CN113483708B - Position measurement system and calibration method based on planar polar coordinate system - Google Patents
Position measurement system and calibration method based on planar polar coordinate system Download PDFInfo
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- CN113483708B CN113483708B CN202110828351.1A CN202110828351A CN113483708B CN 113483708 B CN113483708 B CN 113483708B CN 202110828351 A CN202110828351 A CN 202110828351A CN 113483708 B CN113483708 B CN 113483708B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention provides a position measurement system and a calibration method based on a plane polar coordinate system, which comprises the following steps: the device comprises a position measuring device, a calibration device, a data acquisition board and a computer; the position measuring device is provided with a grating micrometer sensor and a rotary encoder; the tail end executing part of the position measuring device is connected with the calibration device; the grating micrometer sensor is used for sensing moving distance data; the rotary encoder is used for sensing rotation angle data; the computer is in communication connection with the position measuring device through the data acquisition board; the calibration device is provided with a straight grating ruler; the straight grating ruler is used for sensing moving distance data; the computer is in communication connection with the calibration device through the data acquisition board. Therefore, the measured device can adjust the self pose according to the requirement of the measurement data of the position measurement system, and the influence on the subsequent use of the machining equipment is avoided.
Description
Technical Field
The invention relates to the technical field of position measurement of machining equipment, in particular to a position measurement system and a calibration method based on a planar polar coordinate system.
Background
Machining refers to a process of changing the physical dimensions or properties of a workpiece by a mechanical device. The difference in the machining manner can be divided into cutting machining and pressing machining.
In the machining process, the precision of machining equipment is an important parameter and an important factor for ensuring the machining quality. In order to be able to determine the position of the end point of the machining equipment to achieve closed-loop feedback and improve absolute accuracy, a measuring device is usually used to detect the position of the end point of the machining equipment, ensuring the accuracy of the machining equipment. Generally speaking, the measuring device is a ball bar, an automatic theodolite, a coordinate measuring machine, or the like. The measuring instruments cannot meet the testing requirements in the aspects of cost, testing adaptability and the like, the deviation of testing precision is large, testing personnel need to be trained in advance for the ball rod instrument, the automatic theodolite, the coordinate measuring machine and the like, the use cost is further increased, complicated parameters need to be set before measurement, test data cannot be adjusted according to the requirements of the testing process, the test data are not accurate, and the subsequent use of machining equipment is influenced.
Disclosure of Invention
The invention provides a position measurement system based on a plane polar coordinate system, which can adjust test data according to the requirement of a test process, so that the test data is accurate, and the influence on the subsequent use of machining equipment is avoided.
The method specifically comprises the following steps: the device comprises a position measuring device, a calibration device, a data acquisition board and a computer;
the position measuring device is provided with a grating micrometer sensor and a rotary encoder;
the tail end executing part of the position measuring device is connected with the calibration device;
the grating micrometer sensor is used for sensing moving distance data; the rotary encoder is used for sensing rotation angle data;
the computer is in communication connection with the position measuring device through the data acquisition board;
the calibration device is provided with a straight grating ruler;
the straight grating ruler is used for sensing moving distance data;
the computer is in communication connection with the calibration device through the data acquisition board.
The invention also provides a calibration method, which comprises the following steps:
the computer is connected with the position measuring device through the data acquisition board in a wired or wireless communication mode;
the computer is in communication connection with the calibration device through the data acquisition board, the calibration device is manually controlled to operate, and the data acquisition board is used for acquiring the moving distance data sensed by the grating micrometer sensor, the rotating angle data sensed by the rotary encoder and the moving distance data sensed by the straight grating ruler.
And the computer displays the sensed data information.
The method further comprises the following steps: the computer is connected with the position measuring device and the calibration device in a wired or wireless communication mode through the data acquisition board;
manually controlling the calibration device to operate so that the linear guide rail sliding table slowly slides on the linear guide rail at a certain speed;
the computer acquires moving distance data of the straight grating ruler, moving distance data sensed by the grating micrometer sensor and rotating angle data sensed by the rotary encoder through the data acquisition board;
and the computer displays the sensed data information by using the pole, the pole diameter and the pole angle of the calibrated position measuring device.
