CN113567038A - Pressure sensing metal diaphragm, pressure sensing diaphragm group and pressure gauge - Google Patents
Pressure sensing metal diaphragm, pressure sensing diaphragm group and pressure gauge Download PDFInfo
- Publication number
- CN113567038A CN113567038A CN202110789152.4A CN202110789152A CN113567038A CN 113567038 A CN113567038 A CN 113567038A CN 202110789152 A CN202110789152 A CN 202110789152A CN 113567038 A CN113567038 A CN 113567038A
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- pressure
- diaphragm
- metal diaphragm
- sensing
- sensing metal
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- 239000002184 metal Substances 0.000 title claims abstract description 44
- 230000000149 penetrating effect Effects 0.000 claims abstract description 22
- 230000000903 blocking effect Effects 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 9
- 239000011295 pitch Substances 0.000 claims description 9
- 229910052755 nonmetal Inorganic materials 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 230000035515 penetration Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 230000005489 elastic deformation Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
- G01L7/082—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type construction or mounting of diaphragms
Abstract
The invention provides a pressure sensing metal diaphragm, comprising: the main body part extends in a flat shape, a through hole and a penetrating structure are arranged through the main body part, the through hole is used for a moving shaft group to penetrate and connect, and the penetrating structure enables the main body part to be stretched into a net-shaped structure when deformed under stress. All be the wave type with the diaphragm that solves current device and use, wavy diaphragm can reduce the sensitivity to small pressure variation, leads to the problem that current diaphragm formula manometer can't measure out actual pressure value accurately.
Description
Technical Field
The invention relates to the technical field of pressure measurement, in particular to a pressure sensing metal diaphragm, a pressure sensing diaphragm set and a pressure gauge.
Background
The pressure gauge works by the elastic deformation of the sensing device (Bourdon tube, diaphragm, bellows), and the movement mechanism transmits the deformation and displacement to drive the pointer to rotate and display the corresponding pressure value. Wherein, the diaphragm pressure gauge can effectively avoid the direct contact between the internal structure and the pressure source, so it is suitable for measuring the pressure source with high pH value, high viscosity, difficult cleaning and easy crystallization, so the diaphragm pressure gauge is quite common in daily life, such as the pressure sensing metal diaphragm disclosed in taiwan patent I705236 or M596338.
The diaphragms used in the above patents and the conventional art are all wave-shaped, however, the wave-shaped diaphragm will reduce the sensitivity to small pressure changes, and is therefore only suitable for measuring fluid with larger pressure; in addition, in the pressing process of the diaphragm, the extrusion pressure potential must exceed the intensity of the yield point to enable the diaphragm to generate plastic deformation and maintain the wavy shape, and the deformation of the diaphragm which generates plastic deformation when the diaphragm deforms correspondingly according to the size of the pressure source has an elastic deformation area with errors and non-linearity, so that the existing diaphragm pressure gauge cannot accurately measure the actual pressure value.
Therefore, there is a need to provide a novel and advanced pressure sensing metal diaphragm, pressure sensing diaphragm set and pressure gauge to solve the above problems.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a pressure sensing metal diaphragm, a pressure sensing diaphragm set and a pressure gauge, and solves the problem that the existing diaphragm type pressure gauge cannot accurately measure the actual pressure value.
(II) technical scheme
The main objective of the present invention is to provide a pressure sensing metal diaphragm, a pressure sensing diaphragm set and a pressure gauge, wherein the metal diaphragm for sensing pressure variation keeps flat and extends, so as to ensure that the stress and strain relationship of the metal diaphragm is in the linear elastic deformation region below the yield point, so as to measure pressure more accurately, and the main body portion can be stretched into a net structure when deformed by a force in cooperation with the penetrating structure, thereby measuring a pressure source with a smaller pressure value.
In order to achieve the above object, the present invention provides a pressure sensing metal diaphragm, which is assembled on a pressure gauge to deform correspondingly with pressure, the pressure sensing metal diaphragm comprising: the main body part extends in a flat shape, a through hole and a penetrating structure are arranged through the main body part, the through hole is used for a moving shaft group to be connected in a penetrating mode, then the main body part and the moving shaft form a synchronous moving relation, and the penetrating structure enables the main body part to be stretched into a net structure when the main body part is stressed and deformed.
