CN113552295A - Controllable growth lead sulfide composite film gas sensor and preparation method thereof - Google Patents
Controllable growth lead sulfide composite film gas sensor and preparation method thereof Download PDFInfo
- Publication number
- CN113552295A CN113552295A CN202110952192.6A CN202110952192A CN113552295A CN 113552295 A CN113552295 A CN 113552295A CN 202110952192 A CN202110952192 A CN 202110952192A CN 113552295 A CN113552295 A CN 113552295A
- Authority
- CN
- China
- Prior art keywords
- lead sulfide
- gas sensor
- film
- preparing
- controllable growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052981 lead sulfide Inorganic materials 0.000 title claims abstract description 72
- 229940056932 lead sulfide Drugs 0.000 title claims abstract description 72
- 239000002131 composite material Substances 0.000 title claims abstract description 34
- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- 239000010408 film Substances 0.000 claims description 84
- 239000000758 substrate Substances 0.000 claims description 38
- 230000007704 transition Effects 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 25
- 239000007864 aqueous solution Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 16
- 238000001179 sorption measurement Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000008367 deionised water Substances 0.000 claims description 11
- 229910021641 deionized water Inorganic materials 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 10
- 150000002500 ions Chemical class 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004528 spin coating Methods 0.000 claims description 7
- RVPVRDXYQKGNMQ-UHFFFAOYSA-N lead(2+) Chemical compound [Pb+2] RVPVRDXYQKGNMQ-UHFFFAOYSA-N 0.000 claims description 6
- -1 transition metal sulfide Chemical class 0.000 claims description 6
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000003575 carbonaceous material Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 229910052723 transition metal Inorganic materials 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000001548 drop coating Methods 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 230000002194 synthesizing effect Effects 0.000 claims description 3
- 238000010041 electrostatic spinning Methods 0.000 claims description 2
- 230000036470 plasma concentration Effects 0.000 claims description 2
- 238000007650 screen-printing Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 45
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical group [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 20
- 239000011787 zinc oxide Substances 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical group S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 7
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 239000002105 nanoparticle Substances 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 229910052979 sodium sulfide Inorganic materials 0.000 description 4
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 4
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- YUKQRDCYNOVPGJ-UHFFFAOYSA-N thioacetamide Chemical compound CC(N)=S YUKQRDCYNOVPGJ-UHFFFAOYSA-N 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 206010014561 Emphysema Diseases 0.000 description 1
- 229910015667 MoO4 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 206010006451 bronchitis Diseases 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 208000023504 respiratory system disease Diseases 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- RWVGQQGBQSJDQV-UHFFFAOYSA-M sodium;3-[[4-[(e)-[4-(4-ethoxyanilino)phenyl]-[4-[ethyl-[(3-sulfonatophenyl)methyl]azaniumylidene]-2-methylcyclohexa-2,5-dien-1-ylidene]methyl]-n-ethyl-3-methylanilino]methyl]benzenesulfonate Chemical compound [Na+].C1=CC(OCC)=CC=C1NC1=CC=C(C(=C2C(=CC(C=C2)=[N+](CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C)C=2C(=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C)C=C1 RWVGQQGBQSJDQV-UHFFFAOYSA-M 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229910052815 sulfur oxide Inorganic materials 0.000 description 1
- DLFVBJFMPXGRIB-UHFFFAOYSA-N thioacetamide Natural products CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- ALRFTTOJSPMYSY-UHFFFAOYSA-N tin disulfide Chemical compound S=[Sn]=S ALRFTTOJSPMYSY-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical compound S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- YZYKBQUWMPUVEN-UHFFFAOYSA-N zafuleptine Chemical compound OC(=O)CCCCCC(C(C)C)NCC1=CC=C(F)C=C1 YZYKBQUWMPUVEN-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0037—NOx
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The invention provides a controllable growth lead sulfide composite film gas sensor and a preparation method thereof, belonging to the technical field of gas sensing.
Description
Technical Field
The invention belongs to the technical field of gas sensing, and particularly relates to a controllable growth lead sulfide composite film gas sensor and a preparation method thereof.
