CN113532700A - Flexible pressure sensor with adjustable sensitivity and preparation method and application thereof - Google Patents
Flexible pressure sensor with adjustable sensitivity and preparation method and application thereof Download PDFInfo
- Publication number
- CN113532700A CN113532700A CN202110703418.9A CN202110703418A CN113532700A CN 113532700 A CN113532700 A CN 113532700A CN 202110703418 A CN202110703418 A CN 202110703418A CN 113532700 A CN113532700 A CN 113532700A
- Authority
- CN
- China
- Prior art keywords
- pressure sensor
- flexible pressure
- conductive sponge
- sensitivity
- adjustable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a flexible pressure sensor with adjustable sensitivity and a preparation method and application thereof. The method comprises the following steps: preparing titanium carbide nanosheet dispersion liquid; soaking sponge in titanium carbide nanosheet dispersion liquid, and drying in vacuum to obtain conductive sponge in a first state; immersing the conductive sponge in the first state into a silver nitrate solution, and performing vacuum drying to obtain the conductive sponge in the second state; preparing an interdigital electrode on a polyimide film by using a laser induction technology; and pasting the conductive sponge in the second state on the interdigital electrode to enable the conductive sponge to be in contact with the interdigital electrode, and then connecting the lead to two ends of the interdigital electrode to obtain the flexible pressure sensor with adjustable sensitivity. The flexible pressure sensor prepared by the invention has the advantages of low cost, simple preparation process and adjustable sensitivity, and can meet the detection requirements of different occasions.
Description
Technical Field
The invention relates to the technical field of biosensors, in particular to a flexible pressure sensor with adjustable sensitivity and a preparation method and application thereof.
Background
In recent years, flexible pressure sensors are widely applied to the fields of human joint movement, soft robots and the like. The flexible pressure sensor mainly comprises three types, namely a piezoresistive type, a piezoelectric type and a pressure-capacitance type. Under the action of the external pressure, the electrical property of the active functional material changes, so that the output of the electrical signal (resistance, capacitance or voltage) of the sensor changes. And establishing a linear relation between the output of the electric signal and the external pressure, and measuring the external pressure. The substrate material of the early flexible pressure sensor is mostly Polydimethylsiloxane (PDMS), Polyimide (PI) and other polymers, and the active functional material and the conductive material are transferred to the surface of the substrate material by various methods to form a planar structure. In recent years, higher requirements have been placed on the structure and material of the flexible pressure sensor for high detection accuracy and high sensitivity detection.
Among the numerous structures, flexible pressure sensors of three-dimensional porous structure have been extensively studied in recent years. Compared with the traditional structure, the three-dimensional porous structure has relatively lower compression modulus, so that the three-dimensional porous structure obtains larger deformation under lower external pressure. In the piezoresistive sensor, the surface of the material of the three-dimensional porous structure is decorated with a conductive material to impart conductivity. When it is compressed, the conductive materials come into contact with each other, so that the number of conductive paths increases and the resistance of the sensor decreases. The common methods for preparing the sensor with the three-dimensional porous structure mainly comprise a freeze-drying and high-temperature annealing method, a template method and the like. The methods are complicated and time-consuming to operate, and the performance of the obtained sensor cannot meet the requirements of various test occasions. Therefore, it is necessary to develop a flexible pressure sensor with simple manufacturing steps and diversified performances.
Disclosure of Invention
Aiming at the characteristics that the existing flexible pressure sensor is complex in preparation process and can only meet the single detection requirement, the invention provides the flexible pressure sensor with the adjustable sensitivity of the sponge structure.
The invention provides the following technical scheme:
preparation method of flexible pressure sensor with adjustable sensitivity
The method comprises the following steps:
step S1: dispersing titanium carbide (Ti3C2) nanosheets in water to prepare a titanium carbide nanosheet dispersion liquid;
step S1, the specific method is as follows:
(1-1) to 10mL of 9mol/L concentrated hydrochloric acid was added 0.8g of LiF to obtain a LiF/HCl mixed solution. Subsequently, 0.5g of Ti was slowly added to the mixed solution3AlC2The powder was stirred at 50 ℃ for 48 h.
