CN113675705A - Method and device for loading high-speed flyer based on electric explosion and laser coupling - Google Patents

Method and device for loading high-speed flyer based on electric explosion and laser coupling Download PDF

Info

Publication number
CN113675705A
CN113675705A CN202110916114.0A CN202110916114A CN113675705A CN 113675705 A CN113675705 A CN 113675705A CN 202110916114 A CN202110916114 A CN 202110916114A CN 113675705 A CN113675705 A CN 113675705A
Authority
CN
China
Prior art keywords
laser
voltage
mct
pulse
electric explosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110916114.0A
Other languages
Chinese (zh)
Inventor
朱朋
汪柯
吴立志
张伟
胡艳
叶迎华
沈瑞祺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing University of Science and Technology
Original Assignee
Nanjing University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing University of Science and Technology filed Critical Nanjing University of Science and Technology
Priority to CN202110916114.0A priority Critical patent/CN113675705A/en
Publication of CN113675705A publication Critical patent/CN113675705A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction

Abstract

The invention discloses a method and a device for loading a high-speed flyer based on electric explosion and laser coupling. The device comprises a high-voltage capacitor discharge unit, an MCT high-voltage switch driving module, a solid pulse laser, an optical element and a digital delay generator: the high-voltage capacitor discharge unit comprises a high-voltage capacitor, an MCT high-voltage switch and an exploding foil chip based on a transparent glass substrate; the digital time delay generator is used for sending pulse signals to the MCT high-voltage switch driving module and the solid pulse laser, when the metal bridge foil is subjected to electric explosion under the capacitive discharge effect, laser beams enter an electric explosion product, namely plasma, through the transparent glass substrate, secondary energization is carried out on the plasma, and electric explosion and laser coupling acceleration flyer is achieved. The invention combines laser and electric explosion, utilizes the laser to carry out secondary energization on metal electric explosion products, improves the temperature and the pressure of plasma, realizes secondary acceleration and provides a new means for the research of impact dynamics.

Description

Method and device for loading high-speed flyer based on electric explosion and laser coupling
Technical Field
The invention belongs to the field of high-speed flyer loading, and particularly relates to a method and a device for loading a high-speed flyer based on electric explosion and laser coupling.
Background
In the field of impact dynamics, in order to research the response of materials in an extreme mechanical environment, dynamic high-pressure loading means such as an electric gun, a laser driver, an explosion driver and the like are often required.
The measures all depend on high-speed or ultra-high-speed flyer impact target materials to realize the loading of dynamic high pressure of GPa-TPa magnitude. The principle of the electric gun is that a high-voltage capacitor discharges to generate a pulse large current, and the metal bridge foil generates electric explosion under the action of joule heat to generate plasma to drive the flying piece. However, the energy of a pure electric explosion drive is limited, and the speed of the driven flyer is also limited.
Disclosure of Invention
The invention aims to provide a method and a device for loading a high-speed flyer based on electric explosion and laser coupling.
The technical solution for realizing the purpose of the invention is as follows: the device for loading the high-speed flyer based on the electric explosion and laser coupling comprises a high-voltage capacitor discharge unit, an MCT high-voltage switch driving module, a solid pulse laser, an optical element and a digital delay generator:
the high-voltage capacitor discharge unit comprises a high-voltage capacitor, an MCT high-voltage switch and an exploding foil chip based on a transparent glass substrate;
the MCT high-voltage switch driving module is used for amplifying the pulse signal sent from the digital delay generator so as to control the MCT high-voltage switch to be closed;
the laser beam emitted by the solid pulse laser is focused between the glass substrate of the exploding foil chip and the metal bridge foil through an optical element;
the digital time delay generator is used for sending pulse signals to the MCT high-voltage switch driving module and the solid pulse laser, when the metal bridge foil is subjected to electric explosion under the capacitive discharge effect, laser beams enter an electric explosion product, namely plasma, through the transparent glass substrate, secondary energization is carried out on the plasma, and electric explosion and laser coupling acceleration flyer is achieved.
Furthermore, the device also comprises a pulse high-voltage power supply used for charging the high-voltage capacitor.
Furthermore, the system also comprises a direct-current constant-voltage power supply for supplying power to the MCT high-voltage switch driving module.
Further, the transparent glass substrate is optical glass.
Further, the optical glass is Borofloat 33 glass.
Further, the solid-state pulse laser is used for sending a laser beam with nanosecond pulse width.
Further, the optical element comprises two total reflection mirrors and a plano-convex lens;
laser beams emitted by the solid pulse laser sequentially pass through the two total reflection mirrors for reflection and then are focused on an interface between the glass substrate and the metal bridge foil through the plano-convex lens.
A method for loading high-speed flyer by adopting the device comprises the following steps:
step (1): opening the solid pulse laser, adjusting the angles of the total reflector and the plano-convex lens, and adjusting the distance between the plano-convex lens and the exploding foil chip to vertically focus the light beam at the metal bridge foil position from the back of the exploding foil chip through the glass substrate
Step (2): connecting a high-voltage end and a grounding end of a pulse high-voltage power supply with two ends of a high-voltage capacitor respectively to supply power to the high-voltage capacitor, wherein the voltage is set to be 1000V; the positive electrode and the ground of a constant-voltage direct current source are respectively connected with VCC and GND of an MCT high-voltage switch driving module to provide a working power supply for the driving module, and the power supply voltage is set to be 10V;
and (3): setting channel parameters of a digital delay generator; pulse 1 and pulse 2 are respectively connected with CLK-In and Q-In interfaces of the solid-state pulse laser and used for triggering the laser, and the rising edge t of the pulse 11And the rising edge t of pulse 22The time difference Δ t of (2) controls the energy of the laser, the rising edge t of the pulse 22Light t coming out of the laser3Is fixed, i.e. the laserHas a delay time of (t)3-t2) Pulse 3 controls MCT high-voltage switch to be closed, and rising edge t of pulse 34To the starting point t of the current in the capacitor discharge circuit5Is fixed, i.e. the delay time of the MCT switch is (t)5-t4) (ii) a At a fixed laser energy, i.e. t1,t2The relative time difference between t3 and t5 can be adjusted by changing t4, so that the action time of the electric energy and the laser is controlled;
and (4): a digital delay generator is used for sending a control signal, an MCT high-voltage switch is closed, loop current starts to increase, bridge foil is subjected to electric explosion under the action of the current, an electric explosion product is cut and drives the flyer to move along an accelerating chamber, then laser enters the explosion product from a glass substrate, the explosion product absorbs energy of the laser, the temperature is increased, the pressure is increased, and therefore the flyer is accelerated again.
