CN113587768A - Detection tool for ring boss and detection method and application thereof - Google Patents
Detection tool for ring boss and detection method and application thereof Download PDFInfo
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- CN113587768A CN113587768A CN202110953838.2A CN202110953838A CN113587768A CN 113587768 A CN113587768 A CN 113587768A CN 202110953838 A CN202110953838 A CN 202110953838A CN 113587768 A CN113587768 A CN 113587768A
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- 238000001514 detection method Methods 0.000 title claims abstract description 67
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims 2
- 238000000034 method Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/08—Measuring arrangements characterised by the use of mechanical techniques for measuring diameters
Abstract
The invention provides a ring boss checking fixture and a detection method and application thereof. The checking fixture for the ring boss provided by the invention is simple in structure and easy to process, can be used for simultaneously detecting whether a plurality of ring bosses meet the standard or not, is high in detection efficiency, can save detection working hours and labor cost by using a mode of carrying out full detection and selective detection on one ring boss by using a caliper, and can guarantee accuracy.
Description
Technical Field
The invention belongs to the technical field of detection, relates to a detection tool for a ring boss, and particularly relates to a detection tool for a ring boss and a detection method and application thereof.
Background
The ring piece adopted in the production process of the semiconductor physical vapor deposition is provided with 7 or 5 bulges for being arranged on a sputtering machine table and also playing a role in electrifying. The size of the bulge on the ring piece needs to be detected after processing, and the batch products cause large production pressure to the detection process, so that the production bottleneck is caused. The machining field usually adopts a three-coordinate measuring machine to detect the size of a part, but the shape of the part needs to be ensured to be unchanged when the part is detected by the three-coordinate measuring machine, each bulge needs to be measured respectively, and data is recorded to form a three-coordinate detection report, so that the detection working time is prolonged, and the workload is increased.
CN212228005U discloses a novel three-coordinate detecting machine with an auxiliary positioning device, which comprises a three-coordinate detecting machine, wherein a stop block is fixedly connected to the rear side of the upper surface of the three-coordinate detecting machine, a sliding chute is formed in the front side of the upper surface of the three-coordinate detecting machine (1), a sliding cavity is formed below the sliding chute, sliding ways are formed in two ends of the inner wall of the sliding cavity, a sliding rod and a sliding plate are respectively connected to the front side and the rear side inside the sliding way in a sliding manner, and a compression spring is fixedly connected to one side of the sliding plate; the outer wall of the sliding rod is sleeved with a top block, the top is connected with the sliding groove in a sliding mode, the outer wall of the top block is in threaded connection with a clamping rod, and the clamping rod penetrates through the top and is tightly attached to the inner wall of the sliding cavity.
CN206855298U discloses a three-coordinate measuring clamp, which comprises a clamp base, wherein a magnetic seat is arranged on the clamp base, and the magnetic seat is controlled by a magnetic switch to open and close magnetism; an inner groove is formed in the periphery of the clamp base, one end of the mounting seat is embedded into the inner groove and fixedly connected through a fastener, the other end of the mounting seat is sleeved with an elastic seat sleeve, one end of the elastic seat sleeve is sleeved with an elastic positioning head, the other end of the elastic seat sleeve is sleeved with an elastic base, a spring is further arranged in the elastic seat sleeve and between the elastic positioning head and the elastic base, and the elastic positioning head, the elastic seat sleeve, the spring and the elastic base form an elastic seat.
CN110906893A discloses a utensil is examined to ring three-dimensional, examine utensil including the base, be provided with the circular cavity that matches with the ring that awaits measuring on the base, be provided with the recess that supplies three-dimensional measuring machine measuring pin to stretch into along the periphery of circular cavity. The measuring method comprises the steps of placing the ring piece to be measured in the circular concave cavity of the gauge, placing the projection of the ring piece to be measured on the base on the periphery of the circular concave cavity, and measuring the size of the ring piece to be measured by using a three-coordinate measuring machine. Namely, a measuring pin of a three-coordinate measuring machine extends into the groove, and the side wall and/or the bottom of the ring piece to be measured are/is detected.
