CN113588696B - Sample pre-tilt loading device for EBSD experiment - Google Patents
Sample pre-tilt loading device for EBSD experiment Download PDFInfo
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- CN113588696B CN113588696B CN202111145483.0A CN202111145483A CN113588696B CN 113588696 B CN113588696 B CN 113588696B CN 202111145483 A CN202111145483 A CN 202111145483A CN 113588696 B CN113588696 B CN 113588696B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20016—Goniometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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Abstract
The invention provides a sample pre-tilt loading device for an EBSD (Electron Back-scattered diffraction) experiment, which comprises: a frame body; the loading assembly comprises a base and a loading unit, the base is detachably arranged on the frame body, the base is provided with a placing part, a reference part and a connecting part which are sequentially connected, the connecting part is used for being connected with the testing device, the reference part is provided with an inclined reference surface, the placing part is provided with a placing cavity and an opening communicated with the placing cavity, the opening and the inclined reference surface are positioned on the same side of the base, the loading unit is provided with a rotating state rotating relative to the placing cavity and a moving state moving relative to the placing cavity, the loading unit is provided with a loading surface, and the loading surface is arranged towards the opening and used for placing a sample; the driving mechanism is arranged on the frame body and is in driving connection with the loading unit, and the driving mechanism is used for adjusting the position of the sample on the base so that the sample detection surface and the inclined reference surface are in the same plane. Through the technical scheme provided by the application, the problems of low sample installation precision and low experimental result accuracy in the prior art can be solved.
Description
Technical Field
The invention relates to the technical field of sample loading devices, in particular to a sample pre-tilt loading device for an EBSD (Electron Back-scattered diffraction) experiment.
Background
At present, when an electron back scattering diffraction pattern (abbreviated as EBSD) microtexture is tested, a sample needs to be placed on a plane of a focus of an electron beam of a scanning electron microscope, and an inclination angle of 70 degrees is kept between a test area of an upper surface of the sample and the horizontal plane, so as to test the sample. In the prior art, the sample is usually fixed on a pre-tilt stage, and X, Y and the Z-axis of the sem are moved so that the electron beam emitted from the sem irradiates the surface of the sample along a predetermined angle. The experiment is carried out through the scheme, the pre-tilt plane can not be automatically found by a sample, and the coplanar position of the sample and the pre-tilt sample table can be found by visual observation, so that the installation precision of the sample is greatly reduced. Meanwhile, for wedge-shaped samples with different thicknesses, the filling difficulty is high and inaccurate, and the accuracy of an experimental result is seriously influenced.
Disclosure of Invention
The invention provides a sample pre-tilt loading device for an EBSD (Electron Back-scattered diffraction) experiment, which aims to solve the problems of low sample installation precision and low accuracy of experiment results in the prior art.
The invention provides a sample pre-tilt loading device for an EBSD (Electron Back-scattered diffraction) experiment, which comprises: a frame body; the loading assembly comprises a base and a loading unit, the base is detachably arranged on the frame body, the base is provided with a placing part, a reference part and a connecting part which are sequentially connected, the connecting part is used for being connected with the testing device, the reference part is provided with an inclined reference surface, the placing part is provided with a placing cavity and an opening communicated with the placing cavity, the opening and the inclined reference surface are positioned on the same side of the base, the loading unit is provided with a rotating state rotating relative to the placing cavity and a moving state moving relative to the placing cavity, the loading unit is provided with a loading surface, the loading surface is arranged towards the opening, and the loading surface is used for placing a sample; and the driving mechanism is arranged on the frame body and is in driving connection with the loading unit, and the driving mechanism is used for adjusting the position of the sample on the base so as to enable the detection surface and the inclined reference surface of the sample to be positioned on the same plane.
Furthermore, the loading unit comprises a rotating block and a sliding block, the rotating block and the sliding block are both positioned in the placing cavity, the rotating block can rotate and move in the placing cavity, the sliding block can move in the placing cavity, the rotating block is arranged close to the opening relative to the sliding block, a loading surface is arranged on the rotating block, one end of the rotating block, which is far away from the loading surface, is abutted against the end part of the sliding block, and the rotating block and the sliding block have a locking state and an unlocking state; when the loading unit is in a rotating state, the rotating block and the sliding block are in an unlocking state.
