CN113507275A - Bulk acoustic wave filter, layout method and communication device - Google Patents
Bulk acoustic wave filter, layout method and communication device Download PDFInfo
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- CN113507275A CN113507275A CN202110801090.4A CN202110801090A CN113507275A CN 113507275 A CN113507275 A CN 113507275A CN 202110801090 A CN202110801090 A CN 202110801090A CN 113507275 A CN113507275 A CN 113507275A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
- G06F30/392—Floor-planning or layout, e.g. partitioning or placement
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02062—Details relating to the vibration mode
Abstract
The embodiment of the invention discloses a bulk acoustic wave filter, a layout method and a communication device. The layout method of the bulk acoustic wave filter comprises the following steps: the bulk acoustic wave filter includes many series branch roads and parallel branch road, and the series branch road includes series connection's series resonance unit, and parallel branch road includes parallel resonance unit, its characterized in that includes: controlling the layout distance between the nth parallel branch and the n + i th parallel branch so as to enable the coupling capacitance between the nth parallel branch and the n + i th parallel branch to be smaller than a preset capacitance value, wherein the nth parallel branch and the n + i th parallel branch are connected with the series branch, the value of n comprises an integer larger than or equal to 1, and the value of i comprises an integer larger than or equal to 1. The technical scheme provided by the embodiment of the invention improves the sinking degree of the transmission zero point of the bulk acoustic wave filter and enhances the out-of-band rejection performance.
Description
Technical Field
The embodiment of the invention relates to the technical field of semiconductors, in particular to a bulk acoustic wave filter, a layout method and a communication device.
Background
With the continuous development of wireless communication technology, high-performance and small-sized communication devices are more and more widely applied.
The Bulk Acoustic Wave (Bulk Acoustic Wave) filter has the characteristics of small size, high working frequency, low power consumption, high quality factor, compatibility with a CMOS (complementary metal oxide semiconductor) process and the like, and is widely applied to the filter design of a radio frequency front-end module. The bulk acoustic wave ladder filter including the cascaded series branch and parallel branch has the widest application range. However, the existing bulk acoustic wave ladder filter has the problems of degraded transmission zero and poor out-of-band rejection performance.
Disclosure of Invention
In view of this, embodiments of the present invention provide a bulk acoustic wave filter, a layout method, and a communication device, so as to solve the problem of transmission zero degradation of the bulk acoustic wave filter and enhance the out-of-band rejection performance.
The embodiment of the invention provides a layout method of a bulk acoustic wave filter, wherein the bulk acoustic wave filter comprises a plurality of series branches and parallel branches, the series branches comprise series resonance units connected in series, the parallel branches comprise parallel resonance units, and the layout method comprises the following steps:
controlling a layout distance between an nth parallel branch and an n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch and the n + i th parallel branch are connected with the series branch, a value of n comprises an integer greater than or equal to 1, and a value of i comprises an integer greater than or equal to 1.
Optionally, controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
controlling the layout distance between a first-stage parallel branch and a last-stage parallel branch so that the coupling capacitance between an nth parallel branch and an n + i parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is a first-stage parallel branch, the n + i parallel branch is a last-stage parallel branch, the connection point of the first-stage parallel branch and the series branch is a first-stage connection point, and the connection point of the last-stage parallel branch and the series branch is a last-stage connection point; the number of series resonant cells spaced between the first connection point and the input of the series branch is less than the number of series resonant cells spaced between the last connection point and the input of the series branch.
Optionally, controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
the number of the parallel branches is greater than or equal to 3, the parallel branches further comprise at least one middle parallel branch, and the layout distance between the primary parallel branch and any one of the middle parallel branches is controlled so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is the primary parallel branch, and the n + i parallel branch is any one of the middle parallel branches;
and/or controlling a layout distance between the final-stage parallel branch and any one of the intermediate parallel branches so that a coupling capacitance between an nth parallel branch and an n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is any one of the intermediate parallel branches, and the n + i th parallel branch is the final-stage parallel branch.
Optionally, controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
the number of the parallel branches is greater than or equal to 4, the parallel branches further comprise at least two middle parallel branches, and the layout distance between the at least two middle parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch and the n + i th parallel branch are any two of the middle parallel branches.
Optionally, controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
and controlling the shortest straight-line distance between the edges of the parallel resonance units of the nth parallel branch and the (n + i) th parallel branch to be greater than or equal to a preset distance so as to enable the coupling capacitance between the nth parallel branch and the (n + i) th parallel branch to be smaller than a preset capacitance value.
The embodiment of the invention also provides a bulk acoustic wave filter, which comprises a plurality of series branches and parallel branches; the series branch includes series connection's series resonance unit, parallel branch includes parallel resonance unit, includes:
the nth parallel branch and the n + i th parallel branch are connected with the series branch, and the layout distance between the nth parallel branch and the n + i th parallel branch enables the coupling capacitance between the nth parallel branch and the n + i th parallel branch to be smaller than a preset capacitance value, wherein the value of n comprises an integer larger than or equal to 1, and the value of i comprises an integer larger than or equal to 1.
Optionally, the series branch includes series resonant units connected in series, and the parallel branch includes parallel resonant units;
the nth parallel branch is a first-stage parallel branch, and the n + i th parallel branch is a last-stage parallel branch, wherein the connection point of the first-stage parallel branch and the serial branch is a first-stage connection point, and the connection point of the last-stage parallel branch and the serial branch is a last-stage connection point; the number of series resonant cells spaced between the first connection point and the input of the series branch is less than the number of series resonant cells spaced between the last connection point and the input of the series branch.
Optionally, the number of the parallel branches is greater than or equal to 3, and the parallel branches further include at least one intermediate parallel branch;
the nth parallel branch is the primary parallel branch, and the n + i parallel branch is any one of the intermediate parallel branches;
and/or the nth parallel branch is any one of the intermediate parallel branches, and the n + i th parallel branch is the final-stage parallel branch.
Optionally, the number of the parallel branches is greater than or equal to 4, and the parallel branches further include at least two intermediate parallel branches; any two of the nth parallel branch and the n + i th parallel branch are the intermediate parallel branches.
Optionally, the preset capacitance value is less than or equal to 0.001 pf.
Optionally, a shortest straight-line distance between edges of the parallel resonance units of the nth parallel branch and the (n + i) th parallel branch is greater than or equal to a preset distance.
Optionally, the preset distance is greater than or equal to 200 micrometers.
The embodiment of the invention also provides a communication device, which comprises the bulk acoustic wave filter in any technical scheme;
the communication device includes a duplexer or a multiplexer.
According to the technical scheme provided by the embodiment of the invention, the layout distance between the nth parallel branch and the n + i th parallel branch is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than the preset capacitance value, the coupling effect between the parallel branches is reduced, the depression degree of the transmission zero point of the bulk acoustic wave filter is greatly deepened, the problem of transmission zero point degradation of the bulk acoustic wave filter is further solved, and the out-of-band rejection performance is enhanced.
Drawings
Fig. 1 is a schematic diagram of a topology of a bulk acoustic wave filter in the prior art;
fig. 2 is a transmission response curve of the bulk acoustic wave filter shown in fig. 1;
fig. 3 is a schematic flow chart of a layout method of a bulk acoustic wave filter according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a topology structure of a bulk acoustic wave filter according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another bulk acoustic wave filter according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another bulk acoustic wave filter according to an embodiment of the present invention;
fig. 7 is a transmission response curve of the bulk acoustic wave filter shown in fig. 4-6;
figure 8 is a graph comparing the transmission response curve of the bulk acoustic wave filter shown in figure 7 with the transmission response curve of a bulk acoustic wave filter of the prior art;
fig. 9 is a schematic flow chart of another layout method of a bulk acoustic wave filter according to an embodiment of the present invention;
fig. 10 is a layout diagram of the bulk acoustic filter shown in fig. 4;
fig. 11 is a layout diagram of a bulk acoustic wave filter in the prior art.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The inventor finds that the existing bulk acoustic wave ladder filter with the widest application range has the problems of transmission zero degradation and poor out-of-band rejection performance through long-term research. Fig. 1 is a schematic diagram of a topology of a bulk acoustic wave filter in the prior art. Fig. 2 is a transmission response curve of the bulk acoustic wave filter shown in fig. 1. Referring to fig. 1 and 2, a bulk acoustic wave filter in the prior art includes a series resonant unit Se1, a series resonant unit Se2, a series resonant unit Se3, and a series resonant unit Se4, which form a series branch and 3 parallel branches, where the series branch includes an input terminal 101 and an output terminal 102, and the parallel resonant unit sh1, the parallel resonant unit sh2, and the parallel resonant unit sh3 form 3 parallel branches. Referring to fig. 2, the conventional bulk acoustic wave filter has a first transmission zero a0 at a frequency fa and a second transmission zero B0 at a frequency fb. Coupling capacitance must exist between arbitrary two in 3 parallel branch roads, and in the prior art, the layout distance undersize between the parallel branch roads leads to coupling capacitance between the parallel branch roads too big, and then leads to first transmission zero A0 degeneration among the existing bulk acoustic wave filter, appears the not good problem of outband suppression performance. It should be noted that fig. 1 exemplarily shows the coupling capacitor C0 between the parallel resonant cell sh1 and the parallel resonant cell sh 3.
In view of the above technical problems, an embodiment of the present invention provides the following technical solutions:
fig. 3 is a schematic flow chart of a layout method of a bulk acoustic wave filter according to an embodiment of the present invention. Fig. 4 is a schematic view of a topology structure of a bulk acoustic wave filter according to an embodiment of the present invention. Fig. 5 is a schematic structural diagram of another bulk acoustic wave filter according to an embodiment of the present invention. Fig. 6 is a schematic structural diagram of another bulk acoustic wave filter according to an embodiment of the present invention. Fig. 7 is a transmission response curve of the bulk acoustic wave filter shown in fig. 4 to 6. Fig. 8 is a graph comparing a transmission response curve of the bulk acoustic wave filter shown in fig. 7 with a transmission response curve of a bulk acoustic wave filter in the related art. Referring to fig. 4 to 6, the layout method of the acoustic wave filter is applicable to a bulk acoustic wave filter including a plurality of series branches and parallel branches, where the series branches include series resonance units connected in series, and the parallel branches include parallel resonance units. Illustratively, the series branch in fig. 4 includes a series resonant cell Se1, a series resonant cell Se2, a series resonant cell Se3, and a series resonant cell Se4 connected in series. The series branch in fig. 5 and 6 includes series resonant cell Se1, series resonant cell Se2, and series resonant cell Se3 connected in series. Fig. 4 and 5 include 3 parallel branches formed by the parallel resonance unit sh1, the parallel resonance unit sh2 and the parallel resonance unit sh3, and fig. 6 includes 4 parallel branches formed by the parallel resonance unit sh1, the parallel resonance unit sh2, the parallel resonance unit sh3 and the parallel resonance unit sh 4. The series branch in fig. 4-6 comprises an input terminal 101 and an output terminal 102. Specifically, the trapezoidal acoustic wave filter includes an L-type, a T-type, and a pi-type. Fig. 4 shows a schematic of the topology of a T-type bulk acoustic wave filter. Fig. 5 shows a schematic view of a topology of an L-type bulk acoustic wave filter. Fig. 6 shows a schematic of the topology of a bulk acoustic wave filter of the type of pi bulk acoustic wave filter.
