CN113580196B - Preparation and use method of microcosmic intelligent robot and micro magnetic gripper - Google Patents

Preparation and use method of microcosmic intelligent robot and micro magnetic gripper Download PDF

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CN113580196B
CN113580196B CN202110822894.2A CN202110822894A CN113580196B CN 113580196 B CN113580196 B CN 113580196B CN 202110822894 A CN202110822894 A CN 202110822894A CN 113580196 B CN113580196 B CN 113580196B
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intelligent robot
resin
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CN113580196A (en
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王正直
颜朔庚
邵倩
王琨
倪克
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Wuhan University WHU
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/007Means or methods for designing or fabricating manipulators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00Micromanipulators
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20Oxides; Hydroxides
    • C08K3/22Oxides; Hydroxides of metals
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00Use of pretreated ingredients
    • C08K9/10Encapsulated ingredients
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L75/00Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
    • C08L75/04Polyurethanes
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
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    • C08K3/02Elements
    • C08K3/08Metals
    • C08K2003/0843Cobalt
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • C08K2003/0856Iron
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • C08K2003/0862Nickel
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20Oxides; Hydroxides
    • C08K3/22Oxides; Hydroxides of metals
    • C08K2003/2265Oxides; Hydroxides of metals of iron
    • C08K2003/2272Ferric oxide (Fe2O3)
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20Oxides; Hydroxides
    • C08K3/22Oxides; Hydroxides of metals
    • C08K2003/2265Oxides; Hydroxides of metals of iron
    • C08K2003/2275Ferroso-ferric oxide (Fe3O4)
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/01Magnetic additives

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Abstract

The invention discloses a microcosmic intelligent robot and a preparation and use method of a miniature magnetic gripper. Dripping the composite resin filled with the particles on a template with micron-sized column cavities to enable the resin to permeate into the column cavities of the template; applying a magnetic field pointing to any direction of the seventh octave from the origin of the space coordinate, and irradiating the resin outside the photomask to cure the resin; rotating the magnetic field clockwise around the z-axis by 90 degrees, 180 degrees and 270 degrees respectively, and irradiating the resin outside the photomask after each rotation to cure the resin; covering a PET substrate on the resin, and peeling the substrate from the template after the substrate is combined with the resin to obtain the microscopic intelligent robot; the microcosmic intelligent robot manufactured by the invention can achieve different deformations in the four microcolumns by applying different magnetic fields, thereby generating horizontal movement, steering, grabbing and releasing motions on microparticles and the like.

Description

Preparation and use method of microcosmic intelligent robot and micro magnetic gripper
Technical Field
The invention relates to the technical field of functional composite material preparation, in particular to a preparation and use method of a microcosmic intelligent robot and a miniature magnetic gripper.
Background
The robot technology is a high-tech technology which is rapidly developed, is increasingly widely applied in many fields, and has an increasingly important influence on the human society.
The micro robot is a small moving mechanism with general programming capability integrated with a micro working tool. The micro robot has the characteristics of small structure size, precise device, capability of performing micro operation, small inertia, quick response, high resonant frequency, high added value and the like. However, the micro-robot is not a simple one, but is generally integrated with sensing, controlling and executing units, and is a cross-fusion of multiple disciplines such as mechanical, electronic, material, control, computer and biomedical technologies. The research of the micro-robot is a novel and has great practical significance and challenge subject. The technology is beneficial to realizing a tiny system in a real sense, and the huge charm of the tiny system is fully shown; the creation of a micro-robot requires a more minute actuator, processor, etc., and the processing of the body of the micro-robot and the development of micro-components, which have been developed, are difficult problems in the field of micro-robots. Chinese patent "method for manufacturing and using magnetic tweezers with micron-sized" CN111508706A describes that a magnetic field is used to deform two micro-pillars to achieve the effect of tweezers, however, in the above patent, two pillars of micro-tweezers can only deform in the same direction under the same magnetic field, and the micro-pillars cannot deform in different directions under the same magnetic field, which greatly limits the application range of micro-tweezers, and limits the idea to the tweezers shape with only two pillars.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a microcosmic intelligent robot and a preparation and use method of a miniature magnetic gripper.
In order to achieve the purpose, the invention provides the following technical scheme:
a preparation and use method of a microcosmic intelligent robot comprises the following steps:
s1, preparing a template substrate provided with a column cavity;
s2, dripping the nano composite resin with the magnetic particles wrapped by the non-magnetic substance onto a template substrate, and enabling the resin to permeate into a column cavity of the template substrate through a vacuum auxiliary forming process to form a product I;
s3, applying a magnetic field pointing to any direction of the seventh octagon from the origin of coordinates in a space coordinate system to the product I, enabling magnetic particles to be arranged in the product I in an oriented mode along the current magnetic field direction to form a plurality of magnetic chains along the current magnetic field direction, so as to form a product II, shielding column cavities No. 2, No. 3 and No. 4 of the template substrate by using a photomask, irradiating by using blue light, and carrying out photocuring reaction on resin in the column cavity No. 1 to form a product III, so as to obtain a cured microcolumn I;
s4, rotating the magnetic field in the S3 clockwise by 90 degrees around the z axis, after the magnetic particles are aligned along the current magnetic field direction again to form a plurality of magnetic chains along the current magnetic field direction, shielding the No. 3 and No. 4 column cavities of the template substrate by using a photomask, irradiating the column cavities by using blue light, and performing photocuring reaction on resin in the No. 2 column cavity to form a product IV to obtain a cured microcolumn II;
s5, rotating the magnetic field in S3 clockwise by 180 degrees around a z axis, after the magnetic particles are aligned along the current magnetic field direction again to form a plurality of magnetic chains along the current magnetic field direction, using a photomask to shield the No. 4 column cavity of the template substrate, irradiating with blue light, and performing photocuring reaction on resin in the No. 3 column cavity to form a product V, thus obtaining a cured microcolumn III;
s6, rotating the magnetic field in S3 clockwise by 270 degrees around the z axis, after the magnetic particles are aligned along the current magnetic field direction again to form a plurality of magnetic chains along the current magnetic field direction, removing the photomask, irradiating the photomask with blue light, and carrying out photocuring reaction on resin in the No. 4 column cavity of the template substrate to form a product VI so as to obtain a cured microcolumn IV;
s7, stripping the product VI from the template substrate to obtain a solidified microcosmic intelligent robot;
s8, applying a periodic magnetic field towards the upper right to the microcosmic intelligent robot to enable the microcosmic intelligent robot to move forwards;
and S9, rotating the periodic magnetic field applied in the step S8 for a certain angle around the z axis, so that the microscopic intelligent robot turns towards the direction of the rotated magnetic field.
Further, the mass fraction of the magnetic particles inside the nanocomposite resin in the step S1 is 10 to 30%.
Further, the nonmagnetic substance in the step S1 is SiO2、SiC、Si3N4、TiN、TiO2Any one or more of TiC or BN is mixed to reduce agglomeration phenomenon between magnetic particles.
Further, the nanocomposite resin material in the step S1 is a photo-curable highly elastic resin polymer.
Further, the high elastic resin polymer is photosensitive polyurethane.
Further, the magnetic particles in step S1 are Fe and Fe2O3、Fe3O4Any one or more of Co and Ni.
Further, the template substrate in step S1 is a silicon template having regular cavities.
The invention also provides a preparation and use method of the micro magnetic gripper, which comprises the micro intelligent robot and comprises the following steps:
s1, connecting a microscopic intelligent robot with a driving device to obtain a micro magnetic gripper;
s2, moving the miniature magnetic gripper through a driving device to enable four microcolumns of the gripper to surround the microparticles;
s3, applying a vertical downward magnetic field to the micro gripper, wherein the micro column combination generates inward deformation due to different directions of magnetic chains formed after the magnetic particles in each micro column are oriented and arranged;
s4, keeping the magnetic field, and moving the driving device to enable the micro gripper to drive the micro particles to move to a target position;
s5, after the target position is reached, removing the vertically downward magnetic field, and recovering elastic deformation of the microcolumn due to the magnetic field application so as to release microparticles;
s6, the micro gripper is moved away through the driving device, and the micro particles reach the target position under the action of the micro gripper.
The invention has the following beneficial effects and advantages:
the invention realizes the orientation arrangement and the chain aggregation of magnetic particles by using a magnetic field, and can lead the directions of magnetic chains in the four microcolumn structures to be different, thereby realizing that the four microcolumns generate deformation in different directions or different degrees under the same magnetic field, and further realizing the preparation of a micro intelligent robot with the grade below 10 microns; meanwhile, the addition of the particles greatly improves the strength and rigidity of the microcolumn; the effect of enabling the intelligent robot to move forwards can be achieved by applying the periodic magnetic field towards the upper right, and the intelligent robot can turn towards the direction of the rotated magnetic field by rotating the periodic magnetic field for a certain angle around the z axis; also through being connected intelligent robot and drive arrangement, apply vertical decurrent magnetic field, make each microcolumn all produce inside bending deformation, realize snatching the function, get rid of the magnetic field, because of the elasticity of microcolumn itself, its deformation resumes gradually, and the article that is snatched drops, realizes the release function.
The method for manufacturing the micro intelligent robot is simple, a finished product can be obtained only by four times of curing, compared with other micro intelligent robots, the method is much simpler, and in addition, the deformation directions and the deformation degrees of four microcolumns of the micro intelligent robot can be controlled by changing the direction of an applied magnetic field, so that the micro intelligent robot can finish various actions.
Drawings
FIG. 1 is a flow chart of the present invention for the preparation of a micro intelligent robot;
FIG. 2 is a Scanning Electron Microscope (SEM) image of a cross section of a silicon substrate;
FIG. 3 shows 15% volume fraction Fe3O4And transmission electron microscopy images of SiO2 nanocomposites;
FIG. 4 is a schematic view of a simplified model of bending of microcolumns I, II, III, IV in example 1;
in the figure: because the four microcolumns are rotationally symmetrical around the Z axis, the deformation of each microcolumn after the magnetic field is applied is equivalent (all the microcolumns generate bending deformation inwards); the magnetic chains in the microcolumn are distributed in the whole microcolumn, and rotate towards the direction parallel to the magnetic field after the vertical downward magnetic field is applied.
FIG. 5 is a graph showing the force distribution of the microcolumn in the magnetic field in example 1;
FIG. 6 is a schematic view of a simplified model of bending of microcolumns I, II, III, IV in example 7;
FIG. 7 is a force distribution diagram of the microcolumn in the magnetic field in example 7;
FIG. 8 is a schematic view of the movement of a micro intelligent robot;
FIG. 9 is a flowchart of the operation of the micro gripper grasping an object.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments.
Example 1:
as shown in fig. 1 to 5 and fig. 8 to 9, the method for preparing and using the micro-intelligent robot in this embodiment includes the following steps:
step 1: filling particles (non-magnetic substance SiO)2Coated magnetic particle Fe2O3) Dropping the nano composite resin Bis-GMA/TEGDMA (the mass fraction of the filling particles is 15%) onto a silicon template substrate (the diameter of a substrate cavity is 5 mu m), and enabling the resin to penetrate into a column cavity of the silicon template substrate through a vacuum auxiliary forming process to form a product I;
step 2: respectively placing two parallel magnets at the positions of two ends of the product I at equal distance along the direction of the vector (-1, -1, -1), so that the product I is subjected to a magnetic field along the direction of the vector (-1, -1, -1), and magnetic particles are oriented and arranged along the current magnetic field direction in the product I to form a plurality of magnetic chains along the current magnetic field direction, thereby forming a product II;
and step 3: shielding the No. 2, 3 and 4 column cavities of the silicon template substrate by using a photomask, irradiating by using blue light, and carrying out photocuring reaction on resin in the unblocked No. 1 column cavity to form a product III to obtain a cured microcolumn I;
and 4, step 4: rotating a magnet in S3 clockwise by 90 degrees around a z axis to enable a product III to be subjected to a magnetic field along a vector (-1, 1, -1) direction, changing the magnetic field received by the product III, enabling magnetic particles in uncured resin in a column cavity to generate corresponding motion, enabling the magnetic particles to be aligned along the current magnetic field direction to form a plurality of magnetic chains along the current magnetic field direction, then using a photomask to shield No. 3 and No. 4 column cavities of a silicon template substrate, and curing the resin in the No. 2 column cavity by light to form a product IV, thus obtaining a cured microcolumn II;
and 5: rotating a magnet in S3 clockwise by 180 degrees around a z axis to enable a product IV to be subjected to a magnetic field along a vector (1, -1, -1) direction, changing the magnetic field received by the product IV, enabling magnetic particles in uncured resin in a column cavity to generate corresponding motion, enabling the magnetic particles to be aligned along the current magnetic field direction to form a plurality of magnetic chains along the current magnetic field direction, then using a photomask to shield a No. 4 column cavity of a silicon template substrate, and curing the resin in the No. 3 column cavity by light to form a product V, thus obtaining a cured microcolumn III;
step 6: rotating a magnet in S3 clockwise by 270 degrees around a z axis to enable a product V to be subjected to a magnetic field along a vector (1, 1, -1) direction, changing the magnetic field received by the product V, enabling magnetic particles in uncured resin in a column cavity to generate corresponding motion, carrying out orientation arrangement on the magnetic particles along the current magnetic field direction to form a plurality of magnetic chains along the current magnetic field direction, taking away a photo-mask plate, and curing the resin in a No. 4 column cavity of a silicon template substrate by light to form a product VI so as to obtain a cured microcolumn IV;
and 7: stripping the product VI from the silicon template substrate to obtain a solidified micro intelligent robot in mixed distribution;
and 8: a periodic magnetic field towards the upper right is applied to the microcosmic intelligent robot, so that two microcolumns in front can be bent and deformed forwards at the same time, and the effect of enabling the intelligent robot to move forwards is achieved;
and step 9: and (4) rotating the periodic magnetic field applied in the step (8) by a certain angle around the z axis, so that the intelligent robot can turn towards the direction of the rotated magnetic field.
Step 10: connecting the micro intelligent robot with a driving device to obtain a micro magnetic gripper;
step 11: moving the miniature magnetic gripper through a driving device to enable four microcolumns of the gripper to surround the microparticles;
step 12: applying a vertical downward magnetic field to the micro gripper, wherein the micro-column combination generates inward deformation due to different directions of magnetic chains formed after the magnetic particles in each micro-column are oriented and arranged;
step 13: keeping the magnetic field, and moving the driving device to enable the micro gripper to drive the micro particles to move to the target position;
step 14: after the micro-column reaches the target position, the vertical downward magnetic field is removed, and the elastic deformation of the micro-column caused by the application of the magnetic field is recovered, so that the micro-particles are released;
step 15: the micro gripper is moved away through the driving device, and the micro particles reach the target position under the action of the micro gripper.
Example 2:
example 2 the same procedure as example 1, except that: the mass fraction of the magnetic particles in the mixed solution in the step 1 is 10-30%.
Example 3:
example 3 the same procedure as in example 1, except that: in step 1, the magnetic particles are Fe and Fe2O3、Fe3O4One or more of Co and Ni.
Example 4:
example 4 the same procedure as in example 1, except that: in step 1, the nonmagnetic substance is SiO2、 SiC、Si3N4、TiN、TiO2One or more of TiC and BN.
Example 5:
example 5 the same procedure as example 1, except that: in the step 1, the resin material is other high-elasticity photo-curing resin polymers.
Example 6:
example 6 the same procedure as example 1, except that: in step 11, the microparticles are hair, fine spines, fibers, irregular-shaped blocks and the like.
Example 7:
as shown in fig. 6 and 7, example 7 has the same steps as example 1 except that: the direction of the applied magnetic field in step 2 is along the vector (-2, -2, -1).
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent replacements, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A preparation method of a microcosmic intelligent robot is characterized by comprising the following steps: the method comprises the following steps:
s1, preparing a template substrate provided with a column cavity;
s2, dripping nano composite resin filled with magnetic particles wrapped by a non-magnetic substance onto a template substrate, and enabling the resin to permeate into a column cavity of the template substrate through a vacuum auxiliary forming process to form a product I;
s3, applying a magnetic field pointing to any direction of the seventh octagon from the origin of coordinates in a space coordinate system to the product I, enabling magnetic particles to be arranged in the product I in an oriented mode along the current magnetic field direction to form a plurality of magnetic chains along the current magnetic field direction, so as to form a product II, shielding column cavities No. 2, No. 3 and No. 4 of the template substrate by using a photomask, irradiating by using blue light, and carrying out photocuring reaction on resin in the column cavity No. 1 to form a product III, so as to obtain a cured microcolumn I;
s4, rotating the magnetic field in the S3 clockwise by 90 degrees around the z axis, after the magnetic particles are aligned along the current magnetic field direction again to form a plurality of magnetic chains along the current magnetic field direction, shielding the No. 3 and No. 4 column cavities of the template substrate by using a photomask, irradiating the column cavities by using blue light, and performing photocuring reaction on resin in the No. 2 column cavity to form a product IV to obtain a cured microcolumn II;
s5, rotating the magnetic field in S3 clockwise by 180 degrees around the z axis, after the magnetic particles are aligned along the current magnetic field direction again to form a plurality of magnetic chains along the current magnetic field direction, shielding a No. 4 column cavity of the template substrate by using a photomask, irradiating by using blue light, and carrying out photocuring reaction on resin in the No. 3 column cavity to form a product V, thus obtaining a cured microcolumn III;
s6, rotating the magnetic field in S3 clockwise around a z axis by 270 degrees, removing the photomask after the magnetic particles are aligned along the current magnetic field direction again to form a plurality of magnetic chains along the current magnetic field direction, irradiating the magnetic chains with blue light, and performing light curing reaction on resin in a No. 4 column cavity of the template substrate to form a product VI to obtain a cured microcolumn IV;
s7, stripping the product VI from the template substrate to obtain a cured microcosmic intelligent robot;
s8, applying a periodic magnetic field towards the upper right to the microcosmic intelligent robot to enable the microcosmic intelligent robot to move forwards;
and S9, rotating the periodic magnetic field applied in the step S8 for a certain angle around the z axis, so that the microscopic intelligent robot turns towards the direction of the rotated magnetic field.
2. The method for manufacturing a micro intelligent robot according to claim 1, wherein: the mass fraction of the magnetic particles in the nano composite resin is 10-30%.
3. The method for manufacturing a micro intelligent robot according to claim 1 or 2, wherein: the non-magnetic substance is any one or a mixture of more of SiO2, SiC, Si3N4, TiN, TiO2, TiC or BN, so that the agglomeration phenomenon among magnetic particles is reduced.
4. The method for manufacturing a micro intelligent robot according to claim 1 or 2, wherein: the nano composite resin material is a photo-curable high-elasticity resin polymer.
5. The method for manufacturing a micro intelligent robot according to claim 4, wherein: the high-elasticity resin polymer is photosensitive polyurethane.
6. The method for manufacturing a micro intelligent robot according to claim 1 or 2, wherein: the magnetic particles are any one or mixture of Fe, Fe2O3, Fe3O4, Co or Ni.
7. The method for manufacturing a micro intelligent robot according to claim 1 or 2, wherein: the template substrate in step S1 is a silicon template with regular cavities.
8. The use method of the miniature magnetic gripper is characterized by comprising the following steps:
s1, connecting a microscopic intelligent robot with a driving device to obtain a micro magnetic gripper;
s2, moving the miniature magnetic gripper through a driving device to enable four microcolumns of the gripper to surround the microparticles;
s3, applying a vertical downward magnetic field to the micro gripper, wherein the micro column combination generates inward deformation due to different directions of magnetic chains formed after the magnetic particles in each micro column are oriented and arranged;
s4, keeping the magnetic field, and moving the driving device to enable the micro gripper to drive the micro particles to move to a target position;
s5, after the target position is reached, removing the vertically downward magnetic field, and recovering elastic deformation of the microcolumn due to the magnetic field application so as to release microparticles;
s6, the micro gripper is moved away through the driving device, and the micro particles reach the target position under the action of the micro gripper, so that the micro robot prepared by the preparation method of the micro intelligent robot in the claim 1 or 2 is included.
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