CN113478177B

CN113478177B - Back tube preparation method, computer readable storage medium and back tube necking device

Info

Publication number: CN113478177B
Application number: CN202110742275.2A
Authority: CN
Inventors: 廖秀贤; 周志宏; 肖世洪; 雷雨; 刘芳
Original assignee: UV TECH MATERIAL Ltd
Current assignee: UV TECH MATERIAL Ltd
Priority date: 2021-06-30
Filing date: 2021-06-30
Publication date: 2022-10-04
Anticipated expiration: 2041-06-30
Also published as: CN113478177A

Abstract

The invention relates to the technical field of magnetron sputtering target preparation, in particular to a back tube preparation method, a computer readable storage medium and a back tube necking device. The back tube preparation method comprises the following steps: a plate rolling step of rolling a plate-shaped backing tube material into a cylindrical shape; welding two opposite edges of the curled plate together to form a cylindrical back pipe with a welding seam; and a necking step, namely, respectively compressing preset sections at two ends of the cylindrical back pipe inwards in a mode of being coaxial with the central shaft of the cylinder to form an annular necking section with the outer diameter smaller than that of the back pipe. The back tube preparation method is characterized in that the plate-shaped back tube material is coiled into a cylindrical shape and then welded to form the back tube, the cost is lower than that of the conventional cylindrical forming process (such as wire drawing), and the cost for preparing the back tube with the customized size can be reduced. And the necking section and the back pipe are in natural transition, so that the welding seam also forms arc deformation, and the welding seam is not easy to crack due to extrusion and warping of two plate-shaped edges.

Description

Back tube preparation method, computer readable storage medium and back tube necking device

Technical Field

The invention relates to the technical field of magnetron sputtering target preparation, in particular to a back tube preparation method, a computer readable storage medium and a back tube necking device.

Background

In recent years, thin film materials prepared by sputtering are favored by industries such as flat panel displays, electronic controllers, glass coating, optical films and the like because of their advantages such as high density and excellent adhesion. With the rapid development of the above-mentioned fields, the demand for sputtering targets has sharply increased. The targets can be generally classified into a planar target, a rotary target and a profile target according to the shape of the sputtering surface. The sputtering usage of the planar target can reach 30% -40%, the sputtering usage rate of the rotary target can reach 80%, the rotary target is in a hollow round tube shape and can rotate around a fixed magnetron sputtering device, the target surface can be uniformly etched by 360 degrees, the surface of the target is smooth due to the uniform usage, the generation of a 'nodule' phenomenon is reduced, the coating uniformity is improved, the utilization rate of the target is improved, and the coating cost is reduced, so that the rotary target is a great trend for future development.

In the preparation process of the rotary target, for ceramic targets and certain metal targets which cannot be produced by a spraying and pouring mode, a binding and adhering method (binding) is used for binding the targets to be sputtered with the back tube. At present, most of the binding methods are to sleeve an outer tube target with a larger diameter on a back tube with a relatively smaller diameter, fill a gap between the outer tube target and the back tube with a solder with good electric and thermal conductivity, such as metal indium or conductive adhesive, and weld the outer tube target and the back tube. The size of the backing tube, such as thickness and diameter, is related to the thickness of the target material, and it is costly to customize the backing tube to a specific size.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: provided is a back tube manufacturing method which can reduce the cost of manufacturing back tubes of customized sizes.

The back tube preparation method comprises the following steps:

a plate rolling step of rolling the plate-shaped back pipe material into a cylindrical shape;

welding two opposite edges of the curled plate together to form a cylindrical back pipe with a welding seam;

and a necking step, namely, respectively compressing preset sections at two ends of the cylindrical back pipe inwards in a mode of being coaxial with the central shaft of the cylinder to form an annular necking section with the outer diameter smaller than that of the back pipe.

Preferably, in the necking step, the predetermined section is a small section extending inward from the end face.

Preferably, in the necking step, the inward compression specifically includes sleeving the larger opening side of the circular truncated cone on the outer wall of the end of the back pipe, and driving the circular truncated cone to move towards the middle section of the back pipe along the central axis of the back pipe until the diameter of the circular truncated cone is smaller than the outer diameter of the back pipe to extrude the outer wall of the back pipe towards the central axis.

