CN113578723A - Acoustic transducer and electronic device - Google Patents
Acoustic transducer and electronic device Download PDFInfo
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- CN113578723A CN113578723A CN202011638021.8A CN202011638021A CN113578723A CN 113578723 A CN113578723 A CN 113578723A CN 202011638021 A CN202011638021 A CN 202011638021A CN 113578723 A CN113578723 A CN 113578723A
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- 244000126211 Hericium coralloides Species 0.000 claims description 44
- 239000010410 layer Substances 0.000 claims description 13
- 239000011229 interlayer Substances 0.000 claims description 7
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 239000012528 membrane Substances 0.000 description 17
- 238000006073 displacement reaction Methods 0.000 description 9
- 239000003990 capacitor Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
- B06B1/0696—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a plurality of electrodes on both sides
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Abstract
The invention provides an acoustic transducer, which comprises a base, a fixed part, a moving part, a first electrode and a first electrode, wherein the base is provided with a cavity and comprises a first surface facing the cavity; the fixing piece extends from the first surface to the cavity and comprises a fixed end fixed on the first surface and a free end arranged opposite to the fixed end; the moving piece is fixed on the base, positioned above the cavity, at least partially covered on the cavity and comprises a second surface facing the cavity; the first electrode is secured to the free end and the second electrode is secured to the second surface, wherein the first electrode and the second electrode are laterally adjacent. The acoustic transducer provided by the invention has higher sensitivity, and the first electrode has stronger stability, so that the performance of the acoustic transducer is improved.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of sound-electricity conversion devices, in particular to an acoustic transducer and electronic equipment.
[ background of the invention ]
Micro-Electro-Mechanical-System (MEMS) based transducers include a series of sensors and actuators created using Micro-machining techniques. Generally, MEMS can be used for accelerometers, microphones, micro-motors, micro-pumps, micro-vibrators, pressure sensors, gyroscopes, humidity sensors, and the like. Many MEMS devices use capacitive sensing technology to transduce a physical signal into an electrical signal. In such applications, interface circuitry is used to convert the capacitance change in the sensor into a voltage signal. Among the prior art, cover the top of the cavity that the base formed with moving part at least part usually, the moving electrode is installed in the moving part, decides the electrode and installs in the base, but, because the limitation of design, the sensitivity that perhaps transmits the moving electrode when the moving part vibrates is low, or decides the unsettled setting of electrode, and mechanical noise easily arouses decides the electrode displacement, and these design limitations all influence the performance of acoustic transducer.
Therefore, there is a need for an acoustic transducer and an electronic product that can improve the performance of the product.
[ summary of the invention ]
An object of the present invention is to provide an acoustic transducer that increases the stability of a fixed electrode while increasing sensitivity.
It is a further object of the invention to provide an electronic device with improved performance and sensitivity of the acoustic transducer.
The technical scheme provided by one of the purposes of the invention is as follows: an acoustic transducer comprises a base, a fixed part, a moving part, a first electrode and a first electrode, wherein the base is provided with a cavity and comprises a first surface facing the cavity; the fixing piece extends from the first surface to the cavity and comprises a fixed end fixed on the first surface and a free end arranged opposite to the fixed end; the moving piece is fixed on the base, positioned above the cavity, at least partially covered on the cavity and comprises a second surface facing the cavity; the first electrode is secured to the free end and the second electrode is secured to the second surface, wherein the first electrode and the second electrode are laterally adjacent.
Further, the first electrode and the second electrode each extend in a direction perpendicular to the moving member.
Further, the first electrode includes a plurality of first comb teeth; the second electrode comprises a plurality of parallel teeth, each parallel tooth comprises two sub-comb teeth which are oppositely arranged in parallel, one first comb tooth is arranged between the two sub-comb teeth of one parallel tooth, and a gap is formed between the first comb tooth and the two sub-comb teeth; or,
the second electrode comprises a plurality of 'U' -shaped teeth, each 'U' -shaped tooth comprises two oppositely-arranged sub-comb teeth and a connecting comb tooth for connecting the two sub-comb teeth, one first comb tooth is arranged between the two sub-comb teeth of one 'U' -shaped tooth, and a gap is formed between the first comb tooth and the two sub-comb teeth.
Further, the free end is etched with a plurality of electrode grooves in a direction perpendicular to the moving member, the plurality of electrode grooves form the first electrode, the electrode grooves include a first groove portion, the second electrode includes a plurality of second comb teeth, and one of the second comb teeth is inserted into one of the first groove portions.
