CN113714954A - Device for clamping silicon wafer in visual detection process of silicon wafer - Google Patents
Device for clamping silicon wafer in visual detection process of silicon wafer Download PDFInfo
- Publication number
- CN113714954A CN113714954A CN202111097158.1A CN202111097158A CN113714954A CN 113714954 A CN113714954 A CN 113714954A CN 202111097158 A CN202111097158 A CN 202111097158A CN 113714954 A CN113714954 A CN 113714954A
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- China
- Prior art keywords
- silicon wafer
- seat
- driving
- wafer
- connecting seat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/10—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting holders for tool or work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a device for clamping a silicon wafer in the visual detection process of the silicon wafer, which belongs to the technical field of silicon wafer production and comprises a turntable, an adjusting column, a mounting seat and a clamping mechanism, wherein a driving mechanism for adjusting the position of the adjusting column is arranged in the turntable, a hydraulic device is arranged in the adjusting column, the telescopic end of the hydraulic device penetrates through the adjusting column and is connected with the mounting seat, the clamping mechanism comprises two fixing seats, a left connecting seat, a right connecting seat, a driving seat and a connecting mechanism, the left connecting seat and the right connecting seat are connected with the mounting seat close to each other through bearings, the invention can lead the silicon wafer to pass through between the two fixing seats, be inserted into a groove in the driving seat and the connecting seat, simultaneously drive the silicon wafer to rotate through rotating the connecting seat, observe the surface of the silicon wafer, and simultaneously drive a rubber driving roller to rotate through a motor I so as to drive the silicon wafer to rotate, the corner of the silicon wafer is conveniently inspected by visual inspection, and the silicon wafer is inspected in an all-round mode.
Description
Technical Field
The invention relates to the technical field of silicon wafer production, in particular to a device for clamping a silicon wafer in the visual detection process of the silicon wafer.
Background
With the rapid development of the information age, the demand of society for electronic chips is rapidly increasing, and meanwhile, the quality requirements of people for raw material silicon wafers for manufacturing chips are higher and higher.
Defects including edge breakage, scratches, cracks and the like can be generated on the silicon wafer in the production and manufacturing process of the silicon wafer, and the defects bring great risks to further downstream production and utilization, so that the silicon wafer is very important for carrying out all-around inspection on the silicon wafer. Visual inspection is an important defect detection method, and the method is characterized in that light beams generated by a high-intensity light lamp are irradiated to the surface of a silicon wafer, and meanwhile, the surface and the area illuminated by the light beams in the edge part of the silicon wafer are visually inspected by human eyes to see whether the surface is smooth, whether the edge and corner cut is flat or not and whether the edge and corner are broken or not so as to intercept the defective silicon wafer.
In the process of visual detection, the clamping device is often used for clamping the silicon wafer, and the corners of the silicon wafer need to be clamped when the silicon wafer is clamped by the conventional clamping device, so that visual inspection generates blind zones, and omnibearing detection of the silicon wafer cannot be realized.
Disclosure of Invention
The invention aims to provide a device for clamping a silicon wafer in the process of visual detection of the silicon wafer, which aims to solve the problems that the corners of the silicon wafer are clamped, a blind area is generated by visual detection, and the silicon wafer cannot be detected in all directions.
In order to achieve the purpose, the invention provides the following technical scheme: a device for clamping a silicon wafer in the visual detection process of the silicon wafer comprises a turntable, an adjusting column, a mounting seat and a clamping mechanism, wherein a driving mechanism for adjusting the position of the adjusting column is arranged in the turntable, and a hydraulic device is arranged in the adjusting column, the telescopic end of the hydraulic device penetrates through the adjusting column and is connected with the mounting seat, the clamping mechanism comprises two fixed seats, a left connecting seat, a right connecting seat, a driving seat and a connecting mechanism, wherein the left connecting seat and the right connecting seat are connected with the adjacent mounting seats through bearings, the left connecting seat and the right connecting seat are connected with the two fixed seats and the driving seat through the connecting mechanism, and the fixed seat, the connecting seat and the driving seat are all screwed with a screw rod, one end of the screw rod is connected with the limiting pad through a bearing, the connecting seat and the driving seat are both provided with grooves capable of containing silicon wafers, and a rubber driving roller and a first motor are arranged in the driving seat, and a driving shaft of the rubber driving roller is connected with an output shaft of the first motor through a belt.
Preferably, the connecting mechanism comprises an arc-shaped frame and an arc-shaped sleeve body, a first movable groove capable of accommodating the arc-shaped frame in a sliding manner is formed in the arc-shaped sleeve body, a convex block is arranged on the arc-shaped frame, and a limit groove capable of accommodating the convex block is formed in the arc-shaped sleeve body.
Preferably, the driving mechanism comprises a second motor and a lead screw, an output shaft of the second motor is connected with one end of the lead screw, the other end of the lead screw is connected with the inner wall of the turntable through a bearing, a second movable groove capable of accommodating the movement of the adjusting column is formed in the turntable, and the bottom of the adjusting column penetrates through the second movable groove and is in threaded connection with the lead screw.
Preferably, the carousel bottom is equipped with the base, and is equipped with motor three and rotation post in the base, the one end and the carousel of rotation post are connected, and the other end that rotates the post passes through bearing and base inner wall connection, be equipped with driven fluted disc on the rotation post outer wall, and the output shaft and the initiative fluted disc of motor three are connected, initiative fluted disc and driven fluted disc meshing.
Preferably, the limiting pad is a sponge limiting pad, and the other end of the screw rod is connected with the adjusting disc.
Preferably, a third movable groove capable of accommodating the spring and the lug is formed in the arc frame, and two ends of the spring are connected with the lug respectively.
Preferably, a sponge protection pad is arranged on the inner wall of the groove.
Preferably, the outer wall of the rubber driving roller is provided with a lubricating layer.
Compared with the prior art, the invention has the beneficial effects that:
1) according to the invention, the silicon wafer can penetrate between the two fixing seats and is inserted into the grooves in the driving seat and the connecting seat, the connecting seat is rotated to drive the silicon wafer to rotate, the surface of the silicon wafer is observed, and the rubber driving roller can be driven to rotate by the first motor, so that the silicon wafer is driven to rotate, the corner of the silicon wafer can be conveniently inspected visually, and the silicon wafer can be inspected comprehensively.
2) According to the silicon wafer positioning device, the rotation of the silicon wafer can be realized through the turntable, two surfaces of the silicon wafer can be conveniently checked, the screw rod can drive the limiting pad to move, the limiting pad can limit the silicon wafer when contacting with the silicon wafer, the silicon wafer is prevented from being damaged due to collision between the silicon wafer and the inner wall of the groove, and the silicon wafer positioning device has a good protection effect.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the driving mechanism of the present invention;
FIG. 3 is a perspective view of the fixing base of the present invention;
FIG. 4 is a perspective view of the connecting base of the present invention;
FIG. 5 is a schematic view of the internal structure of the driving seat of the present invention.
In the figure: the device comprises a base 1, a turntable 2, an adjusting column 3, a mounting seat 4, a connecting seat 5, a fixing seat 6, a driving seat 7, an arc-shaped frame 8, an arc-shaped sleeve body 9, a silicon wafer 10, a bump 11, a limiting groove 12, an adjusting disc 13, a motor III 14, a driving fluted disc 15, a driven fluted disc 16, a rotating column 17, a screw rod 18, a limiting pad 19, a groove 20, a motor I21, a rubber driving roller 22 and a motor II 23.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Example (b):
referring to fig. 1-5, the present invention provides a technical solution: a device for clamping a silicon wafer in the visual detection process of the silicon wafer comprises a rotary table 2, an adjusting column 3, a mounting seat 4 and a clamping mechanism, wherein a driving mechanism for adjusting the position of the adjusting column 3 is arranged in the rotary table 2, the driving mechanism can drive the adjusting column 3 to move, a hydraulic device is arranged in the adjusting column 3, the telescopic end of the hydraulic device penetrates through the adjusting column 3 and is connected with the mounting seat 4, the hydraulic device can drive the mounting seat 4 to ascend or descend, the clamping mechanism comprises two fixing seats 6, a left connecting seat 5, a right connecting seat 5, a driving seat 7 and a connecting mechanism, the left connecting seat 5 and the right connecting seat 5 are connected with the mounting seat 4 close to each other through bearings, a connecting block is arranged in the mounting seat 4 and is connected with the bearings, the connecting blocks can be detached from the mounting seat 4, the left connecting seat 5 and the right connecting seat 5 are connected with the two fixing seats 6 and the driving seat 7 through the connecting mechanism, and equal spiro union has the screw rod in fixing base 6, connecting seat 5 and the drive seat 7, the one end of screw rod is passed through the bearing and is connected with spacing pad 19, can drive spacing pad 19 through the screw rod and remove, can carry on spacingly to silicon chip 10 when spacing pad 19 contacts with silicon chip 10, prevents that silicon chip 10 from producing the collision with recess 20 inner wall and causing silicon chip 10 to damage, all set up recess 20 that can hold silicon chip 10 in connecting seat 5 and the drive seat 7, and be equipped with rubber drive roller 22 and motor 21 in the drive seat 7, the drive shaft of rubber drive roller 22 passes through the belt with the output shaft of motor 21 and is connected, and motor 21 can drive rubber drive roller 22 and rotate to drive silicon chip 10 and rotate, conveniently carry out the visual inspection to the corner of silicon chip 10.
Coupling mechanism includes arc frame 8 and arc cover body 9, and sets up in the arc cover body 9 and can hold the gliding movable groove of arc frame 8, be equipped with lug 11 on the arc frame 8, and set up the spacing groove 12 that can hold lug 11 in the arc cover body 9, actuating mechanism includes two 23 motors and lead screw 18, the output shaft of two 23 motors is connected with the one end of lead screw 18, the other end of lead screw 18 passes through bearing and 2 interior wall connections of carousel, set up on the carousel 2 and can hold the movable groove two that adjust 3 activities of post, and adjust 3 bottoms of post and pass two spiro unions of movable groove on lead screw 18, two 23 motors drive lead screw 18 and rotate, and lead screw 18 rotates and drives and adjust 3 removals of post, adjusts the interval between the post 3.
The bottom of the turntable 2 is provided with a base 1, a motor III 14 and a rotating column 17 are arranged in the base 1, one end of the rotating column 17 is connected with the turntable 2, the other end of the rotating column 17 is connected with the inner wall of the base 1 through a bearing, a driven fluted disc 16 is arranged on the outer wall of the rotating column 17, an output shaft of the motor III 14 is connected with a driving fluted disc 15, the driving fluted disc 15 is meshed with the driven fluted disc 16, the motor III 14 drives the driving fluted disc 15 to rotate, the driving fluted disc 15 drives the rotating column 17 to rotate through the driven fluted disc 16, the rotating column 17 drives the turntable 2 to rotate, two surfaces of the silicon wafer 10 are conveniently checked, the limiting pad 19 is a sponge limiting pad, the surface of the silicon wafer 10 is prevented from being scratched, the other end of the screw is connected with an adjusting disc 13, a movable groove III capable of accommodating the spring and the lug 11 is arranged in the arc-shaped frame 8, and two ends of the spring are respectively connected with the lug 11, press lug 11 on the arc frame 8 for the spring shrink to insert arc frame 8 in the arc cover body 9, make lug 11 card establish in spacing groove 12, make coupling mechanism's internal diameter diminish, be equipped with the sponge protection pad on the recess 20 inner wall, played the effect of protection, be equipped with the lubricant film on the outer wall of rubber drive roller 22.
The working principle is as follows: the silicon wafer 10 penetrates between the two fixing seats 6 and is inserted into the driving seat 7 and the groove 20 in the connecting seat 5, the connecting seat 5 is rotated to drive the silicon wafer 10 to rotate, the surface of the silicon wafer 10 is observed, the first motor 21 can drive the rubber driving roller 22 to rotate, so as to drive the silicon wafer 10 to rotate, the corner of the silicon wafer 10 is convenient to visually inspect, the third motor 14 works to drive the driving fluted disc 15 to rotate, the driving fluted disc 15 drives the rotating column 17 to rotate through the driven fluted disc 16, the rotating column 17 drives the rotating disc 2 to rotate, so as to facilitate the inspection of two surfaces of the silicon wafer 10, the limiting pad 19 can be driven to move through a screw, the limiting pad 19 can limit the silicon wafer 10 when contacting with the silicon wafer 10, the silicon wafer 10 is prevented from being damaged due to the collision between the silicon wafer 10 and the inner wall of the groove 20, when the size of the silicon wafer 10 is small, the connecting seat 5 can be detached from the mounting seat 4, the convex block 11 on the arc-shaped frame 8 is pressed, make the spring shrink to insert arc frame 8 in the arc cover body 9, make lug 11 card establish in spacing groove 12, make coupling mechanism's internal diameter diminish, conveniently carry out the centre gripping to silicon chip 10, the internal diameter diminishes the back, drives lead screw 18 through two 23 motors and rotates, and lead screw 18 rotates and drives and adjust post 3 and remove, adjusts the interval between the post 3, and can use on mount pad 4 with connecting seat 5 installation.
While there have been shown and described the fundamental principles and essential features of the invention and advantages thereof, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof; the present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a device for be arranged in silicon chip visual detection process centre gripping silicon chip, includes carousel (2), adjusts post (3), mount pad (4) and fixture, its characterized in that: a driving mechanism used for adjusting the position of the adjusting column (3) is arranged in the turntable (2), a hydraulic device is arranged in the adjusting column (3), the telescopic end of the hydraulic device penetrates through the adjusting column (3) and is connected with the mounting seat (4), the clamping mechanism comprises two fixing seats (6), a left connecting seat (5), a right connecting seat (5), a driving seat (7) and a connecting mechanism, the left connecting seat (5) and the right connecting seat (5) are connected with the mounting seat (4) close to each other through bearings, the left connecting seat (5) and the right connecting seat (5) are connected with the two fixing seats (6) and the driving seat (7) through the connecting mechanism, screw rods are screwed in the fixing seats (6), the connecting seats (5) and the driving seat (7), one end of each screw rod is connected with a limiting cushion (19) through a bearing, grooves (20) capable of containing silicon wafers (10) are formed in the connecting seats (5) and the driving seat (7), and a rubber driving roller (22) and a first motor (21) are arranged in the driving seat (7), and a driving shaft of the rubber driving roller (22) is connected with an output shaft of the first motor (21) through a belt.
2. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 1, wherein: the connecting mechanism comprises an arc-shaped frame (8) and an arc-shaped sleeve body (9), a first movable groove capable of accommodating the arc-shaped frame (8) in a sliding mode is formed in the arc-shaped sleeve body (9), a convex block (11) is arranged on the arc-shaped frame (8), and a limit groove (12) capable of accommodating the convex block (11) is formed in the arc-shaped sleeve body (9).
3. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 1, wherein: the driving mechanism comprises a second motor (23) and a lead screw (18), an output shaft of the second motor (23) is connected with one end of the lead screw (18), the other end of the lead screw (18) is connected with the inner wall of the turntable (2) through a bearing, a second movable groove capable of accommodating the movement of the adjusting column (3) is formed in the turntable (2), and the bottom of the adjusting column (3) penetrates through the second movable groove to be connected onto the lead screw (18) in a threaded mode.
4. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 1, wherein: carousel (2) bottom is equipped with base (1), and is equipped with three (14) of motor and rotation post (17) in base (1), the one end that rotates post (17) is connected with carousel (2), and the other end that rotates post (17) passes through bearing and base (1) inner wall connection, be equipped with driven fluted disc (16) on rotation post (17) outer wall, and the output shaft of three (14) of motor is connected with driving fluted disc (15), driving fluted disc (15) and driven fluted disc (16) meshing.
5. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 1, wherein: the limiting pad (19) is a sponge limiting pad, and the other end of the screw rod is connected with the adjusting disc (13).
6. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 2, wherein: a movable groove III capable of accommodating the spring and the bump (11) is formed in the arc-shaped frame (8), and two ends of the spring are connected with the bump (11) respectively.
7. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 1, wherein: and a sponge protection pad is arranged on the inner wall of the groove (20).
8. An apparatus for holding a wafer during visual inspection of the wafer as recited in claim 1, wherein: and a lubricating layer is arranged on the outer wall of the rubber driving roller (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111097158.1A CN113714954A (en) | 2021-09-18 | 2021-09-18 | Device for clamping silicon wafer in visual detection process of silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111097158.1A CN113714954A (en) | 2021-09-18 | 2021-09-18 | Device for clamping silicon wafer in visual detection process of silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113714954A true CN113714954A (en) | 2021-11-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111097158.1A Pending CN113714954A (en) | 2021-09-18 | 2021-09-18 | Device for clamping silicon wafer in visual detection process of silicon wafer |
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| Country | Link |
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| CN (1) | CN113714954A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2072545A (en) * | 1980-03-24 | 1981-10-07 | Gersan Ets | Self-clamping jig |
| CN206410866U (en) * | 2017-01-05 | 2017-08-15 | 安徽省尚展模具工业有限公司 | A kind of automobile front beam detection means |
| CN210834779U (en) * | 2019-09-27 | 2020-06-23 | 天津市首通工程检测技术有限公司 | Pressure vessel defect detection device |
| CN211565127U (en) * | 2019-12-03 | 2020-09-25 | 湖南万龙机械有限公司 | Adjustable fixture for lathe machining |
| CN211877315U (en) * | 2020-05-26 | 2020-11-06 | 无锡恒玖机械科技有限公司 | Product appearance defect detection equipment |
| CN213106288U (en) * | 2020-07-24 | 2021-05-04 | 湖北联乐床具集团有限公司 | Sofa production is with frock for polishing |
-
2021
- 2021-09-18 CN CN202111097158.1A patent/CN113714954A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2072545A (en) * | 1980-03-24 | 1981-10-07 | Gersan Ets | Self-clamping jig |
| CN206410866U (en) * | 2017-01-05 | 2017-08-15 | 安徽省尚展模具工业有限公司 | A kind of automobile front beam detection means |
| CN210834779U (en) * | 2019-09-27 | 2020-06-23 | 天津市首通工程检测技术有限公司 | Pressure vessel defect detection device |
| CN211565127U (en) * | 2019-12-03 | 2020-09-25 | 湖南万龙机械有限公司 | Adjustable fixture for lathe machining |
| CN211877315U (en) * | 2020-05-26 | 2020-11-06 | 无锡恒玖机械科技有限公司 | Product appearance defect detection equipment |
| CN213106288U (en) * | 2020-07-24 | 2021-05-04 | 湖北联乐床具集团有限公司 | Sofa production is with frock for polishing |
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Application publication date: 20211130 |
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| RJ01 | Rejection of invention patent application after publication |