CN113470896B - Method for integrating extensible stimulation electrode on surface of semi-inflatable micro-balloon - Google Patents
Method for integrating extensible stimulation electrode on surface of semi-inflatable micro-balloon Download PDFInfo
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Abstract
The invention discloses a method for integrating extensible stimulating electrodes on the surface of a semi-expansive micro-balloon, which comprises the following steps of firstly, pressing a water-soluble adhesive tape on the extensible stimulating electrodes, and applying uniform pressing force; then inflating or injecting a contrast agent into the micro-balloon to enable the micro-balloon to reach a semi-expansion state, and uniformly brushing adhesive silica gel on the surface of the micro-balloon to serve as an adhesive material between the micro-balloon and an extensible stimulation electrode; then slowly stripping the stimulating electrode from the silicon wafer through a water-soluble adhesive tape, attaching the stimulating electrode to the target position of the microballoon capsule coated with the viscous silica gel, and then placing the whole microballoon capsule in an oven to dry the viscous silica gel; and finally, fully soaking the micro-balloon in hot water to ensure that the water-soluble adhesive tape is completely dissolved and the stimulating electrode point and the annular ground electrode are completely exposed. The method can ensure that the extensible stimulation electrode deforms synchronously along with the expansion or contraction of the microsphere capsule, meets the requirement of higher deformation and stretching of the microsphere capsule, and has important practical value and innovation significance.
Description
Technical Field
The invention belongs to the technical field of biomedicine and electricity, and particularly relates to an integration method of an extensible stimulation electrode.
Background
With the development of flexible electronic device technology, some research reports have been reported to integrate flexible devices applied to the surface of a microballoon capsule for cardiac diagnosis and treatment so as to realize the functions of electrocardio monitoring, temperature sensing, pressure sensing, radio frequency ablation and the like. At present, most micro-balloons adopt small-deformation polyurethane materials, the elastic deformation amount is small in the air inflation and deflation process, the air deflation state is mainly in a shrivelled shape, and the extension deformation amount of a flexible device integrated on the surface of the micro-balloon is small.
19910 & 19915, written in "Electronic sensor and activator webs for large-area complex geometry card mapping and therapy", proposes a serpentine wire structure tactile sensor with integrated measurement resistor on the surface of balloon for verifying the degree of contact with tissue; in 2015, MC10, Lauren Klinker et al, in Extreme Mechanics Letters,2015,3:45-54, written "Balloon connectors with integrated reinforced electronic for electronic stimulation, and ablation and blood monitoring", propose a serpentine wire structure electrode with a polyimide substrate integrated on the surface of the Balloon, and have functions of electrical stimulation, radio frequency ablation, and the like; in 2019, the Whole Liujing team of Shanghai traffic university at IEEE electronic Device Letters,2019,40(10), 1674-; in 2020, John A.Rogers team, North-West university, USA, Nature biological Engineering,2020,4(10): 997-. Although the research carries out snakelike structural design on the device lead to improve the whole extension capability, the balloon expansion deformation amount in the inflation state is small, so the requirement on the extension performance of the lead is not high.
Another micro-balloon is made of a large-deformation silicone material (such as latex), has large elastic deformation amount during inflation and deflation, can be expanded from an initial cylinder to a spherical shape, and can recover the cylindrical shape. 2011 John A. Rogers' group drafted in NATURE MATERIALS,2011,10(4): 316-. The island bridge structure used is that silicon dioxide is deposited on the back surface of an island and is bonded with an elastic substrate through a chemical condensation reaction, and a bridge, namely a lead, is in a free-moving state and is not restricted by the substrate in an extension state and can deform out of plane so as to provide sufficient extension capacity. However, in this interface integration approach, the wire detaches from the substrate as the balloon expands, and is susceptible to failure during compression and abrasion with tissue.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a method for integrating an extensible stimulation electrode on the surface of a semi-inflatable micro-balloon, which comprises the steps of firstly, pressing a water-soluble adhesive tape on the extensible stimulation electrode, and applying uniform pressing force; then, inflating or injecting a contrast agent into the micro-balloon to enable the micro-balloon to reach a semi-expansion state, and uniformly brushing adhesive silica gel on the surface of the micro-balloon to serve as an adhesive material between the micro-balloon and the extensible stimulation electrode; then slowly stripping the stimulating electrode from the silicon wafer through a water-soluble adhesive tape, attaching the stimulating electrode to the target position of the microballoon capsule coated with the viscous silica gel, and then placing the whole microballoon capsule in an oven to dry the viscous silica gel; and finally, fully soaking the micro-balloon in hot water to ensure that the water-soluble adhesive tape is completely dissolved and the stimulating electrode point and the annular ground electrode are completely exposed. The method can ensure that the extensible stimulation electrode deforms synchronously along with the expansion or contraction of the microsphere capsule, meets the requirement of higher deformation and stretching of the microsphere capsule, and has important practical value and innovation significance.
The technical scheme adopted by the invention for solving the technical problem comprises the following steps:
step 1: pressing a water-soluble adhesive tape above an extensible stimulating electrode of a polyimide film substrate packaging metal material, and applying uniform pressing force;
step 2: inflating or injecting contrast agent into the micro-balloon through a supporting tube connected with the micro-balloon to enable the micro-balloon to reach a semi-expansion state, and then uniformly brushing viscous silica gel on the surface of the micro-balloon;
and step 3: peeling the extensible stimulation electrode from the silicon wafer through a water-soluble adhesive tape, attaching the extensible stimulation electrode to the micro-balloon coated with the viscous silica gel, and then placing the micro-balloon in an oven with set parameters to dry the viscous silica gel;
and 4, step 4: and fully soaking the dried micro-balloon in hot water to ensure that the water-soluble adhesive tape is completely dissolved and falls off, so that the extensible stimulation electrode is completely exposed.
Further, the malleable stimulation electrodes include 6 stimulation electrode points, 6 annular ground electrodes, and malleable wires; the 6 stimulation electrode points are evenly divided into two groups, and the circumferential intervals of 120 degrees are respectively distributed in the middle positions of the metal ends at the two ends of the micro-balloon; the 6 annular ground electrodes are respectively semi-surrounded around the 6 stimulating electrode points; the diameter of the stimulating electrode point is 50-200 micrometers, the inner diameter of the annular ground electrode is 200-300 micrometers, and the width of the extensible lead is 5-50 micrometers.
Further, the extensible stimulation electrode comprises a polyimide substrate layer, a metal conducting layer and a polyimide packaging layer, and a snake-shaped extensible lead structure is obtained through a photoetching process; the metal conducting layer is made of Cr/Au or Cr/Pt.
Further, the water-soluble adhesive tape is 3M water-soluble adhesive tape with the size of 6mm 15 mm.
Further, the size of the micro-balloon in the initial state is 1.6mm in diameter and 11mm in total length, the diameter of the maximum deformation part of the micro-balloon in the semi-expansion state is 4mm, and the diameter of the maximum deformation part of the micro-balloon in the complete expansion state is 8 mm; the material of the micro-balloon is latex or thermoplastic polyurethane.
Further, the viscous silica gel adopts uncured low-modulus polydimethylsiloxane or low-modulus platinum-catalyzed silicone rubber Ecoflex _ gel.
Further, when the microballoon bag is placed in an oven with set parameters for drying viscous silica gel, the temperature in the oven is 70-80 ℃, and the heating time is 1-4 hours.
Furthermore, the 6 stimulation electrode points are divided into two groups, are spaced at intervals of 120 degrees in the circumferential direction and are spaced at intervals of 10-20 mm in the axial direction, and are distributed on the outer surface of the micro-balloon at positions 5-10 mm close to the top metal end.
Further, the material of the metal conducting layer adopts silver nanowires or carbon nanotubes or graphene.
Further, the polyimide substrate layer and the polyimide encapsulation layer can be replaced by PDMS or Ecoflex or PU adhesive materials.
