CN113690728A - Optical microfluidic array laser based on Fabry-Perot microcavity and preparation method thereof - Google Patents
Optical microfluidic array laser based on Fabry-Perot microcavity and preparation method thereof Download PDFInfo
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- CN113690728A CN113690728A CN202110907242.9A CN202110907242A CN113690728A CN 113690728 A CN113690728 A CN 113690728A CN 202110907242 A CN202110907242 A CN 202110907242A CN 113690728 A CN113690728 A CN 113690728A
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/082—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression
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Abstract
The invention belongs to the technical field of laser devices, and particularly relates to an optical microflow array laser based on a Fabry-Perot microcavity, which comprises a first cavity mirror and a second cavity mirror, wherein a coating surface of the second cavity mirror is provided with a concave array formed by a plurality of concave structures, the coating surface of the first cavity mirror and the concave array on the second cavity mirror are oppositely arranged to form a cavity array comprising a plurality of plano-concave F-P cavities, a channel with an opening at one side is arranged between the first cavity mirror and the second cavity mirror and in a position corresponding to the cavity array, one cavity mirror is provided with a conduit communicated with the channel, and the conduit is used for introducing a liquid gain medium. The invention has the advantages of low threshold, high quality factor and small mode volume, has good compatibility with a microfluidic system, has high utilization rate of gain medium, can realize the emergence of array body laser, and has low cost and simple processing and packaging and easy operation for optical microfluidic array laser.
Description
Technical Field
The invention belongs to the technical field of laser devices, and particularly relates to an optical microfluidic array laser based on a Fabry-Perot microcavity.
Background
Optofluidic lasers are an emerging technology that has been developed in recent years, utilizing different types of optical cavities, and readily available gain media. Optofluidic lasers have made advances in the development of miniaturized coherent light sources, biochemical sensing, and bioimaging. Optofluidic lasers have been implemented so far in optical ring resonators, distributed feedback gratings, fabry-perot cavities, photonic crystals. The development of integrated optofluidic laser arrays on a chip has not been explored to a great extent. The realization of the optical flow control array laser has huge application potential, such as wavelength division multiplexing, multi-signal emission and detection and the like. Due to the adaptability of liquid, the optical flow control laser array also has unique application advantages in on-chip spectral analysis and high-flux biochemical sensing systems.
Based on the whispering gallery mode, the liquid drop array manufactured by standard photoetching and soft photoetching can realize the generation of a better optofluidic laser array. Inkjet printing bio-laser arrays have the unique advantages of high throughput manufacturing and programmable control, unlike microfluidic chips which require complex microfabrication, the printing method can rapidly generate arrays of droplets of large size on a chip within 1-2 s, and then generate array lasers based on whispering gallery modes. The whispering gallery mode microdisk laser has shown great potential in the high sensitivity label-free detection of large-scale sensor arrays. The whispering gallery mode micro-cavity utilizes the theory of total reflection of light, can be divided into an annular cavity and a polygonal cavity according to the shape, and has application in the aspects of biosensing, single-particle detection, temperature sensing and the like. Whispering gallery mode microchambers have extremely high cavity quality factors. However, only a small part of the gain medium participates in stimulated amplification, and the refractive index of the gain medium solution is limited, such microcavity integrated package is very difficult, and it is difficult to realize optical microfluidic array laser. When used under normal environmental conditions, are subject to temperature fluctuations and photobleaching.
The semiconductor photonic crystal nano laser is a laser with compact structure and low threshold value. Due to its compactness, its array integration is also easy, which enables the production of sensor arrays for parallel detection and statistical analysis. The large-scale GaInAsP nanometer laser array can be prepared with high yield by utilizing the PDMS mediated bonding process. Large-scale array technologies based on photonic crystals have a wide range of applications, such as biological screening and biological imaging. However, for the optical microfluidic array laser, the manufacturing cost of the photonic crystal is expensive, and the requirement on the processing technology is high.
Therefore, it is desirable to provide an array laser which is simple to manufacture and stable in operation.
Disclosure of Invention
The invention overcomes the defects of the prior art, and solves the technical problems that: an optical microfluidic array laser based on Fabry-Perot microcavity is provided.
In order to solve the technical problems, the invention adopts the technical scheme that: a Fabry-Perot microcavity-based optical microfluidic array laser comprises a first cavity mirror and a second cavity mirror, wherein a film coating surface of the first cavity mirror is provided with a concave array formed by a plurality of concave structures, a film coating surface of the second cavity mirror and the concave array on the first cavity mirror are oppositely arranged to form a cavity array comprising a plurality of plano-concave F-P cavities, a channel with an opening at one side is arranged between the first cavity mirror and the second cavity mirror and in a position corresponding to the cavity array, one cavity mirror is provided with a guide pipe communicated with the channel, and the guide pipe is used for introducing a liquid gain medium.
The optical microfluidic array laser based on the Fabry-Perot microcavity further comprises a cushion layer and a baffle, the cushion layer is arranged on two sides of the first cavity mirror and the second cavity mirror, the baffle is arranged at the rear ends of the first cavity mirror and the second cavity mirror, the cushion layer and the baffle are used for sealing three side faces of the channel, and the guide pipe is arranged on one side far away from the opening of the channel.
The Fabry-Perot microcavity-based optical microfluidic array laser further comprises a holder, wherein the holder comprises an upper clamp plate, a lower clamp plate and fixing bolts, a groove for placing a cavity mirror and a baffle is formed in one clamp plate, the upper clamp plate is fixed on the lower clamp plate through the fixing bolts, the first cavity mirror and the second cavity mirror are clamped and fixed, and a light through hole for enabling light to pass through is formed in the center of the upper clamp plate and the center of the lower clamp plate.
The thickness of the cushion layer is 5 mu m, and the width of the channel is 5 mm.
The number of the concave structures is 9, and the concave structures are distributed in a 3 multiplied by 3 mode.
The optical microfluidic array laser based on the Fabry-Perot microcavity further comprises a pump laser, and the pump laser is used for outputting pump laser.
In addition, the invention also provides a preparation method of the optical microfluidic array laser based on the Fabry-Perot microcavity, which comprises the following steps:
s1, selecting two pieces of quartz glass, processing a concave array structure on one piece of quartz glass, and plating a Bragg reflection film on the surfaces of the two pieces of quartz glass by an ion beam sputtering method;
s2, cleaning: cleaning and drying the treated coated quartz glass;
s3, spin-coating a layer of photoresist on the coated quartz glass without the concave array structure, and then drying;
s4, exposing and developing the reflector coated with the photoresist in a spinning mode through the designed mask plate to obtain a channel;
s5, assembling the two pieces of coated quartz glass, and then sealing one end of the channel through a baffle;
s6, drilling a through hole on one of the coated quartz glass, inserting a conduit, and sealing with glue.
In the preparation method of the optical microfluidic array laser based on the Fabry-Perot microcavity, the two pieces of coated quartz glass are assembled by the clamp.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a light microflow array laser based on a Fabry-Perot microcavity, which generates light microflow array laser based on the Fabry-Perot microcavity and comprises two reflectors with extremely high reflectivity, wherein one reflector is arranged in a concave shape to form a plano-concave F-P cavity array, light is oscillated and amplified between the two reflectors, and the array laser can be generated based on the multi-beam interference principle. The channel is arranged in the cavity, and the solution with any refractive index can be selected as a gain medium carrier, and the gain medium is easy to manufacture and integrate. In addition, the invention is realized based on the FP microcavity, has the advantages of low threshold, high quality factor and small mode volume, has good compatibility with a microfluidic system, has high utilization rate of gain medium, can realize the emission of the laser of the array body, and has low cost and simple processing and packaging and easy operation for the laser of the optical microfluidic array.
