CN113654495A - Ultrasonic sensor for high-temperature pipeline, preparation method and detection system - Google Patents

Ultrasonic sensor for high-temperature pipeline, preparation method and detection system Download PDF

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Publication number
CN113654495A
CN113654495A CN202110934160.3A CN202110934160A CN113654495A CN 113654495 A CN113654495 A CN 113654495A CN 202110934160 A CN202110934160 A CN 202110934160A CN 113654495 A CN113654495 A CN 113654495A
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China
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layer
ultrasonic sensor
electrode
aluminum nitride
temperature
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CN202110934160.3A
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Chinese (zh)
Inventor
张博南
黄永巍
吴迪
毕超
崔宗文
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Beijing Xintai Zhihe Technology Development Co ltd
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Beijing Xintai Zhihe Technology Development Co ltd
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Priority to CN202110934160.3A priority Critical patent/CN113654495A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness

Abstract

The invention relates to an ultrasonic sensor, a preparation method and a detection system, wherein the ultrasonic sensor comprises a piezoelectric material layer, a back lining layer, a wedge block protective layer, a first electrode and a second electrode; wherein the piezoelectric material layer is connected with the back lining layer and the wedge block protection layer; the first electrode is arranged between the aluminum nitride thin layer and the back lining layer; the second electrode is arranged between the aluminum nitride thin layer and the wedge block protection layer; the piezoelectric material layer, the back lining layer and the wedge block protection layer are all high temperature resistant layers. The ultrasonic sensor solves the problem that the corrosion of a high-temperature pipeline is difficult to monitor for a long time on the premise of ensuring unattended operation, can effectively detect the wall thickness of a steel pipe near the sensor and the corrosion thinning condition caused by high-temperature oil gas after being statically installed on the surface of the high-temperature pipeline, and has high use value.

Description

Ultrasonic sensor for high-temperature pipeline, preparation method and detection system
Technical Field
The invention relates to the field of online automatic monitoring of high-temperature pipelines, in particular to an ultrasonic sensor and a detection system for high-temperature pipelines.
Background
In the prior art, the wall thickness of a corrosive defect of a high-temperature pipeline in oil refining equipment is reduced, and when the sulfur content in crude oil reaches a certain threshold value, serious high-temperature sulfur corrosion is easily generated on the inner wall of a conveying pipeline, and the corrosion can generate great potential safety hazards on the production of the crude oil. Aiming at high-temperature corrosion monitoring, the traditional ultrasonic thickness measurement method of piezoelectric ceramics which cannot resist high temperature has certain limitations: manual operation is needed, an operator needs to carry the thin and long wave guide rod thickness measuring device to enter a high-temperature area, and safety problems exist in personnel; the continuous temperature resistance of the thickness measuring ultrasonic sensor is poor, the thickness measuring ultrasonic sensor cannot contact a high-temperature pipeline for a long time, and the high-temperature coupling agent can be quickly evaporated, so that the measurement is required to be completed within a few seconds, and inconvenience is brought to manual measurement; different measuring personnel have differences on the operation of the instrument, the continuity of the thickness measuring data of the same point is poor, and the corrosion change trend of the point cannot be reflected well; the problems of weak echo signals, serious distortion and more clutters exist in the thickness measurement of the slender waveguide rod, the data processing is complex, and the high-precision thickness measurement is difficult to realize. In addition, the influence of high temperature on the piezoelectric material is reduced by prolonging the length of the probe, but the increase of the length can reduce the intensity of ultrasonic signals and directly influence the precision and the stability of thickness measurement.
Disclosure of Invention
The invention aims to provide an ultrasonic sensor for a high-temperature pipeline, a preparation method and a detection system, which are used for overcoming the defects in the prior art.
The above technical object of the present invention will be achieved by the following technical solutions.
An ultrasonic sensor for a high-temperature pipeline comprises an aluminum nitride thin layer, a back lining layer, a wedge block protective layer, a first electrode and a second electrode;
wherein the aluminum nitride thin layer is connected with the back lining layer and the wedge block protective layer;
the first electrode is arranged between the aluminum nitride thin layer and the back lining layer;
the second electrode is arranged between the aluminum nitride thin layer and the wedge block protection layer.
The above aspect and any possible implementation manner further provide an implementation manner, wherein the backing layer is a high-temperature resistant layered body with a thickness of 10-15 mm; the thickness of the aluminum nitride thin layer is 0.5-0.8 mm.
The above aspect and any possible implementation manner further provide an implementation manner, wherein the wedge protection layer is a cast copper block protection layer with a thickness of 10-15 mm.
The above-described aspects and any possible implementations further provide an implementation in which the ultrasonic sensor further includes a housing that houses the layer of piezoelectric material, the backing layer, the first electrode, and the second electrode within the housing.
The above aspects and any possible implementation manners further provide an implementation manner, and the shell is a high-temperature-resistant stainless steel shell with a thickness of 0.2-1 mm.
The above aspects and any possible implementation manners further provide an implementation manner, where the ultrasonic sensor further includes two positive and negative high-temperature-resistant leads, and the two positive and negative high-temperature-resistant leads are respectively led out from the first electrode and the second electrode.
The above aspect and any possible implementation further provide an implementation, in which the ultrasonic sensor further includes a fastening bolt, one end of the fastening bolt is connected to the backing layer, and the other end of the fastening bolt extends out of the housing.
The invention also provides a detection system of the ultrasonic sensor for the high-temperature pipeline, which is characterized in that
The detection system comprises an ultrasonic sensor, a clamp and a radio frequency signal wire, wherein the clamp is fixedly connected with the ultrasonic sensor, and the radio frequency signal wire is connected with the ultrasonic sensor.
The above aspect and any possible implementation manner further provide an implementation manner, where the number of the ultrasonic sensors and the number of the clamps are several, and at least one of the ultrasonic sensors is disposed on one clamp.
The above aspect and any possible implementation further provide an implementation in which the clamp is a band that surrounds a circumferential profile of the high temperature pipe.
The invention also provides a preparation method of the ultrasonic sensor for the high-temperature pipeline, which is used for preparing the ultrasonic sensor and comprises the following steps:
s1, cutting an aluminum nitride single crystal to obtain an aluminum nitride thin layer with a certain thickness;
s2, forming a first electrode and a second electrode on the first surface and the second surface of the aluminum nitride thin layer;
s3, adhering the backing layer to the first electrode;
s4, adhering the wedge block protective layer to the second electrode;
s5, fixing a fastening bolt on the backing layer;
and S6, the shell penetrates through a fastening bolt to be fixed on the wedge block protective layer.
The invention has the beneficial technical effects
The embodiment provided by the invention has the following beneficial effects:
the ultrasonic sensor comprises a piezoelectric material layer, a back lining layer, a wedge block protection layer, a first electrode and a second electrode; wherein the piezoelectric material layer is connected with the back lining layer and the wedge block protection layer; the first electrode is arranged between the aluminum nitride thin layer and the back lining layer; the second electrode is arranged between the aluminum nitride thin layer and the wedge block protection layer; the piezoelectric material layer, the back lining layer and the wedge block protection layer are all high temperature resistant layers. The ultrasonic sensor can effectively work at the high-temperature environment temperature of more than 400 ℃, solves the problem that the corrosion of a high-temperature pipeline is difficult to monitor for a long time on the premise of ensuring unattended operation, can effectively detect the wall thickness of a steel pipe near the sensor and the corrosion thinning condition caused by high-temperature oil gas after being statically installed on the surface of the high-temperature pipeline, and has high use value.
Drawings
Embodiments of the invention are described in detail below with reference to the attached drawing figures, wherein:
FIG. 1 is a schematic structural diagram of an ultrasonic sensor in an embodiment of the present invention;
FIG. 2 is a first schematic structural diagram of an ultrasonic sensor detection system according to an embodiment of the present invention;
FIG. 3 is a second schematic structural diagram of an ultrasonic sensor detecting system according to an embodiment of the present invention;
FIG. 4 is a third schematic structural diagram of an ultrasonic sensor detection system in an embodiment of the present invention;
fig. 5 is a schematic flow chart of manufacturing an ultrasonic sensor according to an embodiment of the present invention.
Wherein the reference numerals are as follows: 1 thin aluminum nitride layer, 2 backing blocks, 3 wedge block protection layers, 4 fastening bolts, 5 first electrodes, 6 shells, 7 fixing holes and 8 second electrodes.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following detailed description is made with reference to the accompanying drawings and specific examples, but the embodiments of the present invention are not limited thereto.
As shown in fig. 1, the present embodiment provides an ultrasonic sensor for a high-temperature pipeline, which is a piezoelectric ultrasonic sensor, including a piezoelectric material layer, a backing layer 2, a wedge protection layer 3, a first electrode 5, and a second electrode 8;
the piezoelectric material layer is realized by selecting an aluminum nitride thin layer, and the aluminum nitride thin layer 1 is connected with the back lining layer and the wedge block protection layer 3;
the first electrode 5 is arranged between the aluminum nitride thin layer 1 and the back lining layer 2;
the second electrode 8 is disposed between the aluminum nitride thin layer 1 and the wedge protection layer 3.
Specifically, the aluminum nitride thin layer 1 comprises a first surface and a second surface, wherein the first surface is connected with a first layer surface of the backing layer 2; the second surface is connected with a wedge block protection layer 3;
the first electrode 5 is arranged between the first surface and the first layer side of the backing layer 2;
the second electrode 8 is arranged between the second surface and the wedge protection layer 3;
the first surface and the second surface are two surfaces which are parallel to each other; the piezoelectric material layer, the back lining layer 2 and the wedge block protection layer 3 are all high temperature resistant layers.
The first electrode 5 is a positive electrode and the second electrode 8 is a negative electrode, or the first electrode 5 is a negative electrode and the second electrode 8 is a positive electrode.
Preferably, the backing layer 2 is a high-temperature resistant layered body made of tungsten powder material with a certain thickness, the backing layer 2 is made of tungsten powder with the mesh number of 100 meshes, the mesh number of 300 meshes and the mesh number of 500 meshes of 99.99%, the tungsten powder with the mesh number of 100 meshes, the mesh number of 300 meshes and the mesh number of 500 meshes of 500 are mixed according to the proportion of 1:1:2:2, the mixture is pressed at the high temperature of 1000 ℃ to form the cylindrical backing block, the thickness of the backing layer 2 is 10-15 mm, the acoustic impedance of the backing block pressed by the tungsten powder can be well matched with that of the aluminum nitride thin layer 1, the backing block is suitable for being used as the backing layer and can be adhered and pressed on the first surface of the aluminum nitride thin layer 1 under the high-temperature environment higher than 400 ℃, the backing layer is adhered and pressed on the first surface of the aluminum nitride thin layer 1, the echo pulse of the whole ultrasonic sensor is narrowed, the signal bandwidth is improved, and the accurate detection capability of the thickness is enhanced.
Preferably, the wedge block protective layer 3 is a high-temperature-resistant cast copper block protective layer with the thickness of 10-15 mm, and can resist high temperature of 400 ℃ and above, the cast copper block protective layer is integrally processed into a cylinder shape, the upper bottom surface is a plane, the lower bottom surface is processed into an arc shape, in order to enable the ultrasonic sensor to be better attached to the pipe wall of a high-temperature pipeline, the clamp for fixing the ultrasonic sensor and the high-temperature pipeline can be better fixedly coupled, the amplitude of a wall thickness ultrasonic echo signal received by a measuring instrument is higher, and the wall thickness measurement is more accurate.
Preferably, the thickness of the aluminum nitride thin layer is 0.5-0.8 mm, and the aluminum nitride thin layer can be used as a piezoelectric vibrator to generate 1-5 MHz pulse ultrasonic waves for measuring the thickness of the inner wall of the high-temperature pipeline.
Preferably, ultrasonic sensor still includes casing 6, casing 6 will aluminium nitride thin layer 1, back sheet 2, first electrode 5 and second electrode 6 hold in casing 6, casing 6 adopts 0.2 ~ 1 mm's high temperature resistant stainless steel shell, and stainless steel casing 6 is used for shielding external interference to the structural material of protection casing inside is not damaged by high temperature, can be connected with the high temperature pipeline better.
Preferably, the ultrasonic sensor further includes two positive and negative high temperature-resistant leads (not shown in the figure), the two positive and negative high temperature-resistant leads are respectively led out from the first electrode 5 and the second electrode 8, the high temperature leads are used for connecting an impedance analyzer, the ultrasonic sensor collects data of a high temperature pipeline and transmits the data to the impedance analyzer through the high temperature leads, the impedance analyzer analyzes and measures the received data, so as to obtain a resonance curve of the whole ultrasonic sensor, the resonance curve can obtain vibration characteristics of the ultrasonic sensor, the center frequency and the bandwidth of the ultrasonic sensor are calculated and given, the two parameters represent detection characteristics of the ultrasonic sensor, and measurement accuracy of the ultrasonic sensor when the ultrasonic sensor is used for detecting the wall thickness of the high temperature pipeline is determined.
Preferably, the ultrasonic sensor further comprises a fastening bolt 4, one end of the fastening bolt 4 is connected to the second layer of the backing layer 2, the other end of the fastening bolt extends out of the housing 6, and the first layer and the second layer of the backing layer 2 are parallel layers.
Preferably, the ultrasonic sensor further comprises fixing holes 7, the fixing holes 7 are arranged on the outer circular surface of the bottom end of the stainless steel shell 6, at least 4 fixing holes 7 are symmetrically distributed around the circumference, and screws or rivets are screwed into the positions of the 4 fixing holes 7 to achieve the effect of connecting the fixed wedge protecting layer 3 and the stainless steel shell 6.
As shown in fig. 5, the present invention also provides a method of manufacturing an ultrasonic sensor, including the steps of:
step 1, cutting the aluminum nitride single crystal by using a precision cutting machine, grinding the aluminum nitride single crystal smoothly and cleaning the aluminum nitride single crystal to obtain an aluminum nitride thin layer 1 with a certain thickness;
step 2, forming a first electrode and a second electrode on the first surface and the second surface of the aluminum nitride thin layer 1 by adopting direct current sputtering;
step 3, adhering a first layer surface of the backing layer 2 on the first electrode 5;
step 4, adhering the wedge block protective layer 3 on the second electrode 8;
step 5, fixing a fastening bolt 4 on a second layer surface of the backing layer 2;
and 6, fixing the shell 6 on a fixing hole 7 of the wedge block protection layer 3 through a fastening bolt 4.
Preferably, the material of the first electrode 5 and the second electrode 8 is platinum alloy.
The method of the invention cuts the aluminum nitride single crystal to obtain the aluminum nitride thin layer 1 based on the thickness mode, and adds the first electrode 5 and the second electrode 8, the back lining layer 2 and the wedge block protective layer 3 in front on the two surfaces of the aluminum nitride thin layer respectively to prepare the ultrasonic sensor for the online monitoring of the high temperature pipeline. The high-temperature physical vapor transmission method is combined with the crystal seed crystal ingot growth, and the aluminum nitride with a high-quality single crystal structure can be produced. The Curie temperature of the aluminum nitride is about 2000 ℃, the aluminum nitride does not have phase change when the temperature is lower than 2000 ℃, the electromechanical coefficient does not change greatly along with the temperature change, and the aluminum nitride has stable elasticity, dielectric and piezoelectric properties, and also has the characteristics of high thermal conductivity, low thermal expansion rate and high resistivity, so the aluminum nitride is suitable for an ultrasonic sensor material for high-temperature nondestructive detection, can normally work even in a high-temperature environment of more than 400 ℃, and the characteristics of the aluminum nitride cannot change. After aluminum nitride is cut, the upper and lower surfaces in contact with the electrode surface are ground to be smooth, and a platinum alloy electrode is formed on the parallel surface by direct current sputtering of a platinum alloy thin film (with the thickness of 300 nm). Because the surface of the electrode is parallel to the cutting surface, the aluminum nitride is subjected to electric polarization treatment, and thickness mode vibration can be obtained. Platinum thin film electrodes have high melting points, oxidation resistance, and excellent electrical properties, and are widely used in high and low temperature piezoelectric devices. However, there are some limitations to using at temperatures above 600 ℃ due to the re-crystallization and dewetting effects of the platinum thin film that can lead to loss of electrical conductivity and device failure. Alloy electrodes based on platinum Pt, such as platinum rhodium (Pt-Rh), platinum iridium (Pt-Ir) and platinum zirconium (Pt-Zr), do not cause surface degradation of the material when used at temperatures up to 750 ℃, and therefore, the invention selects platinum alloys as the electrode material. The impedance response and the dynamic capacitance value of the prepared aluminum nitride AlN single crystal oscillator can be measured by an impedance analyzer (Keysight E4990A), after the performance of the aluminum nitride single crystal is determined to be normal by the impedance analyzer, the aluminum nitride is bonded with the backing layer 2 by high-temperature glue and then is put into the stainless steel shell 6, then the shell 6 and the wedge block protective layer 3 are fixed by screws at the fixing holes 7 and then are assembled with the fastening bolts 4. The fastening bolt 4 is used for fastening the mechanical coupling of the gap between the backing layer and the aluminum nitride single crystal and wedge protection layers in the whole structure of the sensor. Uniformly coating high-temperature structural adhesive YK-8905 on the first surface and the second surface of the back lining layer 2, the aluminum nitride thin layer 1 and the edge of the surface bonded by the wedge block protective layer 3, plugging the surrounding gap by adopting high-temperature joint adhesive YK-8905, compressing and fixing by using a fastening bolt 4, coating the high-temperature adhesive to ensure that the ultrasonic high-frequency vibration generated by the sensor can be transmitted, and forming ultrasonic waves capable of being detected in a high-temperature pipeline. The method of bonding by the high-temperature glue and fastening by the bolts is beneficial to sealing the bonding interface between the aluminum nitride thin layer 1 and the back lining layer 2 and the wedge block protective layer 3, and the radiation and the reception of ultrasonic waves cannot be influenced due to the fact that the surface of the sensor is debonded due to long-time high-temperature environment.
As shown in fig. 2, the invention further provides a detection system of an ultrasonic sensor for a high-temperature pipeline, the detection system includes an ultrasonic sensor 9, a clamp 10 and a radio frequency signal line 12, the clamp 10 is connected and fixed with the ultrasonic sensor 9, and the radio frequency signal line 12 is connected with two positive and negative high-temperature-resistant leads of the ultrasonic sensor 9.
FIG. 3 illustrates the use of the detection system on a curved pipe; fig. 4 shows a case where the detection system is used on a straight pipeline, and corrosion is easily caused due to uneven stress on an otherwise bent pipeline, and the number of arranged ultrasonic sensors 9 is larger, while the number of arranged ultrasonic sensors 9 on the straight pipeline is smaller, wherein the clamp 10 is a hoop surrounding the circumferential profile of the high-temperature pipeline 11, and the hoop is also designed to be high-temperature resistant, so that long-term stable use can be ensured. The ultrasonic sensors 9 are arranged on the hoops, at least one ultrasonic sensor 9 is arranged on each hoop, at least two ultrasonic sensors 9 are arranged on the circumference of the high-temperature pipeline 11, and the number of the ultrasonic sensors 9 and the number of the clamps 10 are determined according to the length, the bending degree and the measurement accuracy of the high-temperature pipeline 11.
When the device is used, the ultrasonic sensors 9 are fixed on a high-temperature pipeline 11 of an oil pipe through a metal hoop, the hoop penetrates through the ultrasonic sensors 9 at first, a high-temperature-resistant coupling agent (K-8906 high-molecular organic silicon) is coated on the high-temperature pipeline 11 of the oil pipe, the ultrasonic sensors 9 on the hoop are correspondingly installed at positions, needing to be monitored, of the pipeline 11, high-temperature radio-frequency signal wires 11 for connecting the ultrasonic sensors 9 are led out to be connected to an ultrasonic thickness measuring instrument, the wall thickness change condition of a monitoring area is obtained through signal processing of ultrasonic echo waveforms received by the ultrasonic thickness measuring instrument, and real-time online automatic monitoring is provided for monitoring the corrosion state of a high-temperature oil-gas pipeline.
While the foregoing description shows and describes several preferred embodiments of the invention, it is to be understood, as noted above, that the invention is not limited to the forms disclosed herein, but is not intended to be exhaustive or to exclude other embodiments and may be used in various other combinations, modifications, and environments and is capable of changes within the scope of the invention as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. An ultrasonic sensor for a high-temperature pipeline is characterized by comprising a piezoelectric material layer, a back lining layer, a wedge block protective layer, a first electrode and a second electrode;
wherein the piezoelectric material layer is connected with the back lining layer and the wedge block protection layer;
the first electrode is arranged between the aluminum nitride thin layer and the back lining layer;
the second electrode is arranged between the aluminum nitride thin layer and the wedge block protection layer;
the piezoelectric material layer, the back lining layer and the wedge block protection layer are all high temperature resistant layers.