Referring to fig. 3, the layout method of the bulk acoustic wave filter includes the steps of:
Specifically, referring to fig. 4-6, the series branch includes an input terminal 101 and an output terminal 102, and the parallel branch includes a first-stage parallel branch and a last-stage parallel branch, wherein a connection point of the first-stage parallel branch and the series branch is a first-stage connection point P1, and a connection point of the last-stage parallel branch and the series branch is a last-stage connection point P2; the number of series resonant cells separating the first connection point P1 from the input 101 of the series branch is smaller than the number of series resonant cells separating the last connection point P2 from the input 101 of the series branch. And a middle parallel branch is arranged between the first-stage parallel branch and the last-stage parallel branch, and the connection point of the middle parallel branch and the series branch is a middle connection point P3. For example, in fig. 4 to 6, the nth parallel branch is set as the first-stage parallel branch, the n + i-th parallel branch is set as the last-stage parallel branch, n in fig. 4 to 6 has a value of 1, i in fig. 4 and 5 has a value of 2, and i in fig. 6 has a value of 3.
In the bulk acoustic wave resonator filter, a coupling capacitor must exist between any two of the plurality of parallel branches, and the layout distance between the parallel branches affects the coupling capacitor between the parallel branches. The larger the layout distance between the two parallel branches is, the smaller the coupling capacitance between the two parallel branches is, the smaller the layout distance between the two parallel branches is, and the larger the coupling capacitance between the two parallel branches is.
In the technical solutions provided by the embodiments of the present invention, in fig. 4 to 6, the layout distance between the first-stage parallel branch and the last-stage parallel branch is controlled, so that the coupling capacitance C1 between the first-stage parallel branch and the last-stage parallel branch is controlled to be smaller than a preset capacitance value, and further, the coupling effect between the first-stage parallel branch and the last-stage parallel branch can be reduced. When the nth parallel branch is not limited to the first-stage parallel branch, the nth + i parallel branch is not limited to the last-stage parallel branch, the value of n includes an integer greater than or equal to 1, and the value of i includes an integer greater than or equal to 1, the coupling capacitance between the nth parallel branch and the nth + i parallel branch can be made smaller than a preset capacitance value by controlling the layout distance between the nth parallel branch and the nth + i parallel branch, and the coupling effect between the nth parallel branch and the nth + i parallel branch is reduced.
Specifically, referring to fig. 7, the impedance of the parallel branch of the bulk acoustic wave filter is at a minimum at a frequency fa, and almost all of the signal is shorted to ground, so that a third transmission zero a1 appears at the frequency fa. When the frequency of the bulk acoustic wave filter is fb, the impedance of the series branch is very high, the series branch is equivalent to open circuit, and a fourth transmission zero B1 appears.
The first stage parallel branch and the last stage parallel branch are described as an example. Referring to fig. 8, a dotted line is a transmission response curve of the bulk acoustic wave filter in the prior art, in which the coupling capacitance C0 between the first-stage parallel branch formed by the parallel resonance unit sh1 and the last-stage parallel branch formed by the parallel resonance unit sh3 is too large to be larger than a preset capacitance value. The solid line is a transmission response curve of the bulk acoustic wave filter shown in fig. 4 to 6 according to the embodiment of the present invention. Taking fig. 4 as an example, the coupling capacitance C1 of the parallel resonant unit sh1 of the first-stage parallel branch and the parallel resonant unit sh3 of the last-stage parallel branch is smaller than a preset capacitance value. As is apparent from fig. 8, in the bulk acoustic wave filter shown in the embodiment of the present invention, when the frequency is fa, the coupling capacitance C1 between the first-stage parallel branch formed by the parallel resonant unit sh1 and the last-stage parallel branch formed by the parallel resonant unit sh3 is smaller than the preset capacitance value and smaller than the preset capacitance value, and the sinking degree of the third transmission zero point a1 is greatly deepened. The method is popularized to the situation that when the nth parallel branch is not limited to the first-stage parallel branch, the nth + i parallel branch is not limited to the last-stage parallel branch, the value of n comprises an integer larger than or equal to 1, and the value of i comprises an integer larger than or equal to 1, by controlling the layout distance between the nth parallel branch and the nth + i parallel branch, the coupling capacitance between the nth parallel branch and the nth + i parallel branch can be smaller than a preset capacitance value, the bulk acoustic wave resonance filter formed by the multiple series branches and the parallel branches greatly deepens the sinking degree of the third transmission zero point A1 when the frequency is fa.
According to the technical scheme provided by the embodiment of the invention, the layout distance between the nth parallel branch and the n + i th parallel branch is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, the coupling effect between the parallel branches is reduced, the sinking degree of the third transmission zero A1 is greatly deepened when the frequency of the bulk acoustic wave filter is fa, the problem of transmission zero degradation of the bulk acoustic wave filter is further solved, and the out-of-band rejection performance is enhanced.
Fig. 9 is a schematic flow chart of another layout method of a bulk acoustic wave filter according to an embodiment of the present invention. Optionally, on the basis of the foregoing technical solution, referring to fig. 9, the step 110 of controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
Specifically, referring to fig. 4 to 6, the coupling capacitance C1 of the parallel resonance unit of the first-stage parallel branch and the parallel resonance unit of the last-stage parallel branch is smaller than a preset capacitance value, which reduces the coupling effect between the parallel resonance unit of the first-stage parallel branch and the parallel resonance unit of the last-stage parallel branch. Referring to fig. 7 and 8, according to the above technical solution, when the frequency of the bulk acoustic wave filter is fa, the depression degree of the third transmission zero a1 is greatly deepened, so that the problem of transmission zero degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced.
Optionally, on the basis of the foregoing technical solution, referring to fig. 9, the step 110 of controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
And/or step 1103, controlling a layout distance between the final-stage parallel branch and any one of the intermediate parallel branches, so that a coupling capacitance between an nth parallel branch and an n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is any one of the intermediate parallel branches, and the n + i th parallel branch is the final-stage parallel branch.
It should be noted that, in the bulk acoustic wave filter, the larger the number of the series resonant units and the intermediate parallel branches included in the series branches is, the less the bulk acoustic wave filter is prone to the problem of transmission zero degradation, and the better the out-of-band rejection performance is. Specifically, referring to fig. 4-6, the connection point of the middle parallel branch and the series branch is a middle connection point P3. Fig. 4 and 5 show only 1 intermediate parallel branch and 1 intermediate connection point P3 as an example. Fig. 6 shows an exemplary embodiment with 2 intermediate parallel branches and 2 intermediate connection points P3.
Based on the above technical solutions, taking fig. 6 as an example for explanation, in the technical solution of the embodiment of the present invention, it can be ensured that the coupling capacitance of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of the last-stage parallel branch, the coupling capacitance of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of any one of the last-stage parallel branch and the intermediate parallel branch, and the coupling capacitance of the parallel resonance unit sh2 and the parallel resonance unit sh3 of any one of the intermediate parallel branch are smaller than a preset capacitance value, so that the coupling effect between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of the last-stage parallel branch, and the coupling effect between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of the last-stage parallel branch and the parallel resonance unit sh2 and the parallel resonance unit sh3 of any one of the intermediate parallel branch are reduced. The method is popularized to the point that when the nth parallel branch is not limited to the first-stage parallel branch, the n + i parallel branch is not limited to the last-stage parallel branch, the value of n comprises an integer which is more than or equal to 1, and the value of i comprises an integer which is more than or equal to 1, the layout distance between the first-stage parallel branch and any one of the middle parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than a preset capacitance value, and/or the layout distance between the last-stage parallel branch and any one of the middle parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than the preset capacitance value, the sinking degree of the third transmission zero A1 of the bulk acoustic wave filter at the frequency fa is further deepened, and the problem of transmission zero degradation of the bulk acoustic wave filter is solved, the out-of-band rejection performance is enhanced.
Optionally, on the basis of the foregoing technical solution, referring to fig. 9, the step 110 of controlling a layout distance between the nth parallel branch and the n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value includes:
and 1104, the number of the parallel branches is greater than or equal to 4, the parallel branches further comprise at least two intermediate parallel branches, and the layout distance between the at least two intermediate parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch and the n + i th parallel branch are any two of the intermediate parallel branches.
Specifically, fig. 6 exemplarily shows only the technical solutions of 2 intermediate parallel branches and 2 intermediate connection points P3. When the bulk acoustic wave filter includes at least 2 middle parallel branches and at least 2 middle connection points P3, on the basis of the above technical scheme, the coupling capacitance of any two corresponding parallel resonance units in the middle parallel branches is smaller than a preset capacitance value, and it can be ensured that the coupling capacitance of the parallel resonance units corresponding to any two parallel branches of the bulk acoustic wave filter is smaller than the preset capacitance value, thereby reducing the coupling effect of the parallel resonance units corresponding to any two parallel branches, further deepening the sinking degree of a third transmission zero point a1 of the bulk acoustic wave filter at the frequency fa, and further solving the problem of transmission zero point degradation of the bulk acoustic wave filter, and enhancing the out-of-band rejection performance. It should be noted that the coupling capacitances of any two corresponding parallel resonant units in the middle parallel branch are not shown in the schematic topological structure.
It should be noted that, in the embodiment of the present invention, the sequence of step 1101, step 1102, step 1103, and step 1104 may not be limited.
Fig. 10 is a layout diagram of the bulk acoustic filter shown in fig. 4. Fig. 11 is a layout diagram of a bulk acoustic wave filter in the prior art. Wherein the ground terminal is denoted by reference numeral 103.
Optionally, on the basis of the foregoing technical solution, the step 110 of controlling the layout distance between the nth parallel branch and the n + i th parallel branch so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than the preset capacitance value includes:
and controlling the shortest straight-line distance between the edges of the parallel resonance units of the nth parallel branch and the (n + i) th parallel branch to be greater than or equal to a preset distance so as to enable the coupling capacitance between the nth parallel branch and the (n + i) th parallel branch to be smaller than a preset capacitance value.
Exemplarily, in fig. 10 and 11, a shortest straight-line distance between the edges of the parallel resonance unit sh1 of the first-stage parallel branch (the connection point with the series branch is the first-stage connection point P1) and the parallel resonance unit sh3 of the last-stage parallel branch (the connection point with the series branch is the last-stage connection point P2) is shown in comparison in the X direction and the Y direction, and the shortest straight-line distance between the edges of the parallel resonance units of two parallel branches having a coupling capacitance smaller than the preset capacitance value of the embodiment of the present invention is not limited to the X direction and the Y direction. The series resonance unit se4 in fig. 10 and 11 includes a first sub-resonance unit se4-1 and a second sub-resonance unit se4-2 connected in series. The parallel resonance unit sh3 includes a third sub-resonance unit sh3-1 and a fourth sub-resonance unit sh 3-2.
Illustratively, in the plane of the X direction and the Y direction, a second sub-resonance unit se4-2 of the series resonance unit se4 is spaced between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch in fig. 10. In the plane of the X direction and the Y direction, the parallel resonant cell sh1 of the first-stage parallel branch and the parallel resonant cell sh3 of the last-stage parallel branch in fig. 11 are arranged adjacently. The shortest straight-line distance L1 between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch in fig. 10 is greater than the shortest straight-line distance L0 between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch in fig. 11. In fig. 10, the shortest straight-line distance L1 between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is greater than or equal to a preset distance. In fig. 11, the shortest straight distance L0 between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is smaller than a preset distance.
Specifically, in the layout of the bulk acoustic wave filter, the shortest straight-line distance between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is greater than or equal to a preset distance, so that the coupling capacitance C1 of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is smaller than a preset capacitance value, the coupling effect between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch can be reduced, the sinking degree of the third transmission zero point a1 of the bulk acoustic wave filter is greatly deepened when the frequency is fa, the problem of transmission zero point degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced. When the nth parallel branch is not limited to the first-stage parallel branch, the n + i parallel branch is not limited to the last-stage parallel branch, the value of n includes an integer greater than or equal to 1, and the value of i includes an integer greater than or equal to 1, the shortest straight-line distance between the edges of the parallel resonance units of the nth parallel branch and the n + i parallel branch is controlled to be greater than or equal to a preset distance, so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than a preset capacitance value, the coupling effect between the nth parallel branch and the n + i parallel branch is reduced, the sinking degree of the third transmission zero point A1 of the bulk acoustic wave filter at the frequency fa is further deepened, the problem of transmission zero point degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced. It should be noted that the coupling capacitances of any two corresponding parallel resonant units in the middle parallel branch are not shown in the schematic topological structure.
The embodiment of the invention also provides a bulk acoustic wave filter. Referring to fig. 4 to 6, the bulk acoustic wave filter includes a plurality of series branches and parallel branches; the series branch includes series resonance unit of series connection, and parallel branch includes parallel resonance unit, its characterized in that includes: the nth parallel branch and the n + i th parallel branch are connected with the series branch, and the layout distance between the nth parallel branch and the n + i th parallel branch enables the coupling capacitance between the nth parallel branch and the n + i th parallel branch to be smaller than a preset capacitance value, wherein the value of n comprises an integer larger than or equal to 1, and the value of i comprises an integer larger than or equal to 1.
According to the technical scheme provided by the embodiment of the invention, the layout distance between the nth parallel branch and the n + i th parallel branch is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, the coupling effect between the parallel branches is reduced, the sinking degree of the third transmission zero A1 is greatly deepened when the frequency of the bulk acoustic wave filter is fa, the problem of transmission zero degradation of the bulk acoustic wave filter is further solved, and the out-of-band rejection performance is enhanced.
Optionally, on the basis of the above technical solution, the series branch includes series resonance units connected in series, and the parallel branch includes parallel resonance units; the nth parallel branch is a first-stage parallel branch, and the n + i parallel branches are last-stage parallel branches, wherein the connection point of the first-stage parallel branch and the serial branch is a first-stage connection point, and the connection point of the last-stage parallel branch and the serial branch is a last-stage connection point; the number of series resonant cells spaced between the first-stage connection point and the input end of the series branch is less than the number of series resonant cells spaced between the last-stage connection point and the input end of the series branch.
Specifically, referring to fig. 4 to 6, the coupling capacitance C1 of the parallel resonance unit of the first-stage parallel branch and the parallel resonance unit of the last-stage parallel branch is smaller than a preset capacitance value, which reduces the coupling effect between the parallel resonance unit of the first-stage parallel branch and the parallel resonance unit of the last-stage parallel branch. Referring to fig. 7 and 8, according to the above technical solution, when the frequency of the bulk acoustic wave filter is fa, the depression degree of the third transmission zero a1 is greatly deepened, so that the problem of transmission zero degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced.
Optionally, on the basis of the above technical scheme, the number of the parallel branches is greater than or equal to 3, and the parallel branches further include at least one middle parallel branch; the nth parallel branch is a first-stage parallel branch, and the n + i parallel branch is any one of the middle parallel branches; and/or the nth parallel branch is any one of the middle parallel branches, and the (n + i) th parallel branch is a final-stage parallel branch.
It should be noted that, in the bulk acoustic wave filter, the larger the number of the series resonant units and the intermediate parallel branches included in the series branches is, the less the bulk acoustic wave filter is prone to the problem of transmission zero degradation, and the better the out-of-band rejection performance is. Specifically, referring to fig. 4-6, the connection point of the middle parallel branch and the series branch is a middle connection point P3. Fig. 4 and 5 show only 1 intermediate parallel branch and 1 intermediate connection point P3 as an example. Fig. 6 shows an exemplary embodiment with 2 intermediate parallel branches and 2 intermediate connection points P3.
Based on the above technical solutions, taking fig. 6 as an example for explanation, in the technical solution of the embodiment of the present invention, it can be ensured that the coupling capacitance of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of the last-stage parallel branch, the coupling capacitance of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh2 of any one of the parallel resonance unit sh4 of the last-stage parallel branch and the intermediate parallel branch and the parallel resonance unit sh3 of the intermediate parallel branch are smaller than a preset capacitance value, thereby reducing the coupling effect between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of the last-stage parallel branch, and the coupling effect between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh4 of the last-stage parallel branch and the parallel resonance unit sh2 of any one of the intermediate parallel branch and the parallel resonance unit sh3, further deepening the degree of the depression of the third transmission zero point a1 of the bulk acoustic wave filter at the frequency fa, and the problem of transmission zero degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced. The method is popularized to the point that when the nth parallel branch is not limited to the first-stage parallel branch, the n + i parallel branch is not limited to the last-stage parallel branch, the value of n comprises an integer which is more than or equal to 1, and the value of i comprises an integer which is more than or equal to 1, the layout distance between the first-stage parallel branch and any one of the middle parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than a preset capacitance value, and/or the layout distance between the last-stage parallel branch and any one of the middle parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than the preset capacitance value, the sinking degree of the third transmission zero A1 of the bulk acoustic wave filter at the frequency fa is further deepened, and the problem of transmission zero degradation of the bulk acoustic wave filter is solved, the out-of-band rejection performance is enhanced. It should be noted that only the coupling capacitances C1 of the parallel resonance unit of the first-stage parallel arm and the parallel resonance unit of the last-stage parallel arm are shown in fig. 4 to 6, and the coupling capacitances of the parallel resonance unit of the first-stage parallel arm and the parallel resonance unit of any one of the parallel resonance unit of the last-stage parallel arm and the intermediate parallel arm are not shown in the topological diagram.
Optionally, on the basis of the above technical scheme, the number of the parallel branches is greater than or equal to 4, and the parallel branches further include at least two intermediate parallel branches; any two of the middle parallel branch of the nth parallel branch and the n + i parallel branch.
Specifically, fig. 6 exemplarily shows only the technical solutions of 2 intermediate parallel branches and 2 intermediate connection points P3. When the bulk acoustic wave filter includes at least 2 middle parallel branches and at least 2 middle connection points P3, on the basis of the above technical scheme, the coupling capacitance of any two corresponding parallel resonance units in the middle parallel branches is smaller than a preset capacitance value, and it can be ensured that the coupling capacitance of the parallel resonance units corresponding to any two parallel branches of the bulk acoustic wave filter is smaller than the preset capacitance value, thereby reducing the coupling effect of the parallel resonance units corresponding to any two parallel branches, further deepening the sinking degree of a third transmission zero point a1 of the bulk acoustic wave filter at the frequency fa, and further solving the problem of transmission zero point degradation of the bulk acoustic wave filter, and enhancing the out-of-band rejection performance.
Optionally, on the basis of the above technical solution, the preset capacitance value is less than or equal to 0.001 pf.
Specifically, when the preset capacitance value is greater than 0.001pf, the coupling effect of the parallel resonance unit in the parallel branch in the bulk acoustic wave filter is too large, and when the frequency is fa, the sinking degree of the transmission zero corresponding to the bulk acoustic wave filter is relatively small, so that the bulk acoustic wave filter has the problems of transmission zero degradation and poor out-of-band rejection performance. Therefore, in the embodiment of the present invention, the layout distance between the nth parallel branch and the n + i th parallel branch is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than the preset capacitance value, where the preset capacitance value is smaller than or equal to 0.001pf, which can reduce the coupling effect between the nth parallel branch and the n + i th parallel branch, so that the sinking degree of the third transmission zero point a1 is greatly deepened when the frequency of the bulk acoustic wave filter is fa, thereby solving the problem of transmission zero point degradation of the bulk acoustic wave filter, and enhancing the out-of-band rejection performance.
Optionally, on the basis of the above technical solution, a shortest straight-line distance between edges of the parallel resonance units of the nth parallel branch and the n + i th parallel branch is greater than or equal to a preset distance.
Specifically, referring to fig. 10, in the layout of the bulk acoustic wave filter, the shortest straight line distance between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is greater than or equal to the preset distance, so as to ensure that the coupling capacitance C1 of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is smaller than the preset capacitance value, which can reduce the coupling effect between the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch, so that the sinking degree of the third transmission zero point a1 of the bulk acoustic wave filter is greatly deepened when the frequency is fa, thereby solving the problem of transmission zero point degradation of the bulk acoustic wave filter and enhancing the out-of-band rejection performance. When the nth parallel branch is not limited to the first-stage parallel branch, the n + i parallel branch is not limited to the last-stage parallel branch, the value of n includes an integer greater than or equal to 1, and the value of i includes an integer greater than or equal to 1, the shortest straight-line distance between the edges of the parallel resonance units of the nth parallel branch and the n + i parallel branch is controlled to be greater than or equal to a preset distance, so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than a preset capacitance value, the coupling effect between the nth parallel branch and the n + i parallel branch is reduced, the sinking degree of the third transmission zero point A1 of the bulk acoustic wave filter at the frequency fa is further deepened, the problem of transmission zero point degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced. It should be noted that the coupling capacitances of any two corresponding parallel resonant units in the middle parallel branch are not shown in the schematic topological structure.
Optionally, on the basis of the above technical solution, the preset distance is greater than or equal to 200 micrometers.
Specifically, when the preset distance is less than 200 microns, the coupling effect of the parallel resonance units in the parallel branches in the bulk acoustic wave filter is too large, the coupling capacitance of the parallel resonance units of the two parallel branches cannot be guaranteed to be less than the preset capacitance value, and then when the frequency is fa, the sinking degree of the transmission zero point corresponding to the bulk acoustic wave filter is relatively small, so that the bulk acoustic wave filter has the problems of transmission zero point degradation and poor out-of-band rejection performance. Therefore, taking fig. 10 as an example, in the embodiment of the present invention, when the shortest straight-line distance between the edges of the parallel resonance unit sh1 of the first-stage parallel branch and the parallel resonance unit sh3 of the last-stage parallel branch is greater than or equal to 200 micrometers, the coupling effect between the corresponding parallel resonance units is small, the sinking degree of the third transmission zero point a1 of the bulk acoustic wave filter at the frequency fa is improved, and thus, the problem of transmission zero point degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced. When the nth parallel branch is not limited to the first-stage parallel branch, the (n + i) th parallel branch is not limited to the last-stage parallel branch, the value of n includes an integer greater than or equal to 1, and the value of i includes an integer greater than or equal to 1, by controlling the shortest straight-line distance between the edges of the parallel resonance units of the nth parallel branch and the (n + i) th parallel branch to be greater than or equal to a preset distance, the preset distance is greater than or equal to 200 micrometers, so that the coupling capacitance between the nth parallel branch and the (n + i) th parallel branch is smaller than the preset capacitance value, the coupling effect between the nth parallel branch and the (n + i) th parallel branch is reduced, the sinking degree of the third transmission zero A1 of the bulk acoustic wave filter at the frequency fa is further deepened, and the problem of transmission zero degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced.
Optionally, the dielectric constant of the dielectric layer between the parallel resonant units of the two parallel branches of which the coupling capacitance is smaller than the preset capacitance value can be set within the preset range, so that the coupling capacitance C1 between the parallel resonant units of different parallel branches is smaller than the preset capacitance value, the sinking degree of the third transmission zero point a1 of the bulk acoustic wave filter at the frequency fa can be deepened, the problem of transmission zero point degradation of the bulk acoustic wave filter is solved, and the out-of-band rejection performance is enhanced.
Optionally, on the basis of the above technical solutions, referring to fig. 4 and 6, the parallel branch may further include an inductor, where fig. 4 and 5 include 3 parallel branches formed by the parallel resonance unit sh1 and the inductor L1, the parallel resonance unit sh2 and the inductor L2, and the parallel resonance unit sh3 and the inductor L3. Fig. 6 includes 4 parallel branches formed by a parallel resonance unit sh1, an inductor L1, a parallel resonance unit sh2, an inductor L2, a parallel resonance unit sh3, an inductor L3, and a parallel resonance unit sh4 and an inductor L4. Specifically, the facility inductance in the parallel branch can further improve the sinking degree of the third transmission zero point a1 when the frequency of the bulk acoustic wave filter is fa, thereby further alleviating the problem of transmission zero point degradation of the bulk acoustic wave filter and enhancing the out-of-band rejection performance.
The embodiment of the invention also provides a communication device. The communication device comprises the bulk acoustic wave filter according to any of the above technical solutions; the communication device includes a duplexer or a multiplexer.
Specifically, a duplexer can be simply understood as the operation of two bulk acoustic wave filters, one receiving bulk acoustic wave filter to receive signals and one emitting bulk acoustic wave filter to transmit signals. A multiplexer can be simply understood as a communication device formed by at least two duplexers.
The communication device provided by the embodiment of the present invention includes the bulk acoustic wave filter according to any of the above technical solutions, and therefore, the communication device has the beneficial effects of the bulk acoustic wave filter, which are not described herein again.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (13)
1. A layout method of a bulk acoustic wave filter, the bulk acoustic wave filter including a plurality of series branches and parallel branches, the series branches including series resonance units connected in series, the parallel branches including parallel resonance units, the layout method comprising:
controlling a layout distance between an nth parallel branch and an n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch and the n + i th parallel branch are connected with the series branch, a value of n comprises an integer greater than or equal to 1, and a value of i comprises an integer greater than or equal to 1.
2. The layout method of a bulk acoustic wave filter according to claim 1, wherein controlling a layout distance between an nth parallel branch and an n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value comprises:
controlling the layout distance between a first-stage parallel branch and a last-stage parallel branch so that the coupling capacitance between an nth parallel branch and an n + i parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is a first-stage parallel branch, the n + i parallel branch is a last-stage parallel branch, the connection point of the first-stage parallel branch and the series branch is a first-stage connection point, and the connection point of the last-stage parallel branch and the series branch is a last-stage connection point; the number of series resonant cells spaced between the first connection point and the input of the series branch is less than the number of series resonant cells spaced between the last connection point and the input of the series branch.
3. The layout method of a bulk acoustic wave filter according to claim 2, wherein controlling a layout distance between an nth parallel branch and an n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value comprises:
the number of the parallel branches is greater than or equal to 3, the parallel branches further comprise at least one middle parallel branch, and the layout distance between the primary parallel branch and any one of the middle parallel branches is controlled so that the coupling capacitance between the nth parallel branch and the n + i parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is the primary parallel branch, and the n + i parallel branch is any one of the middle parallel branches;
and/or controlling a layout distance between the final-stage parallel branch and any one of the intermediate parallel branches so that a coupling capacitance between an nth parallel branch and an n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch is any one of the intermediate parallel branches, and the n + i th parallel branch is the final-stage parallel branch.
4. The layout method of a bulk acoustic wave filter according to claim 2, wherein controlling a layout distance between an nth parallel branch and an n + i th parallel branch so that a coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value comprises:
the number of the parallel branches is greater than or equal to 4, the parallel branches further comprise at least two middle parallel branches, and the layout distance between the at least two middle parallel branches is controlled, so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value, wherein the nth parallel branch and the n + i th parallel branch are any two of the middle parallel branches.
5. The layout method of a bulk acoustic wave filter according to any one of claims 1 to 4, wherein controlling the layout distance between the nth parallel branch and the n + i th parallel branch so that the coupling capacitance between the nth parallel branch and the n + i th parallel branch is smaller than a preset capacitance value comprises:
and controlling the shortest straight-line distance between the edges of the parallel resonance units of the nth parallel branch and the (n + i) th parallel branch to be greater than or equal to a preset distance so as to enable the coupling capacitance between the nth parallel branch and the (n + i) th parallel branch to be smaller than a preset capacitance value.
6. A bulk acoustic wave filter comprises a plurality of series branches and parallel branches; the series branch includes series connection's series resonance unit, parallel branch includes parallel resonance unit, its characterized in that includes:
the nth parallel branch and the n + i th parallel branch are connected with the series branch, and the layout distance between the nth parallel branch and the n + i th parallel branch enables the coupling capacitance between the nth parallel branch and the n + i th parallel branch to be smaller than a preset capacitance value, wherein the value of n comprises an integer larger than or equal to 1, and the value of i comprises an integer larger than or equal to 1.
7. The bulk acoustic wave filter according to claim 6, wherein the series branch includes series resonant cells connected in series, and the parallel branch includes parallel resonant cells;
the nth parallel branch is a first-stage parallel branch, and the n + i th parallel branch is a last-stage parallel branch, wherein the connection point of the first-stage parallel branch and the serial branch is a first-stage connection point, and the connection point of the last-stage parallel branch and the serial branch is a last-stage connection point; the number of series resonant cells spaced between the first connection point and the input of the series branch is less than the number of series resonant cells spaced between the last connection point and the input of the series branch.
8. The bulk acoustic wave filter according to claim 7, wherein the number of parallel branches is greater than or equal to 3, the parallel branches further comprising at least one intermediate parallel branch;
the nth parallel branch is the primary parallel branch, and the n + i parallel branch is any one of the intermediate parallel branches;
and/or the nth parallel branch is any one of the intermediate parallel branches, and the n + i th parallel branch is the final-stage parallel branch.
9. The bulk acoustic wave filter according to claim 7, wherein the number of parallel branches is greater than or equal to 4, the parallel branches further comprising at least two intermediate parallel branches; any two of the nth parallel branch and the n + i th parallel branch are the intermediate parallel branches.
10. The bulk acoustic wave filter according to any one of claims 6 to 9, wherein the predetermined capacitance value is less than or equal to 0.001 pf.
11. The bulk acoustic wave filter according to any one of claims 6 to 9, wherein a shortest straight-line distance between edges of the parallel resonant cells of the nth parallel branch and the (n + i) th parallel branch is greater than or equal to a preset distance.
12. The bulk acoustic wave filter according to claim 11, wherein the predetermined distance is greater than or equal to 200 micrometers.
13. A communication device comprising the bulk acoustic wave filter according to any one of claims 6 to 12;
the communication device includes a duplexer or a multiplexer.
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