CN113572008B - Light source and parallel light source and serial light source thereof - Google Patents

Light source and parallel light source and serial light source thereof Download PDF

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CN113572008B
CN113572008B CN202110841111.5A CN202110841111A CN113572008B CN 113572008 B CN113572008 B CN 113572008B CN 202110841111 A CN202110841111 A CN 202110841111A CN 113572008 B CN113572008 B CN 113572008B
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light source
medium
excited state
excitation device
wavelength
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CN113572008A (en
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洪道彪
乔山
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/20—Liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/0955—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/0955—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles
    • H01S3/0959—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles by an electron beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/227—Metal vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383—Parallel arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps

Abstract

The invention provides a light source, a parallel light source and a serial light source thereof, wherein the light source comprises a medium, a first excitation device and a second excitation device, wherein the first excitation device is used for carrying out first pumping so as to pump electrons of helium-like atoms in the medium from a ground state to a first excited state, and the second excitation device is used for carrying out second pumping so as to pump electrons of the helium-like atoms in the medium from the first excited state to the ground state. The invention can generate pulse coherent light with the wavelength below 10 nm through two pumping processes, so that the structure of the short wavelength light source is simple and compact, the realization is easy, and the cost can be reduced. Furthermore, by adjusting the kind of the second excitation means in addition to the pulsed coherent light source, the present invention can also realize the manufacture of a continuous coherent light source, a pulsed incoherent light source, and a continuous incoherent light source.

Description

Light source and parallel light source and serial light source thereof
Technical Field
The invention belongs to the field of optics, and relates to a light source, a parallel light source and a serial light source thereof.
Background
Since the discovery of fires, humans have had a history of utilizing and developing light sources that have also shown technological advances from fires to incandescent bulbs, incandescent bulbs to fluorescent bulbs, and fluorescent bulbs to today's LEDs. With scientific exploration, the wavelength of the electromagnetic wave corresponding to visible light is 400-. The light source may be divided into coherent light and incoherent light depending on whether the light source is coherent or not, and a typical coherent light source is a laser. Since the first ruby laser came into existence, scientists' research into lasers never stopped. After the twenty-first century, due to the development of the microelectronics industry, there is an urgent need in the industry for short wavelength lithography machines. Because the laser has good coherence, large photon density and good collimationIn particular, scientists desire to be able to obtain short wavelength lasers for use in photolithography. At present, with the development of laser technology, the wavelength of a high monochromaticity coherent light source can reach a deep ultraviolet band. The deep ultraviolet coherent light source can be used for micro-nano lithography, photoelectron spectroscopy with ultrahigh energy resolution, photoelectron emission microscope and the like. Because the photon energy of the deep ultraviolet light is more than 3eV, most of the light in the wave band can be absorbed when being reflected on the end face, and the light amplification can not be generated under the condition of insufficient reflectivity, so the deep ultraviolet laser can not be generated by utilizing the traditional laser generation mode, namely, the light amplification is carried out through the reflection of a resonant cavity, and most of the prior art adopts the laser with low photon energy to be driven into a nonlinear medium to generate the high photon energy laser with frequency multiplication. The power of the frequency doubling light generated by utilizing the nonlinear effect is influenced by factors such as medium efficiency, peak power of fundamental frequency laser, transmission characteristics of a nonlinear medium in a frequency doubling light wave band and the like, so that the deep ultraviolet laser is often complex in structure, large in size and limited in wavelength, and the wavelength of the current mature monochromatic deep ultraviolet laser can be as short as 114 nm. If higher photon energy is expected, the method can only be realized by a method of ionizing gas by high-peak power laser to generate higher harmonics, but the method generates complex-color laser, and also needs a monochromator for monochromatization, and the method requires that the seed laser pulse is very narrow, namely the peak power in unit time is very high, the optical path is generally more complex than a frequency doubling optical path, and the efficiency is lower. On the other hand, the technology of exciting medium to emit light by using electromagnetic field is mature at present, such as mercury lamp, sodium lamp, helium lamp, and the commonly used helium lamp as extreme ultraviolet light source, that is, electrons in helium atoms are excited from 1s by using electromagnetic field 2 Ground state pumping to 1s2p ( 1 P 1 ) State, electron again from 1s2p ( 1 P 1 ) Transition to 1s 2 The ground state radiates 21.2eV photons, which converts electrical energy into light energy. However, in the process, the radiation of photons is random, disordered in phase, free of coherence and incapable of forming laser.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a light source and its parallel and serial light sources, which are used to solve the problems of low photon generation efficiency, large space volume, high cost, and low energy of generated photons of the existing short wavelength light source.
To achieve the above and other related objects, the present invention provides a light source, comprising:
a medium including at least one of a helium-like atom, a substance ionizable to generate a helium-like atom, and a substance having an electronic structure of a helium-like atom;
first excitation means for pumping electrons in said medium from a ground state to a first excited state;
and the second excitation device is used for adopting the light with the first wavelength to excite the electrons in the first excited state in the medium to the ground state so as to emit the light with the second wavelength, and the second wavelength is smaller than the first wavelength.
Optionally, under the action of the light with the first wavelength, the electron in the first excited state in the medium is excited to a second excited state with an energy level different from that of the first excited state, and then is excited from the second excited state to the ground state; or under the action of the light with the first wavelength, the electrons in the first excited state in the medium are directly excited from the first excited state to the ground state.
Optionally, the energy level of the first excited state is between the ground state and the second excited state, or the energy level of the first excited state is higher than the energy level of the second excited state.
Optionally, the light source is an extreme ultraviolet light source or an X-ray light source.
Optionally, the light source is a continuous incoherent light source, a continuous coherent light source, a pulsed incoherent light source, or a pulsed coherent light source.
