CN113551860A - Big cavity module PIND check out test set - Google Patents

Big cavity module PIND check out test set Download PDF

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Publication number
CN113551860A
CN113551860A CN202110788341.XA CN202110788341A CN113551860A CN 113551860 A CN113551860 A CN 113551860A CN 202110788341 A CN202110788341 A CN 202110788341A CN 113551860 A CN113551860 A CN 113551860A
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plate
rod
shaped
fixedly connected
side wall
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CN202110788341.XA
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CN113551860B (en
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孙桂芳
党瑞涛
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Xi'an Huanyuxin Microelectronics Co ltd
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Xi'an Huanyuxin Microelectronics Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • G01M7/02Vibration-testing by means of a shake table
    • G01M7/06Multidirectional test stands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • G01M7/02Vibration-testing by means of a shake table
    • G01M7/022Vibration control arrangements, e.g. for generating random vibrations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00Vibration-testing of structures; Shock-testing of structures
    • G01M7/02Vibration-testing by means of a shake table
    • G01M7/027Specimen mounting arrangements, e.g. table head adapters

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission Devices (AREA)

Abstract

The invention discloses a large-cavity module PIND detection device, which is characterized in that: including the detector body, the sensor is the mounting panel of L shape, and lateral wall is close to top department and is equipped with two arc openings before this mounting panel, and is equipped with an arc piece in this arc opening respectively, the sensor is then fixed mounting is on two arc pieces first-class structure. According to the invention, through the mutual matching among the mounting plate, the fixed pipe, the supporting rod, the annular plate, the swinging plate, the placing plate and the like, the left-right movement and the up-down movement of the placing plate driven by the motor can be realized, the purpose of vibrating the module is achieved, and the vibration efficiency of the module can be effectively improved.