The existing three-coordinate measuring method is adopted to measure batch parts, the size of each ring boss needs to be measured respectively, data is recorded to form a three-coordinate detection report, the detection working time is prolonged, the workload is increased, and the working efficiency is reduced, so that a detection tool and a method for measuring the ring bosses are needed to be developed, and the detection efficiency of the ring parts is improved.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the detection tool for the ring bosses and the detection method and application thereof, which can reduce the detection time of the ring bosses, and can save 50% of detection time for each group of ring bosses, thereby improving the production efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a ring boss checking fixture which comprises a base and a mold, wherein the mold comprises an upper mold component and a lower mold component, the lower mold component is fixed on the surface of the base, the ring boss is arranged in the upper mold component, the upper mold component and the lower mold component are buckled, and when the upper mold component completely covers the lower mold component, the detection of the ring boss is qualified.
As a preferred technical scheme of the invention, the lower die assembly is of an annular boss structure and is provided with two symmetrical openings.
Preferably, the width of the opening is smaller than the inner diameter of the lower die assembly.
Preferably, a cushion layer is arranged at the joint of the lower die assembly and the base, and the diameter of the cushion layer is larger than the outer diameter of the lower die assembly.
As a preferred technical scheme of the present invention, a through accommodating chamber is disposed in the center of the upper mold assembly, and two mutually perpendicular limiting grooves are formed in a surface of one side of the upper mold assembly.
Preferably, the diameter of the accommodating chamber is larger than the width of the limiting groove.
As a preferred technical scheme of the invention, the diameter of the accommodating cavity is larger than the diameter of the cushion layer of the lower die assembly, after the upper die assembly and the lower die assembly are buckled, the lower die assembly extends into the accommodating cavity, and the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer.
As a preferred technical scheme of the invention, at least two dies are arranged on the surface of the base side by side, and the dies respectively measure different ring bosses arranged on the surface of the same ring.
As a preferable technical scheme of the invention, the ring boss comprises a cylindrical main body and a supporting layer, wherein a fixing groove is formed in the surface of one side of the cylindrical main body, the surface of the other side of the cylindrical main body is connected with the supporting layer, and a cylindrical protrusion is arranged at the bottom of the fixing groove.
Preferably, the cylindrical protrusion is of a middle through structure.
Preferably, the height of the cylindrical body is 22-30 mm, and may be, for example, 22mm, 22.5mm, 23mm, 23.5mm, 23.8mm, 24mm, 24.5mm, 24.8mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.6mm, 28mm, 28.4mm, 28.8mm, 29mm, 29.4mm, 29.6mm, or 30mm, but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, the cylindrical body has a diameter of 19 to 25mm, and may be, for example, 19mm, 19.5mm, 20mm, 20.3mm, 20.5mm, 21mm, 21.6mm, 22mm, 22.5mm, 23mm, 23.5mm, 23.8mm, 24mm, 24.5mm, 24.8mm or 25mm, but is not limited to the recited values, and other values not recited within the range of values are equally applicable.
Preferably, the cylindrical protrusion is 0.4-0.6 mm higher than the surface of the cylindrical body, such as 0.4mm, 0.45mm, 0.5mm, 0.55mm or 0.6mm, but not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, the height of the cylindrical protrusion is 6 to 12mm, and may be, for example, 6mm, 6.5mm, 6.8mm, 7mm, 7.5mm, 7.8mm, 8mm, 8.5mm, 8.8mm, 9mm, 9.5mm, 9.8mm, 10mm, 10.5mm, 11mm, 11.6mm or 12mm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the outer diameter of the cylindrical protrusion is 8 to 12mm, and may be, for example, 8mm, 8.5mm, 8.8mm, 9mm, 9.5mm, 9.8mm, 10mm, 10.5mm, 11mm, 11.6mm or 12mm, but is not limited to the enumerated values, and other non-enumerated values within the numerical range are also applicable.
Preferably, the diameter of the fixing groove is 16 to 21mm, for example, 16mm, 16.5mm, 16.8mm, 17mm, 17.5mm, 17.8mm, 18mm, 18.5mm, 18.8mm, 19mm, 19.5mm, 19.8mm, 20mm, 20.5mm or 21mm, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the outer diameter of the support layer is larger than the diameter of the cylindrical body.
Preferably, the thickness of the support layer is 1.2 to 1.3mm, and may be, for example, 1.2mm, 1.21mm, 1.22mm, 1.23mm, 1.24mm, 1.25mm, 1.26mm, 1.27mm, 1.28mm, 1.29mm or 1.3mm, but is not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
As a preferred technical scheme of the invention, the outer diameter of the support layer is the same as the diameter of the accommodating cavity of the upper die assembly, the ring boss is arranged in the accommodating cavity, the support layer is positioned at the bottom of the accommodating cavity, and the top of the cylindrical main body is higher than the surface of one side of the upper die assembly provided with the fixing groove.
Preferably, the diameter of the cylindrical main body is the same as the outer diameter of the lower die assembly, after the upper die assembly and the lower die assembly are buckled, the surface of the lower die assembly is abutted against the surface of the cylindrical main body, and the cylindrical protrusion extends into the inner ring of the lower die assembly.
In a second aspect, the invention provides a detection method for a ring boss by using the detection tool for the ring boss in the first aspect, and the detection method comprises the following steps:
and respectively placing the ring bosses in the upper die assembly, buckling the upper die assembly with the lower die assembly, and when the upper die assembly completely covers the lower die assembly, indicating that the detection of the ring bosses is qualified.
As a preferred technical solution of the present invention, the detection method specifically includes:
the ring piece boss is arranged in the upper die assembly, the upper die assembly with the ring piece boss is buckled on the lower die assembly respectively, if the upper die assembly is completely matched with the lower die assembly, the detection is qualified, and then the measuring size of one of the ring piece bosses is extracted by using a caliper and recorded.
It should be noted that, in the invention, the ring boss is placed in the upper die assembly, the ring boss smoothly enters the accommodating chamber, and the supporting layer is completely matched with the bottom of the accommodating chamber, namely, whether the outer diameter of the cylindrical main body of the ring boss, the diameter of the supporting layer and the thickness of the supporting layer are qualified or not is detected. And then the upper die assembly with the ring boss is buckled on the lower die assembly respectively, the cylindrical main body surface of the ring boss is abutted against the surface of the lower die assembly, the cylindrical protrusion extends into the inner ring of the lower die assembly, meanwhile, the lower die assembly extends into the accommodating cavity of the upper die assembly, the inner wall of the upper die assembly is attached to the outer wall of the bottom cushion layer of the lower die assembly, namely, the upper die assembly completely covers the lower die assembly, and the size of the ring boss is qualified.
In a third aspect, the invention provides an application of the detecting tool for the ring boss in the first aspect, and the detecting tool for the ring boss is applied to the field of semiconductors.
The ring boss detection tool provided by the invention can be applied to the field of semiconductor or machining, and is particularly suitable for detecting whether a plurality of ring bosses on a group of magnetron sputtering rings meet the standard, so that the detection efficiency is improved, and the product precision is guaranteed.
Compared with the prior art, the invention has the beneficial effects that:
in the ring boss detection tool and the detection method and application thereof provided by the invention, the ring boss detection tool is simple in structure and easy to process, can be used for simultaneously detecting whether a plurality of ring bosses meet the standard or not, and is high in detection efficiency; the detection tool for the ring boss can save detection time and labor cost, can guarantee accuracy, and can be applied to detection of batch components.
Drawings
FIG. 1 is a schematic structural view of a lower die assembly of a ring boss checking fixture according to an embodiment of the invention;
FIG. 2 is a schematic structural diagram of an upper die assembly of a detecting tool for a ring boss according to an embodiment of the invention;
fig. 3 is a schematic structural diagram of a ring boss according to an embodiment of the present invention.
Wherein, 1-a base; 2-upper die assembly; 3-a lower die assembly; 4-cushion layer; 5-ring boss; 6-a limiting groove; 7-a support layer; 8-cylindrical protrusion; 9-fixed groove.
Detailed Description
It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be taken as limiting the present invention.
It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In one embodiment, the invention provides a detection tool for a ring boss 5, which comprises a base 1 and a die. At least two molds are arranged on the surface of the base 1 side by side and respectively measure a plurality of ring bosses 5 arranged on the surface of the same ring. The mould comprises an upper mould component 2 and a lower mould component 3, wherein the lower mould component 3 is fixed on the surface of a base 1, a ring boss 5 is arranged in the upper mould component 2, and then the upper mould component 2 and the lower mould component 3 are buckled to detect the ring boss 5.
Lower mould component 3 is annular boss structure, and lower mould component 3 sets up two openings of symmetry, and open-ended width is less than lower mould component 3's internal diameter, and lower mould component 3 sets up bed course 4 with the junction of base 1, and the diameter of bed course 4 is greater than lower mould component 3 external diameter.
The center of the upper die component 2 is provided with a through containing cavity, the surface of one side of the upper die component 2 is provided with two limiting grooves 6 which are vertical to each other, and the diameter of the containing cavity is larger than the width of the limiting grooves 6. The diameter that holds the cavity is greater than the diameter of bed course 4 of lower mould subassembly 3, will go up mould subassembly 2 and lower mould subassembly 3 lock back, and lower mould subassembly 3 stretches into in holding the cavity, holds the inner wall of cavity and the outer wall laminating of bed course 4.
As shown in FIG. 3, the ring boss 5 comprises a cylindrical main body and a supporting layer 7, the height of the cylindrical main body is 22-30 mm, the diameter of the cylindrical main body is 19-25 mm, the outer diameter of the supporting layer 7 is larger than that of the cylindrical main body, and the thickness of the supporting layer 7 is 1.2-1.3 mm. Fixing groove 9 is seted up to cylindricality main part one side surface, and supporting layer 7 is connected to the opposite side surface, and fixing groove 9 bottom sets up cylindrical protrusion 8. The diameter of fixed slot 9 is 16 ~ 21mm, and cylindrical protrusion 8 is the middle part structure that link up, and cylindrical protrusion 8's external diameter is 8 ~ 12mm, highly is 6 ~ 12mm, and cylindrical protrusion 8's the length that exceeds cylindrical main body surface is 0.4 ~ 0.6 mm.
The outer diameter of the supporting layer 7 is the same as the diameter of the accommodating cavity of the upper die assembly 2, the ring boss 5 is arranged in the accommodating cavity, the supporting layer 7 is located at the bottom of the accommodating cavity, and the top of the cylindrical main body is higher than the surface of one side, provided with the fixing groove 9, of the upper die assembly 2. The diameter of the cylindrical main body is the same as the outer diameter of the lower die assembly 3, after the upper die assembly 2 and the lower die assembly 3 are buckled, the surface of the lower die assembly 3 is abutted against the surface of the cylindrical main body, and the cylindrical protrusion 8 extends into the inner ring of the lower die assembly 3.
In another embodiment, the invention provides a detection method of a detection tool using the ring boss 5 of one embodiment, which includes:
the ring piece detecting tool comprises at least two ring piece bosses 5 arranged on the same ring piece and a detecting tool for the ring piece bosses 5, wherein at least two dies are arranged on a base 1 of the detecting tool. The ring bosses 5 are respectively arranged in the upper die components 2, the upper die components 2 with the ring bosses 5 are respectively buckled on the lower die components 3, if the upper die components 2 are completely matched with the lower die components 3, the detection is qualified, the size of one ring boss 5 is measured by using a caliper, and data is recorded.
Example 1
The embodiment provides a measuring method of a ring boss 5, and firstly, seven ring bosses 5 arranged on the same ring and a checking fixture are provided. And (3) adopting a gauge to respectively measure whether the seven ring bosses 5 are qualified, then using a caliper to extract one of the ring bosses 5 to measure the size of the ring boss, and recording data.