To achieve the above object, the present invention further provides a pressure sensing diaphragm assembly, including: a pressure-sensing metal diaphragm and a pressure-sensing non-metal diaphragm as described above. The pressure-sensing non-metal diaphragm includes a first side portion and a second side portion opposite to the first side portion, the first side portion is disposed on one side of the pressure-sensing metal diaphragm in an overlapping manner to cover the penetrating structure of the pressure-sensing metal diaphragm, so that the penetrating structure of the pressure-sensing metal diaphragm is not communicated with the second side portion.
To achieve the above object, the present invention further provides a pressure gauge, including: a housing, a pressure sensing diaphragm set as described above, a moving shaft set, a pressure value display unit and a blocking valve. The shell is surrounded with a containing space and an inlet channel, and the inlet channel is used for fluid to enter; the pressure sensing diaphragm group is positioned in the containing space and divides the containing space into a first space and a second space which are not communicated with each other, and the second space is communicated with the inlet channel through a communicating port; the movable shaft group is connected with the pressure sensing diaphragm group in a penetrating way to form a linkage relation; the pressure value display component is located in the first space and connected to the moving shaft set for converting the moving amount of the moving shaft set into a relative pressure value to be displayed; the blocking valve is arranged on the moving shaft group to form a homokinetic relationship and is contained in the inlet channel, and when the moving shaft group moves to a preset limit position, the blocking valve covers the communication port to block fluid from flowing into the second space.
Drawings
FIG. 1 is a schematic view of a pressure gauge according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of fig. 1.
Fig. 3 is a first enlarged partial view of fig. 2.
Fig. 4 is a second partial enlarged view of fig. 2.
FIG. 5 is a perspective view of a pressure-sensing metal diaphragm according to an embodiment of the present invention.
Fig. 6 is a top view of fig. 5.
FIG. 7 is a top view of a pressure-sensing metal diaphragm in accordance with another embodiment of the present invention;
FIG. 8 is a schematic view of a pressure gauge according to another embodiment of the present invention.
Wherein, 1, 1A: a pressure sensing metal diaphragm; 11: a main body portion; 12: perforating; 13, 13A: cutting; 14, 14A: connecting a fulcrum; 21: a virtual center line; 22: a virtual boundary line; 23, 23A: the slot spacing; 3: a pressure sensing non-metallic diaphragm; 31: a first side portion; 32: a second side portion; 4: a pressure gauge; 41: a housing; 42: an accommodating space; 421: a first space; 422: a second space; 43: entering a channel; 44: a communication port; 45: a movable shaft group; 46: a pressure value display assembly; 47: a block valve; 48: a gap; 51: radial direction; 52: and (4) circumferential direction.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
the following description is given by way of example only, and not by way of limitation, of the scope of the invention.
Referring to fig. 1 to 6, which show an embodiment of the present invention, a pressure sensing metal diaphragm 1 of the present invention is assembled on a pressure gauge 4 to deform correspondingly with pressure, the pressure sensing metal diaphragm 1 includes: a main body portion 11.
The main body 11 extends flat or flat and horizontally, specifically, the main body 11 has no bending or twisting deformation structure, so that the whole main body 11 is in a linear elastic deformation region under the yield strength, and the deformation amount can be accurately corresponding to the size of the pressure source. More specifically, the main body 11 has a through hole 12 and a penetrating structure, the through hole 12 is used for a moving shaft set 45 to penetrate and connect, and further the main body 11 and the moving shaft set 45 have the same motion relationship, the penetrating structure makes the main body 11 sensitive to pressure change and correspondingly deformed and stretched into a net structure.
The penetrating structure includes a plurality of slits 13, and the slits 13 are arranged at intervals without being interconnected to ensure the structural strength of the main body 11. More specifically, the pressure-sensing metal diaphragm 1 defines a radial direction 51, and the plurality of slits 13 are arranged in a plurality of layers at intervals on the radial direction 51 centering on the through hole 12, so that the whole body portion 11 has the same structure to produce the same performance characteristics.
Preferably, the distance between any two adjacent notches 13 in the radial direction 51 is equal, which not only has the above-mentioned effects, but also facilitates the initial design of the structure, and the variation of the main body 11 after being pressed can be calculated in advance, so as to be able to reliably grasp the range of measurement applications.
Similarly, the number of the incisions 13 in each layer is equal (four in the embodiment), the extension length of the incisions 13 in each layer is the same, and the size of the incisions 13 in the radial direction 51 is the same, so that the layers have the same deformation characteristics at various angles (360 degrees) after being pressed.
In the present embodiment, the pressure-sensing metal diaphragm 1 defines a circumferential direction 52, the plurality of cuts 13 in each layer extend in a circular arc, and the extension of the plurality of cuts 13 in each layer in the circumferential direction 52 can form a virtual circular contour. In an overall view, after extending the plurality of cuts 13 on the same layer, the main body 11 can be configured like a plurality of concentric circles, and the circular structure design can be globally and uniformly changed and transmit the stress.
A connection fulcrum 14 is provided between two adjacent notches 13 of any layer in the circumferential direction 52, the extension of the connection fulcrum 14 of any layer in the radial direction 51 corresponds to the center of the notch 13 of another adjacent layer, the plurality of notches 13 and the plurality of connection fulcrums 14 form a cross-pulling relationship like a spider net, so that the pressure sensing metal diaphragm 1 can easily follow a small pressure and change correspondingly, in detail, when the pressure sensing metal diaphragm 1 is subjected to an external force, the plurality of connection fulcrums 14 located at the innermost layer part of the center react to displace upwards, and further the plurality of connection fulcrums 14 of the outer layer are pulled in a linkage manner, and the stratum layer is pulled like a domino effect.
Specifically, the high deformation amount generated when the pressure-sensing metal diaphragm 1 protrudes upward is caused by the deformation amount generated in the vertical direction by the plural connection fulcrums 14 being subjected to the upward acting force extension deformation like a lever, that is, the deflection deformation generated by each connection fulcrum 14 in each layer being subjected to the force. More specifically, the plurality of layers are numbered from the nearest to the through hole 12, the connection points 14 of the even-numbered layers are linearly spaced in the radial direction 51, and the connection points 14 of the odd-numbered layers are linearly spaced in the radial direction 51.
A virtual center straight line 21 passing through the center of the through hole 12 and between two adjacent notches 13 in the circumferential direction 52 (i.e. the connecting fulcrum 14), two virtual boundary straight lines 22 are symmetrically arranged around the virtual center straight line 21 and tangent to the two notches 13; wherein the distance between the two virtual boundary lines 22 is defined as a slot pitch 23, and preferably, the slot pitches 23 formed by any two adjacent notches 13 are the same in the circumferential direction 52. In the present embodiment, the slot pitch 23, the pitch between two adjacent layers in the radial direction 51, and the dimension (width) of each notch 13 in the radial direction 51 are all set to be 1mm, so as to have a more appropriate measurement range and a wider application field.
It should be noted that, depending on the environment and the object to be used, the pressure-sensing metal diaphragm 1 with different deformation properties under pressure can be obtained by changing at least one of the groove pitch 23, the pitch between two adjacent layers in the radial direction 51, and the size (width) of each notch 13 in the radial direction 51, for example, but not limited to, please refer to the pressure-sensing metal diaphragm 1 of another embodiment shown in fig. 7, which is different from the present embodiment in that: the width of the notch 13 is wider, the number of layers is smaller, the slot pitch 23 is larger, and the continuous area of the connection fulcrum 14 is wider.
Referring to fig. 1 to fig. 6, the present invention further provides a pressure sensing diaphragm assembly, including: the pressure-sensing metal diaphragm 1 and the pressure-sensing non-metal diaphragm 3 as described above.
The pressure-sensing non-metal diaphragm 3 includes a first side portion 31 and a second side portion 32 opposite to each other, the first side portion 31 is disposed on one side of the pressure-sensing metal diaphragm 1 in an overlapping manner to cover the penetrating structure of the pressure-sensing metal diaphragm 1, so that the penetrating structure of the pressure-sensing metal diaphragm 1 is not communicated with the second side portion 32; wherein the non-metallic pressure-sensing diaphragm 3 can isolate the fluid pressure source from contacting the metallic pressure-sensing diaphragm 1, so as to ensure the structural integrity and the lifetime of the metallic pressure-sensing diaphragm 1.
In practical use, the pressure-sensing non-metallic diaphragm 3 is selected from one of a rubber layer, a PTFE layer and an EPTFE layer, and has the advantages of flexibility, toughness and high elasticity.
The present invention also provides the pressure gauge 4, including: a housing 41, the pressure sensing diaphragm set as described above, the moving shaft set 45, a pressure value display unit 46 and a blocking valve 47.