Further, every first slot part includes two first groove lateral walls and connects two the first groove diapire of first groove lateral wall, two first groove lateral wall sets up relatively, first groove bottom wall is located first groove lateral wall keeps away from the one end of moving member and with the moving member sets up relatively, the second broach with first groove bottom wall and two all be equipped with the clearance between the first groove lateral wall.
Furthermore, the first slot part also comprises a connecting wall extending along the direction perpendicular to the moving part, the connecting wall is connected to the bottom wall of the first slot and the two side walls of the first slot at the same time, the first slot parts are distributed in a semicircular or circular shape, and the circle center is located at one end of the first slot part, which is provided with the connecting wall.
Further, one ends of the first groove portions intersect to form an intersection, and the first groove portions are radially distributed from the intersection.
Furthermore, a recess is arranged between the side walls of the first grooves adjacent to the first groove part, and the recess extends from one side, close to the moving part, of the fixed part to the direction far away from the moving part.
Further, the mounting is still including connecting the stiff end with the connecting portion of free end, connecting portion with the stiff end is equipped with it is sunken.
Furthermore, the circle center is provided with a recess, and the recess extends from one side of the fixed part close to the moving part to the direction far away from the moving part.
Furthermore, the electrode slot further comprises a second slot part, the second slot part is arranged at one end, away from the circle center, of the first slot part and is intersected with the first slot part, the second electrode further comprises third comb teeth, the third comb teeth are connected to the second comb teeth, and the third comb teeth are inserted into the second slot part.
Further, the electrode slot further comprises a second slot part, the second slot part is arranged at one end, far away from the intersection point, of the first slot part and is intersected with the first slot part, the second electrode further comprises third comb teeth, the third comb teeth are connected to the second comb teeth, and the third comb teeth are inserted into the second slot part.
Further, the second slot part includes two second groove lateral walls and connects two the second groove diapire of second groove lateral wall, two the second groove lateral wall sets up relatively, the second groove bottom wall is located the second groove lateral wall is kept away from the one end of moving member and with the moving member sets up relatively, the third broach with the second groove bottom wall and two all be equipped with the clearance between the second groove lateral wall.
Furthermore, each first groove side wall is provided with an insulating layer, and the first groove side wall sequentially comprises a first conductive part, the insulating layer and a second conductive part from one end close to the moving part to one end far away from the moving part; the second comb teeth comprise a first tooth surface and a second tooth surface which are oppositely arranged and an interlayer positioned between the first tooth surface and the second tooth surface, the first tooth surface and the second tooth surface are respectively oppositely arranged with the side walls of the two first grooves of the first groove part, the first tooth surface and the second tooth surface are sequentially provided with an insulating area and a conducting area from one end close to the moving part to one end far away from the moving part, and the interlayer is a conducting layer; the first conductive portion partially faces the insulating region and partially faces the conductive region.
Furthermore, a vent hole penetrates through the moving piece.
The second purpose of the invention provides the following technical scheme: an electronic device comprising the acoustic transducer described above.
The invention has the beneficial effects that: the second electrode is fixed on the second surface of the moving part and is positioned in the center of the moving part, the fixing part extends into the cavity from the base, so that the first electrode fixed at the free end is transversely adjacent to the second electrode, and when the moving part vibrates under the action of external force such as sound pressure, the moving part drives the second electrode to reciprocate relative to the first electrode, so that the sensitivity of the sound transducer is improved; the first electrode is fixed on the fixing piece, so that the stability of fixing the first electrode is improved, and the influence of the displacement of the first electrode on the performance of the acoustic transducer caused by other factors such as mechanical noise is avoided. Therefore, the acoustic transducer provided by the invention has higher sensitivity, and the first electrode has stronger stability, thereby improving the performance of the acoustic transducer.
[ description of the drawings ]
Fig. 1 is a schematic top view of an acoustic transducer according to an embodiment of the present invention;
fig. 2 is a schematic bottom view of an acoustic transducer according to an embodiment of the present invention;
FIG. 3 is a schematic view of a first comb tooth and a "U" shaped tooth according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a first comb tooth and a parallel tooth according to an embodiment of the present invention;
FIG. 5 is a schematic view of the moving member moving away from the base along the line A-A in FIG. 2;
FIG. 6 is a schematic view of the moving member moving closer to the base along the line A-A in FIG. 2;
fig. 7 is a schematic top view of an acoustic transducer according to a second embodiment of the present invention with a moving member removed;
FIG. 8 is an enlarged view of a portion of FIG. 7 at B;
FIG. 9 is a cross-sectional view taken along line C-C of FIG. 8;
fig. 10, fig. 11, fig. 13, fig. 15, fig. 17 and fig. 20 are schematic structural views of a modified embodiment of fig. 8;
FIG. 12 is a cross-sectional view taken along line D-D of FIG. 11;
FIG. 14 is a cross-sectional view taken along line E-E of FIG. 13;
FIG. 16 is a cross-sectional view taken along line F-F in FIG. 15;
FIG. 18 is a schematic structural view of the second slot portion and the third comb teeth of the seventh embodiment of the present invention;
fig. 19 is a schematic structural view of the second slot portion and the third comb teeth according to the eighth embodiment of the present invention;
fig. 21 is a cross-sectional view taken along line G-G in fig. 20.
