CN113571393A - Electron beam-out device for electron gun - Google Patents
Electron beam-out device for electron gun Download PDFInfo
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- CN113571393A CN113571393A CN202110626810.8A CN202110626810A CN113571393A CN 113571393 A CN113571393 A CN 113571393A CN 202110626810 A CN202110626810 A CN 202110626810A CN 113571393 A CN113571393 A CN 113571393A
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- plate
- reflecting
- electron beam
- grid
- electron gun
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/18—Luminescent screens
- H01J29/28—Luminescent screens with protective, conductive or reflective layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
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- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses an electron beam outlet device for an electron gun, which is arranged in a vacuum environment and comprises a reflecting polar plate (231) and a grid plate (232), wherein the reflecting polar plate (231) and the grid plate (232) are spliced into a cylindrical structure with two open ends, the open positions of the two ends are respectively covered with a reflecting polar plate (233), the inner sides of the two reflecting polar plates (233) are respectively connected with a fixed seat (235) through a ceramic column (234), a discharge rod (236) is fixed between the two fixed seats (235), equipotential negative high voltage is input to the reflecting polar plate (231) and the grid plate (232), the equipotential negative high voltage is higher than the potential of the discharge rod (236), a plurality of beam outlet holes (2321) are formed in the grid plate (232), and a zero-potential electron beam output port is formed in the outer side of the grid plate (232). The invention has the advantage of stable and uniform beam outgoing of the electron beam.
Description
Technical Field
The invention relates to the technical field of electron beam sterilization, in particular to an electron beam emitting device for an electron gun.
Background
The electron gun is generally applied to scenes such as inelastic electron scattering, fluorescent screen luminescence oscillography and the like at present, and the electron gun can also be applied to irradiation sterilization in theory by virtue of huge energy carried by a high-speed electron beam. Therefore, there is a need to develop an electron beam emitting device for sterilizing an electron gun to emit a uniform beam, so as to better save energy consumption.
Disclosure of Invention
The invention aims to provide an electron beam emitting device for an electron gun. It has the advantage of stable and uniform beam outgoing of the electron beam.
The technical scheme of the invention is as follows: the utility model provides an electron beam-out device for electron gun arranges under vacuum environment, including reflection polar plate and grid tray, reflection polar plate and grid tray splice into the open tubular structure in both ends, and the open department in both ends all covers and is equipped with the reflection utmost point curb plate, two reflection utmost point curb plate inboard all there is a fixing base through ceramic columnar connection, two the fixing base between be fixed with a discharge rod, the negative high pressure and the electric potential of input equipotential on reflection polar plate and the grid tray all are higher than the discharge rod electric potential, be equipped with a plurality of beam holes of appearing on the grid tray, the grid tray outside is equipped with the electron beam delivery outlet of zero potential.
Compared with the prior art, the invention has the beneficial effects that: the invention releases electrons by a discharge rod in a vacuum environment, adopts a structure that the potentials of a reflection polar plate and a grid plate are negative and high, and the potentials are all higher than the potential of the discharge rod, the discharge rod can radiate electrons to a semi-closed cylindrical space formed by the reflection polar plate, the grid plate and two reflection polar plates in multiple directions after being electrified, the electrons realize the adjustment of beam direction after being reflected, and finally are accelerated and guided to an electron beam output port at zero potential stably and uniformly in the form of electron beams from the grid plate, so that the irradiation sterilization of objects is realized, and the uniform beam output ensures the best sterilization effect on the objects to be sterilized under the premise of consuming the lowest energy.
In the above electron beam emitting device for an electron gun, the reflecting plate is arc-shaped, and the grid plate is plane-shaped.
In the electron beam emitting device for the electron gun, the two fixing seats are connected with the pressing blocks, and each pressing block is matched with the fixing seat to press and fix one end of the discharge rod, so that the discharge rod is arranged parallel to the grid plate.