Optionally, the first excitation device includes at least one of an electromagnetic field excitation device and an electron gun excitation device.
Optionally, the electromagnetic field excitation device comprises at least one of an inductive coupling device, an electrostatic magnetic field excitation device, a continuous alternating electromagnetic field excitation device, a pulsed electromagnetic field excitation device, a microwave radio frequency excitation device and a synchronous radiation excitation device.
Optionally, the second excitation means comprises at least one of a continuous incoherent light source, a continuous coherent light source, a pulsed incoherent light source, and a pulsed coherent light source.
Optionally, the helium-like atoms include Li + 、Be 2+ 、B 3+ 、C 4+ 、N 5+ 、O 6+ 、F 7+ 、Ne 8+ 、Na 9+ 、Mg 10+ 、Al 11+ 、Si 12+ 、P 13+ And S 14+ One or more of ions.
Optionally, the ionizable helium atom-like substance comprises elemental Li, LiF, LiCl, Li 2 O、LiOH、Li 3 N、LiH、LiD、Li 2 CO 3 、Li 2 C 2 Elemental Be, Be (OH) 2 、BeO、Be 3 N 2 、BeF 2 、BeCl 2 、BeSO 4 B simple substance, Na 2 B 4 O 7 ·10H 2 O、CO 2 Elemental C, elemental N 2 、BN、O 2 Na simple substance, NaF, NaCl and Na 2 CO 3 、Na 2 O, Mg simple substance, MgO, Al simple substance, Al (OH) 3 、Al 2 O 3 、AlCl 3 、Al 2 (SO 4 ) 3 Elemental Si, SiO 2 SiC, elemental P, P 2 O 5 S simple substance, H 2 S、CuSO 4 And FeSO 4 One or more of (a).
Optionally, the substance having a helium-like atomic electronic structure comprises H 2 、LiH 2+ 、LiF、LiCl、Li 2 O、LiOH、Li 3 N、LiH、LiD、Li 2 CO 3 、Li 2 C 2 、BeO、Be 3 N 2 、BeF 2 、BeCl 2 、BeSO 4 、Na 2 B 4 O 7 ·10H 2 O、CO 2 、BN、NaF、NaCl、Na 2 CO 3 、Na 2 O、MgO、Al(OH) 3 、Al 2 O 3 、AlCl 3 、Al 2 (SO 4 ) 3 、SiO 2 、SiC、P 2 O 5 、H 2 S and FeSO 4 One or more of (a).
Optionally, the medium is produced by a physical and/or chemical reaction within the first stimulation device; or the medium is generated outside the first excitation device through physical reaction and/or chemical reaction and then is introduced into the first excitation device.
Optionally, the form of the medium comprises one or more of a gas, a liquid, a solid, and a plasma.
Optionally, the medium further comprises an auxiliary substance comprising at least one auxiliary atom and/or at least one auxiliary ion.
Optionally, the auxiliary substance comprises one or more of hydrogen, krypton, xenon, oxygen, carbon dioxide, nitrogen, neon, argon and helium.
Optionally, the medium is stored enclosed in the first excitation means.
Optionally, the first stimulation device comprises at least one inlet channel and at least one outlet channel, through which the medium flows in the first stimulation device.
Optionally, the medium comprises Li + Ions, the first excited state energy is 60.923 eV; the medium comprises Be 2+ Ions, the first excited state energy is 121.651 eV; the medium comprises B 3+ Ions, the first excited state energy is 202.802 eV; the medium comprises C 4+ An ionic system, said first excited state energy being 304.384 eV; the medium comprises N 5+ Ions, the first excited state energy is 426.416 eV; the medium comprises O 6+ Ions, the first excited state energy is 568.887 eV; said medium comprising F 7+ Ions, the first excited state energy is 731.891 eV; the medium includes Ne 8+ An ionic system, the first excited state energy being 915.336 eV; the medium comprises Na 9+ Ion(s)The first excited state has energy of 1119.332 eV; the medium comprises Mg 10+ Ions, the first excited state energy being 1343.837 eV.
Optionally, the first wavelength is in a range of 90nm to 2500 nm.
Optionally, the first wavelength is selected from at least one of 958.5nm, 614.5nm, 448.9nm, 352.8nm, 289.8nm, 245.0nm, 213.7nm, 185.6nm, 164.7nm, 148.4nm, 147.4nm, 142.2nm, 132.8nm, 120.1nm, 109.0nm, and 99.2 nm.
Optionally, the second wavelength is in a range of 0.1nm-120 nm.
Optionally, the second wavelength is selected from at least one of 0.504nm, 0.576nm, 0665nm, 0.776nm, 0.917nm, 1.100nm, 1.345nm, 1.694nm, 1.782nm, 2.160nm, 2.879nm, 4.027nm, 6.032nm, 10.027nm, 17.804nm, 17.898nm, and 19.931 nm.
Optionally, the light source comprises a plurality of the second excitation devices, and different ones of the second excitation devices emit light of different ones of the first wavelengths to obtain light of different ones of the second wavelengths.
Optionally, a plurality of said second actuation means are arranged to be simultaneously or partially activated for the same period of time.
Optionally, a plurality of the second excitation devices are configured to be turned on according to a preset time sequence and a preset sequence.
The invention also provides a parallel light source, which comprises N +1 light sources as described above, wherein the first N light sources are connected in parallel as the first excitation device of the N +1 th light source, and N is an integer greater than 1.
The invention also provides a serial light source, which comprises N light sources connected in series in sequence, wherein the first-stage light source adopts any one light source, the previous-stage light source is used as injection seed light of the next-stage light source, the next-stage light source gains the number of photons of the previous-stage light source, and N is an integer greater than 1.