Description

Big cavity module PIND check out test set
Technical Field
The invention relates to the technical field of large cavity module PIND detection, in particular to large cavity module PIND detection equipment.
Background
The PIND Chinese name 'particle collision detection' is a detection method for testing electric parts so as to improve the reliability of the electric parts, and is generally used for detecting particles which are loose and are redundant in the packaging of integrated circuits, capacitors and electronic components. After the electronic component is processed and produced, the interior of the electronic component inevitably generates tiny particle residues which can not be seen by naked eyes, so that the electronic component needs to be detected by a PIND detection device.
However, the existing PIND detection device has the defects that the vibration magnitude of the vibration table cannot be well adjusted when the device is used, and the detection effect is poor because the sensor is always in a motionless state, so that the detection efficiency is low, the use is inconvenient and the like.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of low power detection efficiency, inconvenient use and the like in the prior art, and provide the large-cavity module PIND detection equipment with the characteristics of high detection efficiency, convenient use and the like.
In order to achieve the purpose, the invention provides the following technical scheme: a large-cavity module PIND detection device comprises a detection device body, a sensor and an L-shaped mounting plate, wherein two arc-shaped openings are formed in the front side wall of the mounting plate, close to the top, the arc-shaped openings are respectively provided with an arc-shaped block, and the sensor is fixedly mounted on the two arc-shaped blocks; a top plate is arranged on the front wall of the mounting plate close to the top, the detector body is mounted on the top of the top plate, two connecting wires are inserted into the detector body, and the two connecting wires are respectively and fixedly connected with adjacent sensors; the front end of the mounting plate is provided with a fixed pipe, a support rod is sleeved in the fixed pipe, one end of the support rod extends out of the fixed pipe and is fixedly connected with a transverse plate, and the other end of the support rod extends out of the fixed pipe and is fixedly connected with an annular plate; the mounting plate is also provided with a Y-shaped power output structure, a multi-connecting-rod transmission structure and an adjusting mechanism; the annular plate is respectively connected with the Y-shaped power output structure and the adjusting mechanism, and the adjusting mechanism is connected with the transverse plate through the multi-connecting-rod transmission structure.
Furthermore, the Y-shaped power output structure comprises a motor, a second bevel gear connected with a rotating shaft of the motor, a first bevel gear meshed with the second bevel gear, a third bevel gear meshed with the first bevel gear, and a transmission plate arranged inside the annular plate, wherein a transmission rod is arranged on the rear side wall of the transmission plate and close to the bottom of the annular plate, and the rear end of the transmission rod penetrates through the mounting plate and is connected with the first bevel gear; the rear side wall of the mounting plate is fixedly connected with two positioning plates, a reciprocating screw rod is movably connected between the two positioning plates through a bearing, and the bottom end of the reciprocating screw rod penetrates through an inner ring of the bearing and is connected with a third bevel gear; the reciprocating screw rod is characterized in that a lifting plate is arranged on the side wall of the reciprocating screw rod, two pull rods are movably connected to the lifting plate, and the other end of each pull rod is movably connected with the corresponding arc-shaped block.
The multi-connecting-rod transmission structure comprises a connecting rod movably connected with the adjusting mechanism, a swinging plate movably connected with the rear side wall of the connecting rod, a fixed block arranged on the rear side wall of the swinging plate and close to the central position, an inclined rod arranged on the front side wall of the swinging plate and close to the top and movably connected with the top, a push-pull plate movably connected with the rear side wall of the inclined rod, and a placing plate fixedly connected with the right side wall of the push-pull plate; the U-shaped groove has been seted up at the diaphragm top, should place the board and be located this U-shaped inslot, it is provided with fixed establishment to place the board top.
Adjustment mechanism includes the riser, the rectangle opening has been seted up to the riser antetheca, there is the threaded rod through bearing swing joint between rectangle opening inner chamber top and the bottom, the rectangular block is installed to one on the threaded rod lateral wall, lateral wall and connecting rod swing joint before the rectangular block, the threaded rod bottom passes the bearing inner circle and extends to the first rotation board of riser below fixedly connected with.
The fixing mechanism comprises an L-shaped plate, the bottom of the L-shaped plate is fixedly connected with the placing plate, a first threaded hole is formed in the top of the L-shaped plate, a lead screw is installed in the first threaded hole, the bottom end of the lead screw penetrates through the first threaded hole and extends to the inside of the L-shaped plate, a pressing plate is movably connected with the bottom end of the lead screw, and the top of the lead screw penetrates through the first threaded hole and extends to the second rotating plate fixedly connected with the upper portion of the L-shaped plate.
In order to ensure the using effect, the bottom of the mounting plate is fixedly connected with a bottom plate, second threaded holes are respectively formed in the positions, close to the left side and the right side, of the top of the bottom plate, and bolts are installed in the second threaded holes.
Simultaneously, inner wall difference fixedly connected with first slider about the rectangle piece, inner wall is seted up respectively about the rectangle opening and is had first spout with first slider assorted. The front side wall and the rear side wall of the placing plate are respectively fixedly connected with a second sliding block, and second sliding grooves matched with the second sliding blocks are respectively formed in the front inner wall and the rear inner wall of the U-shaped groove.
In order to ensure that the contact surface is not damaged, a first protection pad is fixedly connected to the bottom of the pressing plate, and a second protection pad is fixedly connected to the top of the placing plate.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the mutual matching among the mounting plate, the fixed pipe, the supporting rod, the annular plate, the swinging plate, the placing plate and the like, the motor can drive the placing plate to move left and right and up and down, the aim of vibrating the module is achieved, and the vibration efficiency of the module can be effectively improved;
2. according to the invention, through the mutual matching of the reciprocating screw rod, the lifting plate, the pull rod, the arc-shaped block and the like, the reciprocating screw rod can drive the two sensors to move up and down in an arc shape through the lifting plate, so that the module can be more comprehensively detected, and the detection efficiency can be effectively improved;
3. according to the invention, through the mutual matching of the adjusting mechanism and the fixing mechanism, the left-right movement distance of the placing plate can be adjusted through the threaded rod, the purpose that the left-right movement distance of the placing plate can be adjusted is achieved, and the module can be fixed on the placing plate through the pressing plate and the screw rod, so that the convenient use of the module can be effectively achieved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a rear view of FIG. 1;
FIG. 3 is an enlarged view taken at A in FIG. 1;
FIG. 4 is an enlarged view at B in FIG. 1;
fig. 5 is a perspective view of the drive link of fig. 1.
Reference numbers in the figures: 1. mounting a plate; 2. a fixed tube; 3. a support bar; 4. a transverse plate; 5. a U-shaped groove; 6. an annular plate; 7. a drive plate; 8. a transmission rod; 9. an adjustment mechanism; 91. a vertical plate; 92. a rectangular opening; 93. a rectangular block; 94. a threaded rod; 10. a connecting rod; 11. a swing plate; 12. a fixed block; 13. a diagonal bar; 14. a push-pull plate; 15. placing the plate; 16. a fixing mechanism; 161. an L-shaped plate; 162. a first threaded hole; 163. a screw rod; 164. pressing a plate; 17. a first bevel gear; 18. a motor; 19. a second bevel gear; 20. positioning a plate; 21. a reciprocating screw rod; 22. a lifting plate; 23. a pull rod; 24. an arc-shaped block; 25. an arc-shaped opening; 26. a third bevel gear; 27. a sensor; 28. a top plate; 29. a detector body; 30. a connecting wire; 31. a second threaded hole; 32. a bolt; 33. a base plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the testing machine body 29 of the present invention is a specific device for testing, and the mounting plate 1 is used for supporting the testing machine body 29 and other components. This mounting panel 1 is L shape setting, and 1 antetheca fixedly connected with of mounting panel 2, fixed pipe 2 endotheca are equipped with bracing piece 3. After the supporting rod 3 passes through the fixing tube 2, one end of the supporting rod extends to the outside of the fixing tube 2 and is fixedly connected with a transverse plate 4, and the other end of the supporting rod 3 passes through the fixing tube 2 and also extends to the outside of the fixing tube 2 and is fixedly connected with an annular plate 6. The annular plate 6 is a closed elliptic plate, and the interior of the plate is of a hollow structure.