In the electron beam emitting device for the electron gun, the diameter corresponding to the arc on the cross section of the reflecting plate is 50-100mm, the central angle corresponding to the arc on the cross section of the reflecting plate is 180-260 °, and the distance between the discharge rod and the grid plate is 6-30 mm.
In the electron beam emitting device for the electron gun, the two ends of the discharge rod are input with 60-160kV negative high voltage, and the potentials on the reflecting polar plate and the grid plate are 200-800V higher than the potential of the discharge rod.
In the above electron beam emitting device for an electron gun, the beam emitting holes are arranged in a honeycomb shape, and the diameter of an inscribed circle of the beam emitting holes is 3-9 mm.
In the above electron beam exit device for an electron gun, two ends of the grid plate are provided with bent portions perpendicular to the plane of the grid plate, and the bent portions at the two ends respectively abut against the side plates of the reflective electrode at the two ends of the grid plate.
In the above electron beam emitting device for an electron gun, the reflection electrode side plate is provided with a connection lug, and the reflection electrode side plate is connected with the inner wall of the reflection electrode plate through the connection lug.
In the electron beam emitting device for the electron gun, the reflection electrode side plate is provided with a plurality of cable through holes, and the cable through holes are internally sleeved with ceramic rings.
In the foregoing electron beam discharging device for an electron gun, the discharge rod between the two fixing bases is a tungsten rod.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of beam uniformity of an electron beam discharge device simulated by simulation software under the conditions of group 1 in the example;
FIG. 3 is a schematic diagram of beam uniformity of an electron beam discharge device simulated by simulation software under the conditions of group 2 in the example;
FIG. 4 is a schematic diagram of beam uniformity of the electron beam discharge device simulated by simulation software under the conditions of group 3 in the example;
FIG. 5 is a schematic diagram of beam uniformity of an electron beam discharge device simulated by simulation software under the conditions of group 4 in the example;
FIG. 6 is a schematic diagram of beam uniformity of an electron beam discharge device simulated by simulation software under the conditions of group 5 in the example;
FIG. 7 is a schematic diagram showing the uniformity of the beam emitted from the electron beam emitting device simulated by the simulation software under the conditions of group 6 in the example;
FIG. 8 shows the beam uniformity of the electron beam discharge device measured by practical tests under the conditions of group 1 in the example;
FIG. 9 shows the beam uniformity of the electron beam discharge device measured by practical experiments under the conditions of group 2 in the example.
Reference numerals: 231-a reflecting pole plate, 232-a grid plate, 233-a reflecting pole side plate, 234-a ceramic column, 235-a fixed seat, 236-a discharging rod, 237-a pressing block, 2321-a beam outlet hole, 2322-a bending part and 2331-a connecting lug.
Detailed Description
The invention is further illustrated by the following figures and examples, which are not to be construed as limiting the invention.
Example (b): an electron beam outlet device for an electron gun is arranged in a vacuum environment, and is structurally shown in fig. 1, and comprises a reflecting polar plate 231 and a grid plate 232, wherein the reflecting polar plate 231 and the grid plate 232 are spliced into a cylindrical structure with two open ends, two open ends are respectively covered with reflecting polar plates 233, the inner sides of the two reflecting polar plates 233 are respectively connected with a fixed seat 235 through a ceramic column 234, a discharge rod 236 is fixed between the two fixed seats 235, equipotential negative high voltage is input to the reflecting polar plate 231 and the grid plate 232, the potential of the equipotential negative high voltage is higher than that of the discharge rod 236, a plurality of beam outlet holes 2321 are formed in the grid plate 232 and used for emitting electron beams, and a zero-potential electron beam outlet is formed in the outer side of the grid plate 232 so that the electron beams emitted from the beam outlet holes 2321 are accelerated to be used for irradiation sterilization.
Preferably, the reflective plate 231 is arc-shaped, the grid plate 232 is flat, and the discharge rod 236 is matched with the reflective plate 231 and the grid plate 232 with the shapes, so that the uniformity of the outgoing beam is ensured.