Background
In the process of industrial production, transportation and the like, a large amount of toxic and harmful gases including nitrogen oxides, carbon oxides, sulfur oxides and the like are emitted. These toxic and harmful gases not only cause environmental problems, but also harm human health. Such as nitrogen dioxide (NO)2) It not only pollutes water, soil and atmosphere, but also is one of main causes of acid rain and photochemical smog, and can cause serious harm to human lung, and cause respiratory system diseases such as emphysema and bronchitis. Therefore, the prepared gas sensor with high sensitivity, good stability and low cost has important application value for an environmental quality detection and early warning system.
The semiconductor gas sensor has the advantages of high sensitivity, simple operation, low cost and the like, but the poor selectivity and high working temperature limit the wide application of the semiconductor gas sensor. As an important narrow-band-gap semiconductor material, the metal sulfide has good application prospect in various fields due to the unique physical and chemical characteristics and the characteristics of low cost, easy preparation and high sensitivity. Lead sulfide is a common direct band gap p-type semiconductor material, is widely applied to the fields of solar cells, infrared detectors and the like, and also shows excellent room-temperature working performance in the field of gas sensors. However, because lead sulfide is difficult to dissolve/disperse in most solvents, a sensitive film with uneven distribution is easily formed by adopting the traditional processes of spin coating, drop coating and the like, and the process stability of the sensor is greatly influenced. The continuous ionic layer adsorption and reaction method (SILAR) is based on heterogeneous reaction between ions adsorbed on a solid-liquid interface and dissolved ions, has the advantages of simple process, controllable process, low synthesis temperature and low cost, and the material prepared by the method has controllable grain size and uniform distribution. The continuous ion layer adsorption and reaction method comprises the specific steps of sequentially soaking the substrate in a stable precursor solution, and washing away unreacted ions on the surface by using deionized water.
However, because the surface of the substrate is smooth, the non-uniform lead sulfide is difficult to be directly synthesized on the surface of the substrate by using a continuous ionic layer adsorption and reaction method, and the gas-sensitive performance of the gas sensor is greatly influenced.
Disclosure of Invention
The invention provides a controllable growth lead sulfide composite film gas sensor and a preparation method thereof aiming at the problems in the prior art, and the controllable uniform growth of lead sulfide is realized and the gas-sensitive performance is improved by synthesizing a transition layer sensitive film on the surface of a substrate.
The technical scheme adopted by the invention is as follows:
a controllable growth lead sulfide composite film gas sensor comprises a substrate, interdigital electrodes prepared on the surface of the substrate and a lead sulfide film synthesized on the surface of the substrate by a continuous ionic layer adsorption and reaction method, and is characterized in that a transition layer sensitive film with adsorption performance on metal ions is arranged between the substrate and the lead sulfide film.
Furthermore, the transition layer sensitive film is made of an n-type semiconductor material, so that a p-n heterojunction can be formed with the lead sulfide film, and the gas-sensitive performance of a single lead sulfide material can be improved.
Furthermore, the material of the transition layer sensitive film is a composite material compounded by one or more of metal oxide, two-dimensional transition metal sulfide or carbon-based material.
Further, the metal oxide is zinc oxide, tin oxide, titanium oxide, or the like, the two-dimensional transition metal sulfide is molybdenum disulfide, tin disulfide, tungsten disulfide, or the like, and the carbon-based material is reduced graphene oxide, or the like.
Furthermore, the thickness of the transition layer sensitive film is 100-200 nm.
Furthermore, the distance between the interdigital electrodes is 100-200 mu m, and the interdigital electrodes are made of gold.
A preparation method of a controllable growth lead sulfide composite film gas sensor is characterized by comprising the following steps:
step 1: cleaning and pretreating a substrate, and then preparing an interdigital electrode on the surface of the substrate;
step 2: preparing a transition layer sensitive film with the adsorption performance on metal ions on the surface of the substrate obtained in the step 1;
and step 3: and (3) synthesizing a lead sulfide film on the surface of the transition layer sensitive film obtained in the step (2) by adopting a continuous ionic layer adsorption and reaction method, and finally preparing the controllable growth lead sulfide composite film gas sensor.
Further, the specific synthesis process of step 3 is as follows: and (3) respectively preparing a lead ion source aqueous solution and a sulfide ion source aqueous solution with plasma concentrations, sequentially immersing the sample obtained in the step (2) into the lead ion source aqueous solution, deionized water, the sulfide ion source aqueous solution and the deionized water for 1min, and performing deposition cycle for multiple times to obtain the lead sulfide film after drying.
