CN113597664A - 确定不良原因的方法、电子设备、存储介质及系统 - Google Patents
确定不良原因的方法、电子设备、存储介质及系统 Download PDFInfo
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Abstract
一种确定导致基板不良的原因的方法，包括：获取基板的生产过程数据(S201)，所述生产过程数据包括基板的生产履历数据以及至少两个生产设备参数的参数数据；根据所述基板的类型，获取与所述基板的类型对应的所述至少两个生产设备参数的参数数据参考范围(S202)；基于所获取的至少两个生产设备参数的参数数据、以及所述至少两个生产设备参数的参数数据参考范围，确定所述至少两个生产设备参数中偏离其参数数据参考范围的不良生产设备参数(S203)。通过该方法，能够快速方便地进行导致基板不良的原因的定位。
Description
PCT国内申请，说明书已公开。
Claims (15)
- PCT国内申请，权利要求书已公开。
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| Application Number | Priority Date | Filing Date | Title |
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| PCT/CN2020/072033 WO2021142622A1 (zh) | 2020-01-14 | 2020-01-14 | 确定不良原因的方法、电子设备、存储介质及系统 |
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| CN113597664A true CN113597664A (zh) | 2021-11-02 |
| CN113597664B CN113597664B (zh) | 2024-08-20 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114418011A (zh) * | 2022-01-21 | 2022-04-29 | 京东方科技集团股份有限公司 | 一种产品不良成因分析的方法、设备及系统、存储介质 |
| CN118335012A (zh) * | 2024-06-12 | 2024-07-12 | 深圳市起立科技有限公司 | Oled的信号传输方法、装置、设备及存储介质 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023050275A1 (zh) * | 2021-09-30 | 2023-04-06 | 京东方科技集团股份有限公司 | 数据处理方法、系统和计算机可读存储介质 |
| CN113836826A (zh) * | 2021-11-25 | 2021-12-24 | 深圳市裕展精密科技有限公司 | 关键参数确定方法、装置、电子装置及存储介质 |
| TWI843591B (zh) * | 2023-06-01 | 2024-05-21 | 聯策科技股份有限公司 | 影像瑕疵檢測模型的建立方法、瑕疵影像的檢測方法及電子裝置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07114601A (ja) * | 1993-10-19 | 1995-05-02 | Hitachi Ltd | 製造不良解析システム、方法およびこれに関連したデータベースの生成方法 |
| JP2006216589A (ja) * | 2005-02-01 | 2006-08-17 | Omron Corp | プリント基板の品質管理システム |
| JP2007108117A (ja) * | 2005-10-17 | 2007-04-26 | Sharp Corp | 不良原因工程特定システムおよび方法、並びにその方法を実行するためのプログラムを記録したコンピュータ読み取り可能な記録媒体 |
| CN105807742A (zh) * | 2016-03-10 | 2016-07-27 | 京东方科技集团股份有限公司 | 生产设备监控方法及系统 |
| CN108319052A (zh) * | 2018-01-31 | 2018-07-24 | 京东方科技集团股份有限公司 | 一种显示面板制作与检测方法 |
| CN109711659A (zh) * | 2018-11-09 | 2019-05-03 | 成都数之联科技有限公司 | 一种工业生产的良率提升管理系统和方法 |
| CN110276410A (zh) * | 2019-06-27 | 2019-09-24 | 京东方科技集团股份有限公司 | 确定不良原因的方法、装置、电子设备及存储介质 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100412853C (zh) * | 2005-05-06 | 2008-08-20 | 鸿富锦精密工业（深圳）有限公司 | 生产设备监控系统及方法 |
| JP5460662B2 (ja) * | 2011-09-07 | 2014-04-02 | 株式会社日立ハイテクノロジーズ | 領域決定装置、観察装置または検査装置、領域決定方法および領域決定方法を用いた観察方法または検査方法 |
| US10312161B2 (en) * | 2015-03-23 | 2019-06-04 | Applied Materials Israel Ltd. | Process window analysis |
| CN110108717A (zh) * | 2019-05-15 | 2019-08-09 | 广东工业大学 | 一种显示模组生产设备状态评估方法，装置及系统 |
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- 2020-01-14 WO PCT/CN2020/072033 patent/WO2021142622A1/zh active Application Filing
- 2020-01-14 CN CN202080000026.XA patent/CN113597664B/zh active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07114601A (ja) * | 1993-10-19 | 1995-05-02 | Hitachi Ltd | 製造不良解析システム、方法およびこれに関連したデータベースの生成方法 |
| JP2006216589A (ja) * | 2005-02-01 | 2006-08-17 | Omron Corp | プリント基板の品質管理システム |
| JP2007108117A (ja) * | 2005-10-17 | 2007-04-26 | Sharp Corp | 不良原因工程特定システムおよび方法、並びにその方法を実行するためのプログラムを記録したコンピュータ読み取り可能な記録媒体 |
| CN105807742A (zh) * | 2016-03-10 | 2016-07-27 | 京东方科技集团股份有限公司 | 生产设备监控方法及系统 |
| CN108319052A (zh) * | 2018-01-31 | 2018-07-24 | 京东方科技集团股份有限公司 | 一种显示面板制作与检测方法 |
| CN109711659A (zh) * | 2018-11-09 | 2019-05-03 | 成都数之联科技有限公司 | 一种工业生产的良率提升管理系统和方法 |
| CN110276410A (zh) * | 2019-06-27 | 2019-09-24 | 京东方科技集团股份有限公司 | 确定不良原因的方法、装置、电子设备及存储介质 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114418011A (zh) * | 2022-01-21 | 2022-04-29 | 京东方科技集团股份有限公司 | 一种产品不良成因分析的方法、设备及系统、存储介质 |
| CN118335012A (zh) * | 2024-06-12 | 2024-07-12 | 深圳市起立科技有限公司 | Oled的信号传输方法、装置、设备及存储介质 |
| CN118335012B (zh) * | 2024-06-12 | 2024-08-20 | 深圳市起立科技有限公司 | Oled的信号传输方法、装置、设备及存储介质 |
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| WO2021142622A1 (zh) | 2021-07-22 |
| CN113597664B (zh) | 2024-08-20 |
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