CN113552511A - Magnetic field detection device and system based on photoacoustic effect - Google Patents

Magnetic field detection device and system based on photoacoustic effect Download PDF

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Publication number
CN113552511A
CN113552511A CN202110867502.4A CN202110867502A CN113552511A CN 113552511 A CN113552511 A CN 113552511A CN 202110867502 A CN202110867502 A CN 202110867502A CN 113552511 A CN113552511 A CN 113552511A
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China
Prior art keywords
magnetic field
photoacoustic
light source
ultrasonic detector
magnetostrictive
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Withdrawn
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CN202110867502.4A
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Chinese (zh)
Inventor
杨丹
刘洋
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Shaanxi Fanruiwei Photoelectric Technology Co ltd
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Shaanxi Fanruiwei Photoelectric Technology Co ltd
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Priority to CN202110867502.4A priority Critical patent/CN113552511A/en
Publication of CN113552511A publication Critical patent/CN113552511A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/032Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
    • G01R33/0327Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect with application of magnetostriction

Abstract

The application relates to a magnetic field detection device and a system based on a photoacoustic effect, in particular to the field of magnetic field detection; according to the magnetic field monitoring device based on the photoacoustic effect, under the action of a magnetic field, the magnetostrictive part deforms according to the size of the magnetic field, so that the photoacoustic material part wrapped outside the magnetostrictive part also deforms, acoustic signals generated by the photoacoustic material part are changed, the variation of the acoustic signals inside the device is detected through the ultrasonic detector, and the magnetic field intensity to be detected is obtained according to the corresponding relation between the variation condition of the photoacoustic signals and the magnetic field intensity to be detected; because this application changes the change of magnetic field into the change of optoacoustic, this application establishes the relation between outside pulling force and the optoacoustic signal through the principle of optoacoustic effect and reflects the pulling force size, and the optoacoustic signal is produced by light again, because the change of light is sensitive, so the device sensitivity of this application is high, the precision is high.

Description

Magnetic field detection device and system based on photoacoustic effect
Technical Field
The application relates to the field of magnetic field detection, in particular to a magnetic field detection device and system based on a photoacoustic effect.
Background
The magnetic field is a special invisible substance, the magnetic field is not composed of atoms or molecules, but the magnetic field exists objectively, the magnetic field has the radiation characteristic of wave particles, the magnetic field exists around the magnets, the interaction between the magnets is mediated by the magnetic field, and therefore the two magnets can act without being in contact with each other on a physical layer. Current, moving charge, magnets or a special form of matter present in the space surrounding the changing electric field. Since the magnetism of a magnet is derived from an electric current, which is the movement of an electric charge, in general terms, a magnetic field is generated by the change in the moving charge or electric field.
In the prior art, the measurement of the magnetic field is mainly performed by a hall effect magnetometer or a rotating coil magnetometer.
However, the measurement error of the hall effect magnetometer is generally 0.1 to 5%, the measurement error of the rotating coil magnetometer is generally 0.1 to 1%, the measurement accuracy of the two magnetic field measurement devices is low, and the obtained magnetic field measurement result is inaccurate.
Disclosure of Invention
The invention aims to provide a magnetic field detection device and system based on photoacoustic effect aiming at the defects in the prior art, so as to solve the problems that the measurement error of a Hall effect magnetometer is generally 0.1-5%, the measurement error of a rotating coil magnetometer is generally 0.1-1%, the measurement precision of the two devices for measuring magnetic field is low, and the obtained magnetic field measurement result is inaccurate.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, the present application provides a magnetic field monitoring device based on photoacoustic effect, the device comprising: the ultrasonic probe comprises a shell, a pulse light source, an ultrasonic detector, a magnetostrictive part and a photoacoustic material part; the pulse light source and the ultrasonic detector are respectively arranged on two sides of one end inside the cavity structure of the shell, the photoacoustic material portion is arranged at one end, opposite to the pulse light source and the ultrasonic detector, inside the cavity structure of the shell, the optical signal generated by the pulse light source is reflected to the ultrasonic detector through the photoacoustic material portion, and the photoacoustic material portion is wrapped and arranged outside the magnetostrictive portion.
Optionally, a surface of a side of the photoacoustic material portion close to the pulse light source and the ultrasonic probe is provided with a plurality of tapered protrusions.
Optionally, the surfaces of the plurality of conical protrusions at one end of the photoacoustic material portion are each provided with a nano noble metal particle layer.
Optionally, the surface of each of the plurality of tapered protrusions is provided with a layer of nano-precious metal particles.
Optionally, the inner walls of the housing are each provided with a sound insulation portion.
Optionally, the material of the photoacoustic material portion is urethane rubber.
Optionally, the material of the magnetostrictive portion is a mn0.98ni0.02cosi alloy.
In a second aspect, the present application provides a magnetic field monitoring system based on photoacoustic effect, the system comprising: the computer is in communication connection with an ultrasonic detector of the magnetic field monitoring device, acquires the change condition of a photoacoustic signal acquired by the ultrasonic detector, and obtains the magnetic field strength to be detected according to the corresponding relation between the change condition of the photoacoustic signal and the magnetic field strength to be detected.
The invention has the beneficial effects that:
the application provides a magnetic field monitoring devices based on optoacoustic effect, the device includes: the ultrasonic probe comprises a shell, a pulse light source, an ultrasonic detector, a magnetostrictive part and a photoacoustic material part; the pulse light source and the ultrasonic detector are respectively arranged on two sides of one end inside the cavity structure of the shell, the photoacoustic material part is arranged at one end inside the cavity structure of the shell, which is opposite to the pulse light source and the ultrasonic detector, an optical signal generated by the pulse light source is reflected to the ultrasonic detector through the photoacoustic material part, and the photoacoustic material part is wrapped outside the magnetostrictive part; when a magnetic field to be detected needs to be detected, the device is placed in the magnetic field to be detected, the pulse light source is turned on, an optical signal generated by the pulse light source acts on the photoacoustic material part and is converted into an acoustic signal, the magnetostrictive part deforms according to the size of the magnetic field under the action of the magnetic field, so that the photoacoustic material part wrapped outside the magnetostrictive part also deforms, the acoustic signal generated by the photoacoustic material part is changed, the variation of the acoustic signal inside the device is detected through the ultrasonic detector, and the magnetic field intensity to be detected is obtained according to the corresponding relation between the variation condition of the photoacoustic signal and the magnetic field intensity to be detected; because this application turns into the change of optoacoustic