The bottom of the mounting plate 1 is fixedly connected with a bottom plate 33, second threaded holes 31 are respectively formed in the top of the bottom plate 33 close to the left side and the right side, and a bolt 32 is installed in each second threaded hole 31, so that the mounting plate 1 is tightly fixed on the bottom plate 33 through the bolt 32.
Two axisymmetric arc-shaped openings 25 are provided on the front side wall of the mounting plate 1 near the top, and an arc-shaped block 24 is provided in each arc-shaped opening 25. The arc-shaped block 24 can slide along the inner wall of the arc-shaped opening 25. The detector body 29 is fixed on the top of the mounting plate 1, the two sensors 27 are respectively and fixedly mounted on the two arc-shaped blocks 24, and the two connecting wires 30 inserted on the detector body 29 are respectively and fixedly connected with the adjacent sensors 27. I.e. one connection line 30 for each sensor 27.
Meanwhile, the mounting plate 1 is also provided with a Y-shaped power output structure, a multi-connecting-rod transmission structure and an adjusting mechanism. The Y-shaped power output structure is used for power output, and the transverse plate 4 is adjusted up and down through the matching of the adjusting mechanism and the multi-connecting-rod transmission structure.
The Y-shaped power output structure comprises a motor 18, a first bevel gear 17, a second bevel gear 19, a third bevel gear 26, a transmission plate 7, a transmission rod 8, a positioning plate 20, a reciprocating screw rod 21, a lifting plate and a pull rod 23. When fixed, the motor 18 is fixed to the mounting plate 1, the rotating shaft of the motor 18 is connected to the second bevel gear 19, the second bevel gear 19 is engaged with the first bevel gear 17, and the third bevel gear 26 is engaged with the first bevel gear 17.
The transmission plate 7 is arranged inside the annular plate 6, and the transmission rod 8 is fixedly arranged on the rear side wall of the transmission plate 7 and close to the bottom of the annular plate 6. The rear end of the transmission rod 8 passes through an inner hole of a bearing arranged on the mounting plate 1 and then is connected with a first bevel gear 17. The number of the positioning plates 20 is 2, and the positioning plates are arranged up and down on the rear side wall of the mounting plate 1. Each positioning plate 20 is provided with a bearing, and two ends of the reciprocating screw rod 21 are respectively connected with an upper bearing and a lower bearing.
The bottom end of the reciprocating screw rod 21 passes through the bearing inner ring of the positioning plate 20 positioned below and then is connected with a third bevel gear 26. The lifting plate 22 is disposed on the side wall of the reciprocating screw rod 21 to ensure that the reciprocating screw rod 21 is driven by the third bevel gear 26 to drive the lifting plate 22 to move up and down. In order to ensure that the lifting plate 22 can move along a predetermined direction or track, two tie rods 23 are further provided on the mounting plate 1, and the lifting plate 22 is sleeved on the two tie rods 23.
Adjustment mechanism 9 include riser 91, rectangular opening 92 has been seted up to riser 91 antetheca, there is threaded rod 94 through bearing swing joint between rectangular opening 92 inner chamber top and the bottom, rectangular block 93 is installed to one on the threaded rod 94 lateral wall, the first slider of inner wall difference fixedly connected with about rectangular block 93, the first spout with first slider assorted is seted up respectively to the inner wall about rectangular opening 92. The bottom end of the threaded rod 94 passes through the inner race of the bearing and extends below the riser 91, while a first rotation plate is fixedly attached to the lower end of the threaded rod 94.
The multi-connecting-rod transmission structure comprises a connecting rod 10, a swinging plate 11 movably connected with the rear side wall of the connecting rod 10, a fixed block 12 arranged on the rear side wall of the swinging plate 11 and close to the central position, an inclined rod 13 arranged on the front side wall of the swinging plate 11 and close to the top and movably connected with the top, a push-pull plate 14 movably connected with the rear side wall of the inclined rod 13, and a placing plate 15 fixedly connected with the right side wall of the push-pull plate 14. The front side wall of the transmission plate 7 extends to the outer side of the annular plate 6 and is connected with a connecting rod 10.