The calibration calculation process of the calibration device to the position measuring device comprises the following steps:
defining x as a circle center deviation radius value, k1 and k2 as final calibrated polar diameter values, r1, r2 and r3 as polar coordinate system deviation polar diameter values, L1 and L2 as data difference values between two adjacent times of a grating ruler reading head 1.4, and angles theta 1 and theta 2 as rotation angle values between the two adjacent times;
arbitrarily taking three points in the calibration process, and solving k1, k2 and k3 through a triangle cosine theorem;
two unknowns of the two equations are obtained through the five formulas, and are solved and substituted back into the equations, so that the pole, the pole diameter and the pole angle of the calibrated position measuring device can be obtained, and the calibration of the position measuring device is completed.
According to the technical scheme, the invention has the following advantages:
in the position measuring system based on the plane polar coordinate system, a computer is connected with a position measuring device through a data acquisition board in a wired or wireless communication mode; the elements can be in communication connection according to actual needs, connection convenience is improved, and test needs are met. The calibration device is manually controlled to operate, so that the linear guide rail sliding table slowly slides on the linear guide rail at a certain speed, the computer acquires moving distance data of the linear grating ruler, moving distance data sensed by the grating micrometer sensor and rotating angle data sensed by the rotary encoder through the data acquisition board, and the computer operates a calibration program to complete calibration of the position measurement device. The computer acquires a control instruction input by a user, or the computer controls a device to be tested connected with the position measuring device to operate according to a preset test program, and acquires moving distance data of the device to be tested, which is sensed by the grating micrometer sensor, and rotation angle data of the device to be tested, which is sensed by the rotary encoder, through the data acquisition board; and the computer displays the sensed plane position data information of the measured device in the position measuring device coordinate system. Therefore, the measured device can adjust the self pose according to the requirement of the measurement data of the position measurement system, and the influence on the subsequent use of the machining equipment is avoided.
The invention can also obtain the calibrated parameter data through a specific mathematical formula, namely the pole, the pole diameter and the pole angle of the calibrated position measuring device can be obtained, the calibration of the position measuring device is completed, the position measuring precision is improved, the position measuring device is convenient to connect with the measured device, the operation is convenient, the automatic execution of a calibration program is realized, the result is automatically output, and the operation of a user is convenient.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description will be briefly introduced, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a schematic view of an embodiment of a calibrated position measurement device;
FIG. 2 is a schematic view of a calibration device;
FIG. 3 is a schematic diagram of an embodiment of a calibration method;
FIG. 4 is a schematic diagram of an embodiment of a position measurement system based on a planar polar coordinate system;
FIG. 5 is a schematic view of a position measuring device;
FIG. 6 is a schematic view of the coupling of the position measurement device to the end of a SCARA robot.
Description of the reference numerals:
in fig. 1, 1 is a position measuring device, 2 is a calibration device, 3 is a data acquisition board, and 4 is a computer.
In fig. 4, 1-position measurement device, 2-data acquisition board, 3-computer, 4-SCARA robot.
5-calibration device, 11-grating micrometer sensor, 12-upper rotary table, 13-bearing, 14-bearing table, 15-coupler, 16-rotary encoder, 1.1-radial Kong Zhuaizhou, 1.2-mini bearing, 1.3-bearing seat, 1.4-grating ruler reading head, 1.5-connecting flange, 1.6-linear guide rail sliding table, 1.7-linear guide rail, 1.8-grating ruler body, 1.9-bearing table, 2.1-end of SCARA mechanical arm, 2.2-strong magnetic suction sleeve, 2.3-bearing, 2.4-rotary table, 2.5-nut and 2.6-telescopic rod of grating micrometer sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The present invention provides a position measurement system based on a planar polar coordinate system, as shown in fig. 1, including:
the device comprises a position measuring device 1, a calibration device 2, a data acquisition board 3 and a computer 4.
The position measuring device 1 is provided with a grating micrometer sensor and a rotary encoder; the tail end executing part of the position measuring device 1 is connected with the calibration device 2; the grating micrometer sensor is used for sensing moving distance data; the rotary encoder is used for sensing rotation angle data; the straight grating ruler is used for sensing movement distance data; the computer 4 is in communication connection with the position measuring device 1 through the data acquisition board 3; the computer 4 is in communication connection with the calibration device 2, a user manually controls the calibration device 2 to operate, and the computer 4 acquires moving distance data sensed by the grating micrometer sensor, rotating angle data sensed by the rotary encoder and moving distance data sensed by the straight grating ruler through the data acquisition board 3.
The computer 3 may be implemented in various forms. For example, the computer 3 described in the embodiment of the present invention may include a mobile terminal such as a smart phone, a notebook computer, a Personal Digital Assistant (PDA), a tablet computer (PAD), and the like, and a fixed terminal such as a Digital TV, a desktop computer, and the like. However, it will be understood by those skilled in the art that the configuration according to the embodiment of the present invention can be applied to a stationary type computer, in addition to elements particularly used for moving purposes.
