CN113541437A

CN113541437A - Electrostatic stepping motor

Info

Publication number: CN113541437A
Application number: CN202110609874.7A
Authority: CN
Inventors: 王宏强; 易正隆
Original assignee: Southwest University of Science and Technology
Current assignee: Southwest University of Science and Technology; Southern University of Science and Technology
Priority date: 2021-06-01
Filing date: 2021-06-01
Publication date: 2021-10-22

Abstract

The invention discloses an electrostatic stepping motor, comprising: stator and active cell, stator and active cell set up with the laminating mode, the stator includes a plurality of first basic units, a plurality of first power supply line and first insulation layer, every first basic unit all includes a plurality of stator electrodes, a plurality of stator electrodes are connected with a plurality of first power supply line respectively, first insulation layer wraps up outside a plurality of first basic units and a plurality of first power supply line, the active cell includes a plurality of second basic units, a plurality of second power supply line and second insulation layer, every second basic unit all includes a plurality of active cell electrodes, a plurality of active cell electrodes are connected with a plurality of second power supply line respectively, the second insulation layer wraps up outside a plurality of second basic units and a plurality of second power supply line. The stepping motor improves the stepping precision of the stepping motor under the condition of not changing the processing precision, realizes various different stepping precisions by changing the number of the electrodes in the first basic unit and the second basic unit, and reduces the cost of the high-precision stepping motor.

Description

Electrostatic stepping motor

Technical Field

The invention relates to the technical field of mechanical engineering, in particular to an electrostatic stepping motor.

Background

In recent years, with the development of technology, higher demands have been made on a high-precision and low-cost driver. The stepping motor has no accumulated error, stable step pitch and high precision, and is widely applied to the mechanical field, the high-precision advanced fields of photoetching machines, electron microscopes, medical instruments and the like. The traditional electromagnetic stepping motor needs complicated control modes for improving the precision, has high cost, is easily influenced by a magnetic field, and is difficult to apply to high-precision instruments such as a nuclear magnetic resonance machine.

The stepping motor breaks through the limitation of the traditional electromagnetic motor in principle, can realize processing through an electronic processing technology, quickly reduces the production cost of the high-precision motor, and has the advantages of simple structure and simple and convenient control, thereby being very colorful in the field of micro-electro-mechanical systems. However, the stepping precision of the existing stepping motor is completely limited by the processing precision, which causes the cost of the high-precision motor to be too high.

Thus, there is still a need for improvement and development of the prior art.

Disclosure of Invention

The present invention provides an electrostatic stepping motor, which aims to solve the problem that the stepping precision of the existing stepping motor is completely limited by the processing precision, resulting in the cost of the high-precision motor being too high.

The technical scheme adopted by the invention for solving the problems is as follows:

in a first aspect, an embodiment of the present invention provides an electrostatic stepper motor, including: stator and active cell, the stator with the active cell sets up with the laminating mode, the stator includes a plurality of first basic units, a plurality of first power supply line and first insulation layer, every first basic unit all includes a plurality of stator electrodes, a plurality of stator electrodes in each first basic unit respectively with a plurality of first power supply line are connected, first insulation layer wrap up in a plurality of first basic units with outside a plurality of first power supply line, the active cell includes a plurality of second basic units, a plurality of second power supply line and second insulation layer, every second basic unit all includes a plurality of active cell electrodes, a plurality of active cell electrodes in each second basic unit respectively with a plurality of second power supply line are connected, the second insulation layer wrap up in a plurality of second basic units with outside a plurality of second power supply line.

The number of stator electrodes in each first base unit is not equal to the number of mover electrodes in each second base unit.

The electrostatic stepper motor, wherein the stepping precision of the stepper motor is determined by the number of stator electrodes in each first base unit and the number of mover electrodes in each second base unit.

The plurality of stator electrodes are arranged at equal intervals along the long axis direction of the first insulating layer, and the electrode width of each stator electrode in each first base unit is equal to the electrode interval between each stator electrode.