Preferably, the method comprises an alignment step between the welding step and the necking step, wherein a circular ring with the same outer diameter as the back tube is sleeved outside the back tube, and the circular ring and the back tube are driven to transversely move relative to each other so as to move from one end of the back tube to the other end of the back tube.

Preferably, the ring is fixed, and the back tube is close to and penetrates into the ring in such a way that the central axis is aligned with the center of the ring, thereby realizing the relative movement.

Preferably, the back tube is driven to rotate about the central axis in synchronism with the approach.

Preferably, in the welding step, the welding is realized by adopting an argon arc welding mode.

A computer-readable storage medium is also provided, which stores a computer program that, when executed by a processor, is capable of implementing the above-described back-end preparation method.

Still provide a back of body pipe throat device, the tip of draw the platform is equipped with the driving piece, the driving piece transversely stretches out the rotation piece towards draw platform middle part, the middle part of draw the platform is equipped with the mounting, the back of the body pipe is adorned on the mounting with horizontal mode, under this state, back of the body pipe pot head is at the rotation piece outer and the ring between them is coaxial, still include inside hollow loudspeaker form throat piece, establish under the state outside the back of the body pipe at the big pot head of the opening of throat piece, the throat piece can be with the mode coaxial with the back of the body pipe toward back of the body pipe middle section lateral shifting so that the inner wall of throat piece extrudees the outer wall at back of the body pipe tip inwards, still including the treater that can carry out the computer program on the readable storage medium of above-mentioned computer.

Preferably, a connecting line between the two openings of the necking piece is an arc line.

Has the beneficial effects that: the back tube manufacturing method is characterized in that a plate-shaped back tube material is coiled into a cylindrical shape and then welded to form the back tube. The plate-shaped back tube material is directly welded to form a cylinder shape, compared with the conventional cylinder-shaped forming process (such as wire drawing), the cost is lower, and the cost for preparing the back tube with the customized size can be reduced. After welding, the preset sections at two ends of the cylindrical back pipe are respectively compressed inwards in a mode of being coaxial with the central shaft of the cylinder to form annular necking sections with the outer diameter smaller than that of the back pipe, the two necking sections are in a standard circular ring shape, the necking section with the smaller outer diameter plays a role of adding an annular hoop to the back pipe, the back pipe between the two necking sections can be restrained to be in an annular shape, and therefore the back pipe is not prone to being extruded and warped by two plate-shaped edges to crack welding lines.

Drawings

Fig. 1 is a schematic view showing a stainless steel sheet according to the present invention in a curled state.

Fig. 2 is a schematic structural diagram of the back tube necking device of the present invention.

Fig. 3 is a schematic view of the structure of the constriction member of the present invention.

Fig. 4 is a schematic view of the mounting structure of the spinning device and the back pipe.

Detailed Description

The invention is described in further detail below with reference to specific embodiments.

In this embodiment, a back tube of a rotary target is prepared by using a 304 stainless steel plate with a thickness of 4mm and a width of 392.5mm, and the preparation method specifically includes the following steps.

1. Plate rolling: rolling a plate-shaped back tube material into a cylindrical shape (see fig. 1);

2. a welding step: the two opposite edges of the coiled sheet are welded together to form a cylindrical back tube with a weld (see fig. 2).

As shown in fig. 1 and 2, a type 304 stainless steel plate is rolled by a rolling process (the rolling process of the stainless steel plate is conventional and not described here), so as to form a cylinder, and then two opposite edges of the rolled plate are rolled: the first edge 11 and the second edge 12 are welded together to form the back tube 1. The welding comprises the following steps: first, for two opposite edges of the rolled sheet: the first edge 11 and the second edge 12 are chemically cleaned; fixing the curled cylinder on a jig, and butting two opposite edges of the plate; then argon arc welding is carried out at the butt joint. The method adopts the ER316L welding wire, has the components close to those of the stainless steel plate material, can effectively improve the connection stability of the welding line, and prevents the welding line from cracking.

3. And (5) straightening. The inner diameter of the ring is consistent with the outer diameter of the back tube 1, the ring (not shown in the figure) is sleeved outside the back tube 1, and the ring and the back tube 1 are driven to move transversely relative to each other, so that the ring moves from one end of the back tube 1 to the other end of the back tube 1 in a mode of sleeving the outer wall of the back tube 1. Specifically, the circular ring is fixed, the back tube 1 is close to and penetrates into the circular ring in a mode that the central shaft is aligned with the center of the circular ring, and then the back tube continues to move forwards along the central shaft, so that the back tube and the circular ring move relatively, the back tube 1 is synchronously driven to rotate around the central shaft of the back tube, and the back tube and the circular ring conveniently move relatively along the axial direction.

4. And (5) necking. The preset sections (the small sections extending inwards from the end faces) at the two ends of the cylindrical back pipe 1 are respectively compressed inwards in a mode of being coaxial with the central axis of the cylinder to form an annular necking section with the outer diameter smaller than that of the back pipe, specifically, the diameter of the back pipe 1 is 125-133 mm, and the diameter after necking is 124.6-132.6 mm. The necking step is specifically realized by the necking piece 6 shown in fig. 3, the necking piece 6 is a horn-shaped circular truncated cone 61 with a large opening 62 at one end and a small opening 63 at the other end, the interior of the necking piece 6 is hollow, and a connecting line between the two openings of the necking piece 6 is a straight line (can be changed into an arc line so as to enable the contact between the inner surface of the necking piece and the end part of the back tube 1 to be smoother). And (2) sleeving the larger side of the opening of the circular truncated cone on the outer wall of the end part of the back pipe, and driving the circular truncated cone to move towards the middle section of the back pipe along the central shaft of the back pipe until the diameter of the circular truncated cone is smaller than the outer diameter of the back pipe to extrude the outer wall of the back pipe towards the central shaft. Specifically, the necking piece 6 is sleeved on the end part of the back tube 1 in a mode that the opening of the necking piece 6 is large 62 at the side close to the back tube 1 and the opening of the necking piece 6 is small 63 at the side far from the back tube 1, at the moment, the back tube 1 and the necking piece 6 are coaxially arranged by taking the central shaft of the back tube 1 as an axis, the necking piece 6 is installed on a coaxial rotating piece 5, the rotating piece 5 is driven by a driving piece 4 to extend outwards so as to push the necking piece 6 to move transversely towards the back tube 1, the circumferential diameter of the inner wall of the necking piece 6 is smaller as the necking piece 6 moves, and the necking piece 6 uniformly presses the end part of the back tube 1 extending into the inner wall of the necking piece 6 so as to deform the inner wall of the necking piece. The necking step is synchronously performed on the two ends of the back tube 1, so that the two ends of the back tube 1 are stressed evenly, and the back tube 1 is prevented from being bent.

After welding, the preset sections at two ends of the cylindrical back tube 1 are respectively compressed inwards in a mode coaxial with the central shaft of the cylinder to form circular-ring-shaped reducing sections with outer diameters smaller than that of the back tube, the two reducing sections are in a standard circular ring shape, the reducing sections with the smaller outer diameters play a role of adding a circular-ring-shaped hoop to the back tube, the back tube between the two reducing sections can be restrained to be in a circular ring shape, and therefore the welding line is not prone to crack due to the fact that the back tube is squeezed and warped by the two plate-shaped edges. The preparation method of the back tube is realized as follows. After the welding is accomplished, place welded cylindric back of the body pipe 1 on draw the pipe platform 1, the tip of draw the pipe platform 1 is equipped with driving piece 4, and driving piece 4 transversely stretches out towards draw the middle part of pipe platform 1 and rotates piece 5, and the middle part of draw the pipe platform 1 is equipped with mounting 3, and back of the body pipe 1 is adorned on mounting 3 with horizontal mode, and under this state, 1 pot head of back of the body pipe is outside rotating piece 5 and rings between them are coaxial. The back pipe necking device further comprises a necking piece 6 used for sleeving the end part of the back pipe 1, and through the back pipe preparation method, the two ends of the back pipe 1 are molded into an inward-shrinking circular ring shape, so that the middle part of the back pipe 1 is also constrained into the circular ring shape, and the problem that the circumferential circular ring of the back pipe is not circular enough (namely, eccentric) due to the fact that the first edge 11 and the second edge 12 are not flat during welding can be solved.

In the embodiment, the tungsten electrode adopted by argon arc welding is WC20 phi 3.2mm, the current polarity of the welding adopts direct current reverse connection, and the current intensity is greater than or equal to 250A.

Wherein the necking step can also be performed by a spinning device as shown in fig. 4. The left and right groups of centrosymmetric clamping rollers 7 clamp the back tube 1 together in the radial direction, the back tube 1 rotates around the central axis of the back tube 1 under the driving of a driving piece (not shown in the figure) of the spinning device, and the two groups of clamping rollers 7 clamp the back tube 1 together and move towards the direction of the central axis of the back tube, so that the back tube 1 is pressed to enable the circle clamped by the rollers 7 to shrink inwards to form a necking.

The above embodiments are only embodiments of the present invention, and the scope of protection is not limited thereto. The insubstantial changes or substitutions will now be made by those skilled in the art based on the teachings of the present invention, which fall within the scope of the claims.

Claims

1. The back tube preparation method is characterized by comprising the following steps:

a plate rolling step of rolling the plate-shaped back pipe material into a cylinder shape;

sleeving a circular ring with the same outer diameter as the back tube outside the back tube, and driving the circular ring and the back tube to transversely move relative to each other so as to move from one end of the back tube to the other end of the back tube;

respectively compressing a preset section at two ends of the cylindrical back pipe inwards in a mode of being coaxial with the central shaft of the cylinder to form an annular necking section with the outer diameter smaller than that of the back pipe; the necking step is performed synchronously for both ends of the back tube.

2. The method of claim 1, wherein in the necking step, the predetermined section is a small section extending inward from the end face.

3. The back tube manufacturing method of claim 2, wherein in the necking step, the inward compression means is to fit the larger opening side of the circular truncated cone on the outer wall of the end of the back tube, and to drive the circular truncated cone to move along the central axis of the back tube toward the middle section of the back tube until the diameter of the circular truncated cone is smaller than the outer diameter of the back tube, so as to press the outer wall of the back tube toward the central axis.

4. The method of claim 1, further comprising a straightening step between the welding step and the necking step, wherein a ring having an outer diameter corresponding to the outer diameter of the backing tube is fitted around the backing tube, and the ring and the backing tube are driven to move laterally relative to each other to move from one end of the backing tube to the other end of the backing tube.

5. A method of manufacturing a back tube according to claim 4, wherein in the aligning step the loop is fixed and the back tube is moved relative to the loop by approaching and penetrating the loop with the central axis aligned with the center of the loop.

6. A method of manufacturing a back tube according to claim 5, wherein the back tube is driven to rotate about the central axis in synchronism with the approaching.

7. The method for manufacturing the back tube according to claim 1, wherein in the welding step, the welding is realized by adopting an argon arc welding mode.

8. Computer-readable storage medium, in which a computer program is stored which, when being executed by a processor, is able to carry out a method for preparing a back-pipe according to any one of claims 1 to 7.

9. A back tube necking device is characterized in that a driving piece is arranged at the end part of a necking platform, the driving piece transversely extends out of a rotating piece towards the middle part of the necking platform, a fixing piece is arranged at the middle part of the necking platform, a back tube is transversely arranged on the fixing piece, in the state, one end of the back tube is sleeved outside the rotating piece, the two circular rings are coaxial, the back tube necking device further comprises a horn-shaped necking piece with a hollow inner part, in the state that one end of the necking piece with a large opening is sleeved outside the back tube, the necking piece can transversely move towards the middle section of the back tube in a mode coaxial with the back tube so that the inner wall of the necking piece inwards extrudes the outer wall of the end part of the back tube, the back tube necking device further comprises a processor and the computer readable storage medium according to claim 8, and a computer program on the computer readable storage medium can be executed by the processor.

10. The device of claim 9 wherein the line between the two openings of said constriction member is an arc.