The checking fixture comprises a base 1, as shown in fig. 1, seven dies are arranged on the surface of the base 1 side by side, each die comprises an upper die assembly 2 and a lower die assembly 3, the lower die assemblies 3 are fixed on the surface of the base 1, a ring boss 5 is arranged in each upper die assembly 2, and the upper die assemblies 2 and the lower die assemblies 3 are buckled.
Lower mould component 3 is annular boss structure, and lower mould component 3 surface sets up two openings of symmetry, and open-ended width is less than lower mould component 3's internal diameter, and lower mould component 3 sets up bed course 4 with the junction of base 1, and the diameter of bed course 4 is greater than lower mould component 3's external diameter.
The center of the upper die component 2 is provided with a through containing cavity, the surface of one side of the upper die component 2 is provided with two limiting grooves 6 which are vertical to each other, and the diameter of the containing cavity is larger than the width of the limiting grooves 6. Simultaneously, the diameter that holds the cavity is greater than the diameter of bed course 4 of lower mould subassembly 3, will go up mould subassembly 2 and lower mould subassembly 3 lock back, and lower mould subassembly 3 stretches into in holding the cavity, holds the inner wall of cavity and the outer wall laminating of bed course 4.
As shown in fig. 2, the ring boss 5 includes a cylindrical main body and a supporting layer 7, a fixing groove 9 is formed in one side surface of the cylindrical main body, the supporting layer 7 is connected to the other side surface of the cylindrical main body, and a cylindrical protrusion 8 with a middle through structure is arranged at the bottom of the fixing groove 9.
Seven ring bosses 5 are sequentially and respectively arranged in the containing cavities of the upper die assembly 2, the supporting layer 7 is positioned at the bottom of the containing cavities, and the top of the cylindrical main body is higher than the surface of one side of the upper die assembly 2, which is provided with the fixing groove 9. After the upper die assembly 2 with the ring boss 5 is buckled with the corresponding lower die assembly 3 respectively, the lower die assembly 3 can stretch into the accommodating cavity, the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4, the surface of the lower die assembly 3 is abutted to the surface of the cylindrical main body, the cylindrical protrusion 8 stretches into the inner ring of the lower die assembly 3, the upper die assembly 2 is completely matched with the lower die assembly 3, and the detection result is qualified.
The height of the cylindrical main body in the ring boss 5 is measured by a caliper to be 24.31mm, the diameter of the cylindrical main body is 20.19mm, the outer diameter of the supporting layer 7 is 25.4mm, the thickness of the supporting layer 7 is 1.27mm, the diameter of the fixing groove 9 is 17.65mm, the outer diameter of the cylindrical protrusion 8 is 8.89mm, the height of the cylindrical protrusion 8 is 8.13mm, and the length of the cylindrical protrusion 8 which is higher than the surface 9 of the cylindrical main body is 0.5 mm.
The detection results are shown in table 1:
TABLE 1
Example 2
The embodiment provides a measuring method of a ring boss 5, and firstly five ring bosses 5 arranged on the same ring and a checking fixture are provided. And detecting whether the five ring bosses 5 are qualified or not by using a detection tool, extracting one of the ring bosses 5, measuring the size of the ring boss by using a caliper, and recording data.
Examine utensil and include base 1 wherein, and base 1 surface sets up five moulds side by side, and the mould includes last mould component 2 and lower mould component 3, and lower mould component 3 is fixed in base 1 surface, arranges ring spare boss 5 in last mould component 2, will go up mould component 2 and lower mould component 3 lock again.
Lower mould component 3 is annular boss structure, and lower mould component 3 surface sets up two openings of symmetry, and open-ended width is less than lower mould component 3's internal diameter, and lower mould component 3 sets up bed course 4 with the junction of base 1, and the diameter of bed course 4 is greater than lower mould component 3's external diameter.
The center of the upper die component 2 is provided with a through containing cavity, the surface of one side of the upper die component 2 is provided with two limiting grooves 6 which are vertical to each other, and the diameter of the containing cavity is larger than the width of the limiting grooves 6. Simultaneously, the diameter that holds the cavity is greater than the diameter of bed course 4 of lower mould subassembly 3, will go up mould subassembly 2 and lower mould subassembly 3 lock back, and lower mould subassembly 3 stretches into in holding the cavity, holds the inner wall of cavity and the outer wall laminating of bed course 4.