with the change in magnetic field, optical signal is at the in-process that turns into the acoustic signal, the loss is less, it is higher to make the magnetic field intensity degree of accuracy that awaits measuring that this application's magnetic field monitoring devices detected, and because optical signal turns into the sensitivity of acoustic signal higher, it is also higher to make the sensitivity that detects the magnetic field intensity that obtains, thereby make the device of this application can be simple, sensitive, accurate detection magnetic field intensity that awaits measuring, this application establishes the relation between outside pulling force and the optoacoustic signal through the principle of optoacoustic effect and reflects the pulling force size promptly, optoacoustic signal is produced by light again, because the change of light is sensitive, so the device sensitivity of this application is high, high accuracy.
Drawings
Fig. 1 is a schematic structural diagram of a magnetic field monitoring apparatus based on a photoacoustic effect according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another magnetic field monitoring apparatus based on a photoacoustic effect according to an embodiment of the present invention.
Icon: 10-a housing; 20-a pulsed light source; 30-an ultrasound probe; 40-a magnetostrictive portion; 50-a photoacoustic material portion; 60-nano noble metal particle layer.
Detailed Description
In order that the objects, principles, aspects and advantages of the present invention will become more apparent, the present invention will be described in detail below with reference to specific embodiments thereof and with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a magnetic field monitoring apparatus based on a photoacoustic effect according to an embodiment of the present invention; as shown in fig. 1, the present application provides a magnetic field monitoring device based on photoacoustic effect, the device includes: a housing 10, a pulse light source 20, an ultrasonic probe 30, a magnetostrictive section 40, and a photoacoustic material section 50; the pulse light source 20 and the ultrasonic detector 30 are respectively arranged at two sides of one end inside the cavity structure of the housing 10, the photoacoustic material portion 50 is arranged at one end inside the cavity structure of the housing 10 opposite to the pulse light source 20 and the ultrasonic detector 30, the optical signal generated by the pulse light source 20 is reflected to the ultrasonic detector 30 through the photoacoustic material portion 50, and the photoacoustic material portion 50 is wrapped and arranged outside the magnetostrictive portion 40.
The pulsed light source 20, the ultrasonic detector 30, the magnetostrictive portion 40 and the photoacoustic material portion 50 are disposed inside the housing 10, the shape of the housing 10 is determined according to actual requirements, and is not specifically limited herein, generally, in practical application, the housing 10 is configured as a rectangular parallelepiped cavity structure, the size of the housing 10 of the rectangular parallelepiped cavity structure is determined according to actual requirements, and is not specifically limited herein, the pulsed light source 20 and the ultrasonic detector 30 are respectively disposed at two sides of one end inside the housing 10, the photoacoustic material portion 50 is disposed at one end inside the cavity structure of the housing 10 opposite to the pulsed light source 20 and the ultrasonic detector 30, and the optical signal generated by the pulsed light source 20 is reflected to the ultrasonic detector 30 through the photoacoustic material portion 50, the photoacoustic material portion 50 is wrapped outside the magnetostrictive portion 40, that is, the photoacoustic material portion 50 is wrapped around the magnetostrictive portion 40, and the photoacoustic material part 50 and the magnetostrictive part 40 are disposed at the bottom of the cavity structure of the housing 10, the pulsed light source 20 and the ultrasonic probe 30 are respectively disposed at both sides of the top of the cavity structure of the housing 10 such that the optical signal generated by the pulsed light source 20 can be transmitted into the photoacoustic material part 50, the photoacoustic material part 50 converts the optical signal into an acoustic signal, and the photoacoustic material part 50 converts the optical signal into the amount of the acoustic signal, which is determined according to the surface area of the photoacoustic material part 50 and the amount of the optical signal, the ultrasonic probe 30 is used to detect the acoustic signal, generally, the probe head of the ultrasonic probe 30 faces the photoacoustic material part 50, detects the acoustic signal converted by the photoacoustic material part 50 to obtain the parameters of the acoustic signal, the magnetostrictive part 40 is disposed inside the photoacoustic material part 50, and the volume of the magnetostrictive part 40 is affected by the magnetic field, the relationship between the volume of the magnetostrictive part 40 and the magnetic field is usually two, the first is that the volume of the magnetostrictive part 40 is positively correlated with the magnetic field, that is, the volume of the magnetostrictive part 40 is increased according to the increase of the magnetic field, the volume of the magnetostrictive part 40 is increased, the second is that the volume of the magnetostrictive part 40 is negatively correlated with the magnetic field, that is, the volume of the magnetostrictive part 40 is decreased according to the increase of the magnetic field, for convenience of description, the volume of the magnetostrictive part 40 is positively correlated with the magnetic field, the shape of the magnetostrictive part 40 is generally sheet-shaped, the sheet-shaped magnetostrictive part 40 is greatly influenced by the magnetic field, and further, the detected magnetic field intensity is relatively accurate, the surface area of the sheet-shaped magnetostrictive part 40 is smaller than the surface area of the bottom of the housing 10, the photoacoustic material part 50 is wrapped on the magnetostrictive part 40, when the volume of the magnetostrictive part 40 is affected by a magnetic field, the volume of the photoacoustic material part 50 is increased, in order to make the detection of the magnetic field more accurate, the material of the photoacoustic material part 50 is also set to be a flexible material, when the magnetic field to be detected needs to be detected, the device of the present application is placed in the magnetic field to be detected, the pulse light source 20 is turned on, the optical signal generated by the pulse light source 20 acts on the photoacoustic material part 50 and is converted into an acoustic signal, under the action of the magnetic field, the magnetostrictive part 40 deforms according to the size of the magnetic field, so that the photoacoustic material part 50 wrapped outside the magnetostrictive part 40 also deforms, the acoustic signal generated by the photoacoustic material part 50 is further changed, the variation of the acoustic signal inside the device is detected by the ultrasonic detector 30, and according to the corresponding relationship between the variation condition of the photoacoustic signal and the magnetic field strength to be detected, obtaining the magnetic field intensity to be measured; because the change of the magnetic field is converted into the photoacoustic change, the loss of the optical signal is smaller in the process of converting the optical signal into the acoustic signal, the accuracy of the magnetic field intensity to be detected, which is detected by the magnetic field monitoring device, is higher, and the sensitivity of the magnetic field intensity, which is detected, is higher because the sensitivity of the optical signal converted into the acoustic signal is higher, so that the magnetic field intensity to be detected can be simply, sensitively and accurately detected by the device, in the practical application, the change condition of the photoacoustic signal is related to the magnetic field intensity to be detected according to the practical requirement, and no specific limitation is made herein; in practical application, since the volume of the magnetostrictive part 40 is affected by the magnetic field, after the magnetic field to be detected is detected, the volume of the magnetostrictive part 40 contracts or expands to the volume before the magnetic field is not detected, that is, the device of the present application can be used for detecting the magnetic field for many times.
The magnetic field monitoring devices based on the photoacoustic effect provided by the application have the following beneficial effects: firstly, the design establishes the relationship between external tension and photoacoustic signals through the principle of photoacoustic effect to reflect the tension, the photoacoustic signals are generated by light, and the design has high sensitivity and high precision because the change of the light is sensitive; secondly, after the measurement is finished, the magnetostrictive part 40 can spontaneously recover the original shape, the measurement is not affected by the previous measurement, and the device can be repeatedly used for multiple times, namely the device has good stability.
Fig. 2 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention; as shown in fig. 2, optionally, a surface of the photoacoustic material portion 50 on a side close to the pulsed light source 20 and the ultrasonic probe 30 is provided with a plurality of tapered protrusions.
The shape of the plurality of conical protrusions can be a cone, and also can be a pyramid without specific limitation, and the tip positions of the plurality of conical protrusions can absorb more light energy due to the tip effect, so that the sensitivity of the photoacoustic material part 50 of the device to light signals is improved, and the sensitivity of the device to magnetic field detection is improved.
Fig. 3 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention; as shown in fig. 3, the magnetostrictive portion 40 may optionally be provided with a plurality of corresponding conical protrusions at the positions of the plurality of conical protrusions of the photoacoustic material portion 50.
The plurality of conical protrusions on the magnetostrictive part 40 have larger change of the magnetostrictive part 40 due to larger influence of the magnetic field strength to the tip effect, the generated photoacoustic signal has larger change, the sensitivity of the device is improved, and the sensitivity of the device is further improved.
Fig. 4 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention; as shown in fig. 4, optionally, the surfaces of the plurality of tapered protrusions at one end of the photoacoustic material portion 50 are each provided with a nano noble metal particle layer 60.
Divide into two parts about photoacoustic material portion 50, set up nanometer noble metal grained layer 60 on partly a plurality of toper archs on this photoacoustic material portion 50 the left side or the right of a part, so, there is nanometer noble metal grained layer 60 on a plurality of toper archs on one side on this photoacoustic material portion 50, do not have nanometer noble metal grained layer 60 on a plurality of toper archs on the other side, make a plurality of toper archs of both sides produce different photoacoustic signals, carry out the difference analysis to two sets of signals simultaneously this moment, the influence that will effectual avoidance environmental factor brought, make the detection precision to the magnetic field higher.