Further, the loading unit further comprises a locking member, the locking member is arranged between the rotating block and the sliding block, and the locking member is used for switching a locking state and an unlocking state.
Further, the retaining member includes latch segment and locking post, be provided with the locking chamber on the rotating block and dodge the groove, dodge the trench on the rotating block with the terminal surface of sliding block laminating, dodge groove and locking chamber intercommunication, the latch segment is located the locking intracavity, the locking post sets up along the length direction who places the chamber, the one end of locking post is located dodges the inslot and wears to establish on the latch segment, locking post and latch segment threaded connection, the other end of locking post passes rotating block and sliding block in proper order and wears out from the sliding block.
Further, the turning block has relative first end and the second end that sets up, and the terminal surface of first end is the loading face, and the terminal surface of second end is the cambered surface, and the terminal surface that the sliding block is close to the one end of turning block is held with the terminal surface looks adaptation of second to the terminal surface that makes the sliding block and the terminal surface of second end laminate mutually.
Further, the drive mechanism includes: a first driving member; the pressing piece is located on one side of the base and provided with a pressing end, the pressing end is arranged towards the loading surface, the end face of the pressing end is parallel to the inclined reference surface, and the first driving piece drives the pressing piece to move so that the pressing end abuts against the sample and the position of the sample on the base is adjusted.
Further, the drive mechanism further includes: the translation mechanism is arranged on one side, far away from the pressing piece, of the base and used for controlling the sliding block to move relative to the placement cavity.
Further, the translation mechanism includes: the extension direction of actuating lever is the same with the length direction who places the chamber, and the actuating lever is located keeping away from of sliding block and presses one side of end, actuating lever and sliding block threaded connection, and the actuating lever can drive the sliding block and remove placing the intracavity.
Further, the translation mechanism further comprises: the second driving piece is in driving connection with the driving rod and can drive the driving rod to rotate.
Further, the drive mechanism further includes: and the displacement switch is electrically connected with the second driving piece and is used for controlling the second driving piece to work, and when the detection surface of the sample and the inclined reference surface are positioned on the same plane, the displacement switch controls the second driving piece to stop working.
Furthermore, actuating mechanism still includes slip table and pretension spring, the movably setting of slip table is on the support body, first driving piece and slip table drive are connected, the movably setting of pressing piece is on the slip table, pretension spring cover is established on the pressing piece, the one end and the pressing piece butt of pretension spring, the other end and the slip table butt of pretension spring, when the sample was pressed to first driving piece drive pressing piece, pretension spring is in compression state, pretension spring can provide the pretightning force so that the detection face of pressing the end pair sample is exerted pressure.
Further, the placing part is provided with a plurality of placing cavities arranged side by side, each placing cavity is internally provided with a loading unit, the driving mechanism comprises a plurality of pressing pieces, and the plurality of pressing pieces and the plurality of placing cavities are arranged in a one-to-one correspondence mode.
Furthermore, when the sliding block moves, the pressing piece and the sliding block move synchronously, the displacement switch is used for detecting the moving position of the pressing piece, and when the pressing piece moves to the preset position, the displacement switch controls the second driving piece to stop working.
By applying the technical scheme of the invention, the loading assembly and the driving mechanism are both arranged on the frame body, the loading assembly comprises the base and the loading unit, the loading unit is movably arranged in the placing cavity and can rotate and move relative to the placing cavity, after a sample is fixed on the loading surface, the loading unit is driven to move by the driving mechanism, so that the detection surface and the inclined reference surface of the sample can be positioned on the same plane, and the placing requirement of the sample during the experiment can be met. After the angle of the sample is adjusted, the loading assembly is detached from the frame body, and the sample can be tested by fixing the loading assembly on the testing device through the connecting part. Through the device that this application provided, can accomplish the adjustment to sample locating place through actuating mechanism, it has improved the precision of putting of sample greatly, and then can improve the accuracy of test result.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram illustrating a sample pre-tilt loading apparatus according to an embodiment of the present invention;
FIG. 2 is an exploded view of a sample pre-tilt loading apparatus provided in accordance with an embodiment of the present invention;
FIG. 3 illustrates a schematic structural diagram of a loading assembly provided in accordance with an embodiment of the present invention;
FIG. 4 illustrates an exploded view of a loading assembly provided in accordance with an embodiment of the present invention;
FIG. 5 illustrates a schematic structural view of a turning block and a locking block provided according to an embodiment of the present invention;
FIG. 6 is a cross-sectional view of the rotation block and the locking member coupled to the driving lever according to the embodiment of the present invention;
FIG. 7 illustrates a schematic structural view of a pressing member and loading assembly provided in accordance with an embodiment of the present invention;
fig. 8 shows a schematic structural diagram of a driving mechanism provided according to an embodiment of the present invention.
