CN113718236A - Atomization device for vacuum cavity and use method thereof - Google Patents
Atomization device for vacuum cavity and use method thereof Download PDFInfo
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- CN113718236A CN113718236A CN202110870261.9A CN202110870261A CN113718236A CN 113718236 A CN113718236 A CN 113718236A CN 202110870261 A CN202110870261 A CN 202110870261A CN 113718236 A CN113718236 A CN 113718236A
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- 238000000889 atomisation Methods 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 66
- 210000000078 claw Anatomy 0.000 claims abstract description 20
- 239000002994 raw material Substances 0.000 claims abstract description 12
- 239000011521 glass Substances 0.000 claims abstract description 10
- 210000004907 gland Anatomy 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 21
- 238000003780 insertion Methods 0.000 claims description 11
- 230000037431 insertion Effects 0.000 claims description 11
- 239000000945 filler Substances 0.000 claims description 10
- 238000003825 pressing Methods 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 description 8
- 230000009471 action Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 241000282414 Homo sapiens Species 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241001465754 Metazoa Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Electrostatic Spraying Apparatus (AREA)
Abstract
The invention discloses an atomization device for a vacuum cavity and a use method thereof in the field of auxiliary equipment of a plasma enhanced chemical vapor deposition film, wherein the device comprises an upper cover assembly, a first base body, an atomization assembly and a quick-release structure, the upper cover assembly is arranged on the upper part of the first base body, the atomization assembly is arranged corresponding to the first base body, the quick-release structure is connected with the first base body through a second base body, and the other end of the quick-release structure is connected with liquid to be atomized; the method comprises the following steps: installing all parts of the atomization device; the atomization device is supported and placed on the glass plate in the vacuum cavity through the supporting claw; the liquid inlet pipe and the electric wire are connected with the outside through the small hole on the vacuum cavity; introducing a liquid raw material to be atomized into an inlet of the liquid inlet pipe; and the power supply is switched on, and the device starts to work. The invention can realize atomization in the vacuum cavity, and simultaneously, the whole device is easy to disassemble and does not occupy storage space.
Description
Technical Field
The invention belongs to the field of auxiliary equipment for plasma enhanced chemical vapor deposition films, and particularly relates to an atomizing device for a vacuum cavity and a using method thereof.
Background
In the prior art, when a film is prepared by adopting a plasma enhanced chemical vapor deposition method, the film needs to be prepared under the condition of vacuum pressure, and common atomization technologies comprise an ultrasonic atomization technology, a pressure atomization technology and the like.
Ultrasonic atomization is to break up molecular bonds between liquid water molecules to generate naturally elegant water mist by utilizing electronic high-frequency oscillation (oscillation frequency is 17MHz or 24MHz, which exceeds the hearing range of human beings, and the electronic oscillation has no harm to human bodies and animals) through high-frequency resonance of a ceramic atomization sheet, and no heating or any chemical reagent is needed to be added. Pressure atomization is the atomization effect which is formed when liquid is sprayed out of a nozzle at a high speed into a static or low-speed airflow under the action of high pressure.
Ultrasonic atomization and pressure atomization have the following problems: the air tightness of the vacuum cavity is difficult to ensure; can not be disassembled, occupies large space when being stored and is inconvenient to carry. Therefore, there is a need for an atomization device and a method for using the same.
Disclosure of Invention
One of the objectives of the present invention is to provide an atomization device for a vacuum chamber, which can achieve atomization in the vacuum chamber, and at the same time, the entire device is easy to disassemble and does not occupy a storage space.
The purpose of the invention is realized as follows: the utility model provides an atomizing device for vacuum cavity, includes upper cover subassembly, first base member, atomization component and rapid disassembly structure, the upper cover subassembly sets up on first base member upper portion, atomization component sets up with first base member is corresponding, rapid disassembly structure is connected with first base member through the second base member, and rapid disassembly structure's the other end is connected with the liquid of waiting to atomize.
Compared with the prior art, the invention has the beneficial effects that: the atomizing device is used for atomization in the vacuum cavity, the upper cover assembly is convenient to install and position the atomizing assembly and the quick-release structure, the first base body is a foundation for installing and positioning other parts, the atomizing assembly is a part for atomizing the atomizing device, and the quick-release structure is arranged to connect the atomizing device with the outside and prevent outside air from entering the sealed vacuum cavity.
As a further improvement of the invention, the first substrate is respectively provided with a motor accommodating cavity, a convex cavity, a large round through hole, a liquid inlet, a gland fixing port and a small round hole; the motor accommodating cavity is rectangular, the motor accommodating cavity is formed in the middle of the first base body, and a motor is vertically arranged in the motor accommodating cavity; the large circular through hole is correspondingly formed in the first base body below the motor accommodating cavity and vertically penetrates through the first base body; the convex cavity is in an inverted convex shape and comprises an upper cavity and a lower cavity, the length of the upper cavity is greater than that of the lower cavity, the convex cavity is arranged close to the motor accommodating cavity and corresponds to the second base body, and the edge of the first base body is provided with an edge groove close to the convex cavity; the liquid inlet is formed in the first base body below the convex cavity, the liquid inlet vertically penetrates through the first base body, and the liquid inlet is matched with the liquid inlet pipe; the gland fixing port and the lower cavity of the convex cavity are symmetrically arranged; the small round holes are provided with at least two and symmetrically arranged at the upper end of the first base body. The motor accommodating cavity on the first base body is used for installing a motor, and the convex cavity and the edge groove are used for installing a second base body.
As a further improvement of the invention, the upper cover assembly comprises a pressing cover, a supporting claw and hand-screwed screws, wherein two small circular through holes with symmetrical centers are formed in the pressing cover; the middle part of the lower surface of the gland is provided with an embedding part, the surface of the embedding part is provided with a groove, the embedding part is embedded into a motor accommodating cavity on the first base body in a matching manner, the middle part of the lower surface of the gland is provided with a circular groove, and the circular groove is arranged in a matching manner with the upper end of a rotating shaft of the motor; a rectangular bulge is arranged on the lower surface of the gland close to the embedded part and corresponds to the upper cavity of the convex cavity of the first base body; the second base body comprises an edge part and an insertion part, the edge part is arranged corresponding to the edge groove, the insertion part is inserted into the convex cavity, and the width of the rectangular protrusion is equal to the sum of the widths of the insertion part, the power receiving sheet and the electrode sheet of the second base body; an arc-shaped bulge is arranged at the edge of the lower surface of the gland and corresponds to the edge groove, an arched door-shaped bulge is arranged at the other side of the lower surface of the gland along the circumferential direction, and the arched door-shaped bulge corresponds to the gland fixing opening; the supporting claws are four and are distributed at intervals along the circumferential direction of the gland, the upper ends of the supporting claws are connected with the gland, and the lower ends of the supporting claws are supported on the glass plate. The gland supports on the glass board through a plurality of support claws, and the rectangle arch is installed in protruding type cavity upper chamber, and the rectangle arch is located the inserting part of second base member, connects the top of electric piece and electrode piece, and arched door shape arch has the effect of fixed gland.
As a further improvement of the invention, the atomizing assembly comprises a motor and an atomizing disc, wherein a rotating shaft is arranged on the motor, two electric connecting pieces which are correspondingly distributed on the left and right are arranged on the motor, the two electric connecting pieces are respectively contacted with an anode electrode piece and a cathode electrode piece, the atomizing disc comprises an upper taper sleeve and a lower accommodating cavity, the taper sleeve comprises an annular upper disc body and a sleeve-shaped atomizing part, the cross-sectional area of the atomizing part is gradually reduced from top to bottom, a plurality of circular teeth which are uniformly distributed along the circumferential direction are arranged on the inner walls of the upper disc body and the atomizing part of the taper sleeve, an inclined atomizing groove is formed between any two adjacent circular teeth, and an opening of the atomizing groove is arranged downwards; the atomizing disk is provided with a connecting shaft sleeve corresponding to the motor, and the connecting shaft sleeve is connected with a rotating shaft of the motor through a pin. The connecting shaft sleeve is provided with a hole corresponding to the rotating shaft and is connected with the rotating shaft in a matched mode through a pin, the motor drives the atomizing disc to rotate through the rotating shaft, the atomizing disc contains raw materials to be atomized, when the motor is started, the rotating shaft drives the atomizing disc to rotate, liquid in the containing cavity is sprayed out of the atomizing groove under the action of centrifugal force, and the liquid is atomized into small liquid drops.
As a further improvement of the invention, the quick release structure comprises a second base body, a connecting module and a conveying module, wherein two electrode plates are arranged on the second base body, and are respectively a positive electrode and a negative electrode; the second base body is provided with a threaded hole; the connecting module comprises a first connecting pipe, airtight fillers, a long pipe, a hoop and a second connecting pipe, wherein an external thread is arranged at one end of the first connecting pipe corresponding to the second base body, the first connecting pipe is connected with the inner wall of a threaded hole of the second base body through the external thread, the other end of the first connecting pipe is connected with one end of the long pipe through the hoop, the other end of the long pipe is connected with the second connecting pipe through the hoop, and the first connecting pipe is internally provided with a plurality of airtight fillers; the conveying module comprises a liquid inlet pipe and electric wires, a base body hole communicated with the threaded hole is formed in the second base body, the base body hole penetrates through the second base body downwards, the liquid inlet pipe penetrates through the connecting module to enter the threaded hole, then penetrates out of the base body hole of the second base body and enters the liquid inlet, the liquid inlet pipe penetrating out of the liquid inlet is arranged corresponding to the atomizing disc, the electric wires are provided with two ends, one ends of the two electric wires are respectively connected with an anode electrode plate and a cathode electrode plate, and the other ends of the two electric wires penetrate through the connecting module and are connected with the anode and the cathode of the external power supply. The liquid inlet pipe penetrates through the connecting module and penetrates out of the threaded hole of the second base body to be connected into the liquid inlet, so that raw materials enter the atomizing disc; the connecting module is used for connecting the outside and the atomizing device, simultaneously preventing outside air from entering the vacuum cavity and ensuring the tightness of the vacuum cavity, and the two ends of the long pipe of the connecting module are respectively connected with the first connecting pipe and the second connecting pipe through clamps to prevent the outside air from entering the vacuum cavity; and a plurality of airtight fillers are placed in the first connecting pipe, and only the liquid inlet pipe and the two electric wires are allowed to pass through the first connecting pipe, so that a vacuum-sealed space is formed.
As a further improvement of the invention, the arc-shaped bulge and the rectangular bulge clamp the edge part of the second base body together, the small round hole on the gland is arranged corresponding to the groove, the outer part of the first base body is columnar, and the gland is fixedly connected with the first base body through a hand-screwed screw. The arc-shaped protrusion and the rectangular protrusion clamp the edge part of the second base body together in the middle to stably position the second base body, and the first base body is a main body for accommodating, connecting and positioning all parts of the atomization device.
As a further improvement of the invention, the diameter of the large circular through hole is smaller than the length of the motor accommodating cavity, the depth of the large circular through hole is equal to the height of the connecting shaft sleeve, and the connecting shaft sleeve and the large circular through hole are arranged correspondingly.
As a further improvement of the invention, the connecting module connects the outside with the atomizing device. The connecting module is used for connecting the outside and the atomizing device so as to prevent outside air from entering the vacuum cavity.
The invention also aims to provide a using method of the atomizing device for the vacuum cavity, which can realize the atomizing operation step in the vacuum cavity.
The purpose of the invention is realized as follows: a use method of an atomization device for a vacuum cavity comprises the following steps:
step one, installing all parts of an atomizing device;
secondly, supporting the atomization device on a glass plate in the vacuum cavity through a supporting claw;
thirdly, the liquid inlet pipe and the electric wire pass through the small hole on the vacuum cavity to be connected with the outside;
step four, introducing a liquid raw material to be atomized into an inlet of the liquid inlet pipe;
and step five, connecting a power supply, and starting the device to work.
As a further improvement of the invention, when the liquid inlet pipe and the electric wire pass through the small hole on the vacuum cavity to be connected with the outside, the second connecting pipe is matched and clamped in the small hole of the vacuum cavity.
Compared with the prior art, the invention has the beneficial effects that: the solution raw materials to be atomized are guided into the accommodating cavity through the liquid inlet pipe, after the power supply is connected, the motor drives the atomizing disc to rotate, the solution enters the atomizing grooves under the action of centrifugal force, and is sprayed out from the edge of the atomizing disc through the atomizing grooves, so that the atomizing process is realized; when a solution raw material to be atomized is introduced and a power supply is connected, the connecting module consisting of the connecting pipe I, the airtight filler, the long pipe, the hoop and the connecting pipe II ensures the airtightness of the vacuum cavity, and the connecting pipe II and the connecting pipe I of the vacuum cavity further prevent external gas from entering the vacuum cavity; the quick-release structure also enables the whole device to be easily disassembled and assembled, and saves the storage space.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic structural view of the upper cover assembly.
Fig. 3 is a schematic structural view of the lower surface of the gland.
Fig. 4 is a schematic structural diagram of the first substrate.
Fig. 5 is a schematic structural diagram of the first substrate.
Fig. 6 is a schematic structural diagram of the atomizing assembly.
Fig. 7 is a partial enlarged view of the inner surface of the atomizing disk.
Fig. 8 is a schematic view of the quick release structure.
FIG. 9 is a schematic view of the connection of the first and second substrates of the connector tube.
Fig. 10 is a front perspective view of the vacuum chamber of the present invention.
FIG. 11 is a rear perspective view of the vacuum chamber of the present invention.
Wherein, 1, an upper cover component, 2, a first substrate, 3, an atomization component, 4, a quick-release structure, 5 small round through holes, 6 press covers, 7 arc-shaped bulges, 8 rectangular bulges, 9 round grooves, 10a embedded parts, 11 arch-shaped bulges, 12 hand screws, 13 supporting claws, 14 press cover fixing openings, 15 motor accommodating cavities, 16 small round holes, 17 convex cavities, 17a upper cavities, 17b lower cavities, 18 liquid inlets, 19 large round through holes, 20 rotating shafts, 21 connecting electric sheets, 22 motors, 23 atomization discs, 24 pins, 25 connecting shaft sleeves, 26 taper sleeves, 26a upper disc body, 26b atomization parts, 27 accommodating cavities, 28 atomization grooves, 29 round teeth, 30 electrode plates, 31 second substrate, 31a edge part, 31b insertion part, 32 conveying modules, 33 connecting modules, 34I, 35 airtight fillers, 36 clamps, 37 long pipe, 38 II, 39 electric wires, 40 liquid inlet pipes, 41 glass plate, 42 vacuum chamber, 43 edge groove.
Detailed Description
As shown in fig. 1-11, an atomizing device for a vacuum chamber includes a top cover assembly 1, a first substrate 2, an atomizing assembly 3, and a quick release structure 4, the top cover assembly 1 is disposed on the first substrate 2, the atomizing assembly 3 is disposed corresponding to the first substrate 2, the quick release structure 4 is connected to the first substrate 2 through a second substrate 31, and the other end of the quick release structure 4 is connected to a liquid to be atomized.
The first substrate 2 is respectively provided with a motor accommodating cavity 27, a convex cavity 17, a large round through hole 19, a liquid inlet 18, a gland fixing port 14 and a small round hole 16; the motor accommodating cavity 27 is rectangular, the motor accommodating cavity 27 is formed in the middle of the first base body 2, and the motor 22 is vertically arranged in the motor accommodating cavity 27; the large circular through hole 19 is correspondingly formed in the first base body 2 below the motor accommodating cavity 27, and the large circular through hole 19 vertically penetrates through the first base body 2; the convex cavity 17 is inverted in a convex shape, the convex cavity 17 comprises an upper cavity 17a and a lower cavity 17b, the length of the upper cavity 17a is greater than that of the lower cavity 17b, the convex cavity 17 is arranged close to the motor accommodating cavity 27, the convex cavity 17 and the second base body 31 are arranged correspondingly, and the edge of the first base body 2 is provided with an edge groove 43 close to the convex cavity 17; the liquid inlet 18 is arranged on the first matrix 2 below the convex cavity 17, the liquid inlet 18 vertically penetrates through the first matrix 2, and the liquid inlet 18 is matched with the liquid inlet pipe 40; the gland fixing port 14 is symmetrically arranged with the lower cavity 17b of the convex cavity 17; at least two small round holes 16 are arranged, and the at least two small round holes 16 are symmetrically arranged at the upper end of the first base body 2. The motor receiving cavity 27 on the first base body 2 is used for mounting the motor 22, and the convex cavity 17 and the edge groove 43 are used for mounting the second base body 31. The first base body 2 is a main body for receiving, connecting and positioning the various parts of the atomizing device.
The upper cover assembly 1 comprises a gland 6, support claws 13 and hand screws 12, wherein the gland 6 is provided with two centrosymmetric small circular through holes 5, the hand screws 12 are two, the two hand screws 12 and the two small circular through holes 5 are arranged in a one-to-one correspondence manner, and the small circular through holes 5 and the small circular holes 16 on the gland 6 are arranged in a corresponding manner; an embedded part 10a is arranged in the middle of the lower surface of the gland 6, a groove 10 is formed in the surface of the embedded part 10a, the embedded part 10a is embedded into a motor accommodating cavity 27 on the first base body 2 in a matching mode, a circular groove 9 is formed in the middle of the lower surface of the gland 6, and the circular groove 9 is arranged in a matching mode with the upper end of a rotating shaft 20 of a motor 22; a rectangular bulge 8 is arranged on the lower surface of the gland 6 close to the embedding part 10a, and the rectangular bulge 8 is arranged corresponding to the cavity 17a on the convex cavity 17 of the first base body 2; the second base 31 comprises an edge part 31a and an insertion part 31b, the edge part 31a is arranged corresponding to the edge groove 43, the insertion part 31b is arranged in the convex cavity 17, and the width of the rectangular protrusion 8 is equal to the sum of the widths of the insertion part 31b of the second base 31, the electric connecting piece 21 and the electrode piece 30; an arc-shaped bulge 7 is arranged at the edge of the lower surface of the gland 6, the arc-shaped bulge 7 is arranged corresponding to the edge groove 43, an arched door-shaped bulge 11 is arranged at the other side of the lower surface of the gland 6 along the circumferential direction, and the arched door-shaped bulge 11 is arranged corresponding to the fixing port of the gland 6; the number of the supporting claws 13 is four, the four supporting claws 13 are distributed at intervals along the circumferential direction of the gland 6, the upper ends of the supporting claws 13 are connected with the gland 6, and the lower ends of the supporting claws 13 are supported on the glass plate 41. The cover 6 is supported on the glass plate 41 by a plurality of support claws 13, the rectangular protrusion 8 is mounted in the cavity 17 of the convex cavity 17, the rectangular protrusion 8 is positioned above the insertion portion 31b of the second base 31, the electric connecting piece 21 and the electrode piece 30, and the arched protrusion 11 has a function of fixing the cover 6. The arc-shaped protrusion 7 and the rectangular protrusion 8 clamp the edge part 31a of the second base body 31 together, the small round hole 16 on the gland 6 is arranged corresponding to the groove 10, the outer part of the first base body 2 is columnar, and the gland 6 is fixedly connected with the first base body 2 through a hand-screwed screw 12. The arc-shaped protrusion 7 and the rectangular protrusion 8 cooperate to sandwich the edge portion 31a of the second base 31 to firmly position the second base 31.
The atomizing assembly 3 comprises a motor 22 and an atomizing disc 23, a rotating shaft 20 is arranged on the motor 22, two electric connecting pieces 21 which are distributed correspondingly left and right are arranged on the motor 22, the two electric connecting pieces 21 are respectively contacted with an anode electrode piece 30 and a cathode electrode piece 30, the atomizing disc 23 comprises an upper taper sleeve 26 and a lower accommodating cavity 27, the taper sleeve 26 comprises an annular upper disc body 26a and a sleeve-shaped atomizing part 26b, the cross-sectional area of the atomizing part 26b is gradually reduced from top to bottom, a plurality of circular teeth 29 which are uniformly distributed along the circumferential direction are arranged on the inner walls of the upper disc body 26a and the atomizing part 26b of the taper sleeve 26, an inclined atomizing groove 28 is formed between any two adjacent circular teeth 29, and the opening of the atomizing groove 28 is arranged downwards; the atomizing disk 23 is provided with a coupling sleeve 25 corresponding to the motor 22, and the coupling sleeve 25 is connected with the rotating shaft 20 of the motor 22 through a pin 24. The connecting shaft sleeve 25 is provided with a hole corresponding to the rotating shaft 20 and is matched and connected through the pin 24, the diameter of the large circular through hole 19 is smaller than the length of the motor accommodating cavity 27, the depth of the large circular through hole 19 is equal to the height of the connecting shaft sleeve 25, the connecting shaft sleeve 25 and the large circular through hole 19 are correspondingly arranged, the motor 22 drives the atomizing disc 23 to rotate through the rotating shaft 20, the atomizing disc 23 accommodates raw materials to be atomized, when the motor 22 is started, the rotating shaft 20 drives the atomizing disc 23 to rotate, and liquid in the accommodating cavity 27 is sprayed out of the atomizing groove 28 under the action of centrifugal force to be atomized into small liquid drops.
The quick release structure 4 comprises a second base 31, a connecting module 33 and a conveying module 32, wherein two electrode plates 30 are arranged on the second base 31, and the two electrode plates 30 are respectively a positive electrode and a negative electrode; a threaded hole is formed in the second base body 31; the connecting module 33 comprises a first connecting pipe 34, airtight fillers 35, a long pipe 37, a clamp 36 and a second connecting pipe 38, wherein external threads are arranged at one end of the first connecting pipe 34 corresponding to the second base body 31, the first connecting pipe 34 is connected with the inner wall of a threaded hole of the second base body 31 through the external threads, the other end of the first connecting pipe 34 is connected with one end of the long pipe 37 through the clamp 36, the other end of the long pipe 37 is connected with the second connecting pipe 38 through the clamp 36, and the airtight fillers 35 are placed in the first connecting pipe 34; the connection module 33 connects the outside with the atomization device. The connection module 33 is a connection module 33 for connecting the outside and the atomization device to prevent the outside air from entering the vacuum chamber 42; the conveying module 32 comprises a liquid inlet pipe 40 and two electric wires 39, a substrate hole communicated with the threaded hole is formed in the second substrate 31, the substrate hole penetrates through the second substrate 31 downwards, the liquid inlet pipe 40 penetrates through the connecting module 33 to enter the threaded hole, penetrates out of the substrate hole of the second substrate 31 and enters the liquid inlet 18, the liquid inlet pipe 40 penetrating out of the liquid inlet 18 is arranged corresponding to the atomizing disc 23, one end of each of the two electric wires 39 is connected with the positive electrode plate 30 and the negative electrode plate 30, and the other end of each of the two electric wires 39 penetrates through the connecting module 33 and is connected with the positive electrode and the negative electrode of the external power supply. The liquid inlet pipe 40 penetrates through the connecting module 33 and penetrates out of the threaded hole of the second base body 31 to be connected to the liquid inlet 18, so that raw materials enter the atomizing disc 23; the connection module 33 is used for connecting the outside and the connection module 33 of the atomization device, and simultaneously preventing outside air from entering the vacuum cavity 42, so that the tightness of the vacuum cavity 42 is ensured, two ends of the long pipe 37 of the connection module 33 are respectively connected with the first connecting pipe 34 and the second connecting pipe 38 through the clamp 36, and the outside air is prevented from entering the vacuum cavity 42; a plurality of airtight packings 35 are placed in the first connecting pipe 34 to allow only the liquid inlet pipe 40 and the two electric wires 39 to pass therethrough, thereby forming a vacuum-sealed space.
The invention has the advantages that: the atomizing device is used for atomizing in the vacuum cavity 42, the upper cover assembly 1 is convenient to install and arrange the atomizing assembly 3 and the quick-release structure 4, the first base body 2 is a foundation for installing and positioning other components, the atomizing assembly 3 is a part for atomizing the atomizing device, and the quick-release structure 4 is arranged to connect the atomizing device with the outside and prevent outside air from entering the sealed vacuum cavity 42.
The invention discloses a using method of an atomizing device for a vacuum cavity, which comprises the following steps:
step one, installing all parts of an atomizing device;
secondly, supporting the atomization device on the glass plate 41 in the vacuum cavity 42 through the supporting claws 13;
thirdly, the liquid inlet pipe 40 and the electric wire 39 pass through the small hole on the vacuum cavity 42 to be connected with the outside; when the liquid inlet pipe 40 and the electric wire 39 pass through the small hole on the vacuum cavity 42 and are connected with the outside, the second connecting pipe 38 is clamped into the small hole of the vacuum cavity 42 in a matching manner;
step four, introducing a liquid raw material to be atomized into an inlet of the liquid inlet pipe 40;
and step five, connecting a power supply, and starting the device to work.
The invention has the advantages that: the raw material of the solution to be atomized is led into the accommodating cavity 27 through the liquid inlet pipe 40, after the power supply is switched on, the motor 22 drives the atomizing disc 23 to rotate, the solution enters the atomizing grooves 28 under the action of centrifugal force, and is sprayed out from the edge of the atomizing disc 23 through each atomizing groove 28, so that the atomizing process is realized; when the solution raw material to be atomized is introduced and the power supply is connected, the connecting module 33 consisting of the connecting pipe I34, the airtight filler 35, the long pipe 37, the clamp 36 and the connecting pipe II 38 ensures the tightness of the vacuum cavity 42, and the connecting pipe II 38 and the connecting pipe I34 of the vacuum cavity 42 further prevent the external gas from entering the vacuum cavity 42; the quick-release structure 4 also enables the whole device to be easily disassembled and assembled, and saves the storage space.
The present invention is not limited to the above-mentioned embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some technical features without creative efforts according to the disclosed technical contents, and these substitutions and modifications are all within the protection scope of the present invention.
Claims (10)
1. The utility model provides an atomizing device for vacuum cavity, its characterized in that includes upper cover subassembly, first base member, atomization component and quick detach structure, the upper cover subassembly sets up on first base member upper portion, atomization component sets up with first base member is corresponding, quick detach structure is connected with first base member through the second base member, and quick detach structure's the other end is connected with the liquid of waiting to atomize.
2. The atomizing device for a vacuum chamber according to claim 1, wherein the first base body is provided with a motor accommodating cavity, a convex cavity, a large circular through hole, a liquid inlet, a gland fixing port and a small circular hole; the motor accommodating cavity is rectangular, the motor accommodating cavity is formed in the middle of the first base body, and a motor is vertically arranged in the motor accommodating cavity; the large circular through hole is correspondingly formed in the first base body below the motor accommodating cavity and vertically penetrates through the first base body; the convex cavity is in an inverted convex shape and comprises an upper cavity and a lower cavity, the length of the upper cavity is greater than that of the lower cavity, the convex cavity is arranged close to the motor accommodating cavity and corresponds to the second base body, and the edge of the first base body is provided with an edge groove close to the convex cavity; the liquid inlet is formed in the first base body below the convex cavity, the liquid inlet vertically penetrates through the first base body, and the liquid inlet is matched with the liquid inlet pipe; the gland fixing port and the lower cavity of the convex cavity are symmetrically arranged; the small round holes are provided with at least two and symmetrically arranged at the upper end of the first base body.
3. The atomizing device for a vacuum chamber according to claim 2, wherein the upper cover assembly comprises a pressing cover, a supporting claw and two hand screws, two small circular through holes are formed in the pressing cover, the two small circular through holes are arranged symmetrically, the two hand screws are arranged in a one-to-one correspondence manner, and the small circular through holes are arranged in the pressing cover in a correspondence manner; the middle part of the lower surface of the gland is provided with an embedding part, the surface of the embedding part is provided with a groove, the embedding part is embedded into a motor accommodating cavity on the first base body in a matching manner, the middle part of the lower surface of the gland is provided with a circular groove, and the circular groove is arranged in a matching manner with the upper end of a rotating shaft of the motor; a rectangular bulge is arranged on the lower surface of the gland close to the embedded part and corresponds to the upper cavity of the convex cavity of the first base body; the second base body comprises an edge part and an insertion part, the edge part is arranged corresponding to the edge groove, the insertion part is inserted into the convex cavity, and the width of the rectangular protrusion is equal to the sum of the widths of the insertion part, the power receiving sheet and the electrode sheet of the second base body; an arc-shaped bulge is arranged at the edge of the lower surface of the gland and corresponds to the edge groove, an arched door-shaped bulge is arranged at the other side of the lower surface of the gland along the circumferential direction, and the arched door-shaped bulge corresponds to the gland fixing opening; the supporting claws are four and are distributed at intervals along the circumferential direction of the gland, the upper ends of the supporting claws are connected with the gland, and the lower ends of the supporting claws are supported on the glass plate.
4. The atomizing device for the vacuum chamber according to claim 3, wherein the atomizing assembly comprises a motor and an atomizing disk, the motor is provided with a rotating shaft, the motor is provided with two electric connecting pieces which are correspondingly distributed on the left and right, the two electric connecting pieces are respectively contacted with an anode electrode piece and a cathode electrode piece, the atomizing disk comprises an upper taper sleeve and a lower accommodating cavity, the taper sleeve comprises an annular upper disk body and a sleeve-shaped atomizing part, the cross-sectional area of the atomizing part is gradually reduced from top to bottom, a plurality of circular teeth which are uniformly distributed along the circumferential direction are arranged on the upper disk body of the taper sleeve and the inner wall of the atomizing part, an inclined atomizing groove is formed between any two adjacent circular teeth, and the opening of the atomizing groove faces downwards; the atomizing disk is provided with a connecting shaft sleeve corresponding to the motor, and the connecting shaft sleeve is connected with a rotating shaft of the motor through a pin.
5. The atomizing device for the vacuum chamber according to claim 4, wherein the quick release structure comprises a second base, a connecting module and a conveying module, two electrode plates are arranged on the second base, and the two electrode plates are respectively a positive electrode and a negative electrode; the second base body is provided with a threaded hole; the connecting module comprises a first connecting pipe, airtight fillers, a long pipe, a hoop and a second connecting pipe, wherein an external thread is arranged at one end of the first connecting pipe corresponding to the second base body, the first connecting pipe is connected with the inner wall of a threaded hole of the second base body through the external thread, the other end of the first connecting pipe is connected with one end of the long pipe through the hoop, the other end of the long pipe is connected with the second connecting pipe through the hoop, and the first connecting pipe is internally provided with a plurality of airtight fillers; the conveying module comprises a liquid inlet pipe and electric wires, a base body hole communicated with the threaded hole is formed in the second base body, the base body hole penetrates through the second base body downwards, the liquid inlet pipe penetrates through the connecting module to enter the threaded hole, then penetrates out of the base body hole of the second base body and enters the liquid inlet, the liquid inlet pipe penetrating out of the liquid inlet is arranged corresponding to the atomizing disc, the electric wires are provided with two ends, one ends of the two electric wires are respectively connected with an anode electrode plate and a cathode electrode plate, and the other ends of the two electric wires penetrate through the connecting module and are connected with the anode and the cathode of the external power supply.
6. The atomizing device for a vacuum chamber according to claim 5, wherein the arc-shaped protrusion and the rectangular protrusion together clamp the edge of the second substrate in the middle, the small circular hole of the pressing cover is disposed corresponding to the groove, the outer portion of the first substrate is cylindrical, and the pressing cover is fixedly connected to the first substrate by a hand screw.
7. The atomizing device for the vacuum chamber according to claim 5, wherein the diameter of the large circular through hole is smaller than the length of the motor accommodating chamber, the depth of the large circular through hole is equal to the height of the coupling sleeve, and the coupling sleeve is arranged corresponding to the large circular through hole.
8. The atomizing device for the vacuum chamber according to claim 5, wherein the connecting module connects the outside to the atomizing device.
9. Use of an atomising device for a vacuum chamber according to any of the claims 1-8, characterized in that it comprises the following steps:
step one, installing all parts of an atomizing device;
secondly, supporting the atomization device on a glass plate in the vacuum cavity through a supporting claw;
thirdly, the liquid inlet pipe and the electric wire pass through the small hole on the vacuum cavity to be connected with the outside;
step four, introducing a liquid raw material to be atomized into an inlet of the liquid inlet pipe;
and step five, connecting a power supply, and starting the device to work.
10. The use method of the atomizing device for the vacuum chamber as claimed in claim 9, wherein the second connecting pipe is engaged with the small hole of the vacuum chamber when the liquid inlet pipe and the electric wire are connected to the outside through the small hole of the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110870261.9A CN113718236A (en) | 2021-07-30 | 2021-07-30 | Atomization device for vacuum cavity and use method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110870261.9A CN113718236A (en) | 2021-07-30 | 2021-07-30 | Atomization device for vacuum cavity and use method thereof |
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| JP2016190173A (en) * | 2015-03-30 | 2016-11-10 | 株式会社Flosfia | Atomizer and deposition system |
| CN107051787A (en) * | 2017-06-21 | 2017-08-18 | 广州优吸环保科技有限公司 | A kind of atomising device equipment |
| CN109440083A (en) * | 2018-12-25 | 2019-03-08 | 重庆理工大学 | It is atomized assisted CVD membrane deposition method |
| CN112981614A (en) * | 2019-12-13 | 2021-06-18 | 南京源昌新材料有限公司 | Reaction device for quickly producing carbon nano tube fibers |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016190173A (en) * | 2015-03-30 | 2016-11-10 | 株式会社Flosfia | Atomizer and deposition system |
| CN107051787A (en) * | 2017-06-21 | 2017-08-18 | 广州优吸环保科技有限公司 | A kind of atomising device equipment |
| CN109440083A (en) * | 2018-12-25 | 2019-03-08 | 重庆理工大学 | It is atomized assisted CVD membrane deposition method |
| CN112981614A (en) * | 2019-12-13 | 2021-06-18 | 南京源昌新材料有限公司 | Reaction device for quickly producing carbon nano tube fibers |
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