Further, the setting of the channel parameters of the digital delay generator in the step (3) is specifically as follows: the 1-channel pulse parameter is set to be 0-50 mu s, and the 1-channel rising edge t10ns, 50 mus pulse width, 2-channel parameter set to 660 mus-710 mus, rising edge t2660 mus, pulse width 50 mus; the 1 channel and the 2 channel are respectively connected with CLK-in and Q-in interfaces on the solid pulse laser and are used for triggering the laser; the fixed delay time (t3-t2) of the laser is 900ns, where t3The time of light emission of the laser is 660 mus-900 ns, the rising edge t4 of the 3-channel pulse is set to be 660 mus-500 ns, the pulse width is 10 mus, and the pulse width of the 3-channel is larger than the duration time of the loop current, so that the energy stored in the capacitor can be completely released; the fixed delay time (t5-t4) of the MCT high-voltage switch is 100ns, wherein t5The initial moment of the loop current is 650 mus-600 ns, namely the initial moment of the electric energy acting on the bridge foil, the laser action moment is 650 mus-900 ns, and the laser action time is delayed by 300ns compared with the current initial point.
The preparation method of the device comprises the following steps:
step (1): preparing an explosive foil chip with Borofloat 33 glass as a transparent substrate by adopting an MEMS (micro electro mechanical System) process, wherein the thickness of the glass substrate is 0.4-0.8 mm;
step (2): respectively welding the 0.22 mu F high-voltage ceramic capacitor, the MCT high-voltage switch and the drive module of the MCT switch on a PCB, and fixing the PCB by using a fixing device;
and (3): the digital delay generator is respectively connected with the solid pulse laser and the MCT switch driving module, the MCT switch driving module is connected with the MCT high-voltage switch, and an optical element is arranged behind the solid pulse laser.
Compared with the prior art, the invention has the remarkable advantages that:
according to the invention, the electric gun device and the laser loading device are combined, and in the process of accelerating the flyer by virtue of the plasma generated by metal electric explosion, the plasma is radiated by introducing laser, so that the temperature and the pressure of the plasma are improved, and the flyer speed is increased; compared with the existing electric gun loading device, the electric gun loading device realizes the coupling of electric energy and laser energy, and increases the flight piece launching speed limit of the electric gun device.
Drawings
FIG. 1 is a circuit diagram of a capacitive discharge cell of the high-speed flyer device driven by electric explosion and laser coupling according to the present invention.
Fig. 2 is a laser light path diagram of the electric explosion and laser coupling driving high-speed flying piece device.
Fig. 3 is a timing diagram of control signals for the electric explosion and laser coupling driving high-speed flyer device according to the invention.
Fig. 4 is a general schematic diagram of the electric explosion and laser coupling driving high-speed flying piece device of the invention.
Description of reference numerals:
the device comprises a 1-pulse high-voltage power supply, a 2-capacitor discharge unit, a 2-1-high-voltage capacitor, a 2-2-exploding foil chip, a 2-3-MCT high-voltage switch, a 3-MCT switch driving module, a 4-direct-current constant-voltage power supply, a 5-solid pulse laser, a 6-optical element and a 7-digital delay generator.
Detailed Description
The present invention is described in further detail below with reference to the attached drawing figures.
The traditional electric explosion device drives the flyer by only depending on plasma generated by electric explosion, and the laser drive drives the flyer by using plasma formed by ablating a metal film by high-energy laser. Due to the difference of the action principle and the device of the two, no relevant report of combining the two with the loading flyer appears. On the other hand, since the limited working time of the electric gun and the laser loading device does not exceed 1 microsecond, how to accurately control the coupling of the electric gun and the laser loading device in nanosecond and microsecond time scales also faces difficulty.
In order to further improve the flying piece transmitting capacity of the electric gun device, the laser loading flying piece device and the electric explosion device are combined by adopting a proper control means, secondary energization is carried out on metal electric explosion products by utilizing laser, the temperature and the pressure of plasma are improved, and therefore secondary acceleration is realized.
According to the invention, by combining the electric gun and the laser loading flyer device, two energy forms of electric energy and optical energy are innovatively combined for flyer acceleration, and the flyer speed of the electric gun device is greatly increased. Compared with the traditional gas switch and a planar medium switch, the MCT switch is used as a novel semiconductor switch, and the low-voltage triggering characteristic and the high delay consistency of the MCT switch are favorable for realizing accurate control on capacitor discharge. On the other hand, the high-performance digital delay generator is adopted, so that the electric energy and the laser can be accurately controlled within microsecond or even nanosecond time scale, and the coupling of the electric energy and the laser is realized.