Drawings
Fig. 1 is a schematic structural diagram of an optical microfluidic array laser based on a fabry-perot microcavity according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a concave array in an embodiment of the present invention;
FIG. 3 is a schematic view of a one-dimensional depth distribution of a concave structure in an embodiment of the present invention;
FIG. 4 is a schematic view of a holder according to an embodiment of the present invention;
FIG. 5 is an exploded view of the clamp in an embodiment of the invention;
fig. 6 is a diagram of an experimental apparatus of an optical microfluidic array laser based on a fabry-perot microcavity according to an embodiment of the present invention;
FIG. 7 is a laser photograph of the output of the array laser chip observed by the CCD according to the first embodiment of the present invention;
FIG. 8 is a spectrum diagram of the laser output from the array laser chip collected by the spectrometer according to the first embodiment of the present invention;
fig. 9 is a schematic view of a fabry-perot microcavity based optical microfluidic array laser according to a second embodiment of the present invention.
In the figure: the device comprises a first endoscope 1, a coating surface 2, a second endoscope 3, a cushion layer 4, a guide pipe 5, a baffle 6, a channel 7, a concave structure 8, a pump laser 11, a diaphragm 12, a continuously variable neutral density filter 13, a beam splitter 50/50 14, an optical power meter 15, a convex lens 16, a beam splitter prism 17, a holder 18, an optical fiber probe 19, a mask 26, an optical camera 110, a computer 111, a spectrometer 112, an array laser chip 118, an upper clamp plate 32, a lower clamp plate 31, a spring 33, a fixing bolt 34, a light through hole 35 and a groove 36.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments; all other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
As shown in fig. 1, a first embodiment of the present invention provides an optical microfluidic array laser based on a fabry-perot microcavity, including a first cavity mirror 1 and a second cavity mirror 3, a coating surface 2 of the first cavity mirror 1 is provided with a concave array formed by a plurality of concave structures 8, a coating surface of the second cavity mirror 3 is arranged opposite to the concave array on the first cavity mirror 1 to form a cavity array including a plurality of plano-concave F-P cavities, a channel 7 with an opening on one side is arranged between the first cavity mirror 1 and the second cavity mirror 2 at a position corresponding to the cavity array, one of the cavity mirrors is provided with a conduit 5 communicated with the channel 7, and the conduit 5 is used for introducing a liquid gain medium.
Further, as shown in fig. 1, the optical microfluidic array laser based on the fabry-perot microcavity further includes a cushion layer 4 and a baffle 6, the cushion layer 4 is disposed on two sides of the first cavity mirror 1 and the second cavity mirror 2, the baffle 6 is disposed at a rear end of the first cavity mirror 1 and the second cavity mirror 2, the cushion layer 3 and the baffle 4 are used for closing three sides of the channel 7, and the conduit 5 is disposed on a side away from an opening of the channel 7.
Specifically, in the present embodiment, there are 9 concave structures 8, which are distributed in a 3 × 3 manner. As shown in fig. 3, the one-dimensional depth distribution of each concave structure in the present embodiment is shown. In the figure, (d) is the three concave structures in the center of the concave array (i.e. the three concave structures intersected by the dotted line in (a))Type structure) of the structure; (e) the one-dimensional depth distribution of two concave structures above the center of the concave array (namely two concave structures intersected by the dotted line in (b)); (f) is the one-dimensional depth distribution of the uppermost single concave structure (i.e., one concave structure where the (c) dashed lines intersect). In this embodiment, the reflective film on the coated surfaces of the first cavity mirror 1 and the second cavity mirror 3 is formed by 15 Ti layers2O5And SiO2The medium layers are alternately formed, the central wavelength of the reflection band is 580nm (550 nm-610 nm), and the reflectivity is more than or equal to 99.9%.
Further, as shown in fig. 4 to 5, the optical microfluidic array laser based on the fabry-perot microcavity further includes a holder 18, where the holder includes an upper plate 32, a lower plate 31 and fixing bolts 34, one of the plates is provided with a groove 36 for placing a cavity mirror and a baffle, and the upper plate 32 is fixed on the lower plate 31 through the fixing bolts 34, so as to clamp and fix the first cavity mirror 1 and the second cavity mirror 3. Further, a spring 33 is provided on the fixing bolt 34. The upper and lower plates 32 and 31 are provided with a light-passing hole 35 at the center for passing light. Further, in this embodiment, the thickness of the cushion layer 4 is 5 μm, and the width of the channel 7 is 5 mm.
Further, the optical microfluidic array laser based on the fabry-perot microcavity in this embodiment further includes a pump laser 11, where the pump laser 11 is configured to output pump laser light. As shown in fig. 6, as a corresponding experimental apparatus diagram, an OPO tunable laser 11 in the experimental apparatus is used as a pumping light source in an experiment, the emitting wavelength of the laser is 532nm, the light intensity is first regulated and controlled by an aperture 12 and a continuously variable neutral density filter 13, then an 50/50 beam splitter 14 is used to split a beam of detection light, an optical power meter 15 is used to detect the light intensity of the pumping light, and another beam of light in the vertical direction is focused on an array laser core 118 held by a holder 18 through a convex lens 16 and a beam splitter prism 17. The fiber probe 19 is located right above the chip, and the laser emitted from the experimental chip is collected by the fiber probe 19 and the optical camera 110 and transmitted to the spectrometer 112 and the computer 111.
Optical microcavities are typically constructed by combining two mirrors having a certain geometry and optical reflective properties in a particular manner. The function is as follows: providing optical feedback capacity, and enabling the stimulated radiation photons to reciprocate back and forth in the cavity for multiple times to form coherent continuous oscillation to form standing waves, wherein the formula (1) is a standing wave condition; the direction and frequency of the light beam oscillating back and forth in the cavity are limited to ensure that the output laser has certain directionality and monochromaticity.
Wherein L is the geometric length of the optical resonant cavity, n is the refractive index of the working substance in the cavity, λ q is the resonant wavelength of the cavity, and q is a longitudinal mode index which is a positive integer.
Light rays in the flat FP cavity can only go back and forth in the cavity when being parallel to the cavity axis, and only light completely parallel to the cavity axis can be ensured to be transmitted between the reflectors without escaping, so that the flat FP cavity belongs to a critical cavity and is easily influenced by loss caused by packaging and the like. Paraxial light rays in the flat concave FP cavity are transmitted for any times without escaping out of the cavity, the tilt loss and the like introduced in the micro-cavity assembly process can be reduced compared with a plane-plane FP cavity, and according to the stability condition of the coaxial spherical cavity, as shown in the following formula (2), when L is less than R2The time flat concave cavity is a stable cavity.
Where L is the cavity length and R is the flat cavity1= ∞，R2Is the minimum radius of curvature of the concave mirror. According to the data parameters of the flat concave cavity prepared in the previous step, the flat concave cavity structure of the embodiment meets the condition of a stable cavity.
In the present embodiment, 1 mM Rhodamine 6G (Rhodamine 6G, R6G) absolute ethanol solution is used as the gain dye in the FP chamber. The laser light at the array structure is collected by the experimental set-up of fig. 6, and the image observed by the CCD array flat cavity laser light is shown in fig. 7, and the corresponding spectrum is shown in fig. 8.
Some theoretical analysis of the laser light generated was performed based on the relevant parameters of the array structure in fig. 3.
It can be deduced from equation (1) and =:
the frequency interval of the adjacent modes of the same cavity for generating laser is Δ v, c is the light speed, n is the liquid refractive index, L is the cavity length, and for the cavity, the cavity length is equal to the mirror surface interval plus the cavity depth, namely L + t. Thus, the resulting laser frequency difference parameters for each flat cavity in FIG. 2 are shown in Table 1.
TABLE 1 multimode laser adjacent mode frequency maximum separation Range for each flat cavity
The frequency interval of the adjacent modes of the same cavity for generating laser is Δ v, c is the light speed, n is the liquid refractive index, L is the cavity length, and for the cavity, the cavity length is equal to the mirror surface interval plus the cavity depth, namely L + t.
