CN113471132A

CN113471132A - Substrate lifting drive unit, and manufacturing device and method of display device provided with same

Info

Publication number: CN113471132A
Application number: CN202010987404.XA
Authority: CN
Inventors: 申完镐; 洪根永; 元正万; 刘相勉
Original assignee: Samsung Display Co Ltd
Current assignee: Samsung Display Co Ltd
Priority date: 2020-03-30
Filing date: 2020-09-18
Publication date: 2021-10-01
Also published as: KR20210122363A

Abstract

The present disclosure provides a substrate elevation driving unit, a manufacturing apparatus and a method of a display apparatus having the same, which can increase a lifetime by minimizing wear of a manufacturing apparatus and can improve manufacturing efficiency by supplying a lubricant to the manufacturing apparatus even during operation of the manufacturing apparatus, the substrate elevation driving unit including: a shaft extending in a first direction; a body sliding along the shaft; a friction reducing portion located between an outer circumferential surface of the shaft and an inner surface of the main body; and a power unit connected to the shaft and supplying power for relative movement between the shaft and the main body, the shaft including: an inflow port located at one end of the shaft; an outflow port located on an outer peripheral surface of the shaft; a first flow path formed inside the shaft and extending from the inflow port in the first direction; and a second flow path extending from the first flow path to the outflow port in a second direction intersecting the first direction, and being in fluid communication with the first flow path.

Description

Substrate lifting drive unit, and manufacturing device and method of display device provided with same

Technical Field

The present disclosure relates to a substrate lifting/lowering drive unit, a display device manufacturing apparatus including the same, and a display device manufacturing method.

Background

Electronic devices based on mobility are widely used, and as electronic devices for mobility, tablet computers are widely used recently in addition to small electronic devices such as mobile phones.

In order to support various functions, such mobile electronic devices include a display device for providing visual information such as images or movies to a user. Recently, as other components for driving the display device are miniaturized, a specific gravity of the display device in an electronic apparatus tends to be gradually increased, and a structure capable of being bent to have a predetermined angle in a flat state is also under development.

In manufacturing such a display device, a manufacturing apparatus for lifting or conveying a substrate may be used, and such a manufacturing apparatus may be disposed in a closed space such as a chamber or a narrow space. In this case, since there is a difficulty in supplying the lubricant to the manufacturing apparatus, there is a possibility that the life of the manufacturing apparatus is affected.

Disclosure of Invention

An object of one embodiment of the present disclosure is to provide a substrate elevation driving unit capable of increasing a lifetime of a manufacturing apparatus of a display device and reducing a loss (loss), a manufacturing apparatus of a display device including the same, and a manufacturing method of a display device. However, such problems are exemplary, and the scope of the present disclosure is not limited thereto.

According to an aspect of the present disclosure, there is provided a substrate lift driving unit including: a shaft extending in a first direction; a body sliding along the shaft; a friction reducing portion located between an outer circumferential surface of the shaft and an inner surface of the main body; and a power unit connected to the shaft and supplying power for relative movement between the shaft and the main body, the shaft including: an inflow port located at one end of the shaft; an outflow port located on an outer peripheral surface of the shaft; a first flow path formed inside the shaft and extending from the inflow port in the first direction; and a second flow path extending from the first flow path to the outflow port in a second direction intersecting the first direction, and being in fluid communication with the first flow path.

According to the present embodiment, it may be that the shaft includes a groove portion formed on the outer peripheral surface, the friction reducing portion includes balls that are in rolling friction with the groove portion, and the outflow port is located on the groove portion.

According to this embodiment, the groove portions may extend in the first direction and be arranged on the outer peripheral surface of the shaft so as to be spaced apart from each other.

According to this embodiment, the groove portions may be disposed at equal intervals on the outer peripheral surface of the shaft.

According to this embodiment, when the main body is disposed at a position distant from the inflow port of the shaft, the outflow port may be disposed in a region occupied by the friction reducing portion on the shaft.

According to this embodiment, the substrate elevation driving unit may further include: and a lubrication supply unit that supplies lubricant to the first flow path through the inflow port.

According to the present embodiment, it may be that the lubrication supply portion includes: a supply tube having flexibility; and a joint portion that hermetically connects the supply pipe and the first flow path.

According to another aspect of the present disclosure, there is provided a manufacturing apparatus of a display device, including: a table having a through hole and on which a substrate is placed; a substrate lifting unit which has a lift pin inserted through the through hole and lifts the substrate; and a substrate lifting drive unit connected to the substrate lifting unit, the substrate lifting drive unit including: a shaft extending in a first direction; a body sliding along the shaft; a friction reducing portion located between an outer circumferential surface of the shaft and an inner surface of the main body; and a power part connected with the shaft and providing power for relative movement of the shaft and the body, the shaft including: an inflow port located at one end of the shaft; an outflow port located on an outer peripheral surface of the shaft; a first flow path formed inside the shaft and extending from the inflow port in the first direction; and a second flow path extending from the first flow path to the outflow port in a second direction intersecting the first direction, and being in fluid communication with the first flow path.

According to this embodiment, the substrate elevation driving unit may further include: and a cover part which is positioned between the substrate lifting part and the main body to cover the shaft and extends and contracts along with the relative movement of the shaft and the main body.

According to another aspect of the present disclosure, there is provided a method of manufacturing a display device, including: a step of placing the substrate on the height adjusting section; a step of lowering the height adjusting part and placing the substrate on a table; a step of lifting the height adjusting part to separate the substrate from the worktable; a step of carrying out the substrate; and a step of supplying lubricant to the height adjusting portion, the height adjusting portion including: a shaft extending in a lifting direction of the substrate and including a groove portion on an outer surface; and a main body sliding along the shaft and including balls rolling-rubbing with the groove portion, the supplying of the lubricant supplying the lubricant to the groove portion on the outer surface through a flow path formed inside the shaft.

According to the present embodiment, it may be that the flow path includes: a first sub-channel extending in a lifting direction of the substrate; and a second sub-channel extending from the first channel to the groove portion along a lateral direction intersecting the ascending and descending direction.

According to the present embodiment, the step of supplying the lubricant may directly supply the lubricant to the friction surface of the groove portion that is rolling-rubbed by the balls.

According to the present embodiment, it may be that the step of supplying the lubricant supplies the lubricant in descending or ascending of the height adjusting portion.

According to the present embodiment, it may be that the step of supplying the lubricant automatically supplies a certain amount of the lubricant at certain time intervals.

Other aspects, features, and advantages than those described above will be apparent from the following detailed description, claims, and drawings, used to practice the disclosure.

Such general and specific aspects may be implemented using a system, method, computer program, or some combination of systems, methods, and computer programs.

(effects of disclosure)

According to the embodiment of the present disclosure configured as described above, it is possible to realize the substrate elevation driving unit, the manufacturing apparatus of the display apparatus including the same, and the manufacturing method of the display apparatus, which can minimize wear of the manufacturing apparatus to increase the lifetime, and can supply the lubricant to the manufacturing apparatus during the operation of the manufacturing apparatus to reduce the equipment loss (loss). Of course, the scope of the present disclosure is not limited to such effects.

Drawings

Fig. 1 is a side view schematically showing a manufacturing apparatus of a display device according to an embodiment of the present disclosure.

Fig. 2a and 2b are sectional views schematically showing a part of the manufacturing apparatus of the display device of fig. 1.

Fig. 3 is a perspective view schematically showing a part of a manufacturing apparatus of a display device according to an embodiment of the present disclosure.

Fig. 4 is a perspective view schematically showing a part of a manufacturing apparatus of a display device according to an embodiment of the present disclosure.

Fig. 5 is a perspective view schematically showing a part of a manufacturing apparatus of a display device according to an embodiment of the present disclosure.

Fig. 6 is a sectional view schematically showing a part of the manufacturing apparatus of the display device of fig. 5.

(description of reference numerals)

1: manufacturing device of display device

10: base plate lifting drive unit

20: substrate lifting part

21: support plate

22: jacking pin

30: working table

110: shaft

110 h: trough part

111: first flow path

112: second flow path

113: inlet port

114: outflow opening

120: main body

130: friction reducing part

140: covering part

150: power unit

160: head part

170: lubrication supply part

170T: supply pipe

170N: joint part

Detailed Description

The present disclosure is capable of various modifications and embodiments, with specific embodiments being illustrated in the accompanying drawings and described in the detailed description. The effects, features, and methods of achieving the same of the present disclosure will be apparent with reference to the embodiments to be described in detail with reference to the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed below, and may be implemented in various forms.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings, and in the description with reference to the drawings, the same or corresponding constituent elements will be given the same reference numerals, and repeated description thereof will be omitted.

In the following embodiments, the terms first, second, and the like are used for the purpose of distinguishing one constituent element from another constituent element, and are not intended to be limiting.

In the following embodiments, the singular expressions include plural expressions unless it is explicitly stated that they have different meanings in context.

In the following embodiments, the terms including or having, etc. mean the presence of the features or components described in the specification, and do not exclude the possibility of addition of one or more other features or components.

In the following embodiments, when a part referred to as a film, a region, a constituent element, or the like is on or above another part, the case where the part is directly on the other part is included, and the case where another film, a region, a constituent element, or the like is interposed therebetween is also included.

For convenience of description, the sizes of the constituent elements may be enlarged or reduced in the drawings. For example, the size and thickness of each component shown in the drawings are arbitrarily illustrated for convenience of description, and thus the present disclosure is not necessarily limited to the illustration.

While certain embodiments may be practiced differently, the particular process sequence may also be performed differently than illustrated. For example, two processes described in succession may be executed substantially concurrently, or may be executed in the reverse order to the order described.

In the present specification, "a and/or B" indicates either a, B, or both a and B. Also, "at least one of a and B" means either a, B, or both a and B.

In the following embodiments, the term "to connect films, regions, components and the like" includes the case where films, regions and components are directly connected and/or the case where films, regions and components are indirectly connected through other films, regions and components. For example, in the present specification, the terms "film, region, component, and the like are electrically connected to each other, and the term" film, region, component, and the like "are directly electrically connected to each other and/or indirectly electrically connected to each other with another film, region, component, and the like interposed therebetween.

The x-axis, y-axis and z-axis are not limited to three axes on the rectangular coordinate system, and can be interpreted to include their broad meanings. For example, the x-axis, the y-axis, and the z-axis may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.

Referring to fig. 1, a manufacturing apparatus 1 of a display device may include a chamber C, a substrate elevation driving unit 10, a substrate elevation part 20, and a table 30.

The chamber C may form a space inside, and may be formed such that a portion of the chamber C is opened. The opening of the chamber C may be selectively opened and closed by a gate valve G, for example, provided in the opening of the chamber C. The substrate P can be loaded into the chamber C through the opening of the chamber C by, for example, a robot arm or the like. The chamber C may include a through hole through which a shaft 110 of the substrate elevation driving unit 10, which will be described later, may pass.

The substrate elevation driving unit 10 may include a shaft 110, a main body 120, a friction reducing part 130, a power part 150, and a lubrication supply part 170.

The shaft 110 may extend along a first direction DR 1. The first direction DR1 may be a direction in which the substrate P ascends and descends. The length of the shaft 110 may be determined according to the height of the substrate P that is raised or lowered, and may be about 210mm, for example.

The cross-sectional shape of the shaft 110 may be a circular shape as one example, and may be modified into various shapes including a polygonal shape such as an elliptical shape and a quadrangular shape as another example. Hereinafter, for convenience of description, a case where the cross section of the shaft 110 has a circular shape will be described. The diameter of the shaft 110 may be about 20mm, and may be determined in consideration of the rigidity required of the substrate elevation driving unit 10, the position and number of the shaft 110, the size and weight of the substrate P and the substrate elevation part 20, and the like.

The body 120 may slide along the shaft 110 as a relative motion with respect to the shaft 110. The body 120 may be fixed to the floor of the chamber C, in which case it may be essential that the shaft 110 slides relative to the fixed body 120.

The friction reducing part 130 may be disposed inside the body 120. The friction reducing part 130 may be located between an outer circumferential surface of the shaft 110 and an inner surface of the body 120. The friction reducing part 130 reduces a movement resistance caused by a frictional force between the body 120 and the shaft 110, thereby enabling a relative movement therebetween to be smooth.

The power part 150 may be connected to one side of the shaft 110 to provide power for relative movement of the shaft 110 and the body 120. For example, the power unit 150 may be a pneumatic cylinder, a hydraulic cylinder, a linear motor, or the like. The power portion 150 is shown in fig. 1 as being disposed outside the chamber C, but this is exemplary and may be disposed inside the chamber C.

The lubrication supply part 170 may supply lubricant for smooth relative movement between the body 120 and the shaft 110. As an example, the lubrication supply portion 170 may be an oil pump. The lubricant may be lubricating oil or grease (grease). The lubrication supply portion 170 may be disposed outside the chamber C. Therefore, even when the space inside the chamber C is small, the lubrication supply unit 170 can be disposed outside and used, and the lubricant can be easily filled.

The substrate elevation driving unit 10 may further include a covering part 140. The cover 140 may be positioned between the body 120 and a portion of the substrate lifting unit 20 to be described later to cover the shaft 110. The cover 140 may include a material capable of being extended and contracted according to the relative movement of the shaft 110 and the body 120. For example, the covering portion 140 may be a bellows (bellows) made of metal or rubber.

The cover 140 may be hermetically connected to the body 120 at one side thereof and to the head 160 (see fig. 2a) at the other side thereof. The head 160 may be connected to one end of the shaft 110 and fixed to a portion of the substrate lift 20. Accordingly, the cover 140 can prevent the inflow of external gas, foreign substances, and the like into the chamber C through the gap between the shaft 110 and the body 120 and the adverse effect on the substrate P.

The substrate lifting/lowering drive unit 10 may be one or two or more. For example, the number of the substrate lifting/lowering driving units 10 may be 4.

The substrate lifting unit 20 may include a support plate 21 and a lift pin 22.

The substrate elevation drive unit 10 may be disposed on at least one side of the support plate 21. As an example, fig. 1 shows that the substrate lifting/lowering drive unit 10 is disposed on both sides of the support plate 21. A part of the support plate 21 may be connected to the substrate elevation driving unit 10. For this, a part of the support plate 21 may be bent to be placed on the upper side of the substrate elevation driving unit 10. This form is exemplary, and any other form may be used as long as the support plate 21 can be raised and lowered in the first direction DR1 by the board elevation drive unit 10.

The lift pins 22 may extend in a first direction DR1 and be disposed on the support plate 21. The lift pin 22 can be raised and lowered by the support plate 21. The lift pin 22 can be inserted through a through hole 30H formed in the table 30 as described later. The lift pin 22 may have one end fixed to the support plate 21 and the other end in direct contact with the substrate P on the table 30. As the support plate 21 is raised and lowered by the substrate lift drive unit 10, the lift pins 22 are also raised and lowered, and the substrate P on the table 30 can be raised and lowered by the lift pins 22 inserted through the through holes 30H of the table 30. This enables the height of the substrate P to be adjusted.

The lift pin 22 may be provided with one or more than two. For example, in the case of a flat substrate P, at least 3 lift pins 22 may be provided. For example, the support plate 21 may be provided with 16 lift pins 22. The arrangement of the lift pins 22 may be variously changed, and for example, may be arranged in a plurality of rows on a plane or in a zigzag shape. The cross-sectional shape of the lift-up pin 22 may have various shapes such as a polygon such as a circle, an ellipse, a quadrangle, and the like.

The stage 30 may be disposed on the substrate lifting unit 20. A substrate P placed into the chamber C may be placed on the stage 30. Various processes for manufacturing the display device may be performed on the substrate P mounted on the stage 30. For example, an evaporation process such as a chemical evaporation method, an electron beam evaporation method, or the like, an inkjet printing process, or the like for forming an organic layer or an inorganic layer on the substrate P may be performed. Alternatively, a UV curing process or the like of drying the coated cloth or the printed ink by irradiating ultraviolet rays may be performed.

The table 30 may have a through hole 30H. The lift-up pin 22 of the substrate lifting unit 20 can be lifted up or down through the through hole 30H. The number of the through holes 30H may be the same as the number of the lift pins 22 of the substrate lifting unit 20. The arrangement of the through holes 30H may correspond to the arrangement of the lift pins 22. The cross-sectional shape of the through-hole 30H may have various shapes such as a polygon such as a circle, an ellipse, or a quadrangle. When the through hole 30H and the lift pin 22 have a circular cross-sectional shape, the diameter of the through hole 30H may be at least larger than the diameter of the lift pin 22.

Fig. 2a and 2b are sectional views schematically showing a part of the manufacturing apparatus of the display device of fig. 1. Fig. 2a and 2b correspond to part II of fig. 1, and show a cross section of a part of the substrate elevation drive unit. Fig. 2a shows a state in which the shaft and the support plate are raised by the power unit, and fig. 2b shows a state in which they are lowered.

Referring to fig. 2a, the main body 120 of the substrate elevation driving unit 10 may be disposed on an inner surface of the chamber C. The body 120 may be fixed to the chamber C. The shaft 110 of the substrate elevation driving unit 10 may pass through a through hole formed in the chamber C. A friction reducing portion 130 may be disposed between the outer circumferential surface of the shaft 110 and the inner surface of the body 120.

The inflow port 113 may be located at one end of the shaft 110. An outflow port 114 may be disposed on the outer peripheral surface of the shaft 110. A first flow path 111 extending from the inflow port 113 in the first direction DR1 may be formed inside the shaft 110. A second flow passage 112 may be formed inside the shaft 110 to extend from the first flow passage 111 to the outlet 114 along a second direction DR2 intersecting the first direction DR 1. That is, the second flow path 112 may be branched and in fluid communication from the first flow path 111.

The length of the first flow path 111 may be 1/2 the length of the shaft 110. For example, the length of the first flow path 111 may be 105 mm. In addition, the diameter of the first channel 111 is 4mm, for example. In another aspect, the diameter of the second flow path 112 can be at least 0.5 mm.

According to an embodiment of the present disclosure, the lubricant may be injected into the inlet 113, and the injected lubricant may flow along the first and

second flow paths

111 and 112 and reach the outer circumferential surface of the shaft 110 through the outlet 114. A portion of the outer circumferential surface of the shaft 110 may include a friction surface that slides in direct contact with the friction reducing part 130. By providing the friction surface with the lubricant, the frictional resistance between the shaft 110 and the friction reducing portion 130 is reduced, so that smooth sliding can be achieved. By this, wear of the shaft 110 can be reduced and the life can be increased.

Further, since the lubricant can be supplied from the outside of the chamber C by the first flow path 111 and the second flow path 112 inside the shaft 110, the lubricant can be smoothly supplied even if the substrate elevation drive unit 10 is disposed in a narrow space inside the chamber C. Therefore, there is an advantage that the lubricant can be supplied without interrupting the operation of the manufacturing apparatus 1 for the display device or decomposing it. By this, it is possible to save maintenance time for supplying the lubricant and to extend the operation time of the manufacturing apparatus, thereby reducing equipment loss (loss) and improving manufacturing efficiency.

The other end of the shaft 110, which is located on the opposite side of the one end on which the inlet 113 is disposed, may be connected to the head 160. The head 160 may be fixed to a portion of the support plate 21.

The cover 140 may be positioned between the body 120 and the head 160 to cover the shaft 110. The cover portion 140 is capable of extending and contracting in the first direction DR 1. The shaft 110 is raised by the power unit 150 (fig. 1), and thus the covering portion 140 can be extended in the first direction DR1 as the head portion 160 and the support plate 21 are raised.

Referring to fig. 2b, the shaft 110 is lowered by the power unit 150 (fig. 1), and thus the covering portion 140 can be contracted in the first direction DR1 as the head portion 160 and the support plate 21 are lowered. In this way, the shaft 110 can be sealed from the internal space of the chamber C even while the shaft 110 is moving relative to the body 120. This can protect the substrate P in the chamber C from the external air and foreign substances that may flow along the outer peripheral surface of the shaft 110.

If the shaft 110 is fully lowered, the body 120 may be positioned furthest from the inflow port 113 of the shaft 110. In this state, the length of the first flow path 111 and the position of the second flow path 112 are determined such that the outflow port 114 is disposed in the area OA of the friction reducing part 130 on the shaft 110. In this configuration, when the shaft 110 is completely raised and the body 120 is located closest to the inlet 113, the outlet 114 may be covered with the cover 140. By this, even if the shaft 110 is located at any position, the lubricant can be always present in the chamber C, and the waste of the lubricant can be reduced and the lubricant can be effectively used.

Referring to fig. 3, the shaft 110 may include a groove portion 110h formed on an outer circumferential surface 110s thereof. The groove portions 110h may extend in the first direction and be spaced apart from each other on the outer circumferential surface 110s of the shaft 110. According to an embodiment of the present disclosure, the groove portions 110h may be disposed at equal intervals on the outer circumferential surface of the shaft 110. Fig. 3 exemplarily shows that the number of the groove portions 110h is 5, but the number is not limited thereto, and may be 4 or less or 6 or more.

As described later with reference to fig. 4, the friction reducing part 130 may include balls 133 that are in rolling friction with the groove part 110 h. It is essential that the groove portion 110h and the ball 133 contact and slide each other when the shaft 110 and the body 120 relatively move. At this time, the groove portion 110h and the balls 133 may be in rolling friction with each other. Therefore, a substantial friction surface of the shaft 110 may be disposed on the surface of the groove portion 110 h.

The outflow port 114 may be positioned on the groove portion 110 h. By this, the lubricant is directly supplied to the surface of the groove portion 110h as the frictional surface, and therefore it is possible to further improve the lubricating function and minimize the frictional resistance. By this, wear of the shaft 110 is minimized, and thus the life of the manufacturing apparatus can be extended.

The number of the outflow ports 114 may be equal to or more than the number of the groove parts 110 h. For example, at least one of the outflow ports 114 may be located in one of the grooves 110 h. The number of the second flow paths 112 is the same as the number of the outflow ports 114.

Fig. 4 is a perspective view schematically showing a part of a manufacturing apparatus of a display device according to an embodiment of the present disclosure. Fig. 4 shows a part of the shaft and the inside of the friction reducing portion.

Referring to fig. 4, the friction reducing part 130 may include an outer cylinder 131, an inner cylinder 132, balls 133, a snap ring 134, and a sealing member 135.

For example, the ball 133 may be spherical, but the present disclosure is not limited thereto. Any form may be used as long as it can be in rolling friction with the groove portion 110 h. As another example, the cylindrical shape may be used. Hereinafter, for convenience of explanation, a case where the ball 133 is spherical will be described.

The inner cylinder 132 may be disposed between the outer cylinder 131 and the shaft 110. A plurality of ball paths may be formed in the inner tube 132. The ball path constitutes a closed curve including a straight line portion extending in the first direction DR1, along which the balls 133 can roll and circulate.

The snap ring 134 can maintain the coupling of the outer and

inner cylinders

131 and 132 to fasten both of them so as not to be separated from each other.

The sealing member 135 may function to maintain airtightness so that the lubricant supplied to the outer circumferential surface 110s of the shaft 110 does not leak to the outside of the chamber C along the shaft 110.

Fig. 5 is a perspective view schematically showing a part of a manufacturing apparatus of a display device according to an embodiment of the present disclosure. Fig. 6 is a sectional view schematically showing a part of the manufacturing apparatus of the display device of fig. 5. Fig. 5 and 6 may correspond to the V portion of fig. 1.

Referring to fig. 5 and 6, one end of the shaft 110 may be connected to a portion of the power part 150. For the connection between the shaft 110 and a part of the power part 150, a flange or the like may be used. The inflow port 113 may be located at the one end portion of the shaft 110. A through hole may be formed at the portion of the power part 150.

The lubrication supply unit 170 may include a flexible supply pipe 170T and a joint 170N that hermetically connects the supply pipe 170T and the first flow path 111. The supply pipe 170T may be disposed to pass through the through hole formed at the portion of the power part 150 and the inflow port 113 of the shaft 110. In this case, a connector CE may be provided to firmly fix the supply tube 170T to the through hole. Additionally, the supply tube 170T may be configured to be in fluid communication with the first flow path 111. At this time, the joint portion 170N can maintain airtightness between the supply pipe 170T and the first flow path 111. Therefore, the lubricant supplied through the supply pipe 170T can flow to the first flow path 111 without leaking. The supply pipe 170T is flexible and can be bent in accordance with the vertical movement of a part of the power unit 150 and the shaft 110.

The lubrication supplying part 170 may be disposed outside the chamber C and automatically supplies a certain amount of lubricant to the substrate elevation driving unit 10 at certain time intervals. Of course, the lubricant may be manually supplied instead of the lubrication supply portion 170.

Since the lubrication supply unit 170 can be disposed outside the chamber C, the lubrication supply unit 170 can be used even when the space inside the chamber C is small. Further, it is not necessary to stop the operation of the display device manufacturing apparatus 1 in order to fill the lubricant supply unit 170 with lubricant.

Hereinafter, a method of manufacturing a display device using the apparatus for manufacturing a display device according to the embodiment of the present disclosure described above will be described.

According to an embodiment of the present disclosure, the substrate P may be dropped into the chamber C to be placed on the height adjusting part. The height adjusting part may include a substrate elevation driving unit 10 and a substrate elevation part 20. The base plate P may be placed on the lift pins 22 of the height adjusting part.

Thereafter, the height adjusting part may be lowered to mount the substrate P on the table 30. Various processes may be performed on the substrate P mounted on the stage 30. For example, a chemical vapor deposition method for forming an organic layer or an inorganic layer on one surface of the substrate P, a vapor deposition process such as an electron beam vapor deposition method, or an inkjet printing process may be performed. Alternatively, a UV curing process or the like of drying the coated cloth or the printed ink by irradiating ultraviolet rays may be performed.

After the process is completed, the height adjusting part may be raised to separate the substrate P from the stage 30. After that, the substrate P may be carried out. The robot or the like may be used to load and unload the substrate P, but the substrate P may be required to be spaced apart from the table 30 so as to stably hold the substrate P and unload the substrate P without contaminating one surface of the substrate P on which the process is performed. For this, the height adjusting part of the present disclosure may lift the substrate P.

According to an embodiment of the present disclosure, a step of supplying lubricant to the height adjusting part may be included. In one embodiment, the groove portion 110h on the outer peripheral surface 110s of the shaft 110 may be supplied with lubricant through a flow path formed inside the shaft 110. The flow path may include a first flow path 111 and a second flow path 112. In one embodiment, the lubricant may be directly supplied to the frictional surface of the groove portion 110h which is rollingly rubbed by the balls 133. As a comparative example, when lubricant is injected through the body 120 disposed outside the shaft 110, the lubricant cannot be directly supplied to the friction surface of the shaft 110. However, according to the present disclosure, the lubricant is directly supplied to the friction surface through the flow path formed inside the shaft 110, thereby improving the lubrication function, and thus the frictional resistance can be minimized. By this, wear of the shaft 110 is minimized, and thus the life of the manufacturing apparatus can be extended.

According to an embodiment of the present disclosure, the lubricant may be supplied in ascending or descending of the height adjusting portion. That is, the lubricant may be supplied during the operation of the display device manufacturing apparatus 1. Since the lubricant can be supplied from the outside of the chamber C through the flow path inside the shaft 110, the lubricant can be smoothly supplied even if the substrate elevation drive unit 10 is disposed in a narrow space inside the chamber C. Further, there is an advantage that the lubricant can be supplied without interrupting the operation of the manufacturing apparatus 1 for the display device or decomposing it. This can save maintenance time for supplying the lubricant, and extend the operating time of the manufacturing apparatus, thereby improving manufacturing efficiency.

In yet another embodiment, a quantity of lubricant may be automatically supplied at certain intervals. Regardless of whether the operation of the display device manufacturing apparatus 1 is suspended, the optimum lubricant supply can be formed in accordance with the operating conditions of the display device manufacturing apparatus 1, and by this, the life of the display device manufacturing apparatus 1 can be extended.

The disclosure has been described with reference to the embodiments shown in the drawings, which are intended to be illustrative only, and various modifications and equivalent other embodiments will be apparent to those skilled in the art. Therefore, the true technical scope of the present disclosure should be determined by the technical idea of the appended claims.

Claims

1. A substrate lift driving unit, comprising:

a shaft extending in a first direction;

a body sliding along the shaft;

a friction reducing portion located between an outer circumferential surface of the shaft and an inner surface of the main body; and

a power part connected with the shaft and providing power for relative movement of the shaft and the body,

the shaft is provided with:

an inflow port located at one end of the shaft;

an outflow port located on an outer peripheral surface of the shaft;

a first flow path formed inside the shaft and extending from the inflow port in the first direction; and

a second flow path extending from the first flow path to the outflow port along a second direction intersecting the first direction and in fluid communication with the first flow path.

2. The substrate lift drive unit of claim 1,

the shaft includes a groove portion formed on the outer circumferential surface,

the friction reducing part comprises a ball rolling and rubbing with the groove part,

the outflow port is located on the trough portion.

3. The substrate lift drive unit of claim 2,

the groove portions extend in the first direction and are arranged on the outer peripheral surface of the shaft at a distance from each other.

4. The substrate lift drive unit of claim 3,

the groove portions are disposed at equal intervals on the outer peripheral surface of the shaft.

5. The substrate lift drive unit of claim 1,

when the main body is disposed away from the inflow port of the shaft, the outflow port is disposed in a region occupied by the friction reducing portion on the shaft.

6. The substrate lift drive unit of claim 1,

the substrate lifting drive unit further comprises:

and a lubrication supply unit that supplies lubricant to the first flow path through the inflow port.

7. The substrate lift drive unit of claim 6,

the lubrication supply portion includes:

a supply tube having flexibility; and

and a joint portion that hermetically connects the supply pipe and the first flow path.

8. An apparatus for manufacturing a display device, comprising:

a table having a through hole and on which a substrate is placed;

a substrate lifting unit which has a lift pin inserted through the through hole and lifts the substrate; and

a substrate lifting drive unit connected with the substrate lifting part,

the substrate lifting drive unit includes:

a shaft extending in a first direction;

a body sliding along the shaft;

the shaft includes:

an inflow port located at one end of the shaft;

an outflow port located on an outer peripheral surface of the shaft;

9. The manufacturing apparatus of a display device according to claim 8,

the outflow port is located on the trough portion.

10. The manufacturing apparatus of a display device according to claim 9,