the dismantling jigs, and the dismantling method comprises the following steps:
step 1: controlling the air cylinder to move upwards so that the disc is lifted along with the upward movement of the air cylinder;
step 2: placing one end, far away from the first cylinder, of a second cylinder of the dismantling jig on the support columns, wherein the dismantling jig corresponds to the support columns one by one;
and step 3: and controlling the cylinder to descend, and controlling the disc to descend to be in contact with the first cylinder, and controlling the cylinder to descend continuously until the gas distribution plate is lifted and then stopped.
Optionally, in step 1, after the gas distribution module executes an upward movement command, a vertical distance between the branch angle and the support column is greater than a height of the removal jig.
Compared with the prior art, the dismantling jig and the dismantling method for the gas distribution module provided by the invention have the following beneficial effects: the invention provides a dismantling jig for a gas distribution module, which comprises a gas distribution plate, a cylinder and a disc, wherein the cylinder is arranged between the gas distribution plate and the disc; three branch angles are arranged on the periphery of the disc, each branch angle is provided with a connecting hole which is communicated up and down, and a supporting column corresponding to the branch angle is arranged on a machine table bearing the gas distribution module; the dismantling jig comprises a first cylinder and a second cylinder; one end of the first cylinder is connected with one end of the second cylinder; the other end of the first cylinder is used for extending into the connecting hole, and the other end of the second cylinder is placed on the supporting column. According to the dismantling jig for the gas distribution module, provided by the invention, the dismantling jig is placed between the support column and the branch angle, so that when the dismantling jig is used for dismantling, the dismantling jig can ensure that the disc cannot return to the original position in subsequent operation, and the gas distribution plate is separated from the bottom. Meanwhile, the first cylinder is connected with the connecting hole to prevent the removal jig from moving, and the second cylinder can serve as a gasket to reduce pressure and prevent looseness.
The invention provides a dismantling method for a gas distribution module, which uses any one of the dismantling jigs, and comprises the following steps: firstly, controlling the air cylinder to move upwards so that the disc is lifted along with the upward movement of the air cylinder; then placing one end, far away from the first cylinder, of the first cylinder of the dismantling jig on the supporting column, wherein the dismantling jig corresponds to the supporting column one by one; and finally, controlling the cylinder to descend, and controlling the disc to descend to be in contact with the second cylinder, and controlling the cylinder to descend continuously until the gas distribution plate is lifted and then stopped. The dismantling method for the gas distribution module provided by the invention utilizes the lifting function of the cylinder, firstly lifts the disc to enable the dismantling jig to be placed between the branch angle and the support column, when the cylinder executes the descending function, the disc descends until the branch angle is contacted with the dismantling jig, and because the cylinder still executes the descending command, the existence of the dismantling jig enables the branch angle not to descend to the original position, the gas distribution plate is lifted under the continuous descending command of the cylinder, and thus the gas distribution module is lifted. The method is simple to operate, does not depend on the force of an operator to remove the gas splitter plate in a rigid mode, and can reduce damage to the gas splitter plate.