The computer 3 may include a wireless communication unit, an audio/video (a/V) input unit, a user input unit, a sensing unit, an output unit, a memory, an interface unit, a controller, and a power supply unit, and the like. It is to be understood that not all illustrated components are required to be implemented. More or fewer components may alternatively be implemented. Elements of the mobile terminal will be described in detail below. The user input unit of the computer 3 can acquire the control instruction and the control parameter input by the user. The computer 3 can display the system running state and the calibration data through a display screen.
The calibration device 2, the position measuring device 1, the data acquisition board 3 and the computer 4 can be in communication connection in a wired or wireless communication mode.
The Wireless communication mode may be a Wireless Local Area network (Wi-Fi, WLAN), a Wireless broadband (Wibro), a worldwide interoperability for microwave Access (Wimax), a High Speed Downlink Packet Access (HSDPA), or the like.
When the measuring method is implemented, the specific structure is built:
as shown in fig. 2, the calibration device 5 is provided with a bearing platform 1.9; two stages of steps with different heights are arranged at the top of the bearing platform 1.9; a grating ruler body 1.8 is arranged on the first-level step; the grating ruler body 1.8 is connected with the top of the bearing table 1.9 through a bolt; a linear guide rail 1.7 is arranged on the lower stage, and the linear guide rail 1.7 is connected with the top of the bearing table 1.9 through a bolt; a linear guide rail sliding table 1.6 is connected on the linear guide rail 1.7 in a sliding way; a connecting flange 1.5 is connected to the linear guide rail sliding table 1.6 through a bolt; a bearing seat 1.3 and a grating ruler reading head 1.4 are arranged on the connecting flange 1.5; a mini bearing 1.2 is connected on the bearing seat 1.3 in a matching way; the inner ring of the mini bearing 1.2 is connected with a radial Kong Zhuaizhou 1.1.1 in a matching mode; the radial Kong Zhuaizhou 1.1.1 is provided with a radial through hole, and the telescopic rod of the position measuring device 1 in fig. 1 penetrates through the radial through hole and is fixedly connected through a screw.
Based on the connection relation, the arrangement of each element when the position measuring device is calibrated is realized, and the real-time measurement data of a grating micrometer sensor and a rotary encoder in the position measuring device and the real-time measurement data of a straight grating ruler in the calibrating device are transmitted to a computer through a data acquisition board;
the calibration device is manually controlled to operate, so that the linear guide rail sliding table slowly slides on the linear guide rail at a certain speed, and at the moment, the grating micrometer sensor and the rotary encoder in the position measuring device 1 and the linear grating ruler in the calibration device 2 transmit real-time measurement data to a computer through a data acquisition board;
the computer can complete the calibration of the position measuring device by processing the moving distance data transmitted by the grating micrometer sensor, the rotating angle data transmitted by the rotary encoder and the moving distance data transmitted by the straight grating ruler.
As an embodiment of the present invention, as shown in fig. 3, a calibration calculation process of the calibration device on the position measurement device includes:
defining x as a circle center deviation radius value, k1 and k2 as a final calibrated polar diameter value, r1, r2 and r3 as polar coordinate system deviation polar diameter values, L1 and L2 as data difference values between two adjacent times of a grating ruler reading head 1.4, and angles theta 1 and theta 2 as rotation angle values between the two adjacent times;
randomly taking three points in the calibration process, and solving k1, k2 and k3 through a triangle cosine theorem;
two unknowns of the two equations are obtained through the five formulas, and are solved and substituted back into the equations, so that the pole, the pole diameter and the pole angle of the calibrated position measuring device 1 can be obtained, and the calibration of the position measuring device 1 is completed.
The measurement method of the position measurement system based on the planar polar coordinate system is the unit and algorithm steps of each example described in connection with the embodiments disclosed herein, and can be implemented in electronic hardware, computer software, or a combination of both. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
The present invention provides that position measurement can also be achieved, as shown in fig. 4, and in particular to a SCARA robot arm 4. When the tail end position of the SCARA mechanical arm 4 is measured, a tail end executive part of the position measuring device 1 is connected with the tail end of the SCARA mechanical arm 4; computer 3 and SCARA arm 4 communication connection, computer 3 control SCARA arm 4 operation to obtain the displacement data of grating micrometer sensor response and the rotation angle data of rotary encoder response through data acquisition board 2.
Further, as shown in fig. 5, the position measuring device 1 is provided with a coupling 15, a bearing table 14 and an upper rotating table 12; the bearing table 14 is cylindrical. The coupling 15 is disposed at a central position of the bearing table 14. The rotary encoder 16 is arranged at the bottom of the bearing platform 14; the center of the rotary encoder 16 is collinear with the center of the bearing table 14. The rotary encoder 16 is provided with a rotary shaft. The rotating shaft of the rotary encoder 16 is connected with the end shaft of the upper turntable 12 through a coupling 15; a bearing 13 is arranged on the inner side wall of the top of the bearing table 14; the bottom end of the upper rotary table 12 is connected with the bearing 13 in an interference fit manner; the grating micrometer sensor 11 is mounted on the upper rotary table 12 and fixedly connected through bolts. The flange arranged on the rotary encoder 16 is fixedly connected with the bottom of the bearing table 14 through bolts, so that the rotary encoder is convenient to disassemble and assemble.
In the invention, as shown in fig. 6, the tail end 2.1 of the SCARA mechanical arm 4 is connected with the strong magnetic attraction sleeve 2.2 in a matching way; the strong magnetic attraction sleeve 2.2 is sleeved in the bearing 2.3; the bearing 2.3 is arranged in the rotating platform 2.4; the bottom of the rotating platform 2.4 is connected with a connecting rod; the connecting rod is provided with a through hole; the grating micrometer sensor is provided with a telescopic rod 2.6 of the grating micrometer sensor, the telescopic rod 2.6 of the grating micrometer sensor penetrates through the through hole of the connecting rod, and a screw 2.5 is connected to the penetrating section.
The system realizes the setting of each element of the system based on the connection relation, and transmits the real-time measurement data of a grating micrometer sensor and a rotary encoder in the position measurement device to a computer through a data acquisition board;
the computer acquires a control instruction of a user, or the computer sends a motion instruction to the SCARA mechanical arm according to a preset control program, and at the moment, a grating micrometer sensor and a rotary encoder in the position measuring device 1 transmit real-time measurement data to the computer through a data acquisition board;
the computer can obtain the position data of the tail end of the mechanical arm in a coordinate system under the measuring device by processing the moving distance data transmitted by the grating micrometer sensor and the rotating angle data transmitted by the rotary encoder.
The system can detect the tail end position of the SCARA mechanical arm 4 and mechanical processing equipment.
It will be understood that when an element or layer is referred to as being "on" or "connected" or "coupled" to another element or layer, it can be directly on, connected or coupled to the other element or layer, or intervening elements or layers may also be present. In contrast, when an element is referred to as being "directly on," "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers present. Like numbers refer to like elements throughout. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the position measurement system based on the planar polar coordinate system provided by the invention, terms of spatial relativity, such as "below …", "below", "lower", "above", and the like, which are convenient for description, are used to describe the relationship between one element or feature and another element or feature as shown in the figure. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative terms used herein should be interpreted accordingly.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A calibration method is characterized in that the method adopts a position measurement system based on a plane polar coordinate system;
the position measurement system based on the plane polar coordinate system comprises: the device comprises a position measuring device (1), a data acquisition board (2), a calibration device (5) and a computer (3);
the position measuring device (1) is provided with a grating micrometer sensor and a rotary encoder;
the tail end executing part of the position measuring device (1) is connected with the calibration device (5);
the grating micrometer sensor is used for sensing moving distance data; the rotary encoder is used for sensing rotation angle data;
the computer (3) is in communication connection with the position measuring device (1) through the data acquisition board (2);
the calibration device (5) is provided with a straight grating ruler;
the straight grating ruler is used for sensing moving distance data;
the computer (3) is in communication connection with the calibration device through the data acquisition board;
the method comprises the following steps:
the computer is connected with the position measuring device through the data acquisition board in a wired or wireless communication mode;
the computer is in communication connection with the calibration device through the data acquisition board, the calibration device is manually controlled to operate, and the data acquisition board is used for acquiring moving distance data sensed by the grating micrometer sensor, rotating angle data sensed by the rotary encoder and moving distance data sensed by the straight grating ruler;
the computer displays the sensed data information;
the method further comprises the following steps: the computer is connected with the position measuring device and the calibration device in a wired or wireless communication mode through the data acquisition board;
manually controlling the calibration device to operate so that the linear guide rail sliding table slowly slides on the linear guide rail at a certain speed;
the computer acquires the moving distance data of the straight grating ruler, the moving distance data sensed by the grating micrometer sensor and the rotating angle data sensed by the rotary encoder through the data acquisition board;
the computer displays the sensed data information by the pole, the pole diameter and the pole angle of the calibrated position measuring device;
the calibration calculation process of the calibration device to the position measurement device comprises the following steps:
defining x as a circle center deviation radius value, k1 and k2 as a final calibrated polar diameter value, r1, r2 and r3 as polar coordinate system deviation polar diameter values, L1 and L2 as data difference values between two adjacent times of a grating ruler reading head 1.4, and angles theta 1 and theta 2 as rotation angle values between the two adjacent times;
arbitrarily taking three points in the calibration process, and solving k1, k2 and k3 through a triangle cosine theorem;
two unknowns of the two equations are obtained through the five formulas, and are solved and substituted back into the equations to obtain the pole, the pole diameter and the pole angle of the calibrated position measuring device, so that the calibration of the position measuring device is completed.
2. Calibration method according to claim 1,
the telescopic rod of the position measuring device (1) is connected with the rotating shaft of the calibration device (5);
the computer (3) is in communication connection with the calibration device (5), the computer (3) controls the calibration device (5) to operate, and the data of the moving distance of the calibration device (5) induced by the grating micrometer sensor and the data of the rotating angle of the calibration device (5) induced by the rotary encoder are acquired through the data acquisition board (2).
3. Calibration method according to claim 1 or 2,
the calibration device (5) is provided with a bearing platform (1.9);
two stages of steps with different heights are arranged at the top of the bearing platform (1.9); a grating ruler body (1.8) is arranged on the first-level step;
the grating ruler body (1.8) is connected with the top of the bearing table (1.9) through a bolt;
a linear guide rail (1.7) is arranged on the lower stage, and the linear guide rail (1.7) is connected with the top of the bearing platform (1.9) through a bolt;
the linear guide rail (1.7) is connected with a linear guide rail sliding table (1.6) in a sliding way;
a linear guide rail sliding table (1.6) is connected with a connecting flange (1.5) through a bolt;
a bearing seat (1.3) and a grating ruler reading head (1.4) are arranged on the connecting flange (1.5);
the bearing seat (1.3) is connected with a mini bearing (1.2) in a matching way;
the inner ring of the mini bearing (1.2) is connected with a radial Kong Zhuaizhou (1.1) in a matching mode;
the radial Kong Zhuaizhou (1.1) is provided with a radial through hole,
the telescopic rod of the position measuring device (1) penetrates through the radial through hole and is fixedly connected with the radial through hole through a nut.
4. Calibration method according to claim 1 or 2,
further comprising: a SCARA mechanical arm (4);
the tail end execution part of the position measuring device (1) is connected with the tail end of the SCARA mechanical arm (4);
computer (3) and SCARA arm (4) communication connection, computer (3) control SCARA arm (4) operation to obtain the displacement data of grating micrometer sensor response and the rotation angle data of rotary encoder response through data acquisition board (2).
5. The calibration method according to claim 4,
the position measuring device (1) is provided with a coupling (15), a bearing platform (14) and an upper rotary platform (12);
the rotary encoder (16) is arranged at the bottom of the bearing table (14);
a rotating shaft of the rotary encoder (16) is connected with a tail end shaft of the upper rotary table (12) through a coupling (15);
a bearing (13) is arranged on the inner side wall of the top of the bearing table (14);
the bottom end of the upper rotary table (12) is connected with the bearing (13) in an interference fit manner;
the grating micrometer sensor (11) is arranged on the upper rotary table (12) and fixedly connected with the upper rotary table through bolts.
6. The calibration method according to claim 5,
the flange arranged on the rotary encoder (16) is fixedly connected with the bottom of the bearing table (14) through bolts.
7. The calibration method according to claim 5,
the tail end (2.1) of the SCARA mechanical arm (4) is connected with the strong magnetic attraction sleeve (2.2) in a matching way;
the strong magnetic attraction sleeve (2.2) is sleeved in the bearing (2.3); the bearing (2.3) is arranged in the rotating platform (2.4);
the bottom of the rotating platform (2.4) is connected with a connecting rod; the connecting rod is provided with a through hole;
the grating micrometer sensor is provided with a telescopic rod (2.6) of the grating micrometer sensor, the telescopic rod (2.6) of the grating micrometer sensor penetrates through the through hole of the connecting rod, and a screw (2.5) is connected to the penetrating section.
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