CN113670511B - Vacuum calibration system and detection method thereof - Google Patents

Vacuum calibration system and detection method thereof Download PDF

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Publication number
CN113670511B
CN113670511B CN202110929956.XA CN202110929956A CN113670511B CN 113670511 B CN113670511 B CN 113670511B CN 202110929956 A CN202110929956 A CN 202110929956A CN 113670511 B CN113670511 B CN 113670511B
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vacuum degree
standard container
deviation range
electromagnetic valve
product
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CN113670511A (en
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吴青云
沈文科
缪文瑶
俞益
汪斐
张达
王雷
吴杰
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Ningbo Aifake Vacuum Technology Research Institute Co ltd
Ulvac Ningbo Co Ltd
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Ningbo Aifake Vacuum Technology Research Institute Co ltd
Ulvac Ningbo Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges

Abstract

The invention relates to the field of vacuum pumps, and discloses a vacuum calibration system and a detection method thereof.

Description

Vacuum calibration system and detection method thereof
Technical Field
The invention relates to the field of vacuum pumps, in particular to a vacuum calibration system and a detection method thereof.
Background
Currently, for products requiring evacuation operation, evacuation equipment is generally used for realizing, and in order to ensure the qualification of the products, detection equipment is required for detecting the vacuum degree of the evacuated products, and detecting whether the vacuum degree requirement is met;
when it is detected that the vacuum degree of the product does not meet the process requirements, an operator needs to check whether the product has a problem or the evacuation equipment has a problem, which requires a lot of effort and time, so that the working efficiency of the production line is lowered.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a vacuum calibration system and a detection method thereof, which are used for realizing self-checking between evacuation equipment and products.
In order to achieve the above purpose, the present invention provides the following technical solutions: the vacuum calibration system comprises a processing module, a first interface pipeline and a second interface pipeline, wherein the first interface pipeline is used for being connected with a product, the second interface pipeline is used for being connected with evacuation equipment, the first interface pipeline is communicated with the second interface pipeline, a first comparison module is arranged on the first interface pipeline, and a second comparison module is arranged on the second interface pipeline;
the first comparison module comprises a first comparison unit and a first detection unit, the first detection unit is used for detecting the vacuum degree of the first interface pipeline in real time, generating first detection data and sending the first detection data to the processing module, the processing module is internally provided with performance parameters of evacuation equipment, the first comparison unit is used for comparing the first detection data with the performance parameters, a standard container is communicated with the second interface pipeline, the second comparison module comprises a second comparison unit and a second detection unit, the second detection unit is used for detecting the vacuum degree of the standard container in real time, generating second detection data and sending the second detection data to the processing module, and the second comparison unit is used for comparing the second detection data with the performance parameters;
the first interface pipeline is provided with a first electromagnetic valve, the second interface pipeline is provided with a second electromagnetic valve, and the standard container is provided with a deflation valve.
As a further development of the invention, the first solenoid valve is located between the first detection unit and the second interface line, and the second solenoid valve is located between the connection of the first interface line and the second interface line and the standard container.
As a further improvement of the present invention, a parameter table is configured in the processing module, a plurality of the performance parameters are recorded on the parameter table, and product data corresponding to the performance parameters are recorded on the parameter table, the processing module includes an input unit for inputting the product parameters and generating input data, and the parameter table uses the input data as an index.
As a further improvement of the present invention, a deviation range is configured on the parameter table, a difference between the first detection data and the performance parameter is a first difference, a difference between the second detection data and the performance parameter is a second difference, the first comparison unit determines whether the first difference is within the deviation range, the second comparison unit determines whether the second difference is within the deviation range, and the deviation range is plus or minus three percent.
A second object of the present invention is to provide a method for detecting a vacuum calibration system, comprising a vacuum calibration system according to any one of claims 1 to 4, a first detection unit comprising a first vacuum sensor, a second detection unit comprising a second vacuum sensor, a processing module comprising a central processor, comprising the steps of:
an air extraction step, namely opening a first electromagnetic valve, closing a second electromagnetic valve and an air release valve, and vacuumizing a product by using air evacuation equipment;
a first detection step, wherein a deviation range is configured in the central processing unit, the first vacuum degree sensor detects the vacuum degree of the product, the central processing unit judges whether the difference value between the vacuum degree of the product and the performance parameter is within the deviation range, and if the difference value between the vacuum degree of the product and the performance parameter is greater than the deviation range, a second detection step is executed;
a second detection step of closing the first electromagnetic valve, opening the second electromagnetic valve, and vacuumizing the standard container by using the vacuumizing equipment; the second vacuum degree sensor detects the vacuum degree of the standard container, and the central processing unit judges whether the difference value between the vacuum degree of the standard container and the performance parameter is in a deviation range or not; if the difference value between the vacuum degree of the standard container and the performance parameter is in the deviation range, judging that the product is abnormal; if the difference between the vacuum degree of the standard container and the performance parameter is larger than the deviation range, judging that the evacuation equipment is abnormal, and executing a self-checking step;
the self-checking step, wherein the evacuating equipment performs vacuumizing operation on the standard container for a plurality of times, and the central processing unit judges whether the difference value between the vacuum degree and the performance parameter of the standard container is within a deviation range or not for a plurality of times;
and a sending step, wherein the central processing unit generates a judgment report from the judgment data of each time and sends the judgment report to the terminal.
As a further improvement of the invention, the deviation range is plus or minus three percent of the vacuum degree of the qualified product.
As a further improvement of the invention, the method further comprises the steps of after maintenance, closing the first electromagnetic valve, opening the second electromagnetic valve, vacuumizing the standard container by using the vacuumizing equipment, and judging whether the difference value between the vacuum degree and the performance parameter of the standard container is within a deviation range or not by using the central processing unit.
As a further improvement of the invention, the terminal is provided with a classification library for storing a plurality of classification information, each classification information comprises a plurality of datum comparison data and corresponding processing values, the processing module is configured with a maintenance strategy, the maintenance strategy receives the judgment report, and the judgment data and the datum comparison data are compared from the classification library according to the judgment data so as to obtain the corresponding classification information and the corresponding processing values;
the terminal is configured with a scheme library, the scheme library stores maintenance information, the maintenance information comprises classification information, corresponding execution values and execution strategies, and under the corresponding classification information, if the processing values are consistent with the execution values, the corresponding execution strategies are output, and an execution report is generated and displayed on the terminal.
As a further improvement of the present invention, the present invention further includes a local terminal including a local library configured with a dialog box, the terminal issuing a warning when there is no corresponding classification information in the solution library or a processing value under the classification information is inconsistent with an execution value, and popping up the dialog box, recording a maintenance procedure in the dialog box, and configuring an execution value to be stored in the local library, the maintenance policy indexing both the local library and the solution library.
The invention has the beneficial effects that: the invention can detect the vacuum degree of the product in real time, know whether the product is qualified or not, judge whether the evacuation equipment is damaged or not through the second detection unit and the standard container when detecting the data abnormality, close the first electromagnetic valve, open the second electromagnetic valve, the air release valve is still in a closed state when detecting the problem, the evacuation equipment starts evacuating the standard container, if the difference between the second detection data and the performance parameter is very large and is not in the deviation range, judge that the product is in a problem, if the difference between the second detection data and the performance parameter is very small and is in the deviation range, initially judge that the evacuation equipment is abnormal, at this time, the evacuation equipment evacuates the standard container for a plurality of times, the air is led into the standard container through the air release valve, and compare the second detection data and the performance parameter in a plurality of times of evacuations, if the deviation between the two is large, judge that the evacuation equipment is abnormal, remind a worker to repair the evacuation equipment, and detect whether the product is in a problem or the evacuation equipment is in a problem, the condition, the automatic detection can be realized without manual or additional detection equipment.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Reference numerals: 1. a first interface line; 2. a second interface line; 3. a first detection unit; 4. a second detection unit; 5. a standard container; 6. a first electromagnetic valve; 7. a second electromagnetic valve; 8. and a bleed valve.
Detailed Description
The invention will now be described in further detail with reference to the drawings and examples. Wherein like parts are designated by like reference numerals. It should be noted that the words "front", "back", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings, and the words "bottom" and "top", "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.
Referring to fig. 1, a vacuum calibration system of the present embodiment includes a processing module, a first interface pipeline 1 and a second interface pipeline 2, where the first interface pipeline 1 is used for connecting with a product, the second interface pipeline 2 is used for connecting with an evacuation device, the first interface pipeline 1 is communicated with the second interface pipeline 2, a first comparison module is disposed on the first interface pipeline 1, and a second comparison module is disposed on the second interface pipeline 2;
the first comparing module comprises a first comparing unit and a first detecting unit 3, the first detecting unit 3 is used for detecting the vacuum degree of the first interface pipeline 1 in real time, the first detecting unit 3 comprises a first vacuum degree sensor and generates first detecting data to be sent to the processing module, the vacuum degree of a product can be detected in real time, whether the product is qualified or not is known, the processing module is internally provided with performance parameters of the evacuating equipment, the performance parameters are the vacuum degree parameters of the evacuating equipment, which need to evacuate the product, different performance parameters can be set if the vacuum degree parameters of different products, corresponding performance parameters, namely, the vacuum degree parameters, are selected according to different products, the first comparing unit is used for comparing the first detecting data with the performance parameters, at the moment, the first electromagnetic valve 6 is in an open state, the second electromagnetic valve 7 and the air release valve 8 are both in a closed state, if the difference between the first detection data and the performance parameter is large, and whether the product is in a problem or the evacuation equipment is in a problem needs to be judged, when the product is in a problem, the first electromagnetic valve 6 is closed, the second electromagnetic valve 7 is opened, the air release valve 8 is still in a closed state, the evacuation equipment starts evacuating the standard container 5, the standard container 5 is communicated with the second interface pipeline 2, the second comparison module comprises a second comparison unit and a second detection unit 4, the second detection unit 4 is used for detecting the vacuum degree of the standard container 5 in real time, the second detection unit 4 comprises a second vacuum degree sensor and generates second detection data to be sent to the processing module, the second comparison unit is used for comparing the second detection data with the performance parameter, the first electromagnetic valve 6 is arranged on the first interface pipeline 1, a second electromagnetic valve 7 is arranged on the second interface pipeline 2, a deflation valve 8 is arranged on the standard container 5, the first electromagnetic valve 6 is positioned between the first detection unit 3 and the second interface pipeline 2, and the second electromagnetic valve 7 is positioned between the joint of the first interface pipeline 1 and the second interface pipeline 2 and the standard container 5; if the difference between the second detection data and the performance parameter is large and is not in the deviation range, the product is judged to be problematic, if the difference between the second detection data and the performance parameter is small and is in the deviation range, the evacuation equipment is primarily judged to be abnormal, at this time, the evacuation equipment evacuates the standard container 5 for many times, air is led into the standard container 5 through the air release valve 8, the second detection data and the performance parameter during many times of evacuation are compared, if the difference between the second detection data and the performance parameter is large, the evacuation equipment is judged to be abnormal, the staff is reminded to maintain the evacuation equipment, whether the evacuation equipment is abnormal or not can be detected under the condition that whether the product is detected to be qualified or not, and whether the evacuation equipment can be normally used or not can be judged after the maintenance, and the performance of the evacuation equipment can also be regularly compared and checked in the daily use process.
The processing module is internally provided with a parameter table, a plurality of performance parameters are recorded on the parameter table, product data corresponding to the performance parameters are recorded on the parameter table, the processing module comprises an input unit, the input unit is used for inputting the product parameters and generating input data, the parameter table takes the input data as an index, a control display screen can be arranged, the product parameters are input on the control display screen, the processing module selects the corresponding performance parameters, the evacuation equipment performs evacuation operation on the product according to the performance parameters, and the deviation range is obtained on the basis of the performance parameters.
Referring to fig. 1, a deviation range is configured on the parameter table, the difference between the first detection data and the performance parameter is a first difference, the difference between the second detection data and the performance parameter is a second difference, the first comparison unit determines whether the first difference is within the deviation range, the second comparison unit determines whether the second difference is within the deviation range, the deviation range is plus or minus three percent, and an error generated by a tiny flaw of a product or a tiny change of performance of an evacuation device is given, and the second comparison unit is within the deviation range, so that qualification of the product can be ensured.
Working principle: when the product is evacuated, the first electromagnetic valve 6 is in an open state, the second electromagnetic valve 7 and the air release valve 8 are in a closed state, if the difference between the first detection data and the performance parameter is large, whether the product is in a problem or the evacuating equipment is in a problem is judged at the moment, when the product is detected, the first electromagnetic valve 6 is closed, the second electromagnetic valve 7 is opened, the air release valve 8 is still in a closed state, the evacuating equipment starts evacuating the standard container 5, if the difference between the second detection data and the performance parameter is large and is not in a deviation range, the product is judged to be in a problem, if the difference between the second detection data and the performance parameter is small and is in a deviation range, the evacuating equipment is primarily judged to be abnormal, at the moment, the evacuating equipment evacuates the standard container 5 for a plurality of times, air is led into the standard container 5 through the air release valve 8, the second detection data and the performance parameter are compared when the evacuation is carried out a plurality of times, if the difference between the two is large, the evacuating equipment is judged to be abnormal, and a worker is reminded to maintain the evacuating equipment.
A method of detecting a vacuum calibration system comprising the vacuum calibration system of any one of claims 1 to 4, characterized in that: the first detecting unit 3 includes a first vacuum degree sensor, the second detecting unit 4 includes a second vacuum degree sensor, and the processing module includes a central processing unit, including the steps of:
an air extraction step, namely opening a first electromagnetic valve 6, closing a second electromagnetic valve 7 and an air release valve 8, and vacuumizing a product by using air evacuation equipment;
a first detection step, wherein a deviation range is configured in the central processing unit, the first vacuum degree sensor detects the vacuum degree of the product, the central processing unit judges whether the difference value between the vacuum degree of the product and the performance parameter is within the deviation range, and if the difference value between the vacuum degree of the product and the performance parameter is greater than the deviation range, a second detection step is executed;
a second detection step of closing the first electromagnetic valve 6, opening the second electromagnetic valve 7, and vacuumizing the standard container 5 by using the vacuumizing equipment; the second vacuum degree sensor detects the vacuum degree of the standard container 5, and the central processing unit judges whether the difference value between the vacuum degree of the standard container 5 and the performance parameter is in a deviation range; if the difference value between the vacuum degree and the performance parameter of the standard container 5 is in the deviation range, judging that the product is abnormal; if the difference between the vacuum degree of the standard container 5 and the performance parameter is larger than the deviation range, judging that the evacuation equipment is abnormal, and executing a self-checking step;
the self-checking step, wherein the evacuating equipment performs vacuumizing operation on the standard container 5 for a plurality of times, and the central processing unit judges whether the difference value between the vacuum degree and the performance parameter of the standard container 5 is within the deviation range or not for a plurality of times;
and a sending step, wherein the central processing unit generates a judgment report from the judgment data of each time and sends the judgment report to the terminal. By the method, whether the product has a problem or the evacuation equipment has a problem can be detected, and the self-detection can be realized without manual or additional detection equipment.
The deviation range is plus or minus three percent of the vacuum degree of the qualified product. The method further comprises the steps of after maintenance, closing the first electromagnetic valve 6, opening the second electromagnetic valve 7, vacuumizing the standard container 5 by using vacuumizing equipment, and judging whether the difference value between the vacuum degree and the performance parameter of the standard container 5 is within a deviation range or not by using the central processing unit.
The terminal is provided with a classification library, the classification library is used for storing a plurality of classification information, each classification information comprises a plurality of datum comparison data and corresponding processing values, the processing module is configured with a maintenance strategy, the maintenance strategy receives the judgment report, and the judgment data and the datum comparison data are compared from the classification library according to the judgment data so as to obtain corresponding classification information and corresponding processing values; different treatment values correspond to different degrees of damage to the evacuation equipment.
The terminal is configured with a scheme library, the scheme library stores maintenance information, the maintenance information comprises classification information, corresponding execution values and execution strategies, and under the corresponding classification information, if the processing values are consistent with the execution values, the corresponding execution strategies are output, and an execution report is generated and displayed on the terminal. Different processing values correspond to different execution strategies, the execution strategies are strategies of how to repair the evacuation equipment, the damage position or the damage mode of the evacuation equipment can be obtained preliminarily according to different judging data, workers or repair staff can find the damage position quickly to repair, repair equipment or accessories can be prepared in advance, and the method is convenient and quick, and saves repair time.
The method comprises the steps that a scheme library is stored in the terminal, a local terminal is arranged in the terminal, the local terminal comprises a local library, the local library is provided with a dialogue box, when no corresponding classification information exists in the scheme library or a processing value under the classification information is inconsistent with an execution value, the terminal gives out a warning, pops up the dialogue box, records a maintenance process in the dialogue box, and is provided with the execution value to be stored in the local library, the local library and the scheme library are simultaneously indexed by a maintenance strategy, the maintenance scheme which is not recorded in the scheme library is added in the local library, and the scheme library is perfected.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.

Claims (6)

1. A vacuum calibration system comprising a processing module, a first interface line (1) and a second interface line (2), said first interface line (1) being adapted to be connected with a product, said second interface line (2) being adapted to be connected with an evacuation device, characterized in that: the first interface pipeline (1) is communicated with the second interface pipeline (2), a first comparison module is arranged on the first interface pipeline (1), and a second comparison module is arranged on the second interface pipeline (2);
the first comparison module comprises a first comparison unit and a first detection unit (3), the first detection unit (3) is used for detecting the vacuum degree of the first interface pipeline (1) in real time, generating first detection data and sending the first detection data to the processing module, the processing module is internally provided with performance parameters of evacuation equipment, the first comparison unit is used for comparing the first detection data with the performance parameters, the second interface pipeline (2) is communicated with a standard container (5), the second comparison module comprises a second comparison unit and a second detection unit (4), the second detection unit (4) is used for detecting the vacuum degree of the standard container (5) in real time, generating second detection data and sending the second detection data to the processing module, and the second comparison unit is used for comparing the second detection data with the performance parameters;
a first electromagnetic valve (6) is arranged on the first interface pipeline (1), a second electromagnetic valve (7) is arranged on the second interface pipeline (2), and a deflation valve (8) is arranged on the standard container (5);
the first detection unit (3) comprises a first vacuum degree sensor, the second detection unit (4) comprises a second vacuum degree sensor, and the processing module comprises a central processing unit, and comprises the following steps:
an air extraction step, namely opening a first electromagnetic valve (6), closing a second electromagnetic valve (7) and an air release valve (8), and vacuumizing a product by using air evacuation equipment;
a first detection step, wherein a deviation range is configured in the central processing unit, the first vacuum degree sensor detects the vacuum degree of the product, the central processing unit judges whether the difference value between the vacuum degree of the product and the performance parameter is within the deviation range, and if the difference value between the vacuum degree of the product and the performance parameter is greater than the deviation range, a second detection step is executed;
a second detection step of closing the first electromagnetic valve (6), opening the second electromagnetic valve (7), and vacuumizing the standard container (5) by using the vacuumizing equipment; the second vacuum degree sensor detects the vacuum degree of the standard container (5), and the central processing unit judges whether the difference value between the vacuum degree of the standard container (5) and the performance parameter is in a deviation range; if the difference value between the vacuum degree and the performance parameter of the standard container (5) is in the deviation range, judging that the product is abnormal; if the difference between the vacuum degree of the standard container (5) and the performance parameter is larger than the deviation range, judging that the evacuation equipment is abnormal, and executing a self-checking step;
the self-checking step, wherein the vacuumizing equipment performs vacuumizing operation on the standard container (5) for a plurality of times, and the central processing unit judges whether the difference value between the vacuum degree and the performance parameter of the standard container (5) is within a deviation range or not for a plurality of times;
a sending step, wherein the CPU generates a judgment report from the judgment data of each time and sends the judgment report to the terminal;
the terminal is provided with a classification library, the classification library is used for storing a plurality of classification information, each classification information comprises a plurality of datum comparison data and corresponding processing values, the processing module is configured with a maintenance strategy, the maintenance strategy receives the judgment report, and the judgment data and the datum comparison data are compared from the classification library according to the judgment data so as to obtain corresponding classification information and corresponding processing values;
the terminal is configured with a scheme library, the scheme library stores maintenance information, the maintenance information comprises classification information, corresponding execution values and execution strategies, and under the corresponding classification information, if the processing values are consistent with the execution values, the corresponding execution strategies are output, and an execution report is generated and displayed on the terminal;
the system comprises a scheme library, a terminal, a local terminal and a maintenance strategy, wherein the scheme library comprises a local library, the local library comprises a dialogue box, when no corresponding classification information exists in the scheme library or a processing value under the classification information is inconsistent with an execution value, the terminal gives out a warning, pops up the dialogue box, records a maintenance process in the dialogue box, and configures the execution value to be stored in the local library, and the maintenance strategy indexes the local library and the scheme library at the same time.
2. A vacuum calibration system according to claim 1, wherein: the first electromagnetic valve (6) is located between the first detection unit (3) and the second interface pipeline (2), and the second electromagnetic valve (7) is located between the joint of the first interface pipeline (1) and the second interface pipeline (2) and the standard container (5).
3. A vacuum calibration system according to claim 2, wherein: the processing module is internally provided with a parameter table, a plurality of performance parameters are recorded on the parameter table, product data corresponding to the performance parameters are recorded on the parameter table, the processing module comprises an input unit, the input unit is used for inputting the product parameters and generating input data, and the parameter table takes the input data as an index.
4. A vacuum calibration system according to claim 3, wherein: the parameter table is configured with a deviation range, the difference between the first detection data and the performance parameter is a first difference, the difference between the second detection data and the performance parameter is a second difference, the first comparison unit judges whether the first difference is located in the deviation range, the second comparison unit judges whether the second difference is located in the deviation range, and the deviation range is plus or minus three percent.
5. A vacuum calibration system according to claim 4, wherein: the deviation range is plus or minus three percent of the vacuum degree of the qualified product.
6. A vacuum calibration system according to claim 5, wherein: the method further comprises the steps of after maintenance, closing the first electromagnetic valve (6), opening the second electromagnetic valve (7), vacuumizing the standard container (5) by using the vacuumizing equipment, and judging whether the difference value between the vacuum degree and the performance parameter of the standard container (5) is within a deviation range or not by using the central processing unit.
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