Preferably, the two fixing bases 235 are connected with pressing blocks 237, and each pressing block 237 and the fixing base 235 are matched to respectively press and fix one end of the discharge rod 236, so that the discharge rod 236 is arranged parallel to the grid 232, which helps electrons emitted from the discharge rod 236 to be uniformly directed to the grid 232.
Preferably, the diameter of the arc on the cross section of the reflective plate 231 is 50-100mm, the central angle of the arc on the cross section of the reflective plate 231 is 180 ° -260 ° (i.e. the opening angle of the arc on which the reflective plate 231 is located is 100 ° -180 °), the distance between the discharge rod 236 and the grid plate 232 is 6-30mm, and the beam uniformity of electrons generated by the discharge rod 236 is better within the above condition range.
Preferably, the two ends of the discharge rod 236 are inputted with a negative high voltage of 60-160kV, the potentials on the reflective plate 231 and the grid plate 232 are 200-800V higher than the potential of the discharge rod 236, and the beam-out uniformity of electrons generated by the discharge rod 236 is better within the above condition range.
Preferably, the beam outlet holes 2321 are arranged in a honeycomb shape, that is, each beam outlet hole 2321 is a regular hexagon structure, the structural stability is high, and meanwhile, the uniformity of emitted electrons can also be improved, the diameter of an inscribed circle of the beam outlet holes 2321 is 3-9mm, and the beam-emitting uniformity of electrons generated by the discharge rod 236 is better within the condition range.
Preferably, the two ends of the grid plate 232 are provided with bending parts 2322 perpendicular to the plane of the grid plate 232, and the bending parts 2322 at the two ends respectively abut against the reflective electrode side plates 233 at the two ends of the grid plate 232, so that the invention is convenient to disassemble and assemble.
Preferably, the reflective plate side plate 233 is provided with a connecting lug 2331, and the reflective plate side plate 233 is connected with the inner wall of the reflective plate 231 through the connecting lug 2331, so that the present invention is convenient to disassemble and assemble.
Preferably, the repeller side plate 233 is provided with a plurality of cable through holes, and the cable through holes are internally sleeved with ceramic rings for insulation protection.
Preferably, the discharge rod 236 between the two fixed seats 235 is a tungsten rod, and the discharge efficiency of the tungsten rod is high.
The working principle of the invention is as follows: when the invention is operated, equipotential negative high voltage is input on the reflecting polar plate 231 and the grid plate 232, negative high voltage is input at two ends of the tungsten rod, the potentials on the reflecting polar plate 231 and the grid plate 232 are higher than the potential of the tungsten rod, the electron beam output port at the outer side of the grid plate 232 is zero potential, the tungsten rod emits electrons, the released electrons are diverged in a direction by taking the tungsten rod as the center, are attracted by the reflecting polar plate 231, the reflecting polar plate 233 and the grid plate 232, are directly or indirectly emitted from a plurality of beam emitting holes 2321 of the grid plate 232 through the reflection of the reflecting polar plate 231, and the electrons emitted from the beam emitting holes 2321 are uniformly emitted to an irradiation object through acceleration between the beam emitting holes 2321 and the electron beam output port.
According to the electronic beam-emitting device based on the structure, the beam-emitting uniformity is related to the diameter of the arc where the reflecting polar plate 231 is located, the opening angle of the arc where the reflecting polar plate 231 is located, the size of the beam-emitting hole 2321 of the grid plate 232, the position of the tungsten rod and other factors, and the beam-emitting uniformity of the electronic beam-emitting device is simulated under a plurality of groups of different conditions in simulation software.
Group 1: the diameter of the arc where the reflecting plate 231 is located is 85mm, the opening angle of the arc where the reflecting plate 231 is located is 120 °, the diameter of the inscribed circle of the beam outlet 2321 of the grid plate 232 is 8mm, the center of the arc of the section of the reflecting plate 231 is taken as the origin, the grid plate 232 is 10mm below the origin, and the tungsten rod is 10mm above the origin (that is, the distance between the tungsten rod and the grid plate 232 is 20 mm).