As described above, the light source of the present invention includes a medium, a first excitation device for performing a first pumping to pump electrons of helium-like atoms in the medium from a ground state to a first excited state, and a second excitation device for performing a second pumping to pump electrons of helium-like atoms in the medium from the first excited state to the ground state. The invention can generate pulse coherent light with the wavelength below 10 nm through two pumping processes, and the structure of the short wavelength light source is simple and compact and is easy to realize, and the cost can be reduced. Furthermore, by adjusting the kind of the second excitation means in addition to the pulsed coherent light source, the present invention can realize the manufacture of the continuous coherent light source, the pulsed incoherent light source, and the continuous incoherent light source.
Drawings
Fig. 1 is a schematic structural diagram of a light source according to an embodiment of the invention.
Fig. 2 is a schematic structural diagram of a light source according to a second embodiment of the invention.
Fig. 3 is a schematic structural diagram of a light source according to a third embodiment of the invention.
Fig. 4 is a schematic structural diagram of a light source according to a fourth embodiment of the invention.
Fig. 5 is a schematic structural diagram of a light source according to a fifth embodiment of the invention.
Fig. 6 is a schematic structural diagram of a light source according to a sixth embodiment of the invention.
Fig. 7 is a schematic structural diagram of a light source according to a seventh embodiment of the invention.
Fig. 8 is a schematic structural diagram of a parallel light source according to an eighth embodiment of the invention.
Fig. 9 is a schematic structural diagram of a three-stage tandem light source according to a ninth embodiment of the invention.
Fig. 10 is a schematic structural diagram of a light source according to a tenth embodiment of the invention.
Description of the element reference numerals
1a, 1b, 1c, 1d, 1e, 1f, 1g, 1h, 1i, 1j, 1k second excitation means
2a, 2b, 2c, 2d, 2e, 2f, 2g, 2h, 2i, 2j, 2k media
3a, 3b, 3c, 3d, 3e, 3f, 3g, 3h, 3i, 3j, 3k first excitation means
4 closed chamber
5 incident end
6 emergent end
7 flow chamber
8. 10 inlet
9. 11 outlet port
12 first light source
13 second light source
14 third light source
15 first stage light source
16 second stage amplified light source
17 third-stage amplified light source
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 10. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The invention provides a light source, which comprises a medium, a first excitation device and a second excitation device, wherein the medium comprises at least one of helium-like atoms, a substance capable of generating the helium-like atoms in an ionizable manner and a substance with a helium-like atom electronic structure; the first excitation device is used for pumping electrons in the medium from a ground state to a first excited state; the second excitation device is configured to excite, with light of a first wavelength, electrons in the first excited state in the medium to the ground state to emit light of a second wavelength, where the second wavelength is smaller than the first wavelength.
As an example, the first excitation device may include at least one of an electromagnetic field excitation device and an electron gun excitation device, wherein the electromagnetic field excitation device may include at least one of an inductive coupling device, an electrostatic magnetic field excitation device, a continuous alternating electromagnetic field excitation device, a pulsed electromagnetic field excitation device, a microwave radio frequency excitation device, and a synchronous radiation excitation device.
As an example, the second excitation device may comprise at least one of a continuous incoherent light source, a continuous coherent light source, a pulsed incoherent light source, and a pulsed coherent light source. When the second excitation device is a coherent light source, such as a laser, since the present invention uses the second excitation device to excite electrons from the first excited state to the ground state, photons generated by the excited radiation also have coherence, thereby finally forming laser light, i.e. the light source of the present invention can be implemented as a coherent light source, such as a continuous coherent light source or a pulsed coherent light source. The first exciting device is adopted to carry out first pumping to enable electrons to jump to a first excited state with higher energy, and then the second exciting device is adopted to carry out second pumping to generate laser with relatively shorter wavelength, so that the efficiency of the short wavelength laser generation compared with the frequency doubling process is higher, the structure of the short wavelength laser is simple and compact, the realization is easy, and the cost of the short wavelength coherent light source can be reduced.
Of course, if the second excitation means employs an incoherent light source, the light source of the present invention may also be implemented as an incoherent light source, such as a continuous incoherent light source or a pulsed incoherent light source.
As an example, the light source of the present invention may be implemented as an extreme ultraviolet light source or an X-ray light source by adjusting the composition of the medium and the wavelength of light emitted from the second excitation device.
By way of example, the first wavelength is in the range of 90nm to 2500nm, for example the first wavelength includes, but is not limited to, at least one of 958.5nm, 614.5nm, 448.9nm, 352.8nm, 289.8nm, 245.0nm, 213.7nm, 185.6nm, 164.7nm, 148.4nm, 147.4nm, 142.2nm, 132.8nm, 120.1nm, 109.0nm, and 99.2 nm. The second wavelength is in the range of 0.1nm-120nm, for example the second wavelength includes, but is not limited to, at least one of 0.504nm, 0.576nm, 0665nm, 0.776nm, 0.917nm, 1.100nm, 1.345nm, 1.694nm, 1.782nm, 2.160nm, 2.879nm, 4.027nm, 6.032nm, 10.027nm, 17.804nm, 17.898nm, and 19.931 nm.
As an example, the second excitation device excites electrons excited to the first excited state in the medium at different spatial positions to the ground state in a fixed phase relationship by excitation radiation, and emits light with a shorter wavelength than the first wavelength photon, wherein the excitation radiation process may have two paths, and the first path is that the electrons excited to the second excited state in the medium are excited first by the light with the first wavelength and then are excited from the second excited state to the ground state; the second pathway is that an electron in the first excited state in the medium is directly excited from the first excited state to the ground state by the light of the first wavelength.