Drawings
Fig. 1 is a perspective view of a gas flow distribution module and a support column according to an embodiment of the invention;
FIG. 2 is a top view of a disk according to one embodiment of the present invention;
fig. 3 is a perspective view of a dismantling jig for a gas flow distribution module according to an embodiment of the present invention;
fig. 4 is a top view of a removal jig for a gas flow distribution module according to an embodiment of the present invention;
fig. 5 is a side view of a removal jig for a gas flow distribution module according to an embodiment of the invention;
FIG. 6 is a process diagram of a method for removing a gas distribution module according to an embodiment of the present invention;
FIG. 7 is a partial schematic view of a branch angle and a support post home position provided by an embodiment of the present invention;
FIG. 8 is a partial schematic view of the relationship between the branch angle and the support post position after the disk is lifted according to an embodiment of the present invention;
fig. 9 is a partial schematic view of a relationship among positions of a removal jig, a branch angle, and a support post after the disc provided by an embodiment of the present invention is lifted;
fig. 10 is a partial schematic view of a relationship among positions of a demolition jig, a branch angle, and a support post after the disk provided by an embodiment of the present invention is lowered;
the device comprises 100-a dismantling jig, 101-a first cylinder, 102-a second cylinder, 200-a disc, 201-a branch angle, 202-a connecting hole, 300-a cylinder, 400-a gas splitter plate and 500-a supporting column.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is provided solely for the purpose of facilitating and distinctly claiming the embodiments of the present invention. It should be understood that the drawings are not necessarily to scale, showing the particular construction of the invention, and that illustrative features in the drawings, which are used to illustrate certain principles of the invention, may also be somewhat simplified. Specific design features of the invention disclosed herein, including, for example, specific dimensions, orientations, locations, and configurations, will be determined in part by the particular intended application and use environment. In the embodiments described below, the same reference numerals are used in common between different drawings to denote the same portions or portions having the same functions, and a repetitive description thereof will be omitted. In this specification, like reference numerals and letters are used to designate like items, and therefore, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings. In the description of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "fixed" shall be used in a fixed connection, either detachably, or integrally; the two components may be mechanically or electrically connected, directly or indirectly connected through an intermediate medium, or connected through an interconnection or an interaction between the two components. The specific meaning of the above terms in the present invention can be understood as appropriate by those of ordinary skill in the art.
These terms, as used herein, are interchangeable where appropriate. Similarly, if the method described herein includes a series of tasks, the order in which these tasks are presented herein is not necessarily the only order in which these tasks may be performed, and some of the described tasks may be omitted and/or some other tasks not described herein may be added to the method.
Example one
The present embodiment provides a removal jig for a gas flow distribution module, referring to fig. 1 to 5, fig. 1 is a perspective view of a gas flow distribution module and a support column according to an embodiment of the present invention, fig. 2 is a top view of a disk, and fig. 3 to 5 are a perspective view, a top view and a side view of the removal jig for a gas flow distribution module, respectively, as can be seen clearly from the drawings, the removal jig 100 for a gas flow distribution module provided in the present embodiment includes a gas flow distribution plate 400, a cylinder 300 and a disk 200, the cylinder 300 is disposed between the gas flow distribution plate 400 and the disk 200; the periphery of the disc 200 is provided with three branch angles 201, each branch angle 201 is provided with a through connection hole 202, and a supporting column 500 corresponding to the branch angle 201 is arranged on a machine platform bearing the gas distribution module; the demolition jig 100 comprises a first cylinder 101 and a second cylinder 102; one end of the first cylinder 101 is connected to one end of the second cylinder 102; the other end of the first cylinder 101 is used for extending into the connecting hole 202, and the other end of the second cylinder 102 is placed on the supporting column 500.
According to the dismantling jig 100 for the gas flow distribution module, provided by the invention, by placing the dismantling jig 100 between the support column 500 and the branch angle 201, when the dismantling jig 100 is used for dismantling, the dismantling jig 100 can ensure that the disc 200 cannot return to the original position in subsequent operation, so that the gas flow distribution plate 400 is separated from the bottom. Meanwhile, the first cylinder 101 is connected with the connecting hole 202 to prevent the removal jig 100 from moving, and the second cylinder 102 can act as a gasket to reduce pressure and prevent loosening.
Preferably, the first cylinder 101 has a diameter of 8mm and a height of 8mm, and the second cylinder 102 has a diameter of 40mm and a height of 10 mm. Therefore, the first cylinder 101 can be inserted into the connection hole 202, so that the position of the removal jig 100 is ensured to be fixed, and the removal jig 100 is prevented from sliding when in use. It should be noted that the numerical values are not exclusive, and it is required that the diameter of the first cylinder 101 is adapted to the diameter of the connection hole 202, that is, the diameter of the first cylinder 101 is smaller than the diameter of the connection hole 202, so as to ensure that the first cylinder 101 can be inserted into the connection hole 202. Meanwhile, the diameter of the first cylinder 101 cannot be too small compared with the diameter of the connection hole 202, so as to prevent the loosening of the removal jig 100 during use. Therefore, the user can select a suitable diameter and height according to the use environment.
