CN113819839A - Automatic pasting calibration method, device and equipment - Google Patents
Automatic pasting calibration method, device and equipment Download PDFInfo
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- CN113819839A CN113819839A CN202011091752.5A CN202011091752A CN113819839A CN 113819839 A CN113819839 A CN 113819839A CN 202011091752 A CN202011091752 A CN 202011091752A CN 113819839 A CN113819839 A CN 113819839A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Abstract
The application discloses a mounting automatic calibration method, a mounting automatic calibration device and mounting automatic calibration equipment, and belongs to the technical field of electronic mounting. According to the mounting automatic calibration method, before mounting, the mounting head and the calibration plate are used for pre-calibrating the position deviation between the top-view camera view center and the bottom-view camera view center, when calibration is carried out in the mounting working process, the mounting head and the calibration plate are used for real-time calibrating the position deviation between the top-view camera view center and the bottom-view camera view center, a compensation value is obtained according to the real-time calibration result and the deviation between the pre-calibration, calibration in the mounting process is carried out by using the compensation value, automatic calibration in the mounting process is realized, mounting precision is improved, the calibration realization structure is simple, and no additional calibration mechanism is needed except for the calibration plate.
Description
Technical Field
The invention belongs to the technical field of electronic mounting, and relates to a mounting automatic calibration method, device and equipment.
Background
The current trend of semiconductor industry development and application includes intelligent mobile devices, big data, Artificial Intelligence (AI), 5G communication network, High Performance Computer (HPC), internet of things (IoT), smart cars, industrial 4.0, cloud computing, etc. These applications have led to the rapid development of electronic devices, and an important process, i.e., a mounting process, is not necessary in the semiconductor packaging process. When the mounting equipment works, due to temperature rise or long-time work and other reasons, mounting errors can occur, the mounting precision of the equipment can be reduced, and in order to guarantee the mounting precision, the errors need to be compensated according to the equipment state in the mounting process.
Disclosure of Invention
In order to solve the problem that mounting precision is reduced due to thermal errors in mounting in the related technology, the application provides a mounting automatic calibration method, a mounting automatic calibration device and mounting automatic calibration equipment. The technical scheme is as follows:
in a first aspect, the present application provides a mounting automatic calibration method, applied to a mounting automatic calibration device, where the mounting automatic calibration includes a calibration plate, a mounting head, a mounting beam, and a fixed-position downward-looking camera and an upward-looking camera, the mounting head is installed on the mounting beam and configured to move in an X axis direction along the mounting beam, and configured to rotate around a vertical Z axis, and the mounting automatic calibration method includes:
during calibration before mounting, the calibration plate is adjusted by the mounting head so that the center of the calibration plate is completely overlapped with the visual field center of the upward-looking camera and the visual field center of the downward-looking camera respectively, and first position deviation (delta X, delta Y) of the visual field center of the upward-looking camera and the visual field center of the downward-looking camera is obtained;
acquiring a second position deviation (Δ X ', Δ Y') of a visual field center of the upward-looking camera and a visual field center of the downward-looking camera by using the mounting head, the calibration plate, the upward-looking camera and the downward-looking camera when the mounting process is calibrated;
comparing the second position deviation with the first position deviation to obtain a compensation value (Δ X ", Δ Y");
and performing calibration in the mounting process by using the compensation value (delta X ', delta Y').
Optionally, the calibrating during the mounting process using the compensation value (Δ X ", Δ Y") includes:
acquiring a positional deviation (Δ X1, Δ Y1) between the center of the downward camera view and the attached workpiece;
calculating an angle R1 between the attached workpiece and the attached workpiece sucked by the attaching head;
controlling the mounting head to rotate the sucked attaching workpiece by the angle R1;
calculating a positional deviation (Δ X2, Δ Y2) of the attached workpiece and the center of the upward-looking camera view after the rotation;
calculating a correction movement amount of the mounting head based on the positional deviation (Δ X1, Δ Y1), the positional deviation (Δ X2, Δ Y2), and the compensation value (Δ X ", Δ Y");
and controlling the mounting head to move the attaching workpiece to the attached workpiece according to the corrected movement amount to finish workpiece attachment.
