CN113529046A

CN113529046A - High-temperature vapor phase coating machine for sampling tank of Suma tank

Info

Publication number: CN113529046A
Application number: CN202110909749.8A
Authority: CN
Inventors: 梁存军
Original assignee: Individual
Current assignee: Individual
Priority date: 2021-08-09
Filing date: 2021-08-09
Publication date: 2021-10-22

Abstract

The invention discloses a high-temperature vapor phase coating machine for a sampling tank of a suma tank, which has the technical scheme that: the door lock comprises a shell, wherein a shell hole is formed in one side of the shell, and a closing door is movably clamped in the shell hole; the heating furnace is arranged inside the shell, a sealing groove is formed in the top surface of the heating furnace, two supporting blocks are fixedly connected to the left side and the right side inside the shell, and top covers are fixedly connected to the bottom surfaces of the two supporting blocks; the gas coating component is arranged on the bottom surface of the top cover and used for coating the inside of the tank body, and the gas outlet pipe is in threaded connection with the fixing hole, so that the gas outlet pipe can be fixed to the top end of the first connecting pipe.

Description

High-temperature vapor phase coating machine for sampling tank of Suma tank

Technical Field

The invention relates to the technical field of film coating machines, in particular to a high-temperature vapor phase film coating machine for a Suma tank sampling tank.

Background

The coating machine is a process instrument used in the field of material science, and in the technical field of coating, the coating equipment can be divided into a coating production line and a coating all-in-one machine, wherein in the coating production line, a substrate to be coated moves along the coating production line while a coating process is carried out; in the coating all-in-one machine, a substrate to be coated is fixed and then coated, or the coating is realized while rotating relative to the cathode target.

However, most of the existing film plating machines can only perform film plating on the surface of an object, so that the inner parts of the tank bodies such as the suma tank and the sampling tank cannot be plated with films.

Disclosure of Invention

Aiming at the problems mentioned in the background technology, the invention aims to provide a high-temperature vapor phase coating machine for a Suma tank sampling tank, so as to solve the problems mentioned in the background technology.

The technical purpose of the invention is realized by the following technical scheme:

the suma jar sampling tank high temperature vapor phase coating machine includes: the door lock comprises a shell, a door lock body and a door lock body, wherein a shell hole is formed in one side of the shell, and a closing door is movably clamped in the shell hole; the maintenance power distribution holes are respectively formed in the left side and the right side of the shell, and a rotating door is movably clamped in the maintenance power distribution holes; the plurality of vent holes are respectively formed in the front, the rear, the left and the right of the shell; the heating furnace is arranged inside the shell, a sealing groove is formed in the top surface of the heating furnace, two supporting blocks are fixedly connected to the left side and the right side inside the shell, and top covers are fixedly connected to the bottom surfaces of the two supporting blocks; the heating assembly is arranged inside the heating furnace and used for heating the inside of the heating furnace; and the gas coating component is arranged on the bottom surface of the top cover and is used for coating the inside of the tank body.

By adopting the technical scheme, the inner wall of the tank body can be coated by the gas coating component through the arrangement of the gas coating component.

Preferably, the heating assembly comprises: the heating wire is fixedly connected to the bottom surface inside the heating furnace; the limiting piece is arranged inside the shell and used for limiting the heating furnace; and the moving piece is arranged in the shell and used for driving the heating furnace to move.

By adopting the technical scheme, the heating wires are arranged, so that the heating wires can heat the interior of the heating furnace when the heating wires work.

Preferably, the stopper includes: the supporting frames are fixedly connected to the bottom surface inside the shell, and limiting shafts are fixedly mounted on one sides of the supporting frames; the connecting blocks are fixedly mounted on the left side and the right side of the heating furnace, the connecting blocks correspond to the supporting frames in position, a slide way is formed in one side of each connecting block, and the limiting shaft is movably clamped with the slide way.

Through adopting above-mentioned technical scheme, through setting up spacing axle, because spacing axle is in the same place with connecting block activity joint to make spacing axle can carry on spacingly to the heating furnace, the heating furnace later stage of being convenient for reciprocates in the inside of shell.

Preferably, the moving member includes: the two lifting lugs are fixedly connected to the left side and the right side of the heating furnace respectively, the bottom surface inside the shell is fixedly connected with two driving motors, and the positions of the two driving motors correspond to each other; the rotating rod is fixedly connected between the two driving motor driving shafts, and a plurality of limiting plates are fixedly connected to the outer circle wall surface of the rotating rod; two first pulleys, two the equal fixed connection of first pulley is at the inside top surface of shell, two second pulleys of the inside top surface fixedly connected with of shell, the inside fixedly connected with steel wire of lug, the steel wire respectively with first pulley with the activity of second pulley is cup jointed, the other end fixed connection of steel wire is in the excircle wall of dwang.

Through adopting above-mentioned technical scheme, through setting up driving motor, when driving motor at the during operation, driving motor can drive the dwang and rotate this moment to make the dwang can drive the heating furnace through the steel wire and remove when rotating.

Preferably, the gas coating assembly includes: the article placing frame is fixedly connected to the bottom surface of the top cover, and a plurality of clamping grooves are formed in the left side and the right side of the interior of the article placing frame; the partition plate is arranged inside the article placing frame and movably clamped with the clamping groove; the sampling tank is arranged on the top surface of the partition plate, and an air inlet of the sampling tank is fixedly connected with a first connecting pipe; the gas outlet pipe is arranged on the top surface of the closed door, the top surface of the first connecting pipe is provided with a conversion pipe, and the top surface of the conversion pipe is fixedly provided with a fixed pipe; the gas inlet is arranged inside the first connecting pipe and used for feeding gas into the sampling tank; and the gas outlet piece is arranged at the top end of the first connecting pipe and used for discharging gas in the sampling tank.

Through adopting above-mentioned technical scheme, through setting up the baffle, because baffle activity and draw-in groove activity joint to make the baffle can be in the different height of the inside regulation of putting the frame, make and put the inside sampling tank that can place equidimension not of frame.

Preferably, the air inlet member includes: the gas intake pipe, gas intake pipe fixed connection be in the interior round wall of fixed pipe, gas intake pipe respectively with the converting pipe gas outlet pipe with first connecting pipe activity cup joints, the bottom of gas intake pipe is passed first connecting pipe extends to the inside of sampling jar.

Through adopting above-mentioned technical scheme, through setting up first connecting pipe, because first connecting pipe is connected at the air inlet of sampling jar, the inside that first connecting pipe extends to the sampling jar is passed to gaseous intake pipe bottom to make gaseous inside that can get into the sampling jar through gaseous intake pipe.

Preferably, the air outlet member includes: the exhaust hole is formed in the outer circle wall surface of the conversion pipe, and the inner circle wall surface of the exhaust hole is fixedly connected with an exhaust pipe; the fixing hole is formed in the bottom end of the gas outlet pipe and is in threaded connection with the first connecting pipe, a plurality of air outlet holes are formed in the top surface of the first connecting pipe, and the air outlet holes are formed in the top end of the first connecting pipe in an equiangular mode; the gas outlet pipe is provided with a plurality of first connecting holes, a plurality of first connecting holes are formed in the top end of the gas outlet pipe, a rotating hole is formed in the bottom end of the conversion pipe, and the gas outlet pipe is in threaded connection with the rotating hole.

Through adopting above-mentioned technical scheme, through setting up the gas outlet duct, because gas outlet duct and fixed orifices threaded connection to make the gas outlet duct can fix on the top of first connecting pipe, after the inside gas of sampling jar discharged into the inside of gas outlet duct through the venthole, the inside of the inside gaseous accessible of first connecting pipe entering converting pipe this moment makes the inside gas of sampling jar can discharge, is convenient for make the coating film of sampling jar inner wall later stage.

Preferably, the top surface of the top cover is provided with a second connecting hole, the top surface of the top cover is provided with a third connecting hole, the top surface of the top cover is provided with a first cover hole, and the inner circle wall surface of the first cover hole is fixedly connected with a furnace box air inlet pipe.

Through adopting above-mentioned technical scheme, through setting up the stove case intake pipe, because stove case intake-tube connection is in the inside in first lid hole, after heating furnace and top cap laminating together, can be toward the inside nitrogen gas that pours into of heating furnace into through the stove case intake pipe this moment.

Preferably, a second cover hole is formed in the top surface of the top cover, the inner circle wall surface of the second cover hole is fixedly connected with a furnace box air outlet pipe, the bottom surface of the top cover is fixedly connected with a sealing gasket, the sealing gasket is movably clamped with the sealing groove, a fourth connecting hole is formed in the top surface of the shell, and the top surface of the shell is fixedly connected with a three-color lamp.

Through adopting above-mentioned technical scheme, through setting up the tricolor lamp, when the inside gas leakage of shell, can remind the staff through the tricolor lamp.

Preferably, the top surface of the shell is provided with an air exhaust hole, one of the rotating doors is provided with an observation hole, the inside of the observation hole is fixedly connected with an observation plate, and the closing door and one side of the rotating door are fixedly connected with a lockset.

Through adopting above-mentioned technical scheme, through setting up the observation board, can observe the inside of shell through the observation board.

In summary, the invention mainly has the following beneficial effects:

through setting up first connecting pipe, because the air inlet at the sampling jar is connected to first connecting pipe, the inside that first connecting pipe extends to the sampling jar is passed to gas intake pipe bottom, thereby make gaseous inside that can get into the sampling jar through the gas intake pipe, the gas after getting into the inside use of sampling jar can be discharged through the venthole, through setting up the gas outlet pipe, because gas outlet pipe and fixed orifices threaded connection, thereby make the gas outlet pipe can fix the top at first connecting pipe, after the inside of the inside gas of sampling jar discharges into the gas outlet pipe through the venthole, the inside of the inside gaseous accessible first connecting hole entering transfer tube of first connecting pipe this moment, make the inside gas of sampling jar can discharge, be convenient for make the internal wall later stage coating film of sampling jar.

Through setting up the sampling tank, set up the sampling tank behind the top surface of baffle through the staff, begin to start the heater strip, and sweep the sampling tank, sweep by nitrogen gas, first solenoid valve, second pneumatic valve and third pneumatic valve are the switch in turn and are accomplished, first vacuum pump provides the negative pressure when the third pneumatic valve is opened, stop after sweeping appointed number of times, open the first pneumatic valve of nitrogen gas circuit, and adjust the flowmeter to appointed flow, pour into nitrogen gas into the sampling tank, and open the second pneumatic valve and discharge waste gas, when the temperature rises to eight hundred degrees in the heating furnace and advance the hydrogen and reduce surface oxide time, this process is specifically decided according to the oxidation degree of being filmed sampling tank, reduction process hydrogen continues to input reduction time and open the first pneumatic valve of silicon hydride in the sampling tank after, adjust the flowmeter to the required flow of filming, at this moment silicon hydride accomplishes in the mixing kettle with hydrogen and inputs the mixed gas of sampling tank and takes place under the high temperature condition in the mixed gas of being filmed The heterogeneous reaction and the homogeneous reaction are carried out, reaction waste can be safely discharged after being treated by the tail gas processor, the coating reaction time can be automatically set according to the requirement of a user on the thickness of the film, heating is stopped after the reaction is finished, the temperature naturally drops, hydrogen does not stop in the whole temperature reduction process, hydrogen supply is stopped when the temperature drops to a certain degree, a purging program is started, a furnace box is opened, and the sampling tank can be taken down after purging is finished, so that coating is finished.

Through setting up the ventilation hole, can guarantee the inside equipment heat dissipation ventilation of shell through the ventilation hole, through setting up spacing axle, because spacing axle is in the same place with connecting block activity joint, thereby make spacing axle can carry on spacingly to the heating furnace, the heating furnace later stage of being convenient for reciprocates in the inside of shell, through setting up driving motor, when driving motor at the during operation, driving motor can drive the dwang and rotate this moment, make the dwang can drive the heating furnace through the steel wire and remove when rotating, through setting up the limiting plate, can make two steel wires separately rotate through the limiting plate, avoid two steel wires alternately to twine when rotating.

Through setting up sealed the pad, through sealed the pad with seal groove activity joint back together to heating furnace and top cap laminating back, seal the heating furnace inside, through setting up the baffle, because baffle activity and draw-in groove activity joint, thereby make the baffle can be in the inside height that adjusts of putting the frame, make the inside sampling tank that can place equidimension not of putting the frame.

Through setting up the stove case intake pipe, because stove case intake-tube connection is in the inside in first lid hole, when heating furnace and top cap laminating back together, can be toward the inside nitrogen gas that pours into of heating furnace into through the stove case intake pipe, through setting up the stove case outlet duct, the inside gas outgoing of heating furnace can be made to the ventilation furnace case outlet duct to be convenient for make the inside later stage vacuum heating of heating furnace, prevent that the sampling tank from having oxygen in that the heating furnace is inside when the coating film, lead to coating film failure etc..

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of the housing construction of the present invention;

FIG. 3 is a schematic view of the connector block of the present invention;

FIG. 4 is a side cross-sectional structural schematic view of the housing of the present invention;

figure 5 is a schematic view of the structure of the article holder of the present invention;

FIG. 6 is a schematic view of a limiting plate configuration of the present invention;

FIG. 7 is a front cross-sectional structural schematic view of the housing of the present invention;

FIG. 8 is a schematic view of a transition tube configuration of the present invention;

FIG. 9 is an enlarged partial view of A in FIG. 8;

FIG. 10 is a block diagram of the gas path control system of the present invention;

FIG. 11 is a block diagram of the circuit control system of the present invention.

Reference numerals: 1. a housing; 2. a shell aperture; 3. closing the door; 4. overhauling the power distribution hole; 5. a rotating door; 6. a lock; 7. a vent hole; 8. heating furnace; 9. a support block; 10. a top cover; 11. heating wires; 12. a sealing groove; 13. a gasket; 14. silane coupling holes; 15. a support frame; 16. a limiting shaft; 17. connecting blocks; 18. a slideway; 19. lifting lugs; 20. a drive motor; 21. rotating the rod; 22. a limiting plate; 23. a first pulley; 24. a second pulley; 25. a steel wire; 26. a rack for placing articles; 27. a card slot; 28. a partition plate; 29. a sampling tank; 30. a first connecting pipe; 31. a gas outlet pipe; 32. a transfer tube; 33. a fixed tube; 34. a gas inlet pipe; 35. an exhaust hole; 36. an exhaust pipe; 37. a fixing hole; 38. an air outlet; 39. a first connection hole; 40. rotating the hole; 41. a second connection hole; 42. a third connection hole; 43. a first cover aperture; 44. a furnace box air inlet pipe; 45. a second cover aperture; 46. a furnace box gas outlet pipe; 47. a fourth connection hole; 48. a three-color lamp; 49. an observation hole; 50. an observation plate; 51. an air exhaust hole; 52. a display aperture; 53. a touch screen; 54. an operation hole; 55. an operation panel; 56. a side hole; 57. an emergency button; 58. connecting a nitrogen hole; 59. ammonia gas tapping; 60. hydrogen connecting holes; 61. adjusting a valve; 62. a first pneumatic valve; 63. a flow meter; 64. a first solenoid valve; 65. a mixing kettle; 66. a second solenoid valve; 67. a filter; 68. a second pneumatic valve; 69. a first check valve; 70. a first flame arrestor; 71. a third pneumatic valve; 72. a third electromagnetic valve; 73. a first vacuum pump; 74. a second flame arrestor; 75. a tail gas processor; 76. a fourth solenoid valve; 77. a second one-way valve; 78. a leakage protector; 79. a power source; 80. a fuse; 81. a PLC chip; 82. an ambient temperature detector; 83. an oxygen depth sensor; 84. a hydrogen leakage alarm; 85. a silane leak alarm; 86. an ammonia gas leakage alarm; 87. a relay; 88. a temperature controller; 89. a temperature sensor; 90. an overheat protector; 91. a controller; 92. an anti-pinch device; 93. a proximity switch; 94. a second vacuum pump.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1, 2 and 3, the high temperature vapor phase coating machine for the suma sampling tank comprises a housing 1, wherein the housing 1 is of a hollow rectangular structure, a housing hole 2 is formed in one side of the housing 1, the housing hole 2 is a rectangular through hole, a closing door 3 is movably clamped in the housing hole 2, the closing door 3 is of a rectangular structure and is connected with the inside of the housing hole 2 through a lotus leaf, the lotus leaf is an existing structure and is not repeated, two maintenance distribution holes 4 are respectively formed in the left side and the right side of the housing 1, the maintenance distribution holes 4 are rectangular through holes, a rotating door 5 is movably clamped in the maintenance distribution holes 4, the rotating door 5 is of a rectangular structure, a lock 6 is fixedly installed on one side of the closing door 3 and one side of the rotating door 5, the lock 6 is an existing structure and is not repeated, a plurality of vent holes 7 are formed in the front side, the rear side, the left side and the right side of the housing 1, wherein the vent holes 7 in the front side and the rear side of the housing 1 correspond to the positions of the housing, the ventilation hole 7 quantity and the position of the shell 1 left and right sides are corresponding, the inside of shell 1 is provided with heating furnace 8, heating furnace 8 is hollow rectangular structure, and heating furnace 8's top surface is uncovered, seal groove 12 has been seted up to heating furnace 8's top surface, seal groove 12 is the rectangle annular, 1 inside left and right sides fixed mounting of shell has two supporting shoes 9, supporting shoe 9 is the rectangular structure, the bottom surface fixedly connected with top cap 10 of two supporting shoes 9, top cap 10 is the rectangular structure, the sealed pad 13 of bottom surface fixedly connected with of top cap 10, sealed pad 13 is the rectangle annular structure, sealed pad 13 and seal groove 12 activity joint, heating furnace 8's inside is provided with heating element, be used for heating furnace 8's inside, the bottom surface of top cap 10 is provided with gaseous coating film subassembly, be used for carrying out the coating film to the inside of the jar body.

Referring to fig. 2, 3, 4 and 6, the heating assembly includes a heating wire 11, the heating wire 11 is fixedly connected to the bottom surface inside the heating furnace 8, the heating wire 11 is of an existing structure and is not described herein, a limiting member is disposed inside the housing 1 for limiting the heating furnace 8, a moving member is disposed inside the housing 1 for driving the heating furnace 8 to move, the limiting member includes a plurality of supporting frames 15, the supporting frames 15 are fixedly connected to the bottom surface inside the housing 1, the supporting frames 15 are of a rectangular structure, a limiting shaft 16 is fixedly mounted on one side of each supporting frame 15, two connecting blocks 17 are fixedly mounted on the left side and the right side of the heating furnace 8, each connecting block 17 is of a rectangular structure, the connecting block 17 corresponds to the position of the supporting frame 15, a slide way 18 is disposed on one side of the connecting block 17, the limiting shaft 16 is movably clamped with the slide way 18, and the moving member includes two lifting lugs 19, two lifting lugs 19 are respectively fixedly connected to the left side and the right side of the heating furnace 8, the lifting lugs 19 are of an existing structure and are not described herein again, two driving motors 20 are both fixedly installed on the bottom surface inside the housing 1, the driving motors 20 are of an existing structure and are not described herein again, the positions of the two driving motors 20 correspond to each other, a rotating rod 21 is fixedly installed between driving shafts of the two driving motors 20, the rotating rod 21 is of an existing structure and is not described herein again, a plurality of limiting plates 22 are fixedly installed on the outer circumferential wall surface of the rotating rod 21, the limiting plates 22 are of an annular structure, two first pulleys 23 are fixedly installed on the top surface inside the housing 1, the first pulleys 23 are of an existing structure and are not described herein again, two second pulleys 24 are fixedly connected to the top surface inside the housing 1, the second pulleys 24 are not described herein for an existing structure, the steel wires 25 are fixedly installed inside the lifting lugs 19, and the steel wires 25 are of an existing structure and are not described herein again, the steel wire 25 is movably sleeved with the first pulley 23 and the second pulley 24 respectively, and the other end of the steel wire 25 is fixedly connected to the outer circular wall surface of the rotating rod 21.

Referring to fig. 5, 7, 8 and 9, the gas coating assembly includes a rack 26, the rack 26 is fixedly connected to the bottom surface of the top cover 10, the rack 26 has a rectangular structure, a rectangular through hole is formed at one side of the rack 26, a plurality of slots 27 are respectively formed at the left and right sides of the interior of the rack 26, the slots 27 are rectangular slots, a partition 28 is disposed inside the rack 26, the partition 28 is a conventional structure and is not described herein, the partition 28 is movably engaged with the slots 27, a sampling tank 29 is fixedly mounted on the top surface of the partition 28, the sampling tank 29 is a conventional structure and is not described herein, a first connecting pipe 30 is fixedly mounted on an air inlet of the sampling tank 29, the first connecting pipe 30 has a circular pipe-shaped structure, a thread is formed on the outer circumferential wall surface of the first connecting pipe 30, an air inlet member is disposed inside the first connecting pipe 30 for feeding gas into the sampling tank 29, an air outlet member is disposed at the top end of the first connecting pipe 30, the gas inlet part is used for discharging gas in the sampling tank 29, the gas outlet pipe 31 is arranged on the top surface of the closed door 3, the gas outlet pipe 31 is of a structure consisting of a round pipe and a round ring, the inside of the gas outlet pipe 31 is provided with a round ring groove, the outer round wall surface of the gas outlet pipe 31 is provided with threads, the conversion pipe 32 is arranged on the top surface of the first connecting pipe 30, the conversion pipe 32 is of a round pipe-shaped structure, the inside of the conversion pipe 32 is provided with the round ring groove, the fixing pipe 33 is fixedly arranged at the top end of the conversion pipe 32, the fixing pipe 33 is of the round pipe-shaped structure, the inner round wall surface of the fixing pipe 33 is fixedly provided with the gas inlet pipe 34, the gas inlet pipe 34 is respectively movably sleeved with the conversion pipe 32, the gas outlet pipe 31 and the first connecting pipe 30, the bottom end of the gas inlet pipe 34 penetrates through the first connecting pipe 30 and extends to the inside of the sampling tank 29, the gas outlet part comprises an exhaust hole 35, the exhaust hole 35 is formed on the outer circumferential wall surface of the conversion pipe 32, the exhaust hole 35 is a circular through hole, the exhaust pipe 36 is fixedly installed on the inner circumferential wall surface of the exhaust hole 35, the bottom end of the gas outlet pipe 31 is provided with a fixing hole 37, the fixing hole 37 is a circular groove, the inner circumferential wall surface of the fixing hole 37 is provided with a thread, the fixing hole 37 is in threaded connection with the first connecting pipe 30, a plurality of gas outlet holes 38 are formed at the top end of the first connecting pipe 30 at equal angles, the gas outlet holes 38 are arc-shaped through holes, the top end of the gas outlet pipe 31 is provided with a first connecting hole 39, the first connecting hole 39 is a circular through hole, the bottom end of the conversion pipe 32 is provided with a rotating hole 40, the rotating hole 40 is a circular ring hole, the inner circumferential wall surface of the rotating hole 40 is provided with a thread, the gas outlet pipe 31 is in threaded connection with the rotating hole 40, the second connecting hole 41 is formed on the top surface of the top cover 10 and is a circular through hole, the second connecting hole 41 is fixedly sleeved with the gas inlet pipe 34, the third connecting hole 42 is arranged on the top surface of the top cover 10, the third connecting hole 42 is a circular through hole, the third connecting hole 42 is fixedly sleeved with the exhaust pipe 36, the top surface of the top cover 10 is provided with a first cover hole 43, the first cover hole 43 is a circular through hole, the inner circular wall surface of the first cover hole 43 is fixedly provided with a furnace box air inlet pipe 44, the top surface of the top cover 10 is provided with a second cover hole 45, the second cover hole 45 is a circular through hole, the inner circular wall surface of the second cover hole 45 is fixedly provided with a furnace box air outlet pipe 46, the furnace box air outlet pipe 46 is a circular through hole, the top surface of the shell 1 is provided with a fourth connecting hole 47, the fourth connecting hole 47 is a circular through hole, the top surface of the shell 1 is fixedly provided with a three-color lamp 48, the three-color lamp 48 is an existing structure and is not described herein, the top surface of the shell 1 is provided with an air outlet hole 51, the air outlet hole 51 is a circular through hole, one of the plurality of the rotating doors 5 is provided with an observation hole 49, the observation hole 49 is a rectangular through hole, an observation plate 50 is fixedly installed inside the observation hole 49, and the observation plate 50 is a rectangular structure made of a transparent material.

Referring to fig. 1, 2 and 10, an air exhaust hole 51 is formed on the top surface of a housing 1, a silane coupling hole 14 is formed on the top surface of the housing 1, a nitrogen coupling hole 58 is formed on the top surface of the housing 1, an ammonia coupling hole 59 is formed on the top surface of the housing 1, a hydrogen coupling hole 60 is formed on the top surface of the housing 1, a gas system for controlling a gas system is disposed inside the housing 1 and includes a plurality of regulating valves 61, the plurality of regulating valves 61 are respectively and fixedly installed inside the silane coupling hole 14, the nitrogen coupling hole 58, the ammonia coupling hole 59 and the hydrogen coupling hole 60, one ends of the regulating valves 61 located inside the silane coupling hole 14, the ammonia coupling hole 59 and the hydrogen coupling hole 60 are respectively and fixedly connected with a first pneumatic valve 62, one end of the first pneumatic valve 62 is connected with a flow meter 63, the top end of the gas inlet pipe 34 is fixedly connected with a mixing kettle 65, the flow meter 63 is connected with the mixing kettle 65, one end of the regulating valve 61 located inside the nitrogen coupling hole 58 is fixedly connected with a first electromagnetic valve 64, the first electromagnetic valve 64 is connected with the mixing kettle 65, the first electromagnetic valve 64 is connected with the furnace box inlet pipe 44, the connection part of the first electromagnetic valve 64 and the furnace box inlet pipe 44 is fixedly connected with the second electromagnetic valve 66, four gases of sih4, nh3, h2 and n2 are needed in the production of the film plating machine, the regulating valve 61 can regulate the pressure of the gas in the working process, the first pneumatic valve 62 can control the air supply and the air stop of the three gases of sih4, nh3 and h2, the first electromagnetic valve 64 can control the air supply and the air stop of the n2 gas, the flow meter 63 is used for leading sih4, nh3 and h2 to the flow rate needed by the system work, the regulated gas is mixed by the mixing kettle 65 and then is input into the sampling tank 29, a silicon film can be plated on the sampling tank 29 through high-temperature gas phase reaction, silicon nitride films and pure silicon dioxide films can be generated by regulating various proportions of the mixed gas, the top ends of the exhaust pipe 36 and the furnace box outlet pipe 46 are fixedly connected with the filter 67, one end of a filter 67 positioned at the top end of the exhaust pipe 36 is fixedly connected with a second pneumatic valve 68 and a third pneumatic valve 71, one end of the second pneumatic valve 68 is connected with a first one-way valve 69, one end of the first one-way valve 69 is connected with a first flame arrester 70, one end of the first flame arrester 70 is connected with a tail gas processor 75, one end of the third pneumatic valve 71 is connected with a first vacuum pump 73, one end of the first vacuum pump 73 is connected with a second flame arrester 74, one end of the filter 67 positioned at one end of the furnace box air outlet pipe 46 is connected with a third solenoid valve 72 and a fourth solenoid valve 76, the third solenoid valve 72 is connected with the first vacuum pump 73, one end of the fourth solenoid valve 76 is connected with a second one-way valve 77, the film coating process of the sampling tank 29 needs to be completed in an oxygen-free environment, meanwhile, in order to control pollution, the filter 67 can allow dust below 5 micrometers to be filtered, an air path switch for discharging waste gas is controlled by the second pneumatic valve 68, can prevent through first check valve 69 and first spark arrester 70 that exhaust gas detonation backfire from causing equipment damage, can handle the silane in the exhaust gas through tail gas treater 75, can make the sampling jar 29 in whole coating process makes be in anaerobic state through first vacuum pump 73, guaranteed through second spark arrester 74 that exhaust waste gas can not backfire damage equipment, inject nitrogen gas into heating furnace 8 through second solenoid valve 66, adopt third solenoid valve 72 and fourth solenoid valve 76 to control to get into vacuum gas circuit or directly discharge behind first vacuum pump 73, second check valve 77 is used for blocking gaseous backward flow pollution stove case.

Referring to fig. 1, 2 and 11, a display hole 52 is formed at one side of a housing 1, a touch screen 53 is arranged inside the display hole 52, an operation hole 54 is formed at one side of the housing 1, an operation panel 55 is arranged inside the operation hole 54, a side hole 56 is formed at one side of the housing 1, an emergency button 57 is arranged inside the side hole 56, a circuit system is arranged inside the housing 1, the circuit system comprises a leakage protector 78, the leakage protector 78 is fixedly connected to one side of the housing 1, the leakage protector 78 is connected with the emergency button 57, the emergency button 57 is electrically connected with a power supply 79, the emergency button 57 is electrically connected with a relay 87, the relay 87 is connected with a heating wire 11, the relay 87 is connected with a temperature controller 88, the temperature controller 88 is electrically connected with a temperature sensor 89, the power supply 79 is electrically connected with a fuse 80, the fuse 80 is electrically connected with a PLC chip 81, the PLC chip 81 is respectively and electrically connected with an environment temperature detector 82, an oxygen depth sensor 83, a hydrogen leakage alarm 84, a silane leakage alarm 85 and an ammonia leakage alarm 86, the PLC chip 81 and the tri-color lamp 48 are connected with the touch screen 53, the emergency button 57 is connected with a second vacuum pump 94, the PLC chip 81 is connected with the second vacuum pump 94, the PLC chip 81 is electrically connected with an overheat protector 90, the overheat protector 90 is electrically connected with a controller 91, the controller 91 is connected with the driving motor 20, the PLC chip 81 is electrically connected with a clamp preventer 92, the clamp preventer 92 is electrically connected with a proximity switch 93, the emergency button 57 can cut off all electric power of equipment after a worker presses the emergency button 57 when an emergency occurs, the touch screen 53 collects the internal temperature of the heating furnace 8 by means of a thermocouple temperature sensor 89, and the hydrogen leakage alarm is controlled by the environment temperature detector 82, Oxygen depth sensor 83, hydrogen leakage alarm 84, silane leakage alarm 85 and ammonia leakage alarm 86 can carry out real time monitoring to shell 1 internal environment, can effectively report to the police and give PLC chip 81 transmission signal when taking place gas leakage, PLC chip 81 stops production change again and closes the gas circuit, control driving motor 20 work through controller 91, the realization is opened heating furnace 8 and is closed heating furnace 8, the security personnel have prevented that the clamp from hindering operating personnel, can prevent driving motor 20 high temperature damage through overheat protector 90.

The working principle is as follows: referring to fig. 1-11, in use, by installing the sampling tank 29, after the sampling tank 29 is installed on the top surface of the partition 28 by a worker, the closing door 3 is closed, the touch screen 53 presses the closing key of the heating furnace 8, the heating furnace 8 presses the coating start key after being closed, the system self-checks whether the states of the components are normal or not, the heating wire 11 starts to be started after no problem exists, the sampling tank 29 is purged, the purging is completed by alternately switching the N2 first solenoid valve 64, the second pneumatic valve 68 and the third pneumatic valve 71, the first vacuum pump 73 supplies negative pressure when the third pneumatic valve 71 is opened, the purging is stopped after a specified number of times, the first pneumatic valve 62 of the H2 is opened, the flow meter 63 is adjusted to a specified flow rate, H2 is injected into the sampling tank 29, the second pneumatic valve 68 is opened to discharge exhaust gas, and when the temperature in the heating furnace 8 is raised to 800 ℃ to reduce the surface oxide by hydrogen, the specific time of the process is determined by a user according to the oxidation degree of the sample tank 29 to be coated, hydrogen in the reduction process is continuously input into the sample tank 29, the SiH4 first pneumatic valve 62 is opened after the reduction time is up, the flow meter 63 is adjusted to the flow rate required by coating, then the SiH4 and the H2 are mixed in the mixing kettle 65 and input into the sample tank 29, the mixed gas is subjected to heterogeneous reaction and homogeneous reaction under the high temperature condition, reaction waste can be safely discharged after being treated by the tail gas processor 75, the coating reaction time can be automatically set according to the film thickness requirement of the user, heating is stopped after the reaction is finished, the temperature naturally drops, the whole temperature reduction process H2 is not stopped, the H2 supply is stopped when the temperature drops to 200 ℃, the purging program is started, the furnace box is opened, and the coating of the sample tank 29 can be removed after the purging is finished.

Through setting up ventilation hole 7, can guarantee the inside equipment heat dissipation ventilation of shell 1 through ventilation hole 7, through setting up shell hole 2, can make processing article put into or take out from the inside of shell 1 through shell hole 2, through setting up spacing axle 16, be in the same place through spacing axle 16 and the movable joint of connecting block 17, thereby make spacing axle 16 can carry on spacingly to heating furnace 8, be convenient for heating furnace 8 later stage reciprocates in the inside of shell 1, through setting up driving motor 20, when driving motor 20 at the during operation, driving motor 20 can drive dwang 21 and rotate this moment, can drive heating furnace 8 through steel wire 25 when rotating when dwang 21 removes, through setting up limiting plate 22, can make two steel wire 25 separately rotate through limiting plate 22, avoid two steel wire 25 alternately winding when rotating.

Through setting up sealed pad 13, through sealed pad 13 with seal groove 12 activity joint back together to heating furnace 8 seals with top cap 10 laminating back, through setting up baffle 28, because baffle 28 activity and draw-in groove 27 activity joint, thereby makes baffle 28 can be in the different height of the inside regulation of putting thing frame 26, makes the inside sampling tank 29 that can place equidimension of putting thing frame 26.

Through setting up first connecting pipe 30, because first connecting pipe 30 is connected at the air inlet of sampling jar 29, the inside that first connecting pipe 30 extends to sampling jar 29 is passed to gaseous 34 bottom, thereby make gaseous inside that can get into sampling jar 29 through gaseous intake pipe 34, the gaseous after the inside use of entering sampling jar 29 can be discharged through venthole 38, through setting up gaseous outlet duct 31, because gaseous outlet duct 31 and fixed orifices 37 threaded connection, thereby make gaseous outlet duct 31 can fix the top at first connecting pipe 30, after the inside of venthole 38 discharge gas outlet duct 31 of sampling jar 29, the inside gaseous accessible first connecting hole 39 of inside of first connecting pipe 30 gets into the inside of converting pipe 32 this moment, make the inside gaseous of sampling jar 29 can discharge, be convenient for make sampling jar 29 inner wall later stage coating film.

Through setting up stove case intake pipe 44, because stove case intake pipe 44 is connected in the inside of first lid hole 43, back together with top cap 10 when heating furnace 8, can be toward the inside nitrogen gas that pours into of heating furnace 8 through stove case intake pipe 44, through setting up stove case outlet duct 46, ventilation furnace case outlet duct 46 can make the inside gas outgoing of heating furnace 8, thereby be convenient for make the inside later stage vacuum heating of heating furnace 8, prevent that sampling tank 29 from having oxygen in heating furnace inside when the coating film, lead to coating film failure etc., through setting up tricolor lamp 48, when the inside gas leakage of shell 1, can remind the staff through tricolor lamp 48.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The suma jar sampling tank high temperature vapor phase coating machine which is characterized by comprising:

the door comprises a shell (1), wherein a shell hole (2) is formed in one side of the shell (1), and a closing door (3) is movably clamped in the shell hole (2);

the maintenance power distribution holes (4) are respectively arranged on the left side and the right side of the shell (1), and a rotating door (5) is movably clamped in the maintenance power distribution holes (4);

the ventilation holes (7) are respectively formed in the front, the rear, the left and the right of the shell (1);

the heating furnace (8) is arranged inside the shell (1), a sealing groove (12) is formed in the top surface of the heating furnace (8), the left side and the right side inside the shell (1) are fixedly connected with two supporting blocks (9), and the bottom surfaces of the two supporting blocks (9) are fixedly connected with a top cover (10);

the heating component is arranged inside the heating furnace (8) and is used for heating the inside of the heating furnace (8);

and the gas coating component is arranged on the bottom surface of the top cover (10) and is used for coating the inside of the tank body.

2. The suma pot sampling pot high temperature vapor deposition machine of claim 1, wherein said heating assembly comprises:

the heating wire (11), the heating wire (11) is fixedly connected to the bottom surface inside the heating furnace (8);

the limiting piece is arranged inside the shell (1) and used for limiting the heating furnace (8);

the moving piece is arranged inside the shell (1) and used for driving the heating furnace (8) to move.

3. The suma pot sampling pot high temperature vapor deposition machine of claim 2, wherein said stop comprises:

the supporting frames (15) are all fixedly connected to the bottom surface inside the shell (1), and limiting shafts (16) are all fixedly mounted on one sides of the supporting frames (15);

a plurality of connecting block (17), a plurality of the equal fixed mounting of connecting block (17) is in the heating furnace (8) left and right sides, connecting block (17) with the position of support frame (15) is corresponding, slide (18) have been seted up to one side of connecting block (17), spacing axle (16) with slide (18) activity joint is in the same place.

4. The suma pot sampling tank high temperature vapor deposition machine of claim 2, wherein said moving member comprises:

the two lifting lugs (19) are respectively and fixedly connected to the left side and the right side of the heating furnace (8), the bottom surface inside the shell (1) is fixedly connected with two driving motors (20), and the positions of the two driving motors (20) correspond to each other;

the rotating rod (21) is fixedly connected between the two driving shafts of the driving motor (20), and the excircle wall surface of the rotating rod (21) is fixedly connected with a plurality of limiting plates (22);

two first pulleys (23), two the equal fixed connection of first pulley (23) is at the inside top surface of shell (1), two second pulleys (24) of the inside top surface fixedly connected with of shell (1), the inside fixedly connected with steel wire (25) of lug (19), steel wire (25) respectively with first pulley (23) with second pulley (24) activity cup joints, the other end fixed connection of steel wire (25) is in the excircle wall of dwang (21).

5. The suma pot sampling tank high temperature vapor deposition machine of claim 1, wherein said vapor deposition assembly comprises:

the storage rack (26) is fixedly connected to the bottom surface of the top cover (10), and a plurality of clamping grooves (27) are formed in the left side and the right side of the interior of the storage rack (26);

the partition plate (28) is arranged inside the article placing rack (26), and the partition plate (28) is movably clamped with the clamping groove (27);

the sampling tank (29) is arranged on the top surface of the partition plate (28), and a first connecting pipe (30) is fixedly connected with an air inlet of the sampling tank (29);

the gas outlet pipe (31) is arranged on the top surface of the closed door (3), the top surface of the first connecting pipe (30) is provided with a conversion pipe (32), and the top surface of the conversion pipe (32) is fixedly provided with a fixed pipe (33);

-a gas inlet provided inside the first connection pipe (30) for feeding gas into the interior of the sampling tank (29);

an air outlet member provided at the top end of the first connection pipe (30) for discharging air inside the sampling tank (29).

6. The suma pot sampling tank high temperature vapor deposition machine of claim 5, wherein said air inlet comprises:

gas intake pipe (34), gas intake pipe (34) fixed connection be in the interior circle wall of fixed pipe (33), gas intake pipe (34) respectively with switching tube (32) gas outlet duct (31) with first connecting pipe (30) activity cup joints, the bottom of gas intake pipe (34) is passed first connecting pipe (30) extend to the inside of sampling tank (29).

7. The suma pot sampling tank high temperature vapor deposition machine of claim 5, wherein said gas outlet member comprises:

the exhaust hole (35), the exhaust hole (35) is arranged on the outer circle wall surface of the conversion pipe (32), and the inner circle wall surface of the exhaust hole (35) is fixedly connected with an exhaust pipe (36);

the fixing hole (37) is formed in the bottom end of the gas outlet pipe (31), the fixing hole (37) is in threaded connection with the first connecting pipe (30), a plurality of gas outlet holes (38) are formed in the top surface of the first connecting pipe (30), and the gas outlet holes (38) are formed in the top end of the first connecting pipe (30) at equal angles;

a plurality of first connecting hole (39), a plurality of first connecting hole (39) are all seted up and are being in the top of gas outlet duct (31), rotation hole (40) have been seted up to the bottom of switching tube (32), gas outlet duct (31) with rotate hole (40) threaded connection.

8. The high-temperature vapor phase coating machine for the Suma jar sampling tank as claimed in claim 1, wherein the top surface of the top cover (10) is provided with a second connecting hole (41), the top surface of the top cover (10) is provided with a third connecting hole (42), the top surface of the top cover (10) is provided with a first cover hole (43), and the inner circular wall surface of the first cover hole (43) is fixedly connected with a furnace box air inlet pipe (44).

9. The high-temperature vapor phase coating machine for the Suma jar sampling tank according to claim 1, wherein a second cover hole (45) is formed in the top surface of the top cover (10), a furnace box air outlet pipe (46) is fixedly connected to the inner circular wall surface of the second cover hole (45), a sealing gasket (13) is fixedly connected to the bottom surface of the top cover (10), the sealing gasket (13) is movably clamped with the sealing groove (12), a fourth connecting hole (47) is formed in the top surface of the shell (1), and a three-color lamp (48) is fixedly connected to the top surface of the shell (1).

10. The suma pot sampling pot high-temperature vapor deposition machine according to claim 1, wherein an air exhaust hole (51) is formed in the top surface of the shell (1), an observation hole (49) is formed in one of the rotary doors (5), an observation plate (50) is fixedly connected to the inside of the observation hole (49), and a lock (6) is fixedly connected to each of the closed door (3) and one side of the rotary door (5).