As shown in fig. 1-4, an apparatus for loading a high-speed flyer based on electric explosion and laser coupling, the apparatus comprising: the device comprises a pulse high-voltage power supply 1, a capacitor discharge unit 2, an MCT switch driving module 3, a constant-voltage direct-current power supply 4, a solid pulse laser 5, an optical element 6 and a digital delay generator 7. The pulse high-voltage power supply 1 is used for charging a high-voltage capacitor 2-1 in the capacitor discharge unit 2; the MCT switch is used for controlling the conduction of a high-voltage capacitor discharge loop, so that pulse large current is generated in the loop, and the exploding foil chip is electrically exploded; the MCT switch driving module 3 is used for amplifying the pulse signal sent from the digital delay generator, so that the MCT switch is quickly and effectively closed; the constant voltage direct current power supply 4 supplies power to the MCT switch driving module 3; the solid pulse laser 5 can send laser with specific wavelength and pulse width, and the laser can be triggered by adopting an external triggering mode; the optical element is used for laser light path adjustment, and ensures that a laser beam is accurately focused between the glass substrate of the exploding foil chip and the metal bridge foil. And the digital delay generator is used for sending a pulse signal and simultaneously controlling the MCT switch to be closed and the laser to work.
Pulse 1 and pulse 2 are connected to the CLK-In and Q-In interfaces of the solid-state pulsed laser, respectively, for triggering the laser. Rising edge t of pulse 11And the rising edge t of pulse 22The time difference at controls the energy of the laser. Rising edge t of pulse 22Light t coming out of the laser3Is fixed, i.e. the delay time of the laser is (t)3-t2). Pulse 3 controls MCT switch to close, and rising edge t of pulse 34To the starting point t of the current in the capacitor discharge circuit5Is fixed, i.e. the delay time of the MCT switch is (t)5-t4). At a fixed laser energy, i.e. t1,t2The relative time difference between t3 and t5 can be adjusted by changing t4, so that the acting time of the electric energy and the laser can be controlled.
Examples
The embodiment designs a device for loading the high-speed flyer based on electric explosion and laser coupling. The flyer loading device comprises a pulse high-voltage power supply 1, a capacitor discharge unit 2, an MCT switch driving module 3, a direct-current constant-voltage power supply 4, a solid pulse laser 5, an optical element 6 and a digital delay generator 7. The pulse high-voltage power supply 1 is used for supplying power to a capacitor discharge unit in the device; the constant-voltage direct current source is used for supplying power to the driving module of the MCT switch; the solid pulse laser is used for sending a laser beam with nanosecond pulse width; the digital delay generator is used for controlling the closure of the MCT switch and the laser to emit laser.
The device for loading the high-speed flyer based on electric explosion and laser coupling comprises the following preparation steps:
firstly, preparing an exploding foil chip with boric acid glass as a transparent substrate by adopting an MEMS (micro-electromechanical systems) process, wherein the thickness of the glass substrate is 0.6mm, and the material of the glass substrate is Borofloat 33.
And secondly, respectively welding the 0.22 mu F high-voltage ceramic capacitor, the MCT switch and a driving module of the MCT switch on a PCB, and fixing the PCB by using a fixing device.
And thirdly, turning on the laser, and enabling the light beam to be vertically and accurately focused at the position of the bridge foil through the glass substrate from the back of the chip by adjusting elements such as a total reflection mirror, a plano-convex lens and the like and adjusting the distance between the plano-convex lens and the exploding foil chip.
And fourthly, respectively connecting the high-voltage end and the grounding end of the pulse high-voltage power supply with the two ends of the high-voltage capacitor to supply power to the high-voltage capacitor, wherein the voltage is set to be 1000V. And the positive electrode of the constant-voltage direct current source and the ground are respectively connected with VCC and GND of the driving chip to provide a working power supply for the driving module, and the power supply voltage is set to be 10V.
And fifthly, setting channel parameters of the digital delay generator. In this case a DG645 type digital delay generator is used. As shown in FIG. 3, the 1-channel pulse parameter is set to 0-50 μ s (rising edge t)10ns, 50 mus pulse width), 2-channel parameters are set to (660 mus-710 mus, rising edge t2660 mus, 50 mus pulse width). The 1 channel and the 2 channel are respectively connected with CLK-in and Q-in interfaces on the laser and are used for triggering the laser. The fixed delay time of the laser (t3-t2) is 900ns. Therefore, the timing at which the laser emits laser light is 660 μ s _900ns.3 the channel pulse rising edge t4 is set to 660 μ s _500ns, and the pulse width is 10 μ s. The pulse width of the 3-channel must be greater than the duration of the loop current to ensure that the energy stored in the capacitor is fully discharged. The fixed delay time (t5-t4) for the MCT switch is about 100 ns. The initial moment of the loop current is therefore 650 mus 600ns, the initial moment of the electrical energy acting on the bridge foil. The laser action time is 650 mus 900ns, so the laser action time is delayed by 300ns compared with the current starting point.
And sixthly, sending a control signal by using the digital delay generator, closing the MCT switch, starting to increase the loop current, electrically exploding the bridge foil under the action of the current, and shearing and driving the flyer to move along the acceleration chamber by an electric explosion product. After a period of time, the laser light is incident on the explosive product from the rear of the glass substrate, and the explosive product absorbs the energy of the laser light, so that the temperature is increased, the pressure is increased, and the flyer is accelerated again.