As an example, the first excited state may be all possible excited states that may be exited back to a ground state after accepting a photon of a specific wavelength band to reach another excited state except the ground state, and an energy level of the first excited state may be between the ground state and the second excited state or may be higher than an energy level of the second excited state.
By way of example, the first excited state includes, but is not limited to, a metastable state, wherein a metastable state is a particular excited state that can remain for a relatively long time, up to 10 tens of thousands of times longer than in a typical excited state, when electrons are at the energy level of the excited state. In the light source of the present invention, said helium-like atoms in said medium may have a metastable state. The helium-like atom refers to an ion or atom having two electrons.
By way of example, the medium may include any helium-like atoms including, but not limited to, Li + 、Be 2 + 、B 3+ 、C 4+ 、N 5+ 、O 6+ 、F 7+ 、Ne 8+ 、Na 9+ 、Mg 10+ 、Al 11+ 、Si 12+ 、P 13+ And S 14+ One or more of the ions.
As examples, the ionizable helium atom-like substance includes Li simple substance, LiF, LiCl, Li 2 O、LiOH、Li 3 N、LiH、LiD、Li 2 CO 3 、Li 2 C 2 Elemental Be, Be (OH) 2 、BeO、Be 3 N 2 、BeF 2 、BeCl 2 、BeSO 4 B simple substance, Na 2 B 4 O 7 ·10H 2 O、CO 2 Elemental C, elemental N 2 、BN、O 2 Na simple substance, NaF, NaCl and Na 2 CO 3 、Na 2 O, Mg simple substance, MgO, Al simple substance, Al (OH) 3 、Al 2 O 3 、AlCl 3 、Al 2 (SO 4 ) 3 Elemental Si, SiO 2 SiC, elemental P, P 2 O 5 S simple substance, H 2 S、CuSO 4 And FeSO 4 One or more of (a).
As an example, a substance having a helium-like atomic electronic structure includes H 2 、LiH 2+ 、LiF、LiCl、Li 2 O、LiOH、Li 3 N、LiH、LiD、Li 2 CO 3 、Li 2 C 2 、BeO、Be 3 N 2 、BeF 2 、BeCl 2 、BeSO 4 、Na 2 B 4 O 7 ·10H 2 O、CO 2 、BN、NaF、NaCl、Na 2 CO 3 、Na 2 O、MgO、Al(OH) 3 、Al 2 O 3 、AlCl 3 、Al 2 (SO 4 ) 3 、SiO 2 、SiC、P 2 O 5 、H 2 S and FeSO 4 One or more of (a).
The medium may be generated by a physical reaction and/or a chemical reaction in the first excitation device, or may be generated by a physical reaction and/or a chemical reaction outside and then introduced into the first excitation device.
By way of example, the medium comprises Li + Ions, the first excited state energy is 60.923 eV; the medium comprises Be 2+ Ions, the first excited state energy is 121.651 eV; the medium comprises B 3+ Ions, the first excited state energy is 202.802 eV; the medium comprises C 4+ An ionic system, said first excited state energy being 304.384 eV; the medium comprises N 5+ Ions, the first excited state energy is 426.416 eV; the medium comprises O 6+ Ions, the first excited state energy is 568.887 eV; said medium comprising F 7+ Ions, the first excited state energy is 731.891 eV; the medium includes Ne 8+ An ionic system, the first excited state energy being 915.336 eV; the medium comprises Na 9+ Ions, the first excited state energy is 1119.332 eV; the medium comprises Mg 10+ Ions, and the energy of the first excited state is 1343.837 eV.
As an example, the medium may comprise, in addition to the helium-like atoms or the substance that may generate the helium-like atoms, an auxiliary substance, which may comprise at least one auxiliary atom and/or at least one auxiliary ion. For example, the auxiliary substance may include one or more of hydrogen, krypton, xenon, oxygen, carbon dioxide, nitrogen, neon, argon, and helium.
By way of example, the media may comprise one or more of a gas, a liquid, a solid, and a plasma. The medium can be stored in a closed manner in the first excitation device or can flow in the first excitation device.
As an example, the first stimulation device may comprise at least one inlet channel and at least one outlet channel when the medium is in a flowable form in the first stimulation device. For example, the first excitation device may include one inlet channel and one outlet channel, or the first excitation device may include one inlet channel and a plurality of outlet channels, or the first excitation device may include a plurality of inlet channels and one outlet channel, or the first excitation device may include a plurality of inlet channels and a plurality of outlet channels. The medium (comprising the helium-like atoms and/or the auxiliary substance) can be filled from the outside into the first stimulation means via the inlet channel and can flow out via the outlet channel to achieve a flow in the first stimulation means.
As an example, in order to further improve photon energy and obtain light with shorter wavelength, the invention further provides a parallel light source, which includes N +1 light sources as described above, wherein the first N light sources are connected in parallel as the second excitation device of the N +1 light source, and N is an integer greater than 1. In the parallel light source, the energy of the light emitted by the second excitation device of the (N + 1) th light source is the sum of the energies of the photons generated by the excited radiation of the first N light sources.
As an example, in order to increase the number of photons emitted, the present invention further provides a tandem light source, where the tandem light source includes N light sources connected in series in sequence, where the first-stage light source adopts a light source as described above, and the previous-stage light source is used as the injection seed light of the next-stage light source, and the next-stage light source gains the number of photons of the previous-stage light source, and N is an integer greater than 1. In the tandem type light source, the latter light source amplifies the emergent light of the former light source, and the number of finally generated photons is larger than that of the photons which can be generated by a single light source.
