CN113690126A - Laser-sustained plasma broadband light source and application - Google Patents
Laser-sustained plasma broadband light source and application Download PDFInfo
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- CN113690126A CN113690126A CN202110955656.9A CN202110955656A CN113690126A CN 113690126 A CN113690126 A CN 113690126A CN 202110955656 A CN202110955656 A CN 202110955656A CN 113690126 A CN113690126 A CN 113690126A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
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- H—ELECTRICITY
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- H01J61/00—Gas-discharge or vapour-discharge lamps
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- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
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Abstract
The invention belongs to the technical field of light sources, and discloses a laser maintenance plasma broadband light source and application thereof, wherein the laser maintenance plasma broadband light source comprises a cavity, working gas, a gas charging and discharging device, an incidence window, an exit window, two lasers, a lens, a plane mirror, a reflecting surface and circulating water cooling; the cavity is filled with high-pressure working gas, the left side of the cavity is connected with an air charging and discharging device through a connecting pipeline, an incident window and an emergent window are formed in the outer side of the cavity, and a reflecting surface is arranged in the cavity; and a circulating water cooling structure is arranged around the cavity. The invention completely avoids the influence of the electrode on the luminous property of the laser-maintained plasma, avoids the defect that the problems of inconvenient gas component and pressure control and cooling of a sealed bulb are not easy to solve, combines a gas container and a plasma light collecting device, simplifies the complexity of the whole device of the laser-maintained plasma light source, and is easy to control and synchronize a double-laser structure, thereby providing convenience for analyzing the plasma state and the property at different moments.
Description
Technical Field
The invention belongs to the technical field of light sources, and particularly relates to a laser-sustained plasma broadband light source and application thereof.
Background
Currently, in the current sophisticated research and manufacturing applications in the fields of semiconductor, materials and life sciences, light sources are required to be able to provide high brightness and stable radiation over a long lifetime, while Laser Sustained Plasma (LSP) technology is currently a plasma light source with high spectral brightness over a wide wavelength range. The method is mainly applied to the fields of hyperspectral imaging, film detection, optical element testing, bioanalysis instruments, microscopes, material research and the like.
The existing light source technology has certain limitations in the aspects of spectral range, high brightness, stability, service life and the like. Evaporation of the electrodes in conventional arc xenon lamps limits the rise in gas temperature, leading to limited DUV intensity, loss of the electrodes affects the life of the light source, and arc flicker reduces effective brightness and increases noise. The spectral range of the deuterium lamp is only distributed between 190nm and 400nm, the luminous plasma area is large, the brightness is low, the output power is attenuated by 50% in 1000 hours, and the service life is short. Halogen lamps have short lifetimes, large filament areas, low power at 400nm, and are typically used in combination with deuterium lamps to achieve a broad spectrum, but coupling two independent light sources results in lower brightness, and the spectral output changes with 2 different light source lifetimes, affecting their stability.
In response to the limitations of current light source technology, a laser driven light source (US007435982B2) is proposed, which comprises a quartz bulb filled with a high pressure gas, the high pressure gas in the bulb being first excited by two electrodes, and then a high density plasma is sustained by a continuous beam of laser light focused into the quartz bulb, the plasma being located near the focal point of the focused beam. Since the plasma temperature can reach 10000K-20000K without the electrode participation during the plasma sustaining period, and the power deposition and the plasma sustaining position in the laser-sustained plasma can be changed by controlling the focusing characteristics of the laser, the possibility is provided for realizing a light source with higher brightness, long service life and broadband spectrum. However, the gas container in this structure is a sealed quartz bulb cavity, and the change of the internal gas and the pressure can be performed only by replacing the bulb, so that the possibility of more internal gas conditions is limited. And the cooling of the quartz bulb is not easy to solve, during the plasma light emitting period, the heat radiation of the plasma can cause the temperature rise of the cavity wall, which is not beneficial to the maintaining condition of the plasma and the stability of the spectral output, under the condition of higher internal gas temperature and pressure, the quartz bulb has certain potential safety hazard, and the plasma outputs strong UV and DUV light to cause the ultraviolet deformation of the quartz bulb, thereby easily causing the cracking phenomenon. The plasma ignition stage still needs the participation of the electrodes, has certain pollution to the internal gas, the plasma is still maintained in the centers of the two electrodes after ignition, the electrodes are still damaged by the overhigh plasma temperature, the electrodes and the laser are not easy to be synchronously controlled, the analysis of the plasma at different time characteristics is not facilitated, meanwhile, a plasma light collecting device needs to be additionally designed in the structure, and the complexity of the whole device is increased.