Claims (8)

1. The device for loading the high-speed flyer based on the electric explosion and laser coupling is characterized by comprising a high-voltage capacitor discharge unit, an MCT high-voltage switch driving module, a solid pulse laser, an optical element and a digital delay generator:
the high-voltage capacitor discharge unit comprises a high-voltage capacitor, an MCT high-voltage switch and an exploding foil chip based on a transparent glass substrate;
the MCT high-voltage switch driving module is used for amplifying the pulse signal sent from the digital delay generator so as to control the MCT high-voltage switch to be closed;
the laser beam emitted by the solid pulse laser is focused between the glass substrate of the exploding foil chip and the metal bridge foil through an optical element;
the digital time delay generator is used for sending pulse signals to the MCT high-voltage switch driving module and the solid pulse laser, when the metal bridge foil is subjected to electric explosion under the capacitive discharge effect, laser beams enter an electric explosion product, namely plasma, through the transparent glass substrate, secondary energization is carried out on the plasma, and electric explosion and laser coupling acceleration flyer is achieved.
2. The apparatus of claim 1, further comprising a pulsed high voltage power supply for charging the high voltage capacitor.
3. The apparatus of claim 2 further comprising a dc constant voltage power supply for powering the MCT high voltage switch driver module.
4. The device of claim 3, wherein the transparent glass substrate is optical glass.
5. The apparatus of claim 4, wherein the solid state pulsed laser is configured to deliver a laser beam having nanosecond pulse widths.
6. The apparatus according to claim 5, wherein the optical element comprises two total reflection mirrors and a plano-convex lens;
laser beams emitted by the solid pulse laser sequentially pass through the two total reflection mirrors for reflection and then are focused on an interface between the glass substrate and the metal bridge foil through the plano-convex lens.
7. A method of loading a high speed flyer using the apparatus of any of claims 1 to 6, comprising the steps of:
step (1): opening the solid pulse laser, adjusting the angles of the total reflector and the plano-convex lens, and adjusting the distance between the plano-convex lens and the exploding foil chip to vertically focus the light beam at the metal bridge foil position from the back of the exploding foil chip through the glass substrate
Step (2): connecting a high-voltage end and a grounding end of a pulse high-voltage power supply with two ends of a high-voltage capacitor respectively to supply power to the high-voltage capacitor, wherein the voltage is set to be 1000V; the positive electrode and the ground of a constant-voltage direct current source are respectively connected with VCC and GND of an MCT high-voltage switch driving module to provide a working power supply for the driving module, and the power supply voltage is set to be 10V;
and (3): setting channel parameters of a digital delay generator; pulse 1 and pulse 2 are respectively connected with CLK-In and Q-In interfaces of the solid-state pulse laser and used for triggering the laser, and the rising edge t of the pulse 11And the rising edge t of pulse 22The time difference Δ t of (2) controls the energy of the laser, the rising edge t of the pulse 22Light t coming out of the laser3Is fixed, i.e. the delay time of the laser is (t)3-t2) Pulse 3 controls MCT high-voltage switch to be closed, and rising edge t of pulse 34To the starting point t of the current in the capacitor discharge circuit5Is fixed, i.e. the delay time of the MCT switch is (t)5-t4) (ii) a At a fixed laser energy, i.e. t1,t2The relative time difference between t3 and t5 can be adjusted by changing t4 to controlThe action time of the power generation and the laser;
and (4): a digital delay generator is used for sending a control signal, an MCT high-voltage switch is closed, loop current starts to increase, bridge foil is subjected to electric explosion under the action of the current, an electric explosion product is cut and drives the flyer to move along an accelerating chamber, then laser enters the explosion product from a glass substrate, the explosion product absorbs energy of the laser, the temperature is increased, the pressure is increased, and therefore the flyer is accelerated again.
8. A method for manufacturing a device according to claims 1-6, comprising the steps of:
step (1): preparing an explosive foil chip with Borofloat 33 glass as a transparent substrate by adopting an MEMS (micro electro mechanical System) process, wherein the thickness of the glass substrate is 0.4-0.8 mm;
step (2): respectively welding the 0.22 mu F high-voltage ceramic capacitor, the MCT high-voltage switch and the drive module of the MCT switch on a PCB, and fixing the PCB by using a fixing device;
and (3): the digital delay generator is respectively connected with the solid pulse laser and the MCT switch driving module, the MCT switch driving module is connected with the MCT high-voltage switch, and an optical element is arranged behind the solid pulse laser.
CN202110916114.0A 2021-08-11 2021-08-11 Method and device for loading high-speed flyer based on electric explosion and laser coupling Pending CN113675705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110916114.0A CN113675705A (en) 2021-08-11 2021-08-11 Method and device for loading high-speed flyer based on electric explosion and laser coupling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110916114.0A CN113675705A (en) 2021-08-11 2021-08-11 Method and device for loading high-speed flyer based on electric explosion and laser coupling