In the figure: 100. an acoustic transducer; 1. a base; 11. a cavity; 12. a first surface; 2. a fixing member; 21. a fixed end; 22. a free end; 23. a connecting portion; 3. a moving member; 31. a second surface; 32. a vent hole; 4. a first electrode; 41. a first comb tooth; 42. a first groove portion; 421. a first slot sidewall; 4211. an insulating layer; 4212. a first conductive portion; 4213. a second conductive portion; 422. a first slot bottom wall; 423. a connecting wall; 43. a second groove portion; 431. a second trench sidewall; 5. a second electrode; 50. parallel teeth; 51. a "U" shaped tooth; 511. a sub comb tooth; 512. connecting comb teeth; 52. a second comb tooth; 521. a first tooth surface; 522. a second tooth surface; 523. an interlayer; 524. an insulating region; 525. a conductive region; 53. a third comb tooth; 6. a support member; 7. the center of a circle; 8. a point of intersection; 9. and (4) sinking.
[ detailed description ] embodiments
The present invention will be described in detail with reference to fig. 1 to 21.
Example one
Referring to fig. 1 to 6, an embodiment of the invention provides an acoustic transducer 100, including a base 1, a fixed component 2, a moving component 3, a first electrode 4 and a second electrode 5; the base 1 is provided with a cavity 11 comprising a first surface 12 arranged towards the cavity 11; the fixing member 2 extends from the first surface 12 toward the cavity 11, and includes a fixed end 21 fixed to the first surface 12 and a free end 22 opposite to the fixed end 21; the moving part 3 is fixed on the base 1, is positioned above the cavity 11, at least partially covers the cavity 11, and comprises a second surface 31 facing the cavity 11; a first electrode 4 is secured to the free end 22 and a second electrode 5 is secured to the second surface 31, the first electrode 4 and the second electrode 5 being laterally adjacent. In order to generate capacitance between the fixed member 2 and the moving member 3, the first electrode 4 is insulated from the moving member 3, and the second electrode 5 is insulated from the fixed member 2.
In the present embodiment, the moving member 3 is a flexible membrane, which may be directly anchored to the base 1, or may be anchored to a support 6 disposed on the base 1, and the support 6 may be a standard micro-machined membrane or a membrane structure formed by a plurality of thin membranes and anchored to the base 1. It is understood that the moving member 3 is not limited to the flexible film, as long as it vibrates when it is subjected to external force such as sound pressure. The first electrode 4 is fixed at the free end 22 of the fixed member 2, and is fixed, and is a fixed electrode, and the second electrode 5 is fixed at the second surface 31 of the moving member 3, and is displaced along with the vibration of the moving member 3, and is a moving electrode.
Preferably, the first electrode 4 and the second electrode 5 each extend in a direction perpendicular to the moving member 3.
Referring to fig. 2 and 3, the first electrode 4 includes a plurality of first comb teeth 41, the second electrode 5 includes a plurality of "U" -shaped teeth 51, the "U" -shaped teeth 51 include two sub-comb teeth 511 disposed opposite to each other and a connecting comb tooth 512 connecting the two sub-comb teeth 511, and one first comb tooth 41 is disposed between the two sub-comb teeth 511 of one "U" -shaped tooth 51 with a gap between the two sub-comb teeth 511. In the present embodiment, the first comb tooth 41 is equally spaced from the two sub-comb teeth 511. Both the "U" -shaped teeth 51 and the first comb teeth 41 extend in a direction perpendicular to the moving member 3, so that the sub-comb teeth 511 and the first comb teeth 41 have a sufficiently large surface area to be opposed to each other. It will be appreciated that the first electrode 4 may comprise a plurality of "U" shaped teeth 51 and the second electrode 5 may comprise a plurality of teeth. Referring to FIG. 4, in another embodiment, the second electrode 5 includes a plurality of parallel teeth 50, the parallel teeth 50 include two sub-comb teeth 511 disposed in parallel, and a first comb tooth 41 is disposed between the two sub-comb teeth 511 of one of the parallel teeth 50 and spaced apart from the two sub-comb teeth 511. It will be appreciated that the first electrode 4 may comprise a plurality of parallel teeth 50 and the second electrode 5 may comprise a plurality of teeth.
