CN113518863A - Turbo-molecular vacuum pump and purification method - Google Patents
Turbo-molecular vacuum pump and purification method Download PDFInfo
- Publication number
- CN113518863A CN113518863A CN202080017639.4A CN202080017639A CN113518863A CN 113518863 A CN113518863 A CN 113518863A CN 202080017639 A CN202080017639 A CN 202080017639A CN 113518863 A CN113518863 A CN 113518863A
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- China
- Prior art keywords
- purge gas
- vacuum pump
- turbomolecular
- stator
- turbomolecular vacuum
- Prior art date
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- Pending
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- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000000746 purification Methods 0.000 title description 2
- 238000010926 purge Methods 0.000 claims abstract description 97
- 238000002347 injection Methods 0.000 claims abstract description 47
- 239000007924 injection Substances 0.000 claims abstract description 47
- 239000007789 gas Substances 0.000 claims description 119
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000005086 pumping Methods 0.000 description 7
- 238000005096 rolling process Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The subject of the invention is a turbomolecular vacuum pump (1) comprising a purge gas injection device (21) comprising at least one channel (20) arranged in the stator (2) and opening between the rotor (3) and the stator (2) to inject purge gas into the path followed by the pumped gas downstream of at least one blade stage (9) of the rotor (3), the purge gas injection device (21) being configured such that the flow rate of the purge gas injected is lower than a threshold value determined such that the pressure difference on the suction side (6) is less than 0.066Pa both in the absence of purge gas injection and in the case of purge gas injection. The invention also relates to a method for cleaning a turbomolecular vacuum pump (1).
Description
Technical Field
The present invention relates to a turbo molecular vacuum pump and to a method for cleaning a turbo molecular vacuum pump.
Background
The creation of a high vacuum in the chamber requires the use of a turbomolecular vacuum pump comprising a stator in which a rotor is driven in rapid rotation, for example at speeds in excess of twenty thousand revolutions per minute.
In certain processes using turbomolecular vacuum pumps, such as in the manufacture of semiconductors or LEDs, a layer of deposition may form in the vacuum pump. This deposit may cause a clearance between the stator and the rotor to be limited, which may cause the rotor to stop. This layer of deposits heats the rotor in practice by friction, which may cause it to creep and possibly crack.
It is known practice to heat the stator to prevent condensation of the reaction products in the pump. However, in order to maintain the mechanical integrity of the rotor, the temperature to which the stator is heated must not generally exceed 90 ℃ or even 120 ℃. Heating the stator to these temperatures does effectively reduce deposit formation in the pump, but it does not completely avoid this, particularly in the case of certain chemicals, such as AlCl3。
Therefore, regular maintenance operations must be scheduled to clean the vacuum pump from time to time.
Disclosure of Invention
It is an object of the present invention to propose a turbomolecular vacuum pump which at least partially solves at least one of the drawbacks of the prior art.
To this end, one subject of the present invention is a turbomolecular vacuum pump configured to drive a gas to be pumped from a suction side to a delivery side, comprising:
-a stator comprising at least one vane stage and a Holweck stator having a helical groove formed therein, and
-a rotor comprising:
-at least two blade stages, which are arranged axially one after the other along the axis of rotation of the rotor in a turbomolecular stage of a turbomolecular vacuum pump, and
-a Hall sleeve configured to rotate in a molecular stage of a turbomolecular vacuum pump, located downstream of said turbomolecular stage in the circulation direction of the gas being pumped, past the helical groove of said stator,
characterized in that the turbomolecular vacuum pump further comprises a purge gas injection device comprising at least one channel formed in the stator and opening, for example via at least one hole opening, between the rotor and the stator to inject purge gas into the path followed by the pumped gas downstream of at least one blade stage of the rotor, the purge gas injection device being configured such that the injection flow of purge gas is below a threshold value determined such that the pressure difference on the suction side is less than 0.066Pa (i.e. about 0.5mTorr) without and with injection of purge gas.
Thereby diluting the pumped gas with little or no change in the pumping performance of the suction side of the turbomolecular vacuum pump.
The partial pressure of condensable gases can be reduced to keep them below the condensation value. This makes it possible to limit the risk of deposits in the turbomolecular vacuum pump and to prolong the time between two maintenance operations.
Injecting the purge gas downstream of the at least one blade stage may also avoid backflow of the purge gas into the chamber to be evacuated.
Another significant advantage is that, for the same set point of the stator heating temperature, reducing the partial pressure of the gas liable to deposit in the turbomolecular vacuum pump makes it possible to increase the flow rate of the gas to be pumped. Thus, the flow rate of the gas being pumped can be increased without creating additional risk of deposits due to the reduced partial pressure and without creating mechanical risk to the rotor.
The turbomolecular vacuum pump may comprise one or more of the following technical features, which may be used alone or in combination:
the at least one channel opens, for example, to the molecular level, for example, via at least one pore.
For example, the channels open into the upper portion of the Hall stator at the entrance to the molecular level. The axis of the passage extends from the hall vickers stator at a distance from the turbomolecular stage that is, for example, less than the 1/4 height of the hall vickers stator. It is thus possible to almost completely purify the molecular level.
The passage may also lead to the lower part of the holweck stator at the exit of the molecular stage (e.g. at a distance from the turbomolecular stage which is greater than half the height of the holweck stator), especially for applications where deposits occur in the lower half of the holweck stator.
The injection flow rate of the purge gas is, for example, greater than or equal to 0.1689Pa.m3S (or 100 sccm).
The turbomolecular vacuum pump may further comprise an additional purge gas injection device configured to inject an additional purge gas into a bearing of the turbomolecular vacuum pump located below the holweck sleeve. The additional purge gas injection device makes it possible to cool the motor and to purge the gas from the pivot elements of the turbomolecular vacuum pump, in particular the bearings, the electrical connectors, the welds and the backup rolling bearings. Purging these components with additional purge gas can protect them from potentially corrosive gases being pumped.
For example, the additional purge gas injection apparatus includes one or more inlets configured to deliver additional purge gas into a cavity housing one end of the shaft configured to drive rotation of the rotor.
The flow rate of the additional purge gas is for example smaller than the purge gas flow rate of the purge gas injection device, for example smaller than or equal to 0.08446pa.m3S (or 50 sccm).
According to an exemplary embodiment, the turbo molecular vacuum pump comprises a common duct for the inlet of the additional purge gas injection device and the channel of the purge gas injection device. This limits the number of connections to the purge gas source on the turbo molecular vacuum pump.
The rotor comprises, for example, more than four blade stages, for example between four and eight blade stages.
The at least one passage leads, for example, to the turbomolecular stage, for example, via at least one hole.
For example, the channel leads to one of the last three blade stages in the direction of circulation of the gas being pumped. This also avoids deposits which may occur in the last compression stage of the turbomolecular stage.
Another subject of the invention is a method for purging a turbomolecular vacuum pump as described above, wherein the flow rate of purge gas injected into the path followed by the pumped gas downstream of at least one blade stage of the rotor is less than a threshold value determined such that the pressure difference on the suction side is less than 0.066Pa (i.e. about 0.5mTorr) without purge gas injection and with purge gas injection.
The purge gas is, for example, nitrogen.
The determined threshold value for the injection flow of purge gas is for example 0.76pa.m3(i.e., approximately 450 sccm).
Drawings
Further advantages and features will become apparent from reading the following description of a particular but entirely non-limiting embodiment of the invention, and from studying the accompanying drawings, in which:
figure 1 shows a schematic view of a turbo-molecular vacuum pump according to a first embodiment.
Figure 2 shows an axial cross-section of the turbomolecular vacuum pump of figure 1.
Figure 3 shows a partial view of the hall vicker stator of the turbomolecular vacuum pump of figure 2.
Fig. 4 shows a view similar to fig. 2 of the second exemplary embodiment.
In these drawings, like elements have like reference numerals and names.
Detailed Description
The following embodiments are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference refers to the same embodiment or feature, but uniquely applies to a single embodiment. The various features of the various embodiments may be combined or interchanged equally to form further embodiments.
"upstream" means that one element is located before another element with respect to the gas circulation direction. Conversely, "downstream" means that one element is located after another element with respect to the circulation direction of the gas to be pumped, the element located upstream being at a lower pressure than the element located downstream.
Fig. 1 and 2 show a first embodiment of a turbo-molecular vacuum pump 1.
The turbomolecular vacuum pump 1 comprises a stator 2 in which a rotor 3 is configured to rotate at high speed in an axial rotation, for example at a speed exceeding twenty thousand revolutions per minute.
An annular inlet flange 7 surrounds the suction side 6, for example, to connect the vacuum pump 1 to the chamber to be depressurized.
In turbomolecular stage 4, rotor 3 comprises at least two blade stages 9 and stator 2 comprises at least one guide vane stage 10. The blade stages 9 and the guide vane stages 10 are arranged axially one after the other in the turbomolecular stage 4 along the axis of rotation I-I of the rotor 3. The rotor 3 comprises, for example, more than four blade stages 9, for example between four and eight blade stages 9 (six in the example shown in fig. 2).
Each blade stage 9 of the rotor 3 comprises inclined blades which exit in a substantially radial direction from a hub 11 of the rotor 3 fixed on a shaft 12 of the turbomolecular vacuum pump 1. The blades are evenly distributed around the periphery of the hub 11.
Each vane stage 10 of the stator 2 comprises an annulus from which inclined vanes are evenly distributed in a substantially radial direction around the inner circumference of the annulus. The guide vanes of one blade stage 10 of the stator 2 engage between the blades of two successive blade stages 9 of the rotor 3. The blades of the rotor 3 and the vanes of the stator 2 are inclined so as to direct the pumped gas molecules towards the molecular stages 5.
In the molecular stage 5, the rotor 3 comprises a holweck sleeve 13, constituted by a smooth cylindrical portion, which rotates past the helical groove 14 of the holweck stator 15 of the stator 2 (fig. 3). The helical groove 14 of the stator 2 allows to compress and direct the pumped gas to the delivery side 8 (fig. 2).
The rotor 3 may be manufactured in one piece (one piece) or may be an assembly of multiple parts. It is made of aluminium, for example. Which is fixed to the shaft 12 and is driven in rotation in the stator 2 by the internal motor 16 of the turbomolecular vacuum pump 1. The motor 16 is arranged, for example, below a bell housing 17 of the stator 2, which bell housing 17 is itself arranged below the holweck sleeve 13 of the rotor 3. The rotor 3 is guided laterally and axially by magnetic or mechanical bearings 18. The vacuum pump 1 may also comprise a backup rolling bearing 19.
The stator 2 is made of, for example, aluminum, and is manufactured by assembling a plurality of components.
The turbomolecular vacuum pump 1 may further comprise means for controlling the temperature of the stator 2 to heat the stator 2 to a set point temperature, in particular below 120 ℃, for example 90 ℃.
The turbomolecular vacuum pump 1 further comprises a purge gas injection device 21 comprising at least one channel 20 formed in the stator 2 and opening between the rotor 3 and the stator 2 to inject purge gas into the path followed by the pumped gas from the intake side 6, downstream of at least one blade stage 9 (fig. 2 and 3).
The partial pressure of condensable gases can be reduced to keep them below the condensation value. This makes it possible to limit the risk of deposits in the turbomolecular vacuum pump 1 and to prolong the time between two maintenance operations.
Injecting the purge gas downstream of the at least one blade stage 9 may also avoid backflow of the purge gas into the chamber to be evacuated.
Another significant advantage is that, for the same set-point temperature to which the stator 2 is heated, reducing the partial pressure of the gas liable to deposit in the turbomolecular vacuum pump 1 makes it possible to increase the flow rate of the gas to be pumped. Thus, the flow rate of the gas being pumped can be increased without additional risk of deposition due to reduced partial pressure and without mechanical risk to the rotor 3.
The purge gas is, for example, air or nitrogen. The flow rate of the purge gas injected is, for example, greater than or equal to 0.1689pa.m3S (or 100 sccm).
The purge gas injection device 21 is configured such that the flow rate of the injected purge gas is below a threshold value determined such that, in operation, the pressure difference of the suction side 6 of the turbomolecular vacuum pump 1 is less than 0.066Pa (i.e. about 0.5mTorr) without and without injection of purge gas. The injection of purge gas into the path followed by the pumped gas therefore does not or hardly change the pumping performance of the suction side 6 of the turbomolecular vacuum pump 1.
For pumping a medium weight gas, e.g. nitrogen, the threshold value determined for the injection flow of purge gas is e.g. 0.76pa.m3(i.e., approximately 450 sccm).
For pumping heavier gases, such as argon, the threshold value determined for the injection flow of purge gas is, for example, 1.3512pa.m3(i.e., about 800 sccm).