Δ λ and λqAnalysis of the relationship between at λqThe value of Δ λ is within the range of 550-qAnd from this relationship we list the maximum separation range of wavelengths of the neighboring modes of the multimode laser for each of the six planar cavities as shown in table 2 below.
TABLE 2 multimode laser adjacent mode wavelength maximum separation range for each flat cavity
Through calculation of the wavelength difference of the adjacent modes of the emergent laser light of each of the six cavities in the graph of fig. 2, the wavelength intervals of the emergent multimode laser light of the same cavity are in the maximum range of 22-26 nm. Through multiple laser collection under different energy pumps, the laser wavelength range emitted by the array cavity in the embodiment of the invention is 550-580 nm, and the difference between the two laser wavelengths is 30nm, so that the laser emitted by the analysis plano-concave type laser is single-mode laser or laser emitted by two modes at most.
Therefore, in the test of the optical microfluidic laser generation of the optical microfluidic array laser based on the fabry-perot microcavity provided by the embodiment, the CCD image proves that the structure can be used for the generation of array laser, and the laser spectrum data also shows that the structure can generate array laser.
Example two
As shown in fig. 9, a second embodiment of the present invention provides a method for preparing an optical microfluidic array laser based on a fabry-perot microcavity, including the following steps:
step one, preparation.
The fabry-perot microcavity is composed of two mirrors with extremely high reflectivity, and the mirrors used in this embodiment are quartz glass. Two pieces of quartz glass are selected, a 3 x 3 array concave structure shown in figure 2 is processed on one piece of quartz glass, and then a Bragg reflection film is plated on the surfaces of the two pieces of quartz glass by an ion beam sputtering method. The reflecting film consists of 15 layers of Ti2O5 and SiO2 medium layers alternately, the central wavelength of a reflecting band is 580nm (550 nm-610 nm), and the reflectivity is more than or equal to 99.9%.
And step two, cleaning.
And sequentially putting the coated glass subjected to the treatment into a glass culture dish containing acetone, alcohol and deionized water, and placing the glass culture dish into an ultrasonic cleaning machine for ultrasonic cleaning for 15 minutes respectively. After the ultrasonic cleaning is finished, blowing off the liquid stain on the surface of the glass by using air blow, and putting the glass into an oven for drying.
And step three, packaging and spin-coating the photoresist.
A su-82005 photoresist with the thickness of 5um is spin-coated on the coated quartz glass without concave array, namely the coated layer 2 of the second cavity mirror 3, and then is dried, as shown in (a) in fig. 9, and then is baked at 65 ℃ for 3 minutes and then at 95 ℃ for 8 minutes. The mirror is then exposed through a designed mask plate 26 as shown in fig. 9 (b). The exposed mirror was baked at 65 ℃ for 1 minute, then baked at 95 ℃ for 6 minutes, and then developed for 8 minutes, resulting in the structure shown in fig. 9 (c) in which the photoresist formed the cushion layer 4, and after development, the channel 7 was formed in the middle thereof.
Then, as shown in FIG. 5, two pieces of coated quartz glass and a baffle plate were assembled by a clamper, and one end of the passage was closed by a baffle plate 6. In addition, a through hole with the diameter of 2mm is drilled at one end of the channel at a position 3mm away from one quartz glass edge for inserting the polytetrafluoroethylene conduit 5, and the through hole is sealed by 302 glue after the insertion.
And S6, drilling a through hole on one of the coated quartz glass, inserting a guide pipe, and sealing by using glue to obtain the array laser chip.
In summary, the invention provides an optical microfluidic array laser based on a fabry-perot microcavity, which generates optical microfluidic array laser based on the fabry-perot microcavity, and includes two mirrors with extremely high reflectivity, wherein one of the mirrors is concave to form a plano-concave F-P cavity array, and light is oscillated and amplified between the two mirrors, so that array laser can be generated based on a multi-beam interference principle. The channel is arranged in the cavity, and the solution with any refractive index can be selected as a gain medium carrier, and the gain medium is easy to manufacture and integrate. In addition, the invention is realized based on the FP microcavity, has the advantages of low threshold, high quality factor and small mode volume, has good compatibility with a microfluidic system, has high utilization rate of gain medium, can realize the emission of the laser of the array body, and has low cost and simple processing and packaging and easy operation for the laser of the optical microfluidic array.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. The optical microfluidic array laser based on the Fabry-Perot microcavity is characterized by comprising a first cavity mirror (1) and a second cavity mirror (3), wherein a concave array formed by a plurality of concave structures (8) is arranged on a film coating surface (2) of the first cavity mirror (1), a film coating surface of the second cavity mirror (3) and the concave array on the first cavity mirror (1) are oppositely arranged to form a cavity array comprising a plurality of plano-concave F-P cavities, a channel (7) with an opening on one side is arranged between the first cavity mirror (1) and the second cavity mirror (2) and in a position corresponding to the cavity array, a guide pipe (5) communicated with the channel (7) is arranged on one of the channel(s), and the guide pipe (5) is used for introducing a liquid gain medium.
2. A fabry-perot microcavity based optical microfluidic array laser according to claim 1, further comprising a spacer (4) and a baffle (6), wherein the spacer (4) is disposed on both sides of the first cavity mirror (1) and the second cavity mirror (2), the baffle (6) is disposed at the rear end of the first cavity mirror (1) and the second cavity mirror (2), the spacer (3) and the baffle (4) are used to close three sides of the channel (7), and the conduit (5) is disposed on the side far away from the opening of the channel (7).
3. A fabry-perot microcavity based optical microfluidic array laser according to claim 2, further comprising a holder, wherein the holder comprises an upper plate (32), a lower plate (31) and a fixing bolt (34), one of the plates is provided with a groove (36) for placing the cavity mirror and the baffle, the upper plate (32) is fixed on the lower plate (31) through the fixing bolt (34) to clamp and fix the first cavity mirror (1) and the second cavity mirror (3), the upper plate (32) and the lower plate (31) are centrally provided with a light passing hole (35) for passing light.
4. A fabry-perot microcavity based optical microfluidic array laser according to claim 2, wherein the spacer layer (4) has a thickness of 5 μm and the channel (7) has a width of 5 mm.
5. The optical microfluidic array laser according to claim 1, wherein the number of concave structures (8) is 9, and the concave structures are distributed in a 3 x 3 manner.
6. A fabry-perot microcavity based optical microfluidic array laser as claimed in claim 1, further comprising a pump laser (11), the pump laser (11) being configured to output pump laser light.
7. The preparation method of the optical microfluidic array laser based on the Fabry-Perot microcavity as claimed in any one of claims 1 to 6, comprising the following steps:
s1, selecting two pieces of quartz glass, processing a concave array structure on one piece of quartz glass, and plating a Bragg reflection film on the surfaces of the two pieces of quartz glass by an ion beam sputtering method;
s2, cleaning: cleaning and drying the treated coated quartz glass;
s3, spin-coating a layer of photoresist on the coated quartz glass without the concave array structure, and then drying;
s4, exposing and developing the reflector coated with the photoresist in a spinning mode through the designed mask plate to obtain a channel;
s5, assembling the two pieces of coated quartz glass, and then sealing one end of the channel through a baffle;
s6, drilling a through hole on one of the coated quartz glass, inserting a conduit, and sealing with glue.
8. The method as claimed in claim 7, wherein the two pieces of coated quartz glass are assembled by the holder.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104941706A (en) * | 2015-07-06 | 2015-09-30 | 吉林大学 | Optical fluid and micro-fluid twin channel chip and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104941706A (en) * | 2015-07-06 | 2015-09-30 | 吉林大学 | Optical fluid and micro-fluid twin channel chip and preparation method thereof |
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| Title |
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| 贾卓楠: "法布里-珀罗微腔阵列的制备及光微流激光产生", 《中国优秀硕士学位论文全文数据库（信息科技辑）》 * |
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