The top of the transverse plate 4 is provided with a U-shaped groove 5, and the placing plate 15 is positioned in the U-shaped groove 5. Simultaneously, place board 15 front and back lateral wall fixedly connected with second slider respectively, the inner wall has seted up respectively around the U-shaped groove 5 with second slider phase-match second spout, through mounting panel 1, fixed pipe 2, bracing piece 3, annular plate 6, swinging plate 11, place mutually supporting between the board 15 etc. can realize that motor 18 drives and places board 15 side-to-side movement and up-and-down motion, reaches the purpose of vibrations module, can effectual improvement its vibrations efficiency.
To ensure that the products to be inspected do not slip or get shaken off, a fixing mechanism 16 is provided on top of the resting plate 15. The fixing mechanism 16 includes an L-shaped plate 161, a first threaded hole 162, a screw rod 163, and a pressing plate 164.
The bottom of the L-shaped plate 161 is fixedly connected to the placing plate 15, and the first screw hole 162 is disposed at the top of the L-shaped plate 161. The pressing plate 164 is located inside the L-shaped plate 161, the bottom of the screw rod 163 penetrates through the first threaded hole 162 and is movably connected with the pressing plate 164, the top of the screw rod 163 is fixedly connected with a second rotating plate, the bottom of the pressing plate 164 is fixedly connected with a first protection pad, and the top of the placing plate 15 is fixedly connected with a second protection pad. The product to be tested is placed between the first protective pad and the second protective pad.
According to the invention, through the mutual matching of the adjusting mechanism 9 and the fixing mechanism 16, the left-right movement distance of the placing plate 15 can be adjusted by rotating the threaded rod 94, so that the purpose of adjusting the left-right movement distance of the placing plate 15 is achieved. Meanwhile, the product to be tested can be fixed on the placing plate 15 through the pressing plate 164 and the screw rod 163, and the purpose of convenient use can be effectively achieved.
When the module detection device works, a module to be detected is firstly placed on the placing plate 15, the screw rod 163 is driven to descend through the second rotating plate, the position of the module to be detected is fixed by the pressing plate 164, and the module is prevented from being clamped by the first protection pad and the second protection pad.
After the module to be tested is fixed, the motor 18 is started through an external power supply, the motor 18 drives the first bevel gear 17 and the transmission rod 8 to rotate through the second bevel gear 19, and the transmission rod 8 synchronously drives the transmission plate 7 to rotate. And then the annular plate 6 is driven to move up and down under the rotation of the transmission plate 7, and the annular plate 6 drives the placing plate 15 and the module to be tested to move up and down through the supporting rod 3. Synchronously, when the transmission plate 7 rotates, the vertical plate 91 and the rectangular block 93 are driven to rotate, the rectangular block 93 drives the swing plate 11 to swing left and right through the connecting rod 10, the swing plate 11 drives the placing plate 15 to move left and right through the inclined rod 13 and the push-pull plate 14, the placing plate 15 and the module to be tested can move left and right while moving up and down, and therefore the purpose of vibrating the module to be tested is achieved.
When the first bevel gear 17 rotates, the reciprocating screw rod 21 is driven to rotate by the third bevel gear 26, and the lifting plate 22 is driven to reciprocate up and down by the reciprocating screw rod 21. When the lifting plate 22 rises, the two sensors 27 are driven to move upwards in an arc shape by the pull rod 23 and the arc-shaped block 24; when the lifting plate 22 descends, the two sensors 27 are driven by the pull rod 23 and the arc block 24 to move downwards in an arc shape, so that the detection of the module in more directions is achieved, and the detection effect is better.
When the distance of the left-right movement of the placing plate 15 needs to be adjusted to adjust the vibration amplitude of the module to be tested, the motor 18 is firstly turned off, the threaded rod 94 is rotated to drive the rectangular block 93 to move upwards or downwards, and when the rectangular block 93 moves upwards, the rotating diameter of the rectangular block 93 is reduced, so that the swinging distance of the swinging plate 11 is reduced; when the rectangular block 93 moves downwards, the rotating diameter of the rectangular block 93 becomes larger, so that the swinging distance of the swinging plate 11 becomes larger, and the purpose of adjusting the vibration amplitude of the module to be tested is achieved.
As described above, the present invention can be preferably realized.

Claims (9)

1. The utility model provides a big cavity module PIND check out test set which characterized in that: the detector comprises a detector body (29), a sensor (27) and an L-shaped mounting plate (1), wherein two arc-shaped openings (25) are formed in the front side wall of the mounting plate (1) close to the top, arc-shaped blocks (24) are respectively arranged in the arc-shaped openings (25), and the sensor (27) is fixedly mounted on the two arc-shaped blocks (24); a top plate (28) is arranged on the front wall of the mounting plate (1) close to the top, the detector body (29) is mounted on the top of the top plate (28), two connecting wires (30) are inserted into the detector body (29), and the two connecting wires (30) are respectively and fixedly connected with adjacent sensors (27); a fixed pipe (2) is arranged at the front end of the mounting plate (1), a supporting rod (3) is sleeved in the fixed pipe (2), one end of the supporting rod (3) extends out of the fixed pipe (2) and is fixedly connected with a transverse plate (4), and the other end of the supporting rod extends out of the fixed pipe (2) and is fixedly connected with an annular plate (6); the mounting plate (1) is also provided with a Y-shaped power output structure, a multi-connecting-rod transmission structure and an adjusting mechanism; the annular plate (6) is respectively connected with the Y-shaped power output structure and the adjusting mechanism (9), and the adjusting mechanism (9) is connected with the transverse plate (4) through the multi-connecting-rod transmission structure.
2. The large cavity module PIND detection device of claim 1, wherein: the Y-shaped power output structure comprises a motor (18), a second bevel gear (19) connected with a rotating shaft of the motor (18), a first bevel gear (17) meshed with the second bevel gear (19), a third bevel gear (26) meshed with the first bevel gear (17), and a transmission plate (7) arranged inside the annular plate (6), wherein a transmission rod (8) is arranged on the rear side wall of the transmission plate (7) and close to the bottom of the annular plate (6), and the rear end of the transmission rod (8) penetrates through the mounting plate (1) and is connected with the first bevel gear (17); two positioning plates (20) are fixedly connected to the rear side wall of the mounting plate (1), a reciprocating screw rod (21) is movably connected between the two positioning plates (20) through a bearing, and the bottom end of the reciprocating screw rod (21) penetrates through an inner ring of the bearing and is connected with a third bevel gear (26); the side wall of the reciprocating screw rod (21) is provided with a lifting plate (22), the lifting plate (22) is movably connected with two pull rods (23), and the other end of each pull rod (23) is movably connected with a corresponding arc-shaped block (24).
3. The large cavity module PIND detection device of claim 2, wherein: the multi-connecting-rod transmission structure comprises a connecting rod (10) movably connected with the adjusting mechanism (9), a swinging plate (11) movably connected with the rear side wall of the connecting rod (10), a fixed block (12) arranged on the rear side wall of the swinging plate (11) and close to the central position, an inclined rod (13) arranged on the front side wall of the swinging plate (11) and close to the top and movably connected with the front side wall of the swinging plate, a push-pull plate (14) movably connected with the rear side wall of the inclined rod (13), and a placing plate (15) fixedly connected with the right side wall of the push-pull plate (14); the top of the transverse plate (4) is provided with a U-shaped groove (5), the placing plate (15) is positioned in the U-shaped groove (5), and the top of the placing plate (15) is provided with a fixing mechanism (16).
4. The large cavity module PIND detection device of claim 3, wherein: adjustment mechanism (9) include riser (91), rectangle opening (92) have been seted up to riser (91) antetheca, there is threaded rod (94) through bearing swing joint between rectangle opening (92) inner chamber top and the bottom, rectangular block (93) are installed to one on threaded rod (94) the lateral wall, lateral wall and connecting rod (10) swing joint before rectangular block (93), threaded rod (94) bottom is passed the bearing inner circle and is extended to riser (91) below fixedly connected with first rotation board.
5. The large cavity module PIND detection device of claim 4, wherein: fixing mechanism (16) include L shaped plate (161), L shaped plate (161) bottom with place board (15) fixed connection, first screw hole (162) have been seted up at L shaped plate (161) top, install lead screw (163) in first screw hole (162), swing joint has clamp plate (164) in lead screw (163) bottom is passed first screw hole (162) and is extended to L shaped plate (161), first screw hole (162) is passed and extend to L shaped plate (161) top fixedly connected with second rotating plate in lead screw (163) top.
6. The large cavity module PIND detection device of claim 5, wherein: mounting panel (1) bottom fixedly connected with bottom plate (33), second screw hole (31) have been seted up respectively near left and right sides department in bottom plate (33) top, install bolt (32) in second screw hole (31).
7. The large cavity module PIND detection device as claimed in any one of claims 4 to 6, wherein: the inner wall is fixedly connected with first slider respectively about rectangle piece (93), the inner wall is seted up respectively about rectangle opening (92) and is seted up with first slider assorted first spout.
8. The large cavity module PIND detection device of claim 7, wherein: the front side wall and the rear side wall of the placing plate (15) are respectively fixedly connected with a second sliding block, and second sliding grooves matched with the second sliding blocks are respectively formed in the front inner wall and the rear inner wall of the U-shaped groove (5).
9. The large cavity module PIND detection device of claim 8, wherein: the pressing plate (164) bottom fixedly connected with first protection pad, place board (15) top fixedly connected with second protection pad.
CN202110788341.XA 2021-07-13 2021-07-13 Big cavity module PIND check out test set Active CN113551860B (en)

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CN112858053A (en) * 2020-12-09 2021-05-28 凯晟动力技术(嘉兴)有限公司 Oxygen sensor durability detection device and detection method thereof

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JPH063254A (en) * 1992-06-22 1994-01-11 Ushio Inc Particle detecting system
JP2001091432A (en) * 1999-09-21 2001-04-06 Toyo Seiki Seisakusho:Kk Load deflecting temperature / softening temperature testing device
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