Optionally, the adjusting the calibration board by the mounting head during the pre-mounting calibration so that the center of the calibration board completely coincides with the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera, respectively, and acquiring a first positional deviation (Δ X, Δ Y) between the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera includes:
during calibration before mounting, controlling the mounting head to move the calibration plate to the position above the upward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the upward-looking camera by using the mounting head, and recording a first position (X1, Y1) of the mounting head;
controlling the mounting head to move the calibration plate below the downward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the downward-looking camera by using the mounting head, and recording a second position (X2, Y2) of the mounting head;
calculating a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera from the first position and the second position.
Optionally, before the adjusting the center of the calibration board to be completely coincident with the center of the field of view of the upward-looking camera by using the mounting head, the method further includes:
controlling the mounting head to adjust the position of the calibration plate on an X axis and a Y axis so that the center of the calibration plate is close to the central axis of the center of the visual field of the upward-looking camera;
and controlling the mounting head to rotate around the Z axis, enabling two groups of edges of the calibration plate which are perpendicular to each other to be parallel to two groups of edges of the visual field image of the upward-looking camera, recording the rotation angle R2 of the mounting head, and keeping the rotation angle R2 of the mounting head unchanged in the subsequent calibration process.
Optionally, the adjusting, by the mounting head, the center of the calibration board to be completely overlapped with the center of the field of view of the upward-looking camera includes:
calibrating the size of a single pixel of the upward-looking camera;
calculating the deviation between the center of the calibration plate and the center of the visual field of the upward-looking camera according to the size of a single pixel of the upward-looking camera;
and controlling the motion of the mounting head according to the deviation so as to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the center of the visual field of the upward-looking camera.
Optionally, the adjusting, by the mounting head, the center of the calibration board to be completely overlapped with the center of the field of view of the downward-looking camera includes:
calibrating the size of a single pixel of the downward-looking camera;
calculating the deviation between the center of the calibration plate and the view center of the downward-looking camera according to the size of a single pixel of the downward-looking camera;
and controlling the motion of the mounting head according to the deviation so as to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the center of the visual field of the downward-looking camera.
Optionally, after the recording the first position (X1, Y1) of the placement head, the method further comprises:
acquiring the position of the rotation center of a motor shaft of the mounting head;
acquiring a deviation between the position of the rotation center and the center of the top view camera field of view;
moving the mounting head according to the deviation until the rotation center of the motor shaft of the mounting head is overlapped with the visual field center of the upward-looking camera, and taking the position of the rotation center of the motor shaft of the mounting head as the photographing position of the mounting head above the upward-looking camera;
and when the photographing position of the mounting head is changed, calculating the current rotation center of the motor shaft of the mounting head according to the moving distance of the motor shaft of the mounting head and the size of a single pixel of the upward-looking camera.
Optionally, the obtaining, at the time of the mounting process calibration, a second positional deviation (Δ X ', Δ Y') of a center of a field of view of the upward-view camera and a center of a field of view of the downward-view camera using the mounting head, the calibration plate, the upward-view camera, and the downward-view camera includes:
when the mounting process is calibrated, controlling the mounting head to move the calibration plate to the position above the upward-looking camera at preset time intervals or at the time of attaching a preset number of workpieces, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the upward-looking camera by using the mounting head, and recording the third position (X3, Y3) of the mounting head;
controlling the mounting head to move the calibration plate below the downward-looking camera, adjusting the center of the calibration plate by using the mounting head until the center of the visual field of the downward-looking camera is completely overlapped, and recording a fourth position (X4, Y4) of the mounting head;
calculating a second conversion deviation (Δ X ', Δ Y') of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera from the third position and the fourth position.
In a second aspect, the present application further provides a mounting automatic calibration device, including:
a first obtaining module configured to, at the time of pre-mounting calibration, adjust the calibration plate by using the mounting head so that a center of the calibration plate completely coincides with a center of a field of view of the upward-view camera and a center of a field of view of the downward-view camera, respectively, and obtain a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-view camera and the center of the field of view of the downward-view camera;
a second obtaining module configured to obtain a second positional deviation (Δ X ', Δ Y') of a center of a field of view of the upward-view camera and a center of a field of view of the downward-view camera using the mounting head, the calibration plate, the upward-view camera, and the downward-view camera at the time of mounting process calibration;
a comparison module configured to compare the second position deviation obtained by the second obtaining module with the first position deviation obtained by the first obtaining module to obtain a compensation value (Δ X ", Δ Y");
and the calibration module is configured to perform calibration in the mounting process by using the compensation values (delta X ', delta Y') obtained by the comparison module.
