CN113460950B - Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof - Google Patents
Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof Download PDFInfo
- Publication number
- CN113460950B CN113460950B CN202110750535.0A CN202110750535A CN113460950B CN 113460950 B CN113460950 B CN 113460950B CN 202110750535 A CN202110750535 A CN 202110750535A CN 113460950 B CN113460950 B CN 113460950B
- Authority
- CN
- China
- Prior art keywords
- layer
- supporting layer
- electrode
- metal
- pdms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012544 monitoring process Methods 0.000 title claims abstract description 19
- 208000024172 Cardiovascular disease Diseases 0.000 title claims abstract description 16
- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- 229920001486 SU-8 photoresist Polymers 0.000 claims abstract description 125
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims abstract description 64
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 63
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims abstract description 63
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims abstract description 63
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 63
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 239000003792 electrolyte Substances 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims description 70
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 52
- 239000012530 fluid Substances 0.000 claims description 38
- 238000004528 spin coating Methods 0.000 claims description 22
- 238000004070 electrodeposition Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 239000002390 adhesive tape Substances 0.000 claims description 18
- 238000000059 patterning Methods 0.000 claims description 18
- 229920001940 conductive polymer Polymers 0.000 claims description 16
- 238000001259 photo etching Methods 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 13
- 210000003491 skin Anatomy 0.000 claims description 13
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 10
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 7
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000002243 precursor Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 238000009832 plasma treatment Methods 0.000 claims description 4
- 239000000741 silica gel Substances 0.000 claims description 4
- 229910002027 silica gel Inorganic materials 0.000 claims description 4
- 210000000434 stratum corneum Anatomy 0.000 claims description 4
- 229920000144 PEDOT:PSS Polymers 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 3
- 238000007731 hot pressing Methods 0.000 claims description 3
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 210000004207 dermis Anatomy 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 230000035515 penetration Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims 2
- 238000012986 modification Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 4
- 229910021607 Silver chloride Inorganic materials 0.000 abstract description 3
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- 230000007794 irritation Effects 0.000 abstract 1
- 239000004642 Polyimide Substances 0.000 description 19
- 229920001721 polyimide Polymers 0.000 description 19
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 239000002041 carbon nanotube Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 210000004243 sweat Anatomy 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/25—Bioelectric electrodes therefor
- A61B5/251—Means for maintaining electrode contact with the body
- A61B5/256—Wearable electrodes, e.g. having straps or bands
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/25—Bioelectric electrodes therefor
- A61B5/263—Bioelectric electrodes therefor characterised by the electrode materials
- A61B5/268—Bioelectric electrodes therefor characterised by the electrode materials containing conductive polymers, e.g. PEDOT:PSS polymers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/25—Bioelectric electrodes therefor
- A61B5/279—Bioelectric electrodes therefor specially adapted for particular uses
- A61B5/28—Bioelectric electrodes therefor specially adapted for particular uses for electrocardiography [ECG]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00166—Electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
- A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/14—Coupling media or elements to improve sensor contact with skin or tissue
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/16—Details of sensor housings or probes; Details of structural supports for sensors
- A61B2562/164—Details of sensor housings or probes; Details of structural supports for sensors the sensor is mounted in or on a conformable substrate or carrier
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Molecular Biology (AREA)
- Animal Behavior & Ethology (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Veterinary Medicine (AREA)
- Surgery (AREA)
- Biophysics (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Cardiology (AREA)
- Computer Hardware Design (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
Abstract
The invention discloses a flexible wearable heart electrode for cardiovascular disease monitoring and a preparation method thereof. Currently, standard commercial Ag/AgCl electrodes for ECG signal detection are primarily maintained with conductive paste to maintain good electrical conductivity between the electrode and the skin. However, such conductive paste may become dry with time, resulting in a change in electrode-tissue interface impedance and a drastic decrease in signal quality. The invention contemplates the use of PDMS and SU-8 as substrates for dry electrodes with low Young's modulus and high biocompatibility to improve wearing comfort by conformal attachment and reduced irritation. On the other hand, in order to improve the stability of signals, the hollow microneedle array is adopted to pierce the skin cuticle, and the interface impedance between the electrode and the tissue is reduced by combining electrochemical modification and electrolyte slow release, so that the quality and the stability of ECG signals are improved.
Description
Technical Field
The invention belongs to the technical field of MEMS sensors, and particularly relates to a flexible wearable heart electrode for cardiovascular disease monitoring and a preparation method thereof.
Background
Today, while wearable flexible ECG sensors have achieved miniaturization and wireless transmission, the use of everyday ECG recording systems is still limited by the discomfort and inconvenience of using wet electrodes to the patient, which puts new demands on ECG electrodes with high performance and good biocompatibility. Standard commercial Ag/AgCl electrodes for ECG signal detection maintain good conductivity between the electrode and the skin mainly by conductive gel. However, such conductive paste may become dry with time, resulting in a change in electrode-tissue interface impedance and a drastic decrease in signal quality. In addition, such conductive adhesives can also irritate the patient's skin, causing excessive discomfort to the patient. Furthermore, sweat is another factor that causes deterioration of wet electrode signals. These above problems make conventional Ag/AgCl electrodes unsuitable for routine and repeated ECG recordings in cardiovascular disease monitoring. Therefore, there is a need to develop a wearable flexible ECG dry electrode capable of 24-hour uninterrupted electrocardiographic monitoring, which addresses the need for high signal-to-noise ratio and high stability ECG signal acquisition in cardiovascular disease monitoring.
Yuki Yamamoto et al, university of Osaka, japan, in paper "Efficient Skin Temperature Sensor and Stable Gel-Less Sticky ECG Sensor for a Wearable Flexible Healthcare Patch" propose an adhesive ECG sensor based on Carbon Nanotubes (CNTs) and Polyethoxyethyleneimine (PEIE) doped PDMS composites. In the composite material, CNT mainly improves the conductive property of an ECG electrode, and PEIE mainly improves the adhesion property of the ECG electrode and skin. Although the quality of the recorded ECG signal can be improved by modulating the concentration of CNTs and PEIEs in the composite, the performance of such ECG electrodes is still affected by sweat and motion status. Afraiz Tariq Satti of korea university et al in paper Fabrication of Parylene-Coated Microneedle Array Electrode for Wearable ECG Device propose an ECG sensor based on SU-8 microneedle array, which realizes exercise electrocardiographic monitoring as well as long-term electrocardiographic monitoring by reducing electrode-tissue interface impedance by piercing the stratum corneum of the skin. However, the biocompatibility of such stainless steel-based SU-8 microneedle arrays has not been verified and thus has not been suitable for application on humans.
Disclosure of Invention
Aiming at the defects in the prior art, the invention utilizes MEMS micro-processing technology to form a hollow SU-8 micro-needle array on the SU-8 surface, adopts sputtering and electroplating to form a contact electrode point formed by metal and conductive polymer on the SU-8 micro-needle surface, and combines physical puncture, electrochemical modification and electrolyte release to realize the preparation of the low contact impedance ECG electrode.
The invention discloses a flexible wearable heart electrode for cardiovascular disease monitoring, which comprises an electrode part, a flexible substrate and a metal bonding pad. The electrode portion includes SU-8 microneedles and a support layer. The SU-8 micro-needle and the supporting layer are made of SU-8 or PI. An electrode position is arranged on the supporting layer; a plurality of SU-8 microneedles which are tapered are arranged on the electrode positions. The SU-8 microneedles are provided with fluid channels through the SU-8 microneedles and the support layer. The supporting layer is provided with a metal bonding pad. A metal layer is deposited on the support layer. The metal layer covers each SU-8 microneedle and forms a wire connecting the electrode position and the metal pad on the support layer. The surface of each SU-8 microneedle is provided with a conductive polymer. The supporting layer is attached to the PDMS flexible substrate. A fluid chamber is disposed in the PDMS flexible substrate. Electrolyte is stored in the fluid chamber and is communicated with the fluid pore canal on the SU-8 microneedle.
Preferably, the SU-8 microneedles are obtained by back-exposure on a support layer. The support layer and the PDMS flexible substrate were thermally bonded together by plasma treatment of the surface. Electroplating a layer of conductive polymer on the surface of the SU-8 microneedle by electrochemical deposition; the conductive polymer is PEDOT and PSS.
Preferably, the electrode position is in a circular shape with the diameter of 0.5-2 cm; the SU-8 microneedle is conical, the diameter of the bottom is 100-500 micrometers, and the height is 50-700 micrometers. The diameter of the fluidic channels in SU-8 microneedles is 10-100 microns. The thickness of the supporting layer is 5-100 micrometers, and the thickness of the PDMS flexible substrate is 0.1-2 millimeters.
Preferably, during use, the raised SU-8 microneedles penetrate the stratum corneum into the dermis, reducing the electrode-skin interface impedance by physical penetration. The fluid chamber inside the PDMS flexible substrate releases electrolyte to the skin through the fluid pore canal on the SU-8 micro needle, so that the conductive polymer on the SU-8 micro needle conducts electricity through ions and holes, and the interface impedance of the electrode and the skin is reduced.
Preferably, the conductive polymer is PEDOT: PSS, and is electroplated on the SU-8 micro-needle by electrochemical deposition.
Preferably, the material of the supporting layer is SU-8; the supporting layer and the PDMS flexible substrate are bonded together through hot pressing after plasma treatment on the surface.
Preferably, the material of the supporting layer is PI; the supporting layer and the PDMS flexible substrate are adhered together through silica gel.
Under the condition that the material of the supporting layer is SU-8, the preparation method of the flexible wearable heart electrode for monitoring cardiovascular diseases comprises the following steps:
1) PMMA was spin coated onto a quartz glass plate and cured to a sacrificial layer by heating.
2) And spin-coating SU-8 photoresist on the sacrificial layer and performing photoetching patterning to form a SU-8 supporting layer.
3) A layer of metal is deposited on the SU-8 support layer and patterned to form an opaque metal mask.
4) A layer of SU-8 photoresist was again spin coated on the metal deposited SU-8 support layer and back-exposed from the back side of the quartz glass plate.
5) And depositing a layer of metal on the SU-8 supporting layer and performing photoetching patterning to form SU-8 micro-needles, wires and metal pad structures.
6) A layer of water-soluble adhesive tape is stuck on the front surface of the quartz glass sheet, and the electrode part is released from the quartz glass sheet by the water-soluble adhesive tape.
7) And spin-coating a layer of SU-8 photoresist on another unused quartz glass sheet, and performing photoetching patterning to form a reverse mould structure of the PDMS.
8) And depositing a layer of parylene C on the surface of the reverse mould structure to serve as a release agent of the PDMS.
9) And spin-coating a layer of PDMS precursor on the front surface of the quartz glass, and heating and curing to form the fluid chamber structure.
10 The cured PDMS flexible substrate was released from the reverse mold structure and bonded with its opening facing up to another unused piece of quartz glass.
11 Oxygen plasma is used for respectively treating the surfaces of the PDMS flexible substrate and the SU-8 supporting layer, then the PDMS flexible substrate and the SU-8 supporting layer are attached together, and bonding is realized through pressurization and heating.
12 The bonded flexible wearable heart electrode is removed from the quartz glass sheet and then put into deionized water to dissolve out the water-soluble adhesive tape for release.
In the case that the material of the supporting layer is PI, the preparation method of the flexible wearable heart electrode for cardiovascular disease monitoring comprises the following steps:
1) PMMA was spin coated onto a quartz glass plate and cured to a sacrificial layer by heating.
2) And spin-coating PI photoresist on the sacrificial layer and performing photoetching patterning to form a PI supporting layer.
3) And depositing a layer of metal on the PI supporting layer and patterning to form an opaque metal mask.
4) A layer of SU-8 photoresist was again spin coated on the PI support layer of the deposited metal and back-exposed from the back side of the quartz glass plate.
5) And depositing a layer of metal on the PI supporting layer and carrying out photoetching patterning to form SU-8 micro-needles, wires and metal pad structures.
6) A layer of water-soluble adhesive tape is stuck on the front surface of the quartz glass sheet, and the electrode part is released from the quartz glass sheet by the water-soluble adhesive tape.
7) And spin-coating a layer of SU-8 photoresist on another unused quartz glass sheet, and performing photoetching patterning to form a reverse mould structure of the PDMS.
8) And depositing a layer of parylene C on the surface of the reverse mould structure to serve as a release agent of the PDMS.
9) And spin-coating a layer of PDMS precursor on the front surface of the quartz glass, and heating and curing to form the fluid chamber structure.
10 The cured PDMS flexible substrate was released from the reverse mold structure and bonded with its opening facing up to another unused piece of quartz glass.
11 Coating a layer of silica gel on the upper surface of the PDMS flexible substrate, and then adhering a PI supporting layer on the PDMS flexible substrate;
12 The bonded flexible wearable heart electrode is removed from the quartz glass sheet and then put into deionized water to dissolve out the water-soluble adhesive tape for release.
The invention has the beneficial effects that:
1. the preparation of the hollow SU-8 microneedle structure is realized by using a SU-8 or PI back exposure process, and the ECG electrode can pierce the stratum corneum and release electrolyte through the SU-8 microneedle, so that the contact impedance of the ECG electrode and the skin is reduced.
2. The invention uses electrochemical deposition to realize SU-8 microneedle surface modification, and can realize conduction between the ECG electrode and the skin through holes and ions through conductive polymer modification, thereby reducing the contact impedance of the ECG electrode and the skin.
3. According to the invention, PDMS is used as a supporting material of the ECG electrode, and the shape-preserving adhesiveness and biocompatibility of the ECG electrode can be improved by reducing Young modulus, so that the contact stability of the ECG electrode and skin is improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an ECG electrode according to the present invention;
FIG. 2 is a schematic view of the structure of the ECG electrode portion and the PDMS flexible substrate according to the present invention;
FIG. 3 is a graph showing the effect of the ECG electrode portion surface modified conductive polymer according to the present invention;
FIG. 4 is a flow chart of the process for preparing ECG electrodes according to the present invention.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Example 1
As shown in fig. 1, a flexible wearable heart electrode for cardiovascular disease monitoring comprises an electrode part 1, a PDMS flexible substrate 2 and a metal pad 3 which together form a heart electrode structure.
As shown in fig. 2, the electrode part 1 is composed of hollow SU-8 micro needles 1-1 and a SU-8 support layer 1-2 of the bottom layer. Three electrode positions are arranged on the SU-8 supporting layer 1-2; and each electrode position is provided with a plurality of tapered SU-8 micro-needles 1-1 which are uniformly distributed. Each SU-8 microneedle 1-1 is provided with a fluid channel extending through SU-8 microneedle 1-1 and SU-8 support layer 1-2.
Three metal pads 3 are provided on the SU-8 support layer 1-2. A metal layer is deposited on SU-8 support layer 1-2. The metal layer covers each SU-8 microneedle 1-1 and a plurality of wires are formed on SU-8 supporting layer 1-2. The metal layers of the SU-8 micro-needles 1-1 on the three electrode positions are respectively and electrically connected with the three metal bonding pads 3 through corresponding wires to form conductive paths.
As shown in FIG. 3, the surface of each SU-8 microneedle 1-1 is electroplated with a layer of conductive polymer (specifically PEDOT: PSS) by electrochemical deposition. PEDOT PSS is a conductive polymer with pseudocapacitive properties, which has both hole and ion conducting properties in the presence of an electrolyte.
The SU-8 supporting layer 1-2 is attached to the PDMS flexible substrate 2. The PDMS flexible substrate 2 is composed of a hollow fluid chamber 2-1 and a peripheral PDMS support layer 2-2. A plurality of fluid chambers 2-1 corresponding to the number of electrode sites are provided on the PDMS flexible substrate 2. The SU-8 supporting layer 1-2 and the PDMS flexible substrate 2 are bonded together by hot pressing after plasma treatment of the surface. The fluid chambers 2-1 are each aligned with a corresponding electrode site and communicate with each fluid channel on the corresponding electrode section 1. The electrolyte stored in the fluid chamber 2-1 can be released through the fluid channels on the SU-8 microneedles 1-1. Furthermore, only one fluid chamber 2-1 may be provided; and the fluid chamber 2-1 is connected to all three electrode sites.
The fluid chamber 2-1 contains an electrolyte. During the use process of the flexible wearable heart electrode, electrolyte can permeate out through a fluid pore canal on the SU-8 microneedle 1-1; the environment required by electrocardiosignal acquisition is provided, conductive adhesive does not need to be smeared, and a large-area wetting area cannot be generated, so that the electrocardiosignal acquisition process is more comfortable.
The specific preparation steps of the flexible wearable heart electrode for cardiovascular disease monitoring are as follows:
1) PMMA was spin coated on a quartz glass plate and heat cured under conditions of 110℃for 5 minutes, 150℃for 5 minutes, and 180℃for 10 minutes. This step process forms a sacrificial layer of ECG electrodes.
2) Spin-coating a 10 μm thick SU-8 (GM 1060) photoresist on the PMMA sacrificial layer, standing for 5 min, and pre-baking at 65deg.C for 3 min and 95 deg.C for 30 min. Exposing after the pre-baking is finished, wherein the exposure dose is 400mJ/cm 2 . Then, post-baking is carried out, wherein the post-baking temperature is 65 ℃ for 5 minutes, and 95 ℃ for 20 minutes. After 10 minutes of standing, the mixture was put into PGMEA (propylene glycol methyl ether acetate) and developed for 4.5 minutes. After the development is completed, hard baking is carried out; the hard baking temperature is 135 ℃, and the hard baking time is 2 hours. This step process forms the SU-8 support layer 1-2 of the ECG electrode.
3) And sequentially depositing a layer of metal Cr and a layer of metal Au on the SU-8 supporting layer, wherein the thicknesses of the metal Cr and the metal Au are respectively 20 nanometers and 200 nanometers. And spin-coating positive photoresist with the thickness of 5 micrometers on the SU-8 supporting layer, and carrying out photoetching patterning to form a photoresist mask of the metal layer. Then, the metal Au and the metal Cr are respectively patterned by adopting a wet etching technology. This process forms a back exposure mask for the hollow SU-8 microneedles.
4) And spin-coating a 50-micrometer thick SU-8 (GM 1060) photoresist on the SU-8 supporting layer after metal deposition, standing for 15 minutes, and then performing pre-baking at 65 ℃ for 15 minutes and 95 ℃ for 60 minutes. Back exposure is carried out after the pre-baking is finished, and the exposure dose is 650mJ/cm 2 . And then post-baking at 65 ℃ for 10 minutes and at 95 ℃ for 30 minutes. After 10 minutes of standing, the mixture was put into PGMEA and developed for 4 minutes. After the development is completed, hard baking is performed, the hard baking temperature is 135 ℃, and the hard baking time is 2 hours. This process forms SU-8 microneedle 1-1 with hollow microwells.
5) And sequentially depositing a layer of metal Cr and a layer of metal Au on the SU-8 supporting layer 1-2 with the SU-8 micro-needles, wherein the thicknesses of the metal Cr and the metal Au are respectively 20 nanometers and 200 nanometers. And spin-coating positive photoresist with the thickness of 5 micrometers on the metal layer, and carrying out photoetching patterning to form a photoresist mask of the metal layer. Then, the metal Au and the metal Cr are respectively patterned by adopting a wet etching technology. This step process forms the electrode portion 1, lead and pad structure of the ECG electrode.
6) A layer of water-soluble adhesive tape is stuck on the front surface of the quartz glass sheet, and the electrode part 1 of the ECG electrode is released from the quartz glass sheet by the water-soluble adhesive tape.
7) Another piece of quartz glass was spin coated with a 50 μm thick SU-8 (GM 1060) photoresist, and left to stand for 15 minutes, and then pre-baked at 65 ℃ for 15 minutes and 95 ℃ for 60 minutes. Back exposure is carried out after the pre-baking is finished, and the exposure dose is 650mJ/cm 2 . And then post-baking at 65 ℃ for 10 minutes and at 95 ℃ for 30 minutes. After 10 minutes of standing, the mixture was put into PGMEA and developed for 4 minutes. After the development was completed, hard baking was performed at 135℃for 2 hours. This step process forms the SU-8 reverse structure of PDMS of the fluid chamber.
8) A layer of 5 μm thick parylene C was deposited on the surface of the SU-8 master using a chemical vapor deposition system as a release agent for PDMS.
9) A 500 μm thick layer of PDMS precursor was spin coated on the front side of a quartz glass plate (i.e. SU-8 master) and cured by heating in an oven at 60 c for 4 hours. This step process forms a PDMS flexible substrate 2 structure with a fluid chamber 2-1.
10 The cured PDMS flexible substrate 2 was released from SU-8 reverse mold, followed by passivation of the surface of the DMS flexible substrate 2 with oxygen plasma, and finally bonding it to another unused quartz glass plate in a state in which the fluid chamber 2-1 was opened upward.
11 The surface of the electrode part 1 formed by the PDMS flexible substrate 2 and the SU-8 is respectively treated by oxygen plasma, then the PDMS supporting layer of the PDMS flexible substrate 2 and the SU-8 supporting layer of the electrode part 1 are attached together, and bonding is realized by pressurizing and heating, so that the flexible wearable heart electrode for cardiovascular disease monitoring is formed.
12 The bonded flexible wearable heart electrode is removed from the quartz glass sheet and then put into deionized water to dissolve out the water-soluble adhesive tape for release.
Example 2
A flexible wearable heart electrode for cardiovascular disease monitoring, the difference between this embodiment and embodiment 1 is that: SU-8 support layer 1-2 is replaced with PI support layer.
The specific preparation steps of the flexible wearable heart electrode for cardiovascular disease monitoring are as follows:
1) PMMA was spin coated on a quartz glass plate and heat cured under conditions of 110℃for 5 minutes, 150℃for 5 minutes, and 180℃for 10 minutes. This step process forms a sacrificial layer of ECG electrodes.
2) A Polyimide (PI) photoresist with the thickness of 10 micrometers is coated on the PMMA sacrificial layer in a spin mode, and after standing for 5 minutes, pre-baking is carried out, wherein the pre-baking temperature is 80 ℃ for 10 minutes, 120 ℃ for 30 minutes, 150 ℃ for 10 minutes, 180 ℃ for 10 minutes and 220 ℃ for 40 minutes. This step process forms the PI support layer of the ECG electrode.
3) And sequentially depositing a layer of metal Cr and a layer of metal Au on the PI supporting layer, wherein the thicknesses of the metal Cr and the metal Au are respectively 20 nanometers and 200 nanometers. And spin-coating positive photoresist with the thickness of 5 micrometers on the PI supporting layer, and carrying out photoetching patterning to form a photoresist mask of the metal layer. Then, the metal Au and the metal Cr are respectively patterned by adopting a wet etching technology. This process forms a backside exposure mask for the hollow microporous structure of SU-8 microneedles.
4) And spin-coating a 50-micrometer thick SU-8 (GM 1060) photoresist on the PI supporting layer after metal deposition, standing for 15 minutes, and then performing pre-baking at 65 ℃ for 15 minutes and 95 ℃ for 60 minutes. Back exposure is carried out after the pre-baking is finished, and the exposure dose is 650mJ/cm 2 . And then post-baking at 65 ℃ for 10 minutes and at 95 ℃ for 30 minutes. After 10 minutes of standing, the mixture was put into PGMEA and developed for 4 minutes. After the development is completed, hard baking is performed, the hard baking temperature is 135 ℃, and the hard baking time is 2 hours. This process forms SU-8 microneedle structures with hollow micropores.
5) A stainless steel hard mask prepared by laser cutting is placed on a PI supporting layer with SU-8 micro-needles, and then a layer of metal Cr and a layer of metal Au are sequentially deposited, wherein the thicknesses of the metal Cr and the metal Au are respectively 20 nanometers and 200 nanometers. The metal Au and metal Cr are then patterned after the stainless steel hard mask is removed from the substrate. This step process forms the electrode portions, leads and pad structures of the ECG electrode.
6) A layer of water-soluble adhesive tape is stuck on the front surface of the quartz glass sheet, and the electrode part is released from the quartz glass sheet by the water-soluble adhesive tape.
7) Another piece of quartz glass is taken, a layer of SU-8 (GM 1060) photoresist with the thickness of 50 microns is coated on the quartz glass in a spin mode, and after standing for 15 minutes, the quartz glass is subjected to pre-baking at the temperature of 65 ℃ for 15 minutes and at the temperature of 95 ℃ for 60 minutes. Back exposure is carried out after the pre-baking is finished, and the exposure dose is 650mJ/cm 2 . And then post-baking at 65 ℃ for 10 minutes and at 95 ℃ for 30 minutes. After 10 minutes of standing, the mixture was put into PGMEA and developed for 4 minutes. After the development was completed, hard baking was performed at 135℃for 2 hours. This step process forms the SU-8 reverse structure of PDMS of the fluid chamber.
8) A layer of 5 μm thick parylene C was deposited on the surface of the SU-8 master using a chemical vapor deposition system as a release agent for PDMS.
9) A 500 μm thick layer of PDMS precursor was spin coated on the front side of the quartz glass plate (i.e. on SU-8 master) and cured by heating in an oven at 60 ℃ for 4 hours. This step process forms a PDMS flexible substrate 2 structure with a fluid chamber 2-1.
10 The cured PDMS flexible substrate 2 was released from SU-8 master and subsequently bonded to another unused piece of quartz glass with the fluid chamber 2-1 open upwards.
11 A layer of silica gel is coated on the upper surface of the PDMS flexible substrate 2, and then the electrode part 1 is stuck on the PDMS flexible substrate 2 in a state that the PI support layer is downward, and is left to stand for 24 hours for curing at normal temperature.
12 The bonded flexible wearable heart electrode is removed from the quartz glass sheet and then put into deionized water to dissolve out the water-soluble adhesive tape to realize release.
Claims (6)
1. A method for preparing a flexible wearable heart electrode for cardiovascular disease monitoring, which is characterized by comprising the following steps: the manufactured flexible wearable heart electrode comprises an electrode part (1), a PDMS flexible substrate and a metal bonding pad (3); the electrode part (1) comprises SU-8 micro-needles (1-1) and a supporting layer (1-2); the SU-8 micro needle (1-1) and the supporting layer (1-2) are made of SU-8; an electrode position is arranged on the supporting layer (1-2); a plurality of SU-8 microneedles (1-1) which are tapered are arranged on the electrode position; the SU-8 micro-needle (1-1) is provided with a fluid duct penetrating through the SU-8 micro-needle (1-1) and the supporting layer (1-2); a metal bonding pad (3) is arranged on the supporting layer (1-2); a metal layer is deposited on the supporting layer (1-2); the metal layer covers each SU-8 microneedle (1-1), and leads for connecting electrode positions and the metal pads (3) are formed on the supporting layer (1-2); the surface of each SU-8 microneedle (1-1) is provided with a conductive polymer; the supporting layer (1-2) is attached to the PDMS flexible substrate (2); a fluid chamber (2-1) is arranged in the PDMS flexible substrate (2); electrolyte is stored in the fluid chamber (2-1) and is communicated with a fluid pore canal on the SU-8 microneedle;
the preparation method comprises the following steps:
1) Spin-coating PMMA on a quartz glass sheet and heating and curing the PMMA into a sacrificial layer;
2) Spin-coating SU-8 photoresist on the sacrificial layer and performing photoetching patterning to form an SU-8 supporting layer;
3) Depositing a layer of metal on the SU-8 support layer and patterning to form a light-tight metal mask;
4) Spin-coating a layer of SU-8 photoresist on the SU-8 supporting layer deposited with metal, and performing back exposure from the back surface of the quartz glass sheet;
5) Depositing a layer of metal on the SU-8 supporting layer and performing photoetching patterning to form SU-8 micro-needles, wires and metal pad structures;
6) Adhering a layer of water-soluble adhesive tape on the front surface of the quartz glass sheet, and releasing the electrode part from the quartz glass sheet by using the water-soluble adhesive tape;
7) Spin coating a layer of SU-8 photoresist on another unused quartz glass sheet and performing photoetching patterning to form a reverse mould structure of PDMS;
8) Depositing a layer of parylene C on the surface of the reverse mould structure to serve as a release agent of PDMS;
9) Spin coating a layer of PDMS precursor on the front surface of quartz glass, and heating and curing to form a fluid chamber (2-1) structure;
10 Releasing the cured PDMS flexible substrate (2) from the reverse mould structure and bonding the opening of the substrate upwards to another unused quartz glass sheet;
11 Oxygen plasma is used for respectively treating the surfaces of the PDMS flexible substrate (2) and the SU-8 supporting layer, then the PDMS flexible substrate (2) and the SU-8 supporting layer are attached together, and bonding is realized through pressurization and heating;
12 The bonded flexible wearable heart electrode is removed from the quartz glass sheet and then put into deionized water to dissolve out the water-soluble adhesive tape for release.
2. The method of manufacturing according to claim 1, characterized in that: the SU-8 microneedle is obtained by performing back exposure on the supporting layer (1-2); the supporting layer and the PDMS flexible substrate (2) are bonded together through hot pressing after plasma treatment of the surface; electroplating a layer of conductive polymer on the surface of the SU-8 microneedle by electrochemical deposition; the conductive polymer is PEDOT and PSS.
3. The method of manufacturing according to claim 1, characterized in that: the electrode position is in a round shape with the diameter of 0.5-2 cm; the SU-8 microneedle (1-1) is conical, the diameter of the bottom is 100-500 micrometers, and the height is 50-700 micrometers; the diameter of the fluid pore canal in the SU-8 microneedle is 10-100 micrometers; the thickness of the supporting layer is 5-100 micrometers, and the thickness of the PDMS flexible substrate is 0.1-2 millimeters.
4. The method of manufacturing according to claim 1, characterized in that: in use, the raised SU-8 microneedles penetrate the stratum corneum into the dermis, reducing the electrode-skin interface impedance by physical penetration; the fluid chamber inside the PDMS flexible substrate releases electrolyte to the skin through the fluid pore canal on the SU-8 micro needle, so that the conductive polymer on the SU-8 micro needle conducts electricity through ions and holes, and the interface impedance of the electrode and the skin is reduced.
5. The method of manufacturing according to claim 1, characterized in that: the conductive polymer is PEDOT: PSS, and is electroplated on the SU-8 micro-needle (1-1) by means of electrochemical deposition.
6. A method for preparing a flexible wearable heart electrode for cardiovascular disease monitoring, which is characterized by comprising the following steps: the manufactured flexible wearable heart electrode comprises an electrode part (1), a flexible substrate and a metal bonding pad (3); the electrode part (1) comprises SU-8 micro-needles (1-1) and a supporting layer (1-2); the SU-8 microneedle (1-1) is made of SU-8; an electrode position is arranged on the supporting layer (1-2); a plurality of SU-8 microneedles (1-1) which are tapered are arranged on the electrode position; the SU-8 micro-needle (1-1) is provided with a fluid duct penetrating through the SU-8 micro-needle (1-1) and the supporting layer (1-2); a metal bonding pad (3) is arranged on the supporting layer (1-2); a metal layer is deposited on the supporting layer (1-2); the metal layer covers each SU-8 microneedle (1-1), and leads for connecting electrode positions and the metal pads (3) are formed on the supporting layer (1-2); the surface of each SU-8 microneedle (1-1) is provided with a conductive polymer; the supporting layer (1-2) is attached to the PDMS flexible substrate (2); a fluid chamber (2-1) is arranged in the PDMS flexible substrate (2); electrolyte is stored in the fluid chamber (2-1) and is communicated with a fluid pore canal on the SU-8 microneedle;
the material of the supporting layer is PI; the preparation method comprises the following steps:
1) Spin-coating PMMA on a quartz glass sheet and heating and curing the PMMA into a sacrificial layer;
2) Spin-coating PI photoresist on the sacrificial layer and performing photoetching patterning to form a PI supporting layer;
3) Depositing a layer of metal on the PI supporting layer and patterning to form a light-tight metal mask;
4) Spin-coating a layer of SU-8 photoresist on the PI supporting layer deposited with metal, and performing back exposure from the back of the quartz glass sheet;
5) Depositing a layer of metal on the PI supporting layer and performing photoetching patterning to form SU-8 micro-needles, wires and metal pad structures;
6) Adhering a layer of water-soluble adhesive tape on the front surface of the quartz glass sheet, and releasing the electrode part from the quartz glass sheet by using the water-soluble adhesive tape;
7) Spin coating a layer of SU-8 photoresist on another unused quartz glass sheet and performing photoetching patterning to form a reverse mould structure of PDMS;
8) Depositing a layer of parylene C on the surface of the reverse mould structure to serve as a release agent of PDMS;
9) Spin coating a layer of PDMS precursor on the front surface of quartz glass, and heating and curing to form a fluid chamber (2-1) structure;
10 Releasing the cured PDMS flexible substrate (2) from the reverse mould structure and bonding the opening of the substrate upwards to another unused quartz glass sheet;
11 Coating a layer of silica gel on the upper surface of the PDMS flexible substrate (2), and then adhering a PI supporting layer on the PDMS flexible substrate (2);
12 The bonded flexible wearable heart electrode is removed from the quartz glass sheet and then put into deionized water to dissolve out the water-soluble adhesive tape for release.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110750535.0A CN113460950B (en) | 2021-07-02 | 2021-07-02 | Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110750535.0A CN113460950B (en) | 2021-07-02 | 2021-07-02 | Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113460950A CN113460950A (en) | 2021-10-01 |
| CN113460950B true CN113460950B (en) | 2024-04-02 |
Family
ID=77877490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110750535.0A Active CN113460950B (en) | 2021-07-02 | 2021-07-02 | Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113460950B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114010198A (en) * | 2021-11-11 | 2022-02-08 | 杭州电子科技大学温州研究院有限公司 | High-density self-insulating flexible microneedle electrode and preparation method thereof |
| CN114391852B (en) * | 2022-02-23 | 2024-05-31 | 杭州电子科技大学 | Flexible multi-mode signal collector, and preparation method and application thereof |
| CN114532997B (en) * | 2022-02-23 | 2024-09-24 | 杭州电子科技大学 | Flexible temperature sensor comprising microstructure and preparation method |
| CN117224129B (en) * | 2023-11-15 | 2024-03-26 | 之江实验室 | Electrode, preparation method and application thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100771522B1 (en) * | 2006-11-17 | 2007-10-30 | 한국과학기술원 | Conducting polymer-based microneedle electrode sheet and the manufacturing method thereof |
| CN102499667A (en) * | 2011-10-20 | 2012-06-20 | 中国科学院半导体研究所 | Flexible skin surface dry electrode and preparation method thereof |
| CN206714755U (en) * | 2016-11-25 | 2017-12-08 | 向卓林 | A kind of microneedle electrodes |
| CN109875557A (en) * | 2019-02-03 | 2019-06-14 | 浙江荷清柔性电子技术有限公司 | Array micropin formula flexibility electromyographic electrode and preparation method thereof |
| CN109998533A (en) * | 2019-01-11 | 2019-07-12 | 北京大学 | A kind of flexibility microneedle electrodes array apparatus and preparation method |
| CN110787361A (en) * | 2019-10-30 | 2020-02-14 | 西北工业大学 | Hollow inclined metal microneedle array and manufacturing method thereof based on SU-8 mold |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6663820B2 (en) * | 2001-03-14 | 2003-12-16 | The Procter & Gamble Company | Method of manufacturing microneedle structures using soft lithography and photolithography |
| KR101605963B1 (en) * | 2014-09-16 | 2016-03-24 | 포항공과대학교 산학협력단 | micro-needle and sensor for detecting nitrogen monooxide comprising the same |
-
2021
- 2021-07-02 CN CN202110750535.0A patent/CN113460950B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100771522B1 (en) * | 2006-11-17 | 2007-10-30 | 한국과학기술원 | Conducting polymer-based microneedle electrode sheet and the manufacturing method thereof |
| CN102499667A (en) * | 2011-10-20 | 2012-06-20 | 中国科学院半导体研究所 | Flexible skin surface dry electrode and preparation method thereof |
| CN206714755U (en) * | 2016-11-25 | 2017-12-08 | 向卓林 | A kind of microneedle electrodes |
| CN109998533A (en) * | 2019-01-11 | 2019-07-12 | 北京大学 | A kind of flexibility microneedle electrodes array apparatus and preparation method |
| CN109875557A (en) * | 2019-02-03 | 2019-06-14 | 浙江荷清柔性电子技术有限公司 | Array micropin formula flexibility electromyographic electrode and preparation method thereof |
| CN110787361A (en) * | 2019-10-30 | 2020-02-14 | 西北工业大学 | Hollow inclined metal microneedle array and manufacturing method thereof based on SU-8 mold |
Non-Patent Citations (1)
| Title |
|---|
| Yuanfang Chen等.Poly(3,4-ethylenedioxythiophene) (PEDOT) as interface material forimproving electrochemical performance of microneedles array-baseddry electrode.Sensors and Actuators B: Chemical.2013,747-756. * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113460950A (en) | 2021-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113460950B (en) | Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof | |
| US20240245893A1 (en) | Closed-loop actuating and sensing epidermal systems | |
| CN109044326B (en) | Printing technology-based fully-flexible dry electrode and preparation method thereof | |
| CN108553102B (en) | Flexible stretchable multichannel convex surface muscle electrode and preparation method thereof | |
| WO2021093789A1 (en) | Wristband-type biological signal acquisition device and manufacturing method therefor | |
| CN108956737B (en) | Flexible micro- needle sensor and preparation method thereof, 3 D stereo shape electrode and its packaging body | |
| CN109998533B (en) | Flexible microneedle electrode array device and preparation method | |
| Ledochowitsch et al. | Fabrication and testing of a large area, high density, parylene MEMS µECoG array | |
| CN111657937A (en) | Three-dimensional flexible neural microelectrode based on self-expanding hydrogel and preparation method thereof | |
| JP2008142541A (en) | Self-adhering electrode and manufacturing method thereof | |
| CN102499667A (en) | Flexible skin surface dry electrode and preparation method thereof | |
| WO2021093788A1 (en) | Headband-type biological signal acquisition device and preparation method therefor | |
| Wang et al. | Robust tattoo electrode prepared by paper-assisted water transfer printing for wearable health monitoring | |
| Rachim et al. | A scalable laser‐centric fabrication of an epidermal cardiopulmonary patch | |
| Lozano et al. | Fabrication and characterization of a microneedle array electrode with flexible backing for biosignal monitoring | |
| CN112587140B (en) | Self-attaching bionic octopus sucking disc micro-nano structure dry electrode | |
| CN219720705U (en) | Microneedle array electrode | |
| CN112657053A (en) | Implanted double-sided electrode and preparation method thereof | |
| CN113133770B (en) | Flexible electrode and preparation method and application thereof | |
| KR102483266B1 (en) | Skin attachment electrode, preparing method thereof, and epidermal electronics including the same | |
| Hu et al. | Stretchable and printable medical dry electrode arrays on textile for electrophysiological monitoring | |
| CN211511793U (en) | Head-mounted biological signal acquisition device | |
| CN114469109A (en) | Microneedle brain electrode based on organic metal porous polymer and manufacturing method thereof | |
| Wang et al. | Multi-Channel flexible microneedle electrode array (MNEA) for high-density surface EMG recording | |
| CN118356196A (en) | Flexible stretchable microneedle electrode for facial electromyographic signal acquisition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |