CN113808969A - Liquid discharge device and liquid discharge method - Google Patents

Liquid discharge device and liquid discharge method Download PDF

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Publication number
CN113808969A
CN113808969A CN202110625856.8A CN202110625856A CN113808969A CN 113808969 A CN113808969 A CN 113808969A CN 202110625856 A CN202110625856 A CN 202110625856A CN 113808969 A CN113808969 A CN 113808969A
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CN
China
Prior art keywords
pipe
liquid
functional liquid
discharge
functional
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Pending
Application number
CN202110625856.8A
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Chinese (zh)
Inventor
申圣敏
林辉幸
大岛澄美
松本诚
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of CN113808969A publication Critical patent/CN113808969A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
    • B41J2/16523—Waste ink collection from caps or spittoons, e.g. by suction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16552—Cleaning of print head nozzles using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16579—Detection means therefor, e.g. for nozzle clogging
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2002/16567—Cleaning of print head nozzles using ultrasonic or vibrating means

Abstract

The invention aims to prevent the damage of the suction performance and the discharge performance of the functional liquid caused by the aggregation and adhesion of solute in the functional liquid on a liquid discharge pipe which is connected with a liquid receiving part for receiving the functional liquid released from a releasing head or used for sucking the functional liquid in the releasing head. The invention provides a liquid discharge apparatus and a liquid discharge method. A liquid discharge apparatus according to the present invention is a liquid discharge apparatus for discharging a functional liquid from a discharge head having a discharge hole formed therein for discharging a droplet of the functional liquid to a workpiece, the liquid discharge apparatus including: a liquid discharge pipe for sucking the functional liquid in the discharge head or connecting to a liquid receiving portion that receives the functional liquid discharged from the discharge head; and a supply pipe for supplying a cleaning fluid for discharging the functional liquid in the drain pipe to the drain pipe.

Description

Liquid discharge device and liquid discharge method
Technical Field
The present invention relates to a liquid discharge apparatus and a liquid discharge method.
Background
Patent document 1 discloses a head maintenance device for maintaining a discharge head including a discharge nozzle for discharging a liquid material containing a film material forming a film material. The head maintenance device includes: a nozzle sealing unit having a sealing chamber constituting a space for sealing the discharge nozzle; a suction unit having a suction pipe communicating with the seal chamber, the suction unit being capable of sucking the liquid filled into the discharge head through the discharge nozzle by sucking the gas or liquid in the seal chamber sealed by the discharge nozzle through the suction pipe; and a discharge unit having a drain pipe opened inside and outside the sealed chamber so that the liquid in the sealed chamber can flow to the outside. The sealed chamber has: sealing the chamber opening; a bottom surface; and a seal protrusion formed around the opening of the seal chamber and abutting the release head. The liquid sucked from the discharge head falls from the discharge nozzle and is retained on the bottom surface. The suction pipe and the drain pipe open into the seal chamber at a position closer to the seal projection than the bottom surface in the gravitational acceleration direction.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 2009-248053
Disclosure of Invention
Technical problem to be solved by the invention
The technique of the present invention is intended to prevent the functional liquid from being impaired in suction performance and discharge performance due to the solute in the functional liquid agglomerating and adhering to a liquid discharge pipe connected to a liquid receiving portion that receives the functional liquid discharged from a discharge head or that sucks the functional liquid in the discharge head.
Means for solving the problems
One aspect of the present invention is a liquid discharge apparatus for discharging a functional liquid from a discharge head in which a discharge hole for discharging a droplet of the functional liquid to a workpiece is formed, the liquid discharge apparatus comprising: a liquid discharge pipe for sucking the functional liquid in the discharge head or connecting to a liquid receiving portion that receives the functional liquid discharged from the discharge head; and a supply pipe for supplying a cleaning fluid for discharging the functional liquid in the drain pipe to the drain pipe.
Effects of the invention
According to the present invention, it is possible to prevent the functional liquid from being aggregated and adhered to the liquid discharge pipe connected to the liquid receiving portion for receiving the functional liquid discharged from the discharge head or for sucking the functional liquid in the discharge head, thereby preventing the functional liquid from being deteriorated in the suction performance and the discharge performance.
Drawings
Fig. 1 is a schematic side view showing a schematic configuration of an example of a functional liquid discharge apparatus including a liquid discharge apparatus according to the present embodiment.
Fig. 2 is a schematic plan view of the functional liquid discharge apparatus of fig. 1.
Fig. 3 is a schematic plan view showing a schematic configuration of a carriage (carriage) included in the functional liquid discharge apparatus of fig. 1.
Fig. 4 is a piping system diagram of the liquid discharge apparatus.
Fig. 5 is a diagram illustrating another example of the supply pipe for the cleaning solvent.
Fig. 6 is a diagram illustrating another example of the supply pipe for the cleaning solvent.
Fig. 7 is a diagram illustrating another example of the liquid discharge apparatus.
Fig. 8 is a diagram illustrating another example of the liquid discharge apparatus.
Fig. 9 is a diagram illustrating another example of the liquid discharge apparatus.
Fig. 10 is a diagram illustrating another example of the liquid discharge apparatus.
Fig. 11 is a diagram illustrating another example of the liquid discharge apparatus.
Description of the reference numerals
24 discharge head, 24a discharge nozzle, 70 liquid discharge device, 100 suction tube, 131 suction tube for flushing, 140 supply tube, 200 supply tube, 210 supply tube, W workpiece.
Detailed Description
The present invention relates to a functional liquid discharge apparatus that discharges a functional liquid to a workpiece to perform drawing, and a functional liquid discharge position correction method for the functional liquid discharge apparatus.