Furthermore, the ion concentration range of the lead ion source aqueous solution and the sulfur ion source aqueous solution in the step 3 is 0.001-1 mol/L.
Further, the number of cycles in step 3 is not less than 3.
Further, the drying temperature in the step 3 is in a range of 45-65 ℃.
Furthermore, in the step 1, the distance between the interdigital electrodes is 100-200 μm, and the interdigital electrodes are made of gold.
Further, in the step 2, the transition layer sensitive film is prepared by adopting processes such as spin coating, drop coating, spray coating, electrostatic spinning or screen printing and the like.
Further, the material of the transition layer sensitive film in the step 2 is an n-type semiconductor material.
Further, the material of the transition layer sensitive film in the step 2 is a composite material compounded by one or more of metal oxide, two-dimensional transition metal sulfide or carbon-based material.
Further, the thickness of the transition layer sensitive film in the step 2 is 100-200 nm.
The invention has the beneficial effects that:
1. the invention provides a controllable growth lead sulfide composite film gas sensor and a preparation method thereof.A transition layer sensitive film is prepared on the surface of a substrate, and then a continuous ionic layer adsorption and reaction method is adopted to synthesize a lead sulfide film, so that lead sulfide nano particles are successfully and uniformly and efficiently distributed on the surface of the substrate to obtain the lead sulfide gas sensitive film with controllable grain size;
2. the invention solves the problem that the lead sulfide nano-particles are difficult to grow on the surface of the smooth substrate, and the prepared gas sensor has high response, good stability and low cost and is suitable for large-scale production;
3. preferably, when the n-type semiconductor material is used as the transition layer sensitive film, the transition layer sensitive film and the lead sulfide film can form a p-n heterojunction, so that the gas-sensitive performance of the lead sulfide single material is improved.
Drawings
FIG. 1 is a schematic structural diagram of a controllable growth lead sulfide composite thin film gas sensor obtained in example 1 of the present invention;
FIG. 2 is a comparative scanning electron micrograph of a zinc oxide/lead sulfide thin film obtained in example 1 of the present invention and a lead sulfide thin film obtained in a comparative example, wherein (a) is a zinc oxide/lead sulfide thin film and (b) is a lead sulfide thin film;
FIG. 3 shows NO of the controlled growth lead sulfide composite thin film gas sensor obtained in example 1 of the present invention2A dynamic response test pattern;
FIG. 4 is a graph showing the repeatability of a gas sensor with a controlled growth of a lead sulfide composite thin film obtained in example 1 of the present invention;
FIG. 5 shows NO of lead sulfide thin film gas sensor obtained in comparative example of the present invention2A dynamic response test pattern.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the following embodiments and the accompanying drawings.
Example 1
The embodiment provides a controllable growth lead sulfide composite film gas sensor, which comprises a flexible substrate, a transition layer sensitive film and a lead sulfide film, wherein the flexible substrate, the transition layer sensitive film and the lead sulfide film are sequentially arranged from bottom to top, gold interdigital electrodes with a spacing of 200 mu m are prepared on the surface of the flexible substrate, the transition layer sensitive film is a zinc oxide film, and the thickness of the transition layer sensitive film is about 100 nm.