Fig. 5 is a schematic structural diagram of another magnetic field monitoring apparatus based on the photoacoustic effect according to an embodiment of the present invention; as shown in fig. 5, optionally, the surfaces of the plurality of tapered protrusions are each provided with a layer 60 of nano noble metal particles.
The plurality of tapered convex surfaces on the photoacoustic material portion 50 are provided with the nano precious metal particle layer 60, light irradiates on the nano precious metal particle layer 60 to generate surface plasmon resonance, and more light energy is absorbed, that is, the photoacoustic material portion 50 absorbs more energy, so that the photoacoustic material portion 50 has larger change and is more sensitive to light, thereby improving the sensitivity of the device and further improving the measurement accuracy.
Optionally, sound insulation portions are disposed on the inner walls of the housing 10.
The sound insulation part is made of dense steel and can effectively rebound generated photoacoustic signals. The improvement enables the generated photoacoustic signal to be better monitored by the photoacoustic detector, thereby improving the sensitivity of the device and further improving the accuracy of the measurement.
Alternatively, the material of the photoacoustic material portion 50 is urethane rubber.
Because polyurethane rubber has high resilience, magnetostrictive portion 40 is changeed and is driven photoacoustic material portion 50 and produce deformation for the device sensitivity obtains improving, because this polyurethane rubber has high resilience, and magnetostrictive portion 40 is changeed and is driven photoacoustic material and produce deformation, makes the device sensitivity obtain improving.
Optionally, the material of the magnetostrictive portion 40 is a mn0.98ni0.02cosi alloy.
The Mn0.98Ni0.02CoSi alloy has reversible large magnetostriction effect at the temperature near room temperature, and the raw material of the alloy is composed of transition group elements and main group elements, and the cost of the alloy is far lower than that of a giant magnetostriction material made of rare earth-transition group alloy. The material reduces the manufacturing cost under the condition of not reducing the detection sensitivity, and can also carry out detection at room temperature; the Mn0.98Ni0.02CoSi alloy has reversible large magnetostriction effect at the temperature near room temperature, and the raw material is composed of transition group elements and main group elements, so that the cost is far lower than that of the giant magnetostriction material made of rare earth-transition group alloy. The material can reduce the manufacturing cost without reducing the detection sensitivity, and can perform detection at room temperature.
The application provides a magnetic field monitoring devices based on optoacoustic effect, the device includes: a housing 10, a pulse light source 20, an ultrasonic probe 30, a magnetostrictive section 40, and a photoacoustic material section 50; the pulse light source 20 and the ultrasonic detector 30 are respectively arranged at two sides of one end inside the cavity structure of the shell 10, the photoacoustic material part 50 is arranged at one end inside the cavity structure of the shell 10 opposite to the pulse light source 20 and the ultrasonic detector 30, an optical signal generated by the pulse light source 20 is reflected to the ultrasonic detector 30 through the photoacoustic material part 50, and the photoacoustic material part 50 is wrapped and arranged outside the magnetostrictive part 40; when a magnetic field to be detected needs to be detected, the device is placed in the magnetic field to be detected, the pulse light source 20 is turned on, an optical signal generated by the pulse light source 20 acts on the photoacoustic material part 50 and is converted into an acoustic signal, the magnetostrictive part 40 deforms according to the size of the magnetic field under the action of the magnetic field, so that the photoacoustic material part 50 wrapped outside the magnetostrictive part 40 also deforms, the acoustic signal generated by the photoacoustic material part 50 is changed, the variation of the acoustic signal inside the device is detected through the ultrasonic detector 30, and the magnetic field intensity to be detected is obtained according to the corresponding relation between the variation condition of the photoacoustic signal and the magnetic field intensity to be detected; because this application turns into the change of optoacoustic with the change in magnetic field, optical signal is at the in-process that turns into the acoustic signal, and the loss is less, and the magnetic field intensity degree of accuracy that awaits measuring that makes the magnetic field monitoring devices of this application detect and obtain is higher to because optical signal turns into the sensitivity of acoustic signal higher, make the sensitivity that detects the magnetic field intensity that obtains also higher, thereby make the device of this application can be simple, sensitive, accurate detection magnetic field intensity that awaits measuring.
The application provides a magnetic field monitoring system based on optoacoustic effect, the system includes: the computer is in communication connection with the ultrasonic detector 30 of the magnetic field monitoring device, obtains the change condition of the photoacoustic signal acquired by the ultrasonic detector 30, and obtains the magnetic field strength to be measured according to the corresponding relation between the change condition of the photoacoustic signal and the magnetic field strength to be measured.
It should be understood that the above embodiments are described in some detail and with some particularity, but should not be construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the claims.