Conventionally, as an apparatus for drawing on a work using a functional liquid, an inkjet type functional liquid discharge apparatus is known which discharges (discharges, ejects) the functional liquid in the form of droplets. Functional liquid discharge devices are widely used, for example, in the manufacture of electro-optical devices (flat panel displays: FPDs) such as organic EL devices, color filters, liquid crystal display devices, plasma display panels (PDP devices), electron-emitting devices (FED devices, SED devices), and the like. In the functional liquid discharge device, the functional liquid is temporarily stored in advance, and droplets of the functional liquid are discharged from discharge holes of a discharge head at a necessary timing.
However, there are the following cases: in the standby process of the release of the functional liquid, the functional liquid temporarily stored is dried, and clogging of the release hole or the like occurs. As a countermeasure against this, patent document 1 discloses a head maintenance device for performing maintenance on a discharge head including a discharge hole, that is, a discharge nozzle. The head maintenance device sucks and discharges the functional liquid filled in the discharge head via a discharge nozzle, a liquid discharge pipe, and the like.
Further, a measure of periodically releasing the functional liquid from the release head is also adopted. In this case, the functional liquid discharged from the discharge head is sucked and discharged from the liquid receiving portion that receives the functional liquid via the drain pipe.
When the functional liquid in the discharge head or the functional liquid discharged from the discharge head is sucked and discharged through the discharge pipe as described above, solutes contained in the functional liquid may aggregate in the suction pipe and adhere to the inner wall of the discharge pipe. This adhesion of the solute is particularly common when the solubility of the solute is low, or when the functional liquid remains in the form of particles (droplets) in the drain pipe (when the functional liquid remains so as to occupy only a part of the pipe cross section rather than covering the entire pipe cross section). When the solute adheres to the inner wall of the drain pipe, the suction performance and the discharge performance of the functional liquid may be impaired.
Further, when the functional liquid is discharged from the liquid receiving portion that receives the functional liquid discharged from the discharge head via the liquid discharge pipe, the functional liquid may be discharged using gravity acting on the functional liquid without using a suction force. In this case, similarly to the case of using the suction force, the discharge performance of the functional liquid is impaired by the solute adhering to the inner wall of the discharge pipe.
Therefore, the technique of the present invention is for preventing the functional liquid from being impaired in its suction performance and discharge performance due to the solute in the functional liquid agglutinating and adhering to a liquid discharge pipe connected to a liquid receiving portion that receives the functional liquid discharged from the discharge head or that suctions the functional liquid inside the discharge head.
Next, a liquid discharge apparatus and a liquid discharge method according to the present embodiment will be described with reference to the drawings. In the present specification and the drawings, elements having substantially the same functional configuration are given the same reference numerals, and redundant description is omitted.
Fig. 1 is a schematic side view showing a schematic configuration of an example of a functional liquid discharge apparatus including a liquid discharge apparatus according to the present embodiment. Fig. 2 is a schematic plan view of the functional liquid discharge apparatus of fig. 1. Fig. 3 is a schematic plan view showing a schematic configuration of a carriage provided in the functional liquid discharge apparatus of fig. 1.
Hereinafter, the main scanning direction of the workpiece is defined as an X-axis direction, the sub-scanning direction orthogonal to the main scanning direction is defined as a Y-axis direction, the vertical direction orthogonal to the X-axis direction and the Y-axis direction is defined as a Z-axis direction, and the rotational direction around the Z-axis direction is defined as a θ -direction.
The functional liquid discharge device 1 is an inkjet droplet discharge device that discharges a functional liquid constituting a functional film in the form of droplets. As shown in fig. 1 and 2, the functional liquid discharge apparatus 1 includes: an X-axis table 10 extending in a main scanning direction (X-axis direction) for moving a workpiece W in the main scanning direction; and a pair of Y-axis tables 11 and 11 extending in the sub-scanning direction (Y-axis direction) and spanning the X-axis table 10. A pair of X-axis guide rails 12, 12 are provided on the upper surface of the X-axis table 10 so as to extend in the X-axis direction, and an X-axis linear motor (not shown) is provided on each X-axis guide rail 12. A Y-axis guide 13 is provided on the upper surface of each Y-axis table 11 so as to extend in the Y-axis direction, and a Y-axis linear motor (not shown) is provided on the Y-axis guide 13.
A carriage unit 20 and an imaging unit 30 are provided on the pair of Y-axis tables 11, 11. The X-axis table 10 is provided with a workpiece stage 40 and a flushing unit 50. A maintenance unit 60 is provided between the pair of Y-axis tables 11 and 11 on the outer side (Y-axis negative direction side) of the X-axis table 10.
A plurality of (e.g., 10) carriage units 20 are provided on the Y-axis table 11. Each carriage unit 20 has a carriage plate 21, a carriage turning mechanism 22, and a carriage 23.
The carriage plate 21 is made of a metal plate, is attached to the Y-axis guide rail 13, and is movable in the Y-axis direction by a Y-axis linear motor provided on the Y-axis guide rail 13. Further, the plurality of carriage plates 21 may be integrally moved in the Y axis direction.
A carriage turning mechanism 22 is provided at the center of the lower surface of the carriage plate 21, and a carriage 23 is detachably attached to the lower end of the carriage turning mechanism 22. The carriage 23 is rotatable in the θ direction by the carriage rotating mechanism 22.
As shown in fig. 3, a plurality of release heads 24 are provided on the lower surface of the carriage 23. The release head 24 is provided with 1 (6 in total) for 6 colors of R, G, B, C, M and Y, for example. The number of carriages 23 and the number of release heads 24 provided on each carriage 23 are arbitrary.
Further, a plurality of (for example, 10) discharge holes, i.e., discharge nozzles 24a are formed in the lower surface of each of the discharge heads 24, and droplets of the functional liquid are discharged through the discharge nozzles 24 a. The discharge nozzles 24a are continuously provided along the Y-axis direction.
Returning to the description of fig. 1 and 2.
The image pickup unit 30 has a release check camera 31. The release inspection camera 31 is disposed on the X-axis positive direction side with respect to the carriage 23.
The release inspection camera 31 can image the workpiece W, specifically, can image the landing point of the droplet to be inspected and released onto the workpiece W. The release check camera 31 is, for example, a line sensor. The release inspection camera 31 is supported by a base 32 provided on a side surface of the Y-axis table 11 on the positive X-axis direction side of the pair of Y-axis tables 11, 11. When the workpiece stage 40 is guided to a position directly below the release inspection camera 31, the release inspection camera 31 can capture an image of a pattern formed by droplets of the workpiece W landed on the workpiece stage 40.
The workpiece stage 40 is, for example, a vacuum suction stage, and can suck and place the workpiece W. The workpiece table 40 is supported rotatably in the θ direction by a table rotating mechanism 41 provided on the lower surface side of the workpiece table 40. Further, a workpiece alignment camera (not shown) for imaging an alignment mark of the workpiece W on the workpiece stage 40 is provided above the workpiece stage 40 on the X-axis negative side of the Y-axis table 11. Then, the position of the workpiece W placed on the workpiece stage 40 in the θ direction can be corrected by the stage rotating mechanism 41 based on the image captured by the workpiece alignment camera.
The workpiece table 40 and the table rotating mechanism 41 are supported by an X-axis slider 42 provided on the lower surface side of the table rotating mechanism 41. The X-axis slider 42 is attached to the X-axis guide rail 12 and is movable in the X-axis direction by an X-axis linear motor provided on the X-axis guide rail 12. Therefore, the workpiece table 40 (workpiece W) is also movable in the X-axis direction along the X-axis guide rail 12 by the X-axis slider 42.
The flushing unit 50 is a unit that receives a waste release from the release head 24. In the flushing unit 50, a plurality of (for example, 10) flushing recovery stages 51 as liquid receiving portions are arranged in the X-axis direction. The number of the rinse recovery stages 51 is the same as the number of the carriages 23, and the pitch of the rinse recovery stages 51 is also the same as the pitch of the carriages 23.
The upper surface of the rinse recovery stage 51 is open, and when the rinse recovery stage 51 is guided directly below the corresponding carriage 23, the rinse recovery stage 51 receives and stores the droplets (rinsed) released from the release head 24 of the carriage 23. For example, droplets of the functional liquid released at the time of the periodic flushing are collected by the flushing recovery table 51. The regular flushing is performed when the discharge of the droplets is temporarily stopped, such as when the workpiece W is replaced, and the flushing (discharge) is performed from all the discharge heads 24 of the carriage 23.
The flushing unit 50 is supported by an X-axis slide 52. The X-axis slider 52 is attached to the X-axis guide rail 12 and is movable in the X-axis direction by an X-axis linear motor provided on the X-axis guide rail 12. Accordingly, the flushing unit 50 is also movable in the X-axis direction along the X-axis guide rail 12 by the X-axis slider 52.
The maintenance unit 60 is used to perform maintenance of the release head 24 and eliminate release failure of the release head 24. In the maintenance unit 60, a plurality of cover units 61 are arranged in the Y axis direction. The number of the cover units 61 is the same as that of the carriages 23, and the pitch of the cover units 61 is also the same as that of the carriages 23.
The cover unit 61 is used to suck the functional liquid in the release head 24 via the cover unit 61. Further, when the functional liquid discharge apparatus 1 is in a stopped state, the cover unit 61 covers the discharge head 24, suppressing drying of the functional liquid.
The functional liquid release device 1 further includes a liquid discharge device 70 (see fig. 4). The liquid discharge device 70 is a device capable of sucking and discharging the functional liquid in the release head 24 through the cover unit 61. The configuration of the liquid discharge device 70 will be described later.
The functional liquid discharge apparatus 1 described above is provided with a control unit 80. The control unit 80 is a computer including, for example, a CPU, a memory, and the like, and includes a data storage unit (not shown). The data storage unit stores drawing data (bitmap data) for controlling droplets discharged to the workpiece W and drawing a predetermined pattern on the workpiece W, for example. The control unit 80 also includes a program storage unit (not shown). The program storage unit stores programs for controlling various processes in the functional liquid discharge apparatus 1, programs for controlling the operation of the drive system, and the like.
The drawing data and the program may be stored in a computer-readable storage medium such as a Hard Disk (HD), a Floppy Disk (FD), a Compact Disk (CD), a magnetic optical disk (MO), or a memory card, and may be installed from the storage medium to the control unit 80.
Next, a drawing process of the workpiece W using the functional liquid discharge apparatus 1 configured as described above will be briefly described. In the following description, on the X-axis table 10, the region on the X-axis negative direction side of the Y-axis table 11 is referred to as a feeding-in/feeding-out region a1, the region between the pair of Y-axis tables 11 and 11 is referred to as a processing region a2, and the region on the X-axis positive direction side of the Y-axis table 11 is referred to as a standby region A3.
First, the workpiece stage 40 is disposed in the carry-in/out area a1, and the workpiece W carried into the functional liquid discharge apparatus 1 by the carrying mechanism (not shown) is placed on the workpiece stage 40. Next, the alignment mark of the workpiece W on the workpiece stage 40 is imaged by the workpiece alignment camera. Then, based on the captured image, the table rotating mechanism 41 corrects the position of the workpiece W placed on the table 40 in the θ direction, and the workpiece W is aligned (step S1).
Thereafter, the workpiece stage 40 is moved from the carry-in/out area a1 to the processing area a2 by the X-axis slide 42. In the processing area a2, droplets are discharged from the discharge head 24 to the workpiece W moved below the discharge head 24. Further, the workpiece table 40 is moved to the standby area a3 side so that the entire surface of the workpiece W passes below the discharge head 24. The workpiece W is reciprocated in the X-axis direction, and the carriage unit 20 is appropriately moved in the Y-axis direction, so that a predetermined pattern based on the drawing data is drawn on the workpiece W (step S2).
Thereafter, the workpiece stage 40 is moved from the standby area A3 to the carrying-in/out area a 1. Next, the workpiece W on which the drawing process is completed is sent out from the functional liquid discharge apparatus 1 (step S3).
Next, the next workpiece W is sent to the functional liquid discharge apparatus 1, and the above-described steps S1 to S3 are repeated.
Next, the liquid discharge apparatus 70 will be explained. Fig. 4 is a piping diagram of the liquid discharge apparatus 70.
The liquid discharge device 70 is a device capable of sucking and discharging the functional liquid in the release head 24 through the cover unit 61, as described above. The cover unit 61 has covers 61a corresponding to 1 (6 in total) release heads 24 per color. The upper surface of the cover 61a is open. The cover unit 61 is provided with a lifting mechanism (not shown), and the cover unit 61 can be moved to the suction position. By raising the cover unit 61 by the raising and lowering mechanism and moving it to the suction position, the lower end of the corresponding discharge head 24 can be inserted into the cover interior via the opening of the upper surface of each of the covers 61 a. In this state, the functional liquid in the release head 24 can be sucked through the cover 61 a.
The liquid discharge device 70 has a suction pipe 100 as a liquid discharge pipe. The suction pipe 100 can suck the functional liquid in the discharge head 24 and discharge the functional liquid to the liquid discharge tank 103, that is, discharge the functional liquid. The suction tube 100 includes a separate unit piping system 101 connected to the cover unit 61 for each cover unit 61, and a tank side piping system 102 connecting each separate unit piping system 101 and a drain tank 103.
Each unit separate piping system 101 has a separate piping 111, a seed separate piping 112, and a first header 113.
The color tubes 111 are provided for each cover 61a, and the upstream end of each color tube 111 is connected to the corresponding cover 61 a.
The seed pipe 112 is used to join the downstream sides of the color pipes 111 according to the types of functional liquids. Specifically, the seed pipes 112 are used to merge the downstream sides of the color pipes 111 for the functional liquids R and C, the downstream sides of the color pipes 111 for the functional liquids G and M, or the downstream sides of the color pipes 111 for the functional liquids B and Y. An on-off valve 114 for opening and closing a flow path in each separate pipe 112 is inserted in each separate pipe 112.
Downstream ends of the various distribution pipes 112 are connected to a first header 113.
The tank-side piping system 102 has branch pipes 121, a second header 122, and a main suction pipe 123.
The branch pipes 121 are provided for each cover unit 61, that is, for each unit piping system 101, and the upstream ends of the branch pipes 121 are connected to the corresponding cover unit 61, that is, to the first header 113 of the corresponding unit piping system 101. An opening/closing valve 124 for opening and closing a flow path in each branch pipe 121 is inserted into each branch pipe 121.
The downstream end of each branch pipe 121 is connected to the second header 122.
The main suction pipe 123 is used to communicate the second header 122 with the drain tank 103, and the upstream end of the main suction pipe 123 is connected to the second header 122 and the downstream end of the main suction pipe 123 is connected to the drain tank 103. Further, a suction pump 125 is inserted into the main suction pipe 123. The functional liquid is sucked from each release head 24 by the suction force of the suction pump 125. Is recovered to the drain tank 103.
The liquid discharge device 70 further includes a suction tube 131 for irrigation. One end of the irrigation suction pipe 131 is connected to (the irrigation recovery table 51 of) the irrigation unit 50, and the other end of the irrigation suction pipe 131 is connected to the drain tank 103, thereby allowing the irrigation unit 50 and the drain tank 103 to communicate with each other. A suction pump 132 is inserted into the irrigation suction pipe 131. The functional liquid discharged from the discharge head 24 to the flushing unit 50 is sucked into the flushing suction pipe 131 by the suction force of the suction pump 132 and discharged to the drain tank 103. An on-off valve 133 for opening and closing a flow path in the suction pipe 131 for washing is inserted in the suction pipe 131 on the upstream side of the suction pump 132.
Further, a discharge pipe 134 for discharging the gas accumulated in the upper portion of the drain tank 103 is connected to the drain tank 103. The discharge pipe is used to discharge the gas in the drain tank 103, and is inserted with a discharge valve 135.
The liquid discharge device 70 further includes a supply pipe 140, and the supply pipe 140 supplies a cleaning solvent, which is a cleaning fluid for discharging the functional liquid in the suction pipe 100, to the suction pipe 100.
In the present embodiment, the supply pipe 140 is configured to be able to supply a plurality of types of cleaning solvents to the suction pipe 100. Specifically, the supply pipe 140 is provided for each of the seed pipes 112, for example, and the upstream end of each supply pipe 140 is connected to a supply source 141 having a solvent tank (not shown) or the like for storing a cleaning solvent, and the downstream end of each supply pipe 140 is connected to the corresponding seed pipe 112. Accordingly, the supply pipes 140 can supply the cleaning solvent corresponding to the type of the functional liquid flowing through the corresponding type of pipe 112. For example, the supply pipe 140 connected to the seed pipe (hereinafter, sometimes referred to as "R/C pipe") 112 through which the functional liquid of R and C flows can supply the cleaning solvent (hereinafter, sometimes referred to as "R/C cleaning solvent") corresponding to the functional liquid of R and C. The supply pipe 140 connected to the seed pipe (hereinafter, sometimes referred to as "G/M pipe") 112 through which the functional liquids G and M flow can supply the cleaning solvents (hereinafter, sometimes referred to as "G/M cleaning solvents") corresponding to the functional liquids G and M. The supply pipe 140 connected to the seed pipe (hereinafter, sometimes referred to as "B/Y pipe") 112 through which the functional liquids of B and Y flow can supply the cleaning solvent (hereinafter, sometimes referred to as "B/Y cleaning solvent") corresponding to the functional liquids of B and Y.
An on-off valve 142 for opening and closing a flow path in the supply pipe 140 is inserted in each supply pipe 140.
Next, an example of the suction process and the discharge process of the functional liquid in the discharge head 24 will be described. In the following description, for convenience of explanation, it is assumed that the suction process and the discharge process are performed for each carriage 23.
First, under the control of the control unit 80, the cover unit 61 corresponding to the carriage 23 to be suctioned is moved to the above-described suction position by an elevating mechanism (not shown), and the lower end of each of the discharge heads 24 of the carriage 23 to be suctioned is inserted into the cover 61 a. In this state, the on-off valve 124 corresponding to the carriage 23 to be suctioned is set to an open state. At the same time, the on-off valve 114 provided in the R/C pipe 112 is opened. Thereby, the functional liquid in the discharge heads 24 of R and C is discharged to the drain tank 103 via the discharge nozzle 24a, the cover 61a, and the suction pipe 100 by the suction force of the suction pump 125.
Next, the on-off valve of the supply pipe 140 connected to the R/C pipe 112 is opened, and the R/C cleaning solvent is supplied to the R/C pipe 112 by the suction force of the suction pump 125 or the like. Thus, the functional liquid of R and C remaining in the suction pipe 100 can be discharged to the drain tank 103 by the R/C cleaning solvent. Specifically, the R/C functional liquid remaining in the R/C pipe 112, the first header 113, the branch pipe 121, the second header 122, and the main suction pipe 123 can be discharged to the drain tank 103 by the R/C cleaning solvent. After a predetermined time has elapsed from the start of the supply of the R/C cleaning solvent, the on-off valve of the supply pipe 140 connected to the R/C pipe 112 is turned off. As the solvent for R/C cleaning, a solvent in which the solute in the functional liquid of R and C is soluble can be used.
Subsequently, the on-off valve 114 provided in the G/M pipe 112 is opened. Accordingly, the functional liquid in the discharge heads 24 of G and M can be discharged to the drain tank 103 via the discharge nozzle 24a, the cover 61a, and the suction pipe 100 by the suction force of the suction pump 125.
Next, the on-off valve of the supply pipe 140 connected to the G/M pipe 112 is opened, and the G/M cleaning solvent is supplied to the G/M pipe 112 by the suction force of the suction pump 125 or the like. Thus, the functional liquid of G and M remaining in the suction pipe 100 can be discharged to the drain tank 103 by the G/M cleaning solvent. Specifically, the G/M functional liquid remaining in the G/M pipe 112, the first header 113, the branch pipe 121, the second header 122, and the main suction pipe 123 can be discharged to the drain tank 103 by the G/M cleaning solvent. After a predetermined time has elapsed from the start of the supply of the G/M cleaning solvent, the on-off valve of the supply pipe 140 connected to the G/M pipe 112 is turned off. As the G/M cleaning solvent, a solvent in which the solute in the functional liquid of G and M is soluble can be used.
Subsequently, the on-off valve 114 provided in the B/Y pipe 112 is opened. Accordingly, the functional liquid in the discharge heads 24 of B and Y can be discharged to the drain tank 103 through the discharge nozzle 24a, the cover 61a, and the suction pipe 100 by the suction force of the suction pump 125.
Then, the open/close valve of the supply pipe 140 connected to the B/Y pipe 112 is opened, and the B/Y cleaning solvent is supplied to the B/Y pipe 112 by the suction force of the suction pump 125. Thus, the functional liquids G and M remaining in the suction pipe 100 can be discharged to the drain tank 103 by the B/Y cleaning solvent. Specifically, the functional liquid B and Y remaining in the G/M pipe 112, the first header 113, the branch pipe 121, the second header 122, and the main suction pipe 123 can be discharged to the drain tank 103 by the B/Y cleaning solvent. After a predetermined time has elapsed from the start of the supply of the B/Y cleaning solvent, the on-off valve of the supply pipe 140 connected to the B/Y pipe 112 is turned off. As the B/Y cleaning solvent, a solvent soluble in the solute of the functional liquid of B and Y can be used.
In this way, in the suction process and the discharge process of the functional liquid in the discharge head 24 of the present example, the suction of the functional liquid by the suction pipe 100 and the subsequent supply of the cleaning solvent by the supply pipe 140 are performed for each type of the functional liquid.
As described above, the liquid discharge apparatus 70 of the present embodiment is for discharging the functional liquid from the discharge head 24, and the discharge head 24 is formed with the discharge nozzle 24a for discharging the droplet of the functional liquid to the workpiece W. In the present embodiment, the liquid discharge device 70 includes: a suction pipe 100 for sucking the functional liquid in the discharge head 24; and a supply tube 140 for supplying a cleaning solvent, which is a cleaning fluid for flowing out the functional liquid in the suction tube 100, to the suction tube 100. Therefore, according to the present embodiment, the functional liquid can be prevented from remaining in the suction tube 100. In particular, according to the present embodiment, the functional liquid can be prevented from remaining in the suction pipe 100 in the form of particles (droplets). Therefore, it is possible to prevent the functional liquid from being damaged in suction performance and discharge performance due to the solute in the functional liquid being aggregated and attached to the inner wall of the suction pipe 100.
In the present embodiment, the cleaning solvent is supplied to the seed pipe 112 through which the functional liquids of the plurality of colors are mixed. Therefore, the following effects are provided.
That is, there is a possibility that gelation occurs when functional liquids of a plurality of colors are mixed, but there is a case where it is necessary to provide a pipe through which functional liquids of a plurality of colors are mixed, such as the seed pipe 112, for reasons of space and the like. In contrast, in the present embodiment, since the cleaning solvent is supplied to the seed pipe 112, even if gelation occurs in the seed pipe 112, the gelled product can be flowed out together with the functional liquid.
When the gelled product is discharged, a solvent in which the gelled product is soluble may be used as the cleaning solvent.
In the present embodiment, the suction of the functional liquid by the suction pipe 100 and the subsequent supply of the cleaning solvent by the supply pipe 140 are performed for each type (group) of the functional liquid. Specifically, the functional liquid suction by the suction pipe 100 and the subsequent supply of the cleaning solvent by the supply pipe 140 are performed at different timings for the group of R and C functional liquids, the group of G and M functional liquids, and the group of B and Y functional liquids. Therefore, in the present embodiment, gelation due to mixing of different groups of functional liquids with each other can be prevented. For example, the functional liquids of R and C and the functional liquids of G and M can be prevented from being mixed and gelled. Further, even if different types of cleaning solvents are used for each type (group) of functional liquid, in the present embodiment, the cleaning solvents can be prevented from being mixed and gelled.
In addition, in the case where the problem of gelation or the like due to the mixing of different groups of functional liquids with each other or the mixing of different types of cleaning solvents does not occur, the suction of the functional liquid by the suction pipe 100 and the subsequent supply of the cleaning solvent by the supply pipe 140 may be performed simultaneously for all types of functional liquids.
In the present embodiment, the supply tube 140 supplies the suction tube 100 with the cleaning solvent of a type corresponding to the type of the functional liquid sucked out by the suction tube 100. Therefore, the functional liquid in the suction pipe 100 can be more appropriately discharged, and the solute aggregated and adhered to the inner wall of the suction pipe 100 can be dissolved and discharged.
In addition, if the functional liquid in the suction pipe 100 can be discharged with a single kind of cleaning solvent regardless of the kind of the functional liquid sucked by the suction pipe 100, the kind of the cleaning solvent may be single.
In the above example, the suction of the functional liquid by the suction pipe 100 and the supply of the cleaning solvent by the supply pipe 140 are performed successively. I.e. continuously. Instead, the supply of the cleaning solvent from the supply pipe 140 may be performed at regular time (e.g., every lapse of a predetermined time).
Fig. 5 is a diagram illustrating another example of the supply pipe for the cleaning solvent.
In the example of fig. 4, a supply pipe 140 for the cleaning solvent is connected to the seed pipe 112. The supply pipe 200 of the cleaning solvent in fig. 5 is connected to the branch pipe 121.
Although not shown, a supply pipe for the cleaning solvent may be connected to the color separation pipe 111, or a supply pipe for the cleaning solvent may be connected to the main suction pipe 123. The supply pipe of the cleaning solvent may be connected to any of the seed pipe 112, the branch pipe 121, the color pipe 111, and the main suction pipe 123. That is, the supply pipe of the cleaning solvent may be connected to at least one of the seed pipe 112, the branch pipe 121, the color pipe 111, and the main suction pipe 123. In the case where the supply tubes to which the cleaning solvent is connected are provided in each of the plurality of portions of the suction tube 100, the timing of circulating the cleaning solvent may be varied depending on the number of types of functional liquids flowing through the portions to which the cleaning solvent is connected. For example, the frequency of supplying the cleaning solvent to the portion through which the plurality of kinds of functional liquids flow may be set higher than the frequency of supplying the cleaning solvent to the portion through which less kinds of functional liquids flow.
Fig. 6 is a diagram illustrating another example of the supply pipe for the cleaning solvent.
As shown in the figure, the supply pipe 210 of the cleaning solvent has first to third supply pipes 211 to 213. The branch pipe 121 is connected to the downstream ends of the first to third supply pipes 211 to 213, the supply sources 141 of cleaning solvents of different types are connected to the upstream ends of the first to third supply pipes 211 to 213, and the open/close valves 142 are respectively inserted into the first to third supply pipes 211 to 213. With this configuration, the supply pipe 210 can successively (sequentially) supply a plurality of types of cleaning solvents to the branch pipe 121 for each type.
When a plurality of types of functional liquids flow through the branch pipe 121, if a plurality of types of cleaning solvents are sequentially and continuously supplied from the supply pipe 210 for each type, the functional liquids can be more reliably prevented from remaining in the branch pipe 121 and the like regardless of the type of the functional liquid flowing through the branch pipe 121.
In the above example, the cleaning liquid, which is the cleaning solvent, is used as the cleaning fluid, but a cleaning gas such as nitrogen gas or dry air may be used instead of the cleaning liquid.
In addition, as the cleaning fluid, both a cleaning liquid and a cleaning gas may be used. In this case, the purge gas may be supplied after the purge liquid is supplied. For example, when 2 kinds of cleaning liquids are required, there is a possibility that gelation occurs due to a reaction between the cleaning liquids, and the branched pipe 121 and the like are clogged. Therefore, when a plurality of types of cleaning liquids are used, the cleaning liquids can be prevented from remaining in the branch pipes 121 and the like by supplying the cleaning gas after supplying the cleaning liquids, and as a result, the occurrence of the clogging can be prevented.
Fig. 7 is a diagram illustrating another example of the liquid discharge apparatus.
In the example of fig. 7, the suction pipe 100 is provided with an inert gas supply pipe 220 for supplying an inert gas such as nitrogen.
The upstream end of the inert gas supply pipe 220 is connected to a gas supply source 221 for storing inert gas and the like. The downstream end of the inert gas supply pipe 220 is connected to the seed pipe 112 connected to the supply pipe 140 for the cleaning solvent. An on-off valve 222 for opening and closing a flow path in the inert gas supply pipe 220 is inserted in the inert gas supply pipe 220.
By providing the inert gas supply pipe 220 in this manner and supplying the inert gas to the suction pipe 100 during a period from when the functional liquid is sucked into the suction pipe 100 to when the cleaning solvent is supplied into the suction pipe 100 or during a period from when the cleaning solvent is supplied into the suction pipe 100, the following effects are obtained. That is, the air in the suction pipe 100 can be pushed out to reduce the amount of air in the suction pipe 100, and the inside of the suction pipe 100 can be filled with the inert gas, and as a result, the functional liquid remaining in the suction pipe 100 can be prevented from being aggregated by coming into contact with the air (specifically, moisture).
In the case where an inert gas such as nitrogen is used as the cleaning fluid, the supply pipe for the cleaning fluid and the supply pipe for the inert gas can be used in common.
Fig. 8 is a diagram illustrating another example of the liquid discharge apparatus.
In the example of fig. 8, the suction pipe 100 is provided with a vibration mechanism 230 for vibrating the suction pipe 100.
The vibration mechanism 230 may be an ultrasonic vibrator, for example. Specifically, the vibration mechanism 230 is provided outside the seed pipe 112, for example.
The vibration mechanism 230 may always vibrate the suction pipe 100, or may vibrate the suction pipe 100 only after the functional liquid is sucked through the suction pipe 100 until the cleaning solvent is supplied to the suction pipe 100.
By vibrating the suction pipe 100 by the vibration mechanism 230, even if the functional liquid remains in the suction pipe 100, the solute in the droplets of the remaining functional liquid can be prevented from depositing and aggregating.
Fig. 9 is a diagram illustrating another example of the liquid discharge apparatus.
In the example of fig. 9, a plurality of (1 for each color, 6 in total) color tubes 111 merge at the downstream end into the first header 113.
The color pipes 111 are arranged so as not to form substantially horizontal portions. That is, the color separation pipe 111 is disposed so as to become gradually lower toward the downstream side. With this configuration, the functional liquid can be made less likely to remain in the color separation pipe 111.
When the plurality of branched pipes 121 merge into the second header 122 at the downstream end, the branched pipes 121 may be arranged so as not to generate a substantially horizontal portion.
Fig. 10 is a diagram illustrating another example of the liquid discharge apparatus.
In the example of fig. 10, an exchangeable bus bar portion (バス)250 is inserted into the first header 113 disposed substantially horizontally.
Since the first header pipe 113 is disposed substantially horizontally, the functional liquid is likely to remain and the solute is likely to aggregate (crystallize), but in this example, even if the functional liquid aggregates and adheres, the portion where the functional liquid adheres is the confluence portion 250. In the case of the confluence part 250, even if a substance formed by the aggregation of the solute adheres, the first header pipe 113 can be prevented from being clogged by replacing the confluence part 250.
Fig. 11 is a diagram illustrating another example of the liquid discharge apparatus.
In the example of fig. 11, there are provided: a test gas supply pipe 260 for supplying a test gas for testing the clogging of the piping; and a pressure sensor 270 for measuring the pressure of the suction tube 100 filled with an inspection gas such as nitrogen.
The upstream end of the inspection gas supply pipe 260 is connected to a gas supply source 261 for storing inspection gas and the like. The downstream end of the inspection gas supply pipe 260 is connected to the seed pipe 112, and specifically, is provided on the upstream side of the connection portion of the supply pipe 140 in the seed pipe 112. An on-off valve 262 for opening and closing a flow path in the supply pipe 260 is inserted in the inspection gas supply pipe 260.
The pressure sensor 270 is provided to be able to measure the pressure in the seed pipe 112 connected to the inspection gas supply pipe 260. The pressure sensor 270 is provided between the connection portion of the inspection gas supply pipe 260 and the connection portion of the supply pipe 140 in the seed pipe 112.
In this example, the seed pipe 112 is provided with on-off valves 280 and 290 for opening and closing the flow path in the seed pipe 112. The on-off valve 280 is provided upstream of the connection portion of the inspection gas supply pipe 260 in the seed pipe 112, and the on-off valve 290 is provided downstream of the connection portion of the supply pipe 140 in the seed pipe 112.
When the inspection pipe is clogged, the on-off valves 280 and 290 are closed, and thereafter, the inspection gas is supplied from the inspection gas supply pipe 260 at a predetermined flow rate, that is, a predetermined amount of inspection gas for a predetermined time. When the pressure sensor 270 measures the pressure in the seed pipe 112 after a predetermined amount of the inspection gas is supplied from the inspection gas supply pipe 260, it is possible to determine whether or not the seed pipe 112 is clogged based on the measurement result. This determination is made by the control unit 80.
The determination of whether or not the seed tube 112 is clogged is performed, for example, after the functional liquid is sucked into the suction tube 100. This makes it possible to determine whether or not the cleaning solvent needs to be supplied to the suction tube 100. The determination of whether or not the seed pipe 112 is clogged may be performed after the cleaning solvent is supplied to the suction pipe 100. This makes it possible to determine whether or not appropriate cleaning has been performed by supplying the cleaning solvent.
When it is determined that the seed pipe 112 is clogged, a notification unit (not shown) may be used to notify.
If the cleaning gas as the cleaning fluid is the same as the inspection gas, the supply pipe for the cleaning fluid and the supply pipe for the inspection gas can be shared.
In the above example, the supply tube for the cleaning fluid such as the supply tube 140 is connected to the suction tube 100 for sucking and discharging the functional liquid sucked from the inside of the discharge head 24. That is, the above example is an example in which the technique of the present invention is applied to the suction tube 100 that sucks and discharges the functional liquid sucked from the inside of the discharge head 24. The technique of the present invention can also be applied to the irrigation suction tube 131 that sucks and discharges the functional liquid discharged from the discharge head 24 to the irrigation unit 50.
Further, there are cases where: the functional liquid discharge device is provided with another flushing unit that receives the functional liquid discharged from the discharge head 24 before drawing for maintenance and the like, and a measurement unit that receives the functional liquid discharged from the discharge head 24 for measuring the weight of the functional liquid. In this case, the technique of the present invention can be applied to a suction tube for sucking the functional liquid discharged to the other of the irrigation unit and the measurement unit.
In the above example, the functional liquid discharged to the flushing unit 50, the measurement unit, and the like is sucked and discharged by the suction force of the suction pump 132 and the like via the suction tube. Instead, the functional liquid discharged to the flushing unit 50, the measuring unit, or the like may be discharged by gravity acting on the functional liquid via a drain pipe connected to the unit. In this case, the technique of the present invention can be applied to the drain pipe.
While various exemplary embodiments have been described above, the present invention is not limited to the above exemplary embodiments, and various additions, omissions, substitutions, and changes may be made. Moreover, elements in different embodiments may be combined to form other embodiments.

Claims (16)

1. A liquid discharge apparatus for discharging a functional liquid from a discharge head having a discharge hole formed therein for discharging droplets of the functional liquid toward a workpiece, the liquid discharge apparatus comprising:
a liquid discharge pipe for sucking the functional liquid in the discharge head or connecting to a liquid receiving portion that receives the functional liquid discharged from the discharge head; and
and a supply pipe for supplying a cleaning fluid for discharging the functional liquid in the drain pipe to the drain pipe.
2. The liquid discharge apparatus according to claim 1, wherein:
the following can be performed for each kind of functional liquid: discharging the functional liquid through the drain pipe; and supplying the cleaning fluid from the supply pipe after discharging the functional liquid.
3. The liquid discharge apparatus according to claim 1 or 2, wherein:
the supply pipe may supply a plurality of cleaning solvents as the cleaning fluid to the drain pipe.
4. The liquid discharge apparatus according to claim 3, wherein:
the supply pipe may supply the cleaning solvent of a type corresponding to a type of the functional liquid discharged from the drain pipe to the drain pipe.
5. The liquid discharge apparatus according to claim 3, wherein:
the supply pipe may sequentially supply a plurality of types of the cleaning solvents to the drain pipe for each type.
6. The liquid discharge apparatus according to claim 1, wherein:
the supply pipe can supply both a cleaning solvent and a cleaning gas as the cleaning fluid.
7. The liquid discharge apparatus according to claim 6, wherein:
the supply pipe may supply the cleaning gas after supplying the cleaning solvent.
8. The liquid discharge apparatus according to claim 1, wherein:
the liquid discharge pipe is provided with an inert gas supply pipe for supplying inert gas to the liquid discharge pipe.
9. The liquid discharge apparatus according to claim 1, wherein:
and a vibration mechanism for vibrating the drain pipe.
10. The liquid discharge apparatus according to claim 1, wherein:
a replaceable bus bar portion is inserted in a substantially horizontally disposed portion of the drain pipe.
11. The liquid discharge apparatus according to claim 1, wherein:
the liquid discharge pipe is provided with: an inspection gas supply pipe for supplying an inspection gas for inspecting clogging of the piping; and a pressure sensor for measuring a pressure of the drain filled with the inspection gas.
12. The liquid discharge apparatus according to claim 1, wherein:
the supply pipe is capable of supplying the cleaning fluid to a portion of the drain pipe through which the plurality of functional liquids are mixed.
13. A liquid discharge method for discharging a functional liquid from a discharge head in which a discharge hole for discharging a droplet of the functional liquid to a workpiece is formed, the liquid discharge method comprising:
a discharging step of discharging the functional liquid via a liquid discharge pipe for sucking the functional liquid in the discharge head or connecting to a liquid receiving portion that receives the functional liquid discharged from the discharge head; and
and an outflow step of supplying a cleaning fluid to the drain pipe via a supply pipe to cause the functional liquid in the drain pipe to flow out.
14. The liquid discharge method according to claim 13, wherein:
the discharging step and the flowing-out step are performed for each kind of functional liquid.
15. The liquid discharging method according to claim 13 or 14, wherein:
the supply pipe can supply a plurality of cleaning solvents as the cleaning fluid to the drain pipe,
in the flowing out step, the cleaning solvent of a type corresponding to a type of the functional liquid discharged from the drain pipe is supplied to the drain pipe.
16. The liquid discharging method according to claim 13 or 14, wherein:
the supply pipe can supply a plurality of cleaning solvents as the cleaning fluid to the drain pipe,
in the flowing out step, a plurality of types of the cleaning solvents are sequentially supplied to the drain pipe for each type.
CN202110625856.8A 2020-06-12 2021-06-04 Liquid discharge device and liquid discharge method Pending CN113808969A (en)

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JP2020102480A JP2021194590A (en) 2020-06-12 2020-06-12 Liquid discharging device and liquid discharging method
JP2020-102480 2020-06-12

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