CN113567030B - Plane series non-coupling six-dimensional wrist force sensor - Google Patents
Plane series non-coupling six-dimensional wrist force sensor Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
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Abstract
The invention discloses a planar series coupling-free six-dimensional wrist force sensor, which comprises an integrally formed elastic structure body and a strain gauge group adhered to the elastic structure body; the elastic structure body comprises a fixed table, an internal and external connecting body, a central loading table, a T-shaped elastic branched chain and an elastic main beam which are used for connecting the fixed table, the internal and external connecting body, the central loading table, the T-shaped elastic branched chain and the elastic main beam, wherein the T-shaped elastic branched chain and the elastic main beam respectively form a cross structure and are uniformly arranged in a staggered manner at an angle of 45 degrees; the invention separates the force and the moment outside and inside the measuring surface, realizes the decoupling measurement respectively, realizes the decoupling of the force and the moment from the structure, effectively solves the problem of the coupling crosstalk of the force and the moment signals, has the characteristics of compact structure, low height, adjustable rigidity and the like, and is suitable for the rapid sensing and measurement of the wrist part of the industrial and cooperative robot to the multidimensional force and the moment when the industrial and cooperative robot executes the operation in the industrial scenes such as polishing, grinding, assembly and the like.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a planar series coupling-free six-dimensional wrist force sensor.
Background
With the rapid development of industrial and cooperative robot technologies in recent years, higher requirements are put forward on the force sense detection and sensing capability of the external operating environment of the industrial robot in industrial scenes needing precise operation, such as polishing and grinding, precise grabbing, contour tracking, dragging teaching, autonomous assembly and the like. The industrial robot with the force sense perception can make a quick response to an unknown operating environment correctly, quickly and reliably, and dynamically adjust the position and the posture of the industrial robot in time, so that the flexible operation and the environment adaptability of the industrial robot are realized. The six-dimensional force and moment sensor is an important carrier for realizing space full force and moment information sensing, and the response time of pose adjustment of the industrial robot is quickly determined in real time for detecting and processing force and moment information, so that the operation precision and the operation reliability of the industrial robot are influenced. The six-dimensional force and moment detection technology is an important component of the robot sensing technology, and the coupling of signals between the six-dimensional force and moment sensors has obvious influence on the response time, the signal resolving complexity, the data detection and processing circuit design and the like, so that the force control precision of a robot tail end actuating mechanism is influenced.
The document retrieval of the prior art shows that Chinese patent CN102095534B provides a six-dimensional force and torque sensor with an upper-layer and lower-layer cross beam structure, and the cross beam is provided with an I-shaped through hole, the outer end of the cross beam structure and a sensor main body frame form a sliding pair design, so that the inter-dimensional crosstalk caused by floating beams in the traditional cross beam structure can be eliminated, the measurement accuracy of the sensor is improved, but due to the adoption of threaded assembly, the structure has gaps, the abrasion and the looseness can be caused during use, and the problems of zero drift, poor positioning performance, repeated calibration and the like exist.
Chinese patent CN103940544B provides a design of a double cross beam combined finger joint six-dimensional force sensor, which satisfies the requirement of multi-dimensional measurement and realizes the miniaturization of the sensor structure, but the sensor is integrally connected by an upper layer and a lower layer of structure through threads, i.e. an assembly type elastomer structure is adopted, which increases the assembly process, the overall height, the weight and the load of the installation part of the sensor, and is not beneficial to the flexible operation of the end execution part.
Chinese patent CN201811372150 provides a design of a six-dimensional force sensor with a "T" shaped structure, and by providing transverse through holes on a radial beam and a floating beam, the rigidity and the measurement resolution of the sensor are considered, but the vertical placement of the floating beam increases the height of the sensor, so that the sensor deforms and increases due to the whole stress, and further the operation precision of a terminal executive component is reduced.
Chinese patent CN201911306482 provides a six-dimensional force and torque sensor design of a double-I-shaped cross beam structure, a main beam of a classic cross beam structure is used for respectively thinning the parts of internal force and external force and torque of a measuring surface to form an orthogonal I-shaped main beam structure, the sensitivity of sensor measurement is improved, and the coupling between dimensions is reduced, but the structural design of the double-I-shaped cross beam structure reduces the measuring range of the sensor and cannot reduce the coupling of bending moment to transverse force output signals.
Although the six-dimensional force sensor structure is innovatively and improved in design, aiming at the urgent requirements of the industrial and cooperative robot fields on force control response time and precision, the current six-dimensional force sensor design still has the problems of complex structure, high height, weak bearing and carrying overload capacity, complex assembly, large inter-dimensional coupling and the like, so that the six-dimensional force sensor with the novel structure is designed and developed, the six-dimensional force sensor is convenient to process and manufacture, series problems caused by the inter-dimensional coupling are remarkably reduced or eliminated, and the height is low, the external measuring circuit is easy to design and detect, and the six-dimensional force sensor has important significance.
Disclosure of Invention
In order to solve the above problems, the present invention provides a planar series coupling-free six-dimensional wrist force sensor.
The technical scheme of the invention is as follows: the planar series coupling-free six-dimensional wrist force sensor comprises an elastic structure body and a strain gauge group; the elastic structure body comprises a fixed table positioned on the outer ring, an inner and outer connecting body and a central loading table which are coaxially arranged with the fixed table, 4T-shaped elastic branched chains connected between the fixed table and the inner and outer connecting body, and 4 elastic main beams connected between the inner and outer connecting body and the central loading table; the 4T-shaped elastic branched chains and the 4 elastic main beams are all arranged in a positive cross shape along the circumference by taking the axis of the central loading platform as the center, and are uniformly arranged in a staggered way at an angle of 45 degrees; the fixing table is an octagonal frame, and the inner side surface and the outer side surface of the fixing table are in transition through round corners;
the T-shaped elastic branched chain comprises an elastic beam and floating beams, the outer end of the elastic beam is connected to the middle part of the floating beam, the inner end of the elastic beam is fixedly connected to the outer side of the inner and outer connecting bodies, the floating beams are arranged on one frame of the fixed table and integrated with the frame, and 4 floating beams are distributed on 4 frames of the fixed table at intervals of 90 degrees;
the inner and outer connecting bodies are frame bodies with four corners and four sides symmetrical, the four corners are in a convex shape and respectively point to the middle part of a frame of a fixed station without a T-shaped elastic branched chain, gaps are reserved to play a role in transverse overload protection, the middle part of the frame of the inner and outer connecting bodies is an inner concave part so as to facilitate the adhesion of strain gauges, and the inner end of an elastic beam is connected to the outer side surface of the inner concave part;
the central loading platform is positioned at the center of the elastic structure body, four rectangular elastic main beams are distributed in a cross shape around the axis of the central loading platform at intervals of 90 degrees, and the inner ends of the elastic main beams are fixedly connected with the outer side surface of the central loading platform; the outer ends of the four elastic main beams extend to the inner sides of the four corners of the inner and outer connectors respectively and are fixedly connected;
the strain gauge group is arranged on the elastic main beam and the elastic beam to form.
The frame of the fixed table, which is not provided with the T-shaped elastic branched chain, is provided with a fixed through hole; the central loading platform is provided with mounting through holes which are uniformly distributed along the circumference by taking the axis of the central loading platform as the center and penetrate through the upper surface and the lower surface.
The elastic beam is provided with a dumbbell-shaped double-connection through hole which is formed by combining two circular through holes and a rectangular through hole; the floating beam is symmetrically provided with two rectangular through holes by using the central line of the elastic beam, one side of each rectangular through hole is superposed with the side surface of the elastic beam, the floating beam is divided into an inner floating beam and an outer floating beam by the rectangular through holes, the width of the outer floating beam is d1, the width of the inner floating beam is d2, and the d1 and the d2 can be unequal.
The inner side surface of the concave part in the inner and outer connecting bodies is close to the central loading platform and is provided with a certain gap; the inner sides of the four corners of the inner and outer connectors are rectangular abdicating gaps matched with the shapes of the four elastic main beams, and a certain gap is arranged between the inner side of each inner connector and the side of each elastic main beam.
The fixing table, the inner and outer connecting bodies, the central loading table, the elastic main beam, the elastic beam of the T-shaped elastic branched chain and the floating beam are all integrally formed structures and are arranged on the same central plane in the thickness direction; the fixed platform, the internal and external connectors and the central loading platform are integrally connected in series with the elastic main beam through the T-shaped elastic branched chain.
The thicknesses of the fixed platform, the inner and outer connecting bodies, the elastic beams of the T-shaped elastic branched chains and the floating beams are equal and are D, the thickness of the elastic main beam is D, the thickness of the central loading platform is L, and D is less than D and less than L.
Compared with the prior art, the invention has the beneficial technical effects that:
1. the invention adopts a fixed platform, an internal and external connecting body and a central loading platform to form an integral series connection structure through a T-shaped elastic branched chain and an elastic main beam in sequence, separates the external force and the internal force of a measuring surface from the moment, realizes the respective decoupling measurement, realizes the decoupling of the force and the moment from the structure, and effectively solves the problem of the coupling crosstalk of force and moment signals;
the T-shaped elastic branched chains and the elastic main beams respectively form a cross structure and are uniformly arranged in a staggered manner at an angle of 45 degrees, the space gap of the traditional cross beam structure arrangement is effectively utilized, the structure is more compact, the overall height of the sensor is low due to the planar serial structure design, and the operation error of a tail end actuating mechanism caused by the deformation of the sensor can be obviously reduced;
3. the design of the inner floating beam and the outer floating beam realizes that the rigidity of the connecting tail end of the T-shaped structure and the inner connecting body is adjustable, so that the integral rigidity of the sensor and the measurement sensitivity of the force and the moment in the measurement plane are improved;
4. the processing cost is low, the integral forming manufacturing can be realized, and the problems of low measurement precision, repeated calibration and the like caused by assembly gaps and errors can be obviously reduced or eliminated;
5. the reasonable gap arrangement between the inner connecting body and the fixed platform ensures that the sensor has the transverse force overload protection capability;
6. the elimination of the coupling among the dimensions of each measurement bridge circuit of the sensor can obviously reduce the complexity of an external circuit and a measurement decoupling algorithm and improve the response time of the sensor, and the sensor is particularly suitable for the rapid sensing and measurement of the wrist of an industrial and cooperative robot on multi-dimensional force and moment when the industrial and cooperative robot executes operation in industrial scenes such as polishing, grinding, assembly and the like.
Drawings
FIG. 1 is a perspective view of an elastomeric structure;
FIG. 2 is a left side view of the elastic structure;
FIG. 3 is a front view of an elastomeric structure;
FIG. 4 isbase:Sub>A cross-sectional view A-A of FIG. 3;
FIG. 5 is a perspective view of the present invention;
FIG. 6 is a front view of the present invention;
FIG. 7 is a schematic view of measurement in the second embodiment;
in the figure: 1. the device comprises a fixed platform, 11 fixing through holes, 2 internal and external connecting bodies, 3 a central loading platform, 31 mounting through holes, 4T-shaped elastic branched chains, 41 floating beams, 411 internal floating beams, 412 external floating beams, 42 elastic beams, 43 double connecting through holes, 44 rectangular through holes, 5 elastic main beams and 6 strain gauges.
Detailed Description
The first embodiment is as follows: referring to fig. 1-4, the planar series-connection uncoupled six-dimensional wrist force sensor in the figures is characterized in that: the sensor comprises an elastic structure body and a strain gauge group; the elastic structure body comprises a fixed table positioned on the outer ring, an inner and outer connecting body and a central loading table which are coaxially arranged with the fixed table, 4T-shaped elastic branched chains connected between the fixed table and the inner and outer connecting bodies, and 4 elastic main beams, 4T-shaped elastic branched chains and 4 elastic main beams which are connected between the inner and outer connecting bodies and the central loading table, wherein the elastic main beams are all arranged in a regular cross shape along the circumference by taking the axis of the central loading table as the center, and the two elastic main beams are staggered and uniformly arranged at an angle of 45 degrees; the fixed station be the octagon frame, the fixed station inside and outside side passes through the fillet transition.
The T-shaped elastic branched chain comprises an elastic beam and floating beams, the outer end of the elastic beam is connected to the middle part of the floating beam, the inner end of the elastic beam is fixedly connected to the outer side of the inner and outer connecting bodies, the floating beams are arranged on one frame of the fixed table and integrated with the frame, and 4 floating beams are distributed on 4 frames of the fixed table at intervals of 90 degrees;
the four corners of the frame body are convex and point to the middle part of the frame of the fixed station without the T-shaped elastic branched chain, and gaps are reserved to play a role in transverse overload protection;
the central loading platform is positioned at the center of the elastic structure body, four rectangular elastic main beams are distributed in a cross shape around the axis of the central loading platform at intervals of 90 degrees, and the inner ends of the elastic main beams are fixedly connected with the outer side surface of the central loading platform; the outer ends of the four elastic main beams respectively extend to the inner side surfaces of the four corners of the inner and outer connectors and are fixedly connected;
the strain gauge group is arranged on the elastic main beam and the elastic beam to form the strain gauge group.
Two cross beam plane series structure of this sensor, be integrative structure, compact arrange in the coplanar, compare with the patent document who mentions in the background art, the elastomer is planar structure, the occupation space is littleer when the thickness direction is using, and then reduce the operating error who brings for actuating mechanism because of the sensor warp, be integration symmetrical structure in addition and arrange, through the problem of range upon range of installation combination scheme in the contrast patent of avoiding, there is not the assembly degree of difficulty and the not hard up problem of maintaining again in the assembly later stage, load stress and strain distribution are also more even on the elastic construction body after the loading, the problem that assembly structure load concentrates at the installation site can not appear.
The invention separates the force and the moment outside the measuring surface and in the measuring surface, realizes the respective decoupling measurement, realizes the decoupling of the force and the moment structurally, effectively solves the problem of the coupling crosstalk of force and moment signals, and has the characteristics of compact structure, low height, adjustable rigidity and the like.
The frame of the fixed table, which is not provided with the T-shaped elastic branched chain, is provided with a fixed through hole; the central loading platform is provided with mounting through holes which are uniformly distributed along the circumference by taking the axis of the central loading platform as the center and penetrate through the upper surface and the lower surface of the central loading platform, the mounting through holes are used for bridging the sensor between the industrial or cooperative arm wrist and the end effector, and the uniformly distributed mounting through holes are beneficial to transferring external loads to the elastic structure body.
The elastic beam is provided with a dumbbell-shaped double-connection through hole which is formed by combining two circular through holes and a rectangular through hole; the floating beam is symmetrically provided with two rectangular through holes by using the central line of the elastic beam, one side of each rectangular through hole is superposed with the side surface of the elastic beam, the floating beam is divided into an inner floating beam and an outer floating beam by the rectangular through holes, the width of the outer floating beam is d1, the width of the inner floating beam is d2, and the d1 and the d2 can be unequal.
The inner side surface of the concave part in the inner and outer connecting bodies is close to the central loading platform and is provided with a certain gap; the inner sides of four corners of the inner and outer connectors are rectangular abdicating notches matched with the four elastic main beams in shape, and the inner side surfaces of the abdicating notches are close to the side surfaces of the elastic main beams and are provided with certain gaps. This internal and external connection body shape structure reserves sufficient space range for the elasticity girder under the prerequisite that does not increase the whole overall dimension of elastic construction body, ensures that sensor structure is more small and exquisite compact.
The fixed table, the internal and external connecting bodies, the central loading table, the elastic main beam, the elastic beam of the T-shaped elastic branched chain and the floating beam are all integrally formed structures and are arranged on the same central plane in the thickness direction; the fixed platform, the inner and outer connecting bodies and the central loading platform are integrally connected in series from outside to inside through the T-shaped elastic branched chain and the elastic main beam.
The thicknesses of the fixed platform, the inner and outer connecting bodies, the elastic beams of the T-shaped elastic branched chains and the floating beams are equal and are D, the thickness of the elastic main beam is D, the thickness of the central loading platform is L, and D < D < L.
The second embodiment: referring to fig. 5 to 7, on the basis of the first embodiment, the strain gauge group is formed by pasting a plurality of resistance-type or foil-type strain gauges on the elastic beam and the elastic main beam according to the actually required force and moment to be measured, and 12 strain gauges are pasted on the upper and lower surfaces of the elastic main beam to form three strain gauge groups and are responsible for detecting the normal force and the transverse bending moment acting outside the upper and lower symmetric surfaces of the central loading platform; 12 strain gauges are stuck on two side faces of the elastic beam which vertically penetrates through the double-connection hole to form three strain gauge groups and are responsible for detecting transverse force and normal torque acting on the upper and lower symmetrical faces of the central loading platform.
In FIG. 7, two coordinate systems OX are defined with the exact center of the center load table as the origin of coordinates 0 Y 0 Z and OX I Y I Z，OX 0 Y 0 And OX I Y I Flour made from flourA face and located on the upper and lower symmetrical planes of the elastic structure, OX I The axis is collinear with the longitudinal symmetry line of the elastic beam on a certain T-shaped elastic branched chain, the Z direction is collinear with the normal symmetry center of the central loading platform, and OX 0 Y 0 Z can encircle OX I Y I Z is obtained by rotating OZ at 45 degrees anticlockwise; x 0 Two elastic main beams on the shaft, 2 strain gauges are stuck on each surface of the upper surface and the lower surface of each elastic main beam, and Y is arranged on each surface of the upper surface and the lower surface of each elastic main beam 0 The device comprises two elastic main beams on a shaft, wherein 1 strain gauge is stuck to each surface of the upper surface and the lower surface of each elastic main beam, and the strain gauges corresponding to the positions of the lower surface and the upper surface are represented in brackets; x I Two elastic beams on the shaft, 2 strain gauges are stuck on each side surface of two side surfaces of each elastic beam, Y I Two elastic beams are arranged on the shaft, and 1 strain gauge is stuck on each side surface of two side surfaces of each elastic beam.
Wherein, the strain gauges R1-R4 form a Wheatstone full bridge circuit 1 for measuring the in-plane transverse force Fx I (ii) a The strain gauges R5-R8 form a Wheatstone full bridge circuit 2 for measuring the in-plane transverse force Fy I (ii) a The strain gauges R9-R12 form a Wheatstone full-bridge circuit 3 for measuring out-of-plane torque Mz; the strain gauges R13-R16 form a Wheatstone full-bridge circuit 4 for measuring the out-of-plane normal force Fz 0 (ii) a The strain gauges R17-R20 form a Wheatstone full bridge circuit 5 for measuring out-of-plane transverse bending moment Mx 0 (ii) a The strain gauges R21-R24 form a Wheatstone full-bridge circuit 6 for measuring the out-of-plane transverse bending moment My 0 (ii) a In the embodiment and the drawings, only the pasting positions, the quantity and the modes of the strain gauges for decoupling are listed, and the pasting positions, the quantity and the modes of the strain gauges can be selected according to the actual requirements of decoupling, and the method and the device belong to the protection scope of the patent.
The above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art; the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein.
Claims (6)
1. The six-dimensional wrist force sensor is characterized in that: the sensor comprises an elastic structure body and a strain gauge group; the elastic structure body comprises a fixed table positioned on the outer ring, an inner and outer connecting body and a central loading table which are coaxially arranged with the fixed table, 4T-shaped elastic branched chains connected between the fixed table and the inner and outer connecting body, and 4 elastic main beams connected between the inner and outer connecting body and the central loading table; the 4T-shaped elastic branched chains and the 4 elastic main beams are all arranged in a regular cross shape along the circumference by taking the axis of the central loading platform as the center, and are uniformly arranged in a staggered manner at an angle of 45 degrees; the fixing table is an octagonal frame, and the inner side surface and the outer side surface of the fixing table are in transition through round corners;
the T-shaped elastic branched chain comprises an elastic beam and floating beams, the outer end of the elastic beam is connected to the middle part of the floating beam, the inner end of the elastic beam is fixedly connected to the outer side of the inner and outer connecting bodies, the floating beams are arranged on one frame of the fixed table and integrated with the frame, and 4 floating beams are distributed on 4 frames of the fixed table at intervals of 90 degrees;
the inner and outer connecting bodies are frame bodies with four corners and four sides symmetrical, the four corners are in a convex shape and point to the middle part of a frame of the fixed station without the T-shaped elastic branched chain respectively, a gap is reserved to play a role in transverse overload protection, the middle part of the frame of the inner and outer connecting bodies is an inner concave part so as to be convenient for pasting a strain gauge, and the inner end of the elastic beam is connected to the outer side surface of the inner concave part;
the central loading platform is positioned at the center of the elastic structure body, four rectangular elastic main beams are distributed in a cross shape around the axis of the central loading platform at intervals of 90 degrees, and the inner ends of the elastic main beams are fixedly connected with the outer side surface of the central loading platform; the outer ends of the four elastic main beams respectively extend to the inner side surfaces of the four corners of the inner and outer connectors and are fixedly connected;
the strain gauge group is arranged on the elastic main beam and the elastic beam to form.