The plurality of mover electrodes are arranged at equal intervals along the long axis direction of the second insulating layer, and the electrode width of each mover electrode in each second base unit is equal to the electrode interval between the mover electrodes.

In the electrostatic stepping motor, the number of stator electrodes in each first base unit is equal to the number of the first power supply lines, and the number of mover electrodes in each second base unit is equal to the number of the second power supply lines.

The electrostatic stepping motor is characterized in that contacts are arranged on the first power supply lines and used for being connected with a first driving power supply, the first driving power supply is used for driving the stator, and the number of phases of the first driving power supply is equal to that of stator electrodes in each first basic unit.

The electrostatic stepping motor is characterized in that contacts are arranged on the second power supply lines and used for being connected with a second driving power supply, the second driving power supply is used for driving the rotor, and the number of phases of the second driving power supply is equal to the number of electrodes of the rotor in each second basic unit.

The electrostatic stepper motor, wherein the first insulating layer is disposed on one side or both sides of the plurality of first base units, and the second insulating layer is disposed on one side or both sides of the plurality of second base units.

The invention has the beneficial effects that: the stepping motor can improve the stepping precision of the electrostatic stepping motor under the condition of not changing the processing precision, and can realize different stepping precisions by changing the number of the stator electrodes and the number of the rotor electrodes in the first base unit and the second base unit, thereby being suitable for various occasions and reducing the cost of the high-precision stepping motor.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of an electrostatic stepping motor according to an embodiment of the present invention;

fig. 2 is a cross-sectional view of an electrostatic stepping motor according to an embodiment of the present invention;

fig. 3 is a schematic cross-sectional structure diagram of a first base unit and a second base unit in an electrostatic stepper motor according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a stator electrode and a mover electrode in an electrostatic stepper motor provided by an embodiment of the present invention;

fig. 5 is a schematic structural diagram of an electrostatic stepping motor according to a second embodiment of the present invention;

fig. 6 is a cross-sectional view of an electrostatic stepping motor according to a second embodiment of the present invention.

The various symbols in the drawings: 1. a stator; 2. a mover; 11. a first base unit; 12. a first power supply line; 13. a first insulating layer; 21. a second base unit; 22. a second power supply line; 23. a second insulating layer; 111. a stator electrode; 211. and a mover electrode.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.

In recent years, with the continuous development of technology, higher requirements are put forward on drivers with high precision and low cost, and a stepping motor has no accumulated error, stable step pitch and higher precision, so that the stepping motor is widely applied to the mechanical field, particularly the robot industry, and meanwhile, the stepping motor is widely applied to high-precision advanced fields such as a photoetching machine, an electron microscope, a medical instrument and the like.

In addition to the above applications, as science and technology is continuously developed to be precise and sophisticated, high-precision equipment similar to a nano positioning platform and a cell operation platform puts high requirements on motor driving. The traditional motor is difficult to adapt to the requirements of emerging technologies due to the defects of complex structure, complex process, low efficiency and the like. In order to overcome the problems of the traditional motor, the novel motors such as the electrostatic motor and the like are produced at the same time, the electrostatic motor breaks through the limitation of the traditional electromagnetic motor in principle, the processing can be realized through an electronic processing technology, the production cost of the high-precision motor is rapidly reduced, and the electrostatic motor has the advantages of simple structure and simple and convenient control and is very colorful in the field of micro electro mechanical systems. However, the existing stepping motor is completely limited by the processing precision, which causes the cost of the high-precision motor to be too high, and the motor is required to be processed and customized according to a specific scene, so that the motor is inconvenient to use as the stepping motor.

In order to solve the problems of the prior art, the present invention provides an electrostatic stepping motor, as shown in fig. 1 to 6, an electrostatic stepping motor provided in an embodiment of the present invention includes: the stator 1 and the rotor 2 are arranged in a single-layer or multi-layer overlapping manner, the stator 1 includes a plurality of first base units 11, a plurality of first power supply lines 12, and a first insulating layer 13, each of the first base units 11 includes a plurality of stator electrodes 111, the plurality of stator electrodes 111 in each of the first base units 11 are respectively connected to the plurality of first power supply lines 12, the first insulating layer 13 is wrapped outside the plurality of first base units 11 and the plurality of first power supply lines 12, the mover 2 includes a plurality of second base units 21, a plurality of second power supply lines 22, and a second insulating layer 23, each of the second base units 21 includes a plurality of mover electrodes 211, the plurality of mover electrodes 211 in each of the second base units 21 are respectively connected to the plurality of second power supply lines 22, the second insulation layer 23 is wrapped outside the plurality of second base units 21 and the plurality of second power supply lines 22. The electrostatic stepping motor of the embodiment is driven by multi-phase alternating current, and when the motor works, corresponding alternating current is introduced into the rotor 2 and the stator 1 through an external power supply, so that electrostatic force is generated between the rotor 2 and the stator, and the rotor and the stator have the mutual attraction effect, so that electric energy is converted into mechanical energy. When the stator 1 is fixed, the rotor 2 is driven by attraction force, moves forward and stops at a balance position, when continuous motion is needed, the frequency of alternating voltage is only needed to be increased, the motor is switched to the next point position before reaching the balance position, and therefore continuous stepping motion of the motor is achieved. The stepping motor in this embodiment can improve the stepping accuracy of the electrostatic stepping motor without changing the processing accuracy, and can realize various different stepping accuracies by changing the number of the stator electrodes and the number of the mover electrodes in the first base unit 11 and the second base unit 21, thereby being suitable for various occasions and reducing the cost of the high-accuracy stepping motor.

In a specific embodiment, the mover 2 and the stator 1 are both connected to an alternating square wave, and if the number of electrodes of the mover is m and the number of electrodes of the stator is n, the control form of the square wave transformation is as follows: the sequence of positive electricity supply of the rotor is 1 → 12 → 2 → 23 → 3 → … … → m electrodes, the rest of the rotor electrodes of the rotor are negative electricity supply, the stator is the same, the sequence of negative electricity supply is 1 → 12 → 2 → … … → n electrodes, the rest of the stator electrodes are positive electricity supply, 1 ÷ 1 rotor positive electricity supply is started to be supplied to the stator negative electricity, the cycle is repeated in turn until 1 ÷ 1 appears at the 2 nd time, namely, a period, the electricity supply sequence of 2 times the number of the stator electrodes in the first basic unit and the number of the rotor electrodes in the second basic unit is the smallest common multiple, and then the continuous cycle electricity supply is carried out according to the period to enable the stepping motor to carry out continuous stepping motion according to the designed precision.

In a specific embodiment, the first insulating layer 13 is disposed on one side or both sides of the plurality of first base units 11, the second insulating layer 23 is disposed on one side or both sides of the plurality of second base units 21, and the first insulating layer 13 and the second insulating layer 23 may be made of a flexible insulating material, such as barium carbonate, etc., so that the manufactured stepping motor is a flexible motor.

In a specific embodiment, in order to prevent the friction force between the stator 1 and the mover 2 from being too large to affect the motion precision of the motor, the first insulating layer 13 and the second insulating layer 23 may use an insulating medium with a lubricating effect, such as glass beads with a particle size of 30-50 μm, so as to convert the sliding friction between the stator 1 and the mover 2 into rolling friction, and greatly reduce the negative effect caused by the friction force. However, when glass beads having a particle size of 30 to 50 μm are used as the first insulating layer 13 and the second insulating layer 23, the glass beads need to be uniformly coated so as not to generate torque to affect the precise movement of the motor.

The step accuracy of the electrostatic stepping motor provided in this embodiment is determined by the number of stator electrodes in each first base unit 11 and the number of mover electrodes in each second base unit 21, the number of stator electrodes in each first base unit 11 is equal, the number of mover electrodes in each second base unit 21 is equal, and the number of stator electrodes in each first base unit 11 is not equal to the number of mover electrodes in each second base unit 21. In a specific implementation, the number of electrodes on one of the first base units 11 and the second base units 21 is less than or equal to twice the number of electrodes on the other, that is, the number of stator electrodes in each first base unit 11 is less than or equal to twice the number of mover electrodes in each second base unit 21, or the number of mover electrodes in each second base unit 21 is less than or equal to twice the number of stator electrodes in each first base unit 11. For example, the number of stator electrodes in each first base unit is 4, the number of mover electrodes in each second base unit is 3, the number of stator electrodes in each first base unit 11 is 3, and the number of mover electrodes in each second base unit 21 is 2.

In an embodiment, the number of the stator electrodes in each of the first base units 11 is greater than the number of the mover electrodes in each of the second base units 21, and the step precision of the electrostatic stepping motor is obtained by dividing the number of the stator electrodes in each of the first base units 11 by the least common multiple of the number of the mover electrodes in each of the second base units 21 and the number of the stator electrodes in each of the first base units 11 and multiplying the electrode length of the stator electrodes. For example, when the number of stator electrodes in each first base unit 11 is 4, the number of mover electrodes in each second base unit 21 is 3, and the electrode length S is, the step accuracy of the electrostatic stepping motor is 4/12 × S. When the difference between the number of stator electrodes in each first base unit 11 and the number of mover electrodes in each second base unit 21 is 1, the stepping accuracy of the electrostatic stepping motor is maximized, and it is necessary to improve the processing accuracy of the stepping motor to continuously improve the stepping accuracy of the stepping motor.

In a specific embodiment, the plurality of stator electrodes 111 and the plurality of stator electrodes 211 are made of copper or other conductive materials, the plurality of stator electrodes 111 are disposed at equal intervals along the long axis direction of the first insulating layer 13, the electrode width of each stator electrode 111 in each first base unit 11 is equal, and the electrode width of each stator electrode 111 in each first base unit 11 is equal to the electrode distance between each stator electrode 111, that is, the ratio of the electrode width of each stator electrode 111 in each first base unit 11 to the electrode distance between each stator electrode 111 is 1: 1. Similarly, the plurality of mover electrodes 211 are arranged at equal intervals along the long axis direction of the second insulating layer 23, the electrode width of each mover electrode 211 in each second base unit 23 is equal, and the electrode width of each mover electrode 211 in each second base unit 23 is equal to the electrode spacing between the mover electrodes 211, that is, the ratio of the electrode width of each mover electrode 211 in each second base unit 21 to the electrode spacing between the mover electrodes 211 is 1: 1. When the mover 2 and the stator 1 are attached, the mover electrodes 211 and the stator electrodes 111 need to be completely aligned to avoid additional moment caused by deflection from damaging the stepping precision.

In one embodiment, the first power supply lines 12 are connected to a first driving power source for driving the stator 1, contacts for connection to the first driving power source are disposed on the first power supply lines 12, the number of phases of the first driving power source is equal to the number of stator electrodes in each of the first base units 11, and the first power supply lines 12 are respectively connected to each phase power source of the first driving power source. For example, when the number of the stator electrodes 111 in each first base unit 11 is 4, the stator 1 needs to be driven by a 4-phase power supply, that is, the first driving power supply is a 4-phase power supply, the total number of the first power supply lines 12 distributed outside the stator electrodes 111 is 4, the 4 stator electrodes 111 in each first base unit are respectively connected to the 4 first power supply lines 12, the 4 first power supply lines 12 are respectively connected to the 4-phase power supply of the first driving power supply, and the first driving power supply can supply power to the plurality of stator electrodes 111.

In one embodiment, the plurality of second power supply lines 22 are connected to a second driving power source for driving the mover 2, contacts for connection to the second driving power source are disposed on the plurality of second power supply lines 22, the number of phases of the second driving power source is equal to the number of mover electrodes in each of the second base units 21, and the plurality of second power supply lines 22 are respectively connected to each phase power source of the second driving power source. For example, when the number of the mover electrodes 211 in each of the second base units 21 is 3, the mover 2 needs to be driven by a 3-phase power supply, that is, the second driving power supply is a 3-phase power supply, the total number of the plurality of second power supply lines 22 distributed outside the mover electrodes 211 is 3, the 3 mover electrodes in each of the second base units 21 are respectively connected to the 3 second power supply lines, the 3 second power supply lines 22 are respectively connected to the 3-phase power supply of the second driving power supply, and the second driving power supply can supply power to the plurality of mover electrodes 211.

The invention is further illustrated by the following specific examples.

Example 1: in this embodiment, a 3-4 phase electrostatic stepping motor is taken as an example for explanation, the number of stator electrodes in each first base unit 11 is 4, the number of mover electrodes in each second base unit 21 is 3, and in practical application, the number of stator electrodes in each first base unit 11 and the number of mover electrodes in each second base unit 21 may be combined in various ways.

As shown in fig. 1 to 4, the 3-4 phase electrostatic stepping motor includes: the stator 1 and the rotor 2, the stator 1 and the rotor 2 adopt flexible structures and are arranged in a way of mutually attaching, the stator 1 includes a plurality of first base units 11, a plurality of first power supply lines 12, and a first insulating layer 13, each of the first base units 11 includes a plurality of stator electrodes 111, the plurality of stator electrodes 111 in each of the first base units 11 are respectively connected to the plurality of first power supply lines 12, the first insulating layer 13 is wrapped outside the plurality of first base units 11 and the plurality of first power supply lines 12, the mover 2 includes a plurality of second base units 21, a plurality of second power supply lines 22, and a second insulating layer 23, each of the second base units 21 includes a plurality of mover electrodes 211, the plurality of mover electrodes 211 in each of the second base units 21 are respectively connected to the plurality of second power supply lines 22, the second insulation layer 23 is wrapped outside the plurality of second base units 21 and the plurality of second power supply lines 22.

Further, the number of the first base units 11 is 50, and the number of the stator electrodes in each first base unit 11 is 4, that is, the total number of the stator electrodes 111 is 200; the number of the second base units 21 is 50, the number of the mover electrodes in each second base unit 21 is 3, that is, the total number of the mover electrodes 211 is 150, the width of the stator electrode 111 is 112.5 μm, the width of the mover electrode 211 is 150 μm, and the step precision of the stepping motor is 37.5 μm.

With continued reference to fig. 1-4, the plurality of stator electrodes 111 are equally spaced along the long axis of the first insulating layer 13Distance setting, i.e. the electrode spacing l of the individual stator electrodes 111_wEqual, electrode width l of each stator electrode 111 in each first base unit 11_nEqual and the electrode width l of each stator electrode 111_nElectrode spacing l from each stator electrode 111_wThe ratio of (A) to (B) is 1: 1. Similarly, the plurality of mover electrodes 211 are disposed at equal intervals along the long axis direction of the second insulating layer 23, that is, the electrode interval l of each mover electrode 211_sEqual, electrode width l of each mover electrode 211 in each second base unit 21_mEqual and the electrode width l of each mover electrode 211_mElectrode spacing l from each mover electrode 211_sThe ratio of (A) to (B) is 1: 1.

With reference to fig. 2, the first power supply lines 12 are connected to a first driving power supply for driving the stator 1, contacts for connecting to the first driving power supply are disposed on the first power supply lines 12, the first driving power supply is a 4-phase power supply, the number of the first power supply lines 12 is 4, the 4 first power supply lines 12 are respectively connected to each phase power supply of the second driving power supply, the second power supply lines 22 are connected to a second driving power supply for driving the mover 2, contacts for connecting to the second driving power supply are disposed on the second power supply lines 22, the second driving power supply is a 3-phase power supply, the number of the second power supply lines 22 is 3, and the 3 second power supply lines 22 are respectively connected to each phase power supply of the second driving power supply.

In specific implementation, in order to prevent the motion precision of the motor from being affected by the excessive friction force between the stator 1 and the mover 2, the first insulating layer 13 and the second insulating layer 23 may use an insulating medium with a lubricating effect, such as glass beads with a particle size of 30-50 μm, so as to convert the sliding friction between the stator 1 and the mover 2 into rolling friction, and greatly reduce the negative effect caused by the friction force. However, when glass beads having a particle size of 30 to 50 μm are used as the first insulating layer 13 and the second insulating layer 23, the glass beads need to be uniformly coated so as not to generate torque to affect the precise movement of the motor.

Example 2: in this embodiment, a 2-3 phase electrostatic stepping motor is taken as an example for explanation, the number of stator electrodes in each first base unit 11 is 3, the number of mover electrodes in each second base unit 21 is 2, and in practical application, the number of stator electrodes in each first base unit 11 and the number of mover electrodes in each second base unit 21 may be combined in various ways.

As shown in fig. 4 to 6, the 2-3 phase electrostatic stepping motor includes: the stator 1 and the rotor 2, the stator 1 and the rotor 2 adopt flexible structures and are arranged in a way of mutually attaching, the stator 1 includes a first base unit 11, a plurality of first power supply lines 12, and a first insulating layer 13, each first base unit 11 includes a plurality of stator electrodes 111, the plurality of stator electrodes 111 in each first base unit 11 are respectively connected to the plurality of first power supply lines 12, the first insulating layer 13 is wrapped outside the plurality of first base units 11 and the plurality of first power supply lines 12, the mover 2 includes a plurality of second base units 21, a plurality of second power supply lines 22, and a second insulating layer 23, each of the second base units 21 includes a plurality of mover electrodes 211, the plurality of mover electrodes 211 in each of the second base units 21 are respectively connected to the plurality of second power supply lines 22, the second insulation layer 23 is wrapped outside the plurality of second base units 21 and the plurality of second power supply lines 22.

Further, the number of the first base units is 50, the number of the stator electrodes in each first base unit 11 is 3, that is, the total number of the stator electrodes 111 is 150, the number of the second base units 21 is 50, the number of the mover electrodes in each second base unit is 2, that is, the total number of the mover electrodes 211 is 100, and the width l of the stator electrode 111 is 100_n150 μm, the width l of the mover electrode 211_m225 μm, the stepping precision of the stepping motor is 75 μm.

With reference to fig. 4 to 6, the plurality of stator electrodes 111 are disposed at equal intervals along the long axis direction of the first insulating layer 13, that is, the electrode interval l of each stator electrode 111_wEqual, electrode width l of each stator electrode 111 in each first base unit 11_nEqual and the electrode width l of each stator electrode 111_nElectricity to each stator electrode 111Inter-polar distance l_wThe ratio of (A) to (B) is 1: 1. Similarly, the plurality of mover electrodes 211 are disposed at equal intervals along the long axis direction of the second insulating layer 23, that is, the electrode interval l of each mover electrode 211_sEqual, electrode width l of each mover electrode 211 in each second base unit 21_mEqual and the electrode width l of each mover electrode 211_mElectrode spacing l from each mover electrode 211_sThe ratio of (A) to (B) is 1: 1.

As shown in fig. 6, the first power supply lines 12 are connected to a first driving power supply for driving the stator 1, contacts for connecting to the first driving power supply are disposed on the first power supply lines 12, the first driving power supply is a 3-phase power supply, the number of the first power supply lines 12 is 3, the 3 first power supply lines 12 are respectively connected to each phase power supply of the second driving power supply, the second power supply lines 22 are connected to a second driving power supply for driving the mover 2, contacts for connecting to the second driving power supply are disposed on the second power supply lines 22, the second driving power supply is a 2-phase power supply, the number of the second power supply lines 22 is 2, and the 2 second power supply lines 22 are respectively connected to each phase power supply of the second driving power supply.

In summary, the present invention discloses an electrostatic stepping motor, including: stator and active cell, the stator with the active cell sets up with the laminating mode, the stator includes a plurality of first basic units, a plurality of first power supply line and first insulation layer, every first basic unit all includes a plurality of stator electrodes, a plurality of stator electrodes in each first basic unit respectively with a plurality of first power supply line are connected, first insulation layer wrap up in a plurality of first basic units with outside a plurality of first power supply line, the active cell includes a plurality of second basic units, a plurality of second power supply line and second insulation layer, every second basic unit all includes a plurality of active cell electrodes, a plurality of active cell electrodes in each second basic unit respectively with a plurality of second power supply line are connected, the second insulation layer wrap up in a plurality of second basic units with outside a plurality of second power supply line. The stepping motor can improve the stepping precision of the stepping motor under the condition of not changing the processing precision, and can realize different stepping precisions by changing the number of the stator electrodes and the number of the rotor electrodes in the first base unit and the second base unit, thereby being suitable for various occasions and reducing the cost of the high-precision stepping motor.

It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.

Claims

1. An electrostatic stepping motor, comprising: stator and active cell, the stator with the active cell sets up with the laminating mode, the stator includes a plurality of first basic units, a plurality of first power supply line and first insulation layer, every first basic unit all includes a plurality of stator electrodes, a plurality of stator electrodes in each first basic unit respectively with a plurality of first power supply line are connected, first insulation layer wrap up in a plurality of first basic units with outside a plurality of first power supply line, the active cell includes a plurality of second basic units, a plurality of second power supply line and second insulation layer, every second basic unit all includes a plurality of active cell electrodes, a plurality of active cell electrodes in each second basic unit respectively with a plurality of second power supply line are connected, the second insulation layer wrap up in a plurality of second basic units with outside a plurality of second power supply line.

2. The electrostatic stepper motor of claim 1, wherein the number of stator electrodes in each first base unit is not equal to the number of mover electrodes in each second base unit.

3. The electrostatic stepper motor of claim 1, wherein the stepper motor has a step accuracy determined by the number of stator electrodes in each first base unit and the number of mover electrodes in each second base unit.

4. The electrostatic stepping motor according to claim 1, wherein said plurality of stator electrodes are arranged at equal intervals in a direction of a long axis of said first insulating layer, and an electrode width of each stator electrode in each first base unit is equal to an electrode interval between each stator electrode.

5. The electrostatic stepping motor according to claim 1, wherein said plurality of mover electrodes are arranged at equal intervals in a direction of a long axis of said second insulating layer, and an electrode width of each of said mover electrodes in each of said second base units is equal to an electrode interval between each of said mover electrodes.

6. The electrostatic stepping motor according to claim 1, wherein the number of stator electrodes in each of the first base units is equal to the number of the first power supply lines, and the number of mover electrodes in each of the second base units is equal to the number of the second power supply lines.

7. The electrostatic stepping motor according to claim 1, wherein contacts for connecting a first driving power source for driving said stator are arranged on said plurality of first power supply lines, and the number of phases of said first driving power source is equal to the number of stator electrodes in each of said first base units.

8. The electrostatic stepper motor of claim 1, wherein contacts are disposed on the second power lines for connecting a second driving power source for driving the mover, and the number of phases of the second driving power source is equal to the number of electrodes of the mover in each of the second base units.

9. The electrostatic stepping motor according to claim 1, wherein said first insulating layer is disposed on one side or both sides of said plurality of first base units, and said second insulating layer is disposed on one side or both sides of said plurality of second base units.