Since the value of the capacitor is proportional to the area directly facing the two plates of the capacitor and inversely proportional to the distance between the two plates of the capacitor, i.e. C ═ k ∈0εrS/d, k is a constant, ε0Is a constant number epsilonrIs a constant. When the acoustic transducer is fabricated, epsilon0εrS is the facing area between the two plates of the capacitor, and d is the distance between the two plates, so that the first comb tooth 41 of the first electrode 4 of the sound transducer 100 provided by the present invention is inserted into the "U" shaped tooth 51 of the second electrode 5, and the first comb tooth 41 and the "U" shaped tooth 51 are laterally arranged adjacently, so that after the first electrode 4 and the second electrode 5 are energized, a capacitor is formed between the first electrode 4 and the second electrode 5, and the distance d between the first electrode 4 and the second electrode 5 is unchanged, and the area depends on the facing area between the first electrode 4 and the second electrode 5. In the embodiment of the present invention, the flexible film vibrates under the external force such as sound pressure, that is, the size of the facing area between the first electrode 4 and the second electrode 5 is changed, so that the capacitance value is changed to generate a signal, and then the sound transducer 100 converts the sound signal into an electrical signal.
Fig. 5 and 6 show that the flexible membrane vibrates when subjected to external forces such as sound pressure, and the like, and drives the "U" -shaped teeth 51 to displace relative to the first comb teeth 41, wherein the arrow above the figure indicates the moving direction of the flexible membrane. The U-shaped teeth 51 are displaced relative to the first comb teeth 41, so that the facing area between the sub-comb teeth 511 and the first comb teeth 41 is changed, that is, the overlapping area of capacitive coupling is changed, and the acoustoelectric conversion is realized. Wherein in fig. 5 the flexible membrane is anchored directly to the base 1 and in fig. 6 the flexible membrane is anchored to a support 6 fixed to the base 1.
The second electrode 5 is fixed on the second surface 31 of the moving part 3 and is positioned at the center of the moving part 3, the fixed part 2 extends from the base 1 to the inside of the cavity 11, so that the first electrode 4 fixed at the free end 22 is transversely adjacent to the second electrode 5, and when the moving part 3 vibrates under the action of external force such as sound pressure, the second electrode 5 is driven to reciprocate relative to the first electrode 4, so that the sensitivity of the sound transducer 100 is improved; the first electrode 4 is fixed on the fixing member 2, so that the stability of fixing the first electrode 4 is improved, and the influence of the displacement of the first electrode 4 on the performance of the acoustic transducer 100 caused by other factors such as mechanical noise is avoided. Therefore, the acoustic transducer 100 provided by the embodiment of the invention has higher sensitivity, and the fixed electrode has stronger stability, so that the performance of the acoustic transducer 100 is improved.
Referring to fig. 1 and 2, a vent hole 32 is formed through the moving member 3. By providing the vent hole 32, the static pressure on both sides of the moving member 3 can be equalized when the moving member 3 vibrates. The ventilation hole 32 may be provided at any position of the moving member 3, and it is needless to say that the ventilation hole 32 may be provided in the base 1. The arrangement position of the vent hole 32 is not limited to that in the present embodiment.
Example two
The difference between the first embodiment and the second embodiment is the structure of the first electrode 4 and the second electrode 5, and only the difference is described in detail herein, and the description of the other contents is omitted.
Referring to fig. 7 to 9, the free end 22 extends from a side close to the moving member 3 to a direction away from the moving member 3 to etch a plurality of electrode slots, the plurality of electrode slots form the first electrode 4, the electrode slots include a first slot portion 42, the second electrode 5 includes a plurality of second comb teeth 52, and one second comb tooth 52 is inserted into one first slot portion 42.
Specifically, each first groove portion 42 includes two first groove side walls 421 and a first groove bottom wall 422 connecting the two first groove side walls 421, the two first groove side walls 421 are disposed oppositely, the first groove bottom wall 422 is located at one end of the first groove side wall 421 away from the moving member 3 and is disposed opposite to the moving member 3, and gaps are respectively disposed between the second comb teeth 52 and the first groove bottom wall 422 and between the two first groove side walls 421. Since the distance between the end of the second comb tooth 52 remote from the moving member 3 and the first slot bottom wall 422 restricts the displacement of the second comb tooth 52 in the direction toward the fixed member 2, it is necessary to provide a sufficiently large gap between the end of the second comb tooth 52 remote from the moving member 3 and the first slot bottom wall 422 according to actual conditions. The magnitude of displacement of the second comb teeth 52 toward the fixed member 2 is controlled by an external force such as sound pressure applied to the moving member 3. In this embodiment, the second comb teeth 52 are equally spaced from the two first channel sidewalls 421, and in other embodiments, the second comb teeth 52 may be unequally spaced from the two first channel sidewalls 421.
Preferably, the first groove portion 42 further includes a connecting wall 423 extending in a direction perpendicular to the moving member 3, the connecting wall 423 is connected to the first groove bottom wall 422 and the two first groove side walls 421, the plurality of first groove portions 42 are distributed in a semicircular or circular shape, and the center 7 is located at an end of the first groove portion 42 where the connecting wall 423 is located. Referring to fig. 8, the plurality of first groove portions 42 are distributed in a semicircular shape, and in other embodiments, the plurality of first groove portions 42 may be distributed in a circular shape, or may be distributed in any shape such as a triangle, a quadrangle, and the like, and are not limited to the shapes provided in the embodiment and the drawings.
EXAMPLE III
The difference between this embodiment and the second embodiment is the structure and the arrangement shape of the first groove 42, and only the difference will be described in detail herein, and the other contents will not be described again.
Referring to fig. 10, in the present embodiment, the first groove portion 42 does not include the connecting wall 423, one ends of the plurality of first groove portions 42 intersect to form an intersection point 8, and the plurality of first groove portions 42 are radially distributed from the intersection point 8, that is, the plurality of first groove portions 42 are communicated with each other. It is understood that the plurality of first grooves 42 may be arranged to intersect with each other.
Example four
The difference between this embodiment and the second and third embodiments is that a recess 9 is disposed between the first groove sidewalls 421 of the adjacent first groove portions 42, and only the difference is described in detail herein, and further description is omitted.
Referring to fig. 11 to 16, a recess 9 is disposed between the first groove sidewalls 421 of the adjacent first groove portions 42, and the recess 9 extends from the side of the fixed element 2 close to the moving element 3 toward the direction away from the moving element 3. By providing the recess 9, the gap between the flexible membrane and the fixed member 2 is increased to reduce the generation of membrane damping when the flexible membrane moves towards the fixed member 2, and improve the performance of the acoustic transducer 100.
EXAMPLE five
The difference between this embodiment and the fourth embodiment is the arrangement position of the recess 9, and only the difference is described in detail herein, and the other contents are not described again.
Preferably, the fixing member 2 further comprises a connecting portion 23 connecting the fixed end 21 and the free end 22, the connecting portion 23 and the fixed end 21 being provided with a recess 9. By providing the recess 9, the gap between the flexible membrane and the fixed member 2 is increased to reduce the generation of membrane damping when the flexible membrane moves towards the fixed member 2, and improve the performance of the acoustic transducer 100. In other embodiments, the recess 9 may be provided only at the connection portion 23, the recess 9 may be provided only at the fixed end 21, or both the recess 9 may be provided between the first groove sidewalls 421 of the adjacent first groove portions 42 and the recess 9 may be provided at both the connection portion 23 and the fixed end 21. It is to be understood that the arrangement position of the recess 9 is not limited by the embodiment and the drawings.
EXAMPLE six
The difference between this embodiment and the second embodiment is that the fixing member 2 is provided with a recess 9, and only the difference is described in detail herein, and the description of the other contents is omitted.
Referring to fig. 17, the center 7, the space between the first groove sidewalls 421 of the adjacent first groove portions 42, the connecting portion 23 and the fixed end 21 are all provided with a recess 9. By providing the recess 9, the gap between the flexible membrane and the fixed member 2 is increased to reduce the generation of membrane damping when the flexible membrane moves towards the fixed member 2, and improve the performance of the acoustic transducer 100. In other embodiments, the recess 9 may be provided only at the center 7. It is to be understood that the arrangement position of the recess 9 is not limited by the embodiment and the drawings.
EXAMPLE seven
The difference between this embodiment and the second embodiment is that the electrode tank further includes a second tank portion 43, and the second electrode 5 further includes a third comb 53, and only the difference is described in detail herein, and the details of the other contents are not repeated.
Preferably, the electrode slot further comprises a second slot portion 43, the second slot portion 43 is disposed at one end of the first slot portion 42 away from the center 7 and intersects with the first slot portion 42, the second electrode 5 further comprises a third comb tooth 53, the third comb tooth 53 is connected to the second comb tooth 52, and the third comb tooth 53 is inserted into the second slot portion 43. By providing the second slot portion 43 and the third comb teeth 53 inserted into the second slot portion 43, the facing area of the first electrode 4 and the second electrode 5 is increased, thereby increasing the overlapping area of the capacitive coupling and improving the sensitivity of the acoustic transducer 100.
Referring to fig. 18, the second slot portion 43 includes two second slot sidewalls 431 and a second slot bottom wall (not shown in the figure) connecting the two second slot sidewalls 431, the two second slot sidewalls 431 are disposed oppositely, the second slot bottom wall is disposed at an end of the second slot sidewalls 431 far away from the moving member 3 and is disposed opposite to the moving member 3, and gaps are respectively disposed between the third comb teeth 53 and the second slot bottom wall as well as between the two second slot sidewalls 431.
The distance between the end of the third comb teeth 53 far from the moving part 3 and the bottom wall of the second groove limits the displacement of the third comb teeth 53 towards the fixed part 2, so that a sufficiently large gap needs to be arranged between the end of the third comb teeth 53 far from the moving part 3 and the bottom wall of the second groove according to actual conditions. The magnitude of displacement of the third comb teeth 53 toward the fixed member 2 is controlled by an external force such as sound pressure applied to the moving member 3. In this embodiment, the third comb teeth 53 are equally spaced from the two second trough sidewalls 431, and in other embodiments, the third comb teeth 53 may be unequally spaced from the two second trough sidewalls 431. In addition, the groove shape of the second groove portion 43 is not limited by the drawings.
Example eight
The difference between this embodiment and the third embodiment is that the electrode tank further includes a second tank portion 43, and the second electrode 5 further includes a third comb 53, and only the difference is described in detail herein, and the details of the other matters are not repeated.
Preferably, the electrode slot further includes a second slot portion 43, the second slot portion 43 is disposed at an end of the first slot portion 42 away from the intersection point 8 and intersects with the first slot portion 42, the second electrode 5 further includes a third comb tooth 53, the third comb tooth 53 is connected to the second comb tooth 52, and the third comb tooth 53 is inserted into the second slot portion 43. By providing the second slot portion 43 and the third comb teeth 53 inserted into the second slot portion 43, the facing area of the first electrode 4 and the second electrode 5 is increased, thereby increasing the overlapping area of the capacitive coupling and improving the sensitivity of the acoustic transducer 100.
Referring to fig. 19, the second slot portion 43 includes two second slot sidewalls 431 and a second slot bottom wall connecting the two second slot sidewalls 431, the two second slot sidewalls 431 are disposed opposite to each other, the second slot bottom wall is located at an end of the second slot sidewall 431 away from the moving member 3 and is disposed opposite to the moving member 3, and gaps are disposed between the third comb teeth 53 and the second slot sidewalls as well as between the two second slot sidewalls 431.
The distance between the end of the third comb teeth 53 far from the moving part 3 and the bottom wall of the second groove limits the displacement of the third comb teeth 53 towards the fixed part 2, so that a sufficiently large gap needs to be arranged between the end of the third comb teeth 53 far from the moving part 3 and the bottom wall of the second groove according to actual conditions. The magnitude of displacement of the third comb teeth 53 toward the fixed member 2 is controlled by an external force such as sound pressure applied to the moving member 3. In this embodiment, the third comb teeth 53 are equally spaced from the two second trough sidewalls 431, and in other embodiments, the third comb teeth 53 may be unequally spaced from the two second trough sidewalls 431. In addition, the groove shape of the second groove portion 43 is not limited by the drawings.
Example nine
The difference between this embodiment and the fourth embodiment is that the first electrode 4 and the second electrode 5 are both provided with an insulating region, and only the differences will be described in detail herein, and the details of the other contents are not repeated.
Referring to fig. 20 and 21, each first groove sidewall 421 has an insulating layer 4211, and the first groove sidewall 421 sequentially includes a first conductive portion 4212, an insulating layer 4211, and a second conductive portion 4213 from the end close to the moving member 3 to the end far from the moving member 3; the second comb teeth 52 include a first tooth surface 521 and a second tooth surface 522 which are oppositely arranged, and an interlayer 523 which is located between the first tooth surface 521 and the second tooth surface 522, the first tooth surface 521 and the second tooth surface 522 are respectively oppositely arranged with two first slot sidewalls 421 of the first slot portion 42, the first tooth surface 521 and the second tooth surface 522 are sequentially provided with an insulating region 524 and a conductive region 525 from one end close to the moving member 3 to one end far away from the moving member 3, and the interlayer 523 is a conductive layer; the first conductive portion 4212 partially faces the insulating region 524 and partially faces the conductive region 525. By this arrangement, the sensing area of the second electrode 5 can be reduced and two different sensing signals can be obtained, for example, when the second electrode 5 moves towards the direction close to the moving element 3, the facing area of the second comb teeth 52 and the second conductive part 4213 is reduced, and the facing area of the second comb teeth 52 and the first conductive part 4212 is increased, so that differential sensing can be generated and the performance of the acoustic transducer 100 can be improved.
It is to be understood that, in any one of the second embodiment, the third embodiment, and the fifth embodiment to the eighth embodiment, the first groove side wall may be provided with an insulating layer, and accordingly, the first tooth surface and the second tooth surface of the second comb tooth include an insulating region and a conductive region; similarly, in any one of the seventh embodiment and the eighth embodiment, the second groove side wall may be provided with an insulating layer, and accordingly, the tooth surface of the third comb tooth may include an insulating region and a conductive region; in the first embodiment, the first comb tooth may also be provided with an insulating layer, and accordingly, the side of the sub-comb tooth opposite to the first comb tooth may include an insulating region and a conductive region. It should be noted that this arrangement is not limited to the case shown in the embodiment of the present invention and the drawings.
Example ten
The present embodiment provides an electronic device including the acoustic transducer 100 in any one of the first to ninth embodiments.
The above description is only an embodiment of the present invention, and it should be noted that, for those skilled in the art, modifications can be made without departing from the inventive concept of the present invention, but these are all within the scope of the present invention.
Claims (16)
1. An acoustic transducer, comprising:
a base having a cavity including a first surface disposed toward the cavity;
the fixing piece extends from the first surface to the cavity and comprises a fixed end fixed on the first surface and a free end arranged opposite to the fixed end;
the moving piece is fixed on the base, positioned above the cavity, at least partially covered on the cavity and comprises a second surface facing the cavity;
a first electrode fixed to the free end;
a second electrode fixed to the second surface;
wherein the first electrode and the second electrode are laterally adjacent.
2. The acoustic transducer according to claim 1, wherein the first electrode and the second electrode each extend in a direction perpendicular to the moving member.
3. The acoustic transducer of claim 2, wherein the first electrode comprises a plurality of first comb teeth; the second electrode comprises a plurality of parallel teeth, each parallel tooth comprises two sub-comb teeth which are oppositely arranged in parallel, one first comb tooth is arranged between the two sub-comb teeth of one parallel tooth, and a gap is formed between the first comb tooth and the two sub-comb teeth; or,
the second electrode comprises a plurality of 'U' -shaped teeth, each 'U' -shaped tooth comprises two oppositely-arranged sub-comb teeth and a connecting comb tooth for connecting the two sub-comb teeth, one first comb tooth is arranged between the two sub-comb teeth of one 'U' -shaped tooth, and a gap is formed between the first comb tooth and the two sub-comb teeth.
4. The acoustic transducer according to claim 2, wherein the free end is etched with a plurality of electrode grooves in a direction perpendicular to the moving member, the plurality of electrode grooves forming the first electrode, the electrode grooves including a first groove portion, the second electrode including a plurality of second comb teeth, one of the second comb teeth being inserted into one of the first groove portions.
5. The acoustic transducer according to claim 4, wherein each of the first slot portions comprises two first slot side walls and a first slot bottom wall connecting the two first slot side walls, the two first slot side walls being disposed opposite to each other, the first slot bottom wall being located at an end of the first slot side wall remote from the moving member and disposed opposite to the moving member, and gaps being provided between the second comb teeth and the first slot bottom wall and between the second comb teeth and the two first slot side walls.
6. The acoustic transducer according to claim 5, wherein the first slot portion further comprises a connecting wall extending in a direction perpendicular to the moving member, the connecting wall being connected to both the first slot bottom wall and the two first slot side walls, and a plurality of the first slot portions are arranged in a semicircular or circular shape with a center located at an end of the first slot portion where the connecting wall is provided.
7. The acoustic transducer of claim 5, wherein one end of the plurality of first slot segments intersect to form an intersection point, and wherein the plurality of first slot segments radiate from the intersection point.
8. The acoustic transducer according to claim 5, wherein a recess is provided between the first slot side walls of adjacent first slot portions, the recess extending from a side of the fixed member close to the moving member toward a direction away from the moving member.
9. The acoustic transducer of claim 8, wherein the anchor further comprises a connecting portion connecting the fixed end and the free end, the connecting portion and the fixed end being provided with the recess.
10. The acoustic transducer according to claim 6, wherein a recess is provided at the center of the circle, and the recess extends from a side of the stationary member close to the moving member to a direction away from the moving member.
11. The acoustic transducer according to claim 6, wherein the electrode slot further comprises a second slot portion disposed at an end of the first slot portion away from the center of the circle and intersecting the first slot portion, and the second electrode further comprises a third comb tooth connected to the second comb tooth, the third comb tooth being inserted into the second slot portion.
12. The acoustic transducer according to claim 7, wherein the electrode tank further comprises a second tank portion provided at an end of the first tank portion remote from the intersection and intersecting with the first tank portion, and the second electrode further comprises a third comb tooth connected to the second comb tooth, the third comb tooth being inserted into the second tank portion.
13. The acoustic transducer of claim 11 or 12, wherein the second slot portion comprises two second slot sidewalls and a second slot bottom wall connecting the two second slot sidewalls, the two second slot sidewalls being disposed opposite to each other, the second slot bottom wall being located at an end of the second slot sidewalls away from the moving member and disposed opposite to the moving member, and gaps being provided between the third comb teeth and the second slot bottom wall and between the two second slot sidewalls.
14. The acoustic transducer according to claim 5, wherein each of the first groove sidewalls is provided with an insulating layer, and the first groove sidewall comprises a first conductive portion, an insulating layer, and a second conductive portion in sequence from an end close to the moving member to an end far away from the moving member;
the second comb teeth comprise a first tooth surface and a second tooth surface which are oppositely arranged and an interlayer positioned between the first tooth surface and the second tooth surface, the first tooth surface and the second tooth surface are respectively oppositely arranged with the side walls of the two first grooves of the first groove part, the first tooth surface and the second tooth surface are sequentially provided with an insulating area and a conducting area from one end close to the moving part to one end far away from the moving part, and the interlayer is a conducting layer;
the first conductive portion partially faces the insulating region and partially faces the conductive region.
15. The acoustic transducer according to claim 1, wherein a vent hole is provided through the moving member.
16. An electronic device comprising the acoustic transducer of claim 1.
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| CN202011638021.8A CN113578723B (en) | 2020-12-31 | 2020-12-31 | Acoustic transducer and electronic device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011638021.8A CN113578723B (en) | 2020-12-31 | 2020-12-31 | Acoustic transducer and electronic device |
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| CN113578723B CN113578723B (en) | 2022-04-29 |
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| US6196059B1 (en) * | 1997-08-11 | 2001-03-06 | Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid |
| US20090161490A1 (en) * | 2007-12-20 | 2009-06-25 | Vectron International Gmbh & Co. Kg | Converters, resonators and filters for acoustic surface |
| CN107138380A (en) * | 2017-06-20 | 2017-09-08 | 南京邮电大学 | Multidirectional piezoelectric supersonic generator and preparation method thereof |
| CN110362208A (en) * | 2019-07-17 | 2019-10-22 | 京东方科技集团股份有限公司 | Deformation unit, display panel and driving circuit for touch feedback |
| CN110560350A (en) * | 2019-08-16 | 2019-12-13 | 武汉大学 | Receiving ultrasonic transducer based on Helmholtz resonant cavity |
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2020
- 2020-12-31 CN CN202011638021.8A patent/CN113578723B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6196059B1 (en) * | 1997-08-11 | 2001-03-06 | Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid |
| US20090161490A1 (en) * | 2007-12-20 | 2009-06-25 | Vectron International Gmbh & Co. Kg | Converters, resonators and filters for acoustic surface |
| CN107138380A (en) * | 2017-06-20 | 2017-09-08 | 南京邮电大学 | Multidirectional piezoelectric supersonic generator and preparation method thereof |
| CN110362208A (en) * | 2019-07-17 | 2019-10-22 | 京东方科技集团股份有限公司 | Deformation unit, display panel and driving circuit for touch feedback |
| CN110560350A (en) * | 2019-08-16 | 2019-12-13 | 武汉大学 | Receiving ultrasonic transducer based on Helmholtz resonant cavity |
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