CN113713567B - Cracking tower for preparing high-purity nitrogen trifluoride - Google Patents
Cracking tower for preparing high-purity nitrogen trifluoride Download PDFInfo
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- CN113713567B CN113713567B CN202110922464.8A CN202110922464A CN113713567B CN 113713567 B CN113713567 B CN 113713567B CN 202110922464 A CN202110922464 A CN 202110922464A CN 113713567 B CN113713567 B CN 113713567B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/06—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/104—Alumina
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Abstract
The invention provides a cracking tower for preparing high-purity nitrogen trifluoride, wherein two gas hoods which are opposite up and down are arranged at the lower part of the outer side of the cracking tower, a filtering pipe is locked and communicated between the two gas hoods which are opposite up and down, a liner for filling active aluminum particles is fixedly arranged in the filtering pipe, a stirring mechanism for stirring the active aluminum particles is arranged in the liner, and the stirring mechanism is driven by a driving mechanism to stir the active aluminum particles. According to the invention, the sliding frame in the stirring mechanism is adopted to stir the active aluminum particles, so that the active aluminum particles are fully contacted with the passing nitrogen trifluoride gas, impurities in the gas are fully adsorbed, and the purity of the nitrogen trifluoride gas is improved.
Description
Technical Field
The invention belongs to the technical field of cracking towers, and particularly relates to a cracking tower for preparing high-purity nitrogen trifluoride.
Background
In crude nitrogen trifluoride NF 3 The gas contains a component having a boiling point higher than NF 3 Component (e.g. N) 2 O、CO 2 HF and N 2 F 2 Boiling point lower than NF 3 Has the component O 2 、N 2 And F 2 And the like. In the low-temperature rectifying tower, components with different boiling points are separated through a gas-liquid equilibrium process of multiple times of evaporation and condensation.
Purification of NF by cryogenic rectification 3 In the process, a large amount of high-boiling component impurities, such as N, are adsorbed by activated aluminum particles before the gas enters the rectifying tower 2 O、CO 2 Etc.; while removing low boiling components such as O in a low temperature rectification column 2 、N 2 . In the low-temperature rectifying tower, liquid nitrogen is used as a cooling mediumAnd one or more of inert gases He, Ne and Ar with very low boiling points are used as a third gas to be added into the rectifying tower. In the process, the appropriate third component and NF are controlled 3 The proportion of crude gas is 0.1-10, so that high-purity liquid NF is obtained 3 The mass content reaches 99 percent.
Most of active aluminum particles in the existing nitrogen trifluoride cracking tower are statically filled, and the statically placed active aluminum particles are mutually blocked and shielded to cause that the active aluminum particles cannot be in full contact with nitrogen trifluoride gas, so that a large amount of high-boiling-point component impurities in the nitrogen trifluoride gas are not completely adsorbed, and the purification of nitrogen trifluoride is not facilitated; in addition, the splendid attire device of active aluminium granule adopts the rotatory stirring mode of shaft drive to stir the granule more, because the transmission shaft can run through and carry out power transmission through the splendid attire device, can produce rotating gap between its and the splendid attire device outer wall, destroys the sealing performance of splendid attire device. Therefore, it is important to develop a cracking tower with high sealing performance and high efficiency for removing impurities in nitrogen trifluoride gas.
Disclosure of Invention
Aiming at the defects of the prior art, the sliding frame is adopted to stir the active aluminum particles, so that nitrogen trifluoride gas fully contacts with the active chlorine particles, and high-boiling-point component impurities in the nitrogen trifluoride gas are effectively adsorbed; meanwhile, the sealing performance of the filter tube and the liner is ensured.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows: the utility model provides a preparation high-purity nitrogen trifluoride is with cracking tower, includes the cracking tower, cracking tower outside lower part is provided with two upper and lower subtend gas covers, the locking intercommunication has the filter pipe between two upper and lower subtend gas covers, the fixed inner bag that is used for loading active aluminum granule that is provided with in inside of filtering the pipe, be provided with the rabbling mechanism who is used for stirring active aluminum granule in the inner bag, the rabbling mechanism is by actuating mechanism drive stirring active aluminum granule.