Publications (1)

Publication Number Publication Date
CN113675705A true CN113675705A (en) 2021-11-19

Family

ID=78542177

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110916114.0A Pending CN113675705A (en) 2021-08-11 2021-08-11 Method and device for loading high-speed flyer based on electric explosion and laser coupling

Country Status (1)

Country Link
CN (1) CN113675705A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114244118A (en) * 2021-12-07 2022-03-25 贵州航天电子科技有限公司 High-voltage control device of full-electronic safety actuating mechanism
CN115852319A (en) * 2023-03-02 2023-03-28 北京理工大学 Electric explosion-ICP inductively coupled plasma high-speed vapor deposition system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KE WANG等: "Strategy for increasing flyer launching capacity of electro-explosively actuator by coupling electric explosion and plasma discharge", 《SENSORS AND ACTUATORS A: PHYSICAL》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114244118A (en) * 2021-12-07 2022-03-25 贵州航天电子科技有限公司 High-voltage control device of full-electronic safety actuating mechanism
CN114244118B (en) * 2021-12-07 2023-08-04 贵州航天电子科技有限公司 High-voltage control device of full-electronic safety actuating mechanism
CN115852319A (en) * 2023-03-02 2023-03-28 北京理工大学 Electric explosion-ICP inductively coupled plasma high-speed vapor deposition system

Similar Documents

Publication Publication Date Title
CN113675705A (en) Method and device for loading high-speed flyer based on electric explosion and laser coupling
CN100399654C (en) Pulse control in laser systems
US4870244A (en) Method and device for stand-off laser drilling and cutting
CN105874887B (en) EUV light source
US20050224469A1 (en) Efficient micro-machining apparatus and method employing multiple laser beams
US8367968B2 (en) System and method for multi-pulse laser processing
US8411716B2 (en) Circuit assembly for controlling an optical system to generate optical pulses and pulse bursts
US20060114948A1 (en) Workpiece processing system using a common imaged optical assembly to shape the spatial distributions of light energy of multiple laser beams
US20160097616A1 (en) Laser Guided and Laser Powered Energy Discharge Device
US9699877B2 (en) Extreme ultraviolet light generation apparatus including target droplet joining apparatus
JP2009500796A (en) LPP, EUV light source drive laser system
Zvorykin et al. Laser and target experiments on KrF GARPUN laser installation at FIAN
KR20140143812A (en) Laser annealing device and laser annealing method
CN108353489A (en) Target spreading rate control in EUV light source
CN103217870A (en) Droplet target control system guided by laser beam
WO2011039424A4 (en) Method and apparatus for laser ablation
RU2004131678A (en) HIGH PEAK OPTICAL RESONATOR AND COMBINATION OF SEVERAL SUCH OPTICAL RESONATORS INTENDED FOR, IN PARTICULAR, FOR EXCITING A LIGHT GENERATOR IN THE EXTREMELY UV-RANGE
TW201935526A (en) LIFT deposition apparatus and method
CN100383656C (en) Laser pulse width control method and device
CN207677240U (en) A kind of light channel structure extending pulse type laser pulse width
US5046423A (en) Laser-driven flyer plate
CN106848826B (en) A kind of double electro-optical Q-switch regenerative amplification devices
CN114019326B (en) Laser-induced discharge method and system for generating long-distance controllable high-voltage discharge
CN115519243A (en) Laser pulse space-time correlation positioning scanning method, device and system
US10743397B2 (en) Method and device for generating electromagnetic radiation by means of a laser-produced plasma

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20211119

RJ01 Rejection of invention patent application after publication