The embodiment also provides a preparation method of the controllable growth lead sulfide composite film gas sensor, which specifically comprises the following steps:
step 1: cleaning and pretreating a Polyimide (PI) flexible substrate, and then preparing gold interdigital electrodes with the spacing of 200 mu m on the surface of the flexible substrate;
step 2: preparing a zinc oxide precursor film on the surface of the flexible substrate obtained in the step 1, specifically: with zinc acetate dihydrate (Zn (CH)3COO)2·2H2O) as precursor and 2-methoxy ethanol (C)3H8O2) Monoethanolamine (C) as main solvent2H7NO) as stabilizer with a reaction solution in which Zn (CH)3COO)2·2H2O and C2H7The concentration of NO is 0.75 mol/L; stirring the prepared reaction solution at 60 ℃ for 30min, and cooling to room temperature to obtain a sol solution; dropwise adding a small drop of sol solution to the surface of the flexible substrate obtained in the step 1, spin-coating at the rotating speed of 4000rpm for 30s, drying at the temperature of 200 ℃ for 15min, and repeating the spin-coating and drying processes for 3 times to obtain a uniform zinc oxide precursor film;
and step 3: putting the zinc oxide precursor film obtained in the step 2 into a high-temperature furnace at the temperature of 300 ℃ for annealing for 1h to obtain a zinc oxide transition layer film;
and 4, step 4: adopting a continuous ionic layer adsorption and reaction method to synthesize the lead sulfide film on the surface of the zinc oxide transition layer film obtained in the step 3, which specifically comprises the following steps: respectively preparing a lead nitrate aqueous solution and a sodium sulfide aqueous solution with the ion concentration of 0.01mol/L, sequentially immersing the sample obtained in the step 3 into the lead nitrate aqueous solution, the deionized water, the sodium sulfide aqueous solution and the deionized water for 1min, respectively, taking the immersion as a deposition cycle, circulating for 5 times, and drying on a 60 ℃ hot bench to obtain the lead sulfide film. Finally, the controllable growth lead sulfide composite film gas sensor is prepared.
Scanning electron microscope tests are carried out on the controllable growth lead sulfide composite film gas sensor obtained in the embodiment, and the results are shown in fig. 2(a), it can be found that a film formed by uniformly dispersed lead sulfide nano-particles is attached to the surface of the flexible substrate, the grain size of the film is 30-50 nm, and no obvious agglomeration phenomenon exists, which indicates that the preparation method provided by the embodiment can be used for obtaining the lead sulfide gas-sensitive film with controllable and uniform grain size.
The controllable growth lead sulfide composite film gas sensor obtained in the embodiment is put into NO2And measuring the resistance value in the test system, and judging the performance of the sensor according to the change of the resistance value. Introducing air, keeping the humidity at 60% RH, and introducing 10ppm NO after the sensor is stabilized2The gas is aged for several times for one time, after the response results of the sensors are basically consistent, the dynamic response test of the sensors is started, and NO with the concentration of 0.5ppm, 1ppm, 2ppm, 4ppm, 6ppm, 8ppm and 10ppm is introduced in sequence2A gas. NO by the sensor shown in FIG. 32As can be seen from the dynamic response test chart and the repeated performance test chart shown in FIG. 4, the controllable growth lead sulfide composite thin film gas sensor obtained in the embodiment is used for 0.5-10 ppm of NO2All have excellent resolving power and good repeatability.
Example 2
The embodiment provides a controllable growth lead sulfide composite film gas sensor, which comprises a flexible substrate, a transition layer sensitive film and a lead sulfide film from bottom to top, wherein gold interdigital electrodes with the spacing of 200 mu m are prepared on the surface of the flexible substrate, and the transition layer sensitive film is molybdenum disulfide (MoS)2) And the thickness of the film is about 200 nm.
The embodiment also provides a preparation method of the controllable growth lead sulfide composite film gas sensor, which specifically comprises the following steps:
step 1: cleaning and pretreating a Polyimide (PI) flexible substrate, and then preparing gold interdigital electrodes with the spacing of 200 mu m on the surface of the flexible substrate;
step 2: preparing a molybdenum disulfide film on the surface of the flexible substrate obtained in the step 1, specifically: 0.4mmol of sodium molybdate dihydrate (Na) was weighed2MoO4·2H2O) and 1mmol of thioacetamide (CH)3CSNH2) Dissolving in 30ml deionized water, stirring for 20min, transferring the obtained solution to autoclave with polytetrafluoroethylene lining, and autoclaveAfter keeping at 200 ℃ for 36h, taking out and cooling to room temperature; centrifugally cleaning the obtained product with deionized water for several times, and drying at 60 ℃ for 12 hours to obtain molybdenum disulfide nano particles; preparing the obtained molybdenum disulfide nano particles into 1mg/mL aqueous solution, spin-coating the surface of the flexible substrate obtained in the step 1 at the rotating speed of 2000rpm for 30s, drying at 200 ℃ for 15min, and repeating the spin-coating and drying processes for 3 times to obtain a uniform molybdenum disulfide film;
and step 3: adopting a continuous ionic layer adsorption and reaction method to synthesize the lead sulfide film on the surface of the molybdenum disulfide film obtained in the step 2, which specifically comprises the following steps: respectively preparing a lead nitrate aqueous solution and a sodium sulfide aqueous solution with the ion concentration of 0.01mol/L, sequentially immersing the sample obtained in the step 2 into the lead nitrate aqueous solution, the deionized water, the sodium sulfide aqueous solution and the deionized water for 1min, respectively, taking the immersion as a deposition cycle, circulating for 5 times, and drying on a 60 ℃ hot bench to obtain the lead sulfide film. Finally, the controllable growth lead sulfide composite film gas sensor is prepared.
Comparative example
The comparison example provides a lead sulfide film gas sensor which comprises a flexible substrate and a lead sulfide film from bottom to top in sequence, wherein gold interdigital electrodes with the spacing of 200 mu m are prepared on the surface of the flexible substrate.
Compared with the example 1, the method for preparing the lead sulfide thin film gas sensor is only different from the method for preparing the lead sulfide thin film gas sensor in the example 1 in that the steps 2 and 3 for preparing the zinc oxide transition layer thin film are omitted, and the rest steps are unchanged.
Scanning electron microscope test is carried out on the obtained lead sulfide film gas sensor, and the result is shown in fig. 2(b), so that the surface of the flexible substrate is very smooth, which indicates that no obvious lead sulfide gas-sensitive material is attached to the surface of the sensor. The resistance value was measured in the same manner as in example 1 to obtain NO of the sensor shown in FIG. 52And (3) a dynamic response test chart shows that the reference resistance of the sensor is approximately infinite and has no gas-sensitive performance, which shows that the lead sulfide gas-sensitive material is not obviously attached to the surface of the sensor, so that the gas-sensitive performance is not available.
Claims (9)
1. A controllable growth lead sulfide composite film gas sensor comprises a substrate, interdigital electrodes prepared on the surface of the substrate and a lead sulfide film synthesized on the surface of the substrate by a continuous ionic layer adsorption and reaction method, and is characterized in that a transition layer sensitive film with adsorption performance on metal ions is arranged between the substrate and the lead sulfide film.
2. The controlled growth lead sulfide composite thin film gas sensor according to claim 1, wherein the material of the transition layer sensitive thin film is an n-type semiconductor material.
3. The controllable growth lead sulfide composite film gas sensor according to claim 1, wherein the material of the transition layer sensitive film is a composite material compounded by one or more of metal oxide, two-dimensional transition metal sulfide or carbon-based material.
4. The controllable growth lead sulfide composite thin film gas sensor according to claim 1, wherein the thickness of the transition layer sensitive thin film is 100-200 nm.
5. A preparation method of the controllable growth lead sulfide composite film gas sensor as claimed in any one of claims 1 to 4, characterized by comprising the following steps:
step 1: cleaning and pretreating a substrate, and then preparing an interdigital electrode on the surface of the substrate;
step 2: preparing a transition layer sensitive film with the adsorption performance on metal ions on the surface of the substrate obtained in the step 1;
and step 3: and (3) synthesizing a lead sulfide film on the surface of the transition layer sensitive film obtained in the step (2) by adopting a continuous ionic layer adsorption and reaction method, and finally preparing the controllable growth lead sulfide composite film gas sensor.
6. The method for preparing the controllable growth lead sulfide composite film gas sensor according to claim 5, wherein the synthesis process of the step 3 is as follows: and (3) respectively preparing a lead ion source aqueous solution and a sulfide ion source aqueous solution with plasma concentrations, sequentially immersing the sample obtained in the step (2) into the lead ion source aqueous solution, deionized water, the sulfide ion source aqueous solution and the deionized water for 1min, and performing deposition cycle for multiple times to obtain the lead sulfide film after drying.
7. The method for preparing the controllable growth lead sulfide composite film gas sensor according to claim 6, wherein the ion concentration range of the lead ion source aqueous solution and the sulfide ion source aqueous solution in the step 3 is 0.001-1 mol/L.
8. The method for preparing the controllable growth lead sulfide composite film gas sensor according to claim 6, wherein the number of cycles in the step 3 is not less than 3.