In one preferred embodiment, the material of the removal jig 100 includes: teflon (Teflon). Teflon has excellent heat resistance and low temperature resistance, can work at a freezing temperature without embrittlement, does not melt at a high temperature, has sliding property due to a low friction coefficient, and has longer service life and lower use cost due to wear resistance and corrosion resistance in the embodiment.
Preferably, the connection mode between the first cylinder 101 and the second cylinder 102 includes: and (4) integrally forming. Therefore, the dismounting jig 100 is stable in structure and simple to manufacture.
In one preferred embodiment, the first cylinder 101 is coaxial with the second cylinder 102. Therefore, after the dismantling jig 100 is connected with the branch angle 201, the second cylinder 102 is uniformly stressed, and is not easy to incline in the subsequent dismantling process.
Preferably, the first cylinder 101 is fixedly connected to the connecting hole 202, and the second cylinder 102 is fixedly connected to the upper surface of the supporting column 500. With such arrangement, the dismantling jig 100 for the gas distribution module provided by the invention can be flexibly used, is only placed for use when the gas distribution module needs to be dismantled, and does not influence the original work of the gas distribution module when the dismantling jig is not needed.
Preferably, the outer diameter of the second cylinder 102 is less than or equal to the outer diameter of the support column 500. When the outer diameter of the second cylinder 102 is larger than the outer diameter of the support column 500, the edge of the second cylinder 102 beyond the support column 500 may be damaged during subsequent dismantling. Therefore, the second cylinder 102 is prevented from being damaged in the subsequent dismantling process, and the service life of the dismantling jig 100 is prolonged.
In one preferred embodiment, the height of the removal jig 100 is less than the extended height of the cylinder 300. Therefore, the demolition jig 100 can be placed between the support column 500 and the branch corner 201 after moving up the cylinder 300.
Example two
Referring to fig. 6 to 10, fig. 6 is a flowchart illustrating steps of a demolition method for a gas flow splitting module according to this embodiment, and fig. 7 to 10 are respectively a positional relationship among a demolition jig, a branch angle, and a support column in each step, as is apparent from the drawings, the present invention further provides a demolition method for a gas flow splitting module, using any one of the demolition jigs described above, where the demolition method includes:
step 1: controlling the cylinder 300 to move upwards, so that the disc 200 is lifted along with the upward movement of the cylinder 300;
step 2: placing one end, away from the first cylinder 101, of the second cylinder 102 of the removal jig 100 on the support column 500, wherein the removal jig 100 corresponds to the support column 500 one by one;
and step 3: the cylinder 300 is controlled to descend, the disc 200 descends to be in contact with the first cylinder 102, and the cylinder 300 is controlled to descend continuously until the gas distribution plate 400 is lifted and then stops.
The demolition method for the gas flow distribution module provided by the invention utilizes the lifting function of the cylinder 300, firstly lifts the disc 200, so that the demolition jig 100 can be placed between the branch angle 201 and the support column 500, when the cylinder 300 descends, the disc 200 descends until the branch angle 201 is contacted with the demolition jig 100, because the cylinder 300 still executes a descending command, the existence of the demolition jig 100 prevents the branch angle 201 from descending to the original position, and the gas flow distribution plate 400 is lifted under the continuous descending command of the cylinder 300, so that the gas flow distribution module is lifted. The method is simple to operate, does not depend on the strength of an operator for rigid dismantling, and can reduce the damage to the gas splitter plate 400. It should be noted that the implementation of the lifting function of the air cylinder 300 includes control by using operating software.
Preferably, in step 1, after the gas flow distribution module executes an upward movement command, a vertical distance between the branch angle 201 and the support column 500 is greater than a height of the demolition jig 100. Therefore, the removal jig 100 can be normally placed between the branch angle 201 and the support column 500.