Preferably, strain between the upper and lower butt joint ring of clean pipe vertically set up a plurality of props even axle, prop the middle part outside cover of even axle and be equipped with the holding ring, be provided with the motor on the holding ring outer wall, the cover is equipped with the gear in the pivot of motor, the holding ring rotates the cover and is equipped with actuating mechanism, actuating mechanism includes the drive ring, the drive ring is two rings of drive rings, two rings of drive ring inboards are provided with a plurality of outer magnetic stripes, the vertical laying of outer magnetic stripe, and along the outer wall of straining clean pipe around moving, the upside drive ring outside seted up the round with gear engagement's tooth's socket.
Preferably, two guide wheels are symmetrically and rotatably installed at the upper end and the lower end of the outer magnetic strip, and the two guide wheels are in rolling contact with the outer wall of the filter pipe.
Preferably, two sealing covers are symmetrically arranged on the upper end face and the lower end face of the inner container, and an annular space is formed between the outer wall of the inner container and the inner wall of the filter pipe.
Preferably, the stirring mechanism includes along the vertical interior magnetic stripe that sets up of inner bag outer wall and installs at interior magnetic stripe one side and be located the carriage in the inner bag, and both ends slip suit is on two horizontal minor axes about the opposite side of interior magnetic stripe, the inner wall of filtering pipe is hugged closely to an epaxial tip in the level minor axis, and is equipped with the spring on the horizontal minor axis between filtering pipe and the interior magnetic stripe, interior magnetic stripe is opposite with the magnetism of outer magnetic stripe.
Preferably, the sliding frame is connected into an open-shaped structure by two transverse supporting shafts and two vertical supporting shafts.
Preferably, the number of the stirring mechanisms is 6, and the stirring mechanisms are uniformly distributed around the central axis of the inner container.
Preferably, the number of the supporting and connecting shafts is six, and the supporting and connecting shafts are uniformly distributed around the filter pipe.
Preferably, the two gas hoods which are opposite up and down are respectively communicated with an upper L-shaped gas guide pipe and a lower L-shaped gas guide pipe, one end of the upper L-shaped gas guide pipe is connected with the upper gas hood, the other end of the upper L-shaped gas guide pipe is communicated and locked with the inside of the cracking tower, one end of the lower L-shaped gas guide pipe is connected with the lower gas hood, and the other end of the lower L-shaped gas guide pipe is externally connected with a pipeline communicated with crude nitrogen trifluoride gas.
Preferably, the cracking tower is integrally of a cylindrical tank-shaped structure, and the inner container is cylindrical; an annular mounting space is formed between the support connecting shaft and the outer wall of the filter pipe and between the positioning ring and the outer wall of the filter pipe at intervals.
Compared with the prior art, the invention has the following advantages:
1. according to the invention, annular spaces are formed between the support connecting shaft and the positioning ring and between the outer circumferential wall of the filtering pipe and the annular spaces, so that convenience is provided for the rotating installation of the outer magnetic strips, the outer magnetic strips can be ensured to be close to the outer circumferential wall of the filtering pipe without obstruction, and the magnetic attraction force is ensured not to be attenuated by obstruction consumption to a great extent.
2. The sliding frame can intermittently slide back and forth to stir the active aluminum particles in the liner, so that the active aluminum particles can roll and fully contact with the passing nitrogen trifluoride to remove high-boiling-point components (N) 2 O、CO 2 ) Impurities are adsorbed more thoroughly, and the purity of the nitrogen trifluoride is effectively improved.
3. According to the invention, the inner magnetic strips and the outer magnetic strips are in magnetic cooperation, so that the stirring mechanism is attracted to move along the radial direction of the inner container to stir the active aluminum particles in the process that the electrode drives the rotating driving ring to rotate, when the outer magnetic strips are far away from the inner magnetic strips, the magnetism disappears, the stirring mechanism recovers to the original position under the reset pressure of the spring, the active aluminum particles are stirred ceaselessly, the six outer magnetic strips can be magnetically attracted intermittently to drive the circle of sliding frame to slide inside and outside when rotating along with the two driving rings, the circle of sliding frame is arranged in a surrounding manner, the active aluminum particles in the inner container can be stirred more comprehensively, and the stirring use effect is better; in addition, the magnetic force driving stirring component is creatively adopted, compared with the traditional shaft transmission stirring mode, the magnetic force driving stirring component can omit a transmission shaft, is beneficial to reducing the structure of equipment, reducing weight and lowering manufacturing cost, can avoid a rotating gap generated by the penetration and matching of the transmission shaft, the filter pipe and the inner container, and ensures the sealing performance of the filter pipe and the inner container.
The present invention will be described in further detail with reference to the drawings and examples.
Drawings
FIG. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic view of the inside of the filter tube according to the present invention.
FIG. 3 is a schematic view of the bottom of the filter tube of the present invention.
Fig. 4 is a schematic view of the structure of the drive ring of the present invention.
FIG. 5 is a schematic view of a half-section of the clean filter tube of the present invention.
Fig. 6 is a schematic structural view of the liner of the present invention.
Fig. 7 is a schematic view of the structure of the sliding rack of the present invention.
Description of reference numerals:
1-a cracking tower; 101-gas hood; 2-a filter pipe; 201-support connecting shaft; 202-a positioning ring; 203, a motor; 3, an inner container; 301-sliding rack; 302-inner magnetic stripe; 303 — horizontal minor axis; 4-driving ring; 401 — outer magnetic stripe.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
The cracking tower for preparing high-purity nitrogen trifluoride as shown in fig. 1-7 comprises a cracking tower 1, wherein two gas hoods 101 which are opposite up and down are arranged at the lower part of the outer side of the cracking tower 1, a filtering pipe 2 is tightly communicated between the two gas hoods 101 which are opposite up and down, an inner container 3 for filling active aluminum particles is fixedly arranged inside the filtering pipe 2, a stirring mechanism for stirring the active aluminum particles is arranged in the inner container 3, and the stirring mechanism is driven by a driving mechanism to stir the active aluminum particles.
As shown in fig. 1 and fig. 2, in this embodiment, the two gas hoods 101 facing each other up and down are respectively communicated with an upper L-shaped gas-guide tube and a lower L-shaped gas-guide tube, one end of the upper L-shaped gas-guide tube is connected to the upper gas hood 101, the other end of the upper L-shaped gas-guide tube is communicated with the inside of the cracking tower 1, one end of the lower L-shaped gas-guide tube is connected to the lower gas hood 101, and the other end of the lower L-shaped gas-guide tube is externally connected to a pipeline for introducing nitrogen trifluoride gas. In this embodiment, the cracking tower 1 is a cylindrical tank structure, and the inner container 3 is cylindrical.
As shown in fig. 2 and 4, in this embodiment, 6 support connecting shafts 201 are vertically arranged between upper and lower butt joint rings of the filter cleaning pipe 2, a positioning ring 202 is sleeved on the outer side of the middle of each support connecting shaft 201, a motor 203 is arranged on the outer wall of the positioning ring 202, a gear is sleeved on a rotating shaft of the motor 203, the positioning ring 202 is rotatably sleeved with a driving mechanism, the driving mechanism comprises a driving ring 4, the driving ring 4 is two rings of driving rings 4, 6 outer magnetic stripes 401 are arranged on the inner side of the two rings of driving rings 4, the outer magnetic stripes 401 are vertically arranged and are wound along the outer wall of the filter cleaning pipe 2, and a ring and tooth grooves meshed with the gear are arranged on the outer side of the ring 4 of the upper driving ring.
In this embodiment, two guide wheels are symmetrically rotatably installed at the upper end and the lower end of the outer magnetic strip 401, and the two guide wheels are in rolling contact with the outer wall of the filter pipe 2.
As shown in fig. 3 and 5, in this embodiment, two sealing covers are symmetrically disposed on the upper and lower end surfaces of the inner container 3, and an annular space is formed between the outer wall of the inner container 3 and the inner wall of the filtering tube 2, and the annular space ensures that the sliding frame 301 slides back and forth.
As shown in fig. 5, 6 and 7, in this embodiment, the stirring mechanism includes an inner magnetic stripe 302 vertically disposed along an outer wall of the inner container 3, and a sliding rack 301 installed on one side of the inner magnetic stripe 302 and located in the inner container 3, upper and lower ends of the other side of the inner magnetic stripe 302 are slidably sleeved on two horizontal short shafts 303, one end of each horizontal short shaft 303 is tightly attached to an inner wall of the filter pipe 2, a spring is sleeved on the horizontal short shaft 303 between the filter pipe 2 and the inner magnetic stripe 302, and the magnetism of the inner magnetic stripe 302 is opposite to that of the outer magnetic stripe 401. The sliding frame 301 intermittently slides back and forth to agitate the activated aluminum particles inside the inner container 3 so that the activated aluminum particles can roll over to fully contact with the nitrogen trifluoride passing therethrough for the high boiling point component (N) 2 O、CO 2 ) Impurities are adsorbed more thoroughly, and the purity of the nitrogen trifluoride is effectively improved.
As shown in fig. 7, in this embodiment, the sliding frame 301 is connected to form an "open" structure by two horizontal supporting shafts and two vertical supporting shafts.
In this embodiment, the number of the stirring mechanisms is 6, and the stirring mechanisms are uniformly arranged around the central axis of the inner container 3. Use together through the spring cooperation on 12 horizontal minor axis 303 that 6 interior magnetic stripe 302 and longitudinal symmetry set up to inhale mutually by opposite sex and hold, 6 but outer magnetic stripe 401 is magnetism of intermittent type nature when following two rings of drive ring 4 rotations and is inhaled and drive about carriage 301 inside and outside slip, carriage 301 is to encircle to lay and to carry out comparatively comprehensive stirring, stirring result of use preferred to the inside active aluminium granule of inner bag 3. In addition, the magnetic force driving stirring component is creatively adopted, compared with the traditional shaft transmission stirring mode, the magnetic force driving stirring component can omit a transmission shaft, is beneficial to reducing the structure of equipment, reducing weight and lowering manufacturing cost, can avoid a rotating gap generated by the penetration and matching of the transmission shaft, the filter pipe 2 and the inner container 3, and ensures the sealing performance of the filter pipe 2 and the inner container 3.
As shown in fig. 2 and 3, in the present embodiment, an annular space is formed between the support shaft 201 and the positioning ring 202 and the outer wall of the filter tube 2. This annular space facilitates for outer magnetic stripe 401's rotation installation, guarantees that outer magnetic stripe 401 can not have the circumference outer wall of pressing close to and straining clean pipe 2 of separation, and the assurance magnetic attraction of furthest is not consumed the decay by the separation.
In this embodiment, the filter tube 2, the inner container 3 and the components inside the inner container are made of nonmagnetic metal.
The working principle of the cracking tower for preparing high-purity nitrogen trifluoride is as follows: the rotating shaft of the motor 203 rotates to drive the gear on the rotating shaft to rotate, the gear rotates to drive the tooth socket on the outer side of the 4 rings of the driving ring meshed with the gear to rotate, so that the driving ring 4 rotates, the driving ring 4 rotates to drive the outer magnetic strips 401 arranged on the inner side of the driving ring 4 to rotate, when the outer magnetic strips 401 rotate to the positions opposite to the inner magnetic strips 302, the outer magnetic strips 401 attract the inner magnetic strips 302 to approach through the springs on the horizontal short shafts 303 under the opposite attraction principle because the magnetism of the outer magnetic strips 401 is opposite to that of the inner magnetic strips 302, and the sliding frame 301 connected with the inner magnetic strips 302 is driven to move towards the outer magnetic strips 401; when the outer magnetic strip 401 rotates away from the position opposite to the inner magnetic strip 302, the sliding frame 301 will move back under the action of the return pressure of the spring due to the lost of attraction forceThe sliding rack 301 moves towards the outer magnetic strip 401 again when the outer magnetic strip 401 rotates to the position opposite to the inner magnetic strip 302 again, so that the sliding rack 301 can intermittently move to stir the active aluminum particles in the inner container 3, so that the active aluminum particles can roll and fully contact with the passing nitrogen trifluoride to treat the high-boiling-point component (N) in the active aluminum particles 2 O、CO 2 ) Impurities are adsorbed more thoroughly, so that the purity of the nitrogen trifluoride is effectively improved;
the filtering pipe 2, the liner 3 and all components in the liner are made of nonmagnetic metal; motor 203 is located holding ring 202 outer wall, props between even axle 201 and holding ring 202 and the circumference outer wall of straining clean pipe 2 the interval and is formed with annular installation space, and this annular installation space provides convenience for the rotation installation of outer magnetic stripe 401, guarantees that outer magnetic stripe 401 can not have the outer wall of pressing close to straining clean pipe 2 of separation, and furthest's assurance magnetic attraction is not consumed the decay by the separation.
The sliding frame 301 is arranged in a surrounding mode, active aluminum particles in the inner container 3 can be stirred comprehensively, the stirring using effect is good, in addition, magnetic force is creatively adopted to drive the stirring component, compared with a traditional shaft transmission stirring mode, a transmission shaft can be omitted, the reduction of the equipment structure and the weight and the reduction of the manufacturing cost are facilitated, a rotating gap generated by the penetration and matching of the transmission shaft and the filter pipe 2 and the inner container 3 can be avoided, and the sealing performance of the filter pipe 2 and the inner container 3 is ensured.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modification, change and equivalent changes of the above embodiments according to the technical essence of the invention are still within the protection scope of the technical solution of the invention.
Claims (8)
1. The cracking tower for preparing high-purity nitrogen trifluoride comprises a cracking tower (1) and is characterized in that two gas hoods (101) which are opposite up and down are arranged at the lower part of the outer side of the cracking tower (1), a filtering pipe (2) is locked and communicated between the two gas hoods (101) which are opposite up and down, an inner container (3) used for filling active aluminum particles is fixedly arranged inside the filtering pipe (2), a stirring mechanism used for stirring the active aluminum particles is arranged in the inner container (3), and the stirring mechanism is driven by a driving mechanism to stir the active aluminum particles;
a plurality of supporting connecting shafts (201) are vertically arranged between upper and lower butting rings of the filtering pipe (2), a positioning ring (202) is sleeved on the outer side of the middle of each supporting connecting shaft (201), a motor (203) is arranged on the outer wall of each positioning ring (202), a gear is sleeved on a rotating shaft of each motor (203), a driving mechanism is sleeved on each positioning ring (202) in a rotating manner and comprises a driving ring (4), each driving ring (4) is provided with two rings of driving rings (4), a plurality of outer magnetic stripes (401) are arranged on the inner sides of the two rings of driving rings (4), the outer magnetic stripes (401) are vertically arranged and move around the outer wall of the filtering pipe (2), and a circle of tooth grooves meshed with the gear is formed on the outer side of the upper driving ring (4); an annular mounting space is formed between the outer walls of the filter pipe (2) and the support connecting shaft (201) and the positioning ring (202) at intervals;
stirring mechanism includes interior magnetic stripe (302) and installation that vertically set up along inner bag (3) outer wall and carriage (301) that just are located inner bag (3) in inner magnetic stripe (302) one side, and both ends slip suit is on two horizontal minor axes (303) about the opposite side of interior magnetic stripe (302), one end on horizontal minor axis (303) hugs closely the inner wall of straining clean pipe (2), and overlaps on horizontal minor axis (303) between straining clean pipe (2) and interior magnetic stripe (302) and be equipped with the spring, interior magnetic stripe (302) are opposite with the magnetism of outer magnetic stripe (401).
2. The cracking tower for preparing high-purity nitrogen trifluoride according to claim 1, wherein two guide wheels are symmetrically and rotatably mounted at the upper end and the lower end of the outer magnetic strip (401), and the two guide wheels are in rolling contact with the outer wall of the filtering pipe (2).
3. The cracking tower for preparing high-purity nitrogen trifluoride according to claim 1, wherein two sealing covers are symmetrically arranged on the upper and lower end surfaces of the inner container (3), and an annular space is formed between the outer wall of the inner container (3) and the inner wall of the filtering tube (2).
4. The cracking column for preparing high purity nitrogen trifluoride according to claim 1, wherein the sliding frame (301) is connected by two lateral support shafts and two vertical support shafts in an "open" configuration.
5. The cracking tower for preparing high purity nitrogen trifluoride according to claim 1, wherein the number of the stirring means is 6, and the stirring means is uniformly arranged around the central axis of the inner container (3).
6. The cracking tower for preparing high-purity nitrogen trifluoride according to claim 1, wherein the number of the bracing shaft (201) is six, and the bracing shaft is uniformly arranged around the filtering pipe (2).
7. The cracking tower for preparing high-purity nitrogen trifluoride according to claim 1, wherein the two gas hoods (101) facing each other up and down are respectively communicated with an upper L-shaped gas-guiding tube and a lower L-shaped gas-guiding tube, one end of the upper L-shaped gas-guiding tube is connected with the upper gas hood (101), the other end of the upper L-shaped gas-guiding tube is communicated with and locked with the inside of the cracking tower (1), one end of the lower L-shaped gas-guiding tube is connected with the lower gas hood (101), and the other end of the lower L-shaped gas-guiding tube is externally communicated with a pipeline for crude nitrogen trifluoride gas.
8. The cracking tower for preparing high purity nitrogen trifluoride according to claim 1, wherein the cracking tower (1) has an overall cylindrical tank structure, and the inner container (3) has a cylindrical shape.
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| CN202110922464.8A CN113713567B (en) | 2021-08-12 | 2021-08-12 | Cracking tower for preparing high-purity nitrogen trifluoride |
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| CN202110922464.8A CN113713567B (en) | 2021-08-12 | 2021-08-12 | Cracking tower for preparing high-purity nitrogen trifluoride |
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| CN113713567B true CN113713567B (en) | 2022-09-30 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4933158A (en) * | 1988-10-25 | 1990-06-12 | Mitsui Toatsu Chemicals, Incorporated | Method for purifying nitrogen trifluoride gas |
| CN1450203A (en) * | 2003-04-30 | 2003-10-22 | 中国船舶重工集团公司第七一八研究所 | Fine preparation process for high-purity nitrogen trifluoride gas |
| CN208526479U (en) * | 2018-04-21 | 2019-02-22 | 惠安华晨贸易有限公司 | A kind of domestic living waste water treater |
| CN210544106U (en) * | 2019-06-19 | 2020-05-19 | 南通华晟链条有限公司 | Waste gas absorption tower for chain processing workshop |
| CN211099003U (en) * | 2019-09-20 | 2020-07-28 | 青海锦泰锂业有限公司 | Purification device of lithium chloride conversion liquid |
| CN111729468A (en) * | 2020-06-12 | 2020-10-02 | 中船重工（邯郸）派瑞特种气体有限公司 | Adsorption tower for preparing high-purity tungsten hexafluoride |
| CN112957895A (en) * | 2021-02-02 | 2021-06-15 | 江苏海洋大学 | Organic and inorganic waste gas purification device for high-energy ion chemical industry |
-
2021
- 2021-08-12 CN CN202110922464.8A patent/CN113713567B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4933158A (en) * | 1988-10-25 | 1990-06-12 | Mitsui Toatsu Chemicals, Incorporated | Method for purifying nitrogen trifluoride gas |
| CN1450203A (en) * | 2003-04-30 | 2003-10-22 | 中国船舶重工集团公司第七一八研究所 | Fine preparation process for high-purity nitrogen trifluoride gas |
| CN208526479U (en) * | 2018-04-21 | 2019-02-22 | 惠安华晨贸易有限公司 | A kind of domestic living waste water treater |
| CN210544106U (en) * | 2019-06-19 | 2020-05-19 | 南通华晟链条有限公司 | Waste gas absorption tower for chain processing workshop |
| CN211099003U (en) * | 2019-09-20 | 2020-07-28 | 青海锦泰锂业有限公司 | Purification device of lithium chloride conversion liquid |
| CN111729468A (en) * | 2020-06-12 | 2020-10-02 | 中船重工（邯郸）派瑞特种气体有限公司 | Adsorption tower for preparing high-purity tungsten hexafluoride |
| CN112957895A (en) * | 2021-02-02 | 2021-06-15 | 江苏海洋大学 | Organic and inorganic waste gas purification device for high-energy ion chemical industry |
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| CN113713567A (en) | 2021-11-30 |
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