CN113820850B - MEMS micro-shutter array device integrated with spherical reflector - Google Patents
MEMS micro-shutter array device integrated with spherical reflector Download PDFInfo
- Publication number
- CN113820850B CN113820850B CN202110965435.XA CN202110965435A CN113820850B CN 113820850 B CN113820850 B CN 113820850B CN 202110965435 A CN202110965435 A CN 202110965435A CN 113820850 B CN113820850 B CN 113820850B
- Authority
- CN
- China
- Prior art keywords
- mirror surface
- mirror
- electrode
- support column
- array device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Abstract
The invention discloses a MEMS micro-shutter array device integrated with a spherical reflector, which is formed by arranging a plurality of identical units on the surface of a substrate in a certain rule. The unit includes a support column, a mirror surface and an electrode. The support column plays a role in supporting the mirror surface, the lower part of the middle part of the mirror surface is connected with the support column, and the peripheral edges are suspended. The electrode is located right below the mirror surface, namely around the support column. The mirror surface is concave when not working initially, and the curvature of the mirror surface can be determined by the processing technology. The incident parallel light irradiates the mirror surface, and the reflected light is converged according to the geometric optics. When a certain direct current potential difference is applied to the mirror surface and the electrode, the edge of the mirror surface is bent downwards due to the attraction of electrostatic force, so that the whole mirror surface is changed from a concave surface to a convex surface, and reflected light is diffused. The invention can realize the opening and closing of the converging light beams through the deformation of the mirror surface, thereby completing the function which can be completed by the combination of the traditional micro lens and the micro shutter.
Description
Technical Field
The invention belongs to the technical field of micro-electromechanical systems, and particularly relates to an MEMS micro-shutter array device integrated with a spherical reflector.
Background
The MEMS micro-shutter array can realize quick on-off of multiple paths of parallel light beams, has the advantages of high response speed, mass production, small volume, low power consumption, good compatibility with integrated circuits and the like, and has very important application in various optical systems.
Referring to fig. 1, there is a schematic diagram of a conventional MEMS micro-shutter array, showing 5 micro-shutters in the array. Each micro shutter consists of two rotatable doors, which are kept horizontal when not activated, so that the light path is closed. When a certain micro-shutter needs to be opened, the corresponding electrode of the shutter is controlled by applying an electric signal, so that the two doors rotate in opposite directions respectively, and the light path is opened, as shown in the third micro-shutter in fig. 1.
Referring to fig. 2, a schematic diagram of the micro shutter array is shown for use in an optical system. A microlens array is placed in front of the lens array to split the incident light. After beam splitting, different light beams can be selectively passed or blocked when passing through the micro-shutter.
As can be seen from the figure, the micro lens and the micro shutter array are required to be matched for use, and there are alignment problems of three spatial dimensions, parallelism correction problems of two degrees of freedom and assembly problems between the micro lens and the micro shutter array, so that an optical correction link is added, and miniaturization and portability of the whole optical system are not facilitated.
Disclosure of Invention
The invention aims to solve the technical problems that: aiming at the defects of the prior art, the MEMS micro-shutter array device integrating the spherical reflector is provided, and the monolithic integration of the beam converging function and the beam switching function is realized, so that the processing and assembling cost of discrete devices can be greatly reduced, and the alignment precision of the two devices is improved.
The technical scheme adopted for solving the technical problems is as follows:
a MEMS micro-shutter array device integrating spherical mirrors, the device being formed by a plurality of identical cells regularly arranged in an arrangement on a substrate surface;
each unit comprises a support column, a mirror surface and an electrode, wherein the support column is positioned below the center of the mirror surface and connected with the mirror surface, the support column can play a role in supporting the mirror surface, the periphery of the mirror surface is suspended, the electrode is positioned under the mirror surface, and the electrode is arranged on the surface of the substrate and positioned around the support column;
the mirror surface is concave when not working initially, and the curvature of the mirror surface can be determined by a processing technology.
When the incident parallel light irradiates the mirror surface, the reflected light energy reflected from the mirror surface is converged according to the geometric optics; when a certain direct current potential difference is applied to the mirror surface and the electrode, the edge of the mirror surface is bent downwards due to the attraction of electrostatic force, so that the whole mirror surface is changed from a concave surface to a convex surface, and the reflected light is diffused.
Further, the mirror surface is of a multilayer structure.
Further, the mirror surface is of an upper layer structure and a lower layer structure, wherein the lower layer is a thicker structural layer, residual compressive stress exists or no residual stress exists, and the upper layer is a thinner reflecting layer and has residual tensile stress; the residual stress of the upper layer and the lower layer are inconsistent, so that the mirror surface is deformed initially to form the concave surface, and the curvature radius of the concave surface is determined by the residual stress of the upper layer and the lower layer.
Further, the reflective layer of the mirror has a high reflectivity in its application band.
Further, the structural layer of the mirror and the support posts are conductors for applying electrical signals;
the wire for conducting the electrical signal to the mirror surface passes through the electrode, leaving a void in the electrode through which the wire passes.
Further, the mirror surface is square, hexagonal or round;
and the shape relationship of the mirror and the electrode is independent of each other.
Further, the arrangement rule is square arrangement, regular triangle arrangement or circular arrangement;
the alignment rules are independent of the shape of the mirror or the electrode.
Compared with the prior art, the invention has the advantages that: the functions of the spherical reflecting mirror and the micro shutter are integrated in one device, so that the design, processing and packaging cost is reduced, the volume of the whole system is reduced, and the converging light beam can be opened and closed through the deformation of the mirror surface, so that the function which can be completed by the traditional micro lens and the micro shutter is completed.
Drawings
FIG. 1 is a schematic diagram of a conventional MEMS micro-shutter array of the prior art;
FIG. 2 is a schematic diagram of the use of the micro-shutter array in combination with a micro-lens array described above;
FIG. 3 is a schematic diagram of a MEMS micro-shutter array device incorporating spherical mirrors in accordance with the present invention;
FIG. 4 is a schematic perspective view of a device of the present invention;
FIG. 5 is a schematic diagram of the initial shape of the mirror surface of the present invention as a concave surface;
FIG. 6 is a schematic view of the structure of the support column and electrode in the present invention;
FIG. 7 is a schematic view of the mirror and electrode shape configuration of the present invention;
fig. 8 is a schematic diagram of the arrangement shape of the micro shutter array in the present invention.
The marks in the figure: 1-mirror, 2-electrode, 3-support column, 4-wire
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Fig. 3 is a schematic structural diagram of a micro shutter array device integrated with a spherical mirror according to the present invention. The device is formed by arranging a plurality of identical units on the surface of a substrate in a certain arrangement rule; each unit comprises a support column 3, a mirror surface 1 and an electrode 2, wherein the support column is positioned below the center of the mirror surface and connected with the mirror surface, the support column can play a role in supporting the mirror surface, the periphery of the mirror surface is suspended, and the electrode is positioned under the mirror surface and around the support column; the mirror surface is concave when not working initially, and when the incident parallel light irradiates the mirror surface, the reflected light energy reflected from the mirror surface is converged; when a certain direct current potential difference is applied to the mirror surface and the electrode, the edge of the mirror surface is bent downwards due to the attraction of electrostatic force, so that the whole mirror surface is changed from a concave surface to a convex surface, and the reflected light is diffused. Five micro shutter units are shown in total from left to right in the figure. The first element is the state of the micro-shutter when it is initially not in operation, the mirror surface being concave. The second unit is a state when the micro shutter is operated, in which a direct current potential difference is applied between the mirror surface and the electrode, and the mirror surface is deformed downward by the electrostatic attraction force, and the mirror surface is made convex by the mirror surface edge being supported by the support column with the edge free. The third to fifth units add incident light to illustrate the principle of operation. The third cell and the fourth cell are both in an initial undeformed state, and the incident light is reflected and focused by the concave surface, thereby playing the same role as that of the light in fig. 2, which is converged after passing through the micro lens and the micro shutter in sequence. The fifth cell is in a convex shape after operation, and the reflected light will be scattered by specular reflection and cannot be converged, thereby playing the same role as the light in fig. 2 passing through the micro lens but blocked by the micro shutter. Thus, as shown in fig. 3, the present invention can realize the functions that the aforementioned microlens and micro-shutter combination can realize.
Fig. 4 is a schematic perspective view of a micro shutter array device of the integrated spherical mirror of the present invention. There are 6 units in the figure, divided into two rows of 3 units each. The 3 cells of the previous row are removed in half and only their cross section is shown to facilitate viewing of the detail. The middle unit of the previous row is in a working state, and the mirror surface is convex. In addition, the other 5 units are all in an unoperated state, and the surface is concave.
FIG. 5 is a schematic diagram of the initial shape of the mirror surface of the present invention in a concave shape. In fig. 5, a is a schematic structural diagram of a mirror, wherein the mirror is composed of an upper layer and a lower layer, and the lower layer is thicker, has residual compressive stress or no stress, and thus has a tendency to expand to both sides, as indicated by the dashed arrows. The upper layer is thinner and has a residual tensile stress and thus a tendency to shrink toward the middle, as indicated by the solid arrows in the figure. Because of the mismatch in stresses between the upper and lower layers, the net effect is that the mirror becomes concave with a low middle and high sides, as shown in fig. 5 b.
FIG. 6 is a schematic diagram of the present invention in which the electrodes are spaced apart for applying an electrical signal to the mirror surface, and the wires pass through the spaces to conduct with the support posts. In fig. 6 a is a top view of the electrode 2 and the support column 3, which is a small circle and a large circle concentric therewith, the small circle representing the support column and the large circle representing the electrode. Since the mirror also requires the application of an electrical signal, the electrical signal must pass through the support posts, i.e., the support posts must be in communication with the wires. Since the support column is completely surrounded by the electrode, as shown in fig. 6 b, the electrode leaves a certain gap, so that the wire 4 can be connected with the support column from outside to inside.
FIG. 7 is a schematic view of a mirror and electrodes in other shapes. In the figure, 9 units are all arranged, the mirror surface is regular hexagon, and the electrode is square. Other shapes may be used and may not be identical.
Fig. 8 is a schematic view of a micro shutter unit adopting other arrangement shapes. In the previous figures, the micro-shutter units are arranged in a square shape, while in fig. 8, the micro-shutter units are arranged in a regular triangle shape, and various arrangements can be selected according to different situations and have no relation with the shape of the mirror or the electrode.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. An MEMS micro-shutter array device integrating a spherical mirror, characterized by:
the device is formed by arranging a plurality of identical units on the surface of a substrate in a certain arrangement rule;
each unit comprises a support column, a mirror surface and an electrode, wherein the support column is positioned below the center of the mirror surface and connected with the mirror surface, the support column can play a role in supporting the mirror surface, the periphery of the mirror surface is suspended, the electrode is positioned under the mirror surface, and the electrode is arranged on the surface of the substrate and positioned around the support column;
the mirror surface is concave when not working initially, and when the incident parallel light irradiates the mirror surface, the reflected light energy reflected from the mirror surface is converged; when a certain direct current potential difference is applied to the mirror surface and the electrode, the edge of the mirror surface is bent downwards due to the attraction of electrostatic force, so that the whole mirror surface is changed from a concave surface to a convex surface, and the reflected light is diffused.
2. A MEMS micro-shutter array device incorporating a spherical mirror according to claim 1 wherein:
the mirror surface is of a multilayer structure.
3. A MEMS micro-shutter array device incorporating a spherical mirror according to claim 2 wherein:
the mirror surface is of an upper layer structure and a lower layer structure, wherein the lower layer is a thicker structural layer, residual compressive stress exists or no residual stress exists, and the upper layer is a thinner reflecting layer and has residual tensile stress;
the residual stress of the upper layer and the lower layer are inconsistent, so that the mirror surface is deformed initially to form the concave surface, and the curvature radius of the concave surface is determined by the residual stress of the upper layer and the lower layer.
4. A MEMS micro-shutter array device incorporating a spherical mirror according to claim 3 wherein:
the reflective layer of the mirror has a high reflectivity in its application band.
5. A MEMS micro-shutter array device incorporating a spherical mirror according to claim 3 wherein:
the structural layer of the mirror and the support posts are conductors for applying electrical signals;
the wire for conducting the electrical signal to the mirror surface passes through the electrode, leaving a void in the electrode through which the wire passes.
6. A MEMS micro-shutter array device incorporating a spherical mirror according to claim 1 wherein:
the mirror surface is square, hexagonal or round;
and the shape relationship of the mirror and the electrode is independent of each other.
7. A MEMS micro-shutter array device incorporating a spherical mirror according to claim 1 wherein:
the arrangement rule is square arrangement, regular triangle arrangement or circular arrangement;
the alignment rules are independent of the shape of the mirror or the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110965435.XA CN113820850B (en) | 2021-08-23 | 2021-08-23 | MEMS micro-shutter array device integrated with spherical reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110965435.XA CN113820850B (en) | 2021-08-23 | 2021-08-23 | MEMS micro-shutter array device integrated with spherical reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113820850A CN113820850A (en) | 2021-12-21 |
| CN113820850B true CN113820850B (en) | 2023-08-11 |
Family
ID=78913403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110965435.XA Active CN113820850B (en) | 2021-08-23 | 2021-08-23 | MEMS micro-shutter array device integrated with spherical reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113820850B (en) |
Citations (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970008308A (en) * | 1995-07-27 | 1997-02-24 | 김광호 | DMD (deformable mirror device) and its manufacturing process |
| JP2001051212A (en) * | 1999-08-05 | 2001-02-23 | Seiko Epson Corp | Optical modulation device and display device |
| JP2001208905A (en) * | 2000-01-25 | 2001-08-03 | Olympus Optical Co Ltd | Deformable mirror |
| JP2003211393A (en) * | 2002-01-16 | 2003-07-29 | Ricoh Co Ltd | Microactuator, droplet discharge head, ink cartridge, ink jet recording device, micropump, and optical device |
| CN1637887A (en) * | 2004-01-05 | 2005-07-13 | 船井电机株式会社 | Optical pickup device capable of correcting spherical aberration |
| JP2006018176A (en) * | 2004-07-05 | 2006-01-19 | Olympus Corp | Electrostatic type variable shape mirror |
| CN1745326A (en) * | 2003-01-31 | 2006-03-08 | 麦克罗尼克激光系统公司 | SLM addressing methods |
| CN1762177A (en) * | 2003-07-28 | 2006-04-19 | 奥林巴斯株式会社 | Optical switch and method of controlling optical switch |
| CN1961255A (en) * | 2004-05-28 | 2007-05-09 | 立体播放有限公司 | Array of micromirror array lenses |
| CN1969217A (en) * | 2005-01-05 | 2007-05-23 | 日本电信电话株式会社 | Mirror device, mirror array, optical switch, and manufacturing method thereof |
| CN101458433A (en) * | 2007-12-14 | 2009-06-17 | 乐金显示有限公司 | Electrically-driven liquid crustal lens and stereoscopic display device using the same. |
| CN101881880A (en) * | 2010-06-02 | 2010-11-10 | 中山市张家边企业集团有限公司企业技术中心 | Micro-mirror structure and manufacturing method thereof |
| CN104020561A (en) * | 2014-05-12 | 2014-09-03 | 无锡微奥科技有限公司 | Thermally driven MEMS micro-mirror and 1*N thermally driven MEMS micro-mirror array |
| TW201534552A (en) * | 2013-12-10 | 2015-09-16 | Bosch Gmbh Robert | Engaging drive with a pivotable mirror element |
| CN107539945A (en) * | 2016-06-28 | 2018-01-05 | 华为技术有限公司 | Micro mirror unit and preparation method, micro mirror array and optical cross connect module |
| CN110632754A (en) * | 2019-09-12 | 2019-12-31 | 西北工业大学 | Linear micro-mechanical bidirectional torsion mirror array and manufacturing method thereof |
| CN110808779A (en) * | 2019-10-22 | 2020-02-18 | 中国电子科技集团公司第二十七研究所 | Laser access method and device based on space division multiplexing |
| CN111965811A (en) * | 2020-09-10 | 2020-11-20 | 上海汽车集团股份有限公司 | Three-dimensional MEMS scanning mirror |
| CN112212858A (en) * | 2020-09-29 | 2021-01-12 | 中国科学院光电技术研究所 | Daytime star-sensitive imaging system based on field-of-view gating technology |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6891655B2 (en) * | 2003-01-02 | 2005-05-10 | Micronic Laser Systems Ab | High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices |
| JP2004347753A (en) * | 2003-05-21 | 2004-12-09 | Matsushita Electric Ind Co Ltd | Shape variable mirror element, method for manufacturing it, shape variable mirror unit and optical pickup |
| JP4470801B2 (en) * | 2005-04-19 | 2010-06-02 | 船井電機株式会社 | Variable shape mirror and optical pickup device having the same |
| JP5321585B2 (en) * | 2008-07-02 | 2013-10-23 | 富士通株式会社 | Micromirror array and optical switch |
-
2021
- 2021-08-23 CN CN202110965435.XA patent/CN113820850B/en active Active
Patent Citations (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970008308A (en) * | 1995-07-27 | 1997-02-24 | 김광호 | DMD (deformable mirror device) and its manufacturing process |
| JP2001051212A (en) * | 1999-08-05 | 2001-02-23 | Seiko Epson Corp | Optical modulation device and display device |
| JP2001208905A (en) * | 2000-01-25 | 2001-08-03 | Olympus Optical Co Ltd | Deformable mirror |
| JP2003211393A (en) * | 2002-01-16 | 2003-07-29 | Ricoh Co Ltd | Microactuator, droplet discharge head, ink cartridge, ink jet recording device, micropump, and optical device |
| CN1745326A (en) * | 2003-01-31 | 2006-03-08 | 麦克罗尼克激光系统公司 | SLM addressing methods |
| CN1762177A (en) * | 2003-07-28 | 2006-04-19 | 奥林巴斯株式会社 | Optical switch and method of controlling optical switch |
| CN1637887A (en) * | 2004-01-05 | 2005-07-13 | 船井电机株式会社 | Optical pickup device capable of correcting spherical aberration |
| CN1961255A (en) * | 2004-05-28 | 2007-05-09 | 立体播放有限公司 | Array of micromirror array lenses |
| JP2006018176A (en) * | 2004-07-05 | 2006-01-19 | Olympus Corp | Electrostatic type variable shape mirror |
| CN1969217A (en) * | 2005-01-05 | 2007-05-23 | 日本电信电话株式会社 | Mirror device, mirror array, optical switch, and manufacturing method thereof |
| CN101458433A (en) * | 2007-12-14 | 2009-06-17 | 乐金显示有限公司 | Electrically-driven liquid crustal lens and stereoscopic display device using the same. |
| CN101881880A (en) * | 2010-06-02 | 2010-11-10 | 中山市张家边企业集团有限公司企业技术中心 | Micro-mirror structure and manufacturing method thereof |
| TW201534552A (en) * | 2013-12-10 | 2015-09-16 | Bosch Gmbh Robert | Engaging drive with a pivotable mirror element |
| CN104020561A (en) * | 2014-05-12 | 2014-09-03 | 无锡微奥科技有限公司 | Thermally driven MEMS micro-mirror and 1*N thermally driven MEMS micro-mirror array |
| CN107539945A (en) * | 2016-06-28 | 2018-01-05 | 华为技术有限公司 | Micro mirror unit and preparation method, micro mirror array and optical cross connect module |
| CN110632754A (en) * | 2019-09-12 | 2019-12-31 | 西北工业大学 | Linear micro-mechanical bidirectional torsion mirror array and manufacturing method thereof |
| CN110808779A (en) * | 2019-10-22 | 2020-02-18 | 中国电子科技集团公司第二十七研究所 | Laser access method and device based on space division multiplexing |
| CN111965811A (en) * | 2020-09-10 | 2020-11-20 | 上海汽车集团股份有限公司 | Three-dimensional MEMS scanning mirror |
| CN112212858A (en) * | 2020-09-29 | 2021-01-12 | 中国科学院光电技术研究所 | Daytime star-sensitive imaging system based on field-of-view gating technology |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
Non-Patent Citations (1)
| Title |
|---|
| Akiko Uno 等.《MEMS deformable mirror actuated by electrostatic piston array》.《2016 Internation coference on optical mems and nanophotonics》.2016,1-2. * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113820850A (en) | 2021-12-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5214970B2 (en) | Optical film for controlling the angular characteristics of a display | |
| CN109557666B (en) | Near-eye optical imaging system, near-eye display device and head-mounted display device | |
| EP3226044B1 (en) | Optical switch | |
| US7215474B2 (en) | Method and apparatus for combining optical beams | |
| US6317530B1 (en) | Micro-opto mechanical multistage interconnection switch | |
| US20100032005A1 (en) | System and method for solar energy capture | |
| US7660499B2 (en) | Optical spot displacement apparatus | |
| CN102707429A (en) | Touchscreens for displays | |
| JP2006518884A (en) | Micromirror system with concealed multi-piece hinge structure | |
| US6687428B2 (en) | Optical switch | |
| US6335817B1 (en) | Mirror controlled display device | |
| CN210720955U (en) | Backlight module and display device | |
| CN113820850B (en) | MEMS micro-shutter array device integrated with spherical reflector | |
| US11656398B2 (en) | Illumination and display apparatus | |
| CA2253954C (en) | Optical deflection switch | |
| TWI229051B (en) | Movable inclined reflector based signal processing device and its method | |
| TWI600932B (en) | Optical connectors and method for making the same | |
| US6526196B1 (en) | Optical switch using rotatable reflector | |
| Lundvall et al. | High performing micromachined retroreflector | |
| JP2001183591A (en) | Micromirror optical switch | |
| CN101308247A (en) | Non-contact micro-mirror | |
| JP2000284217A (en) | Erect variable power array lens device | |
| JPH06214152A (en) | Free-space optical switch system | |
| US7880953B2 (en) | Special optical modulation array device and a method of fabricating the same | |
| CN107907965B (en) | Method and device for adjusting focal length of micro-lens array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |