CN113463037A - Method for coating reflecting film on outer surface of fluoride special-shaped light guide rod - Google Patents
Method for coating reflecting film on outer surface of fluoride special-shaped light guide rod Download PDFInfo
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- CN113463037A CN113463037A CN202110812080.0A CN202110812080A CN113463037A CN 113463037 A CN113463037 A CN 113463037A CN 202110812080 A CN202110812080 A CN 202110812080A CN 113463037 A CN113463037 A CN 113463037A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
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Abstract
The invention discloses a method for plating a reflective film on the outer surface of a fluoride special-shaped light guide rod, which comprises the steps of carrying out ultrasonic cleaning on the special-shaped light guide rod to be plated, and then carrying out ion cleaning and activation on the special-shaped light guide rod to be plated; then plating a reflecting film; introducing oxygen into the coating device, melting and evaporating aluminum in a crucible in the coating device by emitting an electron beam through an electron gun, and simultaneously applying continuous direct current bias to the crucible to ionize the oxygen and aluminum vapor to form plasma cloud; applying pulse direct current bias voltage to the special-shaped light guide rod, and immersing the special-shaped light guide rod in the produced aluminum and oxygen plasmas to plate an aluminum oxide priming layer; then argon is introduced again to plate a metal aluminum layer; and preparing an aluminum oxide protective layer by referring to the aluminum oxide priming layer to obtain a finished product. The invention can plate a uniform reflecting film on the outer surface of the special-shaped light guide rod.
Description
Technical Field
The invention relates to the technical field of preparation of special-shaped light guide rods, in particular to a method for plating a reflecting film on the outer surface of a fluoride special-shaped light guide rod.
Background
The light guide rod is commonly used in operations in narrow operating environments, such as probing the inside of an oral cavity, a machine or a pipeline. The fluoride light guide rod can transmit visible light and ultraviolet light, and can be used in some ultraviolet curing or developing exposure applications.
Traditional leaded light stick adopts the total reflection principle to carry out the transmission of light, nevertheless appears buckling or leaded light stick appearance when being special-shaped when leaded light stick, the total reflection condition will no longer satisfy, and light will be followed leaded light stick side and escaped, causes the loss. In order to reduce the light escaping from the side end of the light guide rod, it is a preferable solution to coat the outer surface of the light guide rod with a reflective film.
The existing conventional coating mode is suitable for coating on the surface of a planar optical element, and an element to be coated is placed on a workpiece disc clamp for evaporation coating or sputtering coating. If special requirements exist, such as the inclined surface or the wedge angle surface needs to be coated, the original to be coated is clamped in the vacuum chamber in an inclined mode to be coated. Both vapor deposition and sputtering are techniques of Line of sight (Line of sight) and only a part within the "Line of sight" is coated. When the surface of the cylindrical special-shaped light guide rod is coated, the traditional method is difficult to realize. In the face of the situation, a rotatable fixture is adopted to clamp a cylindrical special-shaped light guide rod at present, so that the special-shaped light guide rod can rotate along the axial direction in the film coating process. However, this type of clamp is complicated and costly. And the surface uniformity of the special-shaped light guide rod prepared by the coating method cannot be well controlled, and a straight mark is easy to remain in the radial direction after coating.
When the appearance of the light guide rod becomes special-shaped, the mode of rotating the fixture is adopted for clamping and coating, the thickness of the outer surface film layer is uneven, the mark at the bending part is obvious, and the product quality is greatly reduced.
Disclosure of Invention
The invention aims to provide a method for plating a reflecting film on the outer surface of a fluoride special-shaped light guide rod, which can plate a uniform reflecting film on the outer surface of the special-shaped light guide rod.
In order to solve the technical problem, the invention provides a method for plating a reflecting film on the outer surface of a fluoride special-shaped light guide rod, which comprises the following steps:
step 1) carrying out ultrasonic cleaning on a special-shaped light guide rod to be plated;
step 2) carrying out ion cleaning and activation on the special-shaped light guide rod to be plated; fixing the special-shaped light guide rod in a coating device, vacuumizing the coating device, filling a certain amount of argon, applying pulse direct-current bias voltage to the special-shaped light guide rod to generate and maintain glow discharge, and utilizing Ar+The surface of the special-shaped light guide rod is bombarded by ions to remove impurities adsorbed on the surface and activate the surface of the special-shaped light guide rod by an oxide layer;
step 3), plating an aluminum oxide base coat; introducing oxygen into the coating device, melting and evaporating aluminum in a crucible in the coating device by emitting an electron beam through an electron gun, and simultaneously applying continuous direct current bias to the crucible to ionize the oxygen and aluminum vapor to form plasma cloud; then applying pulse direct current bias voltage to the special-shaped light guide rod, immersing the special-shaped light guide rod in the produced aluminum and oxygen plasmas, accelerating positive ions from all directions to the surface of the special-shaped light guide rod vertically and bombarding a densification film layer under the influence of the pulse direct current bias voltage to plate an aluminum oxide bottom layer, and after finishing plating, turning off an electron gun power supply, applying bias voltage to the crucible and the special-shaped light guide rod, and turning off oxygen;
step 4), plating a plated metal aluminum layer; introducing argon, continuously emitting electron beams through an electron gun to melt aluminum in a crucible in the coating device, evaporating, applying continuous direct-current bias voltage to the crucible, ionizing aluminum vapor to form plasma cloud, then applying pulse direct-current bias voltage to the special-shaped light guide rod to coat a metal aluminum layer, and after finishing the process, closing a power supply of the electron gun, the bias voltage applied to the crucible and the special-shaped light guide rod, and closing the argon;
step 5), plating an aluminum oxide protective layer; and preparing an aluminum oxide protective layer on the surface of the metal aluminum layer by adopting a step method of plating an aluminum oxide priming layer, thereby obtaining a finished product.
Further, in the step 2), the inside of the coating device is vacuumized to 5 x 10-4Pa; after filling argon, the pressure was maintained at 5X 10-2Pa; and applying-200V pulse direct current bias to the special-shaped light guide rod, wherein the frequency is 200kHz, and the duty ratio is 30%.
Further, in step 3), the pressure of oxygen and argon is maintained at 1X 10-3Pa。
Further, in step 3), the voltage of the electron gun is selected to be 15kV and the current is 0.2A.
Further, in step 3), a continuous direct current bias of 100V is applied to the crucible; and applying a pulse direct current bias voltage of-500V to the special-shaped light guide rod, wherein the frequency is 250kHz, and the duty ratio is 30%.
Further, in step 3), the time for plating the aluminum oxide primer layer was 1 minute, the time for plating the metal aluminum layer was 2 minutes, and the time for plating the aluminum oxide protective layer was 1 minute.
Further, the film coating device comprises an outer shell, a workpiece disc is arranged in the outer shell in a hanging mode and used for fixing the special-shaped light guide rod, a power supply assembly is arranged on the workpiece disc, one end of the power supply assembly is connected with the special-shaped light guide rod, the other end of the power supply assembly is connected with a pulse power supply, an electron beam evaporation crucible is arranged at the bottom in the outer shell and connected with a direct current power supply, and an air inflation inlet is formed in the outer shell;
and the outer shell is also provided with a microwave generator.
Furthermore, the middle part of the workpiece disc is connected with the top of the outer shell through a hanging rod, a sliding channel is arranged on the workpiece disc, a drill clamp is arranged on the sliding channel, and the drill clamp clamps the special-shaped light guide rod through an internal three-jaw assembly.
Furthermore, the drill clamp is of a hand-tightening structure, an upper limiting disc is arranged on a front sleeve of the drill clamp, an external thread sleeve is arranged on the upper limiting disc, the external thread sleeve penetrates through the sliding channel to be in threaded connection with the lower limiting disc, the special-shaped light guide rod penetrates through the external thread sleeve to be matched and fixed with the three-jaw assembly in the front sleeve, an electric connecting column is arranged in a rear sleeve of the drill clamp, and the electric connecting column is connected with a power supply assembly.
Furthermore, the bottom of the lower limiting disc is provided with two unlocking columns, the end part of the electric connection column is provided with a screw cap, and the screw cap is connected with a power supply assembly.
The invention has the beneficial effects that:
the outer surface of the coated special-shaped light guide rod can be uniformly attached with one (or more) layers of optical films, the reflecting layer can reduce the escape of light from the side end of the light guide rod, the reflectivity of a specific waveband can reach more than 98%, the energy loss in light transmission is greatly reduced, and the effective use distance of the light guide rod is prolonged.
The prepared special-shaped light guide rod has excellent optical performance, extremely high chemical stability, thermal shock resistance and mechanical resilience, and can greatly meet different environmental use requirements.
Drawings
FIG. 1 is a coating flow diagram of the present invention;
FIG. 2 is a schematic view of the structure of the coating apparatus of the present invention;
FIG. 3 is a schematic view of a first perspective structure of a workpiece tray according to the present invention;
FIG. 4 is a schematic view of a second perspective of the workpiece tray of the present invention;
fig. 5 is a schematic view of the bit holder configuration of the present invention.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
Referring to fig. 1 and 2, in an embodiment of the method for coating a reflective film on the outer surface of a fluoride special-shaped light guide rod according to the present invention, in order to better coat a special-shaped fluoride light guide rod, the special-shaped light guide rod is first fixed in a special cleaning jig, and then is respectively placed in a washing solution and a deionized water tank for ultrasonic cleaning for 30 minutes and then dried to remove impurities such as oil stains, polishing solutions, and the like attached to the surface of the light guide rod.
Then fixing the special-shaped light guide rod to be plated in a film plating device, wherein one end of the special-shaped light guide rod to be plated is clamped or attached on a rotating platform (a workpiece disc), and pumping the air pressure of a vacuum chamber to 5 multiplied by 10-4Introducing a certain amount of argon after Pa to maintain the pressure at 5X 10-2Pa level, by applying a pulsed DC bias of-200V (frequency 200kHz, duty cycle 30%) to the profiled light-guiding rod to generate and maintain a glow discharge using Ar+And bombarding the surface of the special-shaped light guide rod by ions to remove impurities adsorbed on the surface and activate the surface of the special-shaped light guide rod by an oxide layer.
After the reaction, the argon gas was turned off, and oxygen was introduced to maintain the pressure at 1X 10-3Pa level. The settings of the electron gun in the coating device are as follows: the voltage of the electron beam is selected to be 15kV, and the current is 0.2A; the aluminum in the crucible is melted and evaporated. Simultaneously, a continuous DC bias of 100V is applied to the crucible to ionize the oxygen and aluminum vapor into a plasma cloud. Meanwhile, the ionization rate can be enhanced by using an additional microwave auxiliary mode. And continuously applying a pulse direct current bias voltage of-500V to the special-shaped light guide rod (the frequency is 250kHz, and the duty ratio is 30%). At this time, the special-shaped light guide rod is immersed in the produced aluminum and oxygen plasmas, and under the influence of direct current bias voltage, positive ions are accelerated from all directions to the surface of the special-shaped light guide rod vertically and bombard the densified film layer so as to plate an aluminum oxide bottom layer. After 1 minute, the electron gun power supply and the bias voltage applied to the crucible and the shaped light guide rod were turned off.
Oxygen was turned off, argon was introduced, and the pressure was maintained at 1X 10-3Pa level, electron beam voltage selected 15kV, current 0.2A, melting the aluminum in the crucible and evaporating. Simultaneously, a continuous DC bias of 100V is applied to the crucible to ionize the aluminum vapor into a plasma cloud. Meanwhile, the ionization rate is enhanced by using an additional microwave auxiliary mode. By applying a pulse DC bias voltage (frequency) of-500V to the special-shaped light guide rod250kHz, duty cycle 30%). Keeping for two minutes to plate the metal aluminum layer. And turning off the power supply of the electron gun and the bias voltage applied to the crucible and the special-shaped light guide rod.
The argon is turned off and oxygen is again introduced, maintaining the pressure at 1X 10-3Pa level, electron beam voltage selected 15kV, current 0.2A, melting the aluminum in the crucible and evaporating. Simultaneously, a continuous DC bias of 100V is applied to the crucible to ionize the oxygen and aluminum vapor into a plasma cloud. Meanwhile, the ionization rate can be enhanced by using an additional microwave auxiliary mode. A pulse DC bias voltage of-500V (frequency 250kHz, duty ratio 30%) is applied to the special-shaped light guide rod. And (3) plating an alumina protective layer, and after 1 minute, closing the power supply of the electron gun and the bias voltage applied to the crucible and the special-shaped light guide rod to obtain a finished product.
The method is characterized in that metal or oxide film materials are evaporated by using electron beams in the film coating process and ionized into plasma cloud under the bias of an electron gun crucible and the help of external microwaves. One end of the fluoride special-shaped light guide rod is fixed on the workpiece disc, and the whole light guide rod is ensured to be immersed in the plasma atmosphere. By applying a certain pulse negative bias to the special-shaped light guide rod, positive ions are attracted to bombard the surface of a workpiece, no dead angle exists, and the thickness of the film layer is uniform. The thickness of the film layer is controlled by strictly controlling various parameters and time. One (or multilayer) optical film is evenly attached to the outer surface of the coated light guide rod, the reflecting layer can reduce the escape of light from the side end of the light guide rod, the reflectivity of a specific waveband can reach more than 98%, the energy loss in light transmission is greatly reduced, and the effective use distance of the light guide rod is prolonged.
Referring to fig. 2 to 5, the coating device includes an outer shell 1, a workpiece tray 2 is arranged in the outer shell in a hanging manner, the workpiece tray is used for fixing a special-shaped light guide rod 3, the workpiece tray can be set to be a rotating structure or a fixed structure, a power supply assembly 4 is arranged on the workpiece tray, one end of the power supply assembly is connected with the special-shaped light guide rod, the other end of the power supply assembly is connected with a pulse power supply 5, the pulse power supply applies bias voltage to the special-shaped light guide rod through the power supply assembly, an electron beam evaporation crucible 6 is arranged at the bottom in the outer shell and is connected with a direct current power supply 7, an inflation inlet 8 is further arranged in the outer shell and is used for various gases to enter the coating device, a plasma cloud 21 is formed by ionizing aluminum vapor, the plasma cloud can wrap the special-shaped light guide rod, and coating requirements are met. And the outer shell is also provided with a microwave generator 9, so that the ionization rate is effectively enhanced.
Foretell work piece dish middle part is passed through jib 10 and is connected with the shell body top, for fixed mode, the work piece dish can not rotate, be equipped with sliding channel 11 on the work piece dish, sliding channel can be the arc, be provided with drill clamp 12 on the sliding channel, drill clamp can be fixed on the optional position in sliding channel, realize special-shaped light guide rod fixed position adjustable effect, the drill clamp presss from both sides tight special-shaped light guide rod through inside three-jaw subassembly, the inside three-jaw subassembly of drill clamp can satisfy the special-shaped light guide rod use of different diameters, therefore, the commonality is strong, and the simple operation is reliable.
Concretely, the drill bit presss from both sides for hand compact form structure, drill bit presss from both sides inner structure and clamping mode and is current structure, during the operation, only need to rotate front casing and back cover relatively and can press from both sides tightly or loosen special-shaped light guide rod, be provided with spacing dish 14 on the front casing 13 of drill bit clamp, be provided with external screw thread cover 15 on the spacing dish, external screw thread cover passes sliding channel and 16 threaded connection of spacing dish down, through spacing dish and last spacing dish cooperation down, can press from both sides tight the fixing on the work piece dish with the drill bit clamp, when needs shift position, it turns on with external screw thread cover to lower spacing dish, then to the application of force to the drill bit clamp, make the drill bit clamp remove in sliding channel and can alternate fixed position, adjust to screw down the spacing dish after targetting in place again and can fix, the simple operation, lower spacing dish bottom is provided with two and unlocks post 18, conveniently lower spacing dish rotates. When the special-shaped light guide rod is fixed, the special-shaped light guide rod penetrates through the external thread sleeve to be matched with the three-jaw component in the front sleeve;
an electric connecting column 17 is arranged in the rear sleeve 20 of the drill chuck, the electric connecting column is in conductive connection with the three-jaw component in the front sleeve, and bias voltage can be effectively applied when the electric connecting column is connected with the power supply component. The end part of the electric connection column is provided with a screw cap 19 which is connected with the power supply assembly, so that the reliability of the whole connection is ensured.
Because the special-shaped light guide rod is fixed in a clamping mode, the end part, used for clamping, of the special-shaped light guide rod can be cut and polished, and therefore the effect of coating the whole surface is met.
The above embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the invention is all within the protection scope of the invention. The protection scope of the invention is subject to the claims.
Claims (10)
1. A method for plating a reflecting film on the outer surface of a fluoride special-shaped light guide rod is characterized by comprising the following steps:
step 1) carrying out ultrasonic cleaning on a special-shaped light guide rod to be plated;
step 2) carrying out ion cleaning and activation on the special-shaped light guide rod to be plated; fixing the special-shaped light guide rod in a coating device, vacuumizing the coating device, filling a certain amount of argon, applying pulse direct-current bias voltage to the special-shaped light guide rod to generate and maintain glow discharge, and utilizing Ar+The surface of the special-shaped light guide rod is bombarded by ions to remove impurities adsorbed on the surface and activate the surface of the special-shaped light guide rod by an oxide layer;
step 3), plating an aluminum oxide base coat; introducing oxygen into the coating device, melting and evaporating aluminum in a crucible in the coating device by emitting an electron beam through an electron gun, and simultaneously applying continuous direct current bias to the crucible to ionize the oxygen and aluminum vapor to form plasma cloud; then applying pulse direct current bias voltage to the special-shaped light guide rod, immersing the special-shaped light guide rod in the produced aluminum and oxygen plasmas, accelerating positive ions from all directions to the surface of the special-shaped light guide rod vertically and bombarding a densification film layer under the influence of the pulse direct current bias voltage to plate an aluminum oxide bottom layer, and after finishing plating, turning off an electron gun power supply, applying bias voltage to the crucible and the special-shaped light guide rod, and turning off oxygen;
step 4), plating a plated metal aluminum layer; introducing argon, continuously emitting electron beams through an electron gun to melt aluminum in a crucible in the coating device, evaporating, applying continuous direct-current bias voltage to the crucible, ionizing aluminum vapor to form plasma cloud, then applying pulse direct-current bias voltage to the special-shaped light guide rod to coat a metal aluminum layer, and after finishing the process, closing a power supply of the electron gun, the bias voltage applied to the crucible and the special-shaped light guide rod, and closing the argon;
step 5), plating an aluminum oxide protective layer; and preparing an aluminum oxide protective layer on the surface of the metal aluminum layer by adopting a step method of plating an aluminum oxide priming layer, thereby obtaining a finished product.
2. The method of claim 1, wherein in step 2), the inside of the coating apparatus is evacuated to 5 x 10-4Pa; after filling argon, the pressure was maintained at 5X 10-2Pa; and applying-200V pulse direct current bias to the special-shaped light guide rod, wherein the frequency is 200kHz, and the duty ratio is 30%.
3. The method of claim 1, wherein in step 3), the pressure of oxygen and argon is maintained at 1 x 10-3Pa。
4. The method for coating the reflective film on the outer surface of the fluoride-containing shaped light guide rod according to claim 1, wherein in the step 3), the voltage of the electron gun is selected to be 15kV and the current is 0.2A.
5. The method for coating the reflective film on the outer surface of the fluoride-containing special-shaped light guide rod as claimed in claim 1, wherein in the step 3), a continuous direct current bias of 100V is applied to the crucible; and applying a pulse direct current bias voltage of-500V to the special-shaped light guide rod, wherein the frequency is 250kHz, and the duty ratio is 30%.
6. The method for coating the reflective film on the outer surface of the fluoride-containing light guide rod as claimed in claim 1, wherein in the step 3), the time for coating the aluminum oxide primer layer is 1 minute, the time for coating the metal aluminum layer is 2 minutes, and the time for coating the aluminum oxide protective layer is 1 minute.
7. The method for coating the reflective film on the outer surface of the fluoride special-shaped light guide rod according to claim 1, wherein the coating device comprises an outer shell, a workpiece disc is hung in the outer shell and used for fixing the special-shaped light guide rod, a power supply assembly is arranged on the workpiece disc, one end of the power supply assembly is connected with the special-shaped light guide rod, the other end of the power supply assembly is connected with a pulse power supply, an electron beam evaporation crucible is arranged at the bottom in the outer shell and connected with a direct current power supply, and a gas charging port is further arranged in the outer shell;
and the outer shell is also provided with a microwave generator.
8. The method for coating the reflective film on the outer surface of the fluoride special-shaped light guide rod as claimed in claim 7, wherein the middle part of the workpiece tray is connected with the top of the outer shell through a hanger rod, the workpiece tray is provided with a sliding channel, the sliding channel is provided with a drill clamp, and the drill clamp clamps the special-shaped light guide rod through an internal three-jaw assembly.
9. The method for coating the reflective film on the outer surface of the fluoride special-shaped light guide rod as claimed in claim 8, wherein the drill clamp is of a hand-tightening structure, the front sleeve of the drill clamp is provided with an upper limiting disc, the upper limiting disc is provided with an external thread sleeve, the external thread sleeve penetrates through the sliding channel to be in threaded connection with the lower limiting disc, the special-shaped light guide rod penetrates through the external thread sleeve to be matched and fixed with the three-jaw component in the front sleeve, the rear sleeve of the drill clamp is internally provided with an electric connecting column, and the electric connecting column is connected with the power supply component.
10. The method of claim 9, wherein two unlocking posts are disposed on the bottom of the lower limiting plate, and a screw cap is disposed at the end of the electrical connection post and connected to a power supply module.
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| CN202110812080.0A CN113463037B (en) | 2021-07-19 | 2021-07-19 | Method for coating reflecting film on outer surface of fluoride special-shaped light guide rod |
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| CN202110812080.0A CN113463037B (en) | 2021-07-19 | 2021-07-19 | Method for coating reflecting film on outer surface of fluoride special-shaped light guide rod |
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