CN113651618B - Silicon carbide ceramic matrix composite reflector and preparation method and application thereof - Google Patents
Silicon carbide ceramic matrix composite reflector and preparation method and application thereof Download PDFInfo
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Abstract
The invention relates to the technical field of manufacturing of optical reflector structures, in particular to a silicon carbide ceramic matrix composite reflector and a preparation method and application thereof. The invention also provides a reflector containing the continuous fiber reinforced silicon carbide ceramic matrix composite and a manufacturing method thereof, the reflector is used as a reflector main body material, the preparation of the reflector surface and the support structure is completed through the structural design and the integrated molding technology, and the specific stiffness, the strength and the thermal stability of the reflector can be greatly improved; meanwhile, the problem of surface micro-defects of the ceramic matrix composite reflector is greatly reduced through surface treatment of the reflecting surface, and the optical reflection performance of the mirror surface is improved; in addition, this technique has unique advantages in the preparation of large-sized mirrors.
Description
Technical Field
The invention belongs to the technical field of manufacturing of optical reflector structures, and particularly relates to a silicon carbide ceramic matrix composite reflector as well as a preparation method and application thereof.
Background
Since the 21 st century, due to the rapid development of the fields of earth observation, deep space exploration and the like, higher and higher requirements are put forward on the observation capability of a photoelectric imaging system, and an optical reflector is taken as an important component of the photoelectric imaging system, so that the photoelectric imaging system is widely concerned by researchers. For the selection and preparation of high performance optical mirror materials, the following main properties are generally of concern:
(1) selecting a low-density material; on one hand, the low-weight requirement of the space remote sensing camera on the load can be met, the satellite emission cost can be reduced, and on the other hand, the mirror surface deformation of the ground telescope caused by the self-weight can be reduced;
(2) the composite material has high specific stiffness and excellent comprehensive mechanical properties; the high specific stiffness can avoid the influence of the dead weight of the reflector, the assembly stress, the impact vibration of a satellite launching section and the like on the mirror surface, and meanwhile, the high fracture toughness is also beneficial to realizing the integration of the optical-mechanical function, so that the stress accumulation caused by the mismatch of the material performance of the supporting part and the reflector is reduced;
(3) has good thermal stability; the service temperature environment of the space camera and the foundation telescope is severe, the heat conductivity of the material is good, the thermal expansion coefficient is low, the thermal distortion of the reflector can be reduced, and the imaging quality of the photoelectric imaging system is ensured;
(4) resisting space particle irradiation; the service life of the space reflector material can be prolonged;
at present, the reflector material mainly includes glass material, low expansion metal material, ceramic material, composite material, and the like. Glass materials are the first generation of reflector materials, commonly used are ULE and ZEROUR, etc.; the glass material has low thermal expansion coefficient and excellent optical processing performance, but the glass material has low thermal conductivity and poor specific rigidity; the second-generation reflector material is a low-expansion metal material, mainly comprises aluminum, beryllium and the like, has excellent heat-conducting property, relatively large thermal expansion coefficient and easily influenced by temperature in surface shape precision; the silicon carbide ceramic belongs to a third-generation reflector material, has good chemical stability, excellent space particle irradiation resistance, low thermal expansion coefficient, high elastic modulus and better heat conduction performance, but the higher crack sensitivity of the ceramic material is an important bottleneck for limiting the development of the ceramic material, and meanwhile, the Mohs hardness of the silicon carbide material is very high, so that the material has high processing difficulty and high cost.
In order to further improve the lightweight degree of the reflector material and solve the problem of high brittleness of ceramic materials, the fiber reinforced silicon carbide ceramic matrix composite reflector is produced. The material has the advantages of high strength, high modulus, low crack sensitivity, lower thermal expansion coefficient, chemical corrosion resistance, space irradiation resistance, high thermal conductivity and the like, is lower in density, and can meet the requirements of light weight and high reliability compared with other materials.
Commercially available from German ECM company
The material is reinforced by short carbon fibers, a carbon fiber reinforced silicon carbide ceramic matrix composite reflector blank is obtained through the working procedures of phenolic resin impregnation, carbonization, graphitization, siliconizing reaction sintering and the like, and a mirror surface meeting the requirements is obtained through a surface grinding and polishing process; the material prepared by the method has lower strength because of no continuous fiber reinforcement; and because the procedures such as siliconizing reaction sintering and the like are required, the volume of the reflector inevitably shrinks in the process, and the subsequent processing amount and the polishing difficulty are increased.