Through the above analysis, the problems and defects of the prior art are as follows:
the existing light source limits more possibilities of internal gas conditions, easily causes the temperature rise of a cavity wall, is not beneficial to the maintaining conditions of plasma and the stability of spectral output, and easily generates deformation and fracture phenomena of a quartz bulb under the condition of higher internal gas temperature and pressure.
The plasma ignition stage of the existing light source still needs the participation of the electrodes, has certain pollution to the internal gas, the plasma is still maintained in the centers of the two electrodes after ignition, the electrodes are still damaged by the overhigh plasma temperature, the electrodes and the laser are not easy to be synchronously controlled, the analysis of the plasma characteristics at different moments is not facilitated, meanwhile, a plasma light collecting device needs to be additionally designed in the structure, and the complexity of the whole device is increased.
The difficulty in solving the above problems and defects is:
currently, in order to pursue commercial value, a laser-driven light source pays attention to low cost and practicability, for example, the macroscopic characteristics of the light source such as high brightness and wide spectrum are concerned, but the attention on how the plasma evolves and develops under energy injection is less, and for example, a conventional short-arc xenon lamp existing in commercial is selected and directly purchased, and the inherent electrode of the conventional short-arc xenon lamp is used for igniting and exciting the plasma. Meanwhile, certain disadvantages are brought by quartz materials, elliptical shapes and the like of the conventional short-arc xenon lamp, the invention focuses more on scientific research and exploration on the characteristics of plasma and avoids the influence of external conditions on a light source as much as possible, so that a self-designed discharge cavity and a plasma control device are selected, a series of disadvantages caused by the fact that the conventional laser driving light source selects a commercial short-arc xenon lamp for reducing the cost are avoided, and meanwhile, the light source structure described by the invention is completely feasible in the aspect of technical principles of laboratory implementation.
The significance of solving the problems and the defects is as follows:
the invention focuses on the exploration of plasma characteristics, utilizes the self-made gas discharge cavity and the external condition control device, avoids the defects of electrodes, can conveniently explore the characteristics of plasmas of different gases in different states by changing different conditions, such as changing gas components, pressure intensity, cavity temperature and the like, and the double-laser structure is easy to synchronously control, and observes the evolution process of the same plasma from being excited to being maintained at different moments. The basic principle research of the plasma can better guide the design of the laser maintenance light source, and further optimize the macroscopic characteristics of the light source, such as high brightness, wide spectrum and the like.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a laser-sustained plasma broadband light source and application thereof.