Claims (8)

1. A photoacoustic effect-based magnetic field detection apparatus, the apparatus comprising: the ultrasonic probe comprises a shell, a pulse light source, an ultrasonic detector, a magnetostrictive part and a photoacoustic material part; the pulse light source with ultrasonic detector sets up respectively the both sides of the inside one end of cavity structure of casing, optoacoustic material portion sets up the cavity structure of casing inside with the pulse light source with the relative one end of ultrasonic detector, just the optical signal that the pulse light source produced passes through optoacoustic material portion reflects to on the ultrasonic detector, optoacoustic material portion parcel sets up the outside of magnetostriction portion.
2. The photoacoustic effect-based magnetic field detecting apparatus according to claim 1, wherein a surface of the photoacoustic material portion on a side close to the pulsed light source and the ultrasonic probe is provided with a plurality of tapered protrusions.
3. The photoacoustic effect-based magnetic field detection apparatus according to claim 2, wherein the surface of each of the plurality of tapered protrusions at one end of the photoacoustic material portion is provided with a layer of nano noble metal particles.
4. The photoacoustic effect-based magnetic field detecting apparatus according to claim 2, wherein the surface of each of the plurality of tapered protrusions is provided with a layer of nano noble metal particles.
5. The photoacoustic effect-based magnetic field detecting apparatus according to claim 3 or 4, wherein the inner walls of the housing are each provided with a sound insulating portion.
6. The photoacoustic effect-based magnetic field detection apparatus according to claim 5, wherein the material of the photoacoustic material portion is urethane rubber.
7. The photoacoustic effect-based magnetic field detecting apparatus according to claim 6, wherein the material of the magnetostrictive portion is an alloy of Mn0.98Ni0.02CoSi.
8. A photoacoustic effect-based magnetic field detection system, characterized in that it comprises: the magnetic field detection device based on the photoacoustic effect of any one of claims 1 to 7, wherein the computer is in communication connection with the ultrasonic detector of the magnetic field detection device, acquires the change condition of the photoacoustic signal acquired by the ultrasonic detector, and obtains the magnetic field strength to be detected according to the corresponding relationship between the change condition of the photoacoustic signal and the magnetic field strength to be detected.
CN202110867502.4A 2021-07-30 2021-07-30 Magnetic field detection device and system based on photoacoustic effect Withdrawn CN113552511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110867502.4A CN113552511A (en) 2021-07-30 2021-07-30 Magnetic field detection device and system based on photoacoustic effect

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Application Number Priority Date Filing Date Title
CN202110867502.4A CN113552511A (en) 2021-07-30 2021-07-30 Magnetic field detection device and system based on photoacoustic effect

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CN202110867502.4A Withdrawn CN113552511A (en) 2021-07-30 2021-07-30 Magnetic field detection device and system based on photoacoustic effect

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116165576A (en) * 2022-12-23 2023-05-26 南方电网数字电网研究院有限公司 TMrz axis magnetic field sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116165576A (en) * 2022-12-23 2023-05-26 南方电网数字电网研究院有限公司 TMrz axis magnetic field sensor
CN116165576B (en) * 2022-12-23 2023-12-12 南方电网数字电网研究院有限公司 TMRz axis magnetic field sensor

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Application publication date: 20211026