The invention has the following beneficial effects:
according to the method, the extensible stimulation electrode is integrated on the surface of the micro-balloon in a pre-stretching mode in a semi-expansion state of the micro-balloon, so that the deformation of the extensible lead is within the maximum deformation limit bearable by the extensible stimulation electrode when the micro-balloon is in the maximum expansion state, and the extensible lead can be synchronously compressed and deformed when the micro-balloon is deflated. In addition, in order to improve the relative position precision of the snake-shaped lead of the extensible stimulation electrode and the bonding reliability of the surface of the microballoon sac and avoid the serious out-of-plane deformation of the extensible lead, in the integration process, the viscous silica gel material is used as a bonding material, and the extensible stimulation electrode is slowly transferred to the target position of the surface of the microballoon sac coated with the viscous silica gel material by using a water-soluble adhesive tape, so that the bonding reliability of the extensible stimulation electrode and the microballoon sac surface is effectively ensured.
Drawings
Fig. 1 is a schematic diagram of the integration state of the extensible stimulation electrode integrated on the surface of the semi-expanded microsphere capsule of the invention.
Fig. 2 is a schematic diagram of the transfer integration process of the semi-expanded microsphere capsule surface integrated with the extensible stimulation electrode.
Fig. 3 is a schematic illustration of the layered structure of the malleable stimulation electrode structure of the present invention.
Fig. 4 is a schematic diagram of the relative position of the malleable stimulation electrode integrated into the initial state of the micro-balloon of the present invention.
Fig. 5 is a schematic view of a microsphere capsule in a deformed and corresponding state of the ductile wire according to the present invention.
Fig. 6 is a schematic view of a partially enlarged structure of the ductile stimulation electrode of the present invention.
In the figure: the method comprises the following steps of 1-extensible stimulation electrode, 2-micro balloon, 3-metal end, 4-support tube, 5-polyimide substrate layer, 6-metal conducting layer, 7-polyimide packaging layer, 8-balloon catheter, 9-semi-expandable micro balloon surface initial lead, 10-contracted micro balloon surface compressed lead, 11-expanded micro balloon surface extended lead, 12-stimulation electrode point, 13-annular ground electrode and 14-extensible lead.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
The invention provides a method for integrating extensible stimulation electrodes on the surface of a semi-inflatable micro-balloon, which can realize a large-extension application scene of integrating the stimulation electrodes on the surface of the micro-balloon and simultaneously ensure high adhesiveness and high reliability of the stimulation electrodes and the surface of the micro-balloon. The method of the invention relates to a microsphere capsule capable of realizing large extension and an extensible stimulating electrode, and a stimulation circuit containing the extensible stimulation is accurately transferred to the surface of the microsphere capsule capable of realizing large extension through a water-soluble adhesive tape.
A method for integrating extensible stimulation electrodes on the surface of a semi-inflatable micro-balloon comprises the following steps:
step 1: pressing a water-soluble adhesive tape above the extensible stimulation electrode, and applying uniform pressing force; ensuring that the adhesion between the water-soluble adhesive tape and the interface of the stimulation electrode can enable the stimulation electrode to be completely stripped from the silicon wafer sprayed with the release agent, ensuring that the water-soluble adhesive tape and the interface of the extensible stimulation electrode have sufficient adhesion, and enabling the extensible stimulation electrode to be completely stripped from the silicon wafer from which the sacrificial layer is removed; (ii) a
Step 2: inflating or injecting contrast agent into the micro-balloon through a support tube connected with the micro-balloon to enable the micro-balloon to reach a semi-expansion state, and then uniformly brushing adhesive silica gel on the surface of the micro-balloon to serve as an adhesive material between the micro-balloon and an extensible stimulation electrode;
and step 3: slowly peeling the extensible stimulation electrode from the silicon wafer through a water-soluble adhesive tape, attaching the extensible stimulation electrode to the corresponding position of the micro-balloon coated with the viscous silica gel according to the design scheme of the device, and then placing the micro-balloon in an oven with set parameters to dry the viscous silica gel;
and 4, step 4: and fully soaking the micro-balloon in hot water to ensure that the water-soluble adhesive tape is completely dissolved and the stimulation electrode point and the annular ground electrode are completely exposed.
Further, the malleable stimulation electrodes include 6 stimulation electrode points, 6 annular ground electrodes, and malleable wires; the 6 stimulation electrode points are evenly divided into two groups, and the circumferential intervals of 120 degrees are respectively distributed in the middle positions of the metal ends at the two ends of the micro-balloon; the 6 annular ground electrodes are respectively semi-surrounded around the 6 stimulating electrode points; the diameter of the stimulating electrode point is 50-200 microns, the inner diameter of the annular ground electrode is 200-300 microns, and the width of the extensible lead is 5-50 microns.
Further, the extensible stimulation electrode comprises a polyimide substrate layer, a metal conducting layer and a polyimide packaging layer, and a snake-shaped extensible lead structure is obtained through a photoetching process; the metal conducting layer is made of chromium or gold.
Further, the water-soluble adhesive tape is 3M water-soluble adhesive tape with the size of 6mm 15 mm.
Further, the size of the micro-balloon in the initial state is 1.6mm in diameter and 11mm in total length, the diameter of the maximum deformation part of the micro-balloon in the semi-expansion state is 4mm, and the diameter of the maximum deformation part of the micro-balloon in the complete expansion state is 8 mm; the material of the micro-balloon is elastic material with excellent extensibility such as latex, Thermoplastic Polyurethane (TPU) and the like.
Further, the viscous silica gel adopts uncured low-modulus Polydimethylsiloxane (PDMS) or low-modulus platinum-catalyzed silicone rubber Ecoflex _ gel.
Further, when the microballoon bag is placed in an oven with set parameters for drying viscous silica gel, the temperature in the oven is 70-80 ℃, and the heating time is 1-4 hours.
Furthermore, the 6 extensible stimulation electrodes are divided into two groups, are spaced at intervals of 120 degrees in the circumferential direction and are spaced at intervals of 10-20 mm in the axial direction, and are distributed on the outer surface of the micro-balloon at positions 5-10 mm close to the top metal end.
Further, the material of the metal conducting layer adopts silver nanowires or carbon nanotubes or graphene.
Further, the polyimide substrate layer and the polyimide encapsulation layer can be replaced by PDMS or Ecoflex or PU adhesive materials.
The specific embodiment is as follows:
in this embodiment, referring to fig. 1, an extensible stimulation electrode 1 is integrated on the surface of a micro-balloon 2 in a half-expanded state, the overall size of the extensible stimulation electrode 1 is determined by the size of the micro-balloon 2 in the half-expanded state, the size of the micro-balloon in an initial state is 1.6mm in diameter and 11mm in total length, meanwhile, a stimulation electrode point on the integrated extensible stimulation electrode 1 is located in the middle of metal ends at two ends of the micro-balloon, a pad of the extensible stimulation electrode 1 is attached to the surface of a support tube 4, and is connected with an electrical stimulator through a flexible flat cable, so as to input a stimulation signal, thereby realizing a highly controllable stimulation process.
Referring to fig. 2, the integration method of the present embodiment is mainly divided into the following four steps:
the first step is as follows: pressing a water-soluble adhesive tape on the flexible extensible stimulation electrode of the polyimide film substrate packaging metal material, and applying uniform pressing force to ensure that sufficient adhesive force exists between the water-soluble adhesive tape and the extensible stimulation electrode interface, so that the extensible stimulation electrode can be completely stripped from the silicon wafer with the sacrificial layer removed;
the 3M water-soluble tape used here was cut into a 6mm x 15mm rectangle to peel off a single malleable stimulating electrode to avoid mis-bonding other devices on the silicon wafer. The peeling process starts from the pad end, and the ductile wire is prevented from being broken in the peeling process. In addition, the water-soluble adhesive tape is bent due to the stress in the stripping process, and can be restored to be flat through external force, so that the water-soluble adhesive tape is convenient to be attached and integrated with the surface of the microsphere capsule subsequently.
The second step is that: inflating or injecting contrast agent into the micro-balloon through a support tube connected with the micro-balloon to enable the micro-balloon to reach a semi-expansion state, wherein the diameter of the maximum deformation part is 4mm, and then uniformly brushing adhesive silica gel on the surface of the micro-balloon to serve as an adhesive material between the micro-balloon and an extensible stimulation electrode;
the third step: slowly stripping the extensible stimulation electrode from the silicon wafer through a water-soluble adhesive tape, attaching the extensible stimulation electrode to the corresponding position of the micro-balloon coated with the viscous silica gel according to the design scheme of the device, and then placing the whole micro-balloon device in an oven to be heated for 1-4 hours at 70-80 ℃ to dry the viscous silica gel;
the fourth step: the micro-balloon device is fully soaked in hot water and properly shaken to ensure that the water-soluble adhesive tape is completely dissolved and falls off, and the stimulating electrode point and the annular ground electrode are completely exposed.
Referring to fig. 3, a schematic diagram of an electrode layer made by a conventional photolithography process and including a polyimide substrate layer 5, a metal conductive layer 6 and a polyimide encapsulation layer 7 is shown; the polyimide substrate 5 is prepared by spin-coating polyimide (Durimide 7505) photoresist on a spin coater, pre-baking, photoetching, developing, rinsing, and performing incomplete imidization on polyimide at 250 ℃ for 60min in a nitrogen environment by using high-temperature pyrolysis and curing equipment, wherein the cured thickness is about 2.5 μm. And sputtering 20nm of chromium and 200nm of gold as conductive materials in sequence by using a metal multilayer film magnetron sputtering control system, and then obtaining the metal conductive layer 6 by using a dry etching process. The polyimide packaging layer 7 and the polyimide substrate layer 5 have the same process flow, but the post-baking temperature is set to be 350 ℃ for 60min, complete imidization is carried out, and the thickness of the cured polyimide packaging layer 7 is about 2.5 mu m.
Referring to fig. 4, in order to show the corresponding positions of the malleable stimulation electrode 1 and the micro-balloon 2 in the initial state, when the malleable stimulation electrode is integrated into the micro-balloon, the stimulation electrode point should be ensured to be located at the middle position of the metal ends 3 on the two sides of the balloon, and the stability of the electrical stimulation position is ensured.
Referring to fig. 5, in order to show the corresponding deformation state of the extensible lead when the microballoon sac is in the initial, half-expanded, and fully expanded states, the method for integrating the extensible stimulation electrode on the surface of the half-expanded microballoon sac in this embodiment is to integrate the extensible stimulation electrode on the surface of the microballoon sac in the half-expanded state (with the maximum diameter of 4mm) by means of a water-soluble adhesive tape, at this time, the extensible lead is in the form of a half-expanded microballoon sac surface initial lead 9, a contracted microballoon sac surface compressed lead 10 is obtained when the microballoon sac is contracted to the initial state (with the diameter of 1.6mm), and an expanded microballoon sac surface extended lead 11 is obtained when the microballoon sac is fully expanded (with the maximum diameter of 8 mm).
Referring to fig. 6, the partial enlarged view of the stimulation electrode point 12, the annular ground electrode 13 and the extensible lead 14 is shown, the diameter of the stimulation electrode point is 50-200 micrometers, the inner diameter of the annular ground electrode is 200-300 micrometers, and the width of the extensible lead is 5-50 micrometers. The extensible leads are arranged in the same direction and in the same row, so that the deformation capacity of the extensible leads in the radial direction and the circumferential direction is improved as much as possible, the maximum main stress on the metal conducting layer in the stretching process of the extensible stimulation electrodes is reduced, and the reliability of the device is improved.
In another embodiment, the electrode locations are transformed to achieve similar electrical stimulation operations. 6 electrode points are divided into two groups, are spaced at intervals of 120 degrees in the circumferential direction and are spaced at intervals of 10-20 mm in the axial direction, and are distributed at positions, close to the top metal end, of the outer surface of the micro-balloon, of 5-10 mm, so that the stimulating electrode points are enabled to displace along with the micro-balloon in the expansion process, and are mainly located in the area where the stimulating electrode points are mainly contacted with trigeminal nerve tissues, and therefore the accurate concentrated electrical stimulation function of a specific area is achieved.
In another specific embodiment, the metal conductive layer in fig. 3 is replaced by using a material such as silver nanowires or carbon nanotubes or graphene, and the polyimide substrate layer and the polyimide encapsulation layer in fig. 3 are replaced by using a silica gel material such as PDMS, Ecoflex, or PU, so that the stretchable stimulation electrode has a higher stretching ability from the intrinsic angle of the material. The designed conducting layer can be printed by means of high-resolution electrofluid spray printing equipment by using silver nanowires or carbon nanotubes or graphene as conducting materials; and processing the silica gel substrate layer and the silica gel packaging layer by means of high-resolution printing equipment, and packaging the printed conductive layer, so that the extensible stimulation electrode integrated on the surface of the semi-inflatable micro-balloon has stronger extension capability.
Claims (10)
1. A method for integrating extensible stimulation electrodes on the surface of a semi-inflatable micro-balloon is characterized by comprising the following steps:
step 1: pressing a water-soluble adhesive tape above an extensible stimulating electrode of a polyimide film substrate packaging metal material, and applying uniform pressing force;
step 2: inflating or injecting contrast agent into the micro-balloon through a supporting tube connected with the micro-balloon to enable the micro-balloon to reach a semi-expansion state, and then uniformly brushing viscous silica gel on the surface of the micro-balloon;
and step 3: peeling the extensible stimulation electrode from the silicon wafer through a water-soluble adhesive tape, attaching the extensible stimulation electrode to the micro-balloon coated with the viscous silica gel, and then placing the micro-balloon in an oven with set parameters to dry the viscous silica gel;
and 4, step 4: and fully soaking the dried micro-balloon in hot water to ensure that the water-soluble adhesive tape is completely dissolved and falls off, so that the extensible stimulation electrode is completely exposed.
2. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon according to claim 1, wherein the extensible stimulation electrode comprises 6 stimulation electrode points, 6 annular ground electrodes and an extensible lead; the 6 stimulation electrode points are evenly divided into two groups, and the circumferential intervals of 120 degrees are respectively distributed in the middle positions of the metal ends at the two ends of the micro-balloon; the 6 annular ground electrodes are respectively semi-surrounded around the 6 stimulating electrode points; the diameter of the stimulating electrode point is 50-200 microns, the inner diameter of the annular ground electrode is 200-300 microns, and the width of the extensible lead is 5-50 microns.
3. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon as claimed in claim 1, wherein the extensible stimulation electrode comprises a polyimide substrate layer, a metal conductive layer and a polyimide packaging layer, and a serpentine extensible lead structure is obtained through a photolithography process; the metal conducting layer is made of Cr/Au or Cr/Pt.
4. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon as claimed in claim 1, wherein the water-soluble adhesive tape is 3M water-soluble adhesive tape with the size of 6mm x 15 mm.
5. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon as claimed in claim 1, wherein the size of the micro-balloon in the initial state is 1.6mm in diameter and 11mm in total length, the diameter of the maximum deformation part of the micro-balloon in the semi-inflatable state is 4mm, and the diameter of the maximum deformation part of the micro-balloon in the fully inflatable state is 8 mm; the material of the micro-balloon is latex or thermoplastic polyurethane.
6. The method for integrating the malleable stimulation electrode on the surface of the semi-inflatable micro-balloon according to claim 1, wherein the viscous silicone rubber is uncured low modulus polydimethylsiloxane or low modulus platinum catalyzed silicone rubber Ecoflex gel.
7. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon according to claim 1, wherein when the micro-balloon is placed in an oven with set parameters and viscous silica gel is dried, the temperature in the oven is 70-80 ℃, and the heating time is 1-4 hours.
8. The method for integrating extensible stimulation electrodes on the surface of the semi-inflatable micro-balloon according to claim 2, wherein the 6 stimulation electrode points are divided into two groups, the distance between the two groups is 120 degrees in the circumferential direction, the distance between the two groups is 10-20 mm in the axial direction, and the stimulation electrode points are distributed on the outer surface of the micro-balloon at positions 5-10 mm close to the top metal end.
9. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon as claimed in claim 3, wherein the material of the metal conductive layer is silver nanowire or carbon nanotube or graphene.
10. The method for integrating the extensible stimulation electrode on the surface of the semi-inflatable micro-balloon as claimed in claim 3, wherein the polyimide substrate layer and the polyimide packaging layer can be replaced by PDMS, Ecoflex or PU adhesive materials.
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