The Laser Sustained Plasma (LSP) technique is that after 'ignition', a near-infrared continuous laser beam focused by a focusing system maintains a high-density plasma in a container filled with high-pressure Xe or mixed inert gas to generate a broadband high-brightness light sourceDifferent from CO2The laser maintains the reverse bremsstrahlung absorption principle of plasma, and the near-infrared laser maintains plasma by laser radiation absorption through transition between atomic excited state energy levels. And the absorption coefficient of inert gases such as Xe and Ar in the near infrared is lower, so that smaller plasmas can be obtained at higher gas pressure than CO2The laser maintains a plasma size on the order of tens of centimeters, the near infrared laser maintains a plasma with a smaller volume, a size of several hundred micrometers, and a brighter brightness. The basic structure of the light source therefore essentially comprises the "ignition" device, the working gas, the container containing the gas, the laser to sustain the plasma. In the invention, the 'ignition' device is a pulse laser, the working gas is Xe or other gases, the container for containing the gases is a self-made cavity capable of containing high-pressure gases, and the laser for maintaining plasma is a continuous laser. In order to further analyze the plasma characteristics under different conditions, the type and gas pressure of the working gas and the laser power of the plasma need to be controlled, so that a gas control device and a gas cavity capable of bearing high pressure are needed, a laser entrance window and a plasma diagnosis window need to be designed for the cavity, and in order to increase the stability of a light source, a circulating water cooling structure needs to be designed, the temperature of the cavity is controlled, and the influence of the temperature change of the cavity on the plasma state is reduced. The light emitted by the sustained plasma needs to be applied to a specific experiment, and therefore, the plasma light collection device needs to be designed so that the plasma light is input to a specific application as parallel or focused light.
The invention is realized in such a way that a laser maintenance plasma broadband light source comprises a cavity, working gas, an air charging and discharging device, an incidence window, an exit window, two lasers, a lens, a plane mirror, a reflecting surface and circulating water cooling;
the cavity is filled with high-pressure working gas, the left side of the cavity is connected with a gas charging and discharging device through a connecting pipeline, an incident window and an exit window are formed in the outer side of the cavity, a light beam of one pulse laser is focused by a lens and reaches the inside of the sealed cavity through one incident window, the other continuous laser beam is reflected by a plane mirror, is focused by a focusing lens and reaches the inside of the cavity through the other incident window;
the cavity comprises a reflecting surface inside, the mirror surface is coated with high-reflection materials, light generated by the plasma is reflected by the reflecting surface in the cavity, and is collected and used by the plane mirror and the lens after passing through the exit window;
be provided with the circulation water-cooling structure around the cavity, the temperature that the circulation water-cooling structure is used for control cavity avoids plasma's thermal radiation to make the cavity temperature too high.
Further, the cavity is a metal cavity with good thermal conductivity, and no electrode exists in the cavity.
Further, the working gas is one of mercury vapor, hydrogen, oxygen, argon, xenon or other inert gases, or a mixture of two or more gases in different proportions, and the gas pressure is 1atm to 200 atm.
Further, the inflation and deflation device comprises a gas storage bottle, a pressure sensor, a barometer, a valve and a vacuum pump, and the type and the pressure of the working gas are controlled by the inflation and deflation device.
Further, the material of the incident window and the exit window is transparent to laser light or plasma light transmitted therethrough.
Further, the two lasers are respectively a pulse laser and a continuous laser, the pulse laser is used for exciting gas in the cavity to form plasma, the continuous laser is used for maintaining the plasma, the focusing focus of the light beam of the pulse laser is the same as that of the light beam of the continuous laser and is positioned at the focus of the reflecting surface, the pulse laser and the continuous laser are synchronously arranged, and the energy of the continuous laser is input into the plasma after the pulse laser is single or a plurality of pulses.
Further, the reflecting surface is in the shape of a paraboloid, an ellipsoid and the like, and the surface of the reflecting surface is coated with a high-reflection material for focusing a laser beam or reflecting light emitted by plasma.
Further, the temperature of the circulating water cooling structure around the cavity is controlled by an external temperature control instrument, and the external water cooling temperature when the gas is not excited and the water cooling temperature after the plasma is stabilized can be different.
Another object of the present invention is to provide a method for controlling a laser-sustained plasma broadband light source, comprising:
controlling the type and the gas pressure of the working gas through a gas control device; the air pumping system pumps the cavity into a vacuum environment, a specific working gas is filled in an external gas storage bottle of the inflation system, a gas pressure is set in a range of 1 atm-200 atm by a barometer, and valves are arranged at two ends of the air pumping system and the inflation system to control the inlet and outlet of the gas and the pressure.
The laser entering cavity with different powers and the plasma characteristic diagnosis are facilitated by designing a laser entering window and a plasma diagnosis window; focused laser beams with different laser powers enter the cavity through a plane incidence window on the cavity to maintain plasma, and the plasma can be researched for characteristics, such as electron temperature, electron density, spectrum and the like, through a diagnosis window by optical equipment such as a spectrometer, a CCD and the like.
The temperature of the gas cavity is controlled through the circulating water cooling structure, so that the influence of the temperature change of the cavity on the state of the plasma is reduced; the cavity is provided with a water-cooling circulating pipeline and a water inlet and outlet, circulating water enters the cavity from the inlet and passes through the whole cavity through the circulating pipeline, so that the temperature of the cavity is maintained at the temperature specifically set by the temperature control instrument, and then the circulating water is discharged out of the cavity through the outlet.
The plasma light is input into a specific application scene in parallel or focused light through the plasma light collecting device. The plasma light which is similar to a point light source and is diffused to the periphery is collected by utilizing the geometrical reflection optical characteristics of the optical reflection surfaces with different shapes to the light beams and is changed into parallel light or focused light, so that the parallel light or the focused light is output out of the cavity.
Another object of the present invention is to provide an application of the laser sustained plasma broadband light source in the fields of semiconductor, material and life science.
By combining all the technical schemes, the invention has the advantages and positive effects that:
the invention utilizes a double laser structure to achieve electrodeless excitation and plasma maintenance, thereby forming a broadband light source, and aims to completely avoid the influence of an electrode on the light emitting characteristic of the laser maintenance plasma, avoid the defect that the problems of inconvenient gas component and pressure control of a sealed bulb and cooling are not easy to solve, combine a gas container and a plasma light collecting device, simplify the complexity of the whole device of the laser maintenance plasma light source, and secondly, the double laser structure is easy to control and synchronize, thereby providing convenience for analyzing the plasma state and the characteristic at different moments.
The electrodeless double-laser structure can completely avoid the influence of the electrode on the laser maintenance plasma, the two lasers are convenient to synchronously control, the characteristic of the laser maintenance plasma is furthest explored, the temperature of the cavity can be conveniently controlled by the water-cooled circulating structure, the optimal external condition is provided for the excitation and maintenance of the plasma, the components and the pressure of high-pressure gas in the cavity can be controlled by the air charging and discharging device, the plasma spectrum under different states is explored, the spectrum output is optimized, and meanwhile, the complexity of the whole experimental device is simplified by the combination of the gas containing structure and the light collecting structure and the electrodeless structure.
The self-made cavity replaces a quartz bulb, and the cavity is provided with a plurality of inlets and outlets and plane windows, so that defocusing influence of the elliptical shape of the quartz bulb on laser and plasma light transmission is reduced, potential safety risks of materials are avoided, and plasma diagnosis is facilitated.
Compared with a quartz bulb, the gas charging and discharging device is arranged, so that the components and the pressure of gas in the cavity can be changed more conveniently, the plasma characteristics of different gases in different states can be explored, and the output of the plasma light source spectrum can be optimized for application requirements.
The invention replaces the electrode structure with the double-laser structure, avoids the defects that the electrode pollutes gas, is easy to be damaged, limits the formation of plasma and the like, and simultaneously, the double-laser structure is easy to be synchronously controlled, thereby being beneficial to the characteristic research of the plasma at different moments.
The circulating water cooling structure is arranged outside the cavity, so that the cooling problem of the traditional quartz bulb is not easy to solve, but the high temperature of the plasma is easy to crack the bulb, and the stability and the spectral output of the plasma are adversely affected.
The reflecting surface is arranged in the cavity, so that the cavity combines the gas containing function and the plasma light collecting function, and a plasma light collecting device is not required to be additionally designed, so that the integral experimental device is simplified.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained from the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a first embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a second embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a third embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a fourth embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a fifth embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention.