2. The ultrasonic sensor according to claim 1, wherein the backing layer is a high temperature resistant laminate having a thickness of 10 to 15 mm; the piezoelectric material layer is an aluminum nitride thin layer with the thickness of 0.5-0.8 mm.
3. The ultrasonic sensor of claim 1,
the wedge block protective layer is a high-temperature-resistant cast copper block protective layer with the thickness of 10-15 mm.
4. The ultrasonic sensor of claim 1, further comprising a housing that houses the layer of piezoelectric material, backing layer, first electrode, and second electrode within the housing.
5. The ultrasonic sensor of claim 4, wherein the housing is a high temperature resistant stainless steel shell with a thickness of 0.2-1 mm.
6. The ultrasonic sensor of claim 1, further comprising two positive and negative temperature-resistant leads leading from the first and second electrodes, respectively.
7. The ultrasonic sensor of claim 5, further comprising a fastening bolt having one end connected to the backing layer and another end extending out of the housing.
8. A detection system of an ultrasonic sensor for a high-temperature pipeline, characterized in that the detection system comprises the ultrasonic sensor according to any one of claims 1-7, a clamp and a radio frequency signal wire, wherein the clamp is connected and fixed with the ultrasonic sensor, and the radio frequency signal wire is connected with the ultrasonic sensor.
9. The inspection system of claim 8, wherein the number of said ultrasonic sensors and fixtures is several, and at least one of said ultrasonic sensors is disposed on one fixture.
10. A preparation method of an ultrasonic sensor for a high-temperature pipeline is characterized by comprising the following steps: the method for producing the ultrasonic sensor according to any one of claims 1 to 7, comprising the steps of:
s1, cutting an aluminum nitride single crystal to obtain an aluminum nitride thin layer with a certain thickness;
s2, forming a first electrode and a second electrode on the first surface and the second surface of the aluminum nitride thin layer;
s3, adhering the backing layer to the first electrode;
s4, adhering the wedge block protective layer to the second electrode;
s5, fixing a fastening bolt on the backing layer;
and S6, the shell penetrates through a fastening bolt to be fixed on the wedge block protective layer.
CN202110934160.3A 2021-08-13 2021-08-13 Ultrasonic sensor for high-temperature pipeline, preparation method and detection system Pending CN113654495A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201107299Y (en) * 2007-11-30 2008-08-27 北京工业大学 High performance pipe ultrasound guide wave detection sensor
JP2014074635A (en) * 2012-10-04 2014-04-24 Mitsubishi Heavy Ind Ltd Ultrasonic sensor
CN205483116U (en) * 2016-03-30 2016-08-17 宣化钢铁集团有限责任公司 High temperature resistant ultrasonic flow sensor
CN110375890A (en) * 2019-08-07 2019-10-25 上海交通大学 Passive wireless acoustic surface wave high-temperature heat flux sensor
CN111504542A (en) * 2020-04-20 2020-08-07 中物院成都科学技术发展中心 Fastener with stress sensing function and suitable for being used in high-temperature environment and film transduction sensing system
CN215639321U (en) * 2021-08-13 2022-01-25 北京信泰智合科技发展有限公司 Piezoelectric ultrasonic sensor and detection system for high-temperature pipeline

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201107299Y (en) * 2007-11-30 2008-08-27 北京工业大学 High performance pipe ultrasound guide wave detection sensor
JP2014074635A (en) * 2012-10-04 2014-04-24 Mitsubishi Heavy Ind Ltd Ultrasonic sensor
CN205483116U (en) * 2016-03-30 2016-08-17 宣化钢铁集团有限责任公司 High temperature resistant ultrasonic flow sensor
CN110375890A (en) * 2019-08-07 2019-10-25 上海交通大学 Passive wireless acoustic surface wave high-temperature heat flux sensor
CN111504542A (en) * 2020-04-20 2020-08-07 中物院成都科学技术发展中心 Fastener with stress sensing function and suitable for being used in high-temperature environment and film transduction sensing system
CN215639321U (en) * 2021-08-13 2022-01-25 北京信泰智合科技发展有限公司 Piezoelectric ultrasonic sensor and detection system for high-temperature pipeline

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