For pumping a lighter gas, e.g. helium, the threshold value determined for the injection flow of purge gas is e.g. 0.06756pa.m3I.e., about 40 sccm.
Thus, the threshold value determined for the flow rate of purge gas being injected may not change the pumping performance of the suction side 6 of the turbomolecular vacuum pump 1.
A plurality of channels 20 may be provided in the stator 2, which channels open into the periphery of the rotor 3 via one or more holes, for example circular hole openings.
The purge gas injection means 21 may further comprise at least one connector 25 outside the stator 2 and located at the inlet of said at least one channel 20 to connect said at least one channel 20 to an external purge gas source. The purge gas injection device 21 may also include a nozzle (or calibrated orifice) or a flow regulator to regulate the flow of purge gas.
According to the first embodiment depicted in fig. 1 to 3, the channel 20 leads to the molecular level 5.
For example, the channel 20 opens into the upper part of the hall vicker stator 15 at the entrance of the molecular stage 5 (fig. 3). For example, the axis of the passage 20 opens into the hall vicker stator 15 at a distance d from the turbomolecular stage 4 that is less than 1/4 (fig. 2) of the height of the hall vicker stator 15.
The turbomolecular vacuum pump 1 may further comprise an additional purge gas injection device 22 configured to inject additional purge gas into the bearing 18 of the turbomolecular vacuum pump 1 below the holweck sleeve 13.
According to one embodiment, the additional purge gas injection device 22 comprises one or more inlets 23 configured to allow additional purge gas to enter a cavity 24 housing one end of the shaft 12 that drives the rotor 3 in rotation. The purge gas travels along the shaft 12 under the hall vick sleeve 13, passes through the backup rolling bearing 19 (where appropriate), the bearing 18, the motor 16, and exits from the bell housing 17 of the stator 2 to circulate between the bell housing 17 and the hall vick sleeve 13 up to the delivery side 8 (arrow F2 in fig. 2).
The additional purge gas injection device 22 allows to cool the motor and to purge the pivot elements of the turbomolecular vacuum pump 1, in particular the bearing 18, the electrical connectors, the welds and the backup rolling bearing 19, with gas. Purging these components with additional purge gas can protect them from potentially corrosive gases being pumped.
The flow of additional purge gas is low. It is for example less than or equal to the purge gas flow of the purge gas injection device 21, for example less than or equal to 0.08448pa.m3S (or 50 sccm). The additional purge gas injection device 22 may also include a nozzle or flow regulator to regulate the flow of purge gas。
According to one embodiment, the turbo molecular vacuum pump 1 comprises a common conduit for the inlet 23 of the additional purge gas injection device 22 and the channel 20 of the purge gas injection device 21 to limit the number of connections on the turbo molecular vacuum pump 1 to the purge gas source. One or more nozzles and/or one or more valves arranged on the inlet 23 and/or the channel 20 may make the purge flow different from the additional purge flow.
In operation, purge gas in the pumped gas path and at the bearings 18 may be continuously injected.
They can also be injected separately. In particular, the purge gas injection device 21 may comprise a valve for stopping/allowing purge gas injection. For example, when the pumped gas does not pose a risk to the turbomolecular vacuum pump 1, the injection of purge gas to the pumping gas path may be shut off, while allowing injection of purge gas into the bearing 18 by the additional purge gas injection device 22 to protect the bearing 18.
Fig. 4 shows a second embodiment.
In this example, passage 20 leads to turbomolecular stage 4 downstream of at least one blade stage 9.
When the rotor 3 comprises more than four blade stages 9, the passage 20 leads in the circulation direction F1 of the gas being pumped, for example, to one of the last three blade stages 9. For example, as shown in fig. 4, the duct 20 leads in the turbomolecular stage 4 to the stator 2 in the fifth blade stage 9 facing the rotor 3, i.e. in the region of the penultimate blade stage 9 of the six blade stages 9.
This also avoids the possibility of deposits in the last compression stage of turbomolecular stage 4.
Claims (14)
1. Turbomolecular vacuum pump (1) configured to drive a gas to be pumped from a suction side (6) to a delivery side (8), the turbomolecular vacuum pump (1) comprising:
-a stator (2) comprising at least one vane stage (10) and a Holweck stator (15) in which a helical groove (14) is formed, and
-a rotor (3) comprising:
-at least two vane stages (9), which vane stages (9) and said vane guide stages (10) are arranged axially one after the other in a turbomolecular stage (4) of said turbomolecular vacuum pump (1) along the axis of rotation (I-I) of said rotor (3), and
-a Hall-Vickers sleeve (13) configured to rotate in a molecular stage (5) of the turbomolecular vacuum pump (1), located downstream of the turbomolecular stage (4) in the direction of circulation (F1) of the gas being pumped, past the helical groove (14) of the stator (2),
characterized in that the turbomolecular vacuum pump (1) further comprises a purge gas injection device (21) comprising at least one channel (20) formed in the stator (2) and opening between the rotor (3) and the stator (2) to inject purge gas into the path followed by the pumped gas downstream of at least one vane stage (9) of the rotor (3), the purge gas injection device (21) being configured such that the flow rate of the injected purge gas is lower than a threshold value determined such that the pressure difference of the suction side (6) is less than 0.066Pa, in the absence of injection of purge gas and in the case of injection of purge gas.
2. Turbomolecular vacuum pump (1) according to the preceding claim, wherein at least one channel (20) opens at the molecular stage (5).
3. Turbomolecular vacuum pump (1) according to the preceding claim, wherein the axis of the channel (20) opens into the Hall stator (15) at a distance (d) from the turbomolecular stage (4) which is less than 1/4 of the height of the Hall stator (15).
4. Turbomolecular vacuum pump (1) according to any of the preceding claims, wherein the flow rate of the injected purge gas is greater than or equal to 0.1689pa.m3/s。
5. Turbomolecular vacuum pump (1) according to any of the preceding claims, further comprising an additional purge gas injection device (22) configured to inject additional purge gas into a bearing (18) of the turbomolecular vacuum pump (1) below the Hall wick sleeve (13).
6. Turbomolecular vacuum pump (1) according to the preceding claim, wherein the additional purge gas injection device (22) comprises one or more inlets (23) configured to deliver additional purge gas into a cavity (24) housing one end of a shaft (12) configured to drive the rotor (3) in rotation.
7. Turbo molecular vacuum pump (1) according to any of claims 5 and 6, wherein the flow rate of the additional purge gas is smaller than or equal to the flow rate of the purge gas injection device (21).
8. Turbomolecular vacuum pump (1) according to any of claims 6 and 7, comprising common piping for the inlet (23) and the channel (20).
9. Turbomolecular vacuum pump (1) according to any of the preceding claims, wherein the rotor (3) comprises more than four blade stages (9).
10. Turbomolecular vacuum pump (1) according to any of the preceding claims, wherein at least one channel (20) opens into the turbomolecular stage (4).
11. Turbomolecular vacuum pump (1) according to claims 9 and 10, wherein the channel (20) leads to one of the last three vane stages (9) in the direction of circulation (F1) of the gas being pumped.
12. Method for purging a turbomolecular vacuum pump (1) according to any of the preceding claims, wherein the flow rate of purge gas injected into the path followed by the pumped gas downstream of at least one blade stage (9) of the rotor (3) is less than a threshold value, the threshold value being determined such that the pressure difference of the suction side (6) is less than 0.066Pa, without and with injection of purge gas.
13. The purge method according to the preceding claim, wherein the purge gas is nitrogen.
14. The purging method according to any one of claims 12 and 13, wherein the determined threshold value for the flow rate of the injected purge gas is 0.76pa.m3/s。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1902208A FR3093544B1 (en) | 2019-03-05 | 2019-03-05 | Turbomolecular vacuum pump and purge process |
| FR1902208 | 2019-03-05 | ||
| PCT/EP2020/054556 WO2020178042A1 (en) | 2019-03-05 | 2020-02-20 | Turbomolecular vacuum pump and purging method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113518863A true CN113518863A (en) | 2021-10-19 |
Family
ID=66776629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080017639.4A Pending CN113518863A (en) | 2019-03-05 | 2020-02-20 | Turbo-molecular vacuum pump and purification method |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JP2022522883A (en) |
| KR (1) | KR20210134315A (en) |
| CN (1) | CN113518863A (en) |
| DE (1) | DE112020001075T5 (en) |
| FR (1) | FR3093544B1 (en) |
| TW (1) | TW202040008A (en) |
| WO (1) | WO2020178042A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113586392A (en) * | 2021-09-10 | 2021-11-02 | 北京中科科仪股份有限公司 | Vacuum pump |
| JP7564151B2 (en) | 2022-06-09 | 2024-10-08 | エドワーズ株式会社 | Vacuum pumps and vacuum exhaust systems |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6143297A (en) * | 1984-08-06 | 1986-03-01 | Osaka Shinku Kiki Seisakusho:Kk | Gas purge device for molecular pump |
| JPH11336691A (en) * | 1998-05-25 | 1999-12-07 | Shimadzu Corp | Turbo-molecular pump |
| EP0985828A1 (en) * | 1998-09-10 | 2000-03-15 | Alcatel | Method and device to prevent deposits in a turbomolecular pump having magnetic or gas bearings |
| CN1425854A (en) * | 2001-12-13 | 2003-06-25 | 英国博克爱德华兹技术有限公司 | Vacuum pump |
| JP2004278512A (en) * | 2002-10-11 | 2004-10-07 | Alcatel | Turbo/drag pump having composite skirt |
| EP1510697A1 (en) * | 2003-08-29 | 2005-03-02 | Alcatel | Vacuum pump |
| CN101275574A (en) * | 2007-03-29 | 2008-10-01 | 东京毅力科创株式会社 | Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump |
| JP2009275578A (en) * | 2008-05-14 | 2009-11-26 | Shimadzu Corp | Magnetic bearing type turbo-molecular pump and vacuum system |
| CN105408634A (en) * | 2013-08-30 | 2016-03-16 | 埃地沃兹日本有限公司 | Vacuum pump |
| US20180058457A1 (en) * | 2015-02-23 | 2018-03-01 | Edwards Limited | Gas supply apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0459393U (en) * | 1990-09-29 | 1992-05-21 | ||
| JP2014037809A (en) * | 2012-08-17 | 2014-02-27 | Shimadzu Corp | Vacuum pump and operation method of vacuum pump |
-
2019
- 2019-03-05 FR FR1902208A patent/FR3093544B1/en active Active
-
2020
- 2020-02-20 JP JP2021552554A patent/JP2022522883A/en active Pending
- 2020-02-20 CN CN202080017639.4A patent/CN113518863A/en active Pending
- 2020-02-20 KR KR1020217027117A patent/KR20210134315A/en not_active Application Discontinuation
- 2020-02-20 DE DE112020001075.9T patent/DE112020001075T5/en active Pending
- 2020-02-20 WO PCT/EP2020/054556 patent/WO2020178042A1/en active Application Filing
- 2020-02-25 TW TW109106027A patent/TW202040008A/en unknown
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6143297A (en) * | 1984-08-06 | 1986-03-01 | Osaka Shinku Kiki Seisakusho:Kk | Gas purge device for molecular pump |
| JPH11336691A (en) * | 1998-05-25 | 1999-12-07 | Shimadzu Corp | Turbo-molecular pump |
| EP0985828A1 (en) * | 1998-09-10 | 2000-03-15 | Alcatel | Method and device to prevent deposits in a turbomolecular pump having magnetic or gas bearings |
| CN1425854A (en) * | 2001-12-13 | 2003-06-25 | 英国博克爱德华兹技术有限公司 | Vacuum pump |
| JP2004278512A (en) * | 2002-10-11 | 2004-10-07 | Alcatel | Turbo/drag pump having composite skirt |
| EP1510697A1 (en) * | 2003-08-29 | 2005-03-02 | Alcatel | Vacuum pump |
| CN101275574A (en) * | 2007-03-29 | 2008-10-01 | 东京毅力科创株式会社 | Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump |
| JP2009275578A (en) * | 2008-05-14 | 2009-11-26 | Shimadzu Corp | Magnetic bearing type turbo-molecular pump and vacuum system |
| CN105408634A (en) * | 2013-08-30 | 2016-03-16 | 埃地沃兹日本有限公司 | Vacuum pump |
| US20180058457A1 (en) * | 2015-02-23 | 2018-03-01 | Edwards Limited | Gas supply apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20210134315A (en) | 2021-11-09 |
| FR3093544A1 (en) | 2020-09-11 |
| WO2020178042A1 (en) | 2020-09-10 |
| FR3093544B1 (en) | 2021-03-12 |
| JP2022522883A (en) | 2022-04-20 |
| DE112020001075T5 (en) | 2022-01-05 |
| TW202040008A (en) | 2020-11-01 |
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