In the figure: 1. a cavity; 2. a working gas; 3. a circulating water cooling structure; 4. a reflective surface; 5. an incident window; 6. a lens; 7. a pulsed laser; 8. an entrance/exit window; 9. a mirror; 10. a lens; 11. a continuous laser; 12. a plane mirror; 13. plasma; 14. an inflation system; 15. an air extraction system; 16. a plasma collection window.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In view of the problems of the prior art, the present invention provides a laser-sustained plasma broadband light source, and the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of a first embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention. The structure comprises a metal cavity 1, working gas 2 can be contained in the cavity 1, circulating water cooling 3 is arranged around the cavity, the shape of the inner part of the cavity forms a reflecting surface 4, an incident window 5 is arranged on the cavity, a lens 6 plays a role of focusing laser, pulse laser 7 outputs pulse light, another incident/emergent window 8 is arranged on the cavity and used for incident laser, plasma light is emitted, the plasma light is reflected by a reflector 9, a lens 10 plays a role of focusing laser, a continuous laser 11 outputs high-power continuous light beams, a plane reflector 12 is used for changing the laser transmission direction, white light with high brightness and broad spectrum is emitted by a plasma 13, an inflation system 14 is used for conveying the working gas 2 in the cavity, and an air exhaust system 15 can pump the gas in the cavity into vacuum.
The air pumping system 15 can be a vacuum pump to pump the interior of the cavity 1 into a vacuum environment, the air charging system 14 can comprise an air storage bottle and an air pressure meter, xenon with pressure varying from 1atm to 200atm is charged into the cavity, valves are arranged at two ends of the cavity to control the air pressure in the cavity, the pulse laser 7 is an Nd YAG laser, the single pulse energy is about 100mJ, the full width at half maximum is 10ns, the wavelength is 1064nm, and the focal length of the light beam of the pulse laser 7 is 35mmThe C film plano-convex mirror 6 is focused, and reaches high-pressure xenon with the excitation pressure of about 40atm in the cavity through the quartz glass incidence window 5, an initial excitation plasma is formed at a focusing point, the Nd: YAG laser lasts for a single pulse or a plurality of laser pulses, the continuous laser 11 is a fiber laser, the highest output power is 250W, the wavelength is 1080nm, and the beam quality M is2The continuous laser beam is reflected by the plane reflector 12 to change the propagation direction of the beam, the continuous laser beam is vertically propagated upwards from the lower part, is focused by the C film plano-convex mirror 10 with the focal length of 50mm, penetrates through the plane mirror 9, enters the incidence window 8, reaches the interior of an excited plasma formed by pulse laser in high-pressure xenon, maintains the stable luminescence of the xenon plasma 13, the continuous laser beam is vertically incident from the lower part to maintain the plasma, the influence of thermal gravity convection on the plasma is favorably reduced, the focusing point of the pulse laser beam and the focusing point of the continuous laser beam are the same and are both positioned at the focus of the reflecting surface 4, the light emitted by the plasma 13 is collected by the parabolic reflecting surface 4 coated with high-reflection materials to form parallel light, the parallel light is propagated out of the emergence window 8, and the direction of the beam is changed by the plane reflector 9 so as to be collected and used. The circulating water cooling system 3 around the cavity is used for controlling the temperature of the cavity and respectively maintaining a different proper temperature before the gas is not excited and during the plasma maintaining period, thereby respectively reducing the difficulty of laser excitation of the plasma and increasing the stability of the plasma maintaining.
Fig. 2 is a schematic diagram of a second embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention. Compared with the first embodiment of fig. 1, the laser focusing mode and the plasma light collecting mode are slightly different, the cavity 1 is filled with high-pressure working gas 2, the components and the pressure of the working gas 2 are controlled by the inflation and deflation systems 14 and 15, the light beam of the pulse laser 7 enters the cavity through the entrance window 5 by focusing of the focusing lens 6 to excite the working gas at the focal point to form excited plasma, the light beam of the continuous laser 11 is focused by the focusing lens 10 to change the direction of the focused light beam through the plane mirror to enable the focused light beam to reach the high-pressure gas in the cavity through the entrance window 8 to maintain the plasma 13 to continuously emit light, the focusing point of the pulse laser beam and the focusing point of the continuous laser beam are the same and are both positioned at the focal point of the reflecting surface 4, and the light emitted by the plasma 13 is reflected by the reflecting surface 4 to become parallel light and transmitted to the exit window 8 to be collected for use.