Wherein the figures include the following reference numerals:
10. a frame body; 20. a loading assembly; 21. a base; 211. a placement section; 2111. a placement chamber; 212. a reference part; 2121. inclining the reference surface; 213. a connecting portion; 22. a loading unit; 221. a loading surface; 222. rotating the block; 2221. a locking cavity; 2222. an avoidance groove; 2223. a first end; 2224. a second end; 223. a slider; 224. a locking member; 2241. a locking block; 2242. a locking post; 30. a drive mechanism; 31. a first driving member; 32. a pressing member; 321. a pressing end; 33. a drive rod; 34. a displacement switch; 35. a sliding table; 36. and pre-tightening the spring.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 4, the present invention provides a sample pretilt loading device for an EBSD experiment, which includes a frame body 10, a loading assembly 20, and a driving mechanism 30. Wherein, the loading assembly 20 includes a base 21 and a loading unit 22, the base 21 is detachably disposed on the frame body 10, the base 21 has a placing portion 211, a reference portion 212 and a connecting portion 213 connected in sequence, the connecting portion 213 is used for connecting with the testing device, the reference portion 212 has an inclined reference surface 2121, the placing portion 211 has a placing cavity 2111 and an opening communicating with the placing cavity 2111, the opening and the inclined reference surface 2121 are located at the same side of the base 21, and the loading unit 22 has a rotating state rotating relative to the placing cavity 2111 and a moving state moving relative to the placing cavity 2111. The loading unit 22 has a loading surface 221, the loading surface 221 is disposed toward the opening, and the loading surface 221 is used for placing a sample, and in particular, the sample can be adhered to the loading surface 221. The driving mechanism 30 is disposed on the frame 10, the driving mechanism 30 is drivingly connected to the loading unit 22, and the driving mechanism 30 is used for adjusting the position of the sample on the base 21 so that the detection surface of the sample and the inclined reference surface 2121 are located on the same plane. Specifically, the loading unit 22 may be rotated to achieve the detection plane of the sample parallel to the tilted reference plane 2121, and the loading unit 22 may be moved to achieve the detection plane coplanar with the tilted reference plane 2121.
By applying the sample pre-tilt loading device provided above, the loading assembly 20 and the driving mechanism 30 are both disposed on the frame body 10, the loading assembly 20 includes a base 21 and a loading unit 22, wherein the loading unit 22 is movably disposed in the placing cavity 2111, and the loading unit 22 can rotate and move relative to the placing cavity 2111, after the sample is fixed on the loading surface 221, the loading unit 22 is driven by the driving mechanism 30 to move, so that the detection surface of the sample and the inclined reference surface 2121 can be located on the same plane, and the placing requirement of the sample during the experiment can be met. After the angle of the sample is adjusted, the loading assembly 20 is detached from the frame 10 and fixed to the testing apparatus by the connecting portion 213. By the device, the sample placing position can be adjusted through the driving mechanism 30, so that the placing precision of the sample is greatly improved, and the accuracy of a test result can be improved; and the automation level of sample loading is improved, and a user can conveniently load and test the sample. The EBSD test sample is a cuboid or a cube with parallel surfaces or wedge-shaped surfaces, and the position of samples with different thicknesses and inclined planes can be adjusted by the device, so that the detection surface can be adjusted to be coplanar with the inclined reference surface.