As an example, in order to obtain short wavelength light sources of different wavelengths for a certain medium, the light source may comprise a plurality of said second excitation means, different said second excitation means emitting light of different said first wavelengths to obtain light of different said second wavelengths. The second excitation devices can be set to be simultaneously or partially turned on in the same time period to obtain light with several different wavelengths simultaneously or obtain light with different wavelengths according to different requirements at different moments. In addition, a plurality of the second excitation devices can also be set to be started according to a preset time sequence and a preset sequence so as to obtain light with different wavelengths and continuous or discontinuous time sequences with a certain rule.
The light source of the present invention is described in detail below with reference to the accompanying drawings and specific embodiments, it should be noted that the embodiments described below take the euv light source and the X-ray light source as examples, but the embodiments cannot be construed as only the euv light source or the X-ray light source, and the present invention may also be constructed as other light sources with a shorter wavelength than the X-ray photons.
Example one
As shown in fig. 1, which is a schematic structural diagram of the light source of this embodiment, the medium 2a includes Li atom vapor or liquid droplets, the first excitation device 3a is used for generating a high-voltage dc electrostatic field, and the second excitation device 1a is 958.5nm infrared pulse coherent light. Under the action of an electric field, the cathode of the first excitation device 3a emits electrons due to field emission, and the electrons emitted by the field are accelerated to the anode under the action of the electric field to ionize Li atoms into Li + Ion, Li + The ions move towards the cathode under the acceleration of the electric field, and the ions collide with each other in the acceleration process, wherein electrons can collide with Li + 1s2s in which one electron in an ion is excited to a first excited state, i.e., an energy of 60.923eV relative to the ground state energy ( 1 S 0 ) The first excited state is metastable and electrons cannot return to 1s through a dipolar transition 2 A ground state, under the action of the high voltage direct current electrostatic field of the first excitation device 3a, when dynamic equilibrium is reached, a certain number of electrons will be accumulated on the 1s2s state in the whole medium, at this time, the second excitation device 1a injects laser with the wavelength of 958.5nm into the medium 2a, and the electrons on the 1s2s state will be pumped to 1s2p with energy of 62.216eV relative to the energy of the ground state (2: (3) 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state, due to a certain phase relation, radiates coherent light with a photon energy of 62.216eV (19.931 nm), and due to the fact that the coherent light is excited radiationAnd the excitation light source is a pulse light source, so that the finally generated pulse laser is.
Example two
As shown in fig. 2, which is a schematic structural diagram of the light source of this embodiment, the medium 2b includes Be atom vapor or liquid droplets, the first excitation device 3b adopts a microwave excitation device, and the second excitation device 1b adopts an 614.5nm continuous infrared laser. In the first excitation device 3b, Be atoms are accelerated by the microwave electric field and are ionized by mutual collision 2+ Ions, during collision, Be 2+ Electrons of the ions are driven from the ground state 1s 2 Excitation to 1s2s with 121.651eV relative to the ground state energy ( 1 S 0 ) A metastable state. In this case, the second excitation device 1b may emit laser light having a wavelength of 614.5nm into the medium 2b, i.e., 1s2s (b) 1 S 0 ) Electrons in the metastable state are pumped to 1s2p with 123.668eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state has a certain phase relationship, and emits coherent light having a photon energy of 123.668eV (wavelength 10.027nm), and is excited transition emission light, and thus is a continuous laser beam.
EXAMPLE III
As shown in fig. 3, which is a schematic structural diagram of the light source of this embodiment, the medium 2c includes B atom vapor, the first excitation device 3c adopts an electron gun excitation device, and the second excitation device 1c is a continuous incoherent light source with a wavelength of 448.9 nm. Under the bombardment of electrons emitted by said first excitation means 3c, the B atoms are ionized into B 3+ Ions, and B 3+ Electrons in the ions from 1s 2 The ground state is excited to 1s2s of 202.802eV relative to the ground state energy ( 1 S 0 ) A metastable state. In this case, the second excitation device 1c may inject continuous incoherent light having a wavelength of 448.9nm into the medium 2c, i.e., light at 1s2s (b) 1 S 0 ) Electrons in the metastable state are pumped to 1s2p with 205.562eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state radiates continuous incoherent light with a photon energy of 205.562eV (6.032 nm).
Example four
As shown in fig. 4, which is a schematic structural diagram of the light source of this embodiment, the medium 2d includes C atom vapor, the first excitation device 3d adopts a synchrotron radiation excitation device, and the second excitation device 1d is a pulse incoherent light source with a wavelength of 352.8 nm. Under excitation of the first excitation device 3d, C atoms are ionized into C 4+ Ions, and C 4+ Electrons in the ions from 1s 2 The ground state is excited to 1s2s of 304.384eV relative to the ground state energy ( 1 S 0 ) A metastable state. In this case, the second excitation device 1d emits pulsed incoherent light having a wavelength of 352.8nm into the medium 2d, i.e., the pulsed incoherent light at 1s2s (c) ( 1 S 0 ) Electrons in the metastable state are pumped to 1s2p with 307.899eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state radiates pulsed incoherent light having a photon energy of 307.899eV (4.027 nm).
EXAMPLE five
As shown in fig. 5, which is a schematic structural diagram of the light source of this embodiment, the medium 2e includes N atom vapor, the first excitation device 3e employs an electron gun excitation device, and the second excitation device 1e employs a pulse laser with a wavelength of 289.8 nm. The first excitation device 3e comprises a closed chamber 4, medium N atom steam is sealed in the chamber, a laser excitation incident end 5 of the closed chamber 4 can be made of quartz glass, and an extreme ultraviolet laser emergent end 6 can be made of sealed optical windows which are made of aluminum films, tin films and the like and transmit extreme ultraviolet light. Under the excitation of the first excitation device 3e, N atoms are ionized into N 5+ Ion, and N 5+ Electrons in the ions from 1s 2 The ground state is excited to 1s2s of 426.416eV relative to the ground state energy ( 1 S 0 ) A metastable state. In this case, the second excitation device 1e may emit laser light having a wavelength of 289.8nm into the medium 2e, i.e., 1s2s (b) 1 S 0 ) Pumping electrons in metastable state to energy relative to ground state430.695eV of 1s2p ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state emits coherent light having a photon energy of 430.695eV (wavelength 2.879nm) because of a certain phase relationship, and is a laser light, and the excitation light source is a pulsed light source, and thus is finally generated as a pulsed laser.