The housing 41 defines an accommodating space 42 and an inlet channel 43, the inlet channel 43 is for fluid to enter; the pressure sensing diaphragm is positioned in the accommodation space 42 to divide the pressure sensing diaphragm into one of the non-connected areas
The first space 421 and a second space 422, the second space 422 is communicated with the inlet channel 43 through a communication port 44; the moving shaft set 45 is connected to the pressure sensing diaphragm set in a penetrating manner to form a linkage relationship; the pressure value display component 46 is located in the first space 421 and connected to the moving axis set 45 for converting the moving amount of the moving axis set 45 into a relative pressure value to be displayed; the blocking valve 47 is disposed in the moving shaft set 45 in a same-motion relationship and accommodated in the inlet passage 43, and when the moving shaft set 45 moves to a predetermined limit position, the blocking valve 47 covers the communication port 44 to block the fluid from flowing into the second space 422.
More specifically, the radial dimension 51 of the inlet passage 43 is larger than the aperture of the communication port 44, the radial dimension 51 of the blocking valve 47 is smaller than the radial dimension 51 of the inlet passage 43, so that a gap 48 is formed between the blocking valve 47 and the inlet passage 43 for the passage of fluid, and the radial dimension 51 of the blocking valve 47 is larger than the aperture of the communication port 44, so that the blocking valve 47 covers the communication port 44 to block the communication.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A pressure sensing metal diaphragm, for assembling in a pressure gauge in order to correspond to the deformation with the pressure, the pressure sensing metal diaphragm includes:
the main body part extends in a flat shape and is provided with a through hole and a penetrating structure in a penetrating way, the through hole is used for a moving shaft group to be connected in a penetrating way, then the main body part and the moving shaft form a synchronous moving relation, and the penetrating structure enables the main body part to be stretched into a net structure when the main body part is stressed and deformed.
2. The pressure-sensing metallic diaphragm of claim 1, wherein the penetration structure comprises a plurality of slits that are not interconnected but spaced apart.
3. The pressure-sensing metal diaphragm of claim 2, defining a radial direction, the plurality of slits being arranged in a plurality of layers spaced apart in the radial direction centered on the through-hole.
4. The pressure-sensing metal diaphragm of claim 3, wherein any two radially adjacent slits are spaced apart by the same distance.
5. The pressure-sensing metal diaphragm of claim 3, wherein the number of the slits in each of the layers is equal, the extension length of the slits in each of the layers is the same, and the size of the slits in each of the layers in the radial direction is the same.
6. The pressure-sensing metal diaphragm of claim 3, defining a circumferential direction, wherein the plurality of slits in each layer extend along a circular arc, and the extension of the plurality of slits in each layer along the circumferential direction forms a virtual circular contour.
7. The pressure-sensing metal diaphragm of claim 6, wherein a connection fulcrum is provided between two circumferentially adjacent slits of any one of the layers, and the connection fulcrum of any one of the layers extends in the radial direction corresponding to the center of the slit of another adjacent layer; the layers are numbered from the position closest to the through hole, the connecting fulcrums of the layers with even numbers are linearly arranged at intervals in the radial direction, and the connecting fulcrums of the layers with odd numbers are linearly arranged at intervals in the radial direction.
8. The pressure-sensing metal diaphragm of claim 6, wherein a virtual center line passes through the center of the through hole and between two circumferentially adjacent notches, and two virtual boundary lines are symmetrically disposed about the virtual center line and tangent to the two notches; wherein the distance between the two virtual boundary lines is defined as a slot pitch, and the slot pitches formed by any two adjacent notches are the same in the circumferential direction.
9. A pressure sensing diaphragm set comprising:
a pressure-sensing metal diaphragm according to any one of claims 1 to 8; and
the pressure sensing non-metal diaphragm comprises a first side part and a second side part which are opposite, the first side part is overlapped and arranged on one side of the pressure sensing metal diaphragm and is used for covering the penetrating structure of the pressure sensing metal diaphragm, so that the penetrating structure of the pressure sensing metal diaphragm is not communicated with the second side part.