2. The planar series-connection uncoupled six-dimensional wrist force sensor according to claim 1, wherein: the frame of the fixed table without the T-shaped elastic branched chain is provided with a fixed through hole; the central loading platform is provided with mounting through holes which are uniformly distributed along the circumference by taking the axis of the central loading platform as the center and penetrate through the upper surface and the lower surface.
3. The planar series-coupled six-dimensional wrist force sensor according to claim 1, wherein: the elastic beam is provided with a dumbbell-shaped double-connection through hole which is formed by combining two circular through holes and a rectangular through hole; the floating beam is symmetrically provided with two rectangular through holes by using the central line of the elastic beam, one side of each rectangular through hole is superposed with the side surface of the elastic beam, the floating beam is divided into an inner floating beam and an outer floating beam by the rectangular through holes, the width of the outer floating beam is d1, the width of the inner floating beam is d2, and the d1 and the d2 can be unequal.
4. The planar series-connection uncoupled six-dimensional wrist force sensor according to claim 1, wherein: the inner side surface of the concave part in the inner and outer connecting bodies is close to the central loading platform and is provided with a certain gap; the inner sides of the four corners of the inner and outer connectors are rectangular abdicating notches matched with the four elastic main beams in shape, and the inner side faces of the inner and outer connectors are provided with certain gaps close to the side faces of the elastic main beams.
5. The planar series-coupled six-dimensional wrist force sensor according to claim 1, wherein: the fixing table, the inner and outer connecting bodies, the central loading table, the elastic main beam, the elastic beam of the T-shaped elastic branched chain and the floating beam are all integrally formed structures and are arranged on the same central plane in the thickness direction; the fixed platform, the internal and external connectors and the central loading platform are integrally connected in series with the elastic main beam through the T-shaped elastic branched chain.
6. The planar series-coupled six-dimensional wrist force sensor according to claim 1, wherein: the thicknesses of the fixed platform, the inner and outer connecting bodies, the elastic beams of the T-shaped elastic branched chains and the floating beams are equal and are D, the thickness of the elastic main beam is D, the thickness of the central loading platform is L, and D is less than D and less than L.
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| CN114993543B (en) * | 2022-05-24 | 2023-06-27 | 马洪文 | Dual multidimensional force measurement system |
| CN115683434B (en) * | 2022-10-31 | 2023-07-11 | 哈尔滨工业大学 | Six-axis force/moment measuring device of space manipulator suitable for inchworm crawling |
| CN117433685B (en) * | 2023-12-19 | 2024-03-15 | 锐马（福建）电气制造有限公司 | Overload-prevention graded weighing six-dimensional force sensor |
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| US6038933A (en) * | 1997-07-15 | 2000-03-21 | Mts Systems Corporation | Multi-axis load cell |
| JP3261653B2 (en) * | 1999-07-07 | 2002-03-04 | 独立行政法人産業技術総合研究所 | Finger-mounted 6-axis force sensor |
| JP2007315878A (en) * | 2006-05-25 | 2007-12-06 | Mitsubishi Electric Corp | Multi-axis force/moment sensor |
| CN103698076B (en) * | 2014-01-03 | 2015-08-19 | 东南大学 | A kind of six-dimensional force for realizing Range Extension and torque sensor |
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