Example six
As shown in fig. 6, which is a schematic structural diagram of the light source of this embodiment, the medium 2f includes O atom vapor or liquid droplets, the first excitation device 3f employs a microwave excitation device, and the second excitation device 1f employs a 245.0nm pulsed laser. The first excitation means 3f comprise a flow chamber 7 into which the atoms of the medium O enter from an inlet 8 and exit from an outlet 9, ensuring the purity of the medium. In the first excitation means 3f O atoms are ionized to O 6+ Ions, and O 6+ The ions are accelerated by the microwave electric field and collide with each other, during which process O 6+ Electrons of ions are driven from the ground state 1s 2 1s2s excited to 568.887eV relative to the ground state energy ( 1 S 0 ) A metastable state. In this case, the second excitation device 1f may inject laser light having a wavelength of 245.0nm into the medium 2f, i.e., the laser light at 1s2s (1 s2 s: (b) 1 S 0 ) Electrons in the metastable state are pumped to 1s2p with 573.948eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state emits coherent light having a photon energy of 573.948eV (wavelength of 2.160nm) because of a certain phase relationship, and is a laser light, and the excitation light source is a pulsed light source, and thus is a pulsed laser light which is finally generated.
EXAMPLE seven
As shown in fig. 7, which is a schematic structural diagram of the light source of this embodiment, the first excitation device 3g employs a microwave excitation device, the first excitation device 3g includes a plurality of inlets 10 and an outlet 11, Li atomic gas, Be atomic vapor and B atomic vapor are respectively introduced into the first excitation device 3g as a medium 2g, and the second excitation device1g of the emitted light is a polychromatic pulse laser containing 958.5nm, 614.5nm and 448.9 nm. In the first excitation means 3g, the medium Li atoms are ionized into Li + Ionic and Li + Excitation of one electron in an ion to 1s2s with energy 60.923eV relative to the ground state energy ( 1 S 0 ) Metastable state, the Be atom of the medium being ionized to Be 2+ Ions are accelerated by the microwave electric field and collide with each other, and Be is generated during the collision process 2+ Electrons of the ions are driven from the ground state 1s 2 1s2s excited to 121.651eV relative to the ground state energy ( 1 S 0 ) Metastable state, B atom being ionized into B 3+ Ion and B 3+ Electrons in the ions from 1s 2 The ground state is excited to 1s2s of 202.802eV relative to the ground state energy ( 1 S 0 ) A metastable state. At this time, the second excitation device 1g emits a polychromatic laser beam of which Li is emitted by an 958.5nm laser beam + Electrons in the 1s2s state in the ion are pumped to 1s2p with energy 62.216eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state returns to 1s by stimulated transition 2 A ground state radiating coherent light at 62.216 eV; 614.5nm laser beam Be 2+ At 1s2s in the ion ( 1 S 0 ) Electrons on metastable states are pumped to 1s2p with 123.668eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 A ground state, radiating 123.668eV coherent light; laser with wavelength of 448.9nm can convert B into B 3+ Ion at 1s2s ( 1 S 0 ) Electrons in the metastable state are pumped to 1s2p with 205.562eV relative to the ground state energy ( 1 P 1 ) State, pumped electrons from 1s2p ( 1 P 1 ) The state reverts to 1s through stimulated transition 2 The ground state radiates coherent light of 205.562 eV. Finally, a pulsed laser containing three photon energies, 62.216eV, 123.668eV, and 205.562eV, can be obtained. This embodiment is merely an example, and the kind of medium can be freely selected when the short-wavelength multi-color laser is actually generated.
Example eight
As shown in fig. 8, is the present embodimentThe structure schematic diagram of the parallel light source of the embodiment includes four light sources, wherein the first three light sources are connected in parallel as the second excitation device 1h of the fourth light source. In this embodiment, the first light source 12 in the second excitation device 1h is the euv light source in the first embodiment, the second light source 13 is the euv light source in the second embodiment, and the third light source is the euv light source in the third embodiment. In this embodiment, the first excitation device 3h of the fourth light source is an electron gun excitation device, and the medium 2h includes C 4+ Ions. The photons generated by the first light source 12, the second light source 13 and the third light source 14 and having the photon energy of 62.216eV, 123.668eV and 205.562eV are converged into the first excitation device 3h, and C in the medium 2h is emitted 4+ Ion at 1s2s with 304.384eV relative to ground state energy ( 1 S 0 ) The electrons in the metastable state are pumped to a rydberg state with an energy of 695.830eV relative to the ground state, and the pumped electrons are returned from the rydberg state to 1s by an excited transition 2 The ground state radiates light having a photon energy of 695.830eV (wavelength of 1.782 nm). It should be noted that if one of the pulsed coherent light source, the continuous coherent light source, the pulsed incoherent light source, and the continuous incoherent light source is to obtain a high-quality light source, the multi-stage parallel light source at the front end of the integrated light source can only adopt the desired light source type as the front-stage light source.
Example nine
Fig. 9 is a schematic structural diagram of a three-stage tandem light source of this embodiment, in which a front light source is used as a first excitation device of a rear light source, and the rear light source amplifies the emergent light of the front light source. In this embodiment, the first-stage light source 15 adopts the euv pulse laser in the first embodiment, and the medium 2i of the second-stage amplification light source 16 and the medium 2j of the third-stage amplification light source 17 both include Li + The first exciting means 3i of the second-stage amplification light source 16 and the first exciting means 3j of the third-stage amplification light source 17 employ microwave exciting means. In the second-stage amplification light source 16 and the third-stage amplification light source 17, a medium Li + The electrons in the ions are excited by the microwaves to 1s2p (62.216 eV relative to the ground state energy) 1 P 1 ) State of the artWhen the extreme ultraviolet pulse laser with the photon energy of 62.216eV emitted from the first-stage light source 15 passes through the second-stage amplification light source 16, the extreme ultraviolet pulse laser originally exists at 1s2p ( 1 P 1 ) The state excited transition radiates coherent light with photon energy of 62.216eV, and the laser of the first-stage light source 15 is amplified; when the euv pulse laser with photon energy of 62.216eV emitted from the second stage amplification light source 16 passes through the third stage amplification light source 17, it is originally at 1s2p ( 1 P 1 ) The state excited transition radiates pulse coherent light with photon energy of 62.216eV, the laser of the second stage amplification light source 16 is amplified, and the photon number of the extreme ultraviolet pulse laser with the photon energy of 62.216eV, which is finally emitted, is larger than the photon number which can be generated by a single extreme ultraviolet pulse coherent light source. In the practical implementation process, the medium, the excitation system and the series connection stage number can be selectively adjusted according to the practical requirement.
Example ten
As shown in fig. 10, which is a schematic structural diagram of the light source of this embodiment, the light source includes a plurality of second excitation devices. In this embodiment, the medium 2k includes Li + Ion vapour or liquid droplets, the first stimulation means 3k using an electron gun, the first of the second stimulation means 1i using a pulsed coherent light source with a wavelength of 958.5nm, the second of the second stimulation means 1j using a continuous coherent light source with a wavelength of 142.2nm, and the third of the second stimulation means 1k using a pulsed incoherent light source with a wavelength of 148.4 nm. Wherein the electron gun of the first excitation device 3k supplies the medium Li + The electrons in (1) are excited from the ground state to 1s2s having energy of 60.923eV relative to the energy of the ground state 1 S 0 ) In the state where the first said second excitation means 1i alone is turned on, it may be pumped to 1s2p of 62.216eV relative to the ground state energy ( 1 P 0 A state) that emits pulsed coherent light having a photon energy of 62.216eV (wavelength 19.931nm) when it transits back to the ground state; a second of said second excitation means 1j, when individually switched on, may be pumped to 1s3s of 69.280eV relative to the ground state energy(s) (( 1 S state) that emits continuous coherent light having a photon energy of 69.280eV (wavelength 17.898nm) when it transits back to the ground state; third instituteThe second excitation means 1k, when turned on alone, may be pumped to 1s3p of 69.648eV relative to the ground state energy ( 1 P 0 State) that emits pulsed incoherent light having a photon energy of 69.648eV (wavelength 17.804nm) when it transitions back to the ground state. It should be noted that the number of the second excitation devices can be adjusted according to the need, and is not limited to 3, and a plurality of the second excitation devices can also be selected to be simultaneously opened, so that a plurality of corresponding photons can be emitted; in addition, a plurality of said second excitation means may be time switched to emit short wavelength light having a sequence of different wavelengths.
In summary, the light source of the present invention includes a medium, a first excitation device and a second excitation device, wherein the first excitation device is configured to perform a first pumping to pump electrons of helium-like atoms in the medium from a ground state to a first excited state, and the second excitation device is configured to perform a second pumping to pump electrons of helium-like atoms in the medium from the first excited state to the ground state. The invention can generate light with relatively shorter wavelength through two pumping processes, the laser wavelength can be lower than 10 nanometers, and the structure of the short-wavelength light source, especially the short-wavelength pulse coherent light source, is simple and compact and is easy to realize, and the cost can be reduced. Furthermore, by adjusting the kind of the second excitation means in addition to the pulsed coherent light source, the present invention can realize the manufacture of the continuous coherent light source, the pulsed incoherent light source, and the continuous incoherent light source. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (24)

1. A light source, comprising:
a medium including at least one of a helium-like atom, a substance ionizable to generate a helium-like atom, and a substance having an electronic structure of a helium-like atom;
first excitation means for pumping electrons in said medium from a ground state to a first excited state;
second excitation means for using light of a first wavelength to excite electrons in the first excited state in the medium to the ground state to emit light of a second wavelength, the second wavelength being smaller than the first wavelength;
wherein the helium-like atoms include Li + 、Be 2+ 、B 3+ 、C 4+ 、N 5+ 、O 6+ 、F 7+ 、Ne 8+ 、Na 9+ 、Mg 10+ 、Al 11+ 、Si 12+ 、P 13+ And S 14+ One or more of ions; the substance capable of ionizing to generate helium-like atoms comprises Li simple substance, LiF, LiCl and Li 2 O、LiOH、Li 3 N、LiH、LiD、Li 2 CO 3 、Li 2 C 2 Elemental Be, Be (OH) 2 、BeO、Be 3 N 2 、BeF 2 、BeCl 2 、BeSO 4 B simple substance, Na 2 B 4 O 7 ·10H 2 O、CO 2 Elemental C, elemental N 2 、BN、O 2 Na simple substance, NaF, NaCl and Na 2 CO 3 、Na 2 O, Mg simple substance, MgO, Al simple substance, Al (OH) 3 、Al 2 O 3 、AlCl 3 、Al 2 (SO 4 ) 3 Elemental Si, SiO 2 SiC, elemental P, P 2 O 5 S simple substance, H 2 S、CuSO 4 And FeSO 4 One or more of; the substance having a helium atom-like electronic structure includes H 2 、LiH 2+ 、LiF、LiCl、Li 2 O、LiOH、Li 3 N、LiH、LiD、Li 2 CO 3 、Li 2 C 2 、BeO、Be 3 N 2 、BeF 2 、BeCl 2 、BeSO 4 、Na 2 B 4 O 7 ·10H 2 O、CO 2 、BN、NaF、NaCl、Na 2 CO 3 、Na 2 O、MgO、Al(OH) 3 、Al 2 O 3 、AlCl 3 、Al 2 (SO 4 ) 3 、SiO 2 、SiC、P 2 O 5 、H 2 S and FeSO 4 One or more of (a).
2. The light source of claim 1, wherein: under the action of the light with the first wavelength, electrons in the first excited state in the medium are firstly excited to a second excited state with the energy level different from that of the first excited state, and then are excited from the second excited state to the ground state; or under the action of the light with the first wavelength, electrons in the first excited state in the medium are directly excited from the first excited state to the ground state.
3. The light source of claim 2, wherein: the energy level of the first excited state is between the ground state and the second excited state, or the energy level of the first excited state is higher than the energy level of the second excited state.
4. The light source of claim 1, wherein: the light source is an extreme ultraviolet light source or an X-ray light source.
5. The light source of claim 1 or 4, wherein: the light source is a continuous incoherent light source, a continuous coherent light source, a pulse incoherent light source or a pulse coherent light source.
6. The light source of claim 1, wherein: the first excitation device includes at least one of an electromagnetic field excitation device and an electron gun excitation device.
7. The light source in accordance with claim 6, wherein: the electromagnetic field excitation device comprises at least one of an inductive coupling device, an electrostatic magnetic field excitation device, a continuous alternating electromagnetic field excitation device, a pulse electromagnetic field excitation device, a microwave radio frequency excitation device and a synchronous radiation excitation device.
8. The light source of claim 1, wherein: the second excitation device includes at least one of a continuous incoherent light source, a continuous coherent light source, a pulsed incoherent light source, and a pulsed coherent light source.
9. The light source of claim 1, wherein: the medium is generated by a physical reaction and/or a chemical reaction within the first stimulation device; or the medium is generated by physical reaction and/or chemical reaction outside the first excitation device and then is introduced into the first excitation device.
10. The light source of claim 1, wherein: the form of the medium includes one or more of gas, liquid, solid and plasma.
11. The light source of claim 1, wherein: the medium further comprises an auxiliary substance comprising at least one auxiliary atom and/or at least one auxiliary ion.
12. The light source in accordance with claim 11, wherein: the auxiliary substances comprise one or more of hydrogen, krypton, xenon, oxygen, carbon dioxide, nitrogen, neon, argon and helium.
13. The light source of claim 1 or 11, wherein: the medium is enclosed in the first excitation device.
14. The light source of claim 1 or 11, wherein: the first stimulation means comprises at least one inlet channel and at least one outlet channel, through which the medium flows in the first stimulation means.
15. The light source of claim 1, wherein: the medium comprises Li + Ions, the first excited state energy is 60.923 eV; the medium comprises Be 2+ Ions, the first excited state energy is 121.651 eV; the medium comprises B 3+ Ions, the first excited state energy is 202.802 eV; said medium comprising C 4+ An ionic system, said first excited state energy being 304.384 eV; the medium comprises N 5+ Ions, the first excited state energy is 426.416 eV; the medium comprises O 6+ Ions, the first excited state energy is 568.887 eV; said medium comprising F 7+ Ions, the first excited state energy is 731.891 eV; the medium includes Ne 8+ An ionic system, said first excited state energy being 915.336 eV; the medium comprises Na 9+ Ions, the first excited state energy is 1119.332 eV; the medium comprises Mg 10+ Ions, the first excited state energy being 1343.837 eV.
16. The light source of claim 1, wherein: the first wavelength is in the range of 90nm to 2500 nm.
17. The light source in accordance with claim 16, wherein: the first wavelength is selected from at least one of 958.5nm, 614.5nm, 448.9nm, 352.8nm, 289.8nm, 245.0nm, 213.7nm, 185.6nm, 164.7nm, 148.4nm, 147.4nm, 142.2nm, 132.8nm, 120.1nm, 109.0nm and 99.2 nm.
18. The light source of claim 1, wherein: the second wavelength is in the range of 0.1nm to 120 nm.
19. The light source in accordance with claim 18, wherein: the second wavelength is at least one selected from 0.504nm, 0.576nm, 0665nm, 0.776nm, 0.917nm, 1.100nm, 1.345nm, 1.694nm, 1.782nm, 2.160nm, 2.879nm, 4.027nm, 6.032nm, 10.027nm, 17.804nm, 17.898nm and 19.931 nm.
20. The light source of claim 1, wherein: the light source comprises a plurality of second excitation devices, and different second excitation devices emit light with different first wavelengths to obtain light with different second wavelengths.
21. The light source in accordance with claim 20, wherein: a plurality of said second actuating means are arranged to be simultaneously or partially activated during the same time period.
22. The light source in accordance with claim 20, wherein: the plurality of second excitation devices are set to be started according to a preset time sequence and a preset sequence.
23. A parallel light source, characterized by: the parallel light source comprises N +1 light sources according to any one of claims 1 to 19, wherein the first N light sources are connected in parallel as the second excitation means of the (N + 1) th light source, and N is an integer greater than 1.
24. A tandem light source, comprising: the tandem type light source comprises N light sources which are sequentially connected in series, wherein the first stage light source adopts the light source as claimed in any one of claims 1 to 19, the previous stage light source is used as injection seed light of the next stage light source, the next stage light source gains the photon number of the previous stage light source, and N is an integer greater than 1.
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