The loading unit 22 may be rotated and moved as a whole, or may be rotated and moved by a plurality of components, respectively. In this embodiment, the loading unit 22 includes a rotating block 222 and a sliding block 223, the rotating block 222 and the sliding block 223 are both located in the placing cavity 2111, the rotating block 222 can rotate and move in the placing cavity 2111, the sliding block 223 can move in the placing cavity 2111, the rotating block 222 is arranged close to the opening relative to the sliding block 223, the rotating block 222 is provided with a loading surface 221, one end of the rotating block 222 far from the loading surface 221 abuts against an end of the sliding block 223, and the rotating block 222 and the sliding block 223 have a locking state and an unlocking state. By providing the loading unit 22 as the rotating block 222 and the sliding block 223, the rotating and moving operations can be facilitated. Wherein, when in the locking state, the rotating block 222 is fixedly arranged relative to the sliding block 223, and when in the unlocking state, the rotating block 222 can rotate relative to the sliding block 223. When the loading unit 22 is in the rotated state, the rotating block 222 and the sliding block 223 are in the unlocked state. Through the setting, the angle of the rotating block 222 can be adjusted independently, so that the adjusting precision can be improved, and high-precision loading of samples is realized.
Of course, in other embodiments, the loading unit may be driven by the driving mechanism to rotate and move simultaneously, so as to increase the adjustment rate of the sample.
The locking state and the unlocking state between the rotating block 222 and the sliding block 223 can be switched, and when the rotating block 222 is rotated, only the displacement of the rotating block 222 in the placing cavity 2111 is limited; the locking state and the unlocking state can be switched by adjusting the relative connection relationship between the rotating block 222 and the sliding block 223.
As shown in fig. 4 to 7, the loading unit 22 further includes a locker 224, and the locker 224 is disposed between the rotating block 222 and the sliding block 223 and switches the locked state and the unlocked state by the locker 224. The locking member 224 is provided between the rotating block 222 and the sliding block 223 to perform the switching between the locking state and the unlocking state, and has a simple structure and convenient operation.
Specifically, this retaining member 224 includes latch segment 2241 and locking post 2242, be provided with locking chamber 2221 and dodge groove 2222 on the turning block 222, dodge groove 2222 and be located the turning block 222 with the terminal surface of sliding block 223 laminating, dodge groove 2222 and locking chamber 2221 intercommunication, latch segment 2241 is located locking chamber 2221, the length direction setting of placing chamber 2111 is followed to locking post 2242, the one end of locking post 2242 is located dodge groove 2222 and wears to establish on latch segment 2241, locking post 2242 and latch segment 2241 threaded connection, the other end of locking post 2242 passes turning block 222 and sliding block 223 in proper order and wears out from sliding block 223. Through the scheme, the structure is simple, the inner spaces of the rotating block 222 and the sliding block 223 can be utilized for setting, and the device structure can be more compact.
During specific operation, the locking column 2242 can be manually or electrically rotated, the locking block 2241 is controlled to translate in the placing cavity 2111 by using a threaded structure between the locking block 2241 and the locking column 2242, when the locking block 2241 moves towards the sliding block 223, the second end 2224 of the rotating block 222 can be attached to the end face of the sliding block 223 through the locking block 2241, and locking between the rotating block 222 and the sliding block 223 is achieved by means of friction force between the two; when the lock block 2241 moves away from the slide block 223, the rotation block 222 and the slide block 223 can be separated from each other, and the rotation block 222 can be rotated relative to the slide block 223.
As shown in fig. 3 to 5, the rotating block 222 has a first end 2223 and a second end 2224 that are oppositely disposed, an end surface of the first end 2223 is a loading surface 221, an end surface of the second end 2224 is an arc surface, and an end surface of one end of the sliding block 223 close to the rotating block 222 is matched with the end surface of the second end 2224, so that the end surface of the sliding block 223 is attached to the end surface of the second end 2224. In this embodiment, the second end 2224 is designed to be an arc surface, and the end surface of the sliding block 223 close to one end of the rotating block 222 is also an arc surface in fit with the end surface of the second end 2224 and the end surface of the sliding block 223, so that the rotating block 222 rotates more stably. Of course, the end surface of the sliding block 223 near the end of the rotating block 222 may be designed to be flat or other shapes as long as the rotation requirement of the rotating block 222 can be achieved.
As shown in fig. 1 to 3 and 8, the driving mechanism 30 includes a first driving member 31 and a pressing member 32. The first driving member 31 is in driving connection with the pressing member 32, the pressing member 32 is located on one side of the base 21, the pressing member 32 has a pressing end 321, the pressing end 321 is disposed toward the loading surface 221, an end surface of the pressing end 321 is parallel to the inclined reference surface 2121, and the first driving member 31 drives the pressing member 32 to move so that the pressing end 321 abuts against the sample and adjusts the position of the sample on the base 21. In the present embodiment, the end surface of the pressing end 321 is disposed parallel to the inclined reference surface 2121, and thus the detection surface of the sample can be made parallel to the inclined reference surface 2121 when the sample is pressed by the pressing end 321. By adopting the structure design, the automatic and accurate adjustment of the inclination angle of the sample can be realized, so that the detection surface of the sample can reach a preset angle, the error caused by visual observation can be avoided, the accuracy of sample placement can be ensured, and the accuracy of the final test result can be ensured.
