CN113759435A - Device and method for detecting foreign matters on processing table board - Google Patents

Device and method for detecting foreign matters on processing table board Download PDF

Info

Publication number
CN113759435A
CN113759435A CN202110956338.4A CN202110956338A CN113759435A CN 113759435 A CN113759435 A CN 113759435A CN 202110956338 A CN202110956338 A CN 202110956338A CN 113759435 A CN113759435 A CN 113759435A
Authority
CN
China
Prior art keywords
workpiece
image
processing table
sharpness value
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110956338.4A
Other languages
Chinese (zh)
Inventor
左国军
周志豪
王科鹏
王强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Jiejiachuang Precision Machinery Co Ltd
Original Assignee
Changzhou Jiejiachuang Precision Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changzhou Jiejiachuang Precision Machinery Co Ltd filed Critical Changzhou Jiejiachuang Precision Machinery Co Ltd
Priority to CN202110956338.4A priority Critical patent/CN113759435A/en
Publication of CN113759435A publication Critical patent/CN113759435A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00Prospecting or detecting by optical means
    • G01V8/10Detecting, e.g. by using light barriers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/04Interpretation of pictures
    • G06T5/73
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10004Still image; Photographic image

Abstract

The invention discloses a device and a method for detecting foreign matters on a processing table board. The foreign matter detection method comprises the following steps: acquiring an image of a workpiece placed on a processing table by a camera; processing the acquired workpiece image, and calculating to obtain a sharpness value of the workpiece image; comparing the calculated image sharpness value with a preset sharpness value, and judging whether foreign matters exist between the processing table top and the workpiece; when foreign matters exist on the processing table top, the alarm is started to remind. The invention can monitor the battery plate on the processing table in real time and detect the battery plate completely without changing the structure of the existing processing table, thereby greatly reducing the phenomenon of workpiece cracking or hidden cracking caused by foreign matters on the processing table and improving the automatic yield.