Disclosure of Invention
Aiming at the technical defects, the invention provides a silicon carbide ceramic matrix composite reflector and a preparation method and application thereof, aiming at overcoming the problems that the sintered silicon carbide and chopped fiber reinforced silicon carbide ceramic matrix composite reflector has low strength and a large number of microscopic defects exist on the fiber reinforced silicon carbide ceramic matrix composite reflector surface, the invention provides a continuous fiber reinforced silicon carbide ceramic matrix composite reflector and a manufacturing method thereof, the continuous fiber reinforced silicon carbide ceramic matrix composite reflector is adopted as a reflector main body material, the preparation of the reflector surface and a support structure is completed through the structural design and the integrated molding technology, and the specific rigidity, the strength and the thermal stability of the reflector can be greatly improved; meanwhile, the problem of surface micro-defects of the ceramic matrix composite reflector is greatly reduced through surface treatment of the reflecting surface, and the optical reflection performance of the mirror surface is improved; in addition, this technique has unique advantages in the preparation of large-sized mirrors.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the utility model provides a carborundum ceramic matrix composite mirror surface, the mirror surface is made for adopting the carborundum ceramic matrix composite mirror surface of continuous fibers reinforcing, continuous fibers is continuous carbon fiber, continuous carborundum fiber, the mixed continuous fibers of carbon fiber and carborundum fiber, continuous fibers account for the volume fraction of carborundum ceramic matrix composite mirror surface is 20 ~ 60%.
The invention also provides a preparation method of the silicon carbide ceramic matrix composite material reflector, which comprises the following steps:
(1) preparing a corresponding fiber preform by adopting continuous fibers according to the reflector structure model;
(2) after the fiber preform prepared in the step (1) is shaped, preparing an interface of the fiber preform and preparing a silicon carbide ceramic matrix in a reaction furnace by adopting a first chemical vapor deposition process to obtain a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(21) the interface preparation of the fiber preform is to prepare the pyrolytic carbon material on the surface of the fiber preform, and the specific preparation method comprises the following steps: placing the fiber preform in the step (1) in a reaction furnace, introducing mixed gas of propylene, natural gas and hydrogen, and performing chemical vapor deposition for 20-60h at 600-1100 ℃ to obtain a fiber preform with a pyrolytic carbon interface;
wherein the flow rate of the propylene is 200-1000mL/min, and the flow rate of the natural gas is 500-1500 mL/min;
(22) preparing a silicon carbide ceramic matrix by preparing carbon inside the fiber preform at the pyrolytic carbon interface in step (21)The specific preparation method of the silicon carbide ceramic comprises the following steps: placing the fiber preform of the pyrolytic carbon interface in the step (21) in a reaction furnace, taking trichloromethylsilane as a precursor, taking hydrogen as a carrier gas and a diluent gas, taking argon as a protective gas, and mixing trichloromethylsilane and H2The flow ratio of Ar to Ar is 1: 5-15: 10-20, and the fiber reinforced silicon carbide ceramic matrix composite reflector blank is prepared by deposition for 40-100h under the conditions of 900-1200 ℃ and the total air pressure of a deposition furnace of 0.5-5 kPa;
(3) removing process corners of the fiber reinforced silicon carbide ceramic matrix composite reflector blank prepared in the step (2), and then performing densification treatment, wherein the densification treatment is a second vapor deposition process, and the second vapor deposition process is consistent with the first chemical vapor deposition process in the step (22), so as to obtain a dense fiber reinforced silicon carbide ceramic matrix composite reflector;
(4) after the surface polishing treatment is carried out on the reflecting surface of the compact fiber reinforced silicon carbide ceramic matrix composite material reflector blank prepared in the step (3), a thermal spraying process or a physical vapor deposition process is adopted to prepare a reflecting surface material on the reflecting surface, so as to obtain a silicon carbide ceramic matrix composite material mirror surface;
(5) and (4) polishing the mirror surface of the silicon carbide ceramic matrix composite material prepared in the step (4) by adopting a surface polishing process until the reflecting surface meets the use requirement, and preparing the silicon carbide ceramic matrix composite material reflecting mirror.
Preferably, the fiber preform structure in the step (1) is one of a fiber cloth laminated seam structure, a three-dimensional needling structure, a multi-layer unidirectional tape laminated structure and a net tire non-woven fabric laminated puncture structure.
Preferably, the step (21) is performed 1-4 times in a cycle, and the preparation of the fiber preform at the pyrolytic carbon interface further includes a heat treatment process after the preparation of the interface of the fiber preform, the heat treatment process being performed by: heat treatment is carried out for 30-100h at 1800-2200 ℃ under the vacuum condition.
Preferably, step (22) is performed in a loop of 4-12 times, and step (3) is performed in a loop of 2-8 times.
Preferably, in the step (3), the surface polishing treatment is selected from sand blasting treatment, polishing treatment or machining treatment; the thermal spraying process selects one of plasma spraying, powder flame spraying, supersonic flame spraying and explosion spraying; the surface roughness Ra of the dimension reinforced silicon carbide ceramic matrix composite material reflector blank is between 3.2 and 12.5.
Preferably, in the step (3), the reflecting surface material is selected from one of silicon, titanium carbide and tungsten carbide, and the thickness of the reflecting surface material is 5-300 μm.
The invention also protects the application of the silicon carbide ceramic matrix composite reflector in the preparation of optical reflector materials.
The invention also protects the silicon carbide ceramic matrix composite reflector comprising the mirror surface, and further comprises a support structure and a connecting piece, wherein the mirror surface is connected with the support structure through the connecting piece.
Preferably, before polishing and grinding the surface of the fiber reinforced silicon carbide ceramic matrix composite reflector blank prepared in the step (2), if the fiber reinforced silicon carbide ceramic matrix composite reflector blank is connected with the supporting structure, after the mirror surface and the supporting structure are connected by adopting a connecting piece, in-situ homogeneous welding of the mirror surface, the supporting structure and the connecting piece is completed in a reaction furnace by adopting a third chemical vapor deposition process; the materials of the connecting piece and the supporting structure are the same as those of the fiber reinforced silicon carbide ceramic matrix composite reflector blank;
the third chemical vapor deposition process is consistent with the chemical vapor deposition process of the step (22);
if the reflector is composed of only a single part of the reflecting surface or the reflecting surface and the supporting structure are processed from the same blank, no pin connection and in-situ homogeneous welding are needed.
Compared with the prior art, the invention has the beneficial effects that:
1. compared with the current reflector solution made of sintered silicon carbide and chopped carbon fiber reinforced silicon carbide composite material, the reflector solution is prepared by the low toughness (1-4 MPa.m) of the material1/2) This results in difficulty in forming large-sized members, low structural strength of the reflector, easy cracking, and high surface microscopic defects. The invention discloses a ceramic matrix composite reflector, which innovatively uses a silicon carbide ceramic matrix composite reflector with continuous fiber reinforcement for the reflectorThe main body structure not only inherits the advantages of the silicon carbide ceramic material as the optical reflector, but also solves the problems of large brittleness and low strength of the sintered silicon carbide and chopped carbon fiber reinforced silicon carbide composite material.
2. The invention innovatively adopts the chemical vapor deposition process to complete the in-situ homogeneous welding of all component parts of the reflector, and overcomes the problem that the large-size component is difficult to form by sintering the silicon carbide and short carbon fiber reinforced silicon carbide composite material; the reflecting surface material is innovatively prepared on the surface of the ceramic matrix composite reflecting mirror by adopting a thermal spraying or physical vapor deposition process, so that the surface micro defects of the ceramic matrix composite reflecting mirror are greatly reduced, and the optical performance of the reflecting mirror is remarkably improved.
3. The invention also has the effects of obviously improving the structural strength of the reflector, improving the toughness, reducing the structural weight and reducing the microscopic defects of the reflecting surface; the ceramic matrix composite material reflector component prepared by the steps of the invention has the tensile strength of 150-400 MPa and the fracture toughness of 15-25 MPa.m1/2An elastic modulus of 90 to 350GPa and a density of 1.8 to 2.6g/cm3The coefficient of thermal expansion at room temperature is 0.8 to 2.5X 10-6/℃。
Drawings
FIG. 1 is a front view of a SiC CEC matrix composite mirror;
FIG. 2 is a view showing the structure of the rear surface of the SiC CEC based composite mirror;
FIG. 3 is a diagram of a part of a reflecting surface of a SiC CEC based composite reflector;
FIG. 4 is a first view of a supporting structure of the SiC CECMC mirror;
FIG. 5 is a second view of the supporting structure of the SiC CEC matrix composite mirror.
Detailed Description
The following detailed description of specific embodiments of the invention is provided, but it should be understood that the scope of the invention is not limited to the specific embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. The experimental methods described in the examples of the present invention are all conventional methods unless otherwise specified.
The following experimental methods and detection methods, unless otherwise specified, are conventional methods; the following reagents and starting materials were all commercially available unless otherwise specified.
Example 1
A preparation method of a silicon carbide ceramic matrix composite reflector comprises the following steps:
the reflecting surface and the supporting structure of the reflector structure of the embodiment are processed by the same blank;
(1) preparing a fiber preform with a three-dimensional needling structure by adopting continuous carbon fibers according to a reflector structure model, wherein the volume fraction of the continuous fibers in the fiber preform accounts for 25-30% of the mirror surface of the silicon carbide ceramic matrix composite;
(2) placing the fiber preform prepared in the step (1) into a graphite mold for shaping, placing the graphite mold with the fiber preform clamped therein into a reaction furnace, and completing interface preparation of the fiber preform and preparation of a silicon carbide ceramic matrix by adopting a first chemical vapor deposition process to obtain a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(21) the interface preparation of the fiber preform is to prepare the pyrolytic carbon material on the surface of the fiber preform, and the specific preparation method comprises the following steps: placing the fiber preform in the step (1) in a reaction furnace, introducing mixed gas of propylene, natural gas and hydrogen, performing chemical vapor deposition for 20h at 1100 ℃, continuously and circularly performing the operations for 3 times according to the operations, performing 4 times of chemical vapor deposition operations in total, and performing heat treatment for 100h at 1800 ℃ under a vacuum condition to obtain the fiber preform with a pyrolytic carbon interface;
(22) and (3) preparing the silicon carbide ceramic matrix, namely preparing the silicon carbide ceramic in the fiber preform with the pyrolytic carbon interface in the step (21), wherein the preparation method comprises the following steps: trichloromethylsilane (trichloromethylsilane) is used as precursor, hydrogen is used as carrier gas and diluent gas, argon is used as protective gas, and trichloromethylsilane (trichloromethylsilane) is mixed with H2The flow ratio of Ar to Ar is 1: 5: 20, and the deposition furnace is arranged at 900 DEG CAfter depositing for 40 hours under the condition that the total air pressure is 5kPa, continuously and circularly executing the operation for 3 times according to the operation, and totally executing 4 times of chemical vapor deposition operation to prepare a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(3) removing process corners of the fiber reinforced silicon carbide ceramic matrix composite blank prepared in the step (2) by adopting a mechanical processing means, and then performing densification treatment, wherein the densification treatment is a second vapor deposition process, and the second vapor deposition process is consistent with the chemical vapor deposition process in the step (22) and is circularly performed for 8 times to form a dense fiber reinforced silicon carbide ceramic matrix composite reflector;
(4) carrying out surface sand blasting treatment on the reflecting surface of the compact fiber reinforced silicon carbide ceramic matrix composite reflector prepared in the step (3), controlling the surface roughness Ra between 6.3 and 12.5, and removing excess;
preparing tungsten carbide with the thickness of 20-80 mu m on the reflecting surface of the fiber-reinforced silicon carbide ceramic matrix composite reflector blank by adopting an explosion spraying process to obtain a silicon carbide ceramic matrix composite mirror surface;
(5) and (4) polishing the tungsten carbide layer on the mirror surface of the silicon carbide ceramic matrix composite material obtained in the step (4) by adopting a surface polishing process until the reflecting surface meets the use requirement, and thus obtaining the silicon carbide ceramic matrix composite material reflecting mirror.
In the example, the ceramic matrix composite reflector prepared by the above steps has a tensile strength of 150MPa and a fracture toughness of 18MPa m1/2An elastic modulus of 95GPa and a density of 2.1g/cm3Coefficient of thermal expansion at room temperature of 1.2X 10-6/℃。
Example 2
A preparation method of a silicon carbide ceramic matrix composite reflector comprises the following steps:
the reflector structure of the embodiment comprises a reflecting surface, a supporting structure and a plurality of connecting pieces, wherein the reflecting surface, the supporting structure and the connecting pieces are all made of continuous carbon fiber reinforced silicon carbide ceramic matrix composite materials, and the reflecting surface and the supporting structure are connected by the connecting pieces and are integrally welded in situ by a third chemical vapor deposition process;
(1) preparing a corresponding fiber preform by adopting continuous carbon fibers according to structural models of a reflecting surface and a supporting structure, wherein the fiber preform is formed by laminating and sewing plain woven two-dimensional cloth, and the volume fraction of the continuous fibers in the fiber preform accounts for 40-48% of the mirror surface of the silicon carbide ceramic matrix composite;
(2) placing the fiber preform prepared in the step (1) into a graphite mold for shaping, placing the graphite mold with the fiber preform clamped therein into a reaction furnace, and completing interface preparation of the fiber preform and preparation of a silicon carbide ceramic matrix by adopting a first chemical vapor deposition process to obtain a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(21) the interface preparation of the fiber preform is to prepare the pyrolytic carbon material on the surface of the fiber preform, and the specific preparation method comprises the following steps: placing the fiber preform in the step (1) in a reaction furnace, introducing mixed gas of propylene, natural gas and hydrogen, performing chemical vapor deposition for 40h at 1000 ℃, continuously and circularly performing the operations for 1 time according to the operations, performing chemical vapor deposition for 2 times in total, and performing heat treatment for 60h at 2000 ℃ under a vacuum condition to obtain the fiber preform with a pyrolytic carbon interface;
(22) and (3) preparing the silicon carbide ceramic matrix, namely preparing the silicon carbide ceramic in the fiber preform with the pyrolytic carbon interface in the step (21), wherein the preparation method comprises the following steps: trichloromethylsilane (trichloromethylsilane) is used as precursor, hydrogen is used as carrier gas and diluent gas, argon is used as protective gas, and trichloromethylsilane (trichloromethylsilane) is mixed with H2The flow ratio of Ar to Ar is 1: 10: 15, after deposition is carried out for 80 hours under the condition that the total air pressure of a deposition furnace is 2kPa at 1000 ℃, the operation is continuously and circularly executed for 5 times according to the operation, and the chemical vapor deposition operation is executed for 6 times in total, so as to prepare a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(3) removing process corners of the fiber reinforced silicon carbide ceramic matrix composite reflector blank prepared in the step (2) by adopting a mechanical processing means, and then performing densification treatment, wherein the densification treatment is a second vapor deposition process, the second vapor deposition process is consistent with the chemical vapor deposition process in the step (22), and the second vapor deposition process is circularly performed for 2 times to form a dense fiber reinforced silicon carbide ceramic matrix composite reflector;
connecting the mirror surface and the support structure by using a pin connecting piece made of the same material, then placing the mirror surface and the support structure into a reaction furnace, and executing a third chemical vapor deposition process for 2 times, wherein the third chemical vapor deposition process is consistent with the chemical vapor deposition process in the step (22), so that in-situ homogeneous welding of the mirror surface, the support structure and the pin connecting piece is completed, and a fiber reinforced silicon carbide ceramic matrix composite reflector assembly is formed;
(4) performing surface polishing and grinding treatment on the reflecting surface of the fiber reinforced silicon carbide ceramic matrix composite reflector assembly prepared in the step (3), controlling the surface roughness Ra of the reflecting surface to be 3.2-6.3, and removing excess;
preparing silicon with the thickness of 15-30 microns on the reflecting surface of the fiber-reinforced silicon carbide ceramic matrix composite reflector part by adopting a physical vapor deposition process to obtain a silicon carbide ceramic matrix composite mirror surface;
(5) and (4) polishing the silicon layer of the mirror surface of the silicon carbide ceramic matrix composite material in the step (4) by adopting a surface polishing process until the reflecting surface meets the use requirement, and thus obtaining the silicon carbide ceramic matrix composite material reflecting mirror.
The ceramic matrix composite material reflector component prepared by the steps has the tensile strength of 260MPa and the fracture toughness of 20 MPa-m1/2An elastic modulus of 120GPa and a density of 1.95g/cm3Coefficient of thermal expansion at room temperature of 0.9X 10-6/℃。
Example 3
A preparation method of a silicon carbide ceramic matrix composite reflector comprises the following steps:
the reflector structure of the embodiment comprises a reflecting surface, a supporting structure and a plurality of connecting pieces, wherein the reflecting surface, the supporting structure and the connecting pieces are made of continuous silicon carbide fiber reinforced silicon carbide ceramic matrix composite materials, and the reflecting surface and the supporting structure are connected by the connecting pieces and are integrally welded in situ by a third chemical vapor deposition process;
(1) preparing a corresponding fiber preform by adopting continuous silicon carbide fibers according to a structural model of a reflecting surface and a supporting structure, wherein the fiber preform is formed by laminating and sewing plain woven two-dimensional cloth, and the volume fraction of the continuous fibers in the fiber preform accounts for 35-42% of the mirror surface of the silicon carbide ceramic matrix composite;
(2) placing the fiber preform prepared in the step (1) into a graphite mold for shaping, placing the graphite mold with the fiber preform clamped therein into a reaction furnace, and completing interface preparation of the fiber preform and preparation of a silicon carbide ceramic matrix by adopting a first chemical vapor deposition process to obtain a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(21) the interface preparation of the fiber preform is to prepare the pyrolytic carbon material on the surface of the fiber preform, and the specific preparation method comprises the following steps: placing the fiber preform in the step (1) in a reaction furnace, introducing mixed gas of propylene, natural gas and hydrogen, performing chemical vapor deposition for 60 hours at 600 ℃, continuously and circularly performing the operations for 1 time according to the operations, and performing the chemical vapor deposition operation for 2 times in total to obtain the fiber preform with the pyrolytic carbon interface;
(22) and (3) preparing the silicon carbide ceramic matrix, namely preparing the silicon carbide ceramic in the fiber preform with the pyrolytic carbon interface in the step (21), wherein the preparation method comprises the following steps: trichloromethylsilane (trichloromethylsilane) is used as precursor, hydrogen is used as carrier gas and diluent gas, argon is used as protective gas, and trichloromethylsilane (trichloromethylsilane) is mixed with H2The flow ratio of Ar to Ar is 1: 15: 10, deposition is carried out for 100 hours under the condition that the temperature is 1200 ℃ and the total air pressure of a deposition furnace is 0.5kPa, the operation is continuously and circularly carried out for 3 times according to the operation, and the chemical vapor deposition operation is carried out for 4 times in total, so as to prepare a fiber reinforced silicon carbide ceramic matrix composite reflector blank;
(3) removing process corners of the fiber reinforced silicon carbide ceramic matrix composite reflector blank prepared in the step (2) by adopting a mechanical processing means, and then performing densification treatment, wherein the densification treatment is a second vapor deposition process, and the second vapor deposition process is consistent with the chemical vapor deposition process in the step (22) and is performed circularly for 6 times to form a dense fiber reinforced silicon carbide ceramic matrix composite reflector;
connecting the mirror surface and the support structure by using a pin connecting piece made of the same material, then placing the mirror surface and the support structure into a reaction furnace, and executing a third chemical vapor deposition process for 4 times, wherein the third chemical vapor deposition process is consistent with the chemical vapor deposition process in the step (22), so that in-situ homogeneous welding of the mirror surface, the support structure and the pin connecting piece is completed, and a fiber reinforced silicon carbide ceramic matrix composite reflector assembly is formed;
(4) carrying out surface sand blasting treatment on the reflecting surface of the fiber reinforced silicon carbide ceramic matrix composite reflector assembly prepared in the step (3), controlling the surface roughness Ra of the reflecting surface to be 6.3-12.5, and removing excess;
preparing silicon with the thickness of 200-270 mu m on the reflecting surface of the fiber-reinforced silicon carbide ceramic matrix composite reflector part by adopting a plasma spraying process to obtain a silicon carbide ceramic matrix composite mirror surface;
(5) and (4) polishing the silicon layer of the mirror surface of the silicon carbide ceramic matrix composite material in the step (4) by adopting a surface polishing process until the reflecting surface meets the use requirement, and thus obtaining the silicon carbide ceramic matrix composite material reflecting mirror.
The ceramic matrix composite material reflector component prepared by the steps has the tensile strength of 380MPa and the fracture toughness of 24 MPa-m1/2An elastic modulus of 320GPa and a density of 2.5g/cm3Coefficient of thermal expansion at room temperature of 1.8X 10-6/℃。
The reflectors made of the SiC ceramic matrix composite materials obtained in the embodiments 1-3 of the present invention have the same structure, and the front structure, the back structure, the reflective surface parts and the supporting structure parts are all shown in FIG. 1-FIG. 5.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (7)
1. A preparation method of a silicon carbide ceramic matrix composite material reflector mirror surface is characterized by comprising the following steps:
(1) preparing a corresponding fiber preform by adopting continuous fibers according to a reflector structure model;
(2) preparing a fiber reinforced silicon carbide ceramic matrix composite reflector blank:
(21) preparing an interface of the fiber preform: placing the fiber preform in the step (1) in a reaction furnace, introducing mixed gas of propylene, natural gas and hydrogen, and performing chemical vapor deposition for 20-60h at 600-1100 ℃ to obtain a fiber preform with a pyrolytic carbon interface;
(22) preparing a silicon carbide ceramic matrix: placing the fiber preform of the pyrolytic carbon interface in the step (21) in a reaction furnace, taking trichloromethylsilane as a precursor, taking hydrogen as a carrier gas and a diluent gas, taking argon as a protective gas, and mixing trichloromethylsilane and H2The flow ratio of Ar to Ar is 1: 5-15: 10-20, and the fiber reinforced silicon carbide ceramic matrix composite reflector blank is prepared by deposition for 40-100h under the conditions of 900-1200 ℃ and the total air pressure of a deposition furnace of 0.5-5 kPa;
(3) removing process corners of the fiber reinforced silicon carbide ceramic matrix composite reflector blank prepared in the step (2), and then performing densification treatment, wherein the densification treatment is a second vapor deposition process, and the second vapor deposition process is consistent with the process in the step (22), so that a dense fiber reinforced silicon carbide ceramic matrix composite reflector is obtained;
(4) after the surface polishing treatment is carried out on the reflecting surface of the compact fiber reinforced silicon carbide ceramic matrix composite material reflector blank prepared in the step (3), a thermal spraying process or a physical vapor deposition process is adopted to prepare a reflecting surface material on the reflecting surface, so as to obtain a silicon carbide ceramic matrix composite material mirror surface;
(5) and (4) polishing the mirror surface of the silicon carbide ceramic matrix composite material prepared in the step (4) by adopting a surface polishing process until the reflecting surface meets the use requirement, and preparing the silicon carbide ceramic matrix composite material reflecting mirror.
2. The method for preparing a mirror surface of a SiC ceramic matrix composite mirror according to claim 1, wherein the fiber preform structure in step (1) is one of a fiber cloth laminated structure, a three-dimensional needle punched structure, a multi-layer unidirectional tape laminated structure and a mesh-woven fabric laminated structure.
3. The method for preparing a SiC ceramic matrix composite mirror surface according to claim 1, wherein the step (21) is performed 1-4 times in a cycle, and the preparation of the fiber preform for pyrolytic carbon interface further comprises a heat treatment process after the preparation of the interface of the fiber preform, wherein the heat treatment process comprises: heat treatment is carried out for 30-100h at 1800-2200 ℃ under the vacuum condition.
4. The method for preparing a SiC ceramic matrix composite mirror surface according to claim 1, wherein the step (22) is performed in 4-12 cycles, and the step (3) is performed in 2-8 cycles.
5. The method for preparing a mirror surface of a SiC ceramic matrix composite according to claim 1, wherein in the step (4), the surface polishing treatment is selected from sand blasting treatment, polishing treatment or machining treatment; the thermal spraying process selects one of plasma spraying, powder flame spraying, supersonic flame spraying and explosion spraying; the surface roughness Ra of the dimension reinforced silicon carbide ceramic matrix composite material reflector blank is between 3.2 and 12.5.
6. The method for preparing a silicon carbide ceramic matrix composite reflector according to claim 1, wherein in the step (4), the reflector material is selected from one of silicon, titanium carbide and tungsten carbide, and the thickness of the reflector material is 5-300 μm.
7. A method for preparing a silicon carbide ceramic matrix composite reflector, which is characterized in that the following steps are added on the basis of the preparation step of the mirror surface of claim 1: connecting the compact fiber reinforced silicon carbide ceramic matrix composite reflector prepared in the step (3) with a supporting structure before polishing and grinding the surface, and then adopting a third chemical vapor deposition process in a reaction furnace to complete in-situ homogeneous welding of the mirror surface, the supporting structure and the connecting piece after the connecting piece is adopted to connect the mirror surface and the supporting structure; the materials of the connecting piece and the supporting structure are the same as those of the fiber reinforced silicon carbide ceramic matrix composite reflector blank;
the third chemical vapor deposition process is identical to the process of step (22).
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