Further, the driving mechanism 30 further includes a translation mechanism disposed on a side of the base 21 away from the pressing member 32, the translation mechanism being configured to control the sliding block 223 to move relative to the placement chamber 2111. When the loading unit 22 is in the rotating state, the translation mechanism can fix the sliding block 223; when the loading unit 22 is in the moving state, the translation mechanism can control the slide block 223 to move within the placing chamber 2111. Slide block 223 removes is controlled through setting up translation mechanism, can realize sample angle modulation and the independent regulation of displacement like this to improve the accuracy to sample position adjustment. When loading unit 22 is in the pivoted state, translation mechanism can fix sliding block 223, prevents sliding block 223 from taking place the displacement, avoids causing the influence to the angle adjustment effect. When the loading unit 22 is in the displacement state, the restriction of the sliding block 223 by the translation mechanism may be released, so that the sliding block 223 can move within the placing chamber 2111. The sliding block 223 can be driven by a translation mechanism, the pressing member 32, or both the translation mechanism and the pressing member 32 in the placing cavity 2111.
As shown in fig. 3, 7 and 8, the translation mechanism includes a driving rod 33, the driving rod 33 extends in the same direction as the length direction of the placing cavity 2111, the driving rod 33 is located on the side of the sliding block 223 far from the pressing end 321, the driving rod 33 is in threaded connection with the sliding block 223, and the driving rod 33 can drive the sliding block 223 to move in the placing cavity 2111. With actuating lever 33 and sliding block 223 threaded connection, can realize drive sliding block 223 translation and fixed to adopt the screw thread to adjust can carry out accurate regulation to sliding block 223's position. Specifically, when the rotating block 222 rotates, the driving lever 33 is fixed to the placing portion 211, and since the driving lever 33 is screwed to the sliding block 223, the sliding block 223 can be fixed in the placing chamber 2111. When the sliding block 223 needs to be moved, the driving rod 33 is rotated, so that the driving sliding block 223 can move in the placing cavity 2111, and when the detection surface of the sample is coplanar with the inclined reference surface 2121, the driving rod 33 stops rotating.
Further, the translation mechanism further comprises a second driving element, the second driving element is in driving connection with the driving rod 33, and the second driving element can drive the driving rod 33 to rotate. By driving the driving lever 33 to rotate by the second driving member, the degree of automation of the apparatus can be further improved.
As shown in fig. 2 to 4, in the present embodiment, the loading assembly 20 has a back plate, three rows of holes are distributed on the back plate from top to bottom, the second driving member is inserted into the uppermost row of holes, and a driving end of the second driving member is in driving connection with the driving rod 33 to drive the driving rod 33 to rotate, and the second driving member may adopt a driving device such as an electric screwdriver. The middle row of holes can be used to insert an adjusting tool to adjust the position of the locking post 2242 and thus the working state between the rotating block 222 and the sliding block 223, and the bottom row of holes can be used to insert fasteners through the back plate and the loading unit 22 to fix the back plate to the loading unit 22.
As shown in fig. 1 to 3, the driving mechanism 30 further includes a displacement switch 34, the displacement switch 34 is electrically connected to the second driving member, the displacement switch 34 is used for controlling the second driving member to operate, and when the detection surface of the sample and the inclined reference surface 2121 are located on the same plane, the displacement switch 34 controls the second driving member to stop operating. The automatic control of the second driving piece can be realized through the structure.