In a third aspect, the present application further provides a mounting automatic calibration apparatus, where the mounting automatic calibration apparatus includes a calibration plate, a mounting head, a mounting beam, a downward-looking camera and an upward-looking camera with fixed positions, and a storage unit and a processing unit, the mounting head is mounted on the mounting beam and configured to move in an X axis direction along the mounting beam and configured to rotate around a vertical Z axis, the storage unit stores at least one execution instruction, and the processing unit at least performs the following operations according to the execution instruction:
during calibration before mounting, the calibration plate is adjusted by the mounting head so that the center of the calibration plate is completely overlapped with the visual field center of the upward-looking camera and the visual field center of the downward-looking camera respectively, and first position deviation (delta X, delta Y) of the visual field center of the upward-looking camera and the visual field center of the downward-looking camera is obtained;
acquiring a second position deviation (Δ X ', Δ Y') of a visual field center of the upward-looking camera and a visual field center of the downward-looking camera by using the mounting head, the calibration plate, the upward-looking camera and the downward-looking camera when the mounting process is calibrated;
comparing the second position deviation with the first position deviation to obtain a compensation value (Δ X ", Δ Y");
and performing calibration in the mounting process by using the compensation value (delta X ', delta Y').
The application can at least realize the following beneficial effects:
before the surface mounting, the position deviation between the top-view camera vision center and the bottom-view camera vision center is pre-calibrated by using the mounting head and the calibration plate, when calibration is performed in the surface mounting working process, the position deviation between the top-view camera vision center and the bottom-view camera vision center is calibrated in real time by using the mounting head and the calibration plate, a compensation value is obtained according to the deviation between the real-time calibration result and the pre-calibration, calibration in the surface mounting process is performed by using the compensation value, automatic calibration in the surface mounting process is realized, the surface mounting precision is improved, the calibration realization structure is simple, and an additional calibration mechanism is not needed except for the calibration plate.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a schematic structural view of a mounting automatic calibration apparatus provided in an embodiment of the present application;
fig. 2 is a flow chart of a method of mounting auto-calibration provided in an embodiment of the present application;
fig. 3 is a flow chart of a method of mounting auto-calibration provided in another embodiment of the present application;
FIG. 4 is a schematic flow chart of an embodiment of the present application in calibration with compensation values;
FIG. 5 is a schematic view of a process for calibrating a current center of rotation of a motor shaft of a placement head provided in an embodiment of the present application;
fig. 6 is a schematic structural diagram of a mounting automatic calibration device provided in an embodiment of the present application.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.
Fig. 1 is a schematic structural view of a mounting automatic calibration apparatus provided in an embodiment of the present application, which includes a calibration plate 1, a mounting head 2, a mounting beam 3, a fixed-position down-view camera 4, and an up-view camera 5.
The mounting head 2 is mounted on the mounting beam 3, configured to move in the X-axis direction along the mounting beam 3, and configured to be rotatable about a vertical Z-axis.
The application provides a calibration board 1 is the rectangle calibration board, and the size of rectangle calibration board is known data.
The downward-view camera 4 and the upward-view camera 5 are fixedly provided at intervals on the moving path of the mounting head 2.
The top of the mounting head 2 is provided with a hole site for the top view camera 5 to shoot the calibration plate or the workpiece picked up by the mounting head 2.
The mounting auto-calibration apparatus typically further comprises a storage unit storing at least one execution instruction, and a processing unit performing at least the steps of the mounting auto-calibration method according to the execution instruction.
Fig. 2 is a method flowchart of a mounting automatic calibration method provided in an embodiment of the present application, which is applied to the mounting automatic calibration apparatus shown in fig. 1, and the mounting automatic calibration method may include the following steps:
generally, before the mounting device does not work, the mounting device does not generate a thermal error, and at this time, pre-calibration may be performed. When the calibration is performed, the mounting head is used for picking up the calibration plate and adjusting the position of the calibration plate, for example, the mounting head moves on the mounting cross beam to realize the position adjustment of the calibration plate in the X axial direction, and for example, the mounting head drives the calibration plate to move horizontally perpendicular to the mounting cross beam to realize the position adjustment of the calibration plate in the Y axial direction.
The position of the calibration plate is adjusted to make the center of the calibration plate completely coincide with the center of the visual field of the top-view camera and the center of the visual field of the bottom-view camera, the center of the visual field of the top-view camera and the center of the visual field of the bottom-view camera are obtained at the moment, and further the position deviation of the center of the visual field of the top-view camera and the center of the visual field of the bottom-view camera is obtained and recorded as a first position deviation (delta X, delta Y).
in the mounting process, mounting equipment generates thermal errors due to long-time work, and calibration is needed to ensure subsequent mounting quality. In practical implementation, similar to the implementation of step 201, a second position deviation (Δ X ', Δ Y') of the current view center of the upward-looking camera and the view center of the downward-looking camera can be obtained.
Δ X "is the difference between Δ X 'and Δ X, and Δ Y" is the difference between Δ Y' and Δ Y.
And step 204, calibrating in the mounting process by using the compensation values (delta X ', delta Y').
To sum up, the mounting automatic calibration method provided by the application is right before mounting, the position deviation between the top view camera view center and the bottom view camera view center is pre-calibrated by using the mounting head and the calibration plate, when the calibration is performed in the mounting working process, the position deviation between the top view camera view center and the bottom view camera view center is real-time calibrated by using the mounting head and the calibration plate, the compensation value is obtained according to the deviation between the real-time calibration result and the pre-calibration, the calibration in the mounting process is performed by using the compensation value, the automatic calibration in the mounting process is realized, the mounting precision is improved, the realization structure of the calibration is simple, and no additional calibration mechanism is needed except for the calibration plate.
Fig. 3 is a flowchart of a method of a mounting automatic calibration method provided in another embodiment of the present application, which may include the steps of:
generally, before the center of the calibration board is adjusted to be completely overlapped with the center of the visual field of the upward-looking camera by using the mounting head, the mounting head needs to be controlled to adjust the position of the calibration board on an X axis and a Y axis so that the center of the calibration board is close to the central axis of the center of the visual field of the upward-looking camera; and then controlling the mounting head to rotate around the Z axis, enabling two groups of edges which are perpendicular to each other of the calibration plate to be parallel to two groups of edges of the visual field image of the top-view camera respectively, recording the rotation angle R2 of the mounting head, and keeping the rotation angle R2 of the mounting head unchanged in the subsequent calibration process.
When the center of the calibration plate is adjusted to be completely coincident with the visual field center of the upward-looking camera by using the mounting head, firstly calibrating the size of a single pixel of the upward-looking camera; calculating the deviation between the center of the calibration plate and the view center of the upward-looking camera according to the size of a single pixel of the upward-looking camera; and controlling the motion of the mounting head according to the deviation so as to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the visual field center of the upward-looking camera.
similarly, when the center of the calibration plate is adjusted to the center of the visual field of the downward-looking camera by the mounting head and the center of the visual field of the downward-looking camera completely coincides, the size of a single pixel of the downward-looking camera is calibrated firstly; calculating the deviation between the center of the calibration plate and the view center of the downward-looking camera according to the size of a single pixel of the downward-looking camera; and controlling the motion of the mounting head according to the deviation so as to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the visual field center of the downward-looking camera.
calculating a second conversion deviation (Δ X ', Δ Y') of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera according to the third position and the fourth position;
in the mounting process, mounting equipment generates thermal errors due to long-time work, and calibration is needed to ensure subsequent mounting quality. In practical implementation, similar to the implementation of step 201, a second position deviation (Δ X ', Δ Y') of the current view center of the upward-looking camera and the view center of the downward-looking camera can be obtained.
Acquiring a second positional deviation (Δ X ', Δ Y') of a center of a field of view of the upward-looking camera and a center of a field of view of the downward-looking camera using the mounting head, the calibration plate, the upward-looking camera, and the downward-looking camera in the calibration of the mounting process, including:
when the mounting process is calibrated, controlling the mounting head to move the calibration plate above the upper vision camera at preset time intervals or every time a preset number of workpieces are attached, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the upper vision camera by using the mounting head, and recording the third position (X3, Y3) of the mounting head;
controlling the mounting head to move the calibration plate to the lower part of the downward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the downward-looking camera by using the mounting head, and recording the fourth position (X4, Y4) of the mounting head;
and calculating a second conversion deviation (Δ X ', Δ Y') of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera according to the third position and the fourth position.
in step 307, calibration during mounting is performed using the compensation values (Δ X ", Δ Y").
Please refer to fig. 4, which is a schematic flowchart illustrating a calibration process using a compensation value according to an embodiment of the present application, and when step 307 is implemented, the method may include the following steps:
step 3071, acquiring the position deviation (delta X1, delta Y1) between the center of the downward-looking camera view and the attached workpiece;
and 3076, controlling the mounting head to move the attaching workpiece to the attached workpiece according to the corrected movement amount to finish the workpiece attachment.
To sum up, the mounting automatic calibration method provided by the application is right before mounting, the position deviation between the top view camera view center and the bottom view camera view center is pre-calibrated by using the mounting head and the calibration plate, when the calibration is performed in the mounting working process, the position deviation between the top view camera view center and the bottom view camera view center is real-time calibrated by using the mounting head and the calibration plate, the compensation value is obtained according to the deviation between the real-time calibration result and the pre-calibration, the calibration in the mounting process is performed by using the compensation value, the automatic calibration in the mounting process is realized, the mounting precision is improved, the realization structure of the calibration is simple, and no additional calibration mechanism is needed except for the calibration plate.
In one possible implementation, after recording the first position (X1, Y1) of the placement head, the current center of rotation of the placement head motor shaft may also be calibrated. Please refer to fig. 5, which is a schematic flow chart illustrating a process of calibrating a current rotation center of a motor shaft of a mounting head according to an embodiment of the present application, and includes the following specific steps:
s1, acquiring the position of the rotation center of the motor shaft of the mounting head;
s2, acquiring the deviation between the position of the rotation center and the view center of the upward-looking camera;
s3, moving the mounting head according to the deviation until the rotation center of the motor shaft of the mounting head is superposed with the visual field center of the upward-looking camera, and taking the position of the rotation center of the motor shaft of the mounting head as the photographing position of the mounting head above the upward-looking camera;
and S4, when the photographing position of the mounting head is changed, calculating the current rotation center of the motor shaft of the mounting head according to the moving distance of the motor shaft of the mounting head and the size of a single pixel of the upward-looking camera.
Based on the calibration of the current rotation center of the motor shaft of the mounting head, the method is a measure to be taken when a product (such as a workpiece) picked up by the mounting head is not placed correctly in actual production, and the calibration process is not influenced because the position and the placing posture of the calibration plate are fixed and the position cannot be changed.
The following is an embodiment of the apparatus corresponding to the mounting automatic calibration method, and for avoiding redundancy, the following technical features are explained with reference to the above explanation of the mounting automatic calibration method, because the technical features of the embodiment of the apparatus and the embodiment of the method correspond to each other.
Fig. 6 is a schematic structural diagram of a mounting automatic calibration apparatus provided in an embodiment of the present application, which may include a first obtaining module 610, a second obtaining module 620, a comparing module 630, and a calibrating module 640.
A first obtaining module 610 configured to, at the time of pre-mounting calibration, adjust the calibration plate using the mounting head so that the center of the calibration plate completely coincides with the center of the field of view of the upward-view camera and the center of the field of view of the downward-view camera, respectively, and obtain a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-view camera and the center of the field of view of the downward-view camera;
a second obtaining module 620 configured to obtain a second positional deviation (Δ X ', Δ Y') of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera using the mounting head, the calibration plate, the upward-looking camera, and the downward-looking camera at the time of the mounting process calibration;
a comparing module 630, configured to compare the second position deviation obtained by the second obtaining module 620 with the first position deviation obtained by the first obtaining module 610, so as to obtain a compensation value (Δ X ", Δ Y");
and a calibration module 640 configured to perform calibration during mounting using the compensation values (Δ X ", Δ Y") obtained by the comparison module.
In one possible implementation, the calibration module 640 is further configured to perform the following operations:
acquiring the position deviation (delta X1, delta Y1) between the center of the downward camera view and the attached workpiece;
calculating an angle R1 between the attached workpiece and the attached workpiece sucked by the attaching head;
controlling the mounting head to rotate the sucked attached workpiece by a rotation angle R1;
calculating the position deviation (delta X2, delta Y2) of the attached workpiece after rotation and the center of the upper view camera;
calculating a correction movement amount of the mounting head based on the positional deviation (Δ X1, Δ Y1), the positional deviation (Δ X2, Δ Y2) and the compensation value (Δ X ″, Δ Y ");
and controlling the mounting head to move the attaching workpiece to the attached workpiece according to the correction movement amount to finish workpiece attachment.
The first obtaining module 610 is further configured to perform the following operations:
when the mark is carried out before mounting, the mounting head is controlled to move the mark plate to the upper part of the upper vision camera, the center of the mark plate is adjusted to be completely superposed with the center of the visual field of the upper vision camera by the mounting head, and the first position (X1, Y1) of the mounting head is recorded;
controlling the mounting head to move the calibration plate to the lower part of the downward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the downward-looking camera by using the mounting head, and recording a second position (X2, Y2) of the mounting head;
a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera is calculated from the first position and the second position.
In one possible implementation, the first obtaining module 610 is further configured to perform the following operations:
controlling the mounting head to adjust the position of the calibration plate on an X axis and a Y axis so that the center of the calibration plate is close to the central axis of the center of the visual field of the upward-looking camera;
and controlling the mounting head to rotate around the Z axis, enabling two groups of mutually vertical edges of the calibration plate to be parallel to two groups of edges of the visual field image of the top-view camera respectively, recording the rotation angle R2 of the mounting head, and keeping the rotation angle R2 of the mounting head unchanged in the subsequent calibration process.
The first obtaining module 610 is further configured to perform the following operations:
calibrating the size of a single pixel of the upward-looking camera;
calculating the deviation between the center of the calibration plate and the view center of the upward-looking camera according to the size of a single pixel of the upward-looking camera;
and controlling the motion of the mounting head according to the deviation to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the visual field center of the upward-looking camera.
The first obtaining module 610 is further configured to perform the following operations:
calibrating the size of a single pixel of a downward-looking camera;
calculating the deviation between the center of the calibration plate and the view center of the downward-looking camera according to the size of a single pixel of the downward-looking camera;
and controlling the motion of the mounting head according to the deviation to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the visual field center of the downward-looking camera.
In one possible implementation, the mounting automatic calibration apparatus further includes a rotation center calibration module configured to perform the following operations:
acquiring the position of a rotation center of a motor shaft of the mounting head;
acquiring the deviation between the position of the rotation center and the view center of the upward-looking camera;
moving the mounting head according to the deviation until the rotation center of the motor shaft of the mounting head is superposed with the visual field center of the upper-view camera, and taking the position of the rotation center of the motor shaft of the mounting head as the photographing position of the mounting head above the upper-view camera;
and when the photographing position of the mounting head is changed, calculating the current rotation center of the motor shaft of the mounting head according to the moving distance of the motor shaft of the mounting head and the size of a single pixel of the upward-looking camera.
Optionally, the second obtaining module 620 is further configured to perform the following operations:
when the mounting process is calibrated, controlling the mounting head to move the calibration plate above the upper vision camera at preset time intervals or every time a preset number of workpieces are attached, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the upper vision camera by using the mounting head, and recording the third position (X3, Y3) of the mounting head;
controlling the mounting head to move the calibration plate to the lower part of the downward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the downward-looking camera by using the mounting head, and recording the fourth position (X4, Y4) of the mounting head;
and calculating a second conversion deviation (Δ X ', Δ Y') of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera according to the third position and the fourth position.
To sum up, the subsides dress automatic calibration device that this application provided, it is right before the dress, utilize subsides dress head and calibration plate to look up the camera field of vision center and look down the positional deviation between the camera field of vision center in advance, when carrying out the calibration in the dress work progress, utilize subsides dress head and calibration plate to look up the camera field of vision center and look down the positional deviation between the camera field of vision center in real time and the camera field of vision center in real time to carry out the calibration, according to the deviation between real-time calibration result and the precalibration, obtain the offset, utilize the offset to carry out the calibration of dress in-process, the automatic calibration at dress in-process has been realized, the dress precision has been improved, the realization simple structure of calibration, except that the calibration plate does not need extra calibration mechanism.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.
