CN113512229B - Micro-nano porous light trapping structure and preparation method thereof - Google Patents
Micro-nano porous light trapping structure and preparation method thereof Download PDFInfo
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- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
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- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2327/18—Homopolymers or copolymers of tetrafluoroethylene
Abstract
The invention aims to provide a micro-nano porous light trapping structure and a preparation method thereof. Aiming at the defect that the precision controllability of a selective optical absorption structure in the traditional preparation process is poor, the porous optical absorption structure with the size capable of being accurately regulated and controlled and the preparation method thereof are provided.
Description
Technical Field
The invention relates to a light trapping structure material.
Background
The selective absorption structure is a functional optical structure capable of performing high light absorption at a specific target waveband and performing low light absorption at a non-specific target waveband, and plays an important role in scenes requiring selective absorption of light, such as radiation refrigeration, heat control, energy enrichment and the like. For example, optical structures for solar absorption require high absorptance in the visible and low absorptance and emittance in the infrared to achieve efficient solar concentration. The existing selective absorption structure is mainly prepared by means of electroplating, spraying, electrochemistry, film coating, vapor deposition and the like, can realize selective absorption of light functionally, but is difficult to accurately control the range and boundary of a target absorption waveband and a non-target absorption waveband. With the continuous development of aerospace technologies and weaponry, higher requirements are put forward on the absorption accuracy, accuracy and efficiency of selective absorption structures, and the preparation of efficient absorption structures with accurately adjustable absorption bands needs further exploration.
Disclosure of Invention
The invention aims to provide a preparation method of a micro-nano porous light trapping structure, which is characterized by comprising the following steps of:
(1) Preparing micron or nano inorganic particles as a pore-foaming agent;
(2) Dispersing and embedding inorganic particles on the surface of a polymer template;
(3) And after inorganic particles are removed by etching, a porous light trapping structure is formed on the surface of the polymer template.
Further, the step (1) comprises the following steps:
(1-1) preparation of inorganic particle Dispersion: mixing and grinding inorganic particle silicon dioxide, deionized water, a surfactant and an alkaline stabilizer to prepare silicon dioxide dispersion liquid;
wherein, the mixture ratio of each component is as follows:
100-2000 parts of silicon dioxide
8000-9900 portions of deionized water
2-500 parts of nonionic surfactant
1-500 parts (1-2) of an alkaline stabilizer, and the preparation of the impregnating solution: mixing the silicon dioxide dispersion liquid and the polytetrafluoroethylene emulsion to prepare a soaking liquid;
wherein, the mixture ratio of each component is as follows:
10-99 parts of silicon dioxide dispersion liquid
2-90 parts of polytetrafluoroethylene emulsion
2-80 parts of impregnating solution.
Further, the step (2) comprises the following steps:
(2-1) impregnation of the polymer template:
cleaning the surface of a polytetrafluoroethylene high-molecular template, immersing the template into the impregnating solution obtained in the step (1-2), and drying to obtain coupled particles of silicon dioxide and polytetrafluoroethylene distributed on the surface of the template;
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene polymer template treated in the step (2-1) to embed the coupling particles into the surface layer of the template, and then slowly cooling the template to room temperature.
Further, in the step (3), the surface of the template obtained by the treatment in the step (2-2) is etched by hydrofluoric acid, and is ultrasonically cleaned by deionized water or ethanol solution, and then is dried to obtain the porous structure.
Further, in the step (1-1):
the inorganic particles are nano or micron-sized silica particles with standard sizes;
the grinding mode is a sand grinding method or a ball grinding method;
the surfactant is a nonionic surfactant or an amphoteric surfactant which is nonionic under alkaline conditions;
the alkaline stabilizer is metal hydroxide;
the pH of the dispersion was 7-9.
Further, in the step (1-1):
the grain size of the nano-scale silicon dioxide is 100-950nm, and the grain size of the micro-scale silicon dioxide is 1-30 mu m;
in the grinding mode, the grinding time of the sand grinding method is 1-5 hours. Grinding for 3-20 hours by a ball milling method;
the nonionic surfactant is selected from polyethylene glycol octyl phenyl ether and alkylphenol polyoxyethylene ether;
the amphoteric surfactant which is nonionic under alkaline condition is alkyl amine oxide surfactant;
the metal hydroxide is selected from aluminum hydroxide or copper hydroxide;
further, in the step (1-2):
the solid content of the polytetrafluoroethylene emulsion is 40-80wt%;
the mixing mode is magnetic stirring or mechanical stirring.
Further, in the step (1-1):
the alkyl amine oxide surfactant is selected from octadecyl dihydroxyethyl amine oxide, hexadecyl dihydroxyethyl amine oxide, tetradecyl dihydroxyethyl amine oxide, dodecyl dihydroxyethyl amine oxide, hexadecyl dimethyl amine oxide, octadecyl dimethyl amine oxide, dodecyl dimethyl amine oxide, tetradecyl dimethyl amine oxide, octadecyl amidopropyl amine oxide, cocamidopropyl amine oxide or lauramidopropyl amine oxide;
further, in the step (2-1):
the polytetrafluoroethylene high polymer template is a polytetrafluoroethylene plate or a polytetrafluoroethylene film;
the infiltration time is 5 to 30 minutes;
the drying temperature is 90-120 ℃.
Further, in the step (2-2):
the heat treatment temperature is 320-360 ℃, and the heat treatment time is 5-20 minutes;
the slow cooling process comprises the following steps: starting from the heat treatment temperature of claim 12, the temperature is decreased to 200 ℃ at a cooling rate of 1 ± 0.5 ℃/min, and then the temperature is naturally cooled to room temperature.
Further, in the step (3), the concentration of hydrofluoric acid is 10-20%, and the etching time is 1-24 hours.
The invention claims a micro-nano porous light trapping structure obtained according to the method.
The method has the benefits that the optical absorption structure with uniform size and high precision is constructed by selecting the pore-foaming agent with the particle size matched with the wavelength of a target absorption light source, so that the directional high-efficiency absorption of light is realized. In addition, the adjustable range of the size of the optical absorption structure is 0.1-30 μm, the selective absorption of a specific light source in the range from a vacuum ultraviolet band to a far infrared band can be met, and the application range and the application scene of the structure are greatly expanded.
Drawings
FIG. 1 is a schematic diagram of a micro-nano porous light trapping structure according to the present invention.
Detailed Description
The present invention is further illustrated by the following examples, but it should not be construed that the scope of the above-described subject matter is limited to the following examples. Various substitutions and alterations can be made without departing from the technical idea of the invention and the scope of the invention is covered by the present invention according to the common technical knowledge and the conventional means in the field.
Example 1:
the preparation method of the micro-nano porous light trapping structure comprises the following steps:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) preparation of inorganic particle Dispersion: weighing the following raw materials in parts by weight: 10g of silicon dioxide particles with the particle size of 200nm, 90g of deionized water, 2g of surfactant alkylphenol ethoxylates and 1g of alkaline stabilizer aluminum hydroxide; mixing and grinding for 5 hours by a sand grinding method to prepare a silicon dioxide dispersion liquid, wherein the pH value of the dispersion liquid is 8.
(1-2) preparation of immersion liquid:
weighing the following raw materials in parts by weight: 50g of silicon dioxide dispersion liquid and 20g of polytetrafluoroethylene emulsion with solid content of 50% in the step (1-1); the impregnating solution is prepared by mixing and stirring by magnetic force, and the concentration of the impregnating solution is 30%.
(2) Dispersing and embedding inorganic particles on the surface of a polymer template (2-1), soaking the polymer template:
and (2) cleaning the surface of the polytetrafluoroethylene plate template, immersing the surface into the impregnating solution obtained in the step (1), taking out the polytetrafluoroethylene plate template after 15 minutes of impregnation, placing the polytetrafluoroethylene plate template in a drying oven at 100 ℃, and completely drying the polytetrafluoroethylene plate template to distribute coupling particles of silicon dioxide and polytetrafluoroethylene on the surface of the template.
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene polymer template obtained in the step (2-1) at 340 ℃ for 10 minutes to embed the coupling particles into the surface layer of the template, cooling to 200 ℃ at a cooling speed of 1 +/-0.5 ℃/min, and then naturally cooling the template to room temperature along with the furnace.
(3) Etching the template:
and (3) etching the surface of the template obtained in the step (2) for 12 hours by using hydrofluoric acid with the concentration of 20%, then ultrasonically cleaning the surface of the template by using deionized water or ethanol solution, and drying to obtain the porous light trapping structure.
The diameter of a hole in the light trapping structure is 200 +/-20 nm, the light trapping structure is used for directional absorption of vacuum ultraviolet band light, and the directional absorption rate is improved by 16.5%.
Example 2:
the preparation steps of the micro-nano porous light trapping structure are as follows:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) weighing the following raw materials by weight: 10g of silicon dioxide particles with the particle size of 400nm, 90g of deionized water, 1.5g of surfactant alkylphenol ethoxylates and 0.8g of alkaline stabilizer aluminum hydroxide; mixing and grinding for 4 hours by a sand milling method to prepare a silicon dioxide dispersion liquid, wherein the pH value of the dispersion liquid is 8.
(1-2) preparation of immersion liquid:
weighing the following raw materials in parts by weight: 50g of silicon dioxide dispersion liquid and 20g of polytetrafluoroethylene emulsion with solid content of 50% in the step (1-1); the impregnating solution is prepared by mixing and stirring by magnetic force, and the concentration of the impregnating solution is 30%.
(2) Dispersing and embedding inorganic particles on the surface of a polymer template (2-1), soaking the polymer template:
and (2) cleaning the surface of the template of the polytetrafluoroethylene plate, soaking the template of the polytetrafluoroethylene plate into the soaking liquid in the step (1), taking out the template of the polytetrafluoroethylene plate after soaking for 15 minutes, placing the template of the polytetrafluoroethylene plate into a drying oven at 100 ℃, and completely drying the template of the polytetrafluoroethylene plate, wherein coupling particles of silicon dioxide and polytetrafluoroethylene are distributed on the surface of the template.
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene polymer template obtained in the step (2-1) at 340 ℃ for 10 minutes to embed the coupling particles into the surface layer of the template, cooling to 200 ℃ at a cooling speed of 1 +/-0.5 ℃/min, and then naturally cooling the template to room temperature along with the furnace.
(3) Etching the template:
and (3) etching the surface of the template obtained in the step (2) for 12 hours by using hydrofluoric acid with the concentration of 20%, then ultrasonically cleaning the surface of the template by using deionized water or ethanol solution, and drying to obtain the porous light trapping structure.
The diameter of a hole in the light trapping structure is 400 +/-40 nm, the light trapping structure is used for directional absorption of ultraviolet band light, and the directional absorption rate is improved by 15.3%.
Example 3:
the preparation steps of the micro-nano porous light trapping structure are as follows:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) preparation of inorganic particle Dispersion:
weighing the following raw materials in parts by weight: 10g of silicon dioxide particles with the particle size of 800nm, 90g of deionized water, 1g of surfactant alkylphenol polyoxyethylene, and 0.5g of alkaline stabilizer aluminum hydroxide; the silica dispersion was prepared by mixing and grinding for 3 hours by a sand milling method, and the pH of the dispersion was 8.
(1-2) preparation of immersion liquid:
weighing the following raw materials in parts by weight: 50g of silicon dioxide dispersion liquid and 20g of polytetrafluoroethylene emulsion with solid content of 50% in the step (1-1); the impregnating solution is prepared by mixing and stirring by magnetic force, and the concentration of the impregnating solution is 30%.
(2) Dispersing and embedding inorganic particles on the surface of a polymer template (2-1), soaking the polymer template:
and (2) cleaning the surface of the polytetrafluoroethylene plate template, immersing the surface into the impregnating solution obtained in the step (1), taking out the polytetrafluoroethylene plate template after 15 minutes of impregnation, placing the polytetrafluoroethylene plate template in a drying oven at 100 ℃, and completely drying the polytetrafluoroethylene plate template to distribute coupling particles of silicon dioxide and polytetrafluoroethylene on the surface of the template.
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene polymer template obtained in the step (2-1) at 340 ℃ for 10 minutes to embed the coupling particles into the surface layer of the template, cooling to 200 ℃ at a cooling speed of 1 +/-0.5 ℃/min, and then naturally cooling the template to room temperature along with the furnace.
(3) Etching the template:
and (3) etching the surface of the template obtained in the step (2) for 12 hours by using hydrofluoric acid with the concentration of 20%, then ultrasonically cleaning the surface by using deionized water or ethanol solution, and drying to obtain the porous light trapping structure.
The diameter of a hole in the light trapping structure is 800 +/-80 nm, the light trapping structure is used for directional absorption of visible light band light, and the directional absorption rate is improved by 14.1%.
Example 4:
the preparation steps of the micro-nano porous light trapping structure are as follows:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) preparation of inorganic particle Dispersion:
weighing the following raw materials in parts by weight: 10g of silicon dioxide particles with the particle size of 2.5 mu m, 90g of deionized water, 2g of surfactant polyethylene glycol octyl phenyl ether and 1g of alkaline stabilizer aluminum hydroxide; mixing and grinding for 12 hours by adopting a ball milling method to prepare a silicon dioxide dispersion liquid, wherein the pH value of the dispersion liquid is 8.
(1-2) preparation of immersion liquid:
weighing the following raw materials in parts by weight: 50g of silicon dioxide dispersion liquid and 20g of polytetrafluoroethylene emulsion with solid content of 50% in the step (1-1); the impregnating solution is prepared by mixing and stirring by magnetic force, and the concentration of the impregnating solution is 30%.
(2) Dispersing and embedding inorganic particles on the surface of a polymer template (2-1), soaking the polymer template:
and (2) cleaning the surface of the template of the polytetrafluoroethylene plate, soaking the template of the polytetrafluoroethylene plate into the soaking liquid in the step (1), taking out the template of the polytetrafluoroethylene plate after soaking for 15 minutes, placing the template of the polytetrafluoroethylene plate into a drying oven at 100 ℃, and completely drying the template of the polytetrafluoroethylene plate, wherein coupling particles of silicon dioxide and polytetrafluoroethylene are distributed on the surface of the template.
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene high-molecular template obtained in the step (2-1) at 350 ℃ for 15 minutes to enable coupling particles to be embedded into the surface layer of the template, cooling to 200 ℃ at a cooling speed of 1 +/-0.5 ℃/min, and then naturally cooling the template to room temperature along with a furnace.
(3) Etching the template:
and (3) etching the surface of the template obtained in the step (2) for 12 hours by using hydrofluoric acid with the concentration of 20%, then ultrasonically cleaning the surface by using deionized water or ethanol solution, and drying to obtain the porous light trapping structure.
The diameter of a hole in the light trapping structure is 2.5 +/-0.25 mu m, the light trapping structure is used for directional absorption of near-infrared band light, and the directional absorption rate is improved by 17.9%.
Example 5:
the preparation method of the micro-nano porous light trapping structure comprises the following steps:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) preparation of inorganic particle Dispersion:
weighing the following raw materials in parts by weight: 10g of silicon dioxide particles with the particle size of 5 mu m, 90g of deionized water, 1.5g of surfactant polyethylene glycol octyl phenyl ether and 0.8g of alkaline stabilizer aluminum hydroxide; mixing and grinding for 8 hours by adopting a ball milling method to prepare a silicon dioxide dispersion liquid, wherein the pH value of the dispersion liquid is 8.
(1-2) preparation of immersion liquid:
weighing the following raw materials in parts by weight: 50g of silicon dioxide dispersion liquid and 20g of polytetrafluoroethylene emulsion with solid content of 50% in the step (1-1); the impregnating solution is prepared by mixing and stirring by magnetic force, and the concentration of the impregnating solution is 30%.
(2) Dispersing and embedding inorganic particles on the surface of a polymer template (2-1), soaking the polymer template:
and (2) cleaning the surface of the polytetrafluoroethylene plate template, immersing the surface into the impregnating solution obtained in the step (1), taking out the polytetrafluoroethylene plate template after 15 minutes of impregnation, placing the polytetrafluoroethylene plate template in a drying oven at 100 ℃, and completely drying the polytetrafluoroethylene plate template to distribute coupling particles of silicon dioxide and polytetrafluoroethylene on the surface of the template.
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene polymer template obtained in the step (2-1) at 350 ℃ for 15 minutes to embed the coupling particles into the surface layer of the template, cooling to 200 ℃ at a cooling speed of 1 +/-0.5 ℃/min, and then naturally cooling the template to room temperature along with the furnace.
(3) Etching the template:
and (3) etching the surface of the template obtained in the step (2) for 12 hours by using hydrofluoric acid with the concentration of 20%, then ultrasonically cleaning the surface of the template by using deionized water or ethanol solution, and drying to obtain the porous light trapping structure.
The diameter of a hole in the light trapping structure is 5 +/-0.5 mu m, the directional light trapping structure is used for directional absorption of light in a middle infrared band, and the directional absorption rate is improved by 19.5%.
Example 6:
the preparation method of the micro-nano porous light trapping structure comprises the following steps:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) preparation of inorganic particle Dispersion:
weighing the following raw materials in parts by weight: 10g of silicon dioxide particles with the particle size of 14 mu m, 90g of deionized water, 1g of surfactant polyethylene glycol octyl phenyl ether and 0.5g of alkaline stabilizer aluminum hydroxide; the silica dispersion was prepared by mixing and milling for 4 hours by ball milling, the pH of the dispersion being 8.
(1-2) preparation of immersion liquid:
weighing the following raw materials in parts by weight: 50g of silicon dioxide dispersion liquid and 20g of polytetrafluoroethylene emulsion with solid content of 50% in the step (1-1); the impregnating solution is prepared by mixing and stirring by magnetic force, and the concentration of the impregnating solution is 30%.
(2) Dispersing and embedding inorganic particles on the surface of a polymer template (2-1), soaking the polymer template:
and (2) cleaning the surface of the polytetrafluoroethylene plate template, immersing the surface into the impregnating solution obtained in the step (1), taking out the polytetrafluoroethylene plate template after 15 minutes of impregnation, placing the polytetrafluoroethylene plate template in a drying oven at 100 ℃, and completely drying the polytetrafluoroethylene plate template to distribute coupling particles of silicon dioxide and polytetrafluoroethylene on the surface of the template.
(2-2) particle intercalation:
and (3) carrying out heat treatment on the polytetrafluoroethylene polymer template obtained in the step (2-1) at 350 ℃ for 20 minutes to embed the coupling particles into the surface layer of the template, cooling to 200 ℃ at a cooling speed of 1 +/-0.5 ℃/min, and then naturally cooling the template to room temperature along with the furnace.
(3) Etching the template:
and (3) etching the surface of the template obtained in the step (2) for 12 hours by using hydrofluoric acid with the concentration of 20%, then ultrasonically cleaning the surface by using deionized water or ethanol solution, and drying to obtain the porous light trapping structure.
The diameter of the hole in the light trapping structure is 14 +/-1.4 microns, the light trapping structure is used for directional absorption of far infrared band light, and the directional absorption rate is improved by 21.3%.
Claims (8)
1. A preparation method of a micro-nano porous light trapping structure is characterized by comprising the following steps:
(1) Preparing micron or nano inorganic particles as pore-foaming agent:
(1-1) preparation of inorganic particle Dispersion: mixing and grinding inorganic particle silicon dioxide, deionized water, a surfactant and an alkaline stabilizer to prepare silicon dioxide dispersion liquid;
wherein, the mixture ratio of each component is as follows:
100-2000 parts of silicon dioxide
8000-9900 portions of deionized water
2-500 parts of surfactant
1-500 parts of an alkaline stabilizer;
(1-2) preparation of immersion liquid: mixing the silicon dioxide dispersion liquid with the polytetrafluoroethylene emulsion to prepare a soaking liquid;
wherein, the mixture ratio of each component is as follows:
10-99 parts of silicon dioxide dispersion liquid
2-90 parts of polytetrafluoroethylene emulsion;
(2) Dispersing and embedding inorganic particles on the surface of a polymer template:
(2-1) soaking of the polymer template:
cleaning the surface of a polytetrafluoroethylene high-molecular template, immersing the template into the impregnating solution obtained in the step (1-2), and drying to obtain coupled particles of silicon dioxide and polytetrafluoroethylene distributed on the surface of the template;
(2-2) particle intercalation:
carrying out heat treatment on the polytetrafluoroethylene polymer template treated in the step (2-1) to embed coupling particles into the surface layer of the template, and then slowly cooling the template to room temperature;
(3) And after inorganic particles are removed by etching, a porous light trapping structure is formed on the surface of the polymer template.
2. The preparation method of the micro-nano porous light trapping structure according to claim 1, characterized by comprising the following steps: and (3) etching the surface of the template obtained by the treatment in the step (2-2) by using hydrofluoric acid, ultrasonically cleaning the template by using deionized water or ethanol solution, and drying the template to obtain the porous structure.
3. The method for preparing a micro-nano porous light trapping structure according to claim 2, wherein in the step (1-1):
the inorganic particles are nano or micron-sized silica particles with standard sizes;
the grinding mode is a sand grinding method or a ball grinding method;
the surfactant is a nonionic surfactant or an amphoteric surfactant which is nonionic under alkaline conditions;
the alkaline stabilizer is metal hydroxide;
the pH of the dispersion was 7-9.
4. The method for preparing a micro-nano porous light trapping structure according to claim 3, wherein in the step (1-1):
the grain size of the nano-scale silicon dioxide is 100-950nm, and the grain size of the micro-scale silicon dioxide is 1-30 μm;
in the grinding mode, the grinding time of the sand grinding method is 1-5 hours; grinding for 3-20 hours by a ball milling method;
the nonionic surfactant is selected from polyethylene glycol octyl phenyl ether and alkylphenol polyoxyethylene ether;
the amphoteric surfactant which is nonionic under alkaline conditions is an alkyl amine oxide surfactant;
the metal hydroxide is selected from aluminum hydroxide or copper hydroxide;
in the step (1-2):
the solid content of the polytetrafluoroethylene emulsion is 40-80wt%;
the mixing mode is magnetic stirring or mechanical stirring.
5. The method for preparing a micro-nano porous light trapping structure according to claim 4, wherein in the step (1-1):
the alkyl amine oxide surfactant is selected from octadecyl dihydroxyethyl amine oxide, hexadecyl dihydroxyethyl amine oxide, tetradecyl dihydroxyethyl amine oxide, dodecyl dihydroxyethyl amine oxide, hexadecyl dimethyl amine oxide, octadecyl dimethyl amine oxide, dodecyl dimethyl amine oxide, tetradecyl dimethyl amine oxide, octadecyl amidopropyl amine oxide, cocamidopropyl amine oxide or lauramidopropyl amine oxide.
6. The method for preparing a micro-nano porous light trapping structure according to claim 5, characterized in that,
in the step (2-1):
the polytetrafluoroethylene high polymer template is a polytetrafluoroethylene plate or a polytetrafluoroethylene film;
the soaking time is 5-30 minutes;
the drying temperature is 90-120 ℃;
in the step (2-2):
the heat treatment temperature is 320-360 ℃, and the heat treatment time is 5-20 minutes;
the slow cooling process comprises the following steps: cooling to 200 ℃ at a cooling rate of 1 +/-0.5 ℃/min from the heat treatment temperature, and then naturally cooling to room temperature.
7. The preparation method of the micro-nano porous light trapping structure according to claim 6, characterized by comprising the following steps: in the step (3), the concentration of the hydrofluoric acid is 10-20%, and the etching time is 1-24 hours.
8. The micro-nano porous light trapping structure obtained by the method according to any one of claims 1 to 7.
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| US8802482B2 (en) * | 2011-11-04 | 2014-08-12 | International Business Machines Corporation | Method to fabricate multicrystal solar cell with light trapping surface using nanopore copolymer |
| CN103928542B (en) * | 2014-04-30 | 2017-04-05 | 陕西师范大学 | A kind of silicon systems solaode and its preparation method and preparation facilitiess and its surface texture |
| CN104103700B (en) * | 2014-07-23 | 2016-08-10 | 陕西师范大学 | A kind of silicon system solaode and preparation method thereof and preparation facilities |
| CN204315589U (en) * | 2014-12-05 | 2015-05-06 | 广东爱康太阳能科技有限公司 | A kind of suede structure of polysilicon solar cell |
| CN105047734A (en) * | 2015-08-27 | 2015-11-11 | 江苏辉伦太阳能科技有限公司 | Inverted pyramid structure of polysilicon surface and fabrication method of inverted pyramid structure |
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| CN106024919B (en) * | 2016-07-28 | 2017-11-03 | 东北大学 | Amorphous silicon thin-film solar cell and its manufacture method |
| CN106601836A (en) * | 2016-12-16 | 2017-04-26 | 上海电机学院 | Technology for manufacturing light trapping structure in surface of photovoltaic cell based on nano-particles |
| CN106935669B (en) * | 2017-05-23 | 2018-08-14 | 江苏福吉食品有限公司 | A kind of etching method of the diamond wire slice black silicon of polycrystalline |
| CN109037369B (en) * | 2018-06-25 | 2020-11-20 | 江苏理工学院 | Method for preparing efficient light trapping suede by reactive ion etching |
| CN109856300A (en) * | 2018-11-22 | 2019-06-07 | 天津大学 | A kind of preparation method of silica inverse opal hydrogel photonic crystal microballoon |
| CN111718584A (en) * | 2020-06-18 | 2020-09-29 | 上海交通大学 | Radiation cooling film, preparation method and application thereof |
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