The ring boss 5 comprises a cylindrical main body and a supporting layer 7, wherein a fixing groove 9 is formed in the surface of one side of the cylindrical main body, the supporting layer 7 is connected to the surface of the other side of the cylindrical main body, and a cylindrical protrusion 8 of a middle through structure is arranged at the bottom of the fixing groove 9.
Five ring bosses 5 are sequentially and respectively arranged in the accommodating cavity of the upper die assembly 2, the supporting layer 7 is positioned at the bottom of the accommodating cavity, and the top of the cylindrical main body is higher than the surface of one side of the upper die assembly 2, which is provided with the fixing groove 9. After the upper die assembly 2 with the ring boss 5 is buckled with the corresponding lower die assembly 3 respectively, the lower die assembly 3 can stretch into the accommodating cavity, the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4, the surface of the lower die assembly 3 is abutted to the surface of the cylindrical main body, the cylindrical protrusion 8 stretches into the inner ring of the lower die assembly 3, the upper die assembly 2 is completely matched with the lower die assembly 3, and the detection result is qualified.
The height of the cylindrical main body in the ring boss 5 is 26.31mm measured by a caliper, the diameter of the cylindrical main body is 22.29mm, the outer diameter of the support layer 7 is 26.3mm, the thickness of the support layer 7 is 1.29mm, the diameter of the fixing groove 9 is 17.65mm, the outer diameter of the cylindrical protrusion 8 is 9.37mm, the height of the cylindrical protrusion 8 is 9.27mm, and the length of the cylindrical protrusion 8 which is 0.5mm higher than the surface 9 of the cylindrical main body.
The detection results are shown in table 2:
TABLE 2
According to the invention, the ring boss 5 is placed in the upper die component 2, the ring boss 5 smoothly enters the accommodating cavity, and the supporting layer 7 is completely matched with the bottom of the accommodating cavity, namely whether the outer diameter of the cylindrical main body of the ring boss 5, the diameter of the supporting layer 7 and the thickness of the supporting layer 7 are qualified or not is detected. And then the upper die assembly 2 with the ring boss 5 is buckled on the lower die assembly 3 respectively, the cylindrical main body surface of the ring boss 5 is abutted against the surface of the lower die assembly 3, the cylindrical protrusion 8 extends into the inner ring of the lower die assembly 3, meanwhile, the lower die assembly 3 extends into the accommodating cavity, the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4 at the bottom of the lower die assembly 3, namely, the upper die assembly 2 completely covers the lower die assembly 3, and the size of the ring boss 5 is qualified.
The detection tool for the ring boss 5 provided by the invention is simple in structure and easy to process, can be used for simultaneously detecting whether a plurality of ring bosses 5 meet the standard or not, and is high in detection efficiency; the detection tool for the ring boss 5 provided by the invention can be used for detection, so that the detection working time and the labor cost can be saved, the accuracy can be guaranteed, and the detection tool can be applied to detection of batch components.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. The ring boss detection tool is characterized by comprising a base and a mold, wherein the mold comprises an upper mold component and a lower mold component, the lower mold component is fixed on the surface of the base, the ring boss is arranged in the upper mold component, the upper mold component and the lower mold component are buckled, and when the upper mold component completely covers the lower mold component, the detection of the ring boss is qualified.
2. The ring boss check tool according to claim 1, wherein the lower die assembly is of an annular boss structure, and is provided with two symmetrical openings;
preferably, the width of the opening is smaller than the inner diameter of the lower die assembly;
preferably, a cushion layer is arranged at the joint of the lower die assembly and the base, and the diameter of the cushion layer is larger than the outer diameter of the lower die assembly.
3. The ring boss detection tool according to claim 1 or 2, wherein a through accommodating chamber is arranged in the center of the upper die assembly, and two limiting grooves perpendicular to each other are formed in the surface of one side of the upper die assembly;
preferably, the diameter of the accommodating chamber is larger than the width of the limiting groove.
4. The ring boss checking fixture according to any one of claims 1 to 3, wherein the diameter of the accommodating chamber is larger than that of the cushion layer of the lower die assembly, after the upper die assembly and the lower die assembly are fastened, the lower die assembly extends into the accommodating chamber, and the inner wall of the accommodating chamber is attached to the outer wall of the cushion layer.
5. The ring boss checking fixture according to any one of claims 1 to 4, wherein at least two molds are arranged on the surface of the base side by side, and the molds measure different ring bosses arranged on the same ring surface respectively.
6. The detecting tool for the ring boss according to any one of claims 1 to 5, wherein the ring boss comprises a cylindrical main body and a supporting layer, a fixing groove is formed in one side surface of the cylindrical main body, the supporting layer is connected to the other side surface of the cylindrical main body, and a cylindrical protrusion is arranged at the bottom of the fixing groove;
preferably, the cylindrical protrusion is of a middle through structure;
preferably, the height of the cylindrical main body is 22-30 mm;
preferably, the diameter of the cylindrical body is 19-25 mm;
preferably, the cylindrical protrusion is 0.4-0.6 mm higher than the surface of the cylindrical main body;
preferably, the height of the cylindrical protrusion is 6-12 mm;
preferably, the outer diameter of the cylindrical protrusion is 8-12 mm;
preferably, the diameter of the fixing groove is 16-21 mm;
preferably, the outer diameter of the support layer is greater than the cylindrical body diameter;
preferably, the thickness of the supporting layer is 1.2-1.3 mm.
7. The ring boss detection tool according to claim 6, wherein the outer diameter of the support layer is the same as the diameter of the accommodating chamber of the upper die assembly, the ring boss is placed in the accommodating chamber, the support layer is located at the bottom of the accommodating chamber, and the top of the cylindrical main body is higher than the surface of the upper die assembly on the side where the fixing groove is formed;
preferably, the diameter of the cylindrical main body is the same as the outer diameter of the lower die assembly, after the upper die assembly and the lower die assembly are buckled, the surface of the lower die assembly is abutted against the surface of the cylindrical main body, and the cylindrical protrusion extends into the inner ring of the lower die assembly.
8. A detection method for detecting the ring boss by using the detection tool for the ring boss according to any one of claims 1 to 7, wherein the detection method comprises the following steps:
and respectively placing the ring bosses in the upper die assembly, buckling the upper die assembly with the lower die assembly, and when the upper die assembly completely covers the lower die assembly, indicating that the detection of the ring bosses is qualified.
9. The detection method according to claim 8, wherein the detection method specifically comprises:
the ring part boss checking tool comprises at least two ring part bosses arranged on the same ring part, checking tools with dies the same as the ring part bosses in number are arranged on a base, the ring part bosses are arranged in an upper die assembly respectively, the upper die assembly with the ring part bosses is buckled on a lower die assembly respectively, if the upper die assembly is completely matched with the lower die assembly, the detection is qualified, and then a caliper is used for extracting one of the ring part bosses to measure the size and record the size.
10. Use of the inspection device for the ring boss according to any one of claims 1 to 7, wherein the inspection device for the ring boss is applied to the field of semiconductors.
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| US20080143058A1 (en) * | 2006-12-13 | 2008-06-19 | Aerojet-General Corporation | Two-piece aft closure for a rocket motor case |
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| CN112338543A (en) * | 2020-09-22 | 2021-02-09 | 中国铁建重工集团股份有限公司 | Ring piece processing system and ring piece processing method |
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| US20080143058A1 (en) * | 2006-12-13 | 2008-06-19 | Aerojet-General Corporation | Two-piece aft closure for a rocket motor case |
| CN109900191A (en) * | 2019-03-19 | 2019-06-18 | 宁波江丰电子材料股份有限公司 | Sputter ring hole location detecting tool and method |
| CN110849248A (en) * | 2019-12-12 | 2020-02-28 | 宁波江丰电子材料股份有限公司 | Ring angle gauge, and inspection method and application using same |
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