Group 2: the diameter of the arc where the reflecting plate 231 is located is 85mm, the opening angle of the arc where the reflecting plate 231 is located is 120 °, the diameter of the inscribed circle of the beam outlet 2321 of the grid plate 232 is 4mm, the center of the arc of the cross section of the reflecting plate 231 is taken as the origin, the grid plate 232 is 20mm below the origin, and the tungsten rod is overlapped with the origin (that is, the distance between the tungsten rod and the grid plate 232 is 20 mm).
Group 3: the diameter of the arc where the reflecting plate 231 is located is 85mm, the opening angle of the arc where the reflecting plate 231 is located is 120 °, the diameter of the inscribed circle of the beam outlet 2321 of the grid plate 232 is 8mm, the center of the arc of the cross section of the reflecting plate 231 is taken as the origin, the grid plate 232 is 20mm below the origin, and the tungsten rod is overlapped with the origin (that is, the distance between the tungsten rod and the grid plate 232 is 20 mm).
Group 4: the diameter of the arc where the reflecting plate 231 is located is 85mm, the opening angle of the arc where the reflecting plate 231 is located is 160 °, the diameter of the inscribed circle of the beam outlet 2321 of the grid plate 232 is 4mm, the center of the arc of the cross section of the reflecting plate 231 is taken as the origin, the grid plate 232 is 7.3mm below the origin, and the tungsten rod is overlapped with the origin (that is, the distance between the tungsten rod and the grid plate 232 is 7.3 mm).
Group 5: the diameter of the arc where the reflecting plate 231 is located is 85mm, the opening angle of the arc where the reflecting plate 231 is located is 160 °, the diameter of the inscribed circle of the beam outlet 2321 of the grid plate 232 is 8mm, the center of the arc of the cross section of the reflecting plate 231 is taken as the origin, the grid plate 232 is 7.3mm below the origin, and the tungsten rod is overlapped with the origin (that is, the distance between the tungsten rod and the grid plate 232 is 7.3 mm).
Group 6: the diameter of the arc where the reflecting plate 231 is located is 85mm, the opening angle of the arc where the reflecting plate 231 is located is 160 °, the diameter of the inscribed circle of the beam outlet 2321 of the grid plate 232 is 8mm, the center of the arc of the cross section of the reflecting plate 231 is taken as the origin, the grid plate 232 is 20mm below the origin, and the tungsten rod is overlapped with the origin (that is, the distance between the tungsten rod and the grid plate 232 is 20 mm).
The group 1 to the group 6 are simultaneously carried out under the conditions that negative high voltage of 70kV, irradiation duration of 1 second, tungsten rod current of 13.2mA and feedback current of 2.5mA are input at the tungsten rod, and the distance between the grid plate 232 and the zero-potential electron beam output port is kept the same.
The simulation results of the group 1 to the group 6 are shown in fig. 2 to fig. 7, respectively, and it can be seen that the beam-output uniformity of the electron beam-output device under the conditions of the group 1 and the group 2 is better.
Now, the conditions of the group 1 and the group 2 are kept unchanged, and further evidence is obtained through practical tests.
In the actual test, the irradiation sterilization color-changing indication label is used for detection, the label is a circular test paper with the diameter of 13mm, the color before irradiation is yellow, the color gradually changes into red according to the irradiation degree, and yellow, light red and deep red are defined as three grades of the label after irradiation and respectively correspond to grade I, grade II and grade III.
The actual test results of the group 1 and the group 2 are respectively shown in fig. 8 and fig. 9, the lower right corner of each label in fig. 8 and fig. 9 is the grade of the label after being irradiated, which is obtained after colorimetry, and it is verified that the beam-outgoing uniformity of the electronic beam-outgoing device under the condition of the group 2 is relatively better.