9. The method for preparing the controllable growth lead sulfide composite film gas sensor according to claim 5, wherein the transition layer sensitive film is prepared by adopting spin coating, drop coating, spray coating, electrostatic spinning or screen printing in the step 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110952192.6A CN113552295A (en) | 2021-08-19 | 2021-08-19 | Controllable growth lead sulfide composite film gas sensor and preparation method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110952192.6A CN113552295A (en) | 2021-08-19 | 2021-08-19 | Controllable growth lead sulfide composite film gas sensor and preparation method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
CN113552295A true CN113552295A (en) | 2021-10-26 |
Family
ID=78134045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110952192.6A Pending CN113552295A (en) | 2021-08-19 | 2021-08-19 | Controllable growth lead sulfide composite film gas sensor and preparation method thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113552295A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114689164A (en) * | 2022-04-01 | 2022-07-01 | 中国科学院半导体研究所 | Composite film sound sensor and preparation method and application thereof |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104181209A (en) * | 2014-08-14 | 2014-12-03 | 电子科技大学 | Nitrogen dioxide gas sensor and preparation method thereof |
CN104597082A (en) * | 2015-01-23 | 2015-05-06 | 清华大学 | Preparation method of hybridized hierarchical structure sensitive thin-film sensing device based on two-dimensional material |
CN104614413A (en) * | 2015-02-09 | 2015-05-13 | 华中科技大学 | Electrodeless semiconductor gas sensor and preparation method thereof |
CN104677966A (en) * | 2015-01-23 | 2015-06-03 | 电子科技大学 | Nitrogen dioxide gas sensor and preparation and testing methods of nitrogen dioxide gas sensor |
CN105699441A (en) * | 2016-03-24 | 2016-06-22 | 电子科技大学 | Resistance-type gas sensor and manufacturing method thereof |
CN106814110A (en) * | 2017-01-05 | 2017-06-09 | 华中科技大学 | A kind of stretchable semiconductor resistance-type flexible gas sensor and preparation method thereof |
CN108447915A (en) * | 2018-03-02 | 2018-08-24 | 华中科技大学 | A kind of thin film field effect transistor type gas sensor and preparation method thereof |
US20180309076A1 (en) * | 2015-09-24 | 2018-10-25 | Toyota Motor Europe | Atomic layer deposition of lead sulfide for infrared optoelectronic devices |
CN109030578A (en) * | 2018-07-30 | 2018-12-18 | 清华大学 | A kind of NO based on the nano heterogeneous junction structure of CdTe/ZnO2The preparation method of gas sensor |
CN110579526A (en) * | 2019-09-03 | 2019-12-17 | 华中科技大学 | Field effect transistor gas sensor and array preparation method thereof |
-
2021
- 2021-08-19 CN CN202110952192.6A patent/CN113552295A/en active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104181209A (en) * | 2014-08-14 | 2014-12-03 | 电子科技大学 | Nitrogen dioxide gas sensor and preparation method thereof |
CN104597082A (en) * | 2015-01-23 | 2015-05-06 | 清华大学 | Preparation method of hybridized hierarchical structure sensitive thin-film sensing device based on two-dimensional material |
CN104677966A (en) * | 2015-01-23 | 2015-06-03 | 电子科技大学 | Nitrogen dioxide gas sensor and preparation and testing methods of nitrogen dioxide gas sensor |
CN104614413A (en) * | 2015-02-09 | 2015-05-13 | 华中科技大学 | Electrodeless semiconductor gas sensor and preparation method thereof |
US20180309076A1 (en) * | 2015-09-24 | 2018-10-25 | Toyota Motor Europe | Atomic layer deposition of lead sulfide for infrared optoelectronic devices |
CN105699441A (en) * | 2016-03-24 | 2016-06-22 | 电子科技大学 | Resistance-type gas sensor and manufacturing method thereof |
CN106814110A (en) * | 2017-01-05 | 2017-06-09 | 华中科技大学 | A kind of stretchable semiconductor resistance-type flexible gas sensor and preparation method thereof |
CN108447915A (en) * | 2018-03-02 | 2018-08-24 | 华中科技大学 | A kind of thin film field effect transistor type gas sensor and preparation method thereof |
CN109030578A (en) * | 2018-07-30 | 2018-12-18 | 清华大学 | A kind of NO based on the nano heterogeneous junction structure of CdTe/ZnO2The preparation method of gas sensor |
CN110579526A (en) * | 2019-09-03 | 2019-12-17 | 华中科技大学 | Field effect transistor gas sensor and array preparation method thereof |
