CN113777348B - Moving electrode type electrochemical inertial sensor - Google Patents

Moving electrode type electrochemical inertial sensor Download PDF

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CN113777348B
CN113777348B CN202111067864.1A CN202111067864A CN113777348B CN 113777348 B CN113777348 B CN 113777348B CN 202111067864 A CN202111067864 A CN 202111067864A CN 113777348 B CN113777348 B CN 113777348B
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elastic
moving
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electrochemical transducer
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CN113777348A (en
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杨大鹏
王小欢
陈恒
孙郡泽
鞠宸浩
田宝凤
郑凡
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Jilin University
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    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values

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Abstract

The invention relates to a moving-electrode type electrochemical inertial sensor, which comprises a moving-electrode electrochemical transducer, a signal processing circuit, electrolyte and a sealed cavity, wherein the moving-electrode electrochemical transducer is connected with the signal processing circuit; the moving-electrode electrochemical transducer comprises a pair of elastic electrodes and a pair of inelastic electrodes; the moving electrode electrochemical transducer is arranged in the sealed cavity; the moving electrode electrochemical transducer penetrates through the sealed cavity and is connected with the signal processing circuit; the electrolyte is filled in the sealed cavity. The elastic electrode generates motion response under the action of external acceleration; under the action response, electrolyte flows in the sealed cavity, and the moving-electrode electrochemical transducer is used for detecting a current change signal generated when the electrolyte flows through the moving-electrode electrochemical transducer; the signal processing circuit is used for converting the current change signal output by the moving electrode electrochemical transducer into a voltage change signal and calculating the external acceleration or speed according to the voltage change signal. The invention avoids the use of rubber membrane, picks up external vibration through the elastic electrode, and improves the measurement precision.

Description

Moving electrode type electrochemical inertial sensor
Technical Field
The invention relates to the field of sensors, in particular to a moving electrode type electrochemical inertial sensor.
Background
The high-sensitivity static or low-frequency acceleration measurement has important practical significance and application value in the fields of seismology, geophysical exploration, inertial navigation and the like, for example, the change characteristics of material migration, crust movement and the like in the earth are obtained through gravity monitoring, and an important basis is provided for geodetic survey, an intra-terrestrial dynamics mechanism and environment and disaster monitoring; and acquiring the physical information of the seismic source through long-period seismic observation, and providing data support for the prediction and forecast of the earthquake.
The electrochemical sensor has the advantages of small volume, high sensitivity, large dynamic range, wide frequency band, good low-frequency performance, low cost, batch production and the like, is gradually applied to the fields of seismology, structural monitoring, navigation and the like, and is used for the electrochemical sensor of seismic exploration, including MTSS geophones developed and produced by Russian R-sensors companies, CME series long-period seismometer products for long-period natural seismic monitoring and the like.
The existing electrochemical vibration sensor adopts rubber membranes to seal two ends of a cavity, the elastic force of the rubber membranes is used as a spring of a vibration pickup unit, electrolyte is used as a mass body, the motion resistance of the electrolyte is used as system damping to form a second-order elastic system of mass/spring/damping, an electrochemical transducer measures the motion speed of the electrolyte, and the low-frequency expansion of the sensor is realized by adopting a force balance feedback technology outside the electrochemical vibration sensor. However, when the rubber membrane is used for a long time, the elasticity of the rubber is reduced due to the influence of heat, oxygen, ozone and chemical substances, especially the strong oxidation effect of iodine/potassium iodide electrolyte used by the electrochemical vibration sensor, so that the performance index of the electrochemical vibration sensor is deviated, and the measurement accuracy is low.
In addition, the working medium of the existing electrochemical vibration sensor has low iodine content, and the concentration of the working medium is reduced after the iodine content reacts with the rubber membrane, so that the sensitivity of the electrochemical vibration sensor is reduced, and the electrochemical vibration sensor cannot be used for measuring direct-current acceleration such as gravity.
Disclosure of Invention
The invention aims to provide a moving electrode type electrochemical inertial sensor to solve the problem of low measurement accuracy of the existing electrochemical vibration sensor.
In order to achieve the purpose, the invention provides the following scheme:
a moving-electrode electrochemical inertial sensor comprises a moving-electrode electrochemical transducer, a signal processing circuit, electrolyte and a sealed cavity;
the moving electrode electrochemical transducer comprises a pair of elastic electrodes and a pair of inelastic electrodes; the movable electrode electrochemical transducer is arranged inside the sealed cavity; the moving electrode electrochemical transducer penetrates through the sealed cavity and is connected with the signal processing circuit; the electrolyte is filled in the sealed cavity;
the elastic electrode is used for generating motion response under the action of external acceleration; under the motion response, the electrolyte flows in the sealed cavity, and the movable electrode electrochemical transducer is used for detecting a current change signal generated when the electrolyte flows through the movable electrode electrochemical transducer; the signal processing circuit is used for converting the current change signal output by the moving electrode electrochemical transducer into a voltage change signal and calculating the external acceleration or speed according to the voltage change signal.
Optionally, the signal processing circuit is further configured to power the moving-electrode electrochemical transducer.
Optionally, the elastic electrode and the inelastic electrode are arranged in an elastic electrode-inelastic electrode-elastic electrode or an inelastic electrode-elastic electrode-inelastic electrode.
Optionally, the elastic electrode is a cathode of the dynamic electrode electrochemical transducer, and the inelastic electrode is an anode of the dynamic electrode electrochemical transducer; or the elastic electrode is the anode of the moving electrode electrochemical transducer, and the inelastic electrode is the cathode of the moving electrode electrochemical transducer.
Optionally, the electrolyte undergoes a reversible self-redox reaction at the surface of the cathode or anode.
Optionally, the cathode serves as a measuring electrode.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention is provided with a dynamic electrode electrochemical transducer, wherein the dynamic electrode electrochemical transducer comprises a pair of elastic electrodes and a pair of inelastic electrodes; the moving electrode electrochemical transducer is arranged inside the sealed cavity; the moving electrode electrochemical transducer penetrates through the sealed cavity and is connected with the signal processing circuit; the electrolyte is filled in the sealed cavity. Under the condition that the external carrying platform has acceleration, due to the existence of inertia, the elastic electrode can generate corresponding motion response, so that the electrolyte flows in the sealed cavity, the output current signal is changed, the signal processing circuit converts the changed current signal into a voltage signal, and the voltage signal is resolved into the external acceleration or speed. The invention avoids the use of a rubber film, picks up external vibration through the elastic electrode and improves the measurement precision of the sensor.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a cross-sectional view of a moving electrode electrochemical inertial sensor provided in accordance with the present invention;
FIG. 2 is a schematic view of an inelastic electrode provided by the present invention;
fig. 3 is a schematic diagram of an elastic electrode provided by the present invention.
Description of the symbols: 1-an elastic electrode; 2-an inelastic electrode; 3-sealing the cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a moving electrode type electrochemical inertial sensor to solve the problem that the existing electrochemical vibration sensor is low in measurement accuracy.
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description thereof.
Fig. 1 is a schematic diagram of a moving-electrode electrochemical inertial sensor according to the present invention, and as shown in fig. 1, the moving-electrode electrochemical inertial sensor includes a moving-electrode electrochemical transducer, a signal processing circuit, an electrolyte, and a sealed cavity 3.
The moving electrode electrochemical transducer comprises a pair of elastic electrodes 1 and a pair of inelastic electrodes 2; the inelastic electrodes are shown in fig. 2 and the elastic electrodes are shown in fig. 3. The moving electrode electrochemical transducer is arranged inside the sealed cavity 3; the moving electrode electrochemical transducer penetrates through the sealed cavity 3 and is connected with the signal processing circuit; the electrolyte is filled in the sealed chamber 3.
The elastic electrode 1 is used for generating motion response under the action of external acceleration; in the motion response, the electrolyte flows in the sealed cavity 3, and the movable electrode electrochemical transducer is used for detecting a current change signal generated when the electrolyte flows through the movable electrode electrochemical transducer; the signal processing circuit is used for converting the current change signal output by the moving electrode electrochemical transducer into a voltage change signal and calculating the external acceleration or speed according to the voltage change signal.
The electrolyte undergoes a reversible self-redox reaction, such as an iodine/potassium iodide solution, on the surface of the cathode or anode, and the electrolyte completely fills the sealed cavity 3.
The elastic electrode 1 and the inelastic electrode 2 are arranged in an elastic electrode-inelastic electrode-elastic electrode or an inelastic electrode-elastic electrode-inelastic electrode.
The movable electrode electrochemical transducer is placed inside the sealed cavity 3 and is composed of four inert metal electrodes which are arranged at intervals, the electrodes can be arranged in an anode/cathode/anode (ACCA) or cathode/anode/cathode (CAAC), wherein the anode of the movable electrode electrochemical transducer is powered by external voltage, and the cathode is used as a measuring electrode.
The elastic electrode 1 and the inelastic electrode 2 can both be a cathode or an anode of a moving-electrode electrochemical transducer, that is, the elastic electrode 1 is a cathode of the moving-electrode electrochemical transducer, and the inelastic electrode 2 is an anode of the moving-electrode electrochemical transducer; or the elastic electrode 1 is the anode of the dynamic electrode electrochemical transducer, and the inelastic electrode 2 is the cathode of the dynamic electrode electrochemical transducer. The elastic electrode 1 can generate corresponding motion response under the action of external acceleration.
The electrolyte generates reversible redox reaction on the surface of the cathode/anode under the action of external voltage of the moving electrode electrochemical transducer, and the movement condition of the elastic electrode 1 can be reversely deduced by measuring the current change flowing through the cathode/anode.
The signal processing circuit is used for supplying power to the moving electrode electrochemical transducer, and carrying out differential amplification and filtering processing on a current change signal output by the cathode of the moving electrode electrochemical transducer, so that the output current of the moving electrode electrochemical inertial sensor is linearly related to the motion speed or acceleration of an external carrying platform.
Under the condition that the external stage has acceleration, the elastic electrode 1 generates vibration response due to the action of inertia force, so that the current output of the movable electrode electrochemical transducer is changed, and the signal processing circuit calculates the vibration speed or the acceleration of the external stage based on the current change signal of the movable electrode electrochemical transducer.
Taking the acceleration response output of the moving electrode electrochemical inertial sensor to the carrier as an example, the transfer function of the sensor can be divided into a motion pickup part and an electrochemical transduction part, and the whole transfer function of the sensor consists of the product of the transfer functions of the two parts:
H V-ag =H vs-ag *H V-vs
H V-ag transfer function of response of sensor output current to stage acceleration, H vs-ag Is a transfer function of the end face movement speed of the elastic electrode 1 to the acceleration response of the carrier, H V-vs Is a response transfer function of the sensor output voltage to the end face movement speed of the elastic electrode 1.
Transfer function H of end surface movement speed of elastic electrode 1 to acceleration response of carrying platform vs-ag Is calculated as follows:
the equation of motion of the elastic electrode 1 of the moving-electrode electrochemical inertial sensor can be simplified and calculated with a second-order mass/spring/damping system:
Figure BDA0003259234830000051
wherein m is the equivalent mass of the elastic electrode 1, x s The displacement of the end face of the elastic electrode 1 relative to the sealed chamber 3,
Figure BDA0003259234830000052
the velocity of the end face of the flexible electrode 1 relative to the sealed chamber 3,
Figure BDA0003259234830000053
acceleration, x, of the end face of the elastic electrode 1 against the sealed chamber 3 g Is the displacement of the external carrying platform,
Figure BDA0003259234830000054
the acceleration of the external carrying platform is shown as R, the resistance coefficient of the elastic electrode 1 is shown as K, and the rigidity of the elastic electrode 1 is shown as K.
The corresponding Laplace equation of variation is:
mx g (s)s 2 =mx s (s)s 2 +Rx s (s)s+Kx s (s)
further, a response transfer function of the end face movement speed of the elastic electrode 1 to the stage acceleration can be obtained:
Figure BDA0003259234830000055
where s is the complex frequency.
Response transfer function H of sensor output voltage to end surface movement speed of elastic electrode 1 V-vs Is calculated as follows:
the transfer function of the moving electrode electrochemical transducer can be solved by solving a Nernst-Planck equation and Butler-Volmer boundary conditions theoretically, but is limited by the current mathematical development level, and the analytic solution of the output current is difficult to obtain. The approximate transfer function of the electrochemical seismometer obtained by the experiment is as follows:
Figure BDA0003259234830000056
wherein ω is D ω is the frequency at which the ions are critical to diffusion in the electrolyte.
The signal processing circuit converts the current output of the sensor into voltage output through the trans-impedance amplifier, and performs filtering and correction processing to enable the output voltage of the sensor and the acceleration of the carrier to be in a linear relation.
The invention improves the original four-electrode electrochemical transduction unit structure with fixed spacing, changes the inert metal mesh electrode into an inert metal elastic electrode, and the surface of the elastic electrode 1 is provided with holes to provide damping force for less electrolyte in motion. The size and the number of the holes on the surface of the elastic electrode 1 can be used as parameters for adjusting elastic damping, so that the elastic electrode 1 has the function of picking up external vibration, an elastic rubber film at the end part of the electrolyte cavity is omitted, the use of the rubber film is avoided, and the performance index of the electrochemical sensor cannot be deviated, so that the measurement precision of the electrochemical sensor is improved, and the long-term stability of the electrochemical sensor is improved; the electrolyte can generate self-oxidation-reduction reaction on the surface of the cathode or the anode, and the concentration of the electrolyte cannot be reduced, so that the sensitivity of the electrochemical sensor is ensured; meanwhile, the packaging mode of the electrochemical sensor is simplified, and static and low-frequency acceleration measurement of the electrochemical sensor is realized.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims (6)

1. A moving-electrode electrochemical inertial sensor is characterized by comprising a moving-electrode electrochemical transducer, a signal processing circuit, electrolyte and a sealed cavity;
the moving electrode electrochemical transducer comprises a pair of elastic electrodes and a pair of inelastic electrodes; the movable electrode electrochemical transducer is arranged inside the sealed cavity; the moving electrode electrochemical transducer penetrates through the sealed cavity and is connected with the signal processing circuit; the electrolyte is filled in the sealed cavity;
the elastic electrode is used for generating motion response under the action of external acceleration; under the motion response, the electrolyte flows in the sealed cavity, and the movable electrode electrochemical transducer is used for detecting a current change signal generated when the electrolyte flows through the movable electrode electrochemical transducer; the signal processing circuit is used for converting a current change signal output by the moving electrode electrochemical transducer into a voltage change signal and calculating external acceleration or speed according to the voltage change signal;
the transfer function of the sensor can be divided into a motion pickup part and an electrochemical transduction part, and the overall transfer function of the sensor consists of the product of the transfer functions of the two parts:
H V-ag =H vs-ag *H V-vs
H V-ag for the response transfer function of the sensor output current to the stage acceleration, H vs-ag Is a transfer function of the end face movement speed of the elastic electrode to the acceleration response of the carrier, H V-vs A response transfer function of the output voltage of the sensor to the end face movement speed of the elastic electrode;
transfer function H of end surface movement speed of elastic electrode to acceleration response of carrying platform vs-ag Is calculated as follows:
the equation of motion of the elastic electrodes of the moving-electrode electrochemical inertial sensor can be simplified and calculated with a second-order mass/spring/damping system:
Figure FDA0003792659900000011
wherein m is the equivalent mass of the elastic electrode, x s The displacement of the end face of the elastic electrode relative to the sealed cavity,
Figure FDA0003792659900000012
the velocity of the end face of the elastic electrode relative to the sealed cavity,
Figure FDA0003792659900000013
acceleration of the end face of the elastic electrode against the sealed chamber, x g Is the displacement of the external carrying platform,
Figure FDA0003792659900000014
the acceleration of an external microscope carrier, R is a resistance coefficient borne by the elastic electrode, and K is the rigidity of the elastic electrode;
the corresponding Laplace equation of variation is:
mx g (s)s 2 =mx s (s)s 2 +Rx s (s)s+Kx s (s)
further, a response transfer function of the end face movement speed of the elastic electrode to the stage acceleration can be obtained:
Figure FDA0003792659900000021
wherein s is a complex frequency;
response transfer function H of sensor output voltage to end surface movement speed of elastic electrode V-vs Is calculated as follows:
Figure FDA0003792659900000022
wherein ω is D Is the diffusion frequency of key ions in the electrolyte, and omega is the frequencyAnd (4) rate.
2. The electro-chemical inertial sensor of claim 1, wherein the signal processing circuitry is further configured to power the electro-chemical transducer.
3. The electrochemical inertial sensor of claim 2, wherein the elastic electrodes and the inelastic electrodes are arranged in a manner of elastic electrode-inelastic electrode-elastic electrode or inelastic electrode-elastic electrode-inelastic electrode.
4. The electro-kinetic electrochemical inertial sensor of claim 3, wherein the elastic electrode is a cathode of the electro-kinetic electrochemical transducer and the inelastic electrode is an anode of the electro-kinetic electrochemical transducer; or the elastic electrode is an anode of the moving electrode electrochemical transducer, and the inelastic electrode is a cathode of the moving electrode electrochemical transducer.
5. The electrochemical inertial sensor of claim 4, wherein the electrolyte undergoes a reversible auto-redox reaction at the cathode or anode surface.
6. The electro-chemical inertial sensor of claim 5, wherein the cathode acts as a measuring electrode.
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