10. A pressure gauge, comprising:
a shell, which encloses a containing space and an inlet channel for fluid to enter;
a pressure sensing diaphragm assembly as claimed in claim 9, positioned in the accommodating space to divide the accommodating space into a first space and a second space which are not communicated with each other, the second space being communicated with the inlet channel through a communication port;
a movable shaft set, which is connected with the pressure sensing diaphragm set in a penetrating way to form a linkage relation;
a pressure value display component located in the first space and connected to the moving shaft set for converting the moving amount of the moving shaft set into a relative pressure value to be displayed;
and the blocking valve is arranged on the moving shaft group to form a homokinetic relationship and is accommodated in the inlet channel, and when the moving shaft group moves to a preset limit position, the blocking valve covers the communication port to block the fluid from flowing into the second space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110789152.4A CN113567038A (en) | 2021-07-13 | 2021-07-13 | Pressure sensing metal diaphragm, pressure sensing diaphragm group and pressure gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110789152.4A CN113567038A (en) | 2021-07-13 | 2021-07-13 | Pressure sensing metal diaphragm, pressure sensing diaphragm group and pressure gauge |
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| Publication Number | Publication Date |
|---|---|
| CN113567038A true CN113567038A (en) | 2021-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110789152.4A Pending CN113567038A (en) | 2021-07-13 | 2021-07-13 | Pressure sensing metal diaphragm, pressure sensing diaphragm group and pressure gauge |
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB159168A (en) * | 1920-02-14 | 1922-01-05 | Zaverio Reviglio Della Veneria | Improvements in pressure gauges |
| GB1180093A (en) * | 1966-09-22 | 1970-02-04 | Pierre Huet | Pressure Sensitive Electro-mechanical Devices. |
| GB1485866A (en) * | 1973-09-10 | 1977-09-14 | Callisto | High accuracy pressure gauges |
| RU2042122C1 (en) * | 1992-07-24 | 1995-08-20 | Малое предприятие "Фактор" | Pressure indicator for fire extinguisher |
| CN1869610A (en) * | 2005-05-26 | 2006-11-29 | 梅特勒-托莱多有限公司 | Parallel-guiding mechanism for compact weighing system |
| WO2014049769A1 (en) * | 2012-09-27 | 2014-04-03 | 株式会社 エー・アンド・デイ | Capacitance type pressure sensor |
| CN205027475U (en) * | 2015-10-21 | 2016-02-10 | 北京布莱迪仪器仪表有限公司 | Exceed press mold piece table |
| CN207005294U (en) * | 2017-06-13 | 2018-02-13 | 中山市富茂密封科技有限公司 | A kind of piston ring for rotating shaft sealing |
| EP3415759A1 (en) * | 2017-06-13 | 2018-12-19 | SISTO Armaturen S.A. | Membrane with conductive structures |
| CN110375895A (en) * | 2019-07-18 | 2019-10-25 | 浙江大学 | Multi-functional Grazing condition finger print touch sensor |
| CN111386447A (en) * | 2017-12-24 | 2020-07-07 | 磅秤 （2008）有限公司 | Planar load sensor assembly |
-
2021
- 2021-07-13 CN CN202110789152.4A patent/CN113567038A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB159168A (en) * | 1920-02-14 | 1922-01-05 | Zaverio Reviglio Della Veneria | Improvements in pressure gauges |
| GB1180093A (en) * | 1966-09-22 | 1970-02-04 | Pierre Huet | Pressure Sensitive Electro-mechanical Devices. |
| GB1485866A (en) * | 1973-09-10 | 1977-09-14 | Callisto | High accuracy pressure gauges |
| RU2042122C1 (en) * | 1992-07-24 | 1995-08-20 | Малое предприятие "Фактор" | Pressure indicator for fire extinguisher |
| CN1869610A (en) * | 2005-05-26 | 2006-11-29 | 梅特勒-托莱多有限公司 | Parallel-guiding mechanism for compact weighing system |
| WO2014049769A1 (en) * | 2012-09-27 | 2014-04-03 | 株式会社 エー・アンド・デイ | Capacitance type pressure sensor |
| CN205027475U (en) * | 2015-10-21 | 2016-02-10 | 北京布莱迪仪器仪表有限公司 | Exceed press mold piece table |
| CN207005294U (en) * | 2017-06-13 | 2018-02-13 | 中山市富茂密封科技有限公司 | A kind of piston ring for rotating shaft sealing |
| EP3415759A1 (en) * | 2017-06-13 | 2018-12-19 | SISTO Armaturen S.A. | Membrane with conductive structures |
| CN111386447A (en) * | 2017-12-24 | 2020-07-07 | 磅秤 （2008）有限公司 | Planar load sensor assembly |
| CN110375895A (en) * | 2019-07-18 | 2019-10-25 | 浙江大学 | Multi-functional Grazing condition finger print touch sensor |
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Application publication date: 20211029 |
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