Non-Patent Citations (4)
Title |
---|
DONGZHI ZHANG等: "Ethanol gas sensing properties of lead sulfide quantum dots-decorated zinc oxide nanorods prepared by hydrothermal process combining with successive ionic-layer adsorption and reaction method", 《JOURNAL OF COLLOID AND INTERFACE SCIENCE》 * |
DONGZHI ZHANG等: "Liquefied petroleum gas sensing properties of ZnO/PPy/PbS QDs nanocomposite prepared by self-assembly combining with SILAR method", 《IEEE SENSORS JOURNAL》 * |
H. ROSHAN等: "High-Performance Room Temperature Methane Gas Sensor Based on Lead Sulfide / Reduced Graphene Oxide Nanocomposite", 《IEEE SENSORS JOURNAL》 * |
XIN XIN等: "Enhanced Performances of PbS Quantum-Dots-Modified MoS2 Composite for NO2 Detection at Room Temperature", 《ACS APPLIED MATERIALS & INTERFACES》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114689164A (en) * | 2022-04-01 | 2022-07-01 | 中国科学院半导体研究所 | Composite film sound sensor and preparation method and application thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106970117B (en) | A kind of NO based on electrode surface growth in situ nano-ZnO2Sensor | |
CN113176305B (en) | Composite gas-sensitive material and preparation method thereof, ethanol gas sensor and preparation method thereof | |
CN102012386A (en) | Preparation method of nitric oxide gas sensor element based on pseudodirected tungsten trioxide nano tape | |
CN111830089A (en) | Based on two shell shape Cu2N-propanol gas sensor of O-grade structure micron sphere sensitive material and preparation method thereof | |
CN113552295A (en) | Controllable growth lead sulfide composite film gas sensor and preparation method thereof | |
CN110441380B (en) | Electrochemical sensor based on molecular imprinting electrode technology and preparation method and application thereof | |
CN113504283A (en) | Preparation method and application of composite material modified electrode for detecting gallic acid | |
CN109709184B (en) | In-based2O3NO of carbon dot complexes2Sensor and preparation method thereof | |
CN109470744B (en) | Acetone sensor based on composite sensitive material, preparation method and application thereof | |
CN116794118A (en) | In-based 2 O 3 NO of/ZIF-8 core-shell nanocube composite material 2 Sensor and preparation method thereof | |
CN111551621A (en) | Electrochemical sensor for detecting ascorbic acid and preparation method and application thereof | |
CN114956196B (en) | Acetone sensing material and rapid preparation method thereof | |
CN113588728B (en) | Croconic acid cyanine polymer sensor capable of being used for trace detection of nitrogen dioxide in high humidity environment and preparation method and application thereof | |
CN110849955A (en) | High-sensitivity ammonia gas sensor and preparation method thereof | |
CN113830820B (en) | Tubular gallium oxide nano material and preparation method and application thereof | |
CN109884132A (en) | MoO is adulterated based on bobbles shape Ni3The dimethylbenzene sensor of nano sensitive material, preparation method and applications | |
CN114778612A (en) | Based on PANI @ g-C3N4Ammonia gas sensor made of nano composite material and preparation method and application thereof | |
CN114324498A (en) | Based on Au-SnO2Ppb level NO of nanoflower sensitive materials2Gas sensor and preparation method thereof | |
CN110026227B (en) | Chromium-doped titanium dioxide nanotube-amino modified graphene oxide composite material and preparation method and application thereof | |
CN113406174A (en) | Flexible formaldehyde electrochemical sensor | |
CN111087014A (en) | Preparation method of Ag atom cluster modified tin dioxide nano material, product and application thereof | |
CN110243880B (en) | Preparation method and application of gas-sensitive material for detecting ammonia gas | |
CN115262034B (en) | Chain bead-shaped tin oxide-based heterogeneous nanofiber gas-sensitive material, and preparation and application thereof | |
CN114324748B (en) | Preparation method and application of ternary composite gas-sensitive material | |
CN115015328B (en) | N-amyl alcohol gas sensor based on PtAu alloy nanocrystalline modified flower-shaped WO3 sensitive material and preparation method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211026 |