CN113776994B - Piezoelectric-excitation annular-surface micro-control device and working method thereof - Google Patents
Piezoelectric-excitation annular-surface micro-control device and working method thereof Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000007788 liquid Substances 0.000 claims abstract description 36
- 238000009826 distribution Methods 0.000 claims abstract description 15
- 230000009471 action Effects 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 13
- 239000000919 ceramic Substances 0.000 claims description 62
- 230000005284 excitation Effects 0.000 claims description 36
- 239000004005 microsphere Substances 0.000 claims description 28
- 230000010287 polarization Effects 0.000 claims description 6
- 239000011859 microparticle Substances 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 7
- 239000007787 solid Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 8
- 238000004088 simulation Methods 0.000 description 4
- 238000012576 optical tweezer Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
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- G01N15/1023—
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects thereof, e.g. conductivity or capacity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0038—Investigating nanoparticles
Abstract
The invention discloses a piezoelectric-excited micro-control device in a circular ring surface and a working method thereof; the control device comprises a transducer array, a circular ring container and a substrate; the transducer array comprises four transducers uniformly distributed on the outer wall of a circular ring container, and the circular ring container is used for carrying liquid medium and manipulated particles. When the device works, a specified voltage signal is applied to the transducer to excite an in-plane traveling wave mode of the circular container; because the vibration amplitude distribution of the solid is consistent with the sound pressure distribution, the sound pressure field generated in the liquid bearing medium rotates along with the vibration amplitude distribution of the solid in the traveling wave mode, so that the micro-particles in the liquid bearing medium realize the rotary motion under the action of the sound radiation force and the liquid viscous force. The invention has the advantages of simple structure, nondestructive control and large-scale microparticle control; meanwhile, the problem of unstable control under the vibration mode of the out-of-plane bulk acoustic wave can be solved by the vibration mode of the in-plane bulk acoustic wave, and stable rotation control on the microparticles is realized.
Description
Technical Field
The invention relates to the field of piezoelectric transducers, acoustic control and microsphere control, in particular to a piezoelectric-excited micro-control device in a circular ring surface and a working method thereof.
Background
The micro-control technology has wide application prospect in the fields of biology, medical treatment, chemistry and the like. Currently, many types of micromanipulation devices have been developed for the study of micromanipulation techniques. Among them, the micromanipulation devices can be classified into optical tweezers, magnetic tweezers, electrical tweezers, acoustic tweezers (acoustic manipulation), and the like according to the principle on which they are based. However, the optical tweezers may damage the surface of the microparticles due to a large amount of heat generated by the laser in the working process, and the optical tweezers are expensive and complex in structure, and are not suitable for large-scale application. The magnetic tweezers and the electric tweezers have selective properties on the manipulated object, and the manipulated object can be manipulated only by magnetism or electric charge. For particles that do not meet the conditions, magnetic tweezers and electric tweezers are needed to treat the manipulated particles, and the treatment process may damage the particles. Different from the micro control device, the acoustic tweezers have no special requirements on the properties of the controlled object and have the advantages of high biocompatibility, no damage and stable control. Therefore, the sound control has wider application prospect.
Acoustic steering can be divided into surface acoustic waves and bulk acoustic waves according to the type of acoustic wave generated. Surface acoustic waves are typically excited by interdigital transducers, while bulk acoustic waves are typically excited by piezoelectric ceramics. Compared with a bulk acoustic wave device, the surface acoustic wave device has a complex structure and high manufacturing cost. The bulk acoustic wave device has a simple structure, and can effectively control large-scale microparticles (submillimeter-level). The working principle of the bulk acoustic wave micro-control device is mainly that a piezoelectric transducer excites the vibration mode of the device, so that a corresponding sound field is generated. While the microspheres in the liquid environment will move towards the sound pressure node in the sound field. The vibration modes excited by the piezoelectric ceramics can be classified into out-of-plane vibration modes and in-plane vibration modes.
In the out-of-plane vibration mode, the vibration direction of mass points is vertical to the motion direction of the controlled particles, so that the oscillation phenomenon can be generated in the motion of the microspheres, and the control stability is reduced. And the in-plane vibration mode is parallel to the movement direction of the controlled particles due to the particle movement direction, which means that the in-plane vibration mode can be used for improving the control stability of the micro-control device and reducing the oscillation problem in the control process. Therefore, in order to realize the lossless and stable control of the large-scale microparticles, the invention provides a piezoelectric excitation circular ring micro-control device based on in-plane bulk acoustic waves.
Disclosure of Invention
The invention aims to solve the technical problem of providing a piezoelectric-excited micro-control device in a circular ring surface and a working method thereof aiming at the defects related in the background technology.
The invention adopts the following technical scheme for solving the technical problems:
a piezoelectric excitation circular ring surface micro-control device comprises a container, a transducer array and a substrate;
the transducer array includes first to fourth transducers;
the first transducer, the second transducer, the third transducer, the fourth transducer and the fourth transducer are identical in structure and respectively comprise a pre-tightening bolt, a pre-tightening column, a piezoelectric ceramic module, a clamping seat and a connecting platform;
the pre-tightening bolt comprises a nut and a stud; the pre-tightening column is a regular prism or a cylinder, and a countersunk through hole matched with the pre-tightening bolt is formed in the center of one end face of the pre-tightening column;
the connecting table comprises a first connecting part and a second connecting part, wherein the first connecting part is a regular prism or a cylinder, the second connecting part is a regular prism table or a circular table with the same shape of an end face with a larger area and an end face at one end of the first connecting part, and the second connecting part is an end face with a larger area and one end of the first connecting part which are correspondingly and coaxially fixedly connected; the other end of the first connecting part is provided with a threaded hole matched with the pre-tightening bolt;
the piezoelectric ceramic module comprises 2 groups of piezoelectric ceramic pieces, each group of piezoelectric ceramic pieces comprises n annular piezoelectric ceramic pieces, and n is a natural number more than or equal to 1;
the clamping seat comprises a connecting circular ring, a connecting strip and a fixing part; one end of the connecting strip is fixedly connected with the outer wall of the connecting circular ring and points to the circle center of the connecting circular ring, and the other end of the connecting strip is fixedly connected with the fixing part; the fixed part is fixedly connected with the substrate; grooves vertical to the length direction of the connecting strips are correspondingly arranged on two side surfaces of the connecting strips close to one end of the connecting ring to form flexible hinges;
the stud of the pre-tightening bolt sequentially penetrates through the countersunk through hole of the pre-tightening column, the 1 group of piezoelectric ceramic pieces, the connecting ring of the clamping seat and the other 1 group of piezoelectric ceramic pieces and then is in threaded connection with the threaded hole of the connecting table, and the 2 groups of piezoelectric ceramic pieces are compressed;
the 2 groups of piezoelectric ceramic pieces are symmetrically arranged around the connecting ring, the piezoelectric ceramic pieces in each group of piezoelectric ceramic pieces are polarized along the thickness direction of the piezoelectric ceramic pieces, and the polarization directions of the adjacent piezoelectric ceramic pieces in the same group of piezoelectric ceramic pieces are opposite;
the container is annular, and an annular groove coaxial with the container is formed in the upper end face of the container and used for containing a liquid bearing medium and microspheres to be controlled; four bosses with the same end face shape as the end face with smaller area of the second connecting part are uniformly arranged on the outer wall of the container in the circumferential direction;
the end faces with smaller areas of the second connecting parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with four bosses on the outer wall of the container in a one-to-one correspondence mode, so that the axes of the connecting platforms of the first transducer, the second transducer and the fourth transducer point to the center of the container; and the fixing parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with the upper end face of the substrate.
As a further optimization scheme of the piezoelectric-excitation in-circular-surface micro-manipulation device, the pre-tightening column is a cylinder, the first connecting part is a regular quadrangular prism, and the second connecting part is a regular quadrangular frustum pyramid.
As a further optimized scheme of the piezoelectric-excited in-plane micro-manipulation device, the fixing parts of the first to fourth transducers are strip-shaped, one ends of the fixing parts are vertically and fixedly connected with the corresponding connecting strips, and the fixing parts are fixedly connected with the substrate through bolts.
As a further optimization scheme of the piezoelectric-excitation in-circular-ring micro-manipulation device, n is 2.
The invention also discloses a control method of the piezoelectric excitation circular ring in-plane micro-control device, which comprises the following steps:
arranging the first to fourth transducers on the substrate in a clockwise sequence, and applying first to fourth simple harmonic voltage signals to the first to fourth transducers respectively;
the first simple harmonic voltage signal, the second simple harmonic voltage signal, the third simple harmonic voltage signal, the fourth simple harmonic voltage signal and the fourth simple harmonic voltage signal, the phase difference pi/2, the angular frequency is equal to a preset rotating mode frequency value omega, the phase difference is sequentially, the phase difference is pi/2, the angular frequency is equal to the preset rotating mode frequency value omega, simultaneously, the in the container is excited to generate an in space phase difference, an in the container, and the in the container, the in the plane vibration mode, the in the container, the in the mode, and the mode, and the in the mode, the container, and the in the container, and the exciting, and the in the container, and the exciting, and the in the container, and the in the container, and the in the excitation, and the container, and the in the container, and the in the container, the in order, the container, the in the excitation, the in the excitation, and the in the container, the in the excitation, the container, the excitation, the in;
under the traveling wave mode, generating a corresponding sound pressure field in a bearing liquid medium in the circular ring container, wherein the size distribution of the sound pressure field corresponds to the amplitude distribution of the vibration mode; the sound pressure field rotates along with the rotation of the traveling wave mode excited in the circular container; because the microspheres placed in the container bearing liquid medium move towards the sound pressure node under the action of the sound radiation force and the liquid viscous force in the sound pressure field, and the sound pressure node rotates around the circle center of the circular container due to the rotation of the sound pressure field, the microspheres can rotate around the center of the container under the action of the sound radiation force and the liquid viscous force, and the rotation control of the microspheres is realized.
The invention also discloses another piezoelectric excitation ring surface micro-control device, which comprises a container, a transducer array and a substrate;
the transducer array includes first to fourth transducers;
the first transducer, the second transducer, the third transducer, the fourth transducer and the fourth transducer are identical in structure and respectively comprise a substrate, a connecting block, a fixed seat, a first piezoelectric ceramic piece and a second piezoelectric ceramic piece;
the substrate is a regular quadrangular prism and comprises two end faces and first to fourth side walls which are sequentially connected end to end, wherein the first side wall is parallel to the third side wall, and the second side wall is parallel to the fourth side wall;
the connecting block is a regular quadrangular frustum pyramid with the same shape as the end surface of one end of the base body, and the end surface of the connecting block with the larger area is correspondingly and coaxially fixedly connected with one end of the base body;
the fixing seat comprises a connecting strip and a fixing part; one end of the connecting strip is vertically and fixedly connected with the third side wall of the substrate, and the other end of the connecting strip is fixedly connected with the fixing part; the fixed part is fixedly connected with the substrate; grooves which are vertical to the length direction of the connecting strip are correspondingly arranged on two side surfaces of the connecting strip, which are close to one end of the base body, so that flexible hinges are formed;
the first piezoelectric ceramic piece and the second piezoelectric ceramic piece are respectively arranged on the second side wall and the fourth side wall of the substrate, and are polarized along the thickness direction, and the polarization directions of the first piezoelectric ceramic piece and the second piezoelectric ceramic piece are opposite;
the container is annular, and an annular groove coaxial with the container is formed in the upper end face of the container and used for containing a liquid bearing medium and microspheres to be controlled; four bosses with the same end face shape as the end face with the smaller area of the second connecting part are uniformly arranged on the outer wall of the container in the circumferential direction, and the lower end face of the container is parallel to the third side wall of the base body;
the end faces with smaller areas of the second connecting parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with four bosses on the outer wall of the container in a one-to-one correspondence mode, so that the axes of the connecting platforms of the first transducer, the second transducer and the fourth transducer point to the center of the container; and the fixed parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with the upper end face of the substrate.
As a further optimization scheme of the another piezoelectric excitation in-circular-ring-surface micro-manipulation device, the fixing portions of the first transducer, the second transducer, the third transducer and the fourth transducer are strip-shaped, one end of each fixing portion is vertically and fixedly connected with the corresponding connecting strip, and the fixing portions are fixedly connected with the base plate through bolts.
The invention also discloses a control method of the other piezoelectric excitation circular ring in-plane micro-control device, which comprises the following steps:
arranging the first to fourth transducers on the substrate in a clockwise sequence, and applying first to fourth simple harmonic voltage signals to the first to fourth transducers respectively;
the first simple harmonic voltage signal, the second simple harmonic voltage signal, the third simple harmonic voltage signal, the fourth simple harmonic voltage signal and the fourth simple harmonic voltage signal, the phase difference pi/2, the angular frequency is equal to a preset rotating mode frequency value omega, the phase difference is sequentially, the phase difference is pi/2, the angular frequency is equal to the preset rotating mode frequency value omega, simultaneously, the in the container is excited to generate an in space phase difference, an in the container, and the in the container, the in the plane vibration mode, the in the container, the in the mode, and the mode, and the in the mode, the container, and the in the container, and the exciting, and the in the container, and the exciting, and the in the container, and the in the container, and the in the excitation, and the container, and the in the container, and the in the container, the in order, the container, the in the excitation, the in the excitation, and the in the container, the in the excitation, the container, the excitation, the in;
under the traveling wave mode, generating a corresponding sound pressure field in a bearing liquid medium in the circular ring container, wherein the size distribution of the sound pressure field corresponds to the amplitude distribution of the vibration mode; the sound pressure field rotates along with the rotation of the traveling wave mode excited in the circular container; because the microspheres placed in the container bearing liquid medium move towards the sound pressure node under the action of the sound radiation force and the liquid viscous force in the sound pressure field, and the sound pressure node rotates around the circle center of the circular container due to the rotation of the sound pressure field, the microspheres can rotate around the center of the container under the action of the sound radiation force and the liquid viscous force, and the rotation control of the microspheres is realized.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects:
1. the structure is simple, the design is easy, and the cost of the micro-control device can be reduced;
2. the piezoelectric-excited bulk acoustic wave is used as a driving source, so that nondestructive and non-contact control on large-scale (submillimeter-pole) microparticles can be realized;
3. by adopting an in-plane vibration mode, the stability of micro-particle control can be improved, and the problem of oscillation of a liquid bearing medium caused by resonance is reduced.
Drawings
FIG. 1 is a schematic diagram of one arrangement of the present invention;
FIG. 2 is a schematic diagram of a first transducer according to the present invention;
FIG. 3 is a schematic view of the holder of the present invention;
FIG. 4 is a schematic structural view of another arrangement of the present invention;
FIG. 5 is a schematic diagram of the manner in which electrical signals are applied in the present invention;
FIG. 6 is a schematic diagram of one of the mode simulation of the coupled traveling wave mode of the present invention;
FIG. 7 is a schematic diagram of another modal simulation of the pi/2 spatial phase difference of the coupled-out traveling wave modes of the present invention;
FIG. 8 is a simulation diagram of coupled traveling wave modes in one cycle according to the present invention;
FIG. 9 is a schematic diagram of the rotation of microspheres in a circular container according to the present invention.
In the figure, 1-a ring container, 2-a third transducer, 3-a substrate, 4-a base body, 5-a second piezoceramics sheet, 2.1-a pretightening bolt, 2.2-a pretightening column, 2.3-a piezoceramics module, 2.4-a clamping seat, 2.5-a connecting table, 2.4.1-a connecting ring, 2.4.2-a flexible hinge, 2.4.3-a connecting strip and 2.4.4-a fixing part.
Detailed Description
The technical scheme of the invention is further explained in detail by combining the attached drawings:
the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, components are exaggerated for clarity.
As shown in fig. 1, the invention discloses a piezoelectric-excited micro-manipulation device in a circular ring surface, which comprises a container, a transducer array and a substrate;
the transducer array includes first to fourth transducers;
as shown in fig. 2, the first to fourth transducers have the same structure and each comprise a pre-tightening bolt, a pre-tightening column, a piezoelectric ceramic module, a clamping seat and a connecting platform;
the pre-tightening bolt comprises a nut and a stud; the pre-tightening column is a regular prism or a cylinder, and a countersunk through hole matched with the pre-tightening bolt is formed in the center of one end face of the pre-tightening column;
the connecting table comprises a first connecting part and a second connecting part, wherein the first connecting part is a regular prism or a cylinder, the second connecting part is a regular prism table or a circular table with the same shape of an end face with a larger area and an end face at one end of the first connecting part, and the second connecting part is an end face with a larger area and one end of the first connecting part which are correspondingly and coaxially fixedly connected; the other end of the first connecting part is provided with a threaded hole matched with the pre-tightening bolt;
the piezoelectric ceramic module comprises 2 groups of piezoelectric ceramic pieces, each group of piezoelectric ceramic pieces comprises n annular piezoelectric ceramic pieces, and n is a natural number more than or equal to 1;
as shown in fig. 3, the holder includes a connection ring, a connection strip, and a fixing portion; one end of the connecting strip is fixedly connected with the outer wall of the connecting circular ring and points to the circle center of the connecting circular ring, and the other end of the connecting strip is fixedly connected with the fixing part; the fixed part is fixedly connected with the substrate; grooves vertical to the length direction of the connecting strips are correspondingly arranged on two side surfaces of the connecting strips close to one end of the connecting ring to form flexible hinges;
the stud of the pre-tightening bolt sequentially penetrates through the countersunk through hole of the pre-tightening column, the 1 group of piezoelectric ceramic pieces, the connecting ring of the clamping seat and the other 1 group of piezoelectric ceramic pieces and then is in threaded connection with the threaded hole of the connecting table, and the 2 groups of piezoelectric ceramic pieces are compressed;
the 2 groups of piezoelectric ceramic pieces are symmetrically arranged about the connecting ring, the piezoelectric ceramic pieces in each group of piezoelectric ceramic pieces are polarized along the thickness direction of the piezoelectric ceramic pieces, and the polarization directions of the adjacent piezoelectric ceramic pieces in the same group of piezoelectric ceramic pieces are opposite;
the container is annular, and an annular groove coaxial with the container is formed in the upper end face of the container and used for containing a liquid bearing medium and microspheres to be controlled; four bosses with end surfaces the same as the end surfaces with smaller areas of the second connecting parts are uniformly arranged on the outer wall of the container in the circumferential direction;
the end faces with smaller areas of the second connecting parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with four bosses on the outer wall of the container in a one-to-one correspondence mode, so that the axes of the connecting platforms of the first transducer, the second transducer and the fourth transducer point to the center of the container; and the fixed parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with the upper end face of the substrate.
The pre-tightening column is preferably a cylinder, the first connecting part is preferably a regular quadrangular prism, the second connecting part is preferably a regular quadrangular frustum, and n is preferably 2.
The fixing parts of the first transducer, the second transducer and the fourth transducer are strip-shaped, one end of each fixing part is vertically and fixedly connected with the corresponding connecting strip, and the fixing parts are fixedly connected with the base plate through bolts.
The invention also discloses a control method of the piezoelectric excitation circular ring in-plane micro-control device, which comprises the following steps:
as shown in fig. 5, the first to fourth transducers are arranged on the substrate in a clockwise sequence, and first to fourth harmonic voltage signals U1, U2, U3 and U4 are applied to the first to fourth transducers, respectively;
the first to fourth simple harmonic voltage signals are alternating current harmonic signals, the voltage amplitudes are equal, the phases are sequentially different by pi/2, the angular frequency is equal to a preset rotary mode frequency value omega, and meanwhile, an in-plane vibration mode with a space phase difference of pi/2 is excited on the container, as shown in fig. 6 and 7, so that a traveling wave mode is coupled in the container; the simulation diagram of the traveling wave vibration mode in one period is shown in fig. 8;
under the traveling wave mode, generating a corresponding sound pressure field in a bearing liquid medium in the circular ring container, wherein the size distribution of the sound pressure field corresponds to the amplitude distribution of the vibration mode; the sound pressure field rotates along with the rotation of the traveling wave mode excited in the circular container; because the microspheres placed in the container carrying liquid medium move towards the sound pressure node under the action of the sound radiation force and the liquid viscous force in the sound pressure field, and the sound pressure node rotates around the circle center of the circular container due to the rotation of the sound pressure field, the microspheres can rotate around the center of the container under the action of the sound radiation force and the liquid viscous force, so that the rotation control of the microspheres is realized, as shown in fig. 9.
As shown in fig. 4, the present invention also discloses another piezoelectric-excited micro-manipulation device in a circular ring surface, which includes a container, a transducer array and a substrate;
the transducer array includes first to fourth transducers;
the first transducer, the second transducer, the third transducer, the fourth transducer and the fourth transducer are identical in structure and respectively comprise a substrate, a connecting block, a fixed seat, a first piezoelectric ceramic piece and a second piezoelectric ceramic piece;
the substrate is a regular quadrangular prism and comprises two end faces and first to fourth side walls which are sequentially connected end to end, wherein the first side wall is parallel to the third side wall, and the second side wall is parallel to the fourth side wall;
the connecting block is a regular quadrangular frustum pyramid with the same shape as the end surface of one end of the base body, and the end surface of the connecting block with the larger area is correspondingly and coaxially fixedly connected with one end of the base body;
the fixing seat comprises a connecting strip and a fixing part; one end of the connecting strip is vertically and fixedly connected with the third side wall of the substrate, and the other end of the connecting strip is fixedly connected with the fixing part; the fixed part is fixedly connected with the substrate; grooves which are vertical to the length direction of the connecting strip are correspondingly arranged on two side surfaces of the connecting strip, which are close to one end of the base body, so that flexible hinges are formed;
the first piezoelectric ceramic piece and the second piezoelectric ceramic piece are respectively arranged on the second side wall and the fourth side wall of the substrate, and are polarized along the thickness direction, and the polarization directions of the first piezoelectric ceramic piece and the second piezoelectric ceramic piece are opposite;
the container is annular, and an annular groove coaxial with the container is formed in the upper end face of the container and used for containing a liquid bearing medium and microspheres to be controlled; four bosses with the same end face shape as the end face with the smaller area of the second connecting part are uniformly arranged on the outer wall of the container in the circumferential direction, and the lower end face of the container is parallel to the third side wall of the base body;
the end faces with smaller areas of the second connecting parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with four bosses on the outer wall of the container in a one-to-one correspondence mode, so that the axes of the connecting platforms of the first transducer, the second transducer and the fourth transducer point to the center of the container; and the fixed parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with the upper end face of the substrate.
The fixing parts of the first transducer, the second transducer and the fourth transducer are strip-shaped, one end of each fixing part is vertically and fixedly connected with the corresponding connecting strip, and the fixing parts are fixedly connected with the base plate through bolts.
The control method of the other piezoelectric excitation ring surface micro-manipulation device is the same as that of the first piezoelectric excitation ring surface micro-manipulation device, and comprises the following steps:
arranging the first to fourth transducers on the substrate in a clockwise sequence, and applying first to fourth simple harmonic voltage signals to the first to fourth transducers respectively;
the first simple harmonic voltage signal, the second simple harmonic voltage signal, the third simple harmonic voltage signal, the fourth simple harmonic voltage signal and the fourth simple harmonic voltage signal, the phase difference pi/2, the angular frequency is equal to a preset rotating mode frequency value omega, the phase difference is sequentially, the phase difference is pi/2, the angular frequency is equal to the preset rotating mode frequency value omega, simultaneously, the in the container is excited to generate an in space phase difference, an in the container, and the in the container, the in the plane vibration mode, the in the container, the in the mode, and the mode, and the in the mode, the container, and the in the container, and the exciting, and the in the container, and the exciting, and the in the container, and the in the container, and the in the excitation, and the container, and the in the container, and the in the container, the in order, the container, the in the excitation, the in the excitation, and the in the container, the in the excitation, the container, the excitation, the in;
under the traveling wave mode, generating a corresponding sound pressure field in a bearing liquid medium in the circular ring container, wherein the size distribution of the sound pressure field corresponds to the amplitude distribution of the vibration mode; the sound pressure field rotates along with the rotation of the traveling wave mode excited in the circular container; because the microspheres placed in the container bearing liquid medium move towards the sound pressure node under the action of the sound radiation force and the liquid viscous force in the sound pressure field, and the sound pressure node rotates around the circle center of the circular container due to the rotation of the sound pressure field, the microspheres can rotate around the center of the container under the action of the sound radiation force and the liquid viscous force, and the rotation control of the microspheres is realized.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only illustrative of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A piezoelectric excitation circular ring surface micro-control device is characterized by comprising a container, a transducer array and a substrate;
the transducer array includes first to fourth transducers;
the first transducer, the second transducer, the third transducer, the fourth transducer and the fourth transducer are identical in structure and respectively comprise a pre-tightening bolt, a pre-tightening column, a piezoelectric ceramic module, a clamping seat and a connecting platform;
the pre-tightening bolt comprises a nut and a stud; the pre-tightening column is a regular prism or a cylinder, and a countersunk through hole matched with the pre-tightening bolt is formed in the center of one end face of the pre-tightening column;
the connecting platform comprises a first connecting part and a second connecting part, wherein the first connecting part is a regular prism or a cylinder, the second connecting part is a regular prism platform or a round platform with the same shape of an end face with a larger area and an end face at one end of the first connecting part, and the end face with the larger area and one end of the first connecting part are correspondingly and coaxially fixedly connected; the other end of the first connecting part is provided with a threaded hole matched with the pre-tightening bolt;
the piezoelectric ceramic module comprises 2 groups of piezoelectric ceramic pieces, each group of piezoelectric ceramic pieces comprises n annular piezoelectric ceramic pieces, and n is a natural number more than or equal to 1;
the clamping seat comprises a connecting circular ring, a connecting strip and a fixing part; one end of the connecting strip is fixedly connected with the outer wall of the connecting circular ring and points to the circle center of the connecting circular ring, and the other end of the connecting strip is fixedly connected with the fixing part; the fixed part is fixedly connected with the substrate; grooves vertical to the length direction of the connecting strips are correspondingly arranged on two side surfaces of the connecting strips close to one end of the connecting ring to form flexible hinges;
the stud of the pre-tightening bolt sequentially penetrates through the countersunk through hole of the pre-tightening column, the 1 group of piezoelectric ceramic plates, the connecting ring of the clamping seat and the other 1 group of piezoelectric ceramic plates and then is connected with the threaded hole of the connecting table in a threaded manner, and the 2 groups of piezoelectric ceramic plates are pressed tightly;
the 2 groups of piezoelectric ceramic pieces are symmetrically arranged around the connecting ring, the piezoelectric ceramic pieces in each group of piezoelectric ceramic pieces are polarized along the thickness direction of the piezoelectric ceramic pieces, and the polarization directions of the adjacent piezoelectric ceramic pieces in the same group of piezoelectric ceramic pieces are opposite;
the container is annular, and an annular groove coaxial with the container is formed in the upper end face of the container and used for containing a liquid bearing medium and microspheres to be controlled; four bosses with the same end face shape as the end face with smaller area of the second connecting part are uniformly arranged on the outer wall of the container in the circumferential direction;
the end faces with smaller areas of the second connecting parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with four bosses on the outer wall of the container in a one-to-one correspondence mode, so that the axes of the connecting platforms of the first transducer, the second transducer and the fourth transducer point to the center of the container; and the fixed parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with the upper end face of the substrate.
2. The piezoelectrically actuated in-torus micro control apparatus of claim 1 wherein the pre-tensioning posts are cylinders, the first connections are regular square prisms and the second connections are regular square frustums.
3. The piezoelectric actuated in-toroid micromanipulator according to claim 1, wherein the fixed portion of each of the first to fourth transducers is a bar, one end of each of the fixed portions is vertically connected to the corresponding connecting bar, and the fixed portion is connected to the substrate by a bolt.
4. A piezoelectrically actuated in-toroid micromanipulation device as claimed in claim 1, wherein said n is 2.
5. The method for controlling a piezoelectrically actuated in-toroid micromanipulator assembly according to claim 1, comprising the steps of:
arranging the first to fourth transducers on the substrate in a clockwise sequence, and applying first to fourth simple harmonic voltage signals to the first to fourth transducers respectively;
the first simple harmonic voltage signal, the second simple harmonic voltage signal, the third simple harmonic voltage signal, the fourth simple harmonic voltage signal and the fourth simple harmonic voltage signal, the phase difference pi/2, the angular frequency is equal to a preset rotating mode frequency value omega, the phase difference is sequentially, the phase difference is pi/2, the angular frequency is equal to the preset rotating mode frequency value omega, simultaneously, the in the container is excited to generate an in space phase difference, an in the container, and the in the container, the in the plane vibration mode, the in the container, the in the mode, and the mode, and the in the mode, the container, and the in the container, and the exciting, and the in the container, and the exciting, and the in the container, and the in the container, and the in the excitation, and the container, and the in the container, and the in the container, the in order, the container, the in the excitation, the in the excitation, and the in the container, the in the excitation, the container, the excitation, the in;
under the traveling wave mode, generating a corresponding sound pressure field in a bearing liquid medium in the circular ring container, wherein the size distribution of the sound pressure field corresponds to the amplitude distribution of the vibration mode; the sound pressure field rotates along with the rotation of the traveling wave mode excited in the circular container; because the microspheres placed in the container bearing liquid medium move towards the sound pressure node under the action of the sound radiation force and the liquid viscous force in the sound pressure field, and the sound pressure node rotates around the circle center of the circular container due to the rotation of the sound pressure field, the microspheres can rotate around the center of the container under the action of the sound radiation force and the liquid viscous force, so that the microspheres can be rotated and controlled.
6. A piezoelectric excitation circular ring surface micro-control device is characterized by comprising a container, a transducer array and a substrate;
the transducer array includes first to fourth transducers;
the first transducer, the second transducer, the third transducer, the fourth transducer and the fourth transducer are identical in structure and respectively comprise a base body, a connecting block, a fixed seat, a first piezoelectric ceramic piece and a second piezoelectric ceramic piece;
the substrate is a regular quadrangular prism and comprises two end faces and first to fourth side walls which are sequentially connected end to end, wherein the first side wall is parallel to the third side wall, and the second side wall is parallel to the fourth side wall;
the connecting block is a regular quadrangular frustum pyramid with the same shape as the end surface of one end of the base body, and the end surface of the connecting block with the larger area is correspondingly and coaxially fixedly connected with one end of the base body;
the fixing seat comprises a connecting strip and a fixing part; one end of the connecting strip is vertically and fixedly connected with the third side wall of the substrate, and the other end of the connecting strip is fixedly connected with the fixing part; the fixed part is fixedly connected with the substrate; grooves vertical to the length direction of the connecting strip are correspondingly arranged on two side surfaces of the connecting strip close to one end of the base body to form flexible hinges;
the first piezoelectric ceramic piece and the second piezoelectric ceramic piece are respectively arranged on the second side wall and the fourth side wall of the substrate, and are polarized along the thickness direction, and the polarization directions of the first piezoelectric ceramic piece and the second piezoelectric ceramic piece are opposite;
the container is annular, and an annular groove coaxial with the container is formed in the upper end face of the container and used for containing a liquid bearing medium and microspheres to be controlled; four bosses with end faces the same as the end faces with smaller areas of the second connecting parts are uniformly arranged on the outer wall of the container in the circumferential direction, and the lower end face of the container is parallel to the third side wall of the base body;
the end faces with smaller areas of the second connecting parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with four bosses on the outer wall of the container in a one-to-one correspondence mode, so that the axes of the connecting platforms of the first transducer, the second transducer and the fourth transducer point to the center of the container; and the fixed parts of the first transducer, the second transducer and the fourth transducer are fixedly connected with the upper end face of the substrate.
7. The piezoelectric actuated in-toroid micromanipulator according to claim 6, wherein the fixed portion of each of the first to fourth transducers is a bar, one end of each of the fixed portions is vertically connected to the corresponding connecting bar, and the fixed portion is connected to the substrate by a bolt.
8. The method for controlling a piezoelectrically actuated in-toroid micromanipulator assembly according to claim 6, comprising the steps of:
arranging the first to fourth transducers on the substrate in a clockwise sequence, and applying first to fourth simple harmonic voltage signals to the first to fourth transducers respectively;
the first simple harmonic voltage signal, the second simple harmonic voltage signal, the third simple harmonic voltage signal, the fourth simple harmonic voltage signal and the fourth simple harmonic voltage signal, the phase difference pi/2, the angular frequency is equal to a preset rotating mode frequency value omega, the phase difference is sequentially, the phase difference is pi/2, the angular frequency is equal to the preset rotating mode frequency value omega, simultaneously, the in the container is excited to generate an in space phase difference, an in the container, and the in the container, the in the plane vibration mode, the in the container, the in the mode, and the mode, and the in the mode, the container, and the in the container, and the exciting, and the in the container, and the exciting, and the in the container, and the in the container, and the in the excitation, and the container, and the in the container, and the in the container, the in order, the container, the in the excitation, the in the excitation, and the in the container, the in the excitation, the container, the excitation, the in;
under a traveling wave mode, generating a corresponding sound pressure field in a bearing liquid medium in the circular container, wherein the size distribution of the sound pressure field corresponds to the amplitude distribution of the vibration mode; the sound pressure field rotates along with the rotation of the traveling wave mode excited in the circular container; because the microspheres placed in the container bearing liquid medium move towards the sound pressure node under the action of the sound radiation force and the liquid viscous force in the sound pressure field, and the sound pressure node rotates around the circle center of the circular container due to the rotation of the sound pressure field, the microspheres can rotate around the center of the container under the action of the sound radiation force and the liquid viscous force, and the rotation control of the microspheres is realized.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5484537A (en) * | 1990-03-14 | 1996-01-16 | Public Health Laboratory Service Board | Particle manipulation in an ultrasonic field |
| CN105827146A (en) * | 2016-04-15 | 2016-08-03 | 南京航空航天大学 | Longitudinal bending type traveling wave piezoelectric vibrator used for conveying and positioning and excitation method |
| CN107583696A (en) * | 2017-09-19 | 2018-01-16 | 北京工业大学 | A kind of particle capture and release device based on bulk acoustic wave excitation and moving bubble |
| CN110092439A (en) * | 2019-04-24 | 2019-08-06 | 陕西师范大学 | Compact scroll acoustic beam generator and vortex acoustic beam particle manipulation method |
| CN110272089A (en) * | 2019-04-24 | 2019-09-24 | 陕西师范大学 | A kind of compact scroll acoustic beam generator and particle rotation and lens system |
| CN111969975A (en) * | 2020-08-28 | 2020-11-20 | 哈尔滨工业大学 | Surface wave acoustic tweezers and method for independently capturing and controlling microparticles at any position of plane |
| CN112881240A (en) * | 2021-01-18 | 2021-06-01 | 南京航空航天大学 | Piezoelectric-excitation mode-switching-type micro-control measurement system and method thereof |
| CN112870854A (en) * | 2021-01-18 | 2021-06-01 | 南京航空航天大学 | Standing wave switching type acoustic flow micro-control screening device and working method thereof |
| CN112903542A (en) * | 2021-01-18 | 2021-06-04 | 南京航空航天大学 | Microsphere open type piezoelectric micro-control measurement system and method based on standing wave sound field |
-
2021
- 2021-08-06 CN CN202110901449.5A patent/CN113776994B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5484537A (en) * | 1990-03-14 | 1996-01-16 | Public Health Laboratory Service Board | Particle manipulation in an ultrasonic field |
| CN105827146A (en) * | 2016-04-15 | 2016-08-03 | 南京航空航天大学 | Longitudinal bending type traveling wave piezoelectric vibrator used for conveying and positioning and excitation method |
| CN107583696A (en) * | 2017-09-19 | 2018-01-16 | 北京工业大学 | A kind of particle capture and release device based on bulk acoustic wave excitation and moving bubble |
| CN110092439A (en) * | 2019-04-24 | 2019-08-06 | 陕西师范大学 | Compact scroll acoustic beam generator and vortex acoustic beam particle manipulation method |
| CN110272089A (en) * | 2019-04-24 | 2019-09-24 | 陕西师范大学 | A kind of compact scroll acoustic beam generator and particle rotation and lens system |
| CN111969975A (en) * | 2020-08-28 | 2020-11-20 | 哈尔滨工业大学 | Surface wave acoustic tweezers and method for independently capturing and controlling microparticles at any position of plane |
| CN112881240A (en) * | 2021-01-18 | 2021-06-01 | 南京航空航天大学 | Piezoelectric-excitation mode-switching-type micro-control measurement system and method thereof |
| CN112870854A (en) * | 2021-01-18 | 2021-06-01 | 南京航空航天大学 | Standing wave switching type acoustic flow micro-control screening device and working method thereof |
| CN112903542A (en) * | 2021-01-18 | 2021-06-04 | 南京航空航天大学 | Microsphere open type piezoelectric micro-control measurement system and method based on standing wave sound field |
Non-Patent Citations (4)
| Title |
|---|
| 张泽辉 等.基于超声悬浮的液滴非接触操控及其动力学.《中国科学:物理学 力学 天文学》.2020,第50卷(第10期), * |
| 王方一.新型压电微流体驱动器的研究.《中国优秀博硕士学位论文全文数据库(硕士) 信息科技辑》.2021,(第7期), * |
| 王晓飞.液体中纳米物质超声操控装置及.《中国优秀博硕士学位论文全文数据库(硕士) 工程科技Ⅰ辑》.2017,(第3期), * |
| 韦学勇 等.基于表面声波的微流控技术研究进展.《科技导报》.2018,第36卷(第16期), * |
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