In addition, the functional modules in the embodiments herein may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part. In addition, it is to be noted that the terms "first", "second", "third", and the like in the description are used only for distinguishing the respective components in the description, unless otherwise specified or indicated. Elements, steps, etc., rather than representing logical or sequential relationships between various components, elements, steps, etc. It should also be noted that, in some alternative implementations, the locations noted in the blocks may also be located in different positions than those noted in the figures.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or obliquely above the second feature, or may simply mean that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "beneath" a second feature may be directly or obliquely under the first feature or may simply mean that the first feature is at a lesser level than the second feature.
In summary, in the demolition jig 100 for a gas flow distribution module provided by the present invention, the gas flow distribution module includes a gas flow distribution plate 400, a cylinder 300 and a disc 200, the cylinder 300 is disposed between the gas flow distribution plate 400 and the disc 200; the periphery of the disc 200 is provided with three branch angles 201, each branch angle 201 is provided with a through connection hole 202, and a supporting column 500 corresponding to the branch angle 201 is arranged on a machine platform bearing the gas distribution module; the demolition jig 100 comprises a first cylinder 101 and a second cylinder 102; one end of the first cylinder 101 is connected to one end of the second cylinder 102; the other end of the first cylinder 101 is used for extending into the connecting hole 202, and the other end of the second cylinder 102 is placed on the supporting column 500. According to the dismantling jig 100 for the gas flow distribution module, provided by the invention, by placing the dismantling jig 100 between the support column 500 and the branch angle 201, when the dismantling jig 100 is used for dismantling, the dismantling jig 100 can ensure that the disc 200 cannot return to the original position in subsequent operation, so that the gas flow distribution plate 400 is separated from the bottom. Meanwhile, the first cylinder 101 is connected with the connecting hole 202 to prevent the removal jig 100 from moving, and the second cylinder 102 can act as a gasket to reduce pressure and prevent loosening.
The invention provides a dismantling method for a gas distribution module, which uses any one of the dismantling jigs, and comprises the following steps: firstly, controlling the air cylinder 300 to move upwards, so that the disc 200 is lifted along with the upward movement of the air cylinder 300; then, placing one end, away from the first cylinder 101, of the second cylinder 102 of the removal jig 100 on the support column 500, wherein the removal jig 100 corresponds to the support column 500 one by one; finally, the air cylinder 300 is controlled to descend, the disc 200 descends to be in contact with the first cylinder 102, and the air cylinder 300 is controlled to descend continuously until the gas distribution plate 400 is lifted and then stops. According to the dismantling method for the gas flow distribution module, provided by the invention, the lifting function of the air cylinder 300 is utilized, the disc 200 is lifted firstly, so that the dismantling jig 100 can be placed between the branch angle 201 and the supporting column 500, when the air cylinder 300 executes the lifting function, the disc 200 is lowered until the branch angle 201 is contacted with the dismantling jig 100, because the air cylinder 300 still executes the lowering command, the existence of the dismantling jig 100 enables the branch angle 201 not to be lowered to the original position, and the gas flow distribution plate 400 is lifted under the continuous lowering command of the air cylinder 300, so that the gas flow distribution module is lifted. The method is simple to operate, does not depend on the strength of an operator for rigid dismantling, and can reduce the damage to the gas splitter plate 400.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. A dismantling jig for a gas distribution module comprises a gas distribution plate, a cylinder and a disc, wherein the cylinder is arranged between the gas distribution plate and the disc; three branch angles are arranged on the periphery of the disc, each branch angle is provided with a connecting hole which is communicated up and down, and a supporting column corresponding to the branch angle is arranged on a machine table bearing the gas distribution module; the dismounting jig is characterized by comprising a first cylinder and a second cylinder; one end of the first cylinder is connected with one end of the second cylinder;
the other end of the first cylinder is used for extending into the connecting hole, and the other end of the second cylinder is placed on the supporting column.
2. The demolition jig for a gas flow splitting module according to claim 1, wherein the first cylinder has a diameter of 8mm and a height of 8mm, and the second cylinder has a diameter of 40mm and a height of 10 mm.
3. The demolition jig for a gas flow splitting module according to claim 1, wherein the demolition jig is made of a material comprising: teflon (Teflon).
4. The demolition jig for a gas flow splitting module according to claim 1, wherein the connection between the first cylinder and the second cylinder comprises: and (4) integrally forming.
5. The demolition jig for a gas flow splitting module according to claim 1, wherein the first cylinder and the second cylinder are coaxial.
6. The demolition jig for a gas flow splitting module according to claim 1, wherein the first cylinder is non-fixedly connected with the connecting hole and the second cylinder is non-fixedly connected with the upper surface of the supporting pillar.
7. The demolition jig for a gas flow splitting module according to claim 1, wherein an outer diameter of the second cylinder is not larger than an outer diameter of the support column.
8. The demolition jig for a gas flow splitting module according to claim 1, wherein the demolition jig has a height < the extended height of the cylinder.
9. A demolition method for a gas flow splitting module, comprising: a demolition tool using the gas flow splitting module of any of claims 1-8; the dismantling method comprises the following steps:
step 1: controlling the air cylinder to move upwards so that the disc is lifted along with the upward movement of the air cylinder;
step 2: placing one end, far away from the first cylinder, of a second cylinder of the dismantling jig on the support columns, wherein the dismantling jig corresponds to the support columns one by one;
and step 3: and controlling the cylinder to descend, and controlling the disc to descend to be in contact with the first cylinder, and controlling the cylinder to descend continuously until the gas distribution plate is lifted and then stopped.
10. The demolition method for a gas flow splitting module according to claim 9, wherein in step 1, after the gas flow splitting module executes an upward movement command, a vertical distance between the branch angle and the support column is greater than a height of the demolition jig.
CN202111417349.1A 2021-11-26 2021-11-26 Dismantling jig and method for gas distribution module Active CN113829288B (en)

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Citations (7)

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Publication number Priority date Publication date Assignee Title
JPH06136722A (en) * 1992-10-23 1994-05-17 Sho Bond Constr Co Ltd Bridge floor plate disassembly method and device therefor
CN106964966A (en) * 2017-05-19 2017-07-21 中车北京南口机械有限公司 The disassembling fixture of planetary wheel of wind turbine gearbox bearing
CN207736228U (en) * 2017-12-11 2018-08-17 大大科技(宁国)有限公司 A kind of Simple hydraulic upright post jack guide sleeve dismounting device
CN109434752A (en) * 2019-01-03 2019-03-08 广西玉柴机器股份有限公司 A kind of ring of cylinder head method for dismounting and tooling
CN209364022U (en) * 2019-01-29 2019-09-10 辽宁航星海洋科技有限公司 A kind of ADCP provision for disengagement
CN110365172A (en) * 2019-08-12 2019-10-22 姜近东 A kind of waste and old motor stator copper wire dismounting equipment
CN210451688U (en) * 2019-06-14 2020-05-05 贵州乌江水电开发有限责任公司东风发电厂 Water turbine stator shaft sleeve extracting tool

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06136722A (en) * 1992-10-23 1994-05-17 Sho Bond Constr Co Ltd Bridge floor plate disassembly method and device therefor
CN106964966A (en) * 2017-05-19 2017-07-21 中车北京南口机械有限公司 The disassembling fixture of planetary wheel of wind turbine gearbox bearing
CN207736228U (en) * 2017-12-11 2018-08-17 大大科技(宁国)有限公司 A kind of Simple hydraulic upright post jack guide sleeve dismounting device
CN109434752A (en) * 2019-01-03 2019-03-08 广西玉柴机器股份有限公司 A kind of ring of cylinder head method for dismounting and tooling
CN209364022U (en) * 2019-01-29 2019-09-10 辽宁航星海洋科技有限公司 A kind of ADCP provision for disengagement
CN210451688U (en) * 2019-06-14 2020-05-05 贵州乌江水电开发有限责任公司东风发电厂 Water turbine stator shaft sleeve extracting tool
CN110365172A (en) * 2019-08-12 2019-10-22 姜近东 A kind of waste and old motor stator copper wire dismounting equipment

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