(1-2) the above solution was washed several times with deionized water until the solution pH was > 6. Then, the mixture was centrifuged at 3500r/min for 3min to obtain a precipitate.
(1-3) adding a proper amount of deionized water into the precipitate, and carrying out ultrasonic treatment for 1 hour in an ice bath. And centrifuging at 8000r/min for 1h, taking supernatant to obtain titanium carbide nanosheet dispersion, and adjusting the concentration to 4 mg/mL.
Step S2: soaking the sponge into the titanium carbide nanosheet dispersion liquid obtained in the step S1, and then performing vacuum drying to obtain a conductive sponge in a first state;
step S3: soaking the conductive sponge in the first state obtained in the step S2 in a silver nitrate solution, and then drying in vacuum to obtain the conductive sponge in the second state;
step S4: etching an interdigital electrode on the polyimide film by using a laser induction method;
step S5: and (4) attaching the conductive sponge in the second state obtained in the step (S3) to the interdigital electrode obtained in the step (S4), so that the conductive sponge is in contact with the interdigital electrode, and then connecting wires to two ends of the interdigital electrode, so as to prepare the flexible pressure sensor with adjustable sensitivity.
In step S1, a liquid phase stripping method is adopted to strip and obtain a titanium carbide nanosheet dispersion liquid, wherein the concentration of the titanium carbide nanosheet dispersion liquid is 4 mg/mL.
Step S2 specifically includes: soaking sponge with the size of 10 multiplied by 2mm into the titanium carbide nanosheet dispersion liquid, standing for 1-6 h at the temperature of 4 ℃, and then vacuum-drying for 60min at the temperature of 60 ℃ to obtain the conductive sponge in the first state.
In step S2, titanium carbide nanosheets are adsorbed onto the surface of the sponge. When the soaking time is too short, the conductivity is poor, and when the soaking time reaches a certain value, the adsorption amount of the titanium carbide reaches saturation, and at the moment, the conductivity of the conductive sponge in the first state reaches stability.
In step S3, the concentration of silver nitrate solution is 0.5-5 mmol/L, the vacuum drying time is 90min, and the temperature is 60 ℃.
In step S3, the soaking time of the conductive sponge in the first state in the silver nitrate solution is 1-5S. The conductive sponge in the first state is soaked in the silver nitrate solution for different time periods to generate different numbers of silver nanoparticles, so that the sensors with different sensitivities are obtained.
In step S3, after the conductive sponge in the first state is immersed in a silver nitrate solution, the titanium carbide nanosheets reduce silver ions in the solution into silver nanoparticles. The generation amount of the silver nanoparticles can be controlled by controlling the concentration of the silver nitrate solution and the soaking time.
The concentration of the silver nitrate solution in the step S3 is 1 mmol/L; further preferably, when the joint movement of the human body is monitored, the soaking time is 1 s. When the human body pulse is monitored, the soaking time is 3 s. When tomato fruit growth was monitored, the soaking time was 1 s.
In step S4, the thickness of the polyimide film is 130 μm, the laser power is 4W during laser induction, and the etching speed is 3 cm/S.
Application of flexible pressure sensor with adjustable sensitivity
The application in monitoring human joint movement, pulse and crop fruit growth.
In the invention, when the titanium carbide nanosheets are adsorbed on the surface of the sponge, the sponge is endowed with conductivity. When the sponge is compressed under certain external pressure, the titanium carbide nano sheets contact with each other, so that the conductive path is increased. In the process, more conductive paths are formed between the conductive sponge and the interdigital electrodes, so that the resistance is reduced. When the external force continues to increase, the number of the conductive paths does not increase any more, the stability is maintained, and the resistance does not decrease any more. When the conductive sponge in the first state is soaked in a silver nitrate solution, the reduction performance of the titanium carbide nanosheets enables silver ions in the solution to be reduced into silver nanoparticles which are distributed on the surface of the conductive sponge, and therefore the roughness of the surface of the conductive sponge is increased. Under the action of smaller external force, the contact between the silver nano particles can form more conductive paths, so that the sensitivity of the sensor is improved. The greater the number of silver nanoparticles, the higher the sensitivity. The invention utilizes the property to construct the flexible pressure sensor with different sensitivities by adjusting the roughness of the conductive sponge by the silver nano-particles, thereby realizing the monitoring of different application scenes such as human joint movement, pulse, fruit growth and the like.
The action principle of the flexible pressure sensor is as follows: when the conductive sponge in the first state is soaked in a silver nitrate solution, the reduction performance of the titanium carbide nanosheets enables silver ions in the solution to be reduced into silver nanoparticles which are distributed on the surface of the conductive sponge, and therefore the roughness of the surface of the conductive sponge is increased. Under the action of smaller external force, the contact between the silver nano particles can form more conductive paths, so that the sensitivity of the sensor is improved. The greater the number of silver nanoparticles, the higher the sensitivity. The relative rate of change of resistance is linear with ambient pressure. The magnitude of the ambient pressure can be calculated from the relative rate of change of resistance.
The invention has the beneficial effects that:
the invention utilizes the property to construct the flexible pressure sensor with different sensitivities, which can monitor different application scenes such as human joint movement, pulse, fruit growth and the like, and the flexible pressure sensor prepared by the invention has the advantages of lower cost for monitoring the indexes, simple preparation process and adjustable sensitivity, and can meet the detection requirements of different occasions.
Drawings
FIG. 1 is a graph of resistance after sponge soaking as a function of soaking time;
FIG. 2 is a graph of the rate of change of resistance versus pressure for a flexible pressure sensor made from a second state of conductive sponge (different silver nitrate solution concentrations);
FIG. 3 is a graph showing the variation of resistance rate with pressure of a flexible pressure sensor made of a second state of conductive sponge (different soaking times in silver nitrate solution)
FIG. 4 is a graph of the rate of change of resistance of a flexible pressure sensor made from a second state of conductive sponge to monitor knee flexion;
FIG. 5 is a graph of the rate of change of resistance of a flexible pressure sensor made of a second state of conductive sponge when monitoring pulse;
FIG. 6 is a graph of the rate of change of resistance of a flexible pressure sensor made from a second state of conductive sponge as it monitors the growth of tomato fruit.
Detailed Description
The invention will be described in further detail below with reference to the drawings and examples, which are intended to facilitate the understanding of the invention without limiting it in any way.
Example 1
Step S1: the titanium carbide nanosheet dispersion is prepared by stripping with a liquid phase stripping method, and the specific method is as follows:
1) to 10mL of 9mol/L concentrated hydrochloric acid was added 0.8g of lithium fluoride (LiF) to obtain a lithium fluoride/hydrochloric acid (LiF/HCl) mixed solution, and subsequently, to the lithium fluoride/hydrochloric acid mixed solution was slowly added 0.5g of titanium aluminum carbide (Ti)3AlC2) The powder was stirred at 50 ℃ for 48 h.
2) The above solution was washed several times with deionized water until the solution pH >6, followed by centrifugation at 3500r/min for 3min and the pellet taken.
3) Adding a proper amount of deionized water into the precipitate, carrying out ultrasonic treatment for 1 hour in an ice bath, centrifuging for 1 hour at 8000r/min, taking supernatant to obtain titanium carbide nanosheet dispersion, and adjusting the concentration to 4 mg/mL.
Step S2: soaking sponge with the size of 10mm multiplied by 2mm into the titanium carbide nanosheet dispersion liquid, taking out after soaking for different time at the temperature of 4 ℃, then carrying out vacuum drying in a vacuum drying oven with the temperature of 60 ℃ for 60min, obtaining the conductive sponge in the first state after drying, taking out the conductive sponge in the first state from the vacuum drying oven, and measuring the resistance between two points on the diagonal line of the sponge. The resistances of the conductive sponges with soaking times of 1, 2, 3, 4, 5, and 6h were measured as shown in fig. 1. It can be seen that in the initial stage of soaking, the resistance of the conductive sponge in the first state shows a trend of decreasing with the increase of the soaking time, which indicates that the titanium carbide nanosheets are continuously adsorbed on the surface of the sponge in the process. When the soaking time reaches 4h, the adsorption capacity of the titanium carbide nanosheets reaches saturation, and when the soaking time is longer, the resistance of the conductive sponge reaches a stable state and is not reduced any more. Therefore, the soaking time of the sponge is preferably 4 h.
Step S3: and (4) completely immersing the conductive sponge in the first state prepared in the step S2 into a silver nitrate solution with the concentration of 0.5mmol/L for 3S, taking out, and performing vacuum drying at 60 ℃ for 90min to obtain the conductive sponge in the second state.
Step S4: and etching the interdigital electrode on the polyimide film by using a laser induction method, wherein the thickness of the polyimide film is 130 micrometers, the laser power is 4W, and the etching speed is 3 cm/s.
Step S5: and (4) attaching the conductive sponge in the second state obtained in the step (S3) to the interdigital electrode in the step (S4), so that the conductive sponge is in contact with the interdigital electrode, and then connecting conducting wires to two ends of the interdigital electrode, so as to prepare the flexible pressure sensor with adjustable sensitivity.
Example 2
The procedure of example 2 is the same as that of example 1, except that:
in step S3, the concentration of the silver nitrate solution is 1 mmol/L.
Example 3
The procedure of example 3 is the same as that of example 1, except that:
in step S3, the concentration of the silver nitrate solution is 3 mmol/L.
Example 4
The procedure of example 4 is the same as that of example 1, except that:
in step S3, the concentration of the silver nitrate solution is 5 mmol/L.
The flexible pressure sensors with adjustable sensitivity obtained in the embodiments 1 to 4 are respectively connected with a multimeter, the initial resistance of the flexible pressure sensor with adjustable sensitivity is recorded, a certain pressure is applied to the flexible pressure sensor with adjustable sensitivity, the resistance value of the flexible pressure sensor with adjustable sensitivity is recorded after the pressure is applied, and the resistance change rate is calculated. (the resistance variation is the difference between the resistance of the sensor after applying pressure and the initial resistance, and the ratio of the resistance variation to the initial resistance is the resistance variation rate), drawing a standard curve of the resistance variation rate changing with the external pressure, and obtaining the sensitivity of the sensor. The conductive sponge in the first state is soaked in silver nitrate solution, so that silver nanoparticles are generated on the surface of the conductive sponge. The different concentrations of silver nitrate solutions produce different quantities of silver nanoparticles, and the different sensitivities of the resulting sensors. As a result, as shown in fig. 2, the sensor sensitivity showed a tendency to increase as the concentration of the silver nitrate solution increased. Meanwhile, the linear range of the detection of the sensor gradually decreases along with the increase of the concentration of the silver nitrate solution. The two indexes of sensitivity and linear range are integrated, and the concentration of the selected silver nitrate solution is 1 mmol/L.
Example 5
Step S1: the titanium carbide nanosheet dispersion is prepared by stripping with a liquid phase stripping method, and the specific method is as follows:
1) to 10mL of 9mol/L concentrated hydrochloric acid was added 0.8g of lithium fluoride (LiF) to obtain a lithium fluoride/hydrochloric acid (LiF/HCl) mixed solution, and subsequently, to the lithium fluoride/hydrochloric acid mixed solution was slowly added 0.5g of titanium aluminum carbide (Ti)3AlC2) The powder was stirred at 50 ℃ for 48 h.
2) The above solution was washed several times with deionized water until the solution pH >6, followed by centrifugation at 3500r/min for 3min and the pellet taken.
3) Adding a proper amount of deionized water into the precipitate, carrying out ultrasonic treatment for 1 hour in an ice bath, centrifuging for 1 hour at 8000r/min, taking supernatant to obtain titanium carbide nanosheet dispersion, and adjusting the concentration to 4 mg/mL.
Step S2: soaking sponge with the size of 10mm multiplied by 2mm into the titanium carbide nanosheet dispersion liquid at the temperature of 4 ℃ for 4 hours, taking out, then carrying out vacuum drying in a vacuum drying oven at the temperature of 60 ℃ for 60 minutes, and drying to obtain the conductive sponge in the first state.
Step S3: and (4) completely soaking the conductive sponge in the first state prepared in the step (S2) into a silver nitrate solution with the concentration of 1mmol/L for 1S, taking out, and performing vacuum drying at 60 ℃ for 90min to obtain the conductive sponge in the second state.
Step S4: and etching the interdigital electrode on the polyimide film by using a laser induction method, wherein the thickness of the polyimide film is 130 micrometers, the laser power is 4W, and the etching speed is 3 cm/s.
Step S5: and (4) attaching the conductive sponge in the second state obtained in the step (S3) to the interdigital electrode in the step (S4), so that the conductive sponge is in contact with the interdigital electrode, and then connecting conducting wires to two ends of the interdigital electrode, so as to prepare the flexible pressure sensor with adjustable sensitivity.
Example 6
The procedure of example 6 is the same as that of example 5, except that:
in step S3, the soaking time was 3 seconds.
Example 7
The procedure of example 7 is the same as that of example 5, except that:
in step S3, the soaking time is 5 seconds.
The flexible pressure sensors with adjustable sensitivity prepared in the embodiments 5 to 7 are respectively connected with a multimeter, the initial resistance of the flexible pressure sensor with adjustable sensitivity is recorded, a certain pressure is applied to the flexible pressure sensor with adjustable sensitivity, the resistance value of the flexible pressure sensor with adjustable sensitivity is recorded after the pressure is applied, the resistance change rate is calculated, and a curve of the resistance change rate changing along with the external pressure is drawn, so that the sensitivity of the flexible pressure sensor with adjustable sensitivity can be obtained. The soaking time in the silver nitrate solution can also affect the amount of silver nanoparticles produced, which in turn affects the sensitivity of the sensor. The results are shown in FIG. 3. In this example, the longer the soaking time of the conductive sponge in the first state in the silver nitrate solution, the higher the sensitivity of the resulting sensor, but the narrower the linear range. According to the time length of soaking in the silver nitrate solution, the sensors with different sensitivities are obtained, and therefore the function of adjusting the sensitivity is achieved.
Application of the flexible pressure sensor with adjustable sensitivity:
1) application to knee joint
The flexible sensor with adjustable sensitivity prepared in example 5 is pasted at the knee joint, a universal meter is connected to enable the knee to bend or straighten freely, the resistance change of the knee during free bending and straightening is recorded, and a curve of the resistance change rate changing with time is drawn.
The results are shown in FIG. 4. When the knee is bent, the joint part generates certain pressure on the sensor, so that the resistance of the sensor is reduced. When the knee is extended, the pressure disappears and the sensor resistance returns to the initial resistance.
2) Application to wrist pulse beating
The flexible sensor with adjustable sensitivity prepared in the embodiment 6 is pasted at the wrist pulse jumping position, a universal meter is connected, the resistance change is recorded, and a curve of the resistance change rate changing along with time is drawn.
The pulsation of the pulse gives the sensor some pressure, so that the sensor resistance decreases. The results are shown in FIG. 5. Note that, in order to fit the resistance change rate curve to the pulse waveform, the ordinate in fig. 5 is the inverse of the resistance change rate.
3) Application on tomato fruit surface
The flexible sensor with adjustable sensitivity prepared in example 5 is adhered to the surface of a tomato fruit, a universal meter is connected, the resistance change is recorded, and a curve of the resistance change rate changing along with time is drawn.
The results are shown in FIG. 6. Fruit swelling puts some pressure on the sensor, causing the sensor resistance to decrease. Thereby reflecting the growth state of the fruit.
The above-mentioned embodiments are intended to illustrate the technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modifications, additions, equivalents, etc. made within the scope of the principles of the present invention should be included in the scope of the present invention.
Claims (8)
1. A preparation method of a flexible pressure sensor with adjustable sensitivity is characterized by comprising the following steps:
step S1: dispersing titanium carbide nanosheets in water to prepare titanium carbide nanosheet dispersion liquid;
step S2: soaking the sponge into the titanium carbide nanosheet dispersion liquid obtained in the step S1, and then performing vacuum drying to obtain a conductive sponge in a first state;
step S3: soaking the conductive sponge in the first state obtained in the step S2 in a silver nitrate solution, and then drying in vacuum to obtain the conductive sponge in the second state;
step S4: etching an interdigital electrode on the polyimide film by using a laser induction method;
step S5: and (4) attaching the conductive sponge in the second state obtained in the step (S3) to the interdigital electrode obtained in the step (S4), so that the conductive sponge is in contact with the interdigital electrode, and then connecting wires to two ends of the interdigital electrode, so as to prepare the flexible pressure sensor with adjustable sensitivity.
2. The method for preparing the adjustable-sensitivity flexible pressure sensor according to claim 1, wherein the method comprises the following steps: in step S1, a liquid phase stripping method is adopted to strip and obtain a titanium carbide nanosheet dispersion liquid, wherein the concentration of the titanium carbide nanosheet dispersion liquid is 4 mg/mL.
3. The method for preparing the adjustable-sensitivity flexible pressure sensor according to claim 1, wherein the method comprises the following steps: step S2 specifically includes: soaking the sponge into the titanium carbide nanosheet dispersion liquid, standing for 1-6 h at the temperature of 4 ℃, and then vacuum-drying for 60min at the temperature of 60 ℃ to obtain the conductive sponge in the first state.
4. The method for preparing the adjustable-sensitivity flexible pressure sensor according to claim 1, wherein the method comprises the following steps: in step S3, the concentration of silver nitrate solution is 0.5-5 mmol/L, the vacuum drying time is 90min, and the temperature is 60 ℃.
5. The method for preparing the adjustable-sensitivity flexible pressure sensor according to claim 1, wherein the method comprises the following steps: in step S3, the soaking time of the conductive sponge in the first state in the silver nitrate solution is 1-5S.
6. The method for preparing the adjustable-sensitivity flexible pressure sensor according to claim 1, wherein the method comprises the following steps: in step S4, the thickness of the polyimide film is 130 μm, the laser power is 4W during laser induction, and the etching speed is 3 cm/S.
7. The utility model provides a sensitivity adjustable flexible pressure sensor which characterized in that: the preparation method is characterized by being prepared by the preparation method of any one of claims 1 to 5.
8. Use of the adjustable sensitivity flexible pressure sensor of claim 1, wherein: the application in monitoring human joint movement, pulse and crop fruit growth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110703418.9A CN113532700A (en) | 2021-06-24 | 2021-06-24 | Flexible pressure sensor with adjustable sensitivity and preparation method and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110703418.9A CN113532700A (en) | 2021-06-24 | 2021-06-24 | Flexible pressure sensor with adjustable sensitivity and preparation method and application thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113532700A true CN113532700A (en) | 2021-10-22 |
Family
ID=78125814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110703418.9A Pending CN113532700A (en) | 2021-06-24 | 2021-06-24 | Flexible pressure sensor with adjustable sensitivity and preparation method and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113532700A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113970395A (en) * | 2021-11-16 | 2022-01-25 | 浙江大学 | Flexible sensor with contact and non-contact sensing functions and manufacturing method thereof |
| CN115302902A (en) * | 2022-07-06 | 2022-11-08 | 河南工业大学 | Flexible magnetic sensor and preparation method thereof |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1585159A (en) * | 2003-07-30 | 2005-02-23 | Tdk株式会社 | Composite particle for electrode and method of making the same, electrode and method of making the same, and electrochemical device and method of making the same |
| US20130264116A1 (en) * | 2012-04-09 | 2013-10-10 | Nanocomp Technologies, Inc. | Nanotube Material Having Conductive Deposits to Increase Conductivity |
| CN108516528A (en) * | 2018-04-12 | 2018-09-11 | 大连理工大学 | A kind of three dimensional composite structure and its universal synthesis method based on three-dimensional MXene |
| CN109374711A (en) * | 2018-11-19 | 2019-02-22 | 浙江大学 | A kind of all solid state ion selective electrode and preparation method thereof based on the modification of MXene nanometer sheet |
| CN109903999A (en) * | 2019-03-08 | 2019-06-18 | 河北工业大学 | A kind of Ti3C2/NiCo2O4Combination electrode material and preparation method thereof |
| CN110375894A (en) * | 2019-07-08 | 2019-10-25 | 北京化工大学 | A kind of three-dimensional porous composite material and preparation method of MXene@CS@PDMS and application |
| CN110628155A (en) * | 2019-09-27 | 2019-12-31 | 中国科学院深圳先进技术研究院 | MXene/metal composite aerogel, preparation method and application thereof, and thermal interface material comprising MXene/metal composite aerogel |
| US20200029858A1 (en) * | 2018-07-29 | 2020-01-30 | nGagelT Digital Health, Inc. | Systems, Methods and Devices for Detecting and Identifying Substances in a Subject's Breath |
| CN111084975A (en) * | 2019-12-25 | 2020-05-01 | 陕西科技大学 | Leather-based pressure sensor for recording walking track, preparation method and application |
| CN111442861A (en) * | 2020-04-14 | 2020-07-24 | 华南理工大学 | Wearable bionic piezoresistive sensor and preparation method and application thereof |
| CN111777068A (en) * | 2020-05-24 | 2020-10-16 | 同济大学 | Novel chloride ion removing material Ti3C2TxPreparation method and application of/Ag |
| CN112146795A (en) * | 2020-09-17 | 2020-12-29 | 有研工程技术研究院有限公司 | Preparation method of pressure sensor based on composite sponge porous structure |
| CN112169816A (en) * | 2020-09-21 | 2021-01-05 | 东莞理工学院 | Three-dimensional porous MXene assembly and preparation method and application thereof |
| WO2021090103A1 (en) * | 2019-11-04 | 2021-05-14 | King Abdullah University Of Science And Technology | Mxene-derived metal-organic frameworks and method |
-
2021
- 2021-06-24 CN CN202110703418.9A patent/CN113532700A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1585159A (en) * | 2003-07-30 | 2005-02-23 | Tdk株式会社 | Composite particle for electrode and method of making the same, electrode and method of making the same, and electrochemical device and method of making the same |
| US20130264116A1 (en) * | 2012-04-09 | 2013-10-10 | Nanocomp Technologies, Inc. | Nanotube Material Having Conductive Deposits to Increase Conductivity |
| CN108516528A (en) * | 2018-04-12 | 2018-09-11 | 大连理工大学 | A kind of three dimensional composite structure and its universal synthesis method based on three-dimensional MXene |
| US20200029858A1 (en) * | 2018-07-29 | 2020-01-30 | nGagelT Digital Health, Inc. | Systems, Methods and Devices for Detecting and Identifying Substances in a Subject's Breath |
| CN109374711A (en) * | 2018-11-19 | 2019-02-22 | 浙江大学 | A kind of all solid state ion selective electrode and preparation method thereof based on the modification of MXene nanometer sheet |
| CN109903999A (en) * | 2019-03-08 | 2019-06-18 | 河北工业大学 | A kind of Ti3C2/NiCo2O4Combination electrode material and preparation method thereof |
| CN110375894A (en) * | 2019-07-08 | 2019-10-25 | 北京化工大学 | A kind of three-dimensional porous composite material and preparation method of MXene@CS@PDMS and application |
| CN110628155A (en) * | 2019-09-27 | 2019-12-31 | 中国科学院深圳先进技术研究院 | MXene/metal composite aerogel, preparation method and application thereof, and thermal interface material comprising MXene/metal composite aerogel |
| WO2021090103A1 (en) * | 2019-11-04 | 2021-05-14 | King Abdullah University Of Science And Technology | Mxene-derived metal-organic frameworks and method |
| CN111084975A (en) * | 2019-12-25 | 2020-05-01 | 陕西科技大学 | Leather-based pressure sensor for recording walking track, preparation method and application |
| CN111442861A (en) * | 2020-04-14 | 2020-07-24 | 华南理工大学 | Wearable bionic piezoresistive sensor and preparation method and application thereof |
| CN111777068A (en) * | 2020-05-24 | 2020-10-16 | 同济大学 | Novel chloride ion removing material Ti3C2TxPreparation method and application of/Ag |
| CN112146795A (en) * | 2020-09-17 | 2020-12-29 | 有研工程技术研究院有限公司 | Preparation method of pressure sensor based on composite sponge porous structure |
| CN112169816A (en) * | 2020-09-21 | 2021-01-05 | 东莞理工学院 | Three-dimensional porous MXene assembly and preparation method and application thereof |
Non-Patent Citations (4)
| Title |
|---|
| （美）内野研二著: "《国外名校最新教材精选 铁电器件 第2版》", 30 November 2017, 西安交通大学出版社 * |
| JIANFENG PING ET AL.: "《A stretchable and conductive fiber for multifunctional sensing and energy harvesting》", 《NANO ENERGY》 * |
| YIBIN YING ET AL.: "《Spontaneous growth and regulation of noble metal nanoparticles on flexible biomimetic MXene paper for bioelectronics》", 《BIOSENSORS AND BIOELECTRONICS》 * |
| 刘清君等: "《穿戴式与便携式生化传感检测技术》", 31 May 2018, 世界图书出版公司 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113970395A (en) * | 2021-11-16 | 2022-01-25 | 浙江大学 | Flexible sensor with contact and non-contact sensing functions and manufacturing method thereof |
| CN115302902A (en) * | 2022-07-06 | 2022-11-08 | 河南工业大学 | Flexible magnetic sensor and preparation method thereof |
| CN115302902B (en) * | 2022-07-06 | 2024-01-26 | 河南工业大学 | Flexible magnetic sensor and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Ge et al. | A flexible pressure sensor based on rGO/polyaniline wrapped sponge with tunable sensitivity for human motion detection | |
| CN110375894B (en) | MXene @ CS @ PDMS three-dimensional porous composite material and preparation method and application thereof | |
| CN113532700A (en) | Flexible pressure sensor with adjustable sensitivity and preparation method and application thereof | |
| CN108318161B (en) | Wearable pressure sensor and manufacturing method thereof | |
| CN109520410B (en) | Three-dimensional graphene foam flexible strain sensor and preparation method thereof | |
| KR102004645B1 (en) | Sensor and supercapacitor based on graphene polypyrrole 3D porous structure, and integrated device having the same | |
| Lin et al. | Biocompatible multifunctional e-skins with excellent self-healing ability enabled by clean and scalable fabrication | |
| CN103616097A (en) | Flexible film tactile sensor and production method thereof | |
| CN110387061B (en) | MXene-PDMS composite foam with hollow structure and preparation method and application thereof | |
| CN111504527B (en) | Sea urchin-shaped oxide-based composite membrane bionic pressure sensor and preparation method thereof | |
| CN110763377B (en) | Super-hydrophobic piezoresistive pressure sensor and preparation method and application thereof | |
| CN110426063B (en) | Dual-mode sensor and application thereof in pressure detection and strain process | |
| CN108996463A (en) | A kind of porous graphene heart sound detection sensor and preparation method thereof | |
| CN113514106B (en) | Preparation method and application of multifunctional sensor for synchronously measuring temperature, pressure and humidity | |
| CN112205969B (en) | Zinc oxide composite PDMS material flexible wearable strain sensor and application thereof | |
| CN111504520A (en) | Integrated flexible stretchable touch sensor based on super-capacitor sensing principle | |
| CN112097967A (en) | Self-energy-supply-based flexible extensible mechanical sensing system and preparation method thereof | |
| CN108053946B (en) | A kind of preparation method of stretchable, low resistance variation conductive fiber | |
| CN112914561A (en) | Mixed-position metal carbon nano-film hydrogel flexible bending sensing unit, preparation method thereof and flexible bending sensor | |
| CN112587128B (en) | Fabric substrate piezoelectric sensor based on zinc oxide nanorod structure and preparation method thereof | |
| CN206924059U (en) | PLLA nano wire pulse transducer based on interdigital electrode | |
| CN108680190B (en) | Flexible electronic sensor prepared by utilizing self-supporting silver film welded by lysozyme and preparation method | |
| CN109752429B (en) | PH electrochemical sensor based on aniline oligomer/graphene composite material and preparation method thereof | |
| CN113651990B (en) | Aerogel, aerogel electrode, pressure sensor and preparation method thereof | |
| CN103811654B (en) | There is piezoelectric cable of piezoelectric effect and its production and use |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211022 |
|
| RJ01 | Rejection of invention patent application after publication |