The first driving member 31 may be directly connected to the pressing member 32 to drive the pressing member 32 to perform a pressing operation, or may be indirectly connected to the pressing member 32. In this embodiment, the driving mechanism 30 further includes a sliding table 35 and a pre-tightening spring 36, the sliding table 35 is movably disposed on the frame body 10, the first driving member 31 is connected to the sliding table 35 in a driving manner, the pressing member 32 is movably disposed on the sliding table 35, the pre-tightening spring 36 is sleeved on the pressing member 32, one end of the pre-tightening spring 36 abuts against the pressing member 32, and the other end of the pre-tightening spring 36 abuts against the sliding table 35. Specifically, when the first driving element 31 drives the sliding table 35 to move toward the sample side, the sliding table 35 drives the pressing element 32 to abut against the sample through the pre-tightening spring 36, and when the sample is pressed by the pressing element 32 and then rotates to a position parallel to the inclined reference surface 2121, the first driving element 31 can stop working, and at this time, the pressing element 32 still abuts against the sample, and the pre-tightening spring 36 is in a compressed state. The pressing element 32 can be cushioned by the pre-tightening spring 36, and it can be ensured that the pressing end 321 always has pressure on the detection surface of the sample during the adjustment process.
In the present embodiment, the displacement switch 34 may be a photoelectric switch, a travel switch, or the like. When the pressing piece 32 reaches the preset position, the photoelectric switch controls the second driving piece to stop working. By adopting the structure, the automation of the coplanar searching process of the sample detection surface and the inclined reference surface 2121 can be realized, the surface searching efficiency is improved, and the coplanar accuracy is also improved. Specifically, the position of the pressing member 32 relative to the slide table 35 when the end surface of the pressing end 321 is coplanar with the inclined reference surface 2121 is set to a preset position, so that when the displacement switch 34 detects that the pressing member 32 moves to the preset position, it can be determined that the detection surface of the sample is coplanar with the inclined reference surface 2121. Specifically, in this application, the pre-tilt sample loading device further includes a controller, the controller is electrically connected to the displacement switch 34 and the second driving element respectively, when the detection surface of the sample and the tilted reference surface 2121 are located on the same plane, the displacement switch 34 triggers a signal and sends the signal to the controller, and the controller controls the second driving element to stop working according to the triggering signal.
Further, the placing section 211 has a plurality of placing cavities 2111 arranged side by side, one loading unit 22 is provided in each placing cavity 2111, the driving mechanism 30 includes a plurality of pressing pieces 32, and the plurality of pressing pieces 32 are arranged in one-to-one correspondence with the plurality of placing cavities 2111. A plurality of loading unit 22 can load a plurality of samples, and a plurality of loading unit 22 sets up on slip table 35, and usable slip table 35 realizes simultaneous movement with the cooperation of pretension spring 36, and then can adjust simultaneously a plurality of samples, also can detect a plurality of samples during the detection, so improved the adjustment efficiency of sample position and the detection efficiency to the sample.
For the convenience of understanding the present application, the operation of the sample pre-tilt loading device is specifically described as follows:
the loading assembly 20 is first set upright, the loading surface 221 of the rotary block 222 is tilted upward to facilitate the application of the sample plane to the loading surface 221 by double-sided conductive adhesive, and the locking member 224 is released, whereupon the rotary block 222 can be rotated relative to the sliding block 223.
The slide table 35 is driven by the first driving member 31 to move to the initial position, and the loader assembly 20 is fixed to the frame body 10.
The sliding table 35 is driven by the first driving piece 31 to move towards the sample side, when the pressing end 321 is in contact with the detection surface of the sample, the sample can drive the rotating block 222 to rotate relative to the sliding block 223 under the action of pressure, finally the sample rotates to the detection surface to be parallel to the end surface of the pressing end 321, then the sliding table 35 is continuously driven to move, the pre-tightening spring 36 is in a compression state in the moving process, and when the sliding table 35 is driven by the first driving piece 31 to move to a preset stop position, the movement is stopped.
The locking post 2242 is rotated so that the locking block 2241 and the locking post 2242 cooperate to lock the rotating block 222 and the sliding block 223, which cannot rotate relative to each other.
When the electric screwdriver is started, the electric screwdriver drives the driving rod to rotate, at the moment, the rotating block 222 and the sliding block 223 simultaneously retract into the placing cavity 2111, meanwhile, the pressing piece 32 continues to push the sample to move under the driving of the elastic force of the pre-tightening spring 36, when the pressing piece 32 moves to the preset position, the displacement switch 34 triggers a signal to stop the electric screwdriver, and at the moment, the detection surface of the sample and the inclined reference surface are in the same plane. The structure is utilized to control the sample to adjust the position, so that the position precision of the detection surface of the sample is far greater than the visual precision.
At this time, the fastening screws are loosened, the loading assembly 20 is taken down from the frame body 10, then the connecting portion 213 is butted with the sample holder of the scanning electron microscope through the adapter, the height of the sample after the butting is the EBSD testing working distance, and the electron microscope can be started to perform the EBSD data collection work at this time.
The device provided by the application has the following advantages:
1. a plurality of samples can be loaded at one time, so that the loading and testing efficiency is greatly improved;
2. the high-precision loading of the wedge-shaped sample can be realized, and the accuracy of test data is improved;
3. the automatic adjustment of the coplanarity of the sample plane and the inclined reference plane is realized;
4. after the sample is adjusted, the loading assembly can be directly placed into the scanning electron microscope, the sample does not need to be rotated to adjust the angle, and the scanning electron microscope can be directly detected after being aligned with the sample.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and in the case of not making a reverse description, these orientation words do not indicate and imply that the device or element being referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be considered as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (13)
1. A sample pre-tilt loading device for an EBSD experiment, the sample pre-tilt loading device comprising:
a frame body (10);
a loading assembly (20), the loading assembly (20) including a base (21) and a loading unit (22), the base (21) being detachably disposed on the rack body (10), the base (21) having a placing portion (211), a reference portion (212) and a connecting portion (213) connected in sequence, the connecting portion (213) being for connection with a testing apparatus, the reference portion (212) having an inclined reference surface (2121), the placing portion (211) having a placing chamber (2111) and an opening communicating with the placing chamber (2111), the opening being located on the same side of the base (21) as the inclined reference surface (2121), the loading unit (22) having a rotation state rotating with respect to the placing chamber (2111) and a movement state moving with respect to the placing chamber (2111), the loading unit (22) having a loading surface (221), the loading surface (221) being disposed toward the opening, the loading surface (221) is used for placing a sample;
the driving mechanism (30) is arranged on the frame body (10), the driving mechanism (30) is in driving connection with the loading unit (22), and the driving mechanism (30) is used for adjusting the position of the sample on the base (21) so that the detection surface of the sample and the inclined reference surface (2121) are located on the same plane.
2. Sample pre-tilt loading device according to claim 1,
the loading unit (22) comprises a rotating block (222) and a sliding block (223), the rotating block (222) and the sliding block (223) are both located in the placing cavity (2111), the rotating block (222) can rotate and move in the placing cavity (2111), the sliding block (223) can move in the placing cavity (2111), the rotating block (222) is arranged close to the opening relative to the sliding block (223), the loading surface (221) is arranged on the rotating block (222), one end, far away from the loading surface (221), of the rotating block (222) abuts against the end portion of the sliding block (223), and the rotating block (222) and the sliding block (223) have a locking state and an unlocking state;
when the loading unit (22) is in the locking state, the rotating block (222) is fixedly arranged relative to the sliding block (223), when the loading unit is in the unlocking state, the rotating block (222) can rotate relative to the sliding block (223), and when the loading unit is in the rotating state, the rotating block (222) and the sliding block (223) are in the unlocking state.
3. Sample pretilt loading device according to claim 2, wherein the loading unit (22) further comprises a locking member (224), the locking member (224) being arranged between the rotating block (222) and the sliding block (223), the locking member (224) being configured to switch between the locked state and the unlocked state.
4. The pre-tilt sample loading device of claim 3, wherein the locking member (224) comprises a locking block (2241) and a locking post (2242), the rotating block (222) is provided with a locking cavity (2221) and an avoiding groove (2222), the avoiding groove (2222) is positioned on the end surface of the rotating block (222) jointed with the sliding block (223), the avoiding groove (2222) is communicated with the locking cavity (2221), the locking block (2241) is positioned in the locking cavity (2221), the locking columns (2242) are arranged along the length direction of the placing cavity (2111), one end of the locking column (2242) is positioned in the avoiding groove (2222) and is arranged on the locking block (2241) in a penetrating way, locking post (2242) with latch segment (2241) threaded connection, the other end of locking post (2242) passes in proper order turning block (222) with slider (223) is followed slider (223) is worn out.
5. The sample pretilt loading device according to claim 2, wherein the rotating block (222) has a first end (2223) and a second end (2224) which are opposite to each other, the end surface of the first end (2223) is the loading surface (221), the end surface of the second end (2224) is an arc surface, and the end surface of one end of the sliding block (223) close to the rotating block (222) is matched with the end surface of the second end (2224) so that the end surface of the sliding block (223) is matched with the end surface of the second end (2224).
6. Sample pretilt loading device according to any of claims 2 to 5, wherein the drive mechanism (30) comprises:
a first drive member (31);
the first driving piece (31) is in driving connection with the pressing piece (32), the pressing piece (32) is located on one side of the base (21), the pressing piece (32) is provided with a pressing end (321), the pressing end (321) faces the loading surface (221), the end face of the pressing end (321) is parallel to the inclined reference surface (2121), and the first driving piece (31) drives the pressing piece (32) to move so that the pressing end (321) is abutted to the sample and the position of the sample on the base (21) is adjusted.
7. The sample pre-tilt loading device according to claim 6, wherein the driving mechanism (30) further comprises:
the translation mechanism is arranged on one side, far away from the pressing piece (32), of the base (21) and is used for controlling the sliding block (223) to move relative to the placing cavity (2111), when the loading unit (22) is in the rotating state, the translation mechanism can fix the sliding block (223), and when the loading unit (22) is in the moving state, the translation mechanism can control the sliding block (223) to move in the placing cavity (2111).
8. The sample pre-tilt loading device of claim 7, wherein the translation mechanism comprises:
the extension direction of actuating lever (33) with the length direction who places chamber (2111) is the same, actuating lever (33) are located keeping away from of sliding block (223) one side of pressing end (321), actuating lever (33) with sliding block (223) threaded connection, actuating lever (33) can drive sliding block (223) are in place the intracavity (2111) and remove.
9. The sample pre-tilt loading device of claim 8, wherein the translation mechanism further comprises:
the second driving piece is in driving connection with the driving rod (33), and the second driving piece can drive the driving rod (33) to rotate.
10. The sample pre-tilt loading device according to claim 9, wherein the drive mechanism (30) further comprises:
and the displacement switch (34), the displacement switch (34) is electrically connected with the second driving piece, the displacement switch (34) is used for controlling the second driving piece to work, and when the detection surface of the sample and the inclined reference surface (2121) are positioned on the same plane, the displacement switch (34) is used for controlling the second driving piece to stop working.
11. Sample pre-tilt loading device according to claim 10, wherein the drive mechanism (30) further comprises a slide (35) and a pre-tensioned spring (36), the sliding table (35) is movably arranged on the frame body (10), the first driving piece (31) is in driving connection with the sliding table (35), the pressing piece (32) is movably arranged on the sliding table (35), the pre-tightening spring (36) is sleeved on the pressing piece (32), one end of the pre-tightening spring (36) is abutted against the pressing piece (32), the other end of the pre-tightening spring (36) is abutted against the sliding table (35), when the first driving member (31) drives the pressing member (32) to press the sample, the pre-tightening spring (36) is in a compressed state, and the pre-tightening spring (36) can provide pre-tightening force for the pressing piece (32) so that the pressing end (321) can apply pressure on the detection surface of the sample.
12. The specimen pretilt loading apparatus according to claim 11, wherein the placement section (211) has a plurality of placement chambers (2111) arranged side by side, one loading unit (22) is provided in each of the placement chambers (2111), the driving mechanism (30) includes a plurality of the pressing pieces (32), and the plurality of the pressing pieces (32) are arranged in one-to-one correspondence with the plurality of the placement chambers (2111).
13. Sample pretilt loading device according to claim 11, wherein the sliding block (223) moves while the pressing member (32) moves synchronously with the sliding block (223), the displacement switch (34) is configured to detect a moving position of the pressing member (32), and the displacement switch (34) controls the second driving member to stop operating when the pressing member (32) moves to a preset position.
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| CN202111145483.0A CN113588696B (en) | 2021-09-28 | 2021-09-28 | Sample pre-tilt loading device for EBSD experiment |
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| CN202111145483.0A CN113588696B (en) | 2021-09-28 | 2021-09-28 | Sample pre-tilt loading device for EBSD experiment |
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| EP2824448A1 (en) * | 2013-07-08 | 2015-01-14 | Bruker Nano GmbH | Sample holder for electron backscatter diffraction |
| CN110398508A (en) * | 2019-07-05 | 2019-11-01 | 山东省分析测试中心 | Inlaying samples EBSD detection sample stage, production method and detection device |
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