Therefore, when the diameter of the arc on the cross section of the reflecting plate 231 is 85mm, the central angle of the arc on the cross section of the reflecting plate 231 is 240 °, the distance between the discharge rod 236 and the grid plate 232 is 20mm, and the diameter of the inscribed circle of the beam outlet 2321 is 4mm, the uniformity of the beam outlet of the invention is relatively optimal.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned examples, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (10)
1. An electron beam emitting device for an electron gun, arranged in a vacuum environment, comprising: including reflection polar plate (231) and grid tray (232), reflection polar plate (231) and grid tray (232) splice into the open tubular structure in both ends, and the open department in both ends all covers and is equipped with reflection utmost point curb plate (233), two reflection utmost point curb plate (233) inboard all be connected with fixing base (235) through ceramic post (234), two fixing base (235) between be fixed with a discharge rod (236), negative high pressure and the electric potential of input equipotential on reflection polar plate (231) and grid tray (232) all are higher than discharge rod (236) electric potential, be equipped with a plurality of beam outlet holes (2321) on grid tray (232), the grid tray (232) outside is equipped with the electron beam delivery outlet of zero potential.
2. An electron beam extracting apparatus for an electron gun according to claim 1, wherein: the reflecting polar plate (231) is arc-shaped, and the grid plate (232) is planar.
3. An electron beam extracting apparatus for an electron gun according to claim 2, wherein: the two fixing seats (235) are connected with pressing blocks (237), and each pressing block (237) is matched with the fixing seat (235) to press and fix one end of the discharge rod (236) so that the discharge rod (236) is arranged in parallel to the grid plate (232).
4. An electron beam extracting apparatus for an electron gun according to claim 2, wherein: the diameter size corresponding to the circular arc on the cross section of the reflecting polar plate (231) is 50-100mm, the central angle size corresponding to the circular arc on the cross section of the reflecting polar plate (231) is 180-260 degrees, and the distance between the discharge rod (236) and the grid plate (232) is 6-30 mm.
5. An electron beam extracting apparatus for an electron gun according to claim 4, wherein: the two ends of the discharge rod (236) are input with 60-160kV negative high voltage, and the potentials on the reflecting polar plate (231) and the grid plate (232) are 200-800V higher than the potential of the discharge rod (236).
6. An electron beam extracting apparatus for an electron gun according to claim 1, wherein: the beam outlet holes (2321) are arranged in a honeycomb shape, and the diameter of an inscribed circle of the beam outlet holes (2321) is 3-9 mm.
7. An electron beam extracting apparatus for an electron gun according to claim 2, wherein: bending parts (2322) perpendicular to the plane of the grid plate (232) are arranged at two ends of the grid plate (232), and the bending parts (2322) at the two ends respectively abut against the reflecting electrode side plates (233) at the two ends of the grid plate (232).
8. An electron beam extracting apparatus for an electron gun according to claim 2, wherein: the reflecting pole side plate (233) is provided with a connecting lug (2331), and the reflecting pole side plate (233) is connected with the inner wall of the reflecting pole plate (231) through the connecting lug (2331).
9. An electron beam extracting apparatus for an electron gun according to claim 1, wherein: the reflection pole side plate (233) is provided with a plurality of cable through holes, and ceramic rings are sleeved in the cable through holes.
10. An electron beam emitting device for an electron gun according to any one of claims 1 to 9, characterized in that: the discharge rod (236) between the two fixed seats (235) is a tungsten rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110626810.8A CN113571393A (en) | 2021-06-04 | 2021-06-04 | Electron beam-out device for electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110626810.8A CN113571393A (en) | 2021-06-04 | 2021-06-04 | Electron beam-out device for electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113571393A true CN113571393A (en) | 2021-10-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110626810.8A Pending CN113571393A (en) | 2021-06-04 | 2021-06-04 | Electron beam-out device for electron gun |
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| CN (1) | CN113571393A (en) |
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2021
- 2021-06-04 CN CN202110626810.8A patent/CN113571393A/en active Pending
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