Claims (10)
1. A mounting automatic calibration method is applied to mounting automatic calibration equipment, and comprises a calibration plate, a mounting head, a mounting beam, and a fixed-position downward-looking camera and a fixed-position upward-looking camera, wherein the mounting head is mounted on the mounting beam, is configured to move in an X-axis direction along the mounting beam, and is configured to rotate around a vertical Z-axis, and the mounting automatic calibration method comprises the following steps:
during calibration before mounting, the calibration plate is adjusted by the mounting head so that the center of the calibration plate is completely overlapped with the visual field center of the upward-looking camera and the visual field center of the downward-looking camera respectively, and first position deviation (delta X, delta Y) of the visual field center of the upward-looking camera and the visual field center of the downward-looking camera is obtained;
acquiring a second position deviation (Δ X ', Δ Y') of a visual field center of the upward-looking camera and a visual field center of the downward-looking camera by using the mounting head, the calibration plate, the upward-looking camera and the downward-looking camera when the mounting process is calibrated;
comparing the second position deviation with the first position deviation to obtain a compensation value (Δ X ", Δ Y");
and performing calibration in the mounting process by using the compensation value (delta X ', delta Y').
2. A mounting auto-calibration method according to claim 1, wherein said calibration during mounting using said compensation value (Δ X ", Δ Y") comprises:
acquiring a positional deviation (Δ X1, Δ Y1) between the center of the downward camera view and the attached workpiece;
calculating an angle R1 between the attached workpiece and the attached workpiece sucked by the attaching head;
controlling the mounting head to rotate the sucked attaching workpiece by the angle R1;
calculating a positional deviation (Δ X2, Δ Y2) of the attached workpiece and the center of the upward-looking camera view after the rotation;
calculating a correction movement amount of the mounting head based on the positional deviation (Δ X1, Δ Y1), the positional deviation (Δ X2, Δ Y2), and the compensation value (Δ X ", Δ Y");
and controlling the mounting head to move the attaching workpiece to the attached workpiece according to the corrected movement amount to finish workpiece attachment.
3. The mounting automatic calibration method according to claim 1, wherein said adjusting the calibration plate by the mounting head so that the center of the calibration plate is completely overlapped with the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera, respectively, and obtaining a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera in the pre-mounting calibration comprises:
during calibration before mounting, controlling the mounting head to move the calibration plate to the position above the upward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the upward-looking camera by using the mounting head, and recording a first position (X1, Y1) of the mounting head;
controlling the mounting head to move the calibration plate below the downward-looking camera, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the downward-looking camera by using the mounting head, and recording a second position (X2, Y2) of the mounting head;
calculating a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera from the first position and the second position.
4. A placement auto-calibration method according to claim 3, wherein before said adjusting the center of said calibration plate to be completely coincident with the center of the field of view of said upward-looking camera by said placement head, said method further comprises:
controlling the mounting head to adjust the position of the calibration plate on an X axis and a Y axis so that the center of the calibration plate is close to the central axis of the center of the visual field of the upward-looking camera;
and controlling the mounting head to rotate around the Z axis, enabling two groups of edges of the calibration plate which are perpendicular to each other to be parallel to two groups of edges of the visual field image of the upward-looking camera, recording the rotation angle R2 of the mounting head, and keeping the rotation angle R2 of the mounting head unchanged in the subsequent calibration process.
5. A placement auto-calibration method according to claim 3, wherein said adjusting the center of said calibration plate to be completely coincident with the center of the field of view of said upward-looking camera by said placement head comprises:
calibrating the size of a single pixel of the upward-looking camera;
calculating the deviation between the center of the calibration plate and the center of the visual field of the upward-looking camera according to the size of a single pixel of the upward-looking camera;
and controlling the motion of the mounting head according to the deviation so as to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the center of the visual field of the upward-looking camera.
6. A placement auto-calibration method according to claim 3, wherein said adjusting the center of said calibration plate to be completely coincident with the center of the field of view of said downward-looking camera by said placement head comprises:
calibrating the size of a single pixel of the downward-looking camera;
calculating the deviation between the center of the calibration plate and the view center of the downward-looking camera according to the size of a single pixel of the downward-looking camera;
and controlling the motion of the mounting head according to the deviation so as to correct the position of the mounting head, so that the center of the calibration plate is completely overlapped with the center of the visual field of the downward-looking camera.
7. A placement auto-calibration method according to claim 5, wherein after said recording of said first position (X1, Y1) of said placement head, said method further comprises:
acquiring the position of the rotation center of a motor shaft of the mounting head;
acquiring a deviation between the position of the rotation center and the center of the top view camera field of view;
moving the mounting head according to the deviation until the rotation center of the motor shaft of the mounting head is overlapped with the visual field center of the upward-looking camera, and taking the position of the rotation center of the motor shaft of the mounting head as the photographing position of the mounting head above the upward-looking camera;
and when the photographing position of the mounting head is changed, calculating the current rotation center of the motor shaft of the mounting head according to the moving distance of the motor shaft of the mounting head and the size of a single pixel of the upward-looking camera.
8. The mounting automatic calibration method according to claim 1, wherein said acquiring a second positional deviation (Δ X ', Δ Y') of a center of field of view of said upward-view camera and a center of field of view of said downward-view camera by using said mounting head, said calibration plate, said upward-view camera, and said downward-view camera at the time of the mounting process calibration comprises:
when the mounting process is calibrated, controlling the mounting head to move the calibration plate to the position above the upward-looking camera at preset time intervals or at the time of attaching a preset number of workpieces, adjusting the center of the calibration plate to be completely overlapped with the center of the visual field of the upward-looking camera by using the mounting head, and recording the third position (X3, Y3) of the mounting head;
controlling the mounting head to move the calibration plate below the downward-looking camera, adjusting the center of the calibration plate by using the mounting head until the center of the visual field of the downward-looking camera is completely overlapped, and recording a fourth position (X4, Y4) of the mounting head;
calculating a second conversion deviation (Δ X ', Δ Y') of the center of the field of view of the upward-looking camera and the center of the field of view of the downward-looking camera from the third position and the fourth position.
9. A mounting automatic calibration device, characterized in that the mounting automatic calibration device comprises:
a first obtaining module configured to, at the time of pre-mounting calibration, adjust the calibration plate by using the mounting head so that a center of the calibration plate completely coincides with a center of a field of view of the upward-view camera and a center of a field of view of the downward-view camera, respectively, and obtain a first positional deviation (Δ X, Δ Y) of the center of the field of view of the upward-view camera and the center of the field of view of the downward-view camera;
a second obtaining module configured to obtain a second positional deviation (Δ X ', Δ Y') of a center of a field of view of the upward-view camera and a center of a field of view of the downward-view camera using the mounting head, the calibration plate, the upward-view camera, and the downward-view camera at the time of mounting process calibration;
a comparison module configured to compare the second position deviation obtained by the second obtaining module with the first position deviation obtained by the first obtaining module to obtain a compensation value (Δ X ", Δ Y");
and the calibration module is configured to perform calibration in the mounting process by using the compensation values (delta X ', delta Y') obtained by the comparison module.
10. The mounting automatic calibration equipment is characterized by comprising a calibration plate, a mounting head, a mounting beam, a downward-looking camera and an upward-looking camera which are fixed in position, a storage unit and a processing unit, wherein the mounting head is mounted on the mounting beam and configured to move in the X-axis direction along the mounting beam and rotate around the vertical Z-axis, the storage unit stores at least one execution instruction, and the processing unit at least executes the following operations according to the execution instruction:
during calibration before mounting, the calibration plate is adjusted by the mounting head so that the center of the calibration plate is completely overlapped with the visual field center of the upward-looking camera and the visual field center of the downward-looking camera respectively, and first position deviation (delta X, delta Y) of the visual field center of the upward-looking camera and the visual field center of the downward-looking camera is obtained;
acquiring a second position deviation (Δ X ', Δ Y') of a visual field center of the upward-looking camera and a visual field center of the downward-looking camera by using the mounting head, the calibration plate, the upward-looking camera and the downward-looking camera when the mounting process is calibrated;
comparing the second position deviation with the first position deviation to obtain a compensation value (Δ X ", Δ Y");
and performing calibration in the mounting process by using the compensation value (delta X ', delta Y').
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| CN115038328A (en) * | 2022-06-24 | 2022-09-09 | 东莞市南部佳永电子有限公司 | Calibration method of component inserter |
| CN115799140A (en) * | 2022-07-20 | 2023-03-14 | 拓荆键科(海宁)半导体设备有限公司 | Calibration method and device, combined microscope and wafer bonding method |
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| CN116677686B (en) * | 2023-07-31 | 2023-10-20 | 常州铭赛机器人科技股份有限公司 | Mounting method for multiple photographing of chip mounter based on machine vision |
| CN117393486A (en) * | 2023-12-11 | 2024-01-12 | 常州铭赛机器人科技股份有限公司 | Mounting precision control method in heat dissipation cover mounting process |
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