Fig. 3 is a schematic diagram of a third embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention. Compared with the embodiment of fig. 1 and 2, the method for maintaining the plasma 13 by the combined action of the pulse laser 7 and the continuous laser 11 is the same, but the cavity structure is changed, the position of the incident window 8 of the continuous laser 11 is separated from the position of the plasma collecting window 16, the reflecting surface 4 is arranged on the same side of the continuous laser incident window 8, the reflecting surface is in an elliptical shape and is mainly used for collecting light rays emitted by the continuous laser incident end of the plasma 13, experiments show that the temperature of the plasma 13 at the laser incident end is higher, so that a high-intensity spectrum can be emitted more easily, the plasma light is reflected by the elliptical reflecting surface 4, is focused to the other focus of the elliptical reflecting surface 4 through the emergent window 16, and the energy is focused, so that the high-intensity plasma light can be obtained more favorably for practical application.
Fig. 4 is a schematic diagram of a fourth embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention. In this embodiment, the light beams of the pulse laser 7 and the continuous laser 11 are focused into the cavity from the same direction, the cavity 1 contains the high-pressure working gas 2, the components and the pressure of the working gas 2 are controlled by the inflation and deflation systems 14 and 15, the reflector 4 inside the cavity is an elliptical reflector, the light beam of the pulse laser 7 penetrates through the plane reflector 12, is focused by the focusing lens 10, enters the cavity through the entrance window 8, the focusing focus of the pulse laser light beam coincides with a focus of the elliptical reflector 4, similarly, the light beam of the continuous laser 11 is reflected by the plane reflector 12, changes the propagation direction, is focused by the focusing lens 10, enters the cavity through the entrance window 8, the focusing point of the continuous laser light beam coincides with the focusing point of the pulse laser light beam and a focus of the elliptical reflector 4, and controls the synchronization of the pulse laser 7 and the continuous laser 11, the continuous laser 11 sustains the plasma 13 after one or several pulses of the pulsed laser excite the high pressure gas. The light emitted by the plasma 13 is collected by the elliptical reflecting surface 4 and focused to another focal point of the elliptical reflecting surface 4 via the exit window 16.
Fig. 5 is a schematic diagram of a fifth embodiment of a laser-sustained plasma broadband light source according to an embodiment of the present invention. Compared with the three embodiments, the reflecting surface 4 in the cavity 1 is still an elliptical reflecting surface, but the focusing mode of the continuous laser 11 is changed, and the continuous laser beam is finally reflected and focused into the plasma 13 by the elliptical reflecting surface 4. The light beam of the continuous laser 11 is focused by the focusing lens 10, the plane reflector 12 changes the light beam propagation direction, then the light beam is focused to a focus point and continues to propagate, the focused focus point is positioned at one focus point of the reflecting surface 4, the light beam penetrates through the plane reflector 9 and enters the cavity 1 filled with the high-pressure working gas 2 through the incidence window 8, the light beam is reflected and focused to another focus point of the reflecting surface 4 by the elliptic reflecting surface 4 in the cavity, the light beam of the pulse laser 7 is also focused to the focus point, the light beams of the pulse laser 7 and the continuous laser 11 act together, the plasma 13 is maintained at the focus point of the elliptic reflecting surface, the light emitted by the plasma 13 is reflected and collected by the elliptic reflecting surface 4 and is transmitted out of the cavity, the light beam propagation direction is changed through the reflection of the plane reflector 9, and finally the focus is used for practical application.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The above description is only for the purpose of illustrating the present invention and the appended claims are not to be construed as limiting the scope of the invention, which is intended to cover all modifications, equivalents and improvements that are within the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A laser maintenance plasma broadband light source is characterized by comprising a cavity, working gas, a gas charging and discharging device, an incidence window, an exit window, two lasers, a lens, a plane mirror, a reflecting surface and circulating water cooling;
the cavity is filled with high-pressure working gas, the left side of the cavity is connected with a gas charging and discharging device through a connecting pipeline, an incident window and an exit window are formed in the outer side of the cavity, a light beam of one pulse laser is focused by a lens and reaches the inside of the sealed cavity through one incident window, the other continuous laser beam is reflected by a plane mirror, is focused by a focusing lens and reaches the inside of the cavity through the other incident window;
the cavity comprises a reflecting surface inside, the mirror surface is coated with high-reflection materials, light generated by the plasma is reflected by the reflecting surface in the cavity, and is collected and used by the plane mirror and the lens after passing through the exit window;
and a circulating water cooling structure is arranged around the cavity and used for controlling the temperature of the cavity.
2. The laser-sustained plasma broadband light source of claim 1, wherein the cavity is a metal cavity with good thermal conductivity, and no electrode is present inside the cavity.
3. The laser-sustained plasma broadband light source of claim 1, wherein the working gas is one of mercury vapor, hydrogen, oxygen, argon, xenon, or other inert gases, or a mixture of two or more gases in different proportions, and the gas pressure is 1atm to 200 atm.
4. The laser-sustained plasma broadband light source of claim 1, wherein the gas charging and discharging device comprises a gas cylinder, a pressure sensor, a gas pressure gauge, a valve, and a vacuum pump, and the type and pressure of the working gas are controlled by the gas charging and discharging device.
5. The laser-sustained plasma broadband light source of claim 1, wherein the material of the entrance window and the exit window is transparent to the transmitted laser or plasma light.
6. The laser-sustained plasma broadband light source of claim 1, wherein the two lasers are a pulse laser for exciting gas in the chamber to form plasma and a continuous laser for sustaining the plasma, a focal point of the pulse laser beam is the same as a focal point of the continuous laser beam and both are located at a focal point of the reflecting surface, and synchronization of the pulse laser and the continuous laser is set such that the continuous laser energy is input into the plasma after a single pulse or several pulses of the pulse laser.
7. The laser-sustained plasma broadband light source of claim 1, wherein the reflecting surface has a parabolic shape and an ellipsoidal shape, and the surface of the reflecting surface is coated with a highly reflective material for focusing a laser beam or reflecting light emitted from the plasma.
8. The laser-sustained plasma broadband light source of claim 1, wherein a temperature of the circulating water-cooled structure around the cavity is controlled by an external temperature control instrument, and the external water-cooled temperature when the gas is not excited is different from a water-cooled temperature after the plasma is stabilized.
9. The method for controlling a laser-sustained plasma broadband light source according to any one of claims 1 to 8, wherein the method for controlling a laser-sustained plasma broadband light source comprises:
controlling the type and the gas pressure of the working gas through a gas control device;
the laser entering cavity with different powers and the plasma characteristic diagnosis are facilitated by designing a laser entering window and a plasma diagnosis window;
the temperature of the gas cavity is controlled through the circulating water cooling structure, so that the influence of the temperature change of the cavity on the state of the plasma is reduced;
the plasma light is input into a specific application scene in parallel or focused light through the plasma light collecting device.
10. Use of a laser-sustained plasma broadband light source as claimed in any one of claims 1 to 8 in the fields of semiconductors, materials and life sciences.
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| CN115355524A (en) * | 2022-06-29 | 2022-11-18 | 西安航天精密机电研究所 | Laser ignition priming system and method |
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| CN115355524A (en) * | 2022-06-29 | 2022-11-18 | 西安航天精密机电研究所 | Laser ignition priming system and method |
| CN115355524B (en) * | 2022-06-29 | 2023-07-18 | 西安航天精密机电研究所 | Laser ignition detonation system and method |
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