CN113551853A - Novel helium mass spectrometer leak detector and detection method thereof - Google Patents

Novel helium mass spectrometer leak detector and detection method thereof Download PDF

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Publication number
CN113551853A
CN113551853A CN202110868187.7A CN202110868187A CN113551853A CN 113551853 A CN113551853 A CN 113551853A CN 202110868187 A CN202110868187 A CN 202110868187A CN 113551853 A CN113551853 A CN 113551853A
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China
Prior art keywords
leak detector
detector body
block
fixing
mass spectrometer
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Pending
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CN202110868187.7A
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Chinese (zh)
Inventor
冉振为
洪荣丰
曹大阳
郭炳汉
杨效
汪浩
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Shenzhen Walsheng Intelligent Control Technology Co ltd
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Shenzhen Walsheng Intelligent Control Technology Co ltd
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Priority to CN202110868187.7A priority Critical patent/CN113551853A/en
Publication of CN113551853A publication Critical patent/CN113551853A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205Accessories or associated equipment; Pump constructions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The invention discloses a novel helium mass spectrometer leak detector and a detection method thereof, and the novel helium mass spectrometer leak detector comprises a leak detector body, wherein a placing gas tank is arranged at the top end of the leak detector body, the placing gas tank is connected with the leak detector body through a connecting device, the placing gas tank is detachably arranged on the leak detector body, a fixing device is arranged at the bottom end of the leak detector body, and the fixing device is arranged at the bottom end of the leak detector body through bolts. The invention relates to a novel helium mass spectrometer leak detector and a detection method thereof, belonging to the field of helium mass spectrometer leak detectors.

Description

Novel helium mass spectrometer leak detector and detection method thereof
Technical Field
The invention relates to the field of helium mass spectrometer leak detectors, in particular to a novel helium mass spectrometer leak detector and a detection method thereof.
Background
The helium mass spectrometer leak detector is a common analytical instrument, is widely applied to the power industry, the aerospace industry, the nuclear industry and the like, is the most common leak detector commonly used in the vacuum leak detection technology, and adopts the inverse diffusion principle in the sample injection mode of the helium mass spectrometer leak detector at present. The helium mass spectrometer leak detector is an air tightness detector made of helium as leak-indicating gas according to the principle of mass spectrometry. The mass spectrometer consists of a mass spectrum chamber consisting of an ion source, an analyzer, a collector and a cold cathode ionization gauge, an air pumping system, an electric part and the like. Electrons emitted by a filament in the mass spectrum chamber oscillate back and forth in the chamber and collide with indoor gas and helium gas entering the chamber through a leakage hole to be ionized into positive ions, the helium ions enter a magnetic field under the action of an accelerating electric field, deflection is generated under the action of Lorentz force to form an arc-shaped track, and ions with different masses can reach a receiving electrode through the magnetic field and a receiving slit to be detected by changing accelerating voltage. But there is certain drawback in current helium mass spectrometer leak detector, at first, the sampling valve that detects and leak detector body coupling exist insecure, and connect inconvenient condition to there is certain error in the data during making the detection, the inaccurate condition of precision, equipment need move or during operation in addition, inconvenient removal or during operation stability is relatively poor this moment, influences the use.
Disclosure of Invention
The invention mainly aims to provide a novel helium mass spectrometer leak detector and a detection method thereof, which can effectively solve the problems that in the background technology, the connection between a detected sample injection valve and a leak detector body is not firm and inconvenient, so that certain errors exist in data during detection, the accuracy is inaccurate, and the use is influenced because the equipment needs to be moved or works, and is inconvenient to move or has poor stability during working.
In order to achieve the purpose, the invention adopts the technical scheme that:
the utility model provides a novel helium mass spectrometer leak detector and detection method thereof, includes the leak detector body, the top of leak detector body is provided with places the gas pitcher, it is connected with the leak detector body through connecting device to place the gas pitcher, it is detachable installation on the leak detector body to place the gas pitcher, the bottom of leak detector body is provided with fixing device, fixing device passes through the bolt and installs the bottom at the leak detector body.
Preferably, connecting device includes first fixed block, second fixed block, toper screw thread, fastening bolt, first screw hole, fixed slot, connecting thread and rubber ring, the top of leak detector body is provided with second fixed block and first fixed block, first fixed block is connected with the second fixed block through connecting thread, the inside of first fixed block and second fixed block is provided with places the gas pitcher, the bottom of placing the gas pitcher is provided with toper screw thread, be provided with the rubber ring on the toper screw thread, the fixed slot has been seted up to the lateral wall of placing the gas pitcher, first screw hole has been seted up to one side of first fixed block, the inside of first screw hole is provided with fastening bolt.
Preferably, fastening bolt is aligned with the fixed slot, the inside of second fixed block is provided with the screw thread with toper screw thread matched with, the rubber ring cooperatees with the inside of first fixed block, will place the gas pitcher through connecting device and be connected with the leak detector body, can detect the part of placing in the gas pitcher to can carry out firm fixed, relatively practical with placing the gas pitcher through connecting device.
Preferably, the fixing device comprises a third fixing plate, a fourth fixing block, a moving wheel, an intermediate block, a threaded rod, a knob, a first connecting block, a telescopic spring, a connecting rod, a reserved groove and a second connecting block, the third fixing plate and the fourth fixing block are arranged at the bottom end of the leak detector body and are connected with each other through a T-shaped block and a T-shaped groove, the first connecting block and the intermediate block are arranged at the bottom end of the leak detector body, the threaded rod is arranged between the fourth fixing blocks, threads with different rotation directions are arranged on the threaded rod and positioned on two sides of the intermediate block, one end of the threaded rod is provided with the knob, the moving wheel is arranged at the position, at the fixing device, of the bottom end of the leak detector body, the connecting rod, the second connecting block and the reserved groove are arranged at the top end of the moving wheel, and the connecting rod is connected with the second connecting block through a pin shaft, the connecting rod is connected with the fourth fixed block through an extension spring.
Preferably, the threaded rod is connected with the fourth fixed block through the screw thread, the fourth fixed block is close to each other or keeps away from, the connecting rod can be adjusted the fixed plate through fixing device round the round pin hub connection of second connecting block to make the removal wheel receive and release, more conveniently remove the leak detector body, it is more convenient.
Preferably, be provided with display screen and function key on the leak detector body, the inside pump body that is provided with of lower extreme of leak detector body.
A novel helium mass spectrometer leak detector and a detection method thereof comprise the following steps:
s1, preparing a workpiece to be detected and auxiliary components required, and debugging the leak detector body;
s2, connecting the gas containing tank with the leak detector body through a connecting device, so as to connect the leak detector body;
s3, detecting a workpiece to be detected, putting a tool to be detected into a placing gas tank, adjusting the leak detector body through a display screen and function keys, and detecting internal components of the placing gas tank;
s4, recording data, recording the data, displaying the related data through a display screen, and recording the data, so that the method is practical;
and S5, post-processing after detection is finished, closing the equipment after detection is finished, dismantling the auxiliary equipment, and dismantling the gas tank from the leak detector body.
Preferably, in S2, the tapered thread and the rubber ring are fixed in the leak detector body by the fastening bolt, so that the fixation is more secure, the gas tank is connected with the leak detector body by the connecting device, the component in the gas tank can be detected, and the gas tank can be firmly fixed by the connecting device.
Preferably, S1 receives the removal wheel with leak detector body bottom at the during operation, and the high removal wheel that leads to when the leak detector body needs to remove moves, can adjust the fixed plate through fixing device to make the removal wheel receive and release, it removes the leak detector body to make things convenient for more.
Compared with the prior art, the invention has the following beneficial effects:
the leak detector is provided with the connecting device, the gas tank is connected with the leak detector body through the connecting device, so that the components in the gas tank can be detected, and the gas tank can be firmly fixed through the connecting device, so that the leak detector is practical;
be provided with fixing device, can adjust the fixed plate through fixing device to make and remove the wheel and receive and release, it is more convenient to remove the leak detector body, and it is more convenient.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic illustration of a deployment canister of the present invention;
FIG. 3 is a schematic view of the connection device of the present invention;
FIG. 4 is a schematic view of the fixture of the present invention;
FIG. 5 is a schematic view of the moving wheel of the present invention;
FIG. 6 is a detection flow diagram of the present invention.
In the figure: 1. a leak detector body; 2. a display screen; 3. placing a gas tank; 4. a connecting device; 401. a first fixed block; 402. a second fixed block; 403. a tapered thread; 404. fastening a bolt; 405. a first threaded hole; 406. fixing grooves; 407. connecting threads; 408. a rubber ring; 5. a function key; 6. a fixing device; 601. a third fixing plate; 602. a fourth fixed block; 603. a moving wheel; 604. a middle block; 605. a threaded rod; 606. a knob; 607. a first connection block; 608. a tension spring; 609. a connecting rod; 610. reserving a groove; 611. a second connecting block; 7. and a pump body.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As shown in fig. 1-6, a novel helium mass spectrometer leak detector and a detection method thereof, including leak detector body 1, the top of leak detector body 1 is provided with places gas pitcher 3, places gas pitcher 3 and is connected with leak detector body 1 through connecting device 4, places gas pitcher 3 demountable installation on leak detector body 1, and the bottom of leak detector body 1 is provided with fixing device 6, and fixing device 6 passes through the bolt and installs the bottom at leak detector body 1.
In this embodiment, the connection device 4 includes a first fixed block 401, a second fixed block 402, a tapered thread 403, a fastening bolt 404, a first threaded hole 405, a fixed groove 406, a connection thread 407, and a rubber ring 408, the top end of the leak detector body 1 is provided with the second fixed block 402 and the first fixed block 401, the first fixed block 401 is connected with the second fixed block 402 by the connection thread 407, the inside of the first fixed block 401 and the second fixed block 402 is provided with the gas tank 3, the bottom end of the gas tank 3 is provided with the tapered thread 403, the tapered thread 403 is provided with the rubber ring 408, the side wall of the gas tank 3 is provided with the fixed groove 406, one side of the first fixed block 401 is provided with the first threaded hole 405, and the inside of the first threaded hole 405 is provided with the fastening bolt 404; the fastening bolts 404 are aligned with the fixing grooves 406, the inside of the second fixing block 402 is provided with threads that fit with the tapered threads 403, the rubber ring 408 fits with the inside of the first fixing block 401, the rubber ring 408 that holds the end of the gas tank 3 is plugged by placing the gas tank 3 inserted into the first fixing block 401 and the second fixing block 402 and then screwing the tapered threads 403 that hold the end of the gas tank 3 into the inside of the second fixing block 402, and the fastening bolts 404 that hold the end of the gas tank 3 are screwed into the first threaded holes 405 by the fastening bolts 404 in the first fixing block 401, so that the connecting device 4 is inserted into the leak detector body 1, the placing gas tank 3 is connected with the leak detector body 1 by the connecting device 4, the components that hold the gas tank 3 can be tested, and the placing gas tank 3 can be firmly fixed by the connecting device 4, is more practical.
In this embodiment, the fixing device 6 includes a third fixing plate 601, a fourth fixing block 602, a moving wheel 603, an intermediate block 604, a threaded rod 605, a knob 606, a first connecting block 607, a telescopic spring 608, a connecting rod 609, a reserved groove 610 and a second connecting block 611, the bottom end of the leak detector body 1 is provided with the third fixing plate 601 and the fourth fixing block 602, the third fixing plate 601 and the fourth fixing block 602 are connected with the T-shaped groove through a T-shaped block, the bottom end of the leak detector body 1 is provided with the first connecting block 607 and the intermediate block 604, the threaded rod 605 is arranged between the fourth fixing blocks 602, threads with different rotation directions are arranged on the threaded rod 605 on two sides of the intermediate block 604, one end of the threaded rod 605 is provided with the knob 606, the bottom end of the leak detector body 1 is provided with the moving wheel 603 at the fixing device 6, the top end of the moving wheel 603 is provided with the connecting rod 609, the second connecting block 611 and the reserved groove 610, the connecting rod 609 is connected with the second connecting block 611 through a pin shaft, and the connecting rod 609 is connected with the fourth fixed block 602 through an expansion spring 608; threaded rod 605 is connected with fourth fixed block 602 through the screw, fourth fixed block 602 is close to each other or keeps away from, connecting rod 609 is round the round pin hub connection of second connecting block 611, connecting rod 609 can round second connecting block 611 through fourth fixed block 602 with the removal wheel 603 that receives up, thereby expand removal wheel 603, thereby can prop up removal wheel 603, when leak detector body 1 need not be removed, fourth fixed block 602 can be removed this moment, make fourth fixed block 602 pass through expanding spring 608 pulling connecting rod 609, thereby to remove wheel 603 and receive into the reserve groove 610 of second connecting block 611, thereby to remove wheel 603 and receive, can adjust the fixed plate through fixing device 6, thereby make removal wheel 603 receive and release, more conveniently remove leak detector body 1, and is more convenient.
In addition, be provided with display screen 2 and function key 5 on the leak detector body 1, the lower extreme inside of leak detector body 1 is provided with the pump body 7.
A novel helium mass spectrometer leak detector and a detection method thereof comprise the following steps:
s1, preparing a workpiece to be detected and auxiliary components required, and debugging the leak detector body 1;
s2, connecting the placing gas tank 3 with the leak detector body 1 through the connecting device 4, so as to connect the leak detector body 1;
s3, detecting a workpiece to be detected, putting a tool to be detected into the gas containing tank 3, adjusting the leak detector body 1 through the display screen 2 and the function keys 5, and detecting internal components of the gas containing tank 3;
s4, recording data, recording the data, displaying the related data through the display screen 2, and recording the data, so that the method is practical;
s5, post-processing after detection is finished, closing the equipment after detection is finished, dismantling the auxiliary equipment, and dismantling the gas tank 3 from the leak detector body 1.
In addition, in S2, the tapered thread 403 and the rubber ring 408 are fixed in the leak detector body 1 by the fastening bolt 404, the fixation is more secure, the placing gas tank 3 is connected with the leak detector body 1 by the connecting device 4, the component in the placing gas tank 3 can be detected, and the placing gas tank 3 can be firmly fixed by the connecting device 4; s1 receives the removal wheel 603 of leak detector body 1 bottom at the during operation, and the logical high removal wheel 603 moves when leak detector body 1 needs to remove, can adjust the fixed plate through fixing device 6 to make removal wheel 603 receive and release, it is more convenient to remove leak detector body 1.
It should be noted that, the invention is a novel helium mass spectrometer leak detector and a detection method thereof, a workpiece to be detected is prepared before testing, required auxiliary components are prepared, the leak detector body 1 is debugged, a placing gas tank 3 is connected with the leak detector body 1 through a connecting device 4, specifically, as a fastening bolt 404 is aligned with a fixed groove 406, a thread matched with a tapered thread 403 is arranged inside a second fixed block 402, a rubber ring 408 is matched with the inside of a first fixed block 401, the placing gas tank 3 is inserted into the first fixed block 401 and the second fixed block 402, then the tapered thread 403 at the end part of the placing gas tank 3 is screwed with the inside of the second fixed block 402, so that the rubber ring 408 at the end part of the placing gas tank 3 is plugged, and is screwed into a first threaded hole 405 through the fastening bolt 404 in the first fixed block 401, thereby fastening bolts 404 are screwed into the fixing grooves 406, thereby the connecting device 4 is inserted into the leak detector body 1, the connection is firm, the placing gas tank 3 is connected with the leak detector body 1 through the connecting device 4, thereby the leak detector body 1 is detected, the workpiece to be detected is placed into the placing gas tank 3, the tool to be detected is placed into the placing gas tank 3, because the leak detector body 1 is provided with the display screen 2 and the function keys 5, the pump body 7 is arranged inside the lower end of the leak detector body 1, the leak detector body 1 is adjusted through the display screen 2 and the function keys 5, then the internal components of the placing gas tank 3 are detected, the data is recorded and recorded, the relevant data is displayed through the display screen 2, the data is recorded, the operation is practical, the post-processing after the detection is finished, the equipment is closed after the detection is finished, the auxiliary equipment is removed, the placing gas tank 3 is removed from the leak detector body 1, during operation, the fixing device 6 is adjusted, specifically, since the threaded rod 605 is connected with the fourth fixed block 602 through threads, the fourth fixed blocks 602 are close to or far away from each other, the connecting rod 609 is connected around the pin shaft of the second connecting block 611, when movement is required, the third fixed block 601 is fixed at the bottom end of the leak detector body 1 through bolts, then the knob 606 is rotated at the end of the threaded rod 605 to rotate the threaded rod 605 through the knob 606, at the same time, the threaded rod 605 is matched with the fourth fixed block 602, so that the fourth fixed block 602 moves through the T-shaped groove and the T-shaped block to move the fourth fixed block 602 in the middle, at the same time, the connecting rod 609 of the collected moving wheel 603 can be rotated around the second connecting block 611 through the fourth fixed block 602 to unfold the moving wheel 603, so that the moving wheel 603 can be supported, and when the leak detector body 1 does not need to be moved, can remove fourth fixed block 602 this moment for fourth fixed block 602 passes through expanding spring 608 pulling connecting rod 609, thereby will remove wheel 603 and take in the preformed groove 610 of second connecting block 611, thereby will remove wheel 603 and accomodate, can adjust the fixed plate through fixing device 6, thereby make and remove wheel 603 and receive and release, more conveniently remove leak detector body 1, it is more convenient.
Although illustrative embodiments of the present invention have been described herein with reference to the accompanying drawings, which are not intended to depart from the spirit and scope of the invention, the same shall be construed as disclosed herein, and it will be apparent to those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention.

Claims (9)

1. A novel helium mass spectrometer leak detector is characterized in that: including leak detector body (1), the top of leak detector body (1) is provided with places gas pitcher (3), it is connected with leak detector body (1) through connecting device (4) to place gas pitcher (3), it installs on leak detector body (1) to place gas pitcher (3) demountable installation, the bottom of leak detector body (1) is provided with fixing device (6), fixing device (6) are installed in the bottom of leak detector body (1) through the bolt.
2. The novel helium mass spectrometer leak detector of claim 1, wherein: the connecting device (4) comprises a first fixing block (401), a second fixing block (402), a tapered thread (403), a fastening bolt (404), a first threaded hole (405), a fixing groove (406), a connecting thread (407) and a rubber ring (408), the second fixing block (402) and the first fixing block (401) are arranged at the top end of the leak detector body (1), the first fixing block (401) is connected with the second fixing block (402) through the connecting thread (407), a gas containing tank (3) is arranged inside the first fixing block (401) and the second fixing block (402), the tapered thread (403) is arranged at the bottom end of the gas containing tank (3), the rubber ring (408) is arranged on the tapered thread (408), the fixing groove (406) is formed in the side wall of the gas containing tank (3), the first threaded hole (405) is formed in one side of the first fixing block (401), and a fastening bolt (404) is arranged in the first threaded hole (405).
3. The novel helium mass spectrometer leak detector of claim 2, wherein: the fastening bolt (404) is aligned with the fixing groove (406), threads matched with the tapered threads (403) are arranged inside the second fixing block (402), and the rubber ring (408) is matched with the inside of the first fixing block (401).
4. The novel helium mass spectrometer leak detector of claim 1, wherein: the fixing device (6) comprises a third fixing plate (601), a fourth fixing block (602), a moving wheel (603), an intermediate block (604), a threaded rod (605), a knob (606), a first connecting block (607), a telescopic spring (608), a connecting rod (609), a reserved groove (610) and a second connecting block (611), the third fixing plate (601) and the fourth fixing block (602) are arranged at the bottom end of the leak detector body (1), the third fixing plate (601) and the fourth fixing block (602) are connected through a T-shaped block and a T-shaped groove, the first connecting block (607) and the intermediate block (604) are arranged at the bottom end of the leak detector body (1), the threaded rod (605) is arranged between the fourth fixing blocks (602), threads in different rotation directions are arranged on two sides of the intermediate block (604) on the threaded rod (605), the knob (606) is arranged at one end of the threaded rod (605), the leak detector comprises a leak detector body (1), wherein the bottom end of the leak detector body is provided with a movable wheel (603) at a fixing device (6), the top end of the movable wheel (603) is provided with a connecting rod (609), a second connecting block (611) and a reserved groove (610), the connecting rod (609) is connected with the second connecting block (611) through a pin shaft, and the connecting rod (609) is connected with a fourth fixed block (602) through an expansion spring (608).
5. The novel helium mass spectrometer leak detector of claim 4, wherein: the threaded rod (605) is connected with a fourth fixed block (602) through threads, the fourth fixed blocks (602) are close to or far away from each other, and the connecting rod (609) is connected around a pin shaft of the second connecting block (611).
6. The novel helium mass spectrometer leak detector of claim 1, wherein: the leak detector is characterized in that a display screen (2) and a function key (5) are arranged on the leak detector body (1), and a pump body (7) is arranged inside the lower end of the leak detector body (1).
7. A novel detection method of a helium mass spectrometer leak detector is characterized by comprising the following steps: the method comprises the following steps:
s1, preparing a workpiece to be detected and auxiliary components required, and debugging the leak detector body (1) before testing;
s2, connecting the placing gas tank (3) with the leak detector body (1) through the connecting device (4), so as to connect the leak detector body (1);
s3, detecting a workpiece to be detected, putting a tool to be detected into a gas tank (3), adjusting the leak detector body (1) through a display screen (2) and a function key (5), and detecting internal components of the gas tank (3);
s4, recording data, recording the data, displaying the related data through the display screen (2), and recording the data, so that the method is practical;
and S5, post-processing after detection is finished, closing the equipment after detection is finished, dismantling the auxiliary equipment, and dismantling the gas tank (3) from the leak detector body (1).
8. The novel helium mass spectrometer leak detector detection method as claimed in claim 7, characterized in that in the step S2, the tapered thread (403) and the rubber ring (408) are fixed in the leak detector body (1) through the fastening bolt (404), and the fixation is firmer.
9. The method of claim 7, wherein said S1 is adapted to collect the moving wheel (603) at the bottom of the leak detector body (1) during operation, and the moving wheel (603) is adapted to move when the leak detector body (1) needs to move, which is practical.
CN202110868187.7A 2021-07-30 2021-07-30 Novel helium mass spectrometer leak detector and detection method thereof Pending CN113551853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110868187.7A CN113551853A (en) 2021-07-30 2021-07-30 Novel helium mass spectrometer leak detector and detection method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110868187.7A CN113551853A (en) 2021-07-30 2021-07-30 Novel helium mass spectrometer leak detector and detection method thereof

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Publication Number Publication Date
CN113551853A true CN113551853A (en) 2021-10-26

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007057359A1 (en) * 2005-11-16 2007-05-24 Oerlikon Leybold Vacuum Gmbh Mobile leak detector with flushing connection
CN109211496A (en) * 2018-09-30 2019-01-15 苏州市铭将意电子科技有限公司 A kind of vacuum leak detector and its detection method
CN110160713A (en) * 2019-05-31 2019-08-23 安徽歌博科技有限公司 A kind of helium mass spectrometer leak detector probe installation tool
CN211433285U (en) * 2019-07-22 2020-09-08 成都丰兆天科技有限公司 Medical laser therapeutic instrument
CN212567822U (en) * 2020-08-04 2021-02-19 安徽一索电子电器有限公司 Finished relay antiseep detection device
CN212646008U (en) * 2020-07-21 2021-03-02 深圳华尔升智控技术有限公司 Gun type suction gun convenient to fix
CN112545210A (en) * 2020-12-09 2021-03-26 谭巧林 Storage rack with multi-angle splicing structure for logistics supply
CN113028178A (en) * 2021-03-02 2021-06-25 安徽博为光电科技有限公司 Workpiece quick joint for vacuum helium leak detection

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007057359A1 (en) * 2005-11-16 2007-05-24 Oerlikon Leybold Vacuum Gmbh Mobile leak detector with flushing connection
CN109211496A (en) * 2018-09-30 2019-01-15 苏州市铭将意电子科技有限公司 A kind of vacuum leak detector and its detection method
CN110160713A (en) * 2019-05-31 2019-08-23 安徽歌博科技有限公司 A kind of helium mass spectrometer leak detector probe installation tool
CN211433285U (en) * 2019-07-22 2020-09-08 成都丰兆天科技有限公司 Medical laser therapeutic instrument
CN212646008U (en) * 2020-07-21 2021-03-02 深圳华尔升智控技术有限公司 Gun type suction gun convenient to fix
CN212567822U (en) * 2020-08-04 2021-02-19 安徽一索电子电器有限公司 Finished relay antiseep detection device
CN112545210A (en) * 2020-12-09 2021-03-26 谭巧林 Storage rack with multi-angle splicing structure for logistics supply
CN113028178A (en) * 2021-03-02 2021-06-25 安徽博为光电科技有限公司 Workpiece quick joint for vacuum helium leak detection

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