Description

Device and method for detecting foreign matters on processing table board
Technical Field
The invention relates to the field of battery plate processing in the solar photovoltaic industry, in particular to a device and a method for detecting foreign matters on a processing table board.
Background
Solar energy is used as a clean energy source more and more widely, and as one of important parts of photovoltaic power generation, quality control of a cell piece in production is very important. When other foreign matters such as small fragments of the battery piece appear on the laser processing table-board, the new battery piece is conveyed to the laser processing table-board for processing, and the foreign matters can cause the hidden crack of the battery piece or the fragment generation. Therefore, in the process of processing the battery piece, the cleaning of the processing table top by vacuum adsorption is important, and therefore, how to automatically detect foreign matters on the processing table top of the battery piece becomes a technical problem to be solved urgently in the industry.
Disclosure of Invention
The invention provides a device and a method for detecting foreign matters on a processing table board, which aim to solve the problems in the prior art.
The invention provides a method for detecting foreign matters on a processing table top, which comprises the following steps:
acquiring an image of a workpiece placed on a processing table by a camera;
processing the acquired workpiece image, and calculating to obtain a sharpness value of the workpiece image;
and comparing the image sharpness value obtained by calculation with a preset sharpness value, and judging whether foreign matters exist between the processing table top and the workpiece.
When the sharpness value is smaller than the preset sharpness value, judging that foreign matters exist between the processing table board and the workpiece; and when the sharpness value is greater than or equal to the preset sharpness value, judging that no foreign matter exists between the processing table surface and the workpiece.
Preferably, when foreign matters exist between the processing table board and the workpiece, an alarm is started.
Preferably, the camera is disposed above or below the workpiece.
In one embodiment, four cameras are arranged, the workpiece is a silicon wafer or a battery piece, the four cameras are respectively arranged at four corners of the silicon wafer or the battery piece, and when an image shot by at least one camera in the four cameras judges that foreign matters exist, an alarm is started.
Preferably, the depth of focus of the camera lens is 50 microns.
The preset sharpness value is obtained in the following way:
setting the focal depth of the camera lens to be M, placing the workpiece on the working table top, and presetting the position of the upper surface of the workpiece as a first position;
placing an auxiliary standard part between the workpiece and the processing table, presetting the position of the upper surface of the workpiece as a second position, and controlling the vertical distance between the first position and the second position to be M;
shooting the upper surface of the workpiece at the second position by using a camera to obtain an image;
and processing the acquired image and calculating a sharpness value X of the image, wherein the sharpness value X is a preset sharpness value.
The invention also provides a device for detecting foreign matters on the processing table board, which comprises: the device comprises a processing table top for placing a workpiece, a camera photographing component arranged above or below the workpiece, an image sharpness calculating module, a foreign matter judging module and an alarm module, wherein the image sharpness calculating module is used for processing an image photographed by a camera and calculating the sharpness value of the image; the foreign matter judgment module is used for comparing the calculated image sharpness value with a preset sharpness value and judging whether foreign matters exist on the processing table surface and the workpiece or not; and the alarm module is used for sending out an alarm signal when foreign matters exist on the processing table board.
Preferably, the camera photographing component is mounted above the workpiece, and the camera lens is provided with an optical filter for blocking reflected light of laser processing.
The workpiece is a battery piece or a wafer.
Compared with the prior art, the invention has the following beneficial effects:
on the basis of not changing the structure of the existing processing table, a workpiece is placed on the processing table, four groups of camera lenses and light sources are added in a blank area above or below the workpiece, the structure is simple, and the installation is convenient; through the photo analysis to the camera is taken in real time, calculate the acutance of picture and judge whether there is the foreign matter between processing mesa and the work piece according to the comparative result of predetermineeing the acutance value, feed back the result to automatic processing system through alarm device when there is the foreign matter, can accomplish to carry out real time monitoring to the work piece on the processing mesa, whole detection, the work piece wafer lobe of a leaf or the latent phenomenon of splitting that has significantly reduced because processing mesa foreign matter leads to has promoted automatic yields, increase the level of online technology intelligent management.
Drawings
Fig. 1 is a schematic view of an embodiment of a device for detecting foreign matter on a processing table according to the present invention;
fig. 2 is a flowchart of a method for detecting foreign objects on a processing table according to an embodiment of the present invention;
FIG. 3 is a schematic view of the detection principle of the present invention;
FIG. 4 is a diagram of an example of a picture sharpness analysis in an embodiment of the invention;
fig. 5 is a schematic flow chart of the processing of the battery plate on the processing table according to an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and examples. It should be understood that the following specific examples are only for illustrating the present invention and are not to be construed as limiting the present invention.
Example one
As shown in fig. 1, the device for detecting foreign matters on a processing table top according to the present invention comprises: the device comprises a processing table board 1, a camera shooting component 3, an image sharpness calculating module 4 and a foreign matter judging module 5, wherein a battery piece 2 to be processed is placed on the processing table board, and the camera shooting component 3, the image sharpness calculating module 4 and the foreign matter judging module are arranged above or below four corners of the battery piece. The image sharpness calculation module is used for processing the image shot by the camera and calculating the sharpness value of the image. And the foreign matter judgment module is used for comparing the calculated image sharpness value with a preset sharpness value and judging whether foreign matters exist on the processing table board. The foreign matter detection device for the processing table top further comprises an alarm module 6, and the alarm module is used for sending out an alarm signal when foreign matters exist on the processing table top.
In one embodiment, when the image shot by at least one camera in the four cameras judges that foreign matters exist, the alarm reminding is started.
The device provided by the invention can monitor and detect the battery pieces on the processing table in real time on the basis of not changing the structure of the existing processing table, greatly reduces the phenomenon of battery piece cracking or hidden cracking caused by foreign matters on the processing table, improves the automatic yield and increases the level of on-line process intelligent management.
As shown in fig. 2, the flow chart of the method for detecting the foreign matter on the processing table top provided by the invention comprises the following steps:
(1) acquiring an image of a battery piece placed on a processing table board through a camera;
(2) processing the acquired battery piece image, and calculating to obtain a sharpness value of the battery piece image;
(3) comparing the calculated image sharpness value with a preset sharpness value, and judging whether foreign matters exist between the processing table board and the battery piece;
when the sharpness value is smaller than the preset sharpness value, judging that no foreign matter exists between the processing table board and the battery piece; when the sharpness value is smaller than the preset sharpness value, judging that foreign matters exist between the processing table board and the battery piece; when no foreign matter exists between the processing table board and the battery piece, the battery piece normally carries out the next procedure;
(4) when foreign matters exist between the processing table board and the battery piece, the alarm is started to remind.
When foreign matters exist between the processing table board and the battery piece, the alarm can be started to remind or the information of the existence of the foreign matters is transmitted to the controller, and the controller drives the carrying mechanism to take the battery piece on the working table board away and then drives the cleaning mechanism to clean the table board.
The invention provides a method for detecting foreign matters on a processing table top, which is characterized in that four groups of camera lenses are arranged above or below the processing table top corresponding to four corner positions of a battery piece on the basis of not changing the structure of the existing processing table top, correspondingly, light sources are arranged on the same side of the processing table top and around the periphery of the battery piece, and the light sources can be annular light sources or strip-shaped light sources; the image (photo) of the battery piece is obtained by taking a picture, the sharpness of the battery piece image is analyzed and calculated through the image sharpness calculating module to obtain the sharpness value of the battery piece image, the calculated image sharpness value is compared with the preset sharpness value and judged through the foreign matter judging module to obtain whether foreign matters such as small fragments or small particles which cause slight warping of the battery piece exist on the processing table board or not, the phenomenon of battery piece cracking or hidden cracking caused by the foreign matters on the processing table board is greatly reduced, the automatic yield is improved, and the level of online process intelligent management is increased.
In the embodiment shown in fig. 1, the camera photographing assembly 3 is located above the processing table top 1 and located at four corners of the battery piece, the battery piece 2 is placed on the processing table top, most of the vacuum suction holes reserved for vacuum suction of the battery piece on the processing table top are distributed in the center of the processing table top, when the battery piece is vacuum sucked, no vacuum suction hole is formed in the outer edge of the battery piece, if foreign matters such as small fragments or small particles exist at a certain corner of the edge of the battery piece, the corner of the battery piece is upward warped due to the fact that the foreign matters such as the small fragments or the small particles exist at the bottom, and if the size of the small fragments or the small particles is large, the battery piece is hidden cracked or cracked, and the processing quality of the battery piece is affected.
Specifically, in practice, it should be known from a large amount of practical observation experiences for a long time that how large or large a range of small fragments or small particles or other foreign matters affect the processing quality of the battery piece, and further, the focal depth of the camera is selected as needed, in one embodiment, the focal depth M of the camera is 50 micrometers, that is, when the battery piece is placed on a processing table, if the bottom of the battery piece is warped due to the presence of the small fragments or small particles and other foreign matters, the image obtained by the camera is an out-of-focus image of the camera lens in the field of view of the camera, and if the warped height of the battery piece is greater than 50 micrometers, the out-of-focus image is relatively blurred compared with the out-of-focus image; if the bottom of the cell piece is warped due to the existence of foreign matters such as small fragments or small particles, the warped height of the cell piece is less than 50 micrometers in the visual field range of the camera, or the bottom of the cell piece is not provided with the foreign matters such as small fragments or small particles, the image acquired by the camera is not an out-of-focus image, and the image is relatively clear.
Performing sharpness analysis on an image obtained by a camera through software to judge whether defocusing occurs, judging that foreign matters exist between a battery piece and a processing table board when the defocusing occurs, sending a signal to an automation program by control software, giving an alarm, and checking and removing foreign matter fragments; when the defocusing condition does not occur, namely the foreign matter is judged to be not present between the battery piece and the processing table top or the foreign matter is considered to be absent, the working table top operates normally, and the condition that the foreign matter is absent can be understood that the foreign matter which is particularly small exists between the battery piece and the processing table top, and the influence on the battery piece is negligible.
The defocusing of the camera lens means that a photographed plane of the battery piece is not in a focal depth range during imaging, and the focusing of the camera lens means that the photographed plane of the battery piece is in the focal depth range during imaging.
The detection principle is shown in fig. 3:
setting the focal depth of a camera lens as M, the position point of a particle or fragment located at any position between a battery piece 2 and a processing table top 1 as A, the position point of a light ray in the direction vertical to the camera falling on the battery piece as B, the position point of a light ray extension line falling on the processing table top as C, and the distance between the position point B and the position point C is less than or equal to the focal depth M, so that the particle cannot be detected, namely when the particle exists between the battery piece and the processing table top, the sharpness value of an image shot by the camera is greater than or equal to a preset sharpness value; on the contrary, if the distance between the position point B and the position point C is greater than the focal depth M, such particles can be detected when the particles exist between the battery piece and the processing table, and the sharpness value of the image obtained by the camera is smaller than the preset sharpness value. When the camera shoots an image, a clear image can be obtained by adopting a front surface light source (the front surface light source refers to the direction of light source irradiation is the same as the direction of the camera for obtaining the image), because whether foreign matters exist between the battery piece and the processing table board or not is detected, when the battery piece warps, at least one side of the battery piece is far away from the processing table board, and the sharpness value is smaller than the preset sharpness value.
The focal depth belongs to optical terms and is short for focal depth, and the focal depth of an optical imaging system refers to the focal depth of the optical system when the change of the system wave aberration caused by the movement of the image plane of the system does not exceed a quarter wavelength. It can also be understood that: the clear imaging distance of the point on the object (workpiece) on the imaging axis behind the lens (CCD imaging camera lens) can be obtained.
The sharpness of an image is defined as the degree of clarity of the boundary between two regions that possess different hues or colors. A better image sharpness measurement method may use the rise distance (distance in pixels, mm, or fractions of the image height) of the image boundary to measure.
The image is acquired through the camera, processed and analyzed, and the sharpness value of the image is obtained through processing and analysis. The image processing analysis refers to processing an image to obtain a sharpness value of the shot image, wherein the sharpness value can be understood as an attribute value similar to a numerical value obtained by applying a mathematical method according to pixels in the shot image, and the larger the sharpness value is, the clearer the image is, the smaller the sharpness value is, and the blurry the contrast is.
Obtaining a preset sharpness value:
setting the focal depth of a camera lens to be M, placing a workpiece on a worktable, and presetting the upper surface of the workpiece as a first position;
an auxiliary object is placed between a workpiece and a processing table board, the upper surface of the workpiece is preset to be a second position, the vertical distance between the first position and the second position is controlled to be M, namely the vertical distance M is equal to the focal depth M of a camera lens, a camera is used for shooting to obtain an image of the workpiece, the obtained image is processed and analyzed through an image sharpness calculation module, and the sharpness value X of the obtained image is calculated. And the sharpness value X is a preset sharpness value.
It should be noted that: when the work piece was located primary importance or second position, cleared up table surface and work piece in advance, guaranteed not have foreign matter and impurity etc. and avoid the work piece surface roughness to receive the influence, in addition, can adopt the mode of many times detection averaging to acquire and predetermine sharpness value X.
The workpiece can be a silicon wafer or a battery plate applied to the photovoltaic field, or a wafer applied to the semiconductor field. The silicon wafer or the battery piece can be a whole piece or a half piece.
The camera used in the invention is mainly characterized in that the visual field of the camera is small, the focal depth of the lens of the camera is shallow, when the battery piece is placed on the processing table surface by vacuum suction, the camera obtains the image of the battery piece, then the sharpness value of the image is obtained by the image sharpness calculation module and compared with the preset sharpness threshold value, if the bottom of the battery piece is warped due to the existence of foreign matters, the sharpness value of the obtained image is different from the sharpness without warping:
in the first case: if the sharpness value is larger than or equal to the preset sharpness value, the situation that the defocusing phenomenon does not occur when the camera acquires the image is judged, and the situation that the edge of the battery piece is not warped is judged.
In the second case: if the sharpness value is smaller than the preset sharpness value, the defocusing phenomenon is judged to occur when the camera acquires the picture, and the edge of the battery piece is judged to warp.
When the first condition occurs, the processing table top works normally; when the second condition occurs, the system gives an alarm signal to remind the staff to clean.
By adopting the judging mode, whether foreign matters exist on the processing table top can be checked, the risk of cracking or hidden cracking of the battery piece can be reduced, and the yield of a production line is improved.
When processing mesa 1 is greater than the battery piece size, as shown in fig. 3, battery piece 2 is placed on processing mesa 1, in the top of processing mesa 1, does not interfere under the prerequisite of battery piece location, corresponding to the four corners of battery piece, in battery piece four corners top, has set up a set of camera subassembly 3 of shooing respectively for obtain the image of four positions of battery piece, for example, one condition is: the camera takes a picture of the lower cell in a range of 20 mm.
When the processing platform is smaller than the size of the battery piece, as shown in fig. 1, the camera can be placed above or below the battery piece to irradiate the battery piece, so the camera photographing assembly 3 can be installed above the battery piece or below the battery piece without being restricted by the spatial position. When the camera is arranged above the battery piece, the camera also needs to be positioned without interfering the battery piece, and the camera is arranged above the four corners of the battery piece corresponding to the four corners of the battery piece. When the camera shooting component is installed below the battery piece, the position of the camera shooting component corresponding to the battery piece can be selected at will. Preferably, for better detection, the cameras can be evenly distributed, for example, at four corners of the cell.
In the above, the camera photographing assembly 3 includes a camera body, a lens, and a light source;
in the foregoing, when the camera photographing assembly is located above the battery piece, a camera lens in the camera photographing assembly needs to be assembled with an optical filter to block reflected light of laser processing.
When the camera photographing assembly is positioned above the processing table board and the battery piece warps, namely the battery piece warps in the direction close to the camera lens; when the camera shooting assembly is located below the processing table board, when the battery piece warps, namely the battery piece warps towards the direction far away from the camera lens, namely the battery piece warps towards the direction far away from the processing table board at least at one angle relative to the processing table board.
The invention can also adopt an automatic operation mode of repeating alarm and stopping processing, for example, when the sharpness judgment module continuously warps three or two battery piece images, alarm information is sent out, at the moment, the automatic control system controls the machine to stop operating, and after a production worker checks and cleans the processing table surface, the automatic operation mode resets and clears the alarm, and the mass production processing is continuously started. This kind of repeated warning stops the automatic operation mode of processing, reduces because the battery piece lobe of a leaf or the latent bad of splitting that processing mesa foreign matter leads to, when promoting automatic yield, also reduces the board because the false alarm of this foreign matter camera detection system of shooing produces the down time, improves the production yield and the board stability of board greatly.
The two photographs in fig. 4 are photographs taken of the same position on the back side of the cell sheet. Wherein, the picture A is a picture obtained by the camera lens and the picture B is a picture obtained by the camera lens and the picture is out of focus. It can be clearly seen by comparison with A, B that picture A is clearer and picture B is more blurred. The positive image contour is sharp, and its intensity gradient, or sharpness, is large. On the contrary, in the image out of focus, the contour edge is blurred, and the brightness gradient or sharpness is reduced. The farther out of focus, the lower the sharpness. The sharpness is an index reflecting the definition of an image plane and the sharpness of an image edge, and sharpness analysis values of the two pictures are obtained by processing the two pictures respectively through an image algorithm. The sharpness value for photograph A was 3.96544956196363 and the sharpness value for photograph B was 1.54754785834696. As can be seen from fig. 4, the sharpness values of the two pictures are different, and the picture B has a low sharpness and is out of focus, and accordingly, it can be determined that the edge of the cell is warped.
In one embodiment, at least one of the four cameras starts an alarm when detecting the defocus phenomenon.
Fig. 5 is a schematic flow chart of the processing of the battery plate on the processing table. The transmission device conveys the battery pieces to the position of a processing table board, then the battery pieces are adsorbed and placed on the processing table board through a vacuum adsorption system, four groups of cameras arranged above or below the processing table board take pictures of the battery pieces, the obtained images are transmitted to an image sharpness calculation module, software in the image sharpness calculation module processes the received pictures and calculates sharpness values of the pictures, the sharpness judgment module compares and analyzes the sharpness to obtain a judgment result of whether foreign matters exist, when the judgment result is that the foreign matters exist, alarm information is fed back to an automatic control system, the automatic control system controls a machine table to stop running, production workers are prompted to check and clean the processing table board, the alarm signal is reset after the foreign matters are cleared, and mass production processing is continued.
The foregoing is considered as illustrative only of the embodiments of the invention. It should be understood that any modifications, equivalents and changes made within the spirit and framework of the inventive concept are intended to be included within the scope of the present invention.

Claims (10)

1. A method for detecting foreign matters on a processing table top is characterized by comprising the following steps:
acquiring an image of a workpiece placed on a processing table by a camera;
processing the acquired workpiece image, and calculating to obtain a sharpness value of the workpiece image;
and comparing the calculated image sharpness value with a preset sharpness value, and judging whether foreign matters exist between the processing table top and the workpiece.
2. A method for detecting a foreign object on a work table as claimed in claim 1, wherein when the sharpness value is smaller than the preset sharpness value, it is determined that a foreign object is present between the work table and the work piece; and when the sharpness value is greater than or equal to the preset sharpness value, judging that no foreign matter exists between the processing table surface and the workpiece.
3. The method for detecting a foreign object on a work table according to claim 1 or 2, further comprising:
and when foreign matters exist between the processing table board and the workpiece, starting alarm reminding.
4. A method for detecting a foreign object on a work table as claimed in claim 3, wherein the number of the cameras is plural, and an alarm is activated when the presence of the foreign object is determined from the image taken by at least one of the cameras.
5. The method of detecting a foreign object on a work top according to claim 4, wherein the camera is disposed above or below the work.
6. The method for detecting foreign matter on a work surface of claim 1, wherein the focal depth of the camera lens is 50 μm.
7. A method for detecting a foreign object on a work table as defined in claim 1, wherein the preset sharpness value is obtained by:
setting the focal depth of the camera lens to be M, placing the workpiece on the working table top, and presetting the position of the upper surface of the workpiece as a first position;
placing an auxiliary standard part between the workpiece and the processing table, presetting the position of the upper surface of the workpiece as a second position, and controlling the vertical distance between the first position and the second position to be M;
using the camera to photograph the upper surface of the workpiece at the second position to obtain an image;
and processing the acquired image and calculating a sharpness value X of the image, wherein the sharpness value X is a preset sharpness value.
8. The method for detecting foreign matters on a processing table top according to claim 1, wherein the workpiece is a battery piece or a wafer.
9. A processing mesa foreign matter detection device which characterized in that includes: the device comprises a processing table top for placing a workpiece, a camera photographing component arranged above or below the workpiece, an image sharpness calculating module, a foreign matter judging module and an alarm module, wherein the image sharpness calculating module is used for processing an image photographed by a camera and calculating the sharpness value of the image; the foreign matter judgment module is used for comparing the calculated image sharpness value with a preset sharpness value and judging whether foreign matters exist between the workpiece and the processing table top or not; and the alarm module is used for sending out an alarm signal when foreign matters exist on the processing table board.
10. The device for detecting foreign matters on a processing table as claimed in claim 9, wherein the camera photographing component is mounted above the workpiece, and the camera lens is provided with a filter for blocking reflected light of laser processing.
CN202110956338.4A 2021-08-19 2021-08-19 Device and method for detecting foreign matters on processing table board Pending CN113759435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110956338.4A CN113759435A (en) 2021-08-19 2021-08-19 Device and method for detecting foreign matters on processing table board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110956338.4A CN113759435A (en) 2021-08-19 2021-08-19 Device and method for detecting foreign matters on processing table board

Publications (1)

Publication Number Publication Date
CN113759435A true CN113759435A (en) 2021-12-07

Family

ID=78790501

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110956338.4A Pending CN113759435A (en) 2021-08-19 2021-08-19 Device and method for detecting foreign matters on processing table board

Country Status (1)

Country Link
CN (1) CN113759435A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115760685A (en) * 2022-09-23 2023-03-07 北京珞安科技有限责任公司 Hidden threat sensing system and method for industrial production

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03297126A (en) * 1990-04-17 1991-12-27 Nec Corp Reduction projection aligner
JPH0979985A (en) * 1995-09-12 1997-03-28 Koden Kogyo Kk Method and device for judging particle reaction pattern
US20120176528A1 (en) * 2009-08-31 2012-07-12 Connaught Electronics Limited Method for determining the sharpness of a fixed-focus camera, test device for testing the sharpness of a fixed-focus camera, fixed-focus camera as well as method for assembling a fixed-focus camera
CN104034638A (en) * 2014-06-26 2014-09-10 芜湖哈特机器人产业技术研究院有限公司 Diamond wire particle online quality inspection method based on machine vision
CN110178019A (en) * 2016-12-07 2019-08-27 奥博泰克有限公司 Method and apparatus for judging defect quality
CN111126174A (en) * 2019-12-04 2020-05-08 东莞理工学院 Visual detection method for robot to grab parts
CN112345553A (en) * 2020-11-27 2021-02-09 常州信息职业技术学院 Hard disk part detection device and detection method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03297126A (en) * 1990-04-17 1991-12-27 Nec Corp Reduction projection aligner
JPH0979985A (en) * 1995-09-12 1997-03-28 Koden Kogyo Kk Method and device for judging particle reaction pattern
US20120176528A1 (en) * 2009-08-31 2012-07-12 Connaught Electronics Limited Method for determining the sharpness of a fixed-focus camera, test device for testing the sharpness of a fixed-focus camera, fixed-focus camera as well as method for assembling a fixed-focus camera
CN104034638A (en) * 2014-06-26 2014-09-10 芜湖哈特机器人产业技术研究院有限公司 Diamond wire particle online quality inspection method based on machine vision
CN110178019A (en) * 2016-12-07 2019-08-27 奥博泰克有限公司 Method and apparatus for judging defect quality
CN111126174A (en) * 2019-12-04 2020-05-08 东莞理工学院 Visual detection method for robot to grab parts
CN112345553A (en) * 2020-11-27 2021-02-09 常州信息职业技术学院 Hard disk part detection device and detection method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115760685A (en) * 2022-09-23 2023-03-07 北京珞安科技有限责任公司 Hidden threat sensing system and method for industrial production

Similar Documents

Publication Publication Date Title
JPH0850081A (en) System and method of lens inspection
CN109540004A (en) A kind of Systems for optical inspection and its detection method
CN113313713B (en) Method and system for online detection of burrs of lithium battery pole piece
CN115428125A (en) Inspection device and inspection method
CN108469437B (en) Method and device for detecting defects of float glass
CN113759435A (en) Device and method for detecting foreign matters on processing table board
KR20200010058A (en) Substrate inspection method and substrate inspection apparatus
CN107782732B (en) Automatic focusing system, method and image detection instrument
CN111654242B (en) Method and system for detecting notch on solar wafer
JP2010181328A (en) Device, program and method for inspecting surface of solar battery wafer
CN111203655B (en) Three-dimensional space spattering recognition device in laser welding process
CN116609349A (en) Carrier plate glass foreign matter detection equipment and detection method
CN115165920A (en) Three-dimensional defect detection method and detection equipment
CN211263229U (en) Bottled liquid detection optical system
JP2022014226A (en) Workpiece inspection method and device, and workpiece processing method
CN116523882B (en) Vision-based optical target area accuracy detection method and system
CN111521617A (en) Optical detection apparatus, control method of optical detection apparatus, and storage medium
KR101862312B1 (en) substrate analysis device and the treatment apparatus having it, substrate analysis method
JP2014165308A (en) Edge detection apparatus
TWI451152B (en) Defocus determination device and method thereof
JPH07153804A (en) Visual inspection equipment of semiconductor chip
KR102433319B1 (en) Vision inspection method of diffusing lens for led light source
CN210401249U (en) Polar plate recognition device
CN111464132B (en) Object surface detection device, silicon wafer detection device and method
US20220308331A1 (en) Microscope System

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination