CN113764442A - Optical fingerprint device - Google Patents
Optical fingerprint device Download PDFInfo
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- CN113764442A CN113764442A CN202010495462.0A CN202010495462A CN113764442A CN 113764442 A CN113764442 A CN 113764442A CN 202010495462 A CN202010495462 A CN 202010495462A CN 113764442 A CN113764442 A CN 113764442A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 49
- 238000003384 imaging method Methods 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 18
- 230000000903 blocking effect Effects 0.000 claims abstract description 6
- 238000003491 array Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 238000007499 fusion processing Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14605—Structural or functional details relating to the position of the pixel elements, e.g. smaller pixel elements in the center of the imager compared to pixel elements at the periphery
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
Abstract
The present invention provides an optical fingerprint device comprising: a plurality of microlenses and pixel units which are arranged oppositely; a first light blocking layer disposed between the microlenses; a second light blocking layer disposed between the microlens and the pixel unit; the pixel unit comprises a photodiode and a plurality of metal layers positioned above the photodiode; an imaging focal plane of incident light passing through the microlens is located on the photodiode of the corresponding pixel unit. The invention reduces the entrance of stray light with an oblique angle into the photodiode, improves the signal-to-noise ratio, improves the imaging quality, can simultaneously acquire fingerprint images with a plurality of field angles, thereby acquiring three-dimensional information of the fingerprint images for anti-counterfeiting, improving the reduction of effective fingerprint areas caused by overexposure under strong sunlight, and also can acquire fingerprint images with higher resolution or higher signal-to-noise ratio by fusing the fingerprint images with a plurality of field angles, and improving the overall performance of an optical fingerprint device.
Description
Technical Field
The present invention relates to an optical fingerprint device.
Background
The current fingerprint identification schemes include optical technology, silicon technology (capacitive/radio frequency type), ultrasonic technology, etc. Among them, the optical fingerprint recognition technology has been widely used in portable electronic devices.
The optical fingerprint recognition technology adopts an optical image capturing device based on the total reflection principle (FTIR) of light. The light strikes the surface of the light-transmitting layer (such as organic or inorganic glass) pressed with a fingerprint, the reflected light is obtained by the image sensor, and the amount of the reflected light depends on the depth of ridges and valleys of the fingerprint pressed on the surface of the glass, and the grease and moisture between the skin and the glass. The light is reflected to the image sensor by the interface between the glass and the air after the light is emitted to the center of the valley through the glass, and the light emitted to the ridge is not reflected by the total reflection but is absorbed by the contact surface between the ridge and the glass or reflected to other center in a diffused manner, so that the image of the fingerprint is formed on the image sensor.
Fig. 1 shows a schematic partial cross-sectional view of a prior art optical fingerprint device. Wherein each optical fingerprint device includes several microlenses M10 and pixel cells P10 arranged oppositely, only three sets of microlenses M10 and pixel cells P10 arranged in one-to-one correspondence are shown here as an example and not a limitation. A first light-blocking layer 11 is disposed between adjacent microlenses M10, and a second light-blocking layer 12 is disposed between the corresponding microlens M10 and the pixel unit P10. Each pixel cell P10 includes a photodiode 14 and a multilayer metal layer 13 located over the photodiode 14. In the optical fingerprint device in the prior art, the imaging focal plane F1 of the incident light passing through the microlens M10 is located at the opening between the top metal layers in the multilayer metal layer 13, and therefore, the problem arises that the stray light at an oblique angle easily enters the photodiode 14 of the pixel unit P10, so that noise is generated, the imaging quality is reduced, and therefore, how to improve the signal-to-noise ratio of the system directly affects the fingerprint identification effect, especially the fingerprint identification effect of dry fingers.
In the prior art, a microlens is mostly arranged corresponding to a pixel unit as shown in fig. 1, at this time, a field area corresponding to each pixel unit is larger than or equal to the distance between the microlenses, energy collected by each pixel unit is limited by the size of the microlens, energy is weak, influence of noise is significant, only a fingerprint image with a single field angle can be obtained, and printed planar fingerprint images and real three-dimensional fingerprint information cannot be distinguished.
In addition, there are also arrangements in which one microlens is used to correspond to a plurality of pixel units, for example, in chinese patent application No. 201980004242.9, the specific embodiments shown in fig. 5 to 9 are that one microlens corresponds to a plurality of pixel units, but in these embodiments, the corresponding field angles of different pixel units are different, the field areas are discontinuous, and there is no overlapping field area between adjacent microlenses.
Therefore, no matter one microlens corresponds to one pixel unit or a plurality of pixel units, when the microlens optical system in the prior art is used for acquiring a fingerprint image, each microlens does not continuously sample an object area, namely, non-local area imaging, so that fingerprint signals which can be collected by each microlens are relatively limited, and are easily influenced by noise, and further fingerprint identification accuracy is influenced.
Disclosure of Invention
The invention aims to provide an optical fingerprint device, which reduces the influence caused by stray light, improves the signal-to-noise ratio and the imaging quality, simultaneously acquires fingerprint images with a plurality of view angles and improves the overall performance of the optical fingerprint device.
In view of the above, the present invention provides an optical fingerprint device comprising: a plurality of microlenses and pixel units which are arranged oppositely; a first light blocking layer disposed between the microlenses; a second light blocking layer disposed between the microlens and the pixel unit; the pixel unit comprises a photodiode and a plurality of metal layers positioned above the photodiode; an imaging focal plane of incident light passing through the microlens is located on the photodiode of the corresponding pixel unit.
Preferably, one microlens corresponds to a plurality of pixel units.
Preferably, one microlens corresponds to a plurality of pixel units arranged in an N × N array, where N is a natural number greater than or equal to 3.
Preferably, the normally incident light passing through one microlens enters the pixel cell at the center of the corresponding plurality of pixel cell arrays, and the obliquely incident light enters the pixel cells around the corresponding plurality of pixel cell arrays.
Preferably, the pixel unit comprises three metal layers.
Preferably, the size of the opening between the top metal layers in the three metal layers is different.
Preferably, the optical fingerprint device further comprises an infrared cut filter film located between the micro lens and the pixel unit.
Preferably, the size of the opening of the first light-blocking layer for light to pass through is 15-50 microns, and the size of the opening of the second light-blocking layer for light to pass through is 10-35 microns.
Preferably, the distance between the first light-blocking layer and the second light-blocking layer is 10-20 micrometers, and the distance between the second light-blocking layer and the pixel unit is 4-8 micrometers.
The optical fingerprint device of the invention reduces the entering of stray light with an oblique angle into the photodiode, improves the signal-to-noise ratio and the imaging quality by the imaging focal plane of the incident light passing through the micro lens being positioned on the photodiode of the corresponding pixel unit, corresponding to a plurality of pixel units through a micro lens, entering the pixel unit at the center of the corresponding pixel unit array through vertical incident light of the micro lens, entering the pixel unit at the periphery of the corresponding pixel unit array through oblique incident light, and simultaneously acquiring fingerprint images of a plurality of visual angles, therefore, the three-dimensional information of the fingerprint image is acquired for anti-counterfeiting, the reduction of effective fingerprint area caused by overexposure under strong sunlight is improved, the fingerprint image with higher resolution or higher signal-to-noise ratio can be acquired by the fusion processing of the multi-field angle fingerprint image, and the overall performance of the optical fingerprint device is improved.
Drawings
Other features, objects and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments thereof, which proceeds with reference to the accompanying drawings.
FIG. 1 is a schematic partial cross-sectional view of a prior art optical fingerprint device;
fig. 2 is a schematic partial cross-sectional view of an optical fingerprint device according to a first embodiment of the present invention;
fig. 3 is a schematic partial cross-sectional view of an optical fingerprint device according to a second embodiment of the present invention;
fig. 4 is a partial top view of an optical fingerprint device according to a second embodiment of the invention.
In the drawings, like or similar reference numbers indicate like or similar devices (modules) or steps throughout the different views.
Detailed Description
The invention provides an optical fingerprint device, which reduces the incidence of stray light at an oblique angle into a photodiode, improves the signal-to-noise ratio and the imaging quality by positioning the imaging focal plane of incident light passing through a micro lens on the photodiode of a corresponding pixel unit, corresponding to a plurality of pixel units through a micro lens, entering the pixel unit at the center of the corresponding pixel unit array through vertical incident light of the micro lens, entering the pixel unit at the periphery of the corresponding pixel unit array through oblique incident light, and simultaneously acquiring fingerprint images of a plurality of visual angles, therefore, the three-dimensional information of the fingerprint image is acquired for anti-counterfeiting, the reduction of effective fingerprint area caused by overexposure under strong sunlight is improved, the fingerprint image with higher resolution or higher signal-to-noise ratio can be acquired by the fusion processing of the multi-field angle fingerprint image, and the overall performance of the optical fingerprint device is improved.
In the following detailed description of the preferred embodiments, reference is made to the accompanying drawings which form a part hereof. The accompanying drawings illustrate, by way of example, specific embodiments in which the invention may be practiced. The illustrated embodiments are not intended to be exhaustive of all embodiments according to the invention. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.
The present invention will be described in detail with reference to specific examples.
Example one
Fig. 2 is a partial cross-sectional schematic view of an optical fingerprint device according to a first embodiment of the present invention. Wherein each optical fingerprint device includes several microlenses M20 and pixel cells P20 arranged oppositely, only three sets of microlenses M20 and pixel cells P20 arranged in one-to-one correspondence are shown here as an example and not a limitation. A first light-blocking layer 21 is disposed between adjacent microlenses M20, and a second light-blocking layer 22 is disposed between the corresponding microlens M20 and the pixel unit P20. Each pixel cell P20 includes a photodiode 24 and a multi-layer metal layer 23, shown here as a tri-layer metal layer 23, located over the photodiode 24. Different from the optical fingerprint device in the prior art, in the optical fingerprint device, the imaging focal plane F2 of the incident light passing through the micro lens M20 is positioned on the photodiode 24 corresponding to the pixel unit P20, so that the entering of stray light with an oblique angle into the photodiode is reduced, the signal-to-noise ratio is improved, the imaging quality is improved, and the fingerprint identification effect, especially the fingerprint identification effect of dry fingers, is improved.
Preferably, the optical fingerprint device further includes an infrared cut filter (not shown) located between the microlens M20 and the pixel unit P20 to reduce noise crosstalk and image distortion caused by infrared light in incident light entering the pixel unit P20.
Preferably, the size of the opening of the first light-blocking layer 21 for light to pass through is 15 to 50 micrometers, and the size of the opening of the second light-blocking layer 22 for light to pass through is 10 to 35 micrometers.
Preferably, the distance between the first light-blocking layer 21 and the second light-blocking layer 22 is 10-20 micrometers, and the distance between the second light-blocking layer 22 and the pixel unit P20 is 4-8 micrometers.
Example two
Because the focal length of the micro-lens in the fingerprint optical system is extremely short, generally within 100 microns, although each micro-lens is only a spherical micro-lens, because the aberration of the system is relatively small, each micro-lens can realize a relatively large field angle without the imaging quality of the marginal field being too low. By using this feature, each microlens can be used as an imaging optical system, that is, a partial fingerprint is imaged by a plurality of pixel units corresponding to each microlens.
Specifically, fig. 3 is a schematic partial cross-sectional view of an optical fingerprint device according to a second embodiment of the present invention. Wherein each optical fingerprint device includes a number of microlenses M20 and pixel cells P21, P22 arranged opposite to each other, only three sets of correspondingly arranged microlenses M20 and pixel cells P21, P22 are shown here as an example and not a limitation. A first light-blocking layer 21 is disposed between adjacent microlenses M20, and a second light-blocking layer 22 is disposed between the corresponding microlens M20 and the pixel unit P20. Each pixel cell P21, P22 includes a photodiode 24 and a multi-layer metal layer 23, shown here as a tri-layer metal layer 23, located over the photodiode 24. Different from the optical fingerprint device in the prior art, in the optical fingerprint device, the imaging focal plane F2 of the incident light passing through the micro lens M20 is positioned on the photodiode 24 corresponding to the pixel unit P20, so that the entering of stray light with an oblique angle into the photodiode is reduced, the signal-to-noise ratio is improved, the imaging quality is improved, and the fingerprint identification effect, especially the fingerprint identification effect of dry fingers, is improved.
Unlike the first embodiment, in the present embodiment, one microlens M20 corresponds to a plurality of pixel units P21 and P22. Preferably, one microlens corresponds to a plurality of pixel units arranged in an N × N array, where N is a natural number greater than or equal to 3. As shown in fig. 4, the 9 pixel cells, which are shown here as one microlens M20 arranged corresponding to a 3 × 3 array, include a pixel cell P21 located at the center of the plurality of pixel cell arrays and a pixel cell P22 located at the periphery of the plurality of pixel cell arrays. Therefore, the vertical incident light passing through one microlens M20 enters the pixel unit P21 at the center of the corresponding pixel unit arrays, the oblique incident light enters the pixel unit P22 at the periphery of the corresponding pixel unit arrays, so that the fingerprint images of multiple field angles are simultaneously acquired through the pixel units P21 and P22 corresponding to one microlens M20, so that the printed planar fingerprint image and the real three-dimensional fingerprint information are distinguished, the anti-counterfeiting purpose is realized, the fingerprint image of the field angle less affected by the sunlight can be selected for fingerprint identification, the problem of reduction of the effective fingerprint area caused by overexposure under the sunlight is solved, and in addition, the fingerprint image of higher resolution or higher signal-to-noise ratio can be acquired through the fusion processing of the fingerprint images of the multiple field angles, and the overall performance of the optical fingerprint device is improved.
Preferably, the sizes of the openings between the top metal layers of the multi-layer metal layers of the different pixel cells P21 and P22 may be different.
Preferably, the optical fingerprint device further includes an infrared cut filter (not shown) located between the microlens M20 and the pixel unit P20 to reduce noise crosstalk and image distortion caused by infrared light in incident light entering the pixel unit P20.
Preferably, the size of the opening of the first light-blocking layer 21 for light to pass through is 15 to 50 micrometers, and the size of the opening of the second light-blocking layer 22 for light to pass through is 10 to 35 micrometers.
Preferably, the distance between the first light-blocking layer 21 and the second light-blocking layer 22 is 10-20 micrometers, and the distance between the second light-blocking layer 22 and the pixel unit P20 is 4-8 micrometers.
In summary, the optical fingerprint device of the present invention reduces stray light from entering the photodiode at an oblique angle by locating the imaging focal plane of the incident light passing through the microlens on the photodiode of the corresponding pixel unit, thereby improving the signal-to-noise ratio and the imaging quality, corresponding to a plurality of pixel units through a micro lens, entering the pixel unit at the center of the corresponding pixel unit array through vertical incident light of the micro lens, entering the pixel unit at the periphery of the corresponding pixel unit array through oblique incident light, and simultaneously acquiring fingerprint images of a plurality of visual angles, therefore, the three-dimensional information of the fingerprint image is acquired for anti-counterfeiting, the reduction of effective fingerprint area caused by overexposure under strong sunlight is improved, the fingerprint image with higher resolution or higher signal-to-noise ratio can be acquired by the fusion processing of the multi-field angle fingerprint image, and the overall performance of the optical fingerprint device is improved.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive. Furthermore, it will be obvious that the word "comprising" does not exclude other elements or steps, and the word "a" or "an" does not exclude a plurality. Several elements recited in the apparatus claims may also be implemented by one element. The terms first, second, etc. are used to denote names, but not any particular order.
Claims (9)
1. An optical fingerprint device, comprising:
a plurality of microlenses and pixel units which are arranged oppositely;
a first light blocking layer disposed between the microlenses;
a second light blocking layer disposed between the microlens and the pixel unit;
the pixel unit comprises a photodiode and a plurality of metal layers positioned above the photodiode;
an imaging focal plane of incident light passing through the microlens is located on the photodiode of the corresponding pixel unit.
2. The optical fingerprint device of claim 1 wherein one microlens corresponds to a plurality of pixel cells.
3. The optical fingerprint device of claim 2 wherein one microlens corresponds to a plurality of pixel cells arranged in an N x N array, N being a natural number greater than or equal to 3.
4. The optical fingerprint device as claimed in claim 3, wherein the normally incident light passing through one microlens enters the pixel cell at the center of the corresponding plurality of pixel cell arrays, and the obliquely incident light enters the pixel cell at the periphery of the corresponding plurality of pixel cell arrays.
5. The optical fingerprint device of claim 2 wherein the pixel cell comprises three metal layers.
6. The optical fingerprint device of claim 5 wherein the size of the openings between the top metal layers of the three metal layers are different sizes.
7. The optical fingerprint device of claim 1 further comprising an infrared cut filter between the microlenses and the pixel cells.
8. The optical fingerprint device as claimed in claim 1, wherein the first light-blocking layer has an opening size for light passing therethrough of 15 to 50 micrometers, and the second light-blocking layer has an opening size for light passing therethrough of 10 to 35 micrometers.
9. The optical fingerprint device of claim 1 wherein the distance between the first light-blocking layer and the second light-blocking layer is 10-20 microns and the distance between the second light-blocking layer and the pixel cell is 4-8 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010495462.0A CN113764442A (en) | 2020-06-03 | 2020-06-03 | Optical fingerprint device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010495462.0A CN113764442A (en) | 2020-06-03 | 2020-06-03 | Optical fingerprint device |
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| CN113764442A true CN113764442A (en) | 2021-12-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230306778A1 (en) * | 2022-03-23 | 2023-09-28 | Omnivision Technologies, Inc. | Optical fingerprint sensor with high aspect-ratio metal aperture structures |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230306778A1 (en) * | 2022-03-23 | 2023-09-28 | Omnivision Technologies, Inc. | Optical fingerprint sensor with high aspect-ratio metal aperture structures |
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