CN113783098B - Electrode loss compensable structure of laser discharge cavity - Google Patents
Electrode loss compensable structure of laser discharge cavity Download PDFInfo
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- CN113783098B CN113783098B CN202110837190.2A CN202110837190A CN113783098B CN 113783098 B CN113783098 B CN 113783098B CN 202110837190 A CN202110837190 A CN 202110837190A CN 113783098 B CN113783098 B CN 113783098B
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- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
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Abstract
The invention provides a structure capable of compensating electrode loss of a laser discharge cavity, which comprises: a discharge cavity body; a first electrode and a second electrode are oppositely arranged in the cavity; the polarity of the first electrode is opposite to that of the second electrode; on a cross section perpendicular to the length direction of the first electrode, the first electrode comprises an annular base band, and a plurality of electrode strips are arranged on the annular base band at intervals in parallel; the annular base band can be rotatably arranged along with the electrode strips, and the second electrode can be selectively matched with one of the electrode strips to generate high-voltage discharge. The invention has simple structure, when the used electrode strip on the first electrode is worn and the height is reduced and the distance between the second electrode and the electrode strip is increased, other new electrode strips can be opposite to the second electrode by rotating the annular base band, thereby realizing the compensation and the recovery of the distance between the first electrode and the second electrode, having simple and rapid operation and not influencing the normal use of the laser.
Description
Technical Field
The invention relates to the technical field of lasers, in particular to a structure capable of compensating electrode loss of a discharge cavity of an excimer laser.
Background
At present, the electrode in the excimer laser discharge cavity can constantly produce the loss at the discharge in-process, wherein with the cathodic loss especially serious to lead to the regional surface of cathodic discharge to descend gradually because of the loss height, and then make between negative pole and the positive pole apart from the grow gradually, thereby influence the discharge performance, when the cathodic anode interval increases to a certain extent, just must change the electrode, wherein operate complicacy, inefficiency, influence excimer laser's continuous use.
In order to keep the distance between the cathode and the anode constant, a compensation method of lifting and lowering the electrodes in the height direction of the electrodes to reduce the distance between the cathode and the anode is adopted in the prior art. The electrode lifting adjusting mode has the following defects: the loss of the electrode surface is uneven everywhere due to uneven materials, deviation of assembly positions, incomplete consistency of electrical performance and the like, the loss can only be compensated evenly in a lifting adjustment mode, uneven conditions can occur locally, and especially the loss of the edge part is larger than that of the middle position.
Disclosure of Invention
The invention aims to provide a structure capable of compensating electrode loss of a laser discharge cavity, so as to solve at least one technical problem in the prior art.
In order to solve the above technical problem, the present invention provides a structure for compensating loss of an electrode in a discharge cavity of a laser, including: a discharge cavity body;
a first electrode and a second electrode are oppositely arranged in the cavity; the polarity of the first electrode is opposite to that of the second electrode;
on a cross section perpendicular to the length direction of the first electrode, the first electrode comprises an annular base band, and a plurality of electrode strips are arranged on the annular base band at intervals in parallel; the annular base band can be rotatably arranged along with the electrode strips, and the second electrode can be selectively matched with one of the electrode strips to generate high-voltage discharge.
The invention has simple structure, when the used electrode strip on the first electrode is worn and the height is reduced and the distance between the second electrode and the electrode strip is increased, other new electrode strips can be opposite to the second electrode by rotating the annular base band, thereby realizing the compensation and the recovery of the distance between the first electrode and the second electrode, having simple and rapid operation and not influencing the normal use of the laser.
Further, the first electrode is an anode or a cathode, and the second electrode is a cathode or an anode.
When the cathode loss is not obvious, preferably, the first electrode is an anode, and the plurality of electrode bars are arranged at the same height.
In the present application, the height of the electrode strips is the distance between the working top surface of the electrode strips and the surface of the endless base band, i.e. the projection height of the electrode strips from the surface of the endless base band.
More preferably, the heights of the plurality of electrode bars are sequentially increased in the rotation direction of the ring base band.
The height of the electrode strips is increased in sequence, so that not only can the loss of the electrode strips be compensated, but also the loss of the opposite electrode can be compensated. For example, when the first electrode is an anode, the height loss of the first electrode can be compensated by rotating and replacing the electrode strips, and the height loss of the second electrode as a cathode can be compensated.
Further, still include support and actuating mechanism, the support sets up in the cavity, rotationally be provided with the pivot on the support, the annular baseband suit is in the pivot, actuating mechanism is used for driving the pivot rotates, and then realizes the rotation of annular baseband and the replacement of electrode strip.
Furthermore, tooth structures are uniformly distributed in the circumferential direction of the rotating shaft, and a clamping groove or a clamping hole which is clamped with the tooth structures is formed in the annular base band.
The joint cooperation in tooth structure and draw-in groove or card hole can effectively avoid the pivot to rotate in-process annular baseband and skid, and then can't realize the accurate location of electrode strip.
Furthermore, a contact seat is arranged on the support, and the contact seat is arranged on one side, close to the second electrode, of the rotating shaft; the annular base band is sleeved on the contact seat and the rotating shaft at the same time and is integrally in a wedge shape protruding towards the tip end of the second electrode.
Further, in the cross-section of conflict seat of perpendicular to and first electrode length direction, the conflict seat is being close to second electrode one end is provided with the arc surface, the radius of arc surface is less than the pivot radius, and then forms the little wedge cross-section of the big one end of one end after the annular baseband suit is gone up between them.
Furthermore, the contact seat is slidably disposed on the support in a direction close to or away from the second electrode, and an elastic member is disposed between the support and the contact seat and tends to force the contact seat to approach the second electrode, thereby tensioning the annular base band.
Furthermore, a left ceramic flow deflector and a right ceramic flow deflector are respectively arranged on the bracket and on the left side and the right side of the first electrode in the length direction; a strip-shaped gap is reserved between the left ceramic flow deflector and the right ceramic flow deflector, and an electrode strip which is ready to work or in a working state is inserted into the strip-shaped gap and is arranged opposite to the second electrode.
The left ceramic flow deflector and the right ceramic flow deflector are oppositely arranged left and right, only one strip-shaped gap into which the electrode strip is inserted is reserved, and the discharge phenomenon of the second electrode and other electrode strips can be effectively avoided.
Further, the device also comprises a sliding seat which is movably arranged on the bracket in a direction close to or far away from the second electrode; the contact seat, the rotating shaft and the annular base band are arranged on the sliding seat; when the sliding seat is far away from the second electrode, the electrode strip ready to work or in a working state exits the strip-shaped gap, so that the rotation of the annular base band and the replacement of the electrode strip are facilitated; and after the electrode strip is replaced, the sliding seat moves towards the direction of the second electrode, and the electrode strip ready to enter a working state is inserted into the strip-shaped gap.
Preferably, the support is provided with a guide limiting structure in the form of a sliding rail, a sliding groove and the like, and the guide limiting structure is used for guiding and limiting the sliding seat.
Furthermore, still including being used for driving the elevating system that the slide removed, the elevating system form is more, can be the electronic telescopic machanism of setting at pivot axial both ends, can also be the manual spanner that stretches out the cavity body outside.
Furthermore, the driving mechanism is a stepping motor, the stepping motor is connected with the rotating shaft, and the annular base band and the electrode strip are driven to rotate through the rotating shaft.
Preferably, the driving mechanism comprises a bevel gear pair and a rotating mechanism, and the bevel gear pair comprises a first bevel gear and a second bevel gear which are vertically arranged; the first bevel gear is sleeved on the rotating shaft, and the rotating mechanism is used for driving the second bevel gear to rotate so as to drive the rotating shaft to rotate through the first bevel gear. Wherein, the rotating mechanism can be a motor, and can also be a rotating handle and the like.
Further, actuating mechanism includes gear and rack of mutually supporting, the gear suit is in the pivot, the rack is in the perpendicular to but set up with translation in the direction of pivot on the cavity, thereby through the pull the rack drives through the gear the pivot rotates.
Further, the device also comprises an actuating mechanism for driving the rack to translate; the executing mechanism has many forms and can be an electric telescopic rod piece; or a manual connecting rod, one end of the connecting rod is connected with the rack, and the other end of the connecting rod extends out of the cavity.
Preferably, the actuating mechanism comprises a rotating sleeve which is rotatably arranged on the cavity, and an internal thread hole is formed in one end of the rack of the rotating sleeve; one end of the rack is provided with a threaded rod matched with the internal threaded hole, and the rack can be driven to translate by rotating the rotating sleeve. Wherein, preferably, be provided with the limit structure of restriction rack pivoted in the cavity, spacing spout etc. for example.
Preferably, one end of the rotating sleeve outside the cavity is provided with an end adapted to a wrench or screwdriver.
Wherein more preferably, the electrode bars are equally spaced, and the replacement of one electrode bar can be accomplished by rotating the rotating sleeve or the second bevel gear by a set angle.
Further, the left ceramic guide vane and/or the right ceramic guide vane can be arranged on the bracket in a manner of moving left and right.
At least one of the two flow deflectors can be arranged in a translation mode, so that the width of the strip-shaped gap is adjustable, and further, when the annular base band is rotated, a rotating space is provided for the electrode strips, and the electrode strips which are out of working states and the electrode strips which are ready to enter the working states are prevented from interfering with the left ceramic flow deflector or the right ceramic flow deflector. When the electrode strips are replaced in place, the movable ceramic flow deflector moves towards the middle, the width of the strip-shaped gap is reduced, and even the electrode strips between the two are clamped.
Furthermore, two sides of the first electrode and the second electrode in the length direction are respectively provided with a reflux sheet.
Further, the second electrode is identical in structure to the first electrode. I.e. the second electrode is also provided with a rotatable ring-shaped base band and electrode strips, so that both electrodes can be self-compensated.
By adopting the technical scheme, the invention has the following beneficial effects:
the electrode loss compensation mode of the replacement mode is adopted, a brand new electrode strip is adopted to completely replace the electrode strip with loss, the surface of the electrode strip in the working state after replacement is in a brand new state, and the discharge performance of the whole device can return to the latest initial state; the cost is lower, the method is simple and the replacement is rapid, and the continuous use of the laser is not influenced.
And the heights of the electrode strips are gradually increased, so that the loss of the anode and the cathode can be simultaneously compensated, and the distance between the cathode and the anode is kept within a basically set range.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of a first view angle of a laser discharge cavity electrode loss compensable structure provided in embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of a second view angle of the laser discharge cavity electrode loss compensable structure provided in embodiment 1 of the present invention;
FIG. 3 is a partial schematic structural view of the first electrode shown in FIG. 1;
FIG. 4 is a perspective view of the stand;
FIG. 5 is a perspective view of the holder and the first electrode;
FIG. 6 is a schematic diagram of a structure in which electrode bars are raised one by one;
fig. 7 is a partial perspective view of the first electrode and the second electrode provided in example 1;
fig. 8 is a schematic structural diagram of a laser discharge cavity electrode loss compensatable structure provided in embodiment 2 of the present invention.
Reference numerals are as follows:
10-a cavity; 11-a reflux sheet; 20-a first electrode; 21-a ring baseband; 22-electrode strips; 22 a-active state electrode strip; 22 b-ready state electrode strips; 22 c-waste electrode strips; 30-a second electrode; 31-a cathode base; 32-a pre-ionization structure; 40-a scaffold; 41-a contact seat; 42-a rotating shaft; 42 a-tooth structure; 43-a slide; 44-a chute; 45-mounting holes; 50-a gear; 51-a rack; 60-ceramic flow deflectors; 61-a left ceramic guide vane; 62-right ceramic guide vane; y-rotation direction; 70-lifting mechanism.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The present invention will be further explained with reference to specific embodiments.
Example 1
As shown in fig. 1-7, the present embodiment provides a structure for compensating electrode loss of a laser discharge cavity, which includes a cavity 10 of the discharge cavity; a first electrode 20 and a second electrode 30 are oppositely arranged in the cavity 10; the polarities of the first electrode 20 and the second electrode 30 are opposite; specifically, in the present embodiment, the second electrode 30 is a cathode, and the first electrode 20 is an anode. Wherein, the second electrode 30 is fixed on the sidewall of the chamber 10 by the cathode base 31. A pre-ionization structure 32 is disposed adjacent the second electrode 30. The return pieces 11 are provided on both sides of the first electrode 20 and the second electrode 30 in the longitudinal direction, respectively.
As shown in fig. 3, the first electrode 20 includes an annular base band 21, the annular base band 21 is generally sleeve-shaped, and the annular base band 21 is annular in a cross section perpendicular to the length direction of the first electrode 20, so as to be rotatably disposed.
A plurality of electrode strips 22 are arranged on the annular base band 21 at intervals in parallel; the electrode bars 22 are parallel to the length direction of the first and second electrodes 20 and 30.
The ring-shaped base band 21 can be rotatably arranged with the electrode strips 22, and the second electrode 30 can selectively cooperate with one of the electrode strips 22 to generate a high-voltage discharge.
According to different states, the electrode strips 22 can be divided into working-state electrode strips 22a, preparation-state electrode strips 22b and waste electrode strips 22c; when the electrode strip 22a of the first electrode 20 in the working state is worn and the height is reduced and the distance between the second electrode 30 and the electrode strip 22 is increased, the ring-shaped base band 21 can be rotated clockwise to make the electrode strip 22b in the preparation state on the left side rotate to the working position to become the electrode strip 22a in the working state and be opposite to the second electrode 30, so that the compensation and the recovery of the distance between the first electrode 20 and the second electrode 30 are realized, the operation is simple and quick, and the normal use of the laser is not influenced. And the electrode bar 22a is rotated rightwards out of the working position to become the waste electrode bar 22c in the original working state.
In the above embodiment, when one of the anode and the cathode is not significantly worn (for example, the cathode), the first electrode 20 may be set to be the electrode with the faster wear (for example, the anode), and in this case, the plurality of electrode bars 22 on the first electrode 20 may be set to have the same height. I.e. only the losses of itself need to be compensated.
In the present application, the height of the electrode bars 22 is the distance between the working top surface of the electrode bars 22 and the surface of the ring base tape 21, i.e., the protruding height of the electrode bars 22 from the surface of the ring base tape 21.
On the basis of the above embodiment, when the anode or the cathode is damaged in operation as shown in fig. 6, it is preferable that the heights of the plurality of electrode bars 22 are sequentially increased in the rotation direction Y of the endless base belt 21, and as shown in the figure, the heights h3 > h2 > h1 of the three electrode bars 22. The height of the electrode bars 22 increases in turn, and not only compensates for the losses of the electrodes themselves, but also the losses of the opposite electrode. For example, when the first electrode 20 is an anode in this embodiment, the electrode strip 22 is rotated and replaced to compensate for the height loss of the first electrode 20, and also compensate for the height loss of the second electrode 30, which is a cathode, and compensate for the increased distance difference between the two electrodes, thereby keeping the distance between the anode and the cathode substantially constant.
Referring to fig. 3, the present embodiment further includes a support 40 and a driving mechanism, the support 40 is disposed in the cavity 10, a rotating shaft 42 is rotatably disposed on the support 40, the annular base band 21 is sleeved on the rotating shaft 42, and the driving mechanism is configured to drive the rotating shaft 42 to rotate, so as to rotate the annular base band 21 and replace the electrode strips 22.
More preferably, the tooth structures 42a are uniformly distributed on the circumferential direction of the rotating shaft 42, and as shown in fig. 5, the ring-shaped base band 21 is provided with locking holes 21a for locking with the tooth structures 42 a.
The tooth structure 42a is matched with the clamping hole 21a in a clamping manner, so that slipping of the annular base band 21 in the rotating process of the rotating shaft 42 can be effectively avoided, and accurate positioning of the electrode strip 22 cannot be realized.
Further, the support 40 is provided with an abutting seat 41, and the abutting seat 41 is arranged on one side of the rotating shaft 42 close to the second electrode 30; the annular base band 21 is simultaneously sleeved on the abutting seat 41 and the rotating shaft 42, and the whole body is in a wedge shape protruding towards the tip of the second electrode 30.
In this embodiment, in a cross section perpendicular to the length direction of the interference seat 41 and the first electrode 20, one end of the interference seat 41 close to the second electrode 30 is provided with an arc surface, and a radius of the arc surface is smaller than a radius of the rotating shaft 42, so that a wedge-shaped cross section with a large end and a small end is formed after the annular base band 21 is sleeved on the two. The wedge shape helps the working electrode strips 22a to be as close to the second electrode 30 as possible, and the non-working electrode strips 22b to be as far from the second electrode 30 as possible, so that the discharge efficiency is improved, the adverse effect on the non-working electrode strips 22b is reduced, and unnecessary electrode loss is avoided.
The present embodiment further includes a ceramic baffle 60, specifically, a left ceramic baffle 61 and a right ceramic baffle 62 are respectively disposed on the bracket 40 and on the left and right sides of the first electrode 20 in the length direction; a strip-shaped gap is left between the left ceramic flow deflector 61 and the right ceramic flow deflector 62, and the electrode strip 22a is inserted into the strip-shaped gap in the working state and is arranged opposite to the second electrode 30.
The left ceramic flow deflector 61 and the right ceramic flow deflector 62 are arranged in a left-right opposite manner, only a strip-shaped gap into which the electrode strip 22 is inserted is reserved, and the discharge phenomenon between the second electrode 30 and other non-working electrode strips 22b can be effectively avoided.
In order to realize the smooth rotation of the ring-shaped base band 21 and the electrode bars 22 without interfering with the ceramic baffles 60, as shown in fig. 2, 5 and 7, the present embodiment further includes a slide 43, the slide 43 being movably disposed on the support 40 in a direction approaching or separating from the second electrode 30; the abutting seat 41, the rotating shaft 42 and the annular base band 21 are arranged on the sliding seat 43; when the slide carriage 43 is far away from the second electrode 30, the electrode strip 22a in the original working state exits the strip-shaped gap, which facilitates the rotation of the annular base band 21 and the replacement of the electrode strip 22, and after the replacement of the electrode strip 22 is completed, the slide carriage 43 moves towards the second electrode 30, and the electrode strip 22a in the new working state is inserted into the strip-shaped gap.
Referring to fig. 4 and 5, the bracket 40 is provided with a sliding groove 44 as a guiding and limiting structure for guiding and limiting the sliding base 43.
More preferably, the present embodiment further includes a lifting mechanism 70 for driving the sliding seat 43 to move, and the lifting mechanism 70 may be in many forms, and may be an electric telescopic mechanism disposed at two axial ends of the rotating shaft 42, or a manual wrench extending out of the cavity 10. An electric telescopic mechanism or a manual wrench can push the sliding base 43 to move along the sliding slot 44.
More preferably, in the above embodiment, the abutting seat 41 is slidably disposed on the sliding seat 43 in a direction approaching or moving away from the second electrode 30, and a resilient member (e.g., a pressure spring, not shown) is disposed between the sliding seat 43 and the abutting seat 41, and the resilient member tends to force the abutting seat 41 to approach the second electrode 30, thereby tensioning the annular base band 21.
The driving mechanism in this embodiment includes a gear 50 and a rack 51, which are engaged with each other, the gear 50 is sleeved on the rotating shaft 42, and when the sliding seat 43 carries the first electrode 20 to move towards the second electrode 30, the gear 50 is separated from the rack 51. When the slide 43 carries the first electrode 20 away from the second electrode 30, the gear 50 gradually approaches and finally engages with the rack 51.
A rack 51 is translatably disposed on the chamber 10 in a direction perpendicular to the axis of rotation 42, and the axis of rotation 42 is rotated by drawing the rack 51 through the gear 50.
The present embodiment further comprises an actuator for driving the rack 51 in translation; the executing mechanism has many forms and can be an electric telescopic rod piece; or a manual connecting rod, one end of which is connected with the rack 51 and the other end of which extends out of the cavity 10.
In this embodiment, the actuator comprises a rotating sleeve disposed on the chamber 10, the rotating sleeve being rotatably disposed on the mounting hole 45 of the bracket 40 in the circumferential direction and being fixedly disposed relative to the bracket 40 or the chamber 10 in the axial direction. Wherein, be provided with the limit structure of restriction rack 51 pivoted in the cavity 10, for example spacing spout etc. rack 51 is relative fixed setting for support 40 or cavity 10 in the circumference of rotating sleeve, and relative translation setting for support 40 or cavity 10 in the axial of rotating sleeve. The rotary sleeve is provided with an internal threaded hole at one end of the rack 51; one end of the rack 51 is provided with a threaded rod matched with the internal threaded hole, a threaded transmission structure is further formed between the rack 51 and the internal threaded hole, and the rack 51 can be driven to translate by rotating the rotating sleeve. Preferably, one end of the rotating sleeve outside the cavity 10 is provided with a clamping head adapted to a wrench, or is provided with a straight groove or a cross groove adapted to a screwdriver, etc.
Wherein more preferably the electrode bars 22 are equally spaced and the replacement of one electrode bar 22 is accomplished by rotating a set angle of the rotating sleeve or second bevel gear 50.
The electrode loss compensation mode of the replacement mode adopted by the invention adopts a brand-new electrode strip 22 to completely replace the electrode strip 22 with loss, the surface of the electrode strip 22 in the working state after replacement is in a brand-new state, and the discharge performance of the whole device can return to the latest initial state; the cost is lower, the method is simple and the replacement is rapid, and the continuous use of the laser is not influenced.
And, the height of the plurality of electrode bars 22 is designed to be gradually increased, so that the loss of the anode and the cathode can be compensated at the same time, and the distance between the cathode and the anode is kept within a basically set range.
Example 2
The structure of the laser discharge cavity capable of compensating for electrode loss provided by this embodiment is basically the same as the structure of embodiment 1, except that:
as shown in fig. 8, left and right ceramic baffles 61 and 62 are provided on the bracket 40 to be movable left and right. The two flow deflectors can be arranged in a translation mode, the width of a strip-shaped gap between the two flow deflectors is adjustable, and then when the annular base band 21 is rotated, a rotating space is provided for the electrode strips 22, and the electrode strips 22 which are out of working states and the electrode strips 22 which are ready to enter the working states are prevented from interfering with the left ceramic flow deflector 61 or the right ceramic flow deflector 62. When the electrode strips 22 are replaced in place, the movable ceramic flow deflector moves towards the middle, the width of the strip-shaped gap is reduced, and even the electrode strips 22 between the two are clamped.
And the driving mechanism of the rotating shaft 42 can also be a stepping motor, and the stepping motor is connected with the rotating shaft 42 and drives the annular base band 21 and the electrode strip 22 to rotate through the rotating shaft 42. Or the driving mechanism comprises a bevel gear pair and a rotating mechanism, and the bevel gear pair comprises a first bevel gear and a second bevel gear which are vertically arranged; the first bevel gear is sleeved on the rotating shaft 42, and the rotating mechanism is used for driving the second bevel gear to rotate, so that the rotating shaft 42 is driven to rotate through the first bevel gear. Wherein, the rotating mechanism can be a motor or a rotating handle.
Compared with the embodiment 1, the structure of the embodiment is more compact, the manufacturing cost is low, and the operation is more stable.
Example 3
The structure provided by this embodiment and capable of compensating for electrode loss of a laser discharge cavity is basically the same as that of embodiment 1 or embodiment 2, except that:
the second electrode 30 has the same structure as the first electrode 20. The second electrode 30 and the first electrode 20 are disposed up and down symmetrically, that is, the second electrode 30 and the first electrode 20 are provided with the rotatable ring-shaped base band 21, the electrode strips 22, the corresponding driving mechanism and the like, so that both electrodes can realize self-compensation.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and these modifications or substitutions do not depart from the spirit of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A laser discharge cavity electrode loss compensable structure, comprising: a discharge cavity (10);
a first electrode (20) and a second electrode (30) are oppositely arranged in the cavity (10); the first electrode (20) and the second electrode (30) have opposite polarities;
on a cross section perpendicular to the length direction of the first electrode (20), the first electrode (20) comprises an annular base band (21), and a plurality of electrode strips (21) are arranged on the annular base band (21) at intervals in parallel; the annular base band (21) can be rotatably arranged along with the electrode strips (21), and then the second electrode (30) can be selectively matched with one of the electrode strips (21) to generate high-voltage discharge;
the electrode strip replacing device is characterized by further comprising a support (40) and a driving mechanism, wherein the support (40) is arranged in the cavity (10), a rotating shaft (42) is rotatably arranged on the support (40), the annular base band (21) is sleeved on the rotating shaft (42), and the driving mechanism is used for driving the rotating shaft (42) to rotate so as to further realize the rotation of the annular base band (21) and the replacement of the electrode strip (21);
the support (40) is provided with a contact seat (41), and the contact seat (41) is arranged on one side, close to the second electrode (30), of the rotating shaft (42); the annular base band (21) is sleeved on the contact seat (41) and the rotating shaft (42) at the same time, and the whole body is in a wedge shape protruding towards the tip of the second electrode (30).
2. The laser discharge cavity electrode loss compensable structure according to claim 1, wherein a plurality of said electrode bars (21) are disposed at equal heights or sequentially increasing in height in a rotation direction of said ring-shaped base band (21).
3. The laser discharge cavity electrode loss compensable structure according to claim 2, wherein tooth structures (42 a) are uniformly distributed on the circumference of the rotating shaft (42), and a clamping groove or a clamping hole clamped with the tooth structures (42 a) is formed in the annular base band (21).
4. The structure of claim 1, wherein, in a cross section perpendicular to the length direction of the interference seat (41) and the first electrode (20), the interference seat (41) is provided with a circular arc surface at one end close to the second electrode (30), the radius of the circular arc surface is smaller than that of the rotating shaft (42), and then a wedge-shaped cross section with a larger end and a smaller end is formed after the annular base band (21) is sleeved on the two.
5. The structure of claim 1, wherein the contact seat (41) is slidably disposed on the support (40) in a direction toward or away from the second electrode (30), and a resilient member is disposed between the support (40) and the contact seat (41), the resilient member tending to force the contact seat (41) toward the second electrode (30) and thereby tighten the ring-shaped base band (21).
6. The structure of claim 1, wherein the bracket (40) and the left and right sides of the first electrode (20) in the length direction are respectively provided with a left ceramic flow deflector (61) and a right ceramic flow deflector (62); a strip-shaped gap is reserved between the left ceramic flow deflector (61) and the right ceramic flow deflector (62), and an electrode strip (21) which is ready to work or in a working state is inserted into the strip-shaped gap and is arranged opposite to the second electrode (30).
7. The laser discharge cavity electrode loss compensable structure according to claim 6, further comprising a slider movably disposed on said support (40) in a direction approaching or separating from said second electrode (30); the abutting seat (41), the rotating shaft (42) and the annular base band (21) are arranged on the sliding seat; when the sliding seat is far away from the second electrode (30), the electrode strip (21) which is ready to work or in a working state exits the strip-shaped gap, so that the rotation of the annular base belt (21) and the replacement of the electrode strip (21) are facilitated; when the electrode strip (21) is replaced, the sliding seat moves towards the direction of the second electrode (30), and the electrode strip (21) which is ready to enter a working state is inserted into the strip-shaped gap.
8. The laser discharge cavity electrode loss compensable structure of claim 7, wherein a guide limit structure is arranged on the bracket (40) and used for guiding and limiting the sliding seat.
9. The laser discharge cavity electrode loss compensable structure according to claim 6, wherein said left ceramic deflector (61) and/or right ceramic deflector (62) are disposed on said support (40) movable from left to right.
10. The laser discharge cavity electrode loss compensable structure of claim 1, wherein said second electrode (30) is structurally identical to said first electrode (20).
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Citations (4)
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|---|---|---|---|---|
| JP2000244039A (en) * | 1998-12-25 | 2000-09-08 | Komatsu Ltd | Method for replacing discharge electrode in laser chamber and discharge electrode replacement device for laser system |
| US7068697B1 (en) * | 2005-09-28 | 2006-06-27 | Cymer, Inc. | Adjustable flow guide to accommodate electrode erosion in a gas discharge laser |
| CN102761047A (en) * | 2012-07-30 | 2012-10-31 | 中国科学院光电研究院 | Electrode mechanism of discharge cavity of gas laser |
| CN112739837A (en) * | 2018-09-20 | 2021-04-30 | 西默有限公司 | Long-life laser cavity electrode and laser with same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7471708B2 (en) * | 2005-03-31 | 2008-12-30 | Cymer, Inc. | Gas discharge laser output light beam parameter control |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000244039A (en) * | 1998-12-25 | 2000-09-08 | Komatsu Ltd | Method for replacing discharge electrode in laser chamber and discharge electrode replacement device for laser system |
| US7068697B1 (en) * | 2005-09-28 | 2006-06-27 | Cymer, Inc. | Adjustable flow guide to accommodate electrode erosion in a gas discharge laser |
| CN102761047A (en) * | 2012-07-30 | 2012-10-31 | 中国科学院光电研究院 | Electrode mechanism of discharge cavity of gas laser |
| CN112739837A (en) * | 2018-09-20 | 2021-04-30 | 西